Free-standing BNNT-films
The method for producing ultra-thin, free-standing BNNT-films with customizable alignment addresses the stability and handling issues of CNT pellicles, enhancing EUV lithography performance and reducing maintenance costs.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- KARLSRUHER INST FUR TECH
- Filing Date
- 2025-12-19
- Publication Date
- 2026-06-25
AI Technical Summary
Existing carbon nanotube (CNT) pellicles in EUV lithography suffer from limited chemical and temperature stability, leading to frequent replacements and costly downtimes, while boron nitride nanotube (BNNT) films are difficult to prepare in a form suitable for optical applications like EUV pellicles due to handling challenges and lack of methods for ultra-thin, free-standing films with customizable alignment.
Development of a method to produce ultra-thin, free-standing BNNT-films with large free-standing area portions using a wet-transfer process that allows safe handling and customizable alignment, ensuring high mechanical, chemical, and optical stability, and enabling films with variable localized regions of alignment.
The method produces BNNT-films with enhanced stability and optical properties, offering longer lifetimes and reduced maintenance costs, suitable for EUV lithography and other optical applications by providing customizable alignment and patterned regions.
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