Cleaning mechanism, cleaning device, and laser processing apparatus

Abstract

A cleaning mechanism, a cleaning device, and a laser processing apparatus. The cleaning mechanism comprises a cleaning barrel having a first through hole in the bottom; a base plate assembly, the bottom of the cleaning barrel being fixed to base plate assembly, the base plate assembly being provided with a base plate through hole in communication with the first through hole, and the base plate through hole being configured for sealed connection with a placement table system that comprises, within the cleaning barrel, a placement table for holding workpieces; and a first leakage-prevention member comprising a first leakage-receiving groove arranged around the base plate through hole on the base plate assembly and a first leakage-drainage member communicating with the bottom of the first leakage-receiving groove. With the cleaning mechanism provided in the present application, even if leakage occurs at the bottom of the cleaning barrel, leaked liquid can be received by the first leakage-receiving groove instead of dripping along the leakage location, and the liquid received in the first leakage-receiving groove can be discharged through the first leakage-drainage member, thus preventing overflow caused by liquid accumulation and avoiding leakage of the cleaning mechanism.

Description

Cleaning facilities, cleaning equipment and laser processing devices

[0001] This application claims priority to Chinese Patent Application No. 202411725182.9, filed on November 27, 2024, entitled "Cleaning Mechanism, Cleaning Equipment and Laser Processing Apparatus", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of semiconductor processing equipment technology, and more specifically, to a cleaning mechanism, cleaning equipment, and laser processing apparatus. Background Technology

[0003] Wafer laser processing is a key step in the semiconductor manufacturing process, used to cut individual chips from a wafer, providing a basis for subsequent packaging and testing.

[0004] Laser processing equipment generally includes a hopper, a transport mechanism, a cleaning and coating unit, processing components, and a feeding assembly. The hopper stores the workpieces to be processed; the transport mechanism transfers materials between the hopper, cleaning and coating unit, and processing components; the cleaning and coating unit performs cleaning and adhesive application; the processing components process the workpieces, such as cutting or grooving them using a laser. The feeding assembly transfers the processed workpieces from the processing components to the corresponding cleaning unit. After cleaning, the transport mechanism returns the workpieces to the hopper.

[0005] The cleaning and coating device includes a cleaning mechanism and a spraying mechanism. The cleaning mechanism is equipped with a rotatable placement platform. The sheet to be cleaned and / or coated is placed on the placement platform, and the placement platform drives the sheet to rotate to complete the cleaning and coating operations.

[0006] During the cleaning process, the cleaning fluid is first collected by the cleaning mechanism and then discharged through its corresponding pipelines. Since the bottom structure of the cleaning mechanism is primarily welded, quality issues at the weld seams can lead to leaks.

[0007] Therefore, how to prevent water leakage in the cleaning mechanism is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0008] In view of this, this application provides a cleaning mechanism that avoids the problem of water leakage in the cleaning mechanism;

[0009] This application also provides a cleaning device and a laser processing apparatus having the above-mentioned cleaning mechanism.

[0010] To achieve the above objectives, this application provides the following technical solution:

[0011] The first aspect of this application provides a cleaning mechanism, comprising:

[0012] A cleaning tank, the bottom of which has a first through hole;

[0013] The bottom plate assembly is fixed to the bottom of the cleaning tank and has a bottom plate through hole communicating with the first through hole. The bottom plate through hole is used for sealing connection with the placement platform system. The placement platform system has a placement platform located inside the cleaning tank for placing the material pieces.

[0014] The first leak-proof component includes a first leak-proof receiving groove fixed to the base plate assembly and arranged around the base plate through a hole, and a first leak-proof drainage component communicating with the bottom of the first leak-proof receiving groove.

[0015] In one possible implementation, the base plate assembly includes a first base plate and a second base plate disposed at the bottom of the first base plate;

[0016] The first base plate is disposed in the first through hole, and the base plate through hole includes a second through hole disposed on the first base plate, the second through hole being sealed to the placement platform system;

[0017] The bottom of the cleaning tub is fixed to the second base plate. The base plate also includes a third through hole on the second base plate. The first side wall of the first leak-proof receiving groove is fixed to the second base plate. The second side wall extends into the third through hole and extends toward the first base plate. The height of the second side wall is higher than the height of the upper surface of the second base plate.

[0018] In one possible implementation, the base plate assembly includes a third base plate disposed on the upper surface of the first base plate, and the edge of the third base plate has a first folded plate that bends downward.

[0019] The bottom of the cleaning tub has a second folded plate that bends upwards, which surrounds the first through hole. The first folded plate is located on the outer ring of the second folded plate and together with the second folded plate and the bottom of the cleaning tub, forms a leak-proof groove for waterproofing. The first folded plate and the second folded plate have an overlapping area in the height direction.

[0020] In one possible implementation, the second folding plate includes an upwardly extending second upper folding plate and a second side folding plate located at the end of the second upper folding plate and extending toward the first folding plate.

[0021] In one possible implementation, a second leak-proof component is also included, which includes an outer ring second leak-proof receiving groove fixed to the second base plate and a second leak-proof drainage component communicating with the bottom of the second leak-proof receiving groove.

[0022] In one possible implementation, the bottom wall of the second leak-proof receiving groove is fixed to the bottom of the second base plate, and the upper surface of the outer wall of the second leak-proof receiving groove is higher than the upper surface of the second base plate.

[0023] In one possible implementation, the side wall of the cleaning tank is provided with a drainage mist pipe communicating with the cleaning tank; and / or,

[0024] The bottom wall of the cleaning tub is provided with a drainage pipe communicating with the cleaning tub; and / or,

[0025] A partition is provided inside the cleaning tank, the partition being located between the bottom wall of the cleaning tank and the placement platform of the placement platform system, and the partition having a through hole; and / or,

[0026] The inner wall of the cleaning tub is lined with a sponge layer.

[0027] In one possible implementation, the base plate assembly is supported on the base by a support beam, and a vibration isolation element is provided between the support beam and the base plate assembly.

[0028] The cleaning mechanism provided in this application includes a first leak-proof component, which comprises a first leak-proof receiving groove and a first leak-proof draining component. The first leak-proof receiving groove is arranged around the bottom plate through-hole. If leakage occurs at the bottom of the cleaning tank, the leaking liquid will flow along the bottom plate assembly towards the bottom plate through-hole. After flowing into the bottom plate through-hole, it will be received by the first leak-proof receiving groove, and the liquid in the first leak-proof receiving groove will be directionally discharged to the corresponding position through the first leak-proof draining component. The cleaning mechanism provided in this application ensures that even if leakage occurs at the bottom of the cleaning tank, the first leak-proof receiving groove can receive the leakage, preventing it from dripping along the leak. The first leak-proof receiving groove can be drained away by the first leak-proof draining component, preventing overflow due to the first leak-proof receiving groove being full, thus avoiding water leakage in the cleaning mechanism.

[0029] A second aspect of this application provides a cleaning device, comprising:

[0030] The cleaning facility is the cleaning facility described in any of the preceding items;

[0031] The placement platform system includes a placement platform disposed inside the cleaning tank and a placement platform drive unit disposed outside the cleaning tank. The placement platform drive unit is connected to the placement platform via a transmission component to drive the placement platform to rotate, and the transmission component is sealed to the bottom plate through a hole.

[0032] The spraying mechanism includes a spray head assembly disposed inside the cleaning tank and a spraying drive unit disposed outside the cleaning tank. The spraying drive unit is connected to the output end of the spray head assembly via a swing rod to drive the spray head assembly to swing. The output end of the spray head assembly passes through the base plate assembly and is sealed to the base plate assembly.

[0033] In one possible implementation, when the cleaning equipment is a cleaning and coating device, the spray head assembly includes at least a cleaning fluid atomizing nozzle and a glue application nozzle.

[0034] When the cleaning equipment is a cleaning device, the spray head assembly includes at least a cleaning fluid atomizing nozzle.

[0035] In one possible implementation, the spray head assembly further includes a cleaning fluid tilting nozzle, wherein the spray direction of the cleaning fluid atomizing nozzle is perpendicular to the material sheet, and the spray direction of the cleaning fluid tilting nozzle forms an acute angle with the material sheet.

[0036] In one possible implementation, the media inlet of the adhesive nozzle includes an adhesive inlet and an anti-clogging inlet; and / or,

[0037] The medium inlet of the cleaning fluid atomizing nozzle includes a cleaning fluid inlet and a compressed air inlet.

[0038] In one possible implementation, the inner wall of the cleaning tank has an outwardly recessed hidden space, and when the spraying mechanism is not in operation, the spraying head assembly is hidden within the hidden space.

[0039] The cleaning equipment provided in this application has the aforementioned cleaning mechanism, and therefore possesses all the technical effects of the aforementioned cleaning mechanism, which will not be elaborated upon here.

[0040] A third aspect of this application provides a laser processing apparatus, including the cleaning equipment described in any of the preceding claims.

[0041] The laser processing apparatus provided in this application has all the technical effects of the aforementioned cleaning equipment, and will not be described in detail here. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 is a schematic diagram of the cleaning equipment disclosed in an embodiment of this application from one angle;

[0044] Figure 2 is a structural schematic diagram of the cleaning equipment disclosed in an embodiment of this application from another angle;

[0045] Figure 3 is a front view of the cleaning equipment disclosed in an embodiment of this application;

[0046] Figure 4 is a cross-sectional view of Figure 3 along line AA;

[0047] Figure 5 is a partial cross-sectional view of the cleaning equipment disclosed in an embodiment of this application;

[0048] Figure 6 is a schematic diagram of the spraying mechanism disclosed in the embodiment of this application.

[0049] The meanings of the various reference numerals in the figure are as follows:

[0050] 100-Spraying mechanism; 110-Spraying drive component; 120-Spraying head assembly; 121-Cleaning fluid atomizing nozzle; 122-Glue application nozzle; 123-Cleaning fluid tilting nozzle; 130-Spraying lifting device; 140-Swing bar;

[0051] 200-Cleaning mechanism; 201-Cleaning tank; 2011-Second folding plate; 2012-Hidden space; 2013-First through hole; 202-Base; 203-Support beam; 204-Drainage mist pipe; 205-Drainage pipe; 206-Water curtain installation platform; 207-Water curtain opening and closing device; 2071-First slider; 2072-Second slider; 2073-Connecting arm; 2074-Water curtain Push-pull drive component; 208-Second leak-proof drainage component; 209-Second leak-proof receiving groove; 210-Vibration isolation component; 211-Sponge layer; 212-Second base plate; 2121-Third through hole; 213-Partition plate; 214-First base plate; 215-First leak-proof receiving groove; 216-Third base plate; 2161-First folding plate; 217-Blocking plate; 218-First leak-proof drainage component; 219-Base plate assembly;

[0052] 300 - Placement stage system; 310 - Placement stage drive; 320 - Placement stage. Detailed Implementation

[0053] This application discloses a cleaning mechanism to prevent water leakage in the cleaning mechanism;

[0054] This application also discloses a cleaning device and a laser processing apparatus having the aforementioned cleaning mechanism.

[0055] Hereinafter, embodiments will be described with reference to the accompanying drawings. The complete contents of the embodiments described below are not limited to those necessary for the solution of the application as described in the claims. It should be noted that, for ease of description, only the parts relevant to the application are shown in the drawings. Unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0056] As shown in Figures 1-5, the cleaning mechanism 200 disclosed in this application includes a cleaning tank 201, a bottom plate assembly 219, and a first leak-proof component. Since the placement platform 320 of the placement platform system 300 is located inside the cleaning tank 201, and the placement platform 320 is used to place the material sheet to drive its rotation, completing the cleaning and / or gluing work, the placement platform drive 310 of the placement platform system 300 is located outside the cleaning tank 201. To ensure that the placement platform drive 310 can apply driving force to the placement platform 320, a transmission component connecting the two needs to pass through the bottom of the cleaning tank 201. Therefore, the bottom of the cleaning tank 201 has a first through hole 2013 so that the transmission component can enter the cleaning tank 201 and connect with the placement platform 320.

[0057] The bottom of the cleaning tank 201 is fixed to the base plate assembly 219, and the base plate assembly 219 has a base plate through hole communicating with the first through hole 2013, so that the transmission component of the placement platform system 300 can pass through the base plate through hole and connect to the placement platform 320. The base plate through hole is used for a sealed connection with the transmission component of the placement platform system 300 to prevent the cleaning fluid (usually water) from leaking through the base plate through hole.

[0058] The first leak-proof component includes a first leak-proof receiving groove 215 fixed to the base plate assembly 219 and arranged around the bottom hole of the base plate, and a first leak-proof drain component 218 communicating with the bottom of the first leak-proof receiving groove 215. Since the base plate assembly 219 is fixed to the bottom of the cleaning tank 201, when cleaning fluid leaks inside the cleaning tank 201, it flows to the bottom hole and leaks through it. In this embodiment, a first leak-proof receiving groove 215 is added to the bottom of the base plate assembly 219 to receive the leaked cleaning fluid, and simultaneously discharges it to a corresponding location through the first leak-proof drain component 218. The first leak-proof drain component 218 can be a discharge pipe, and it communicates with the discharge port at the bottom of the first leak-proof receiving groove 215.

[0059] The cleaning mechanism provided in this application includes a first leak-proof component, comprising a first leak-proof receiving groove 215 and a first leak-proof drain component 218. The first leak-proof receiving groove 215 is arranged around the bottom plate through-hole. If leakage occurs at the bottom of the cleaning tank 201, the leaking liquid will flow along the bottom plate assembly 219 towards the bottom plate through-hole. After flowing into the bottom plate through-hole, it will be received by the first leak-proof receiving groove 215, and the liquid in the first leak-proof receiving groove 215 will be directionally discharged to the corresponding position through the first leak-proof drain component 218. The cleaning mechanism provided in this application ensures that even if leakage occurs at the bottom of the cleaning tank 201, the liquid can be received by the first leak-proof receiving groove 215 and will not drip along the leaking area. The first leak-proof receiving groove 215 can be drained away through the first leak-proof drain component 218, preventing overflow due to the first leak-proof receiving groove 215 being full, thus avoiding water leakage in the cleaning mechanism.

[0060] Furthermore, the base plate assembly 219 includes a first base plate 214 and a second base plate 212 disposed at the bottom of the first base plate 214. The first base plate 214 and the second base plate 212 are stacked, with the first base plate 214 located above the second base plate 212.

[0061] A first base plate 214 is disposed within a first through hole 2013. The through hole includes a second through hole disposed on the first base plate 214, which is sealed to the placement platform system 300. The bottom of the cleaning tub 201 is fixed to a second base plate 212, the edge of which is located outside the outer wall of the cleaning tub 201. Taking a circular cross-section of the cleaning tub 201 as an example, the second base plate 212 is also circular, and its diameter is larger than that of the cleaning tub 201. The two can be arranged coaxially, thereby allowing the edge of the second base plate 212 to be located outside the outer wall of the cleaning tub 201.

[0062] The bottom plate through hole also includes a third through hole 2121 provided on the second bottom plate 212. The first side wall of the first leak-proof receiving groove 215 is fixed on the second bottom plate 212. The second side wall extends into the third through hole 2121 and extends towards the first bottom plate 214. The second side wall can abut against the bottom of the first bottom plate 214, or there can be some gap between it and the first bottom plate 214. Of course, it can also be directly fixed to the bottom of the first bottom plate 214, as long as the two side walls of the first leak-proof receiving groove 215 have a certain height and can accommodate a certain volume of cleaning liquid.

[0063] It should be noted that, to improve the leak-proof effect, the height of the second sidewall of the first leak-proof receiving groove 215 can be designed to be higher than the height of the upper surface of the second base plate 212. The higher height of the second sidewall of the first leak-proof receiving groove 215 prevents the cleaning fluid inside the first leak-proof receiving groove 215 from overflowing through one side of the second sidewall. The connection between the first sidewall of the first leak-proof receiving groove 215 and the second base plate 212 can be sealed, ensuring that even if the first leak-proof drainage component 218 experiences poor drainage, causing the liquid level inside the first leak-proof receiving groove 215 to rise, no leakage will occur.

[0064] In a specific embodiment of this application, the base plate assembly 219 further includes a third base plate 216, which is disposed on the upper surface of the first base plate 214. The edge of the third base plate 216 has a first fold plate 2161 that bends downward, so that the cleaning liquid above the third base plate 216 will flow to the outer edge of the third base plate 216. Since the edge of the third base plate 216 is the first fold plate 2161 that bends downward, it will flow along the first fold plate 2161 to the bottom wall of the cleaning tank 201.

[0065] Although the first base plate 214 is embedded in the first through hole 2013 of the cleaning tank 201, there is still a possibility that the cleaning fluid may enter between the first base plate 214 and the second base plate 212 through the gap between the edge of the first base plate 214 and the inner wall of the first through hole 2013. If there is a gap at the joint between the first base plate 214 and the second base plate 212, the cleaning fluid will flow through the gap between the first base plate 214 and the second base plate 212 toward the third through hole 2121 of the second base plate 212.

[0066] In this embodiment, a third base plate 216 is added and fixed to the first base plate 214. Then, by setting a first folding plate 2161 on the third base plate 216, the third base plate 216 can completely cover the first through hole 2013 of the cleaning tank 201, that is, completely cover the gap between the edge of the first base plate 214 and the inner wall of the first through hole 2013, thereby reducing the risk of leakage.

[0067] Furthermore, the bottom of the cleaning tank 201 has an upwardly bent second folding plate 2011, which forms a first through hole 2013. A first folding plate 2161 is located around the outer edge of the second folding plate 2011 and, together with the second folding plate 2011 and the bottom of the cleaning tank 201, forms a leak-proof groove for waterproofing. The first folding plate 2161 and the second folding plate 2011 overlap in height. As the liquid level rises, the cleaning fluid on the bottom wall of the cleaning tank 201 flows towards the first through hole 2013, where it is blocked by the first folding plate 2161. This results in the liquid level outside the first folding plate 2161 being higher than the liquid level inside, facilitating the discharge of the cleaning fluid from the cleaning tank 201.

[0068] Even if some cleaning fluid passes through the first folding plate 2161, it will be blocked by the upwardly bent second folding plate 2011, temporarily containing the cleaning fluid in the leak-proof groove and preventing it from entering the first through hole 2013. Even if leakage occurs at the connection between the second folding plate 2011 and the bottom wall of the cleaning tank 201, causing the cleaning fluid to continue flowing towards the center, it will be received and drained away by the first leak-proof receiving groove 215.

[0069] The second folding plate 2011 may include an upwardly extending second upper folding plate and a second side folding plate located at the end of the second upper folding plate and extending toward the first folding plate 2161, further increasing the difficulty for the cleaning fluid to pass over the second folding plate 2011. It should be noted that the second folding plate 2011 only needs to include an upwardly bent portion, as long as it can increase the difficulty for the liquid to pass through, and is not limited to the structure shown in the figure.

[0070] To further improve the leak-proof effect, as shown in Figures 4 and 5, in a specific embodiment of this application, the cleaning mechanism 200 may further include a second leak-proof component. The second leak-proof component includes a second leak-proof receiving groove 209 fixed to the outer ring of the second base plate 212 and a second leak-proof drainage component 208 connected to the bottom of the second leak-proof receiving groove 209.

[0071] When leakage occurs on the central side (where the second folding plate 2011 connects to the bottom wall of the cleaning tank 201) and the outer side (where the bottom wall and side wall of the cleaning tank 201 connect), the leaked cleaning fluid has two flow paths. One is to flow along the second bottom plate 212 toward the third through hole 2121 and leak outward through the third through hole 2121. The other is to flow along the second bottom plate 212 toward the outer edge of the second bottom plate 212 and leak outward from the edge of the second bottom plate 212.

[0072] It will be understood in the art that even if a failure occurs in which cleaning fluid leaks to the outside through the third through hole 2121, it can be caught by the first leak-proof receiving tank 215 and discharged directionally to the corresponding collection location. Similarly, even if a leak occurs from the outer edge of the second base plate 212, it can be caught by the second leak-proof receiving tank 209 and discharged directionally to the corresponding collection location by the second leak-proof drainage component 208. The second leak-proof drainage component 208 may also be a discharge pipe connected to the bottom of the second leak-proof receiving tank 209.

[0073] Furthermore, the bottom wall of the second leak-proof receiving groove 209 is fixed to the bottom of the second base plate 212, and the upper surface of the outer side wall of the second leak-proof receiving groove 209 is higher than the upper surface of the second base plate 212, so as to prevent a certain amount of cleaning liquid from overflowing from the second leak-proof receiving groove 209 when there is poor drainage.

[0074] When the cleaning mechanism cleans and / or applies adhesive to the material sheets, the sprayed cleaning fluid and / or adhesive will fill the interior of the cleaning tank 201. If the top opening of the cleaning tank 201 is not covered, the drifting cleaning fluid and / or adhesive will float out of the cleaning tank 201, which will affect the life of the equipment and pollute the environment.

[0075] As shown in Figures 1 and 2, to prevent the cleaning fluid and / or adhesive from overflowing the cleaning tank 201, in this embodiment, the cleaning mechanism may further include a water curtain assembly disposed at the top opening of the cleaning tank 201. The water curtain assembly can both block and open the top opening of the cleaning tank 201. When the cleaning mechanism is working, the water curtain assembly can close the top opening of the cleaning tank 201 to prevent the cleaning fluid and / or adhesive from overflowing; when picking up or putting down the material sheet, the water curtain assembly is opened so that the material sheet can be picked up or put down through the top opening of the cleaning tank 201.

[0076] Furthermore, the water curtain assembly may include a water curtain mounting platform 206, a water curtain opening and closing device 207, and a water curtain. The water curtain mounting platform 206 is located on the top outer side of the cleaning tank 201, and serves as a mounting base for the water curtain opening and closing device 207. It should be noted that the water curtain mounting platform 206 must be arranged on the top outer side of the cleaning tank 201 and must not obstruct the top opening of the cleaning tank 201.

[0077] The water curtain opening and closing device 207 includes a water curtain push-pull drive component 2074 and a water curtain connector connected to the output end of the water curtain push-pull drive component 2074. It should be noted that the water curtain push-pull drive component 2074 can be a cylinder, using the reciprocating linear motion output by the cylinder to drive the water curtain connector to reciprocate. One end of the water curtain is fixed to the water curtain connector, and the water curtain's movement is achieved by pulling one end of the water curtain through the water curtain connector.

[0078] It should be noted that one end of the water curtain is fixed to the water curtain connector, and the other end can be wound around a spring roller. The spring roller is fixed to one end of the water curtain mounting platform 206. When the water curtain is pulled towards the other end of the water curtain mounting platform 206 by the water curtain connector, the spring roller rotates to release the water curtain wound on it (the spring of the spring roller stores energy), allowing the water curtain to cover the top opening of the washing tank 201. When the water curtain is opened, the water curtain connector drives one end of the water curtain to move towards the spring roller, and the spring roller resets and reverses to wind and store the water curtain. In addition, the water curtain can also be a folding louvered structure (i.e., a wave-shaped structure). One end of the water curtain is fixed to one end of the water curtain installation platform 206. When the water curtain is closed, it can be pulled to the other end of the water curtain installation platform 206 through the water curtain connector, so that the water curtain is flattened and covers the top opening of the cleaning tank 201. When the water curtain is opened, the water curtain connector moves one end of the water curtain to fold it and store it at one end of the water curtain installation platform 206. The water curtain can also be a plate-shaped structure. Moving the plate-shaped structure, when it moves to the top opening of the cleaning tank 201, it covers the top opening of the cleaning tank 201. When the top opening of the cleaning tank 201 is removed, the top opening is exposed.

[0079] The water curtain connector may include a first slider 2071, a second slider 2072, and a connecting arm 2073, with the connecting arm 2073 connecting the first slider 2071 and the second slider 2072. The water curtain mounting platform 206 has slide rails on both sides that respectively slide in cooperation with the first slider 2071 and the second slider 2072. One of the first slider 2071 and the second slider 2072 is connected to the output end of the water curtain push-pull drive component 2074, and the water flow is fixed on the connecting arm 2073.

[0080] After the cleaning of the sheet material is completed, the mist-like substance of the cleaning fluid and / or adhesive inside the cleaning tank 201 cannot settle for a long time and will still disperse to the outside after the water curtain is turned on. Therefore, in this embodiment, a drainage mist pipe 204 communicating with the cleaning tank 201 is provided on the side wall of the cleaning tank 201. Before the water curtain is turned on, the mist-like substance inside the cleaning tank 201 can be drained through the drainage mist pipe 204 before the water curtain is turned on. Those skilled in the art will understand that the drainage mist pipe 204 should be connected to a negative pressure device to remove the mist-like substance inside the cleaning tank 201 by using negative pressure.

[0081] The bottom wall of the cleaning tank 201 is provided with a drain pipe 205 that communicates with the cleaning tank 201. The drain pipe 205 is used to drain the cleaning liquid discharged during the cleaning process. The inner side wall of the cleaning tank 201 can be covered with a sponge layer 211. The sponge layer 211 can absorb some of the water mist generated during the cleaning process. At the same time, the sponge layer 211 also has a sound-absorbing effect, which can reduce the noise during the cleaning process.

[0082] As shown in Figure 3, the base plate assembly 219 is supported on the base 202 by the support beam 203, and a vibration isolation component 210 is provided between the support beam 203 and the base plate assembly 219. By setting the vibration isolation component 210, vibration can be effectively reduced and isolated, avoiding the vibration generated by the cleaning mechanism from affecting the processing platform of the laser processing device.

[0083] Furthermore, as shown in Figures 4 and 5, a partition 213 is provided inside the cleaning tank 201. The partition 213 is located between the bottom wall of the cleaning tank 201 and the placement platform 320 of the placement platform system 300, and the partition 213 has a through hole. The sprayed cleaning liquid falls to the bottom of the cleaning tank 201 through the through hole of the partition 213 and is drained away through the drain pipe 205. In this embodiment, by setting the partition 213, water accumulation is less likely to occur above the partition 213. Even if drainage is not smooth, the water level will be blocked below the partition 213.

[0084] The partition 213 can be fixed on the first base plate 214. The thickness of the first base plate 214 is greater than that of the bottom wall of the cleaning tank 201. Combined with the second folding plate 2011 that is bent upwards from the cleaning tank 201, there is a certain distance between the partition 213 and the bottom wall of the cleaning tank 201, so as to accommodate the cleaning liquid that is not drained in time, and to keep the area above the partition 213 anhydrous.

[0085] The baffle 213 has a ring structure, and its inner ring can be tilted and bent upwards to form a structure that guides the flow to the center, increasing the water collection slope so that the cleaning fluid can flow out of the baffle 213 through the through hole as soon as possible.

[0086] This application also discloses a cleaning device, which includes a cleaning mechanism 200, a placement platform system 300, and a spraying mechanism 100. The cleaning mechanism 200 is the same as the cleaning mechanism 200 disclosed in the above embodiments. The cleaning device disclosed in this embodiment, having the aforementioned cleaning mechanism, possesses all the technical effects of the above-mentioned cleaning mechanism, and will not be described in detail here.

[0087] The placement platform system 300 includes a placement platform 320 disposed inside the cleaning mechanism 200 and a placement platform drive 310 disposed outside the cleaning mechanism 200. The placement platform drive 310 is connected to the placement platform 320 via a transmission component to drive the placement platform 320 to rotate, and the transmission component is sealed to the base plate through a hole. The placement platform 320 includes a ceramic suction cup to fix the material sheet, thus maintaining the stability of the material sheet when the placement platform 320 rotates it. The placement platform system 300 is the same as existing technology and will not be described in detail here.

[0088] As shown in Figure 6, the spraying mechanism 100 includes a spray head assembly 120 disposed inside the cleaning mechanism 200 and a spraying drive component 110 disposed outside the cleaning mechanism 200. The spray head assembly 120 is used to spray cleaning fluid or adhesive according to the corresponding process.

[0089] The output end of the spraying drive component 110 and the spraying head assembly 120 are connected via a swing rod 140 to drive the spraying head assembly 120 to swing. The output end of the spraying head assembly 120 passes through the base plate assembly 219 and is sealed to the base plate assembly 219. The spraying drive component 110 can be any drive device capable of outputting rotary motion, not limited to motors, rotary air pumps, etc. The swing rod 140 can be an integral bent structure or a machined structure; this is not limited here.

[0090] The spray head assembly 120 corresponding to the cleaning and coating device can spray both cleaning fluid and adhesive. Therefore, when the cleaning equipment is a cleaning and coating device, the spray head assembly 120 includes at least a cleaning fluid atomizing nozzle 121 and an adhesive spray nozzle 122.

[0091] During the adhesive application process, the placement stage 320 is used to drive the sheet to rotate. Then, the spraying drive 110 drives the spray head assembly 120 to oscillate back and forth between the center and edge of the sheet, while simultaneously spraying cleaning fluid through the cleaning fluid atomizing nozzle 121 to clean the sheet before adhesive application. After cleaning, the cleaning fluid atomizing nozzle 121 stops spraying cleaning fluid, and the placement stage 320 drives the sheet to rotate at high speed to remove the cleaning fluid from the sheet surface through centrifugal force. After drying, the spraying drive 110 drives the spray head assembly 120 to oscillate back and forth between the center and edge of the sheet, while simultaneously spraying adhesive through the adhesive application nozzle 122 to complete the adhesive application process.

[0092] When the cleaning equipment is a cleaning device, the spray head assembly 120 includes at least a cleaning fluid atomizing nozzle 121. That is, the cleaning device only needs to clean the processed material sheet, so the spray head assembly 120 only needs to be equipped with a cleaning fluid atomizing nozzle 121. Its cleaning action is the same as that of the cleaning coating device, and will not be described in detail here.

[0093] In one specific embodiment of this application, the spray head assembly 120 further includes a cleaning fluid tilting nozzle 123. The spray direction of the cleaning fluid atomizing nozzle 121 is perpendicular to the material sheet, while the spray direction of the cleaning fluid tilting nozzle 123 forms an acute angle with the material sheet. In this embodiment, both the cleaning fluid atomizing nozzle 121 and the cleaning fluid tilting nozzle 123 can spray cleaning fluid, and the two nozzles can be used simultaneously or only one of them can be used. Due to the difference between the cleaning fluid atomizing nozzle 121 and the cleaning fluid tilting nozzle 123, their cleaning effects also differ. The cleaning fluid sprayed from the cleaning fluid tilting nozzle 123 acts on the material sheet at an acute angle, making it easier to wash away dirt from the surface of the material sheet. However, due to the tilted spray, its impact force is smaller than that of the vertical spray. Therefore, combining the cleaning fluid tilting nozzle 123 and the cleaning fluid atomizing nozzle 121 can take into account the advantages of both spray angles and produce a better cleaning effect on the material sheet.

[0094] The media inlet of the adhesive spray nozzle 122 includes an adhesive inlet and an anti-clogging inlet. The adhesive inlet is used to connect to the adhesive pump to achieve the function of spraying adhesive liquid. The anti-clogging inlet can be connected to a cleaning fluid pump so that after the adhesive is sprayed, cleaning fluid is pumped in through the anti-clogging inlet. The cleaning fluid washes away any adhesive residue stuck to the nozzle of the adhesive spray nozzle 122, preventing the nozzle from clogging after the adhesive dries and affecting its use.

[0095] The cleaning fluid atomizing nozzle 121 has a cleaning fluid inlet and a compressed air inlet. The cleaning fluid inlet is used to connect to a cleaning fluid pump to spray the cleaning fluid, and the compressed air inlet can be connected to a compressed air source or compressor. During the drying process after the sheet is cleaned, compressed air can be introduced through the compressed air inlet to spray compressed air onto the sheet. Combined with the centrifugal drying process of the placement table 320, the drying process of the sheet can be accelerated.

[0096] To avoid the spray head assembly 120 affecting the loading and unloading of the material sheet, in this embodiment, as shown in Figure 2, the inner wall of the cleaning tank 201 has an outwardly recessed hidden space 2012. When the spraying mechanism 100 is not in operation, the spray head assembly 120 is hidden in the hidden space 2012 to make room above the placement platform 320. When the spray head assembly 120 needs to spray cleaning fluid and / or adhesive, it is driven to the working position by the spraying drive component 110.

[0097] After the adhesive is applied, the adhesive nozzle 122 needs to be sprayed with cleaning fluid to clean the nozzle and prevent the adhesive from sticking to the nozzle and affecting its use. During the cleaning process of the adhesive nozzle 122, cleaning fluid needs to be sprayed, and some adhesive will also be washed out. If the spraying area is too large, it will contaminate the placement table 320 and even the material sheets on the placement table 320.

[0098] As shown in Figure 5, based on this, in this embodiment, a baffle 217 is provided in the hidden space 2012 to cover the nozzle of the spray head assembly 120. When cleaning the spray nozzle 122, the spray head assembly 120 can be swung to the position of the baffle 217 by the spray driving component 110, and then the cleaning fluid can be sprayed to clean the nozzle. The sprayed cleaning fluid and adhesive will be blocked by the baffle 217 to prevent splashing over a larger area. There should be a gap between the bottom of the baffle 217 and the bottom of the hidden space 2012 so that the sprayed cleaning fluid can flow into the cleaning tank 201 through the gap and be drained away by the drain pipe 205.

[0099] Furthermore, the spraying mechanism 100 may also include a spraying lifting device 130, with a spraying drive component 110 disposed at the output end of the spraying lifting device 130 to drive the spraying drive component 110 to perform lifting and lowering actions. When cleaning the adhesive nozzle 122, the spraying head assembly 120 can be swung to the position of the baffle plate 217 by the spraying drive component 110, and then the spraying lifting device 130 drives the spraying head assembly 120 to descend, so that the adhesive nozzle of the adhesive nozzle 122 is lowered into the baffle plate 217, and then cleaning fluid is sprayed to clean the adhesive nozzle, which can completely prevent the sprayed cleaning fluid and adhesive from spreading to the outside. When the spraying head assembly 120 needs to be used, the spraying lifting device 130 needs to drive the spraying drive component 110 to rise, and then swing it towards the direction above the placement platform 320 to prevent collision with the baffle plate 217.

[0100] This application also discloses a laser processing apparatus, which includes the cleaning equipment disclosed in the above embodiments. Since it incorporates the aforementioned cleaning equipment, it possesses all the technical effects of the above-described cleaning equipment, and will not be elaborated upon further herein.

[0101] In this application, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements. An element defined by the phrase "comprising an..." does not exclude the presence of other identical elements in the process, method, product, or apparatus that includes the element.

[0102] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0103] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0104] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. A cleaning mechanism, characterized in that, include: A cleaning tank (201) has a first through hole (2013) at its bottom; The bottom plate assembly (219) is fixed to the bottom of the cleaning tank (201), and the bottom plate assembly (219) has a bottom plate through hole communicating with the first through hole (2013). The bottom plate through hole is used for sealing connection with the placement platform system (300). The placement platform system (300) has a placement platform (320) located inside the cleaning tank (201) for placing the material pieces. The first leak-proof component includes a first leak-proof receiving groove (215) fixed to the base plate assembly (219) and arranged around the base plate through a hole, and a first leak-proof drainage component (218) communicating with the bottom of the first leak-proof receiving groove (215).

2. The cleaning mechanism as described in claim 1, characterized in that, The base plate assembly (219) includes a first base plate (214) and a second base plate (212) disposed at the bottom of the first base plate (214); The first base plate (214) is disposed in the first through hole (2013), and the base plate through hole includes a second through hole disposed on the first base plate (214), and the second through hole is sealed to the placement platform system (300); The bottom of the cleaning tub (201) is fixed to the second base plate (212). The base plate through hole also includes a third through hole (2121) provided on the second base plate (212). The first side wall of the first leak-proof receiving groove (215) is fixed to the second base plate (212). The second side wall extends into the third through hole (2121) and extends towards the first base plate (214). The height of the second side wall is higher than the height of the upper surface of the second base plate (212).

3. The cleaning mechanism as described in claim 2, characterized in that, The base plate assembly (219) includes a third base plate (216), which is disposed on the upper surface of the first base plate (214), and the edge of the third base plate (216) has a first fold plate (2161) that is bent downward. The bottom of the cleaning tub (201) has an upwardly bent second folding plate (2011), which forms the first through hole (2013). The first folding plate (2161) is located on the outer ring of the second folding plate (2011) and together with the second folding plate (2011) and the bottom of the cleaning tub (201) forms a waterproof groove. The first folding plate (2161) and the second folding plate (2011) have an overlapping area in the height direction.

4. The cleaning mechanism as described in claim 3, characterized in that, The second folding plate (2011) includes an upwardly extending second upper folding plate and a second side folding plate located at the end of the second upper folding plate and extending in the direction of the first folding plate (2161).

5. The cleaning mechanism as described in claim 2, characterized in that, It also includes a second leak-proof component, which includes a second leak-proof receiving groove (209) fixed to the outer ring of the second base plate (212) and a second leak-proof drainage component (208) connected to the bottom of the second leak-proof receiving groove (209).

6. The cleaning mechanism as described in claim 5, characterized in that, The bottom wall of the second leak-proof receiving groove (209) is fixed to the bottom of the second base plate (212), and the upper surface of the outer side wall of the second leak-proof receiving groove (209) is higher than the upper surface of the second base plate (212).

7. The cleaning mechanism according to any one of claims 1-6, characterized in that, The side wall of the cleaning tank (201) is provided with a drainage mist pipe (204) communicating with the cleaning tank (201); and / or, The bottom wall of the cleaning tank (201) is provided with a drain pipe (205) communicating with the cleaning tank (201); and / or, A partition (213) is provided inside the cleaning tank (201). The partition (213) is located between the bottom wall of the cleaning tank (201) and the placement platform (320) of the placement platform system (300), and the partition (213) has a through hole; and / or, The inner wall of the cleaning tub (201) is lined with a sponge layer (211).

8. The cleaning mechanism according to any one of claims 1-6, characterized in that, The base plate assembly (219) is supported on the base (202) by a support beam (203), and a vibration isolation member (210) is provided between the support beam (203) and the base plate assembly (219).

9. A cleaning device, characterized in that, include: The cleaning mechanism (200) is the cleaning mechanism (200) as described in any one of claims 1-8; The placement platform system (300) includes a placement platform (320) disposed inside the cleaning tank (201) and a placement platform drive (310) disposed outside the cleaning tank (201). The placement platform drive (310) is connected to the placement platform (320) via a transmission component to drive the placement platform (320) to rotate. The transmission component is sealed to the bottom plate through a hole. The spraying mechanism (100) includes a spray head assembly (120) disposed inside the cleaning tank (201) and a spraying drive (110) disposed outside the cleaning tank (201). The spraying drive (110) is connected to the output end of the spray head assembly (120) via a swing rod (140) to drive the spray head assembly (120) to swing. The output end of the spray head assembly (120) passes through the base plate assembly (219) and is sealed to the base plate assembly (219).

10. The cleaning equipment as described in claim 9, characterized in that, When the cleaning equipment is a cleaning and coating device, the spray head assembly (120) includes at least a cleaning fluid atomizing nozzle (121) and an adhesive spray head (122); When the cleaning equipment is a cleaning device, the spray head assembly (120) includes at least a cleaning fluid atomizing nozzle (121).

11. The cleaning equipment as described in claim 10, characterized in that, The spray head assembly (120) also includes a cleaning fluid tilting nozzle (123), wherein the spraying direction of the cleaning fluid atomizing nozzle (121) is perpendicular to the material sheet, and the spraying direction of the cleaning fluid tilting nozzle (123) is at an acute angle to the material sheet.

12. The cleaning equipment as described in claim 10, characterized in that, The media inlet of the adhesive spray nozzle (122) includes an adhesive inlet and an anti-clogging inlet; and / or, The medium inlet of the cleaning fluid atomizing nozzle (121) includes a cleaning fluid inlet and a compressed air inlet.

13. The cleaning equipment as described in claim 9, characterized in that, The inner wall of the cleaning tank (201) has an outwardly recessed hidden space (2012), and when the spraying mechanism (100) is in a non-working state, the spraying head assembly (120) is hidden in the hidden space (2012).

14. A laser processing apparatus, characterized in that, Includes the cleaning equipment as described in any one of claims 9-13.

Images