Electro-conductive contact pin, electro-conductive contact pin array, and inspection device

Abstract

The present invention provides: an electro-conductive contact pin array for responding to a narrow pitch of a semiconductor package; and an inspection device, and provides an electro-conductive contact pin that maintains a restoring force while ensuring a compressible space.

Description

Electrically conductive contact pin, electrically conductive contact pin array, and inspection device

[0001] The present invention relates to an electrically conductive contact pin, an electrically conductive contact pin array, and an inspection device, and more specifically, to an electrically conductive contact pin, an electrically conductive contact pin array, and an inspection device for accommodating a narrow pitch.

[0002] High-performance and high-density semiconductor packages are technologies developed to achieve higher performance and efficiency within limited spaces; representative examples include Ball Grid Array (BGA), Chip Scale Package (CSP), and 3D stacked packages. These packages are used in applications requiring high data transfer speeds and low power consumption, with High Bandwidth Memory (HBM) being a prime example of high-performance memory technology. HBM provides significantly higher bandwidth and efficiency than conventional memory through a 3D stacked structure based on Through Silicon Via (TSV) and interposers. However, HBM design requires multiple terminals to maximize data transmission paths, making narrow-pitch design—which reduces the spacing between terminals—essential. Narrow pitch is a key technology that maximizes data transfer speeds while maintaining signal integrity by increasing terminal density per unit area and reducing power consumption.

[0003] Circuit boards in semiconductor sockets used to test the electrical characteristics of HBM semiconductor packages are generally designed to have a wide pitch. This approach takes into account the ease of existing testing processes and manufacturing. However, the wide pitch of these circuit boards presents a problem of incompatibility with HBM semiconductor packages that have a narrow pitch structure. Due to pitch mismatch, the likelihood of inaccuracies occurring during signal transmission increases, and electrical problems such as signal interference or delay may arise. Consequently, it is difficult to accurately test the electrical characteristics of HBM semiconductor packages, leading to a more complex design for testing equipment and increased costs.

[0004] The semiconductor socket pins used in the prior art are designed only in a fixed shape, and this can only correspond to circuit boards having a wide pitch. According to FIG. 1, the conventional electrically conductive contact pin (100') (or a set thereof (10')) can be used when the pitch spacing of the external terminal (31) provided on the object to be inspected (30) and the pitch spacing of the circuit terminal (21) provided on the circuit board (22) are the same. When the pitch spacing of the external terminal (31) is different from the pitch spacing of the circuit terminal (21), it can be used as a means for semiconductor inspection only after designing the wires using a separate interposer.

[0005] Such fixed designs are incompatible with HBM semiconductor packages having a narrow pitch structure and cannot guarantee the accuracy and stability of signal transmission due to pitch differences. Therefore, a new technical approach is required to overcome the pitch mismatch between the HBM semiconductor package and the circuit board and to resolve problems occurring during the inspection process.

[0006] [Prior Art Literature]

[0007] [Patent Literature]

[0008] Registration No. 10-1574448 Registered Patent Publication

[0009] To solve the aforementioned problems, the present invention aims to provide an electrically conductive contact pin array and an inspection device for accommodating the narrow pitch of a semiconductor package.

[0010] In addition, the present invention aims to provide an electrically conductive contact pin that maintains resilience while ensuring a compressible space.

[0011] To achieve the above-mentioned objective, an electrically conductive contact pin array according to an embodiment of the present invention comprises a plurality of electrically conductive contact pins for inspecting the electrical characteristics of an object to be inspected, wherein each of the plurality of electrically conductive contact pins comprises: a target contact tip that is electrically in contact with the object to be inspected; a circuit contact tip that is electrically in contact with a circuit board; and an elastic part that elastically deforms between the target contact tip and the circuit contact tip; and the circuit contact tips of the plurality of electrically conductive contact pins may each be provided at different width positions of the electrically conductive contact pins.

[0012] In addition, in an embodiment of the present invention, the first target contact tip of the first electrically conductive contact pin and the second target contact tip of the second electrically conductive contact pin are provided at the same width position with respect to each of the electrically conductive contact pins, the first circuit contact tip of the first electrically conductive contact pin is provided at the same width position as the first target contact tip, and the second circuit contact tip of the second electrically conductive contact pin may be provided at a different width position from the second target contact tip.

[0013] In addition, in an embodiment of the present invention, among the plurality of electrically conductive contact pins, the distance between two adjacent circuit contact tips may all be the same.

[0014] In addition, in an embodiment of the present invention, among the plurality of electrically conductive contact pins, the distance between two adjacent circuit contact tips may be greater than the distance between two adjacent target contact pins.

[0015] Meanwhile, an inspection device according to an embodiment of the present invention is an inspection device for inspecting the electrical characteristics of an object to be inspected, comprising: a plurality of electrically conductive contact pins each comprising a target contact tip electrically contacting the object to be inspected, a circuit contact tip electrically contacting a circuit board, and an elastic part elastically deformed between the target contact tip and the circuit contact tip; a first guide plate having a plurality of first through holes through which the target contact tips of the plurality of electrically conductive contact pins pass; and a second guide plate having a plurality of second through holes through which the circuit contact tips of the plurality of electrically conductive contact pins pass. The circuit contact tips of the plurality of electrically conductive contact pins may each be provided at different positions of the electrically conductive contact pins.

[0016] In addition, in an embodiment of the present invention, the distance between the plurality of second through holes is greater than the distance between the plurality of first through holes, the target contact tip is provided at a position corresponding to the first through hole, and the circuit contact tip may be provided at a position corresponding to the second through hole.

[0017] Meanwhile, an electrically conductive contact pin according to an embodiment of the present invention is an electrically conductive contact pin for inspecting the electrical characteristics of an object to be inspected, comprising: a target contact tip that is electrically contacted to the object to be inspected; a circuit contact tip that is electrically contacted to a circuit board; and an elastic part that undergoes elastic deformation between the target contact tip and the circuit contact tip, wherein the elastic part may include a contraction part that contracts in the one direction by the one-direction movement of the target contact tip and a tension part that is stretched in the one direction by the one-direction movement of the target contact tip.

[0018] In addition, in an embodiment of the present invention, the elastic pitch of the contraction portion may be greater than the elastic pitch of the tension portion.

[0019] In addition, the electrically conductive contact pin according to an embodiment of the present invention further comprises a frame portion having the elastic portion inside; wherein the frame portion comprises a first contact portion protruding in a length direction and having a through hole formed in the length direction, and the target contact tip and the first contact portion can come into contact to form a current path.

[0020] In addition, in an embodiment of the present invention, the frame portion further includes a second contact portion that protrudes in the other length direction and has a through hole formed in the other length direction, and the circuit contact tip and the second contact portion can come into contact to form a current path.

[0021] In addition, the electrically conductive contact pin according to an embodiment of the present invention further comprises a frame portion having the elastic portion inside; and the frame portion may include a fixing portion that protrudes in the longitudinal direction and is inserted and fixed to a fixing member of a guide plate.

[0022] The present invention has the effect of being able to accommodate a narrow pitch of a semiconductor package even with a circuit board having a relatively wide pitch through a plurality of electrically conductive contact pins of different structures of the semiconductor package.

[0023] In addition, the present invention has the effect of sufficiently ensuring a compressible space through a compression section with a large elastic pitch, while also sufficiently maintaining a restoring force through a tension section with a small elastic pitch.

[0024] Figure 1 is a drawing showing a conventional electrically conductive contact pin.

[0025] FIG. 2 is a drawing showing an electrically conductive contact pin array composed of three electrically conductive contact pins according to an embodiment of the present invention and an inspection device equipped with the same.

[0026] FIG. 3 is a drawing showing an electrically conductive contact pin array composed of four electrically conductive contact pins according to an embodiment of the present invention and an inspection device equipped with the same.

[0027] FIG. 4 is a drawing showing an electrically conductive contact pin according to an embodiment of the present invention.

[0028] FIG. 5 is a diagram showing the state in which an electrically conductive contact pin according to an embodiment of the present invention is in contact with an external terminal and a circuit terminal.

[0029] FIG. 6 is a diagram showing the compressed state of an electrically conductive contact pin according to an embodiment of the present invention.

[0030] Figure 7 is an enlarged view of the R1 area of ​​Figure 5.

[0031] Figure 8 is an enlarged view of the R2 area of ​​Figure 5.

[0032] Figure 9 is an enlarged view of the R3 area of ​​Figure 5.

[0033] A person skilled in the art can develop various devices that embody the principles of the invention and are included within the concept and scope of the invention, even though they are not explicitly described or illustrated in this specification. Furthermore, all conditional terms and embodiments listed in this specification are, in principle, explicitly intended only for the purpose of enabling an understanding of the concept of the invention and should be understood as not being limited to the embodiments and conditions specifically listed as such.

[0034] The aforementioned objectives, features, and advantages will become more apparent through the following detailed description of the invention in conjunction with the attached drawings, and accordingly, a person skilled in the art to which the invention pertains will be able to easily implement the technical concept of the invention.

[0035] The embodiments described herein will be explained with reference to cross-sectional and / or perspective views, which are exemplary illustrations of the present invention. The dimensions, etc., of the components shown in these drawings may be exaggerated for effective explanation of the technical content. The shapes of the exemplary illustrations may be modified due to manufacturing technology and / or tolerances, etc.

[0036] In describing various embodiments, for convenience, the same name and the same reference number will be assigned to components performing the same function, even if the embodiments are different. In this specification, directions are described based on FIG. 2, and the width direction may refer to the x-axis direction, the length direction to the y-axis direction, and the thickness direction to the z-axis direction.

[0037] First, an electrically conductive contact pin array (10) according to an embodiment of the present invention will be described.

[0038] FIG. 1 is a drawing showing a conventional electrically conductive contact pin (100'). FIG. 2 is a drawing showing an electrically conductive contact pin array (10) composed of three electrically conductive contact pins (100) according to an embodiment of the present invention and an inspection device (20) equipped therewith. FIG. 3 is a drawing showing an electrically conductive contact pin array (10) composed of four electrically conductive contact pins (100) according to an embodiment of the present invention and an inspection device (20) equipped therewith.

[0039] Referring to FIGS. 2 and 3, an electrically conductive contact pin array (10) according to an embodiment of the present invention may include a plurality of electrically conductive contact pins (100) for inspecting the electrical characteristics of an object to be inspected (30). Each of the plurality of electrically conductive contact pins (100) may include: a target contact tip (110) that is electrically in contact with the object to be inspected (30); a circuit contact tip (120) that is electrically in contact with a circuit board (22); and an elastic part (130) that elastically deforms between the target contact tip (110) and the circuit contact tip (120). The circuit contact tips (120) of the plurality of electrically conductive contact pins (100) may each be provided at different width positions of the electrically conductive contact pins (100).

[0040] An electrically conductive contact pin array (10) may be provided with electrically conductive contact pins (100) aligned in the width direction. Additionally, a plurality of electrically conductive contact pins (100) may be provided in the width direction, but are described herein as being aligned in the width direction (see FIG. 2).

[0041] The target contact tip (110) can be electrically contacted with the object to be inspected (30). Being electrically contacted can be used to mean being electrically connected to the object to be inspected (30). Specifically, the target contact tip (110) can be directly contacted with the external terminal (31) of the object to be inspected (30) to exchange electrical signals with the object to be inspected (30).

[0042] The object to be tested (30) may be any one of an HBM, memory, CPU, and GPU as a semiconductor package. The object to be tested (30) is not necessarily limited to those described above and may refer to any electronic component that is the subject of testing for electrical characteristics.

[0043] The circuit contact tip (120) can be electrically contacted to the circuit board (22). Being electrically contacted can be used to mean being electrically connected to the circuit board (22). Specifically, the circuit contact tip (120) can be directly contacted to the circuit terminal (21) of the circuit board (22) to exchange electrical signals with the circuit board (22).

[0044] The elastic part (130) can elastically deform between the target contact tip (110) and the circuit contact tip (120). The elastic part (130) is connected to the target contact tip (110) and can contract or be stretched when the target contact tip (110) receives a force from the object to be inspected (30). Additionally, the elastic part (130) is connected to the circuit contact tip (120) and can contract when the circuit contact tip (120) receives a force from the circuit board (22).

[0045] The target contact tips (110) of a plurality of electrically conductive contact pins (100) may each be provided at the same width position of the electrically conductive contact pins (100). The target contact tips (110) of the first electrically conductive contact pin (101) to the third electrically conductive contact pin (103) may all be provided at the same position of the first electrically conductive contact pin (101) to the third electrically conductive contact pin (103).

[0046] Alternatively, the circuit contact tips (120) of a plurality of electrically conductive contact pins (100) may each be provided at different width positions of the electrically conductive contact pins (100). The circuit contact tip (120) of the first electrically conductive contact pin (101) may be provided at a first position of the first electrically conductive contact pin (101), the circuit contact tip (120) of the second electrically conductive contact pin (102) may be provided at a second position of the second electrically conductive contact pin (102), and the circuit contact tip (120) of the third electrically conductive contact pin (103) may be provided at a third position of the third electrically conductive contact pin (103). The same applies even when the plurality of electrically conductive contact pins (100) includes the first electrically conductive contact pin (101) to the nth electrically conductive contact pin.

[0047] An electrically conductive contact pin array (10) according to an embodiment of the present invention can be used to test electrical characteristics even when the pitch spacing of the external terminal (31) provided on the object to be tested (30) and the pitch spacing of the circuit terminal (21) provided on the circuit board (22) are different, by providing circuit contact tips (120) at different positions of each electrically conductive contact pin (100).

[0048] The electrically conductive contact pin array (10) according to an embodiment of the present invention is configured to correspond to different pitch spacings, thereby having the effect of increasing the accuracy and stability of signal transmission.

[0049] The first target contact tip (110) of the first electrically conductive contact pin (101) and the second target contact tip (110) of the second electrically conductive contact pin (102) may be provided at the same width position relative to each electrically conductive contact pin (100). The first circuit contact tip (120) of the first electrically conductive contact pin (101) may be provided at the same width position as the first target contact tip (110). The second circuit contact tip (120) of the second electrically conductive contact pin (102) may be provided at a different width position from the second target contact tip (110).

[0050] That is, the electrically conductive contact pin (100) located on one edge may have the target contact tip (110) and the circuit contact tip (120) provided at the same width position (or on the same vertical line), and the electrically conductive contact pin (100) located on the other edge may have the target contact tip (110) and the circuit contact tip (120) provided at different width positions (or on different vertical lines).

[0051] A plurality of electrically conductive contact pins (100) may each have a different distance (hereinafter referred to as ‘tip distance (TD)’) between the width position of the target contact tip (110) and the width position of the circuit contact tip (120).

[0052] For example, an electrically conductive contact pin (100) located at one edge (e.g., a first electrically conductive contact pin (101)) may have a tip distance (TD) of 0, and an electrically conductive contact pin (100) located at the other edge (e.g., the nth electrically conductive contact pin) may have the largest tip distance (TD) in the electrically conductive contact pin array (10).

[0053] A plurality of electrically conductive contact pins (100) aligned in the width direction may be provided such that the tip distance (TD) gradually increases from one side to the other in the width direction, and the amount of increase in the tip distance (TD) may be the same. Specifically, the first electrically conductive contact pin (101) to the nth electrically conductive contact pin may be provided such that the tip distance (TD) gradually increases.

[0054] Among the plurality of electrically conductive contact pins (100), the distance (D1) between two adjacent target contact tips (110) may all be the same. The distance (D1) between two adjacent target contact tips (110) may be the same as the pitch spacing of the external terminal (31) provided on the object to be inspected (30). In this specification, the meaning of "adjacent" in relation to the description of the target contact tip (110) and the circuit contact tip (120) may mean adjacent in the width direction.

[0055] Among the plurality of electrically conductive contact pins (100), the distance (D2) between two adjacent circuit contact tips (110) may all be the same. The distance (D2) between two adjacent circuit contact tips (110) may be the same as the pitch spacing of the circuit terminals (21) provided on the circuit board (22). However, the circuit terminals (21) provided at positions not corresponding to the circuit contact tips (120) shown in FIG. 2 are shown for convenience of explanation.

[0056] The distance (D2) between two adjacent circuit contact tips (110) may differ from the distance between two adjacent target contact pins. When a narrow pitch is implemented in the object to be inspected (30), the pitch spacing of the object to be inspected (30) may be very narrow. In this case, the distance (D2) between two adjacent circuit contact tips (110) may be greater than the distance (D1) between two adjacent target contact tips (110). Alternatively, the distance (D2) between two adjacent circuit contact tips (110) may be smaller than the distance (D1) between two adjacent target contact tips (110).

[0057] The distance (D2) between two adjacent circuit contact tips (110) can be the same. The distance (D1) between two adjacent target contact tips (110) can be the same.

[0058] An electrically conductive contact pin array (10) according to an embodiment of the present invention is arranged such that a plurality of electrically conductive contact pins (100) are aligned in the width direction and the tip distance (TD) gradually increases, thereby enabling it to correspond to a circuit board (22) having a pitch spacing greater than the pitch spacing of an object to be inspected (30) without a separate configuration (e.g., an interposer).

[0059] Referring again to FIG. 2, the tip distance (TD) of the first electrically conductive contact pin (101) may be 0, and the tip distance (TD) of the third electrically conductive contact pin (103) may be D (maximum value). The tip distance (TD) of the second electrically conductive contact pin (102) may be D / 2.

[0060] Referring to FIG. 3, the tip distance (TD) of the first electrically conductive contact pin (101) may be 0, and the tip distance (TD) of the fourth electrically conductive contact pin (104) may be D (maximum value). The tip distance (TD) of the second electrically conductive contact pin (102) may be D / 3. The tip distance (TD) of the third electrically conductive contact pin (103) may be 2D / 3.

[0061] When the tip distance (TD) of the first electrically conductive contact pin (101) is 0 and the tip distance (TD) of the nth electrically conductive contact pin is D, the tip distance (TD) of the kth electrically conductive contact pin may be (k-1)*D / (n-1). In this case, k may be a natural number in the range of 1 to n.

[0062] An electrically conductive contact pin array (10) may include a plurality of electrically conductive contact pins (100) aligned in the width direction and the thickness direction. The plurality of electrically conductive contact pins (100) aligned in the width direction may have circuit contact tips (120) all at different width positions to extend the pitch spacing in the width direction. Alternatively, the plurality of electrically conductive contact pins (100) aligned in the thickness direction may have target contact tips (110) and circuit contact tips (120) all at the same width position.

[0063] Next, an inspection device (20) according to an embodiment of the present invention will be described.

[0064] Referring again to FIG. 3, an inspection device (20) according to an embodiment of the present invention can inspect the electrical characteristics of an object to be inspected (30). The inspection device (20) may include an electrically conductive contact pin array (10) in which electrically conductive contact pins (100) are arranged in a width direction. Specifically, the inspection device (20) may include a plurality of electrically conductive contact pins (100).

[0065] An inspection device (20) according to an embodiment of the present invention may include: a plurality of electrically conductive contact pins (100) each comprising a target contact tip (110) that is electrically contacted to an object to be inspected (30), a circuit contact tip (120) that is electrically contacted to a circuit board (22), and an elastic part (130) that elastically deforms between the target contact tip (110) and the circuit contact tip (120); a first guide plate (210) having a plurality of first through holes (211) through which the target contact tip (110) of the plurality of electrically conductive contact pins (100) passes; and a second guide plate (220) having a plurality of second through holes (221) through which the circuit contact tip (120) of the plurality of electrically conductive contact pins (100) passes. The inspection device (20) may further include a first support member (310) supporting a first guide plate (210), a second support member (320) supporting a second guide plate (220), and a guide film (330) that guides the insertion of an electrically conductive contact pin (100).

[0066] The first guide plate (210) may include a plurality of first through holes (211) through which the target contact tips (110) of a plurality of electrically conductive contact pins (100) pass. The first guide plate (210) may support the electrically conductive contact pins (100) from the top (or one side).

[0067] The first through hole (211) may be provided at a position corresponding to a target contact tip (110) included in an electrically conductive contact pin array (10). The first through hole (211) may be provided in the width direction at a position corresponding to a target contact tip (110) of a plurality of electrically conductive contact pins (100). Among the plurality of first through holes (211), the distance between two first through holes (211) adjacent to each other may all be the same.

[0068] The second guide plate (220) may include a plurality of second through holes (221) through which the circuit contact tips (120) of a plurality of electrically conductive contact pins (100) pass. The second guide plate (220) may support the electrically conductive contact pins (100) from the bottom (or the other side).

[0069] The second through hole (221) may be provided at a position corresponding to the circuit contact tip (120) included in the electrically conductive contact pin array (10). The second through hole (221) may be provided in the width direction at a position corresponding to the target contact tip (110) of the plurality of electrically conductive contact pins (100). Among the plurality of second through holes (221), the distance between two adjacent second through holes (221) may all be the same.

[0070] The distance between two adjacent first penetration holes (211) may differ from the distance between two adjacent second penetration holes (221). When a narrow pitch is implemented in the object to be inspected (30), the pitch spacing of the object to be inspected (30) may be very narrow. In this case, the distance between two adjacent first penetration holes (211) may be smaller than the distance between two adjacent second penetration holes (221). Alternatively, the distance between two adjacent first penetration holes (211) may be larger than the distance between two adjacent second penetration holes (221).

[0071] The first support member (310) can support the first guide plate (210) on one side of the first guide plate (210), and the second support member (320) can support the second guide plate (220) on one side of the second guide plate (220). The guide film (330) is positioned between the first support member (310) and the second support member (320) to guide the insertion of the electrically conductive pin. The guide film (330) can suppress shaking or twisting of the electrically conductive contact pin (100) when the electrically conductive contact pin (100) contracts and returns to its original state, and can block the inflow of foreign matter in the longitudinal direction.

[0072] In the inspection device (20) according to an embodiment of the present invention, a plurality of electrically conductive contact pins (100) are arranged so that the tip distance (TD) gradually increases as they are aligned in the width direction, and the distance between a plurality of second through holes (221) is arranged to be greater than the distance between a plurality of first through holes (211), thereby allowing it to respond to a circuit board (22) having a pitch spacing greater than the pitch spacing of the object to be inspected (30) without a separate configuration.

[0073] Next, an electrically conductive contact pin (100) according to an embodiment of the present invention will be described.

[0074] FIG. 4 is a drawing showing an electrically conductive contact pin (100) according to an embodiment of the present invention. FIG. 5 is a drawing showing the state in which the electrically conductive contact pin (100) according to an embodiment of the present invention is in contact with an external terminal (31) and a circuit terminal (21). FIG. 6 is a drawing showing the compressed state of the electrically conductive contact pin (100) according to an embodiment of the present invention. FIG. 7 is an enlarged view of the R1 region of FIG. 5. FIG. 8 is an enlarged view of the R2 region of FIG. 5. FIG. 9 is an enlarged view of the R3 region of FIG. 5.

[0075] Referring to FIG. 4, an electrically conductive contact pin (100) according to an embodiment of the present invention can inspect the electrical characteristics of an object to be inspected (30). The electrically conductive contact pin (100) includes a target contact tip (110), a circuit contact tip (120), and an elastic part (130), and their configuration and effects are as described above. The electrically conductive contact pin (100) may include a frame part (140) that surrounds the elastic part (130), a first elastic split part (150) that distinguishes (or separates) the tension part (132) and the contraction part (131), and a second elastic split part (160) that distinguishes (or separates) the contraction part (131) and the circuit elastic part (133).

[0076] The frame portion (140) may have an elastic portion (130) inside. The elastic portion (130) may be formed by extending from the frame portion (140). The elastic portion (130) may include a contraction portion (131) that contracts in one direction by one-way movement of the target contact tip (110) and a tension portion (132) that is stretched in one direction by one-way movement of the target contact tip (110). The elastic portion (130) may further include a circuit elastic portion (133) that contracts in another direction (or one direction) by other-direction (or one-direction) movement of the circuit contact tip (120).

[0077] The contraction portion (131), the tension portion (132), and the circuit elastic portion (133) may each include a plurality of straight portions and a plurality of connecting portions. The straight portion may be formed to extend in the width direction. The connecting portion may be formed to be curved in the width direction and extended in the length direction.

[0078] The electrically conductive contact pin (100) can inspect the electrical characteristics of the object to be inspected (30) through an electrical signal while in a contracted state due to a force from the object to be inspected (30). This is called the overdrive state. In the overdrive state, the electrically conductive contact pin (100) can contract by the elastic part (130).

[0079] The object to be inspected (30) can receive force from a pusher (not shown) and transmit it to an electrically conductive contact pin (100). At this time, the target contact tip (110) of the electrically conductive contact pin (100) can move in one direction, and the circuit contact tip (120) of the electrically conductive contact pin (100) can move in the other direction.

[0080] The contraction portion (131) may be provided to extend from the frame portion (140) and be capable of contracting and stretching in the longitudinal direction. The contraction portion (131) may be formed with a repeating structure of straight portions and connecting portions. One end of the contraction portion (131) may be connected to the frame portion (140), and the other end may be connected to the first elastic split portion (150).

[0081] The contraction portion (131) may be located in the direction of the circuit board (22) or the circuit contact tip (120) relative to the first elastic division portion (150). At this time, the first elastic division portion (150) may be provided by extending in the width direction from one end of the target contact tip (110). One end of the first elastic division portion (150) may be connected to the tension portion (132) in the length direction, and the other end may be connected to the contraction portion (131) in the length direction. The first elastic division portion (150) may be spaced apart from the frame portion (140) in the width direction and may move in the length direction within the frame portion (140). However, the first elastic division portion (150) may move relative to the frame portion (140) while in contact with the frame portion (140) according to the elastic deformation of the elastic portion (130) within the frame portion (140). The first elastic splitter (150) can move together with the movement of the target contact tip (110).

[0082] The contraction portion (131) can be contracted in one direction by the one-way movement of the target contact tip (110). When the force exerted by the object to be inspected (30) is removed, the contraction portion (131) can move the target contact tip (110) in the other direction by the restoring force.

[0083] The tensioning portion (132) may be provided to extend from the frame portion (140) and be capable of contracting and stretching in the longitudinal direction. The tensioning portion (132) may be formed with a repeating structure of straight portions and connecting portions. One end of the tensioning portion (132) may be connected to the frame portion (140), and the other end may be connected to the first elastic split portion (150).

[0084] The tension portion (132) can be positioned in the direction of the inspection material (30) or the target contact tip (110) relative to the first elastic split portion (150).

[0085] The tensioning portion (132) can be tensioned in one direction by the one-way movement of the target contact tip (110). When the force exerted by the object to be inspected (30) is removed, the tensioning portion (132) can move the target contact tip (110) in the other direction by the restoring force.

[0086] The straight sections of the contraction section (131) and the tension section (132) have a shape that extends in the width direction and can be repeatedly provided in the length direction. At this time, the distance between adjacent straight sections is called the elastic pitch (EP).

[0087] The elastic pitch (EP) of the contraction portion (131) may be larger than the elastic pitch (EP) of the tension portion (132). The space corresponding to the elastic pitch (EP) of the contraction portion (131) may be larger than the space corresponding to the elastic pitch (EP) of the tension portion (132).

[0088] The smaller the elastic pitch (EP) of the contraction part (131), the smaller the internal space of the frame part (140) corresponding to the elastic pitch (EP). The smaller the elastic pitch (EP) of the contraction part (131), the smaller the allowable displacement (contracted length) of the contraction part (131).

[0089] Conversely, the larger the elastic pitch (EP) of the contraction part (131), the larger the internal space of the frame part (140) corresponding to the elastic pitch (EP). The larger the elastic pitch (EP) of the contraction part (131), the larger the allowable displacement of the contraction part (131).

[0090] The electrically conductive contact pin (100) needs to ensure an allowable displacement of the contraction portion (131) so that elastic deformation can be achieved to the required level. Since the target contact tip (110) can move in one direction, the pitch spacing of the contraction portion (131) located in one direction relative to the first elastic split portion (150) is increased (greater than the pitch spacing of the tension portion (132), thereby increasing the allowable displacement of the contraction portion (131).

[0091] When the force is removed from the target contact tip (110), the contraction part (131) can move the target contact tip (110) in the other direction by pushing it in the other direction by the restoring force. Likewise, when the force is removed from the target contact tip (110), the tension part (132) can move the target contact tip (110) in the other direction by pulling it in the other direction by the restoring force.

[0092] The target contact tip (110) can move in one direction and simultaneously apply force to the contraction part (131) and the tension part (132) to contract the contraction part (131) and tension the tension part (132). Conversely, the contraction part (131) and the tension part (132) can simultaneously apply force to the target contact tip (110) to move the target contact tip (110) in the other direction.

[0093] An electrically conductive contact pin (100) according to an embodiment of the present invention may provide a contraction space of the elastic portion (130) (or electrically conductive contact pin (100)) by having the elastic pitch (EP) of the contraction portion (131) be larger than the elastic pitch (EP) of the tension portion (132).

[0094] In addition, the electrically conductive contact pin (100) according to an embodiment of the present invention can provide sufficient restoring force to the elastic part (130) (or electrically conductive contact pin (100)) by the first elastic dividing part (150) separating or dividing the contraction part (131) and the tension part (132).

[0095] The circuit elastic portion (133) may be provided to extend from the frame portion (140) and be capable of contracting and / or stretching in the longitudinal direction. The circuit elastic portion (133) may be formed with a repeating structure of straight portions and connecting portions. One end of the circuit elastic portion (133) may be connected to the frame portion (140), and the other end may be connected to the circuit contact tip (120).

[0096] The circuit elastic part (133) may be positioned in the direction of the circuit board (22) or the circuit contact tip (120) based on the second elastic split part (160). At this time, the second elastic split part (160) may be provided by extending from the frame part (140) in the width direction. One end of the second elastic split part (160) may be connected to the frame part (140) in the width direction, and the other end may be connected to the frame part (140) in the width direction. The second elastic split part (160) may be connected to the frame part (140) and fixed within the frame part (140). The second elastic split part (160) may be fixed despite movement of the target contact tip (110) and the circuit contact tip (120).

[0097] The frame portion (140) is connected to one end of the contraction portion (131) and one end of the tension portion (132), so that the contraction portion (131) and the tension portion (132) cannot be directly connected to the circuit elastic portion (133). Additionally, the frame portion (140) is connected to one end of the circuit elastic portion (133), so that the circuit elastic portion (133) cannot be directly connected to the contraction portion and the tension portion. Thus, the target contact tip (110) and the circuit contact tip (120) can move independently of each other.

[0098] The target contact tip (110) may include a first part (111) that forms one side of the target contact tip (110) and contacts an external terminal (31) of the object to be inspected (30), and a second part (112) that forms the other side of the target contact tip (110) and is connected to the first part (111).

[0099] The first part (111) can move in the longitudinal direction through the first contact part (141) described later, and the second part (112) can move in the longitudinal direction inside the frame part (140). The first part (111) can be provided in a straight shape, and the second part (112) can be provided to have a plurality of curved regions in the width direction. The second part (112) can be provided with at least one protrusion (113) on one side and the other side in the width direction through the curved regions.

[0100] The second part (112) can form at least one contact with the inner wall of the frame part (140) in a compressed state of the electrically conductive contact pin (100). The contact between the second part (112) and the frame part (140) can form a current path between the second part (112) and the frame part (140).

[0101] At least one projection (113) of the second part (112) can reduce the frictional force generated between the target contact tip (110) and the frame part (140) when the target contact tip (110) moves in a compressed state of the electrically conductive contact pin (100).

[0102] The width of the second part (112) may be greater than the width of the first part (111). The difference in width between the second part (112) and the first part (111) may form a step between them to restrict the longitudinal movement of the target contact tip (110).

[0103] The frame portion (140) may include a limiting portion (146) that protrudes longitudinally from the frame portion (140) and restricts the movement of the target contact tip (110).

[0104] When the target contact tip (110) moves in one length direction due to the restoring force of the elastic part (130), the limiting part (146) can contact the first elastic split part (150) to limit the movement of the target contact tip (110).

[0105] When the tension portion (132) is restored or contracted by the restoring force of the elastic portion (130), the limiting portion (146) can contact the first elastic split portion (150) to limit the contraction of the tension portion (132). The elastic portion (130) can prevent the elastic portion (130) from wearing out by limiting repeated contact between two adjacent straight portions when the tension portion (132) contracts excessively.

[0106] Referring to FIG. 5, during the initial process of inspecting the electrical characteristics of the object to be inspected (30), the target contact tip (110) may come into contact with the external terminal (31) of the object to be inspected (30). At this time, the target contact tip (110) may be in an initial state, and the contracted portion (131) and the tensioned portion (132) may be in an initial state. During the initial process of inspecting the electrical characteristics of the object to be inspected (30), the circuit contact tip (120) may come into contact with the circuit terminal (21) of the circuit board (22). At this time, the circuit contact tip (120) may be in an initial state or in a state moved in the longitudinal direction, and the circuit elastic portion (133) may be in an initial state or in a state contracted in the longitudinal direction.

[0107] Referring to FIG. 6, during the intermediate process of inspecting the electrical characteristics of the object to be inspected (30), the target contact tip (110) may be subjected to force by the object to be inspected (30). At this time, the target contact tip (110) is in a state of movement in the longitudinal direction from the initial state, and the contraction part (131) and the tension part (132) may be in a contracted state and a tensioned state, respectively, from the initial state. The circuit contact tip (120) is in a state of movement in the longitudinal direction from the initial state, and the circuit elastic part (133) may be in a contracted state.

[0108] Although not shown in FIG. 6, the straight section may be tilted as the elastic section (130) contracts or stretches. At this time, as the target contact tip (110) tilts, it may come into contact with the frame section (140), and a current path may be formed along the target contact tip (110) and the frame section (140). Additionally, as the circuit contact tip (120) tilts, it may come into contact with the frame section (140), and a current path may be formed along the circuit contact tip (120) and the frame section (140). The current path formed between the target contact tip (110), the frame section (140), and the circuit contact tip (120) is a shortened path compared to the bypass path through which the current flows along the elastic section (130), thereby improving inspection reliability.

[0109] Referring to FIGS. 7 and 8, the frame portion (140) may include a first contact portion (141) that protrudes in one length direction and has a through hole (143) formed in one length direction, and a second contact portion (142) that protrudes in another length direction and has a through hole (143) formed in another length direction.

[0110] The first contact portion (141) may be formed to protrude in a longitudinal direction from the frame portion (140). The first contact portion (141) may be positioned by being inserted into the first through hole (211) of the first guide plate (210). The first contact portion (141) may provide a space in which the electrically conductive contact pin (100) is exposed to the outside (longitudinal direction) of the frame portion (140). The position of the first contact portion (141) on the electrically conductive contact pin (100) may be provided at a position corresponding to the target contact tip (110) and may be provided at a position corresponding to the first through hole (211) of the first guide plate (210).

[0111] The target contact tip (110) may be spaced apart from the first contact portion (141) in the width direction. In the overdrive state, the target contact tip (110) may come into contact with the first contact portion (141) while tilting under force from the object to be inspected (30), and a longitudinal current path may be formed between the target contact tip (110) and the first contact portion (141).

[0112] The second contact portion (142) may be formed to protrude from the frame portion (140) in a different longitudinal direction. The second contact portion (142) may be positioned by being inserted into the second through hole (221) of the second guide plate (220). The second contact portion (142) may provide a space where the electrically conductive contact pin (100) is exposed to the outside (longitudinal direction) of the frame portion (140). The position of the second contact portion (142) on the electrically conductive contact pin (100) may be provided at a position corresponding to the circuit contact tip (120) and may be provided at a position corresponding to the second through hole (221) of the second guide plate (220).

[0113] The circuit contact tip (120) may be spaced apart from the second contact portion (142) in the width direction. In the overdrive state, the circuit contact tip (120) may come into contact with the second contact portion (142) while tilting under force from the circuit board (22), and a longitudinal current path may be formed between the circuit contact tip (120) and the second contact portion (142).

[0114] Referring to FIG. 9, the frame portion (140) may include a fixing portion (144) that protrudes in the longitudinal direction and is inserted and fixed into a fixing member (212) of a guide plate. The fixing portion (144) may be formed to protrude from two points of the frame portion (140) while having a fixing slit (145) in between.

[0115] The first guide plate (210) and / or the second guide plate (220) may include a fixing member (212) into which the fixing member (144) is inserted. The fixing slit (145) may provide a space that can be narrowed when the fixing member (144) is inserted into the fixing member (212) of the guide plate.

[0116] In the electrically conductive contact pin (100), the first contact portion (141) may be provided protruding in the longitudinal direction from one side upper surface of the frame portion (140), and the fixing portion (144) may be provided protruding in the longitudinal direction from the other side upper surface of the frame portion (140). To correspond to this, a guide plate, particularly the first guide plate (210), may be provided with a first through hole (211) and a fixing member (212) at positions corresponding to the first contact portion (141) and the fixing portion (144), respectively.

[0117] While the target contact tip (110) may be provided at the same width position for each electrically conductive contact pin (100), the circuit contact tip (120) may be provided at different width positions for each electrically conductive contact pin (100). Since the circuit contact tip (120) is provided at different width positions, the area and direction in which each electrically conductive contact pin (100) receives force are all different, so the displacement pattern of the elastic part (130) may appear differently.

[0118] The fixed portion (144) is provided extending in the same length direction as the target contact tip (110) provided at the same width position and is firmly supported on the guide plate together with the first contact portion (141), thereby enabling uniform control of the electrically conductive contact pin (100) even though the circuit contact tip (120) is provided at different width positions.

[0119] The electrically conductive contact pin array (10), electrically conductive contact pin (100), and inspection device (20) according to an embodiment of the present invention can correspond to a narrow pitch of a semiconductor package even with a circuit board having a relatively wide pitch through a plurality of electrically conductive contact pins (100) of different structures of the semiconductor package.

[0120] The present invention has the effect that the electrically conductive contact pin array (10), the electrically conductive contact pin (100), and the inspection device (20) according to the embodiment can sufficiently ensure a compressible space through a compression part with a large elastic pitch (EP), while also sufficiently maintaining a restoring force through a tension part (132) with a small elastic pitch (EP).

[0121] As described above, although the present invention has been explained with reference to preferred embodiments, a person skilled in the art may implement the present invention with various modifications or variations without departing from the spirit and scope of the invention as described in the following claims.

[0122] [Explanation of the symbol]

[0123] 10: Electrically conductive contact pin array

[0124] 20 : Inspection device

[0125] 21 : Circuit terminal

[0126] 22 : Circuit board

[0127] 30 : Subject of inspection

[0128] 31 : External terminal

[0129] 100: Electrically conductive contact pin

[0130] 110 : Target contact tip

[0131] 111 : Part 1

[0132] 112 : Part 2

[0133] 113 : Protrusion

[0134] 120 : Circuit contact tip

[0135] 130 : Elastic part

[0136] 131 : Contraction part

[0137] 132 : Tension part

[0138] 133 : Circuit elasticity

[0139] 140 : Frame part

[0140] 141 : First contact part

[0141] 142 : Second contact part

[0142] 143 : Through hole

[0143] 144 : Fixed part

[0144] 145 : Fixed slit

[0145] 146 : Restriction

[0146] 150 : First elastic dividing part

[0147] 160 : Second elastic split section

[0148] 101: First electrically conductive contact pin

[0149] 102: Second electrically conductive contact pin

[0150] 103: Third electrically conductive contact pin

[0151] 104: 4th electrically conductive contact pin

[0152] 210: First guide plate

[0153] 211: First penetration

[0154] 212 : Fixture

[0155] 220 : Second guide plate

[0156] 221 : Second penetration

[0157] 310: 1st support section

[0158] 320 : 2nd Support Section

[0159] 330 : Guide film

[0160] EP: Elastic pitch

[0161] TD: Tip distance

Claims

1. An electrically conductive contact pin array comprising a plurality of electrically conductive contact pins for inspecting the electrical characteristics of an object to be inspected, Each of the above plurality of electrically conductive contact pins is, A target contact tip that is electrically in contact with the above-mentioned object to be inspected; a circuit contact tip that is electrically in contact with a circuit board; and an elastic part that undergoes elastic deformation between the target contact tip and the circuit contact tip; comprising An array of electrically conductive contact pins, wherein the circuit contact tips of the plurality of electrically conductive contact pins are each provided at different width positions of the electrically conductive contact pins.

2. In Paragraph 1, The first target contact tip of the first electrically conductive contact pin and the second target contact tip of the second electrically conductive contact pin are provided at the same width position with respect to each of the electrically conductive contact pins, and The first circuit contact tip of the first electrically conductive contact pin is provided at a position with the same width as the first target contact tip, and An array of electrically conductive contact pins, wherein the second circuit contact tip of the second electrically conductive contact pin is provided at a width position different from that of the second target contact tip.

3. In Paragraph 1, Among the plurality of electrically conductive contact pins mentioned above, An array of electrically conductive contact pins in which the distance between two adjacent circuit contact tips is the same.

4. In Paragraph 1, Among the plurality of electrically conductive contact pins mentioned above, An array of electrically conductive contact pins, wherein the distance between two adjacent circuit contact tips is greater than the distance between two adjacent target contact tips.

5. In an inspection device for inspecting the electrical characteristics of an object to be inspected, A plurality of electrically conductive contact pins, each comprising a target contact tip that electrically contacts the object to be inspected, a circuit contact tip that electrically contacts a circuit board, and an elastic part that elastically deforms between the target contact tip and the circuit contact tip; A first guide plate having a plurality of first through holes through which the target contact tips of the plurality of electrically conductive contact pins pass; and A second guide plate having a plurality of second through holes through which the circuit contact tips of the plurality of electrically conductive contact pins pass; A testing device in which the circuit contact tips of the plurality of electrically conductive contact pins are each provided at different positions of the electrically conductive contact pins.

6. In Paragraph 5, The distance between the plurality of second penetration holes is greater than the distance between the plurality of first penetration holes, and An inspection device in which the target contact tip is provided at a position corresponding to the first through hole, and the circuit contact tip is provided at a position corresponding to the second through hole.

7. In an electrically conductive contact pin for testing the electrical characteristics of an object to be tested, A target contact tip that electrically contacts the above-mentioned object to be inspected; Circuit contact tip that makes electrical contact with the circuit board; It includes an elastic part that undergoes elastic deformation between the target contact tip and the circuit contact tip, The above elastic part is, An electrically conductive contact pin comprising a contraction portion that contracts in one direction by one-directional movement of the target contact tip and a tension portion that is stretched in one direction by one-directional movement of the target contact tip.

8. In Paragraph 7, An electrically conductive contact pin in which the elastic pitch of the contraction portion is greater than the elastic pitch of the tension portion.

9. In Paragraph 7, A frame portion having the above elastic portion inside; further comprising, The above frame part is, It includes a first contact portion that protrudes in a longitudinal direction and has a through hole formed in the longitudinal direction, and An electrically conductive contact pin in which the above target contact tip and the above first contact portion come into contact to form a current path.

10. In Paragraph 9, The above frame part is, It further includes a second contact portion that protrudes in the direction of the length of the tributary and has a through hole formed in the direction of the length of the tributary. An electrically conductive contact pin in which the above circuit contact tip and the above second contact portion come into contact to form a current path.

11. In Paragraph 7, A frame portion having the above elastic portion inside; further comprising, The above frame part is, An electrically conductive contact pin comprising a fixing portion that protrudes in the longitudinal direction and is inserted and fixed into a fixing member of a guide plate.

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