Vacuum pump with abatement function

Abstract

The present invention more safely performs abatement. Provided is a vacuum pump with abatement function including: a dry pump that evacuates exhaust gas from a tool; an abatement unit that treats the exhaust gas evacuated by the dry pump; a connection pipe that connects the dry pump and the abatement unit; and a cover member that covers the connection pipe.

Description

Vacuum pump with pest control function

[0001] The present invention relates to a vacuum pump with a pest control function.

[0002] In the manufacturing processes of semiconductor devices, liquid crystal panels, solar cells, etc., process gases are introduced into a tool (process chamber) evacuated to a vacuum, and various processes such as etching and CVD processes are performed. Also, such tools are periodically cleaned by flowing a cleaning gas.

[0003] The exhaust gases of these process gases and cleaning gases contain silane-based gases (SiH4, TEOS, etc.), halogen-based gases (NF3, ClF3, SF6, CHF3, etc.), PFC gases (CF4, C2F6, etc.), etc., and are harmful. Therefore, it is not preferable to directly release them into the atmosphere. Thus, it is necessary to detoxify these exhaust gases by a pest control system installed on the downstream side of the tool.

[0004] Patent Document 1 discloses a vacuum pump with a pest control function for performing such detoxification.

[0005] Japanese Unexamined Patent Application Publication No. 2017 - 223215

[0006] The problem of the present invention is to perform pest control more safely or to provide a novel technology different from the invention described in the above prior art document.

[0007] As an example, the following solution means are provided.

[0008] [1] A dry pump for vacuum exhausting exhaust gas from a tool, a pest control unit for detoxifying the exhaust gas vacuum-exhausted by the dry pump, a connecting pipe for connecting the dry pump and the pest control unit, and a cover member for covering the connecting pipe, a vacuum pump with a pest control function.

[0009] [2] The cover member is provided so that even when exhaust gas leaks from the connection part between the dry pump and the connecting pipe or the connection part between the pest control unit and the connecting pipe, the leaked exhaust gas does not leak to the outside of the vacuum pump with the pest control function, the vacuum pump with the pest control function according to [1].

[0010] [3] The vacuum pump with aerosol function according to [1] or [2], wherein the dry pump has a first housing, the aerosol unit has a second housing, and the cover member is provided between the first housing and the second housing.

[0011] [4] The vacuum pump with aerosol function according to [3], wherein the first housing is provided with a first exhaust port connected to an exhaust duct, the second housing is provided with a second exhaust port connected to an exhaust duct, and the cover member is provided so that even if exhaust gas leaks from the connection point between the connecting pipe and the dry pump, and / or the connection point between the connecting pipe and the aerosol unit, it will not leak to the outside of the first housing and the second housing from locations other than the first exhaust port and the second exhaust port.

[0012] [5] A vacuum pump with a detoxification function according to [3] or [4], comprising a mounting base, wherein the first housing is positioned above the mounting base, the second housing is positioned below the mounting base, and the connecting pipe is provided passing through the mounting base.

[0013] [6] The vacuum pump with a detoxification function according to [5], wherein a part of the cover member is provided between the stand described above and the first housing, and the other part of the cover member is provided between the stand described above and the second housing.

[0014] [7] The vacuum pump with aerosolization function according to [6], wherein casters are provided on the lower part of the first housing, and the other part of the cover member is provided on the outside of the casters.

[0015] [8] The vacuum pump with aerosolization function according to [6], wherein casters are provided on the lower part of the first housing, and the other part of the cover member is provided on the inside of the casters.

[0016] [9] The mounting base is provided with a hole that connects a space determined by a part of the cover member, the lower surface of the first housing, and the upper surface of the mounting base described above, and a space determined by another part of the cover member, the upper surface of the second housing, and the lower surface of the mounting base described above, the vacuum pump with a detoxification function according to any one of [6] to [8].

[0017]

[10] The first housing is provided with a first opening that connects the internal space of the first housing with the internal space of the cover member, the vacuum pump with a detoxification function according to any one of [3] to [9].

[0018]

[11] The vacuum pump with a detoxification function according to any one of [3] to

[10] , wherein the second housing is provided with a second opening that connects the internal space of the second housing with the internal space of the cover member.

[0019] A diagram showing the schematic configuration of a vacuum pump with aerosolization function according to one embodiment. A diagram showing the schematic configuration of a vacuum pump with aerosolization function according to a modified example of Figure 1. A diagram illustrating the gas flow. A diagram illustrating the gas flow.

[0020] Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

[0021] Figure 1 shows a schematic configuration of a vacuum pump with aerosolization function according to one embodiment. The vacuum pump with aerosolization function aerosolizes exhaust gas from a tool (not shown) and comprises a dry pump 1 and an aerosolization unit 2. In this embodiment, the dry pump 1 is positioned directly above the aerosolization unit 2. As an example, the dry pump 1 is placed on a table (mounting platform) 61 that covers the aerosolization unit 2. This reduces the overall footprint of the device compared to placing the dry pump 1 on the floor. In addition, the piping connecting the dry pump 1 and the aerosolization unit 2 can be shortened, thereby reducing piping costs. A detailed explanation follows below.

[0022] The dry pump 1 includes a booster pump (BP) 11, one or more main pumps (MP) 12, a housing 13, etc., and evacuates exhaust gas from a tool (not shown) under vacuum.

[0023] The booster pump 11, connected to the tool (not shown), is a high-capacity pump capable of vacuum-evacuating a large flow rate of exhaust gas from the tool. The main pump 12, located downstream of the booster pump 11, compresses the exhaust gas from the booster pump 11 at each stage to increase the pressure and exhaust it. This ensures a vacuum level inside the tool (not shown). The exhaust gas from the main pump 12 is supplied to the abatement unit 2 via a connecting pipe 3 that penetrates the table 61.

[0024] The housing 13 houses the booster pump 11 and the main pump 12. The housing 13 may be formed from a frame and side, top, and bottom covers (sheet metal) fitted into the frame. The housing 13 is provided with an exhaust port 1a on its top surface, for example. The housing 13 is positioned above the table 61, and there is a space between the bottom surface of the housing 13 and the table 61. An opening 1c is provided on the bottom surface of the housing 13, for example, to connect this space with the internal space of the housing 13. It is desirable that casters 63 be provided on the bottom of the housing 13 so that the dry pump 1 can be easily moved.

[0025] The enclosure 13 is configured such that gas cannot pass between the inside and outside of the enclosure 13 in areas other than the exhaust port 1a and the opening 1c. Furthermore, the exhaust port 1a is connected to the exhaust duct 62 via the exhaust pipe 1b, creating negative pressure inside the enclosure 13. The exhaust duct 62 is a piece of equipment installed in a factory (such as a semiconductor device manufacturing plant).

[0026] The detoxification unit 2 includes a combustion unit 21, a tank 22, a water rinsing tower 23, and a housing 24, and detoxifies the exhaust gas. Specifically, the combustion unit 21 burns toxic and flammable gases contained in the exhaust gas by, for example, adding air or oxygen to the exhaust gas and burning it. After combustion, the exhaust gas is led to a tank 22 containing water for cooling and removal of powders contained in the exhaust gas after combustion. Subsequently, in a water rinsing tower 23 filled with resin components, water is sprayed into the exhaust gas to remove water-soluble gases. The detoxified gas is then discharged into the exhaust line of the user's factory.

[0027] The housing 24 houses the combustion section 21, the tank 22, and the flush tower 23. The housing 24 is positioned below the table 61, and there is a space between the top surface of the housing 24 and the table 61. An opening 2c is provided, for example, on the top surface of the housing 24, which connects this space to the internal space of the housing 24. In addition, the housing 24 is provided with an exhaust port 2a, for example, on its side.

[0028] The housing 24 is configured such that gas cannot move between the inside and outside of the housing 24 in areas other than the exhaust port 2a and the opening 2c. Furthermore, since the exhaust port 2a is connected to the exhaust duct 62 via the exhaust pipe 2b, the inside of the housing 24 is under negative pressure.

[0029] The upper end of the connecting pipe 3 is connected to a connection that penetrates the lower surface of the housing 13 of the dry pump 1. The lower end of the connecting pipe 3 is connected to a connection that penetrates the upper surface of the housing 24 of the abatement unit 2. The connecting pipe 3 also penetrates the table 61.

[0030] One of the features of this embodiment is that the vacuum pump with aerosolization function is equipped with a cover member 4 that covers the connecting pipe 3. The cover member 4 is provided so that even if exhaust gas leaks from the connection between the dry pump 1 and the connecting pipe 3 or from the connection between the aerosolization unit 2 and the connecting pipe 3, the leaked exhaust gas will not leak to the outside of the vacuum pump with aerosolization function.

[0031] As a specific example of configuration, the cover member 4 is provided between the housing 13 of the dry pump 1 and the housing 24 of the abatement unit 2. As a more specific example of configuration, the cover member 4 has an upper portion 41 provided between the table 61 and the housing 13, and a lower portion 42 provided between the table 61 and the housing 24.

[0032] The upper portion 41 covers the area between the table 61 and the housing 13 in the connecting pipe 3. The lower end of the upper portion 41 is in close contact with the upper surface of the table 61, and gas cannot pass between them. Similarly, the upper end of the upper portion 41 is in close contact with the lower surface of the housing 13. The space defined by the upper portion 41, the upper surface of the table 61, and the lower surface of the housing 13 (hereinafter referred to as the "upper space") is in communication with the internal space of the housing 13 through the opening 1c. The inside of the upper portion 41 is connected to the internal space of the housing 13, which is under negative pressure, through the opening 1c, so the inside of the upper portion 41 is under negative pressure. Therefore, even if there is a gap between the upper portion 41 and the table 61, gas leaking from the connection point of the connecting pipe 3 will not escape outside the device through that gap.

[0033] The upper portion 41 may be a skirt provided on the outside of the caster 63 as shown in Figure 1, or it may be provided on the inside of the caster 63 as shown in the modified example in Figure 2.

[0034] The lower portion 42 covers the area between the table 61 and the housing 24 in the connecting pipe 3. The lower end of the lower portion 42 is in close contact with the upper surface of the housing 24, and gas cannot pass between them. Similarly, the upper end of the lower portion 42 is in close contact with the lower surface of the table 61. The space defined by the lower portion 42, the lower surface of the table 61, and the upper surface of the housing 24 (hereinafter referred to as the "lower space") is in communication with the internal space of the housing 24 through the opening 2c. The inside of the lower portion 42 is connected to the internal space of the housing 24, which is under negative pressure, via the opening 2c, so the inside of the lower portion 42 is under negative pressure. Therefore, even if there is a gap between the lower portion 42 and the table 61, gas leaking from the connection point of the connecting pipe 3 cannot escape outside the device through that gap.

[0035] Furthermore, the table 61 may be provided with a hole 61a that connects the upper space and the lower space.

[0036] The connecting pipe 3 is connected to the exhaust port of the dry pump 1 with a clamp or flange joint, and to the intake port of the abatement unit 2 with a clamp or flange joint. There is a possibility of gas leakage from this connection point.

[0037] According to this embodiment, even if gas leaks from the connection point between the dry pump 1 and the connecting pipe 3 (indicated by the star in Figure 3), the leaked gas is discharged from the exhaust pipe 1b to the exhaust duct 62 through the opening 1c, the inside of the housing 13, and the exhaust port 1a. Furthermore, if a hole 61a is provided in the table 61, a portion of the leaked gas is discharged from the exhaust pipe 2b to the exhaust duct 62 through the hole 61a, the opening 2c, the inside of the housing 24, and the exhaust port 2a (see Figure 3). In this way, by providing the cover member 4, the leaked gas is exhausted into the exhaust duct 62 without leaking to the outside of the vacuum pump with abatement function.

[0038] Furthermore, even if gas leaks from the connection point between the abatement unit 2 and the connecting pipe 3 (indicated by the star in Figure 4), the leaked gas will pass through the opening 2c, the inside of the housing 24, and the exhaust port 2a, and be discharged from the exhaust pipe 2b to the exhaust duct 62. Also, if a hole 61a is provided in the table 61, some of the leaked gas will pass through the hole 61a, the opening 1c, the inside of the housing 13, and the exhaust port 1a, and be discharged from the exhaust pipe 1b to the exhaust duct 62 (see Figure 4). In this way, by providing the cover member 4, the leaked gas will not leak to the outside of the vacuum pump with abatement function, but will be exhausted into the exhaust duct 62.

[0039] Although Figure 1 shows an example where there is one connecting pipe 3, if there are multiple connecting pipes 3, the cover member 4 may be provided to cover all of the connecting pipes 3 together, or multiple cover members 4 may be provided to cover each of the connecting pipes 3.

[0040] Thus, according to this embodiment, since the cover member 4 is provided, even if gas leaks, the risk of it leaking outside the vacuum pump with aerosolization function is reduced, and safety is improved.

[0041] The functions and effects related to the table 61 will now be explained. It is desirable that casters 61b be provided on the bottom of the legs of the table 61. The casters 61b allow the table 61 to be moved by pushing it like a trolley. If a stopper (not shown) is used on the casters 61b at the installation location of the table 61, the table 61 can be prevented from moving.

[0042] By making the table 61 movable, the following problems can be solved. Usually, in the area where the pest control device and the dry pump are installed, many other devices are installed, and there may be cases where the working space for the operator cannot be sufficiently secured. When trying to place a dry pump weighing 100 kg or more on the table 61, it is necessary to use a lifter. However, in a place where the working space cannot be sufficiently secured, there may be cases where the lifter cannot be used or the safety of the operator cannot be ensured when using the lifter.

[0043] By using the movable table 61, in an area where a working space can be secured, such as the factory entrance, the dry pump 1 can be pre-placed on the table 61 and then the table 61 can be pushed to move the table 61 and the dry pump to the installation location. Therefore, the operator does not need to use a lifter at the installation location of the dry pump 1. Furthermore, since the table 61 can be used as a trolley, there is no need to prepare a trolley in advance for moving the dry pump 1 from the factory entrance to the installation location.

[0044] Also, when viewed from above, the upper surface of the table 61 has a larger projected area than the housing 24 of the pest control unit 2, and a large area can be secured. Thus, even if the dry pump 1 is installed on the upper surface of the table 61, there is still some space on the upper surface of the table 61. The operator can place the tools (such as a driver) he or she uses in this extra space. Therefore, because of the presence of the table 61, there is no need to separately prepare a stand or the like for placing the tools, and the working efficiency of the operator in the installation work of the dry pump 1 and the pest control unit 2 can be improved.

[0045] Since the length of the legs of the table 61 is about 1 m, a heavy dry pump 1 weighing 500 kg or more will be installed at a position 1 m or more above the pest control unit 2. When the dry pump is installed on this table 61, there is a possibility that the dry pump 1 may fall if it tilts due to an earthquake or the like. By installing the dry pump 1 on this table 61, the tipping angle of the table 61 can be made larger than the tipping angle of the dry pump alone, so the safety is improved.

[0046] Further, when adjusting bolts are provided at the bottoms of the four legs of the table 61, the vertical position of the dry pump 1 can be finely adjusted with these adjusting bolts. When attaching and detaching the connecting pipe 3 that connects the dry pump 1 and the pest control unit 2, even when a thin-walled flexible tube cannot be used for the connecting pipe 3 for safety reasons in order to take the interval for inserting the centering of the joint part, the connecting pipe can be detached and attached by raising and lowering the adjusting bolts.

[0047] Based on the above description, those skilled in the art may be able to conceive of additional effects and various modifications of the present invention, but the aspects of the present invention are not limited to the individual embodiments described above. For example, inventions that take out only a part of each embodiment or inventions that combine a plurality of embodiments are naturally assumed. Various additions, changes, and partial deletions are possible without departing from the conceptual ideas and spirits of the present invention derived from the content defined in the claims and their equivalents.

[0048] For example, what is described as one device (or member, the same shall apply hereinafter) in this specification (including what is depicted as one device in the drawings) may be realized by a plurality of devices. Conversely, what is described as a plurality of devices in this specification (including what is depicted as a plurality of devices in the drawings) may be realized by one device. Or, part or all of the means and functions assumed to be included in a certain device may be included in other devices.

[0049] Also, not all of the matters described in this specification are essential requirements. In particular, matters described in this specification but not described in the claims can be regarded as arbitrary additional matters.

[0050] It should also be noted that the applicant is only aware of the prior art inventions described in the "Prior Art Documents" section of this specification, and the present invention is not necessarily intended to solve the problems described in those prior art inventions. The problems that the present invention aims to solve should be determined by considering this specification as a whole. For example, if this specification describes that a certain effect is achieved by a particular configuration, it can also be said that the problem that is the inverse of that predetermined effect is solved. However, this does not necessarily mean that such a particular configuration is an essential requirement.

[0051] 1 Dry pump 11 Booster pump 12 Main pump 13 Housing 1a Exhaust port 1b Exhaust pipe 1c Opening 2 Abatement section 21 Combustion section 22 Tank 23 Washing tower 24 Housing 2a Exhaust port 2b Exhaust pipe 2c Opening 3 Connecting pipe 4 Cover member 41 Upper part 42 Lower part 61 Table 61a Hole 62 Exhaust duct 63 Caster

Claims

1. A vacuum pump with a detoxification function comprising: a dry pump for vacuuming exhaust gas from a tool; a detoxification unit for detoxifying the exhaust gas vacuumed by the dry pump; a connecting pipe for connecting the dry pump and the detoxification unit; and a cover member for covering the connecting pipe.

2. The vacuum pump with aerosol function according to claim 1, wherein the cover member is provided so that even if exhaust gas leaks from the connection between the dry pump and the connecting pipe or the connection between the aerosol unit and the connecting pipe, the leaked exhaust gas will not leak to the outside of the vacuum pump with aerosol function.

3. The vacuum pump with aerosol function according to claim 1 or 2, wherein the dry pump has a first housing, the aerosol unit has a second housing, and the cover member is provided between the first housing and the second housing.

4. The vacuum pump with aerosolization function according to claim 3, wherein the first housing is provided with a first exhaust port connected to an exhaust duct, the second housing is provided with a second exhaust port connected to an exhaust duct, and the cover member is provided so that even if exhaust gas leaks from the connection point between the connecting pipe and the dry pump, and / or the connection point between the connecting pipe and the aerosolization unit, it will not leak to the outside of the first housing and the second housing from locations other than the first exhaust port and the second exhaust port.

5. A vacuum pump with a detoxification function according to claim 3, comprising a mounting base, wherein the first housing is positioned above the mounting base, the second housing is positioned below the mounting base, and the connecting pipe is provided penetrating the mounting base.

6. The vacuum pump with aerosolization function according to claim 5, wherein a part of the cover member is provided between the base described above and the first housing, and the other part of the cover member is provided between the base described above and the second housing.

7. The vacuum pump with aerosolization function according to claim 6, wherein casters are provided on the lower part of the first housing, and the other part of the cover member is provided on the outside of the casters.

8. The vacuum pump with aerosolization function according to claim 6, wherein casters are provided on the lower part of the first housing, and the other part of the cover member is provided inside the casters.

9. The vacuum pump with a detoxification function according to claim 6, wherein the mounting base is provided with a hole that connects a space determined by a part of the cover member, the lower surface of the first housing, and the upper surface of the mounting base described above, and a space determined by another part of the cover member, the upper surface of the second housing, and the lower surface of the mounting base described above.

10. The vacuum pump with aerosolization function according to claim 3, wherein the first housing is provided with a first opening that connects the internal space of the first housing with the internal space of the cover member.

11. The vacuum pump with aerosolization function according to claim 3, wherein the second housing is provided with a second opening that connects the internal space of the second housing with the internal space of the cover member.

Images