Industrial robot

Abstract

The present invention relates to an industrial robot structured such that the replacement a speed reducer can be simplified. The robot of the present invention comprises: a main frame having an accommodation recess; a speed reducer loaded in and coupled to the accommodation recess; a rotating frame which is rotatably formed above the main frame, and which has an opening; a wheel base which has a size and shape that enable the wheel base to pass through the opening, and which is coupled to the speed reducer and the rotating frame below the opening; and a bearing, which is coupled to the main frame and the rotating frame so that the rotating frame can rotate above the main frame.

Description

industrial robots

[0001] The present invention relates to an industrial robot, and more specifically, to an industrial robot that requires the replacement of a reduction gear, which is a component that controls the movement of the robot.

[0002] Recently, with the increasing number of high-definition display products and the growing consumption of portable devices, research and commercialization related to lightweight thin-film flat-panel displays are becoming more active as an alternative to conventional display devices such as Cathode Ray Tubes (CRTs).

[0003] The processing of glass substrates used in thin-film display products involves processes such as deposition, photolithography, and etching. To perform each process, a circular central chamber and surrounding process chambers are utilized; a robot moves inside the central chamber, and a robotic arm inserts or ejects the glass substrate into or out of the process chambers. During this process, the robot's motor rotates at a very high speed, and a reduction gear allows for smoother and more precise control of the movement.

[0004] However, the lifespan of the reduction gears used in the rotating shafts of existing robots is only about 5 years. When the reduction gear reaches the end of its lifespan, in order to replace it, multiple pieces of equipment located above it, such as the rotating shaft, lifting unit, arm, and hand, must all be removed before the reduction gear can be detached. This conventional process of replacing reduction gears has the problem of requiring a long working time and posing a risk because heavy equipment must be detached.

[0005] The present invention was conceived in consideration of the above points, and aims to provide an industrial robot with a structure that simplifies the reduction gear replacement process and reduces safety accidents that may occur during the reduction gear replacement process.

[0006] The technical problems to be solved by the present invention are not limited to those mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art to which the present invention belongs from the description below.

[0007] A semiconductor wafer transfer device according to the present invention for achieving the above objective comprises: a fixed hand and a plurality of movable hands each supporting a semiconductor wafer; a fixed frame coupled to the fixed hand at one end to support the fixed hand; a plurality of movable frames each coupled to the movable hands at one end to move the movable hands in the up-and-down direction; a pair of first sliders each coupled to the other end of a pair of movable frames among the movable frames and moving the pair of movable frames in the up-and-down direction according to the rotation of a first ball screw; and an industrial robot according to the present invention for achieving the above objective comprises: a main frame having a receiving groove; a reduction gear seated and coupled to the receiving groove; a rotating frame rotatably formed on the main frame and having an opening; and a wheel base having a size and shape that can be inserted into the opening and coupled to the reduction gear and the rotating frame at the bottom of the opening. It includes a bearing coupled to the main frame and the rotating frame so that the rotating frame can rotate on the main frame.

[0008] The wheel base includes an upper plate coupled to the rotating frame on the outer circumference and a lower groove formed in the lower portion to accommodate the upper portion of the reduction gear.

[0009] The upper plate includes a central hole formed to allow a cylindrical shaft penetrating the center of the reduction gear to pass through, and a shaft hole through which a motor shaft passes, and the motor shaft is directly connected to the reduction gear through the shaft hole.

[0010] The bearing is located around the circumference of the receiving groove and includes an inner ring coupled to the main frame and an outer ring coupled to the rotating frame.

[0011] The industrial robot according to the present invention is configured with a structure that can simplify the process of replacing the reduction gear, thereby minimizing the working time and risk of the reduction gear replacement process.

[0012] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention.

[0013] FIG. 1 is a drawing showing an industrial robot according to one embodiment of the present invention.

[0014] FIG. 2 is a drawing showing the main frame (20) and rotating part (30) of FIG. 1.

[0015] FIG. 3 is a cross-sectional view of the main frame (20) and the rotating part (30) of FIG. 1.

[0016] FIG. 4 is a detailed drawing of the wheel base (35) and reduction gear (37) of FIG. 3.

[0017] FIG. 5 is a detailed drawing of the main frame (20) and bearing (39) of FIG. 3.

[0018] FIG. 6 is a drawing showing a method for separating a reduction gear (37) according to the present invention.

[0019] The embodiments disclosed below will be described in detail based on the attached drawings as follows.

[0020] Prior to this, it is specified that the terms described below are defined in consideration of their functions in the present invention and should be interpreted in accordance with concepts consistent with the technical spirit of the present invention and the meanings commonly accepted or recognized in the relevant technical field. Furthermore, if it is determined that a detailed description of known functions or configurations related to the present invention may obscure the essence of the present invention, such detailed description is omitted.

[0021] The industrial robot according to the present invention is described as an example of a robot that transports a display substrate or a semiconductor substrate, but is not limited thereto and may refer to other types of robots including a reduction gear and robots for other uses.

[0022] FIG. 1 is a drawing showing an industrial robot according to an embodiment of the present invention. As shown in FIG. 1, the industrial robot according to the present invention includes a gantry (10), a main frame (20), a rotating part (30), a lifting part (40), an arm (50), and a hand (60). Other components constituting the robot may be included, but the description will focus on the main components of the present invention.

[0023] The gantry (10) is intended to provide a movement path for the main frame (20) and includes rails, a drive belt, a power transmission system, and support means for supporting the main frame (20).

[0024] FIG. 2 is a drawing showing the main frame (20) and rotating part (30) of FIG. 1 with each cover (not shown) removed, and FIG. 3 is a drawing showing a cross-section of the main frame (20) and rotating part (30) of FIG. 1. FIG. 4 is a detailed drawing showing the wheel base (35) and reduction gear (37) of FIG. 3, and FIG. 5 is a detailed drawing showing the main frame (20) and bearing (39) of FIG. 3.

[0025] The main frame (20) is illustrated as a carriage moving along the rails of the gantry (10), but may refer to a frame at another location that accommodates a reduction gear (37). Additionally, as illustrated in FIG. 5, the main frame (20) may be configured to include a circular receiving groove for accommodating the reduction gear (37) and a circular receiving groove for accommodating a bearing (39).

[0026] As shown in FIGS. 2 and 3, the rotating part (30) includes a rotating frame (31), a motor (33), a wheel base (35), a reduction gear (37), and a bearing (39).

[0027] The rotating frame (31) is formed to be rotatable on the main frame (20) with respect to a vertical axis of rotation and has an opening to allow the motor (33), wheel base (35), and reduction gear (37) to be inserted and removed. This opening is formed around the axis of rotation of the rotating frame (31) to facilitate the insertion and removal of the wheel base (35) and reduction gear (37), and it is preferable that the opening be formed taking into account the size and shape of the wheel base (35) and reduction gear (37).

[0028] The wheel base (35) is coupled to the motor (33) and has a size and shape that can be inserted into the opening of the rotating frame (31), and is coupled to the reduction gear (37) and the rotating frame (31) using a bolt (not shown) below the opening of the rotating frame (31). Accordingly, the rotating frame (31) and the wheel base (35) are rotated together by the motor (33), and the rotational speed of the rotating frame (31) and the wheel base (35) is controlled by the reduction gear (37).

[0029] Additionally, as illustrated in FIGS. 3 and 4, the wheel base (35) includes a lower groove formed in the lower part of the wheel base (35) to accommodate the upper part of the reduction gear (37), and a top plate that is coupled and fixed to the rotating frame (31) on the outer circumference. This top plate is generally formed in the shape of a disc, but two sides of the top plate are formed as cut surfaces. Since the shape of the opening of the rotating frame (31) and the shape of the top plate of the wheel base (35) are identical and the opening and the top plate are in close contact with each other, the two cut surfaces of the top plate transmit rotational force to the rotating frame (31) so that the wheel base (35) and the rotating frame (31) can rotate together. Additionally, for coupling with the rotating frame (31), the outer circumference of the top plate is formed to overlap with the protrusion at the lower part of the opening, and the outer circumference of the top plate is coupled to the protrusion at the lower part of the opening using a bolt (not shown).

[0030] The lower groove of the wheel base (35) has a size and shape capable of accommodating the reduction gear (37). The upper plate of the wheel base (35) includes a central hole (35a) and a shaft hole (35b) formed on the outside thereof. The central hole (35a) is formed in the center of the upper plate of the wheel base (35) so that a cylindrical shaft (38) that is fixedly coupled to the lower part of the reduction gear (37) and penetrates the center of the reduction gear (37) can pass through it, and the shaft hole (35b) is formed on one side of the upper plate of the wheel base (35) so that the shaft of the motor (33) can pass through it.

[0031] A cylindrical lower support formed below the top plate of the wheel base (35) forms a lower groove, and the lower end of this lower support is connected to the outer circumference of the reduction gear (37) using a bolt (not shown). Additionally, since the lower support of the wheel base (35) is smaller than the diameter of the bearing (39), the lower end of the lower support is located inside the bearing (39).

[0032] The motor (33) is coupled to the upper plate of the wheel base (35), and the shaft of the motor (33) is configured to pass through the shaft hole (35b) in a vertical direction and be directly connected / fastened to the gear of the reduction gear (37) inside the lower groove of the wheel base (35).

[0033] The reduction gear (37) has a size and shape that can pass through the opening of the rotating frame (31) and is seated and coupled in the receiving groove of the main frame (20).

[0034] As illustrated in FIGS. 3 and 5, the bearing (39) includes an inner ring (39b) coupled to the main frame (20) using bolts (not shown), an outer ring (39a) coupled to the rotating frame (31) using bolts (not shown), and a ball or roller formed between the two rings (39a, 39b) to reduce frictional resistance. In this case, the outer ring (39a) supports the load of the lifting unit (40), arm (50), hand (60), and substrate (100) as well as the rotating frame (31), and rotates together with the rotating frame (31) and wheel base (35). Thus, compared to the conventional technology that supports the entire load and controls rotation using only a reduction gear, the present invention, which uses both the reduction gear (37) and the bearing (39), provides relatively stable load support and stable rotation.

[0035] The type or connection relationship of the bearing (39) according to the present invention may be varied. For example, the bearing (39) may be configured to include an upper ring coupled to a rotating frame (31), a lower ring coupled to a main frame (20), and a ball or roller between the upper ring and the lower ring.

[0036] The bearing (39) is preferably located around the receiving groove of the main frame (20) or around the reduction gear (37). For stable operation, it is configured to be located in a separate receiving groove within the main frame (20) to accommodate the bearing (39).

[0037] FIG. 6 is a diagram showing a method for replacing a reduction gear (37) according to the present invention. The method for replacing a reduction gear (37) according to the present invention is as follows.

[0038] First, the bolt (not shown) connecting the rotating frame (31) and the wheel base (35) can be removed, and the wheel base (35) along with the motor (33) and the reduction gear (37) can be removed through the opening of the rotating frame (31). Then, by removing the bolt (not shown) connecting the wheel base (35) and the reduction gear (37), the reduction gear (37) can be separated from the wheel base (35). At this time, the main frame (20), the bearing (39), and the rotating frame (31) can remain in an unseparated state.

[0039] The method of attaching the new reduction gear (37) to the robot is the reverse of the method of detaching the reduction gear (37) described above. That is, after attaching the new reduction gear (37) to the wheel base (35) to which the motor (33) is attached using a bolt (not shown), the wheel base (35) together with the motor (33) and the new reduction gear (37) is seated on the rotating frame (31) through the opening of the rotating frame (31). Then, the wheel base (35) is attached to the rotating frame (31) using a bolt (not shown).

[0040] By using the above method, the reduction gear (37) can be easily replaced without the main frame (20), bearing (39), and rotating frame (31) being separated.

[0041] Although the present invention has been illustrated and described above in relation to preferred embodiments to illustrate the principles of the invention, the invention is not limited to the configuration and operation as illustrated and described. Rather, those skilled in the art will understand that numerous changes and modifications to the invention are possible without departing from the spirit and scope of the appended claims.

Claims

1. A main frame having a receiving groove; A reduction gear seated and coupled to the above receiving groove; A rotating frame having an opening, formed to be rotatable on the main frame above; A wheel base having a size and shape that can be inserted into the opening, and coupled to the reduction gear and the rotating frame at the bottom of the opening; An industrial robot characterized by including a bearing coupled to the main frame and the rotating frame so that the rotating frame can rotate on the main frame.

2. In Paragraph 1, The above wheelbase is A top plate combined with the above-mentioned rotating frame at the outer edge, and An industrial robot characterized by including a lower groove formed in the lower portion to accommodate the upper portion of the above-mentioned reduction gear.

3. In Paragraph 2, The above top plate is A central hole formed to allow a cylindrical shaft penetrating the center of the above-mentioned reduction gear to pass through, and An industrial robot characterized by including a shaft hole through which a motor shaft passes.

4. In Paragraph 3, An industrial robot characterized in that the motor shaft is configured to be directly connected to the reduction gear through the shaft hole.

5. In Paragraph 2, The above wheelbase is An industrial robot further comprising a cylindrical lower support formed below the upper plate, wherein the lower end of the lower support is coupled to the outer circumference of the reduction gear.

6. In Paragraph 5, An industrial robot characterized in that the lower support member is formed to be smaller than the diameter of the bearing, and the lower end of the lower support member is located inside the bearing.

7. In Paragraph 1, An industrial robot characterized in that the bearing is located around the circumference of the receiving groove.

8. In Paragraph 1, The above bearing is An inner ring combined with the main frame above, and An industrial robot characterized by including an outer ring combined with the above-mentioned rotating frame.

9. In Paragraph 1, The above bearing is A lower ring combined with the main frame above, and An industrial robot characterized by including an upper ring combined with the above-mentioned rotating frame.

10. In Paragraph 1, An industrial robot characterized by the above-mentioned reduction gear having a size and shape capable of passing through the above-mentioned opening.

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