Aluminum nitride hybrid bonding layers and methods of forming the same

Abstract

A method of making a semiconductor device assembly is provided. The method comprises forming, in a substrate of a semiconductor device, a plurality of TSVs extending from a front side of the substrate to an intermediate depth of the substrate, and removing material from a rear side of the substrate opposite the front side to reveal protruding portions of the plurality of TSVs. The method further comprises depositing a layer of a dielectric material having a first thickness over the rear side of the substrate and the protruding portions of the plurality of TSVs, and depositing a layer of aluminum nitride having a second thickness greater than the first thickness over the layer of dielectric material. The method further comprises performing a planarizing process to remove portions of the layer of aluminum nitride and the dielectric material to reveal end surfaces of the protruding portions of the plurality of TSVs.

Description

Attorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCTALUMINUM NITRIDE HYBRID BONDING LAYERS AND METHODS OF FORMING THE SAMECROSS-REFERENCE TO RELATED APPLICATION(S)

[0001] The present application claims priority to U.S. Provisional Patent Application No. 63 / 737,482, filed December 20, 2024, the disclosure of which is incorporated herein by reference in its entirety.TECHNICAL FIELD

[0002] The present disclosure generally relates to semiconductor device assemblies, and more particularly relates to semiconductor device assemblies with aluminum nitride (AIN) hybrid bonding layers and methods of forming the same.BACKGROUND

[0003] Microelectronic devices generally have a die ( / .e., a chip) that includes integrated circuitry with a high density of very small components. Typically, dies include an array of very small bond pads electrically coupled to the integrated circuitry. The bond pads are external electrical contacts through which the supply voltage, signals, etc., are transmitted to and from the integrated circuitry. After dies are formed, they are "packaged" to couple the bond pads to a larger array of electrical terminals that can be more easily coupled to the various power supply lines, signal lines, and ground lines. Conventional processes for packaging dies include electrically coupling the bond pads on the dies to an array of leads, ball pads, or other types of electrical terminals, and encapsulating the dies to protect them from environmental factors (e.g., moisture, particulates, static electricity, and physical impact).BRIEF DESCRIPTION OF THE DRAWINGS

[0004] Figures 1 through 8 are simplified schematic cross-sectional views of a semiconductor device assembly being fabricated in accordance with embodiments of the present technology.

[0005] Figure 9 is a simplified schematic cross-sectional view of a semiconductor device in accordance with an alternative embodiment of the present technology.Attorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT

[0006] Figure 10 is a flow chart illustrating a method of making a semiconductor device assembly in accordance with an embodiment of the present technology.

[0007] Figure 11 is a schematic view showing a system that includes a semiconductor device assembly configured in accordance with an embodiment of the present technology.DETAILED DESCRIPTION

[0008] Some packaged semiconductor devices include multiple devices arranged in a die stack, with each device electrically and mechanically coupled to an adjacent device by a hybrid bond, in which coplanar metal pads and a dielectric bonding surface of one device are joined by metal-metal bonds and dielectric-dielectric bonds, respectively, to corresponding coplanar metal pads and a dielectric bonding surface of an adjacent device. The dielectric material at the bond interface may be silicon oxide, silicon nitride, silicon carbon nitride, etc. A drawback of these dielectric materials is their relatively low thermal conductivity-on the order of around 1 W / mK. For higher performance semiconductor devices that generate waste heat during operation and may rely upon the vertical transportation of thermal energy through the vertical die stack to extract heat from the assembly, such low thermal conductivity poses a packaging challenge.

[0009] To address these drawbacks and others, various embodiments of the present application provide semiconductor device assemblies with highly thermally conductive dielectric material at a hybrid bonding interface between devices in a stack, such as aluminum nitride (AIN). AIN enjoys a thermal conductivity about two orders higher than the aforementioned dielectric materials (e.g., between about 150 and 250 W / mK), and provides a dramatic improvement in the vertical conduction of thermal energy through a device stack. The AIN material may be the only dielectric material between the bulk semiconductor material of a device substrate (e.g., silicon) and the bonding interface, or may be one of a plurality of layers of dielectric material between the bulk semiconductor material and the bonding interface.

[0010] Figures 1-8 are simplified schematic cross-sectional views of a semiconductor device assembly being fabricated in accordance with embodiments of the present technology. As can be seen with reference to Figure 1 , a wafer 101 is provided,Attorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT in which a a plurality of active circuitry regions 104 underlying a dielectric layer 102 with contact structures 105, the regions 104 corresponding to eventual semiconductor die locations. A plurality of still-buried through silicon vias (TSVs) 103 are connected to the active circuitry regions 104 and embedded to an intermediate depth of the bulk semiconductor material (e.g., silicon) of the wafer 101. As shown in Figure 2, the wafer 101 can be back-ground to reduce the thickness of the bulk semiconductor material and expose the TSVs 103. In Figure 3, a thin layer 106 of a highly resistive dielectric layer, such as silicon nitride or silicon carbon nitride, is deposited over the back-ground surface, conformally covering the exposed portions of TSVs 103 and the rear surface of the bulk semiconductor material of wafer 101. According to various aspects of the subject disclosure, the layer 106 can be between about 0.5 and 2.0 pm thick, between about 0.375 and 4.0 pm thick, or between about 0.25 and 5.0 pm thick.

[0011] In Figure 4, a thicker layer of aluminum nitride 107 is deposited over the layer 106 of dielectric material. The aluminum nitride material can be deposited by one or more of a variety of processes, including atomic layer deposition (ALD), physical vapor deposition (PVD), chemical vapor deposition (CVD), and / or sputtering. According to various aspects of the subject disclosure, the layer of aluminum nitride 107 can be between about 2.0 and 5.0 pm thick, between about 1.0 and 10.0 pm thick, or in some embodiments, greater than 10.0 pm thick.

[0012] Following the deposition of the layer of aluminum nitride 107, the rear surface of wafer 101 can be planarized to reveal end surfaces of TSVs 103 (e.g., for hybrid bonding) . The planarization can involve chemical mechanical polishing (CMP) or other planarization techniques well known to those of relevant skill in the art (e.g., grinding, wet or dry etching, etc.). Following planarization, the surface can be further prepared for hybrid bonding through plasma activation and rinsing processes.

[0013] As shown in Figure 6, a plurality of similar wafers 601-604 can be bonded together by forming hybrid bonds therebetween, in which the frontside and backside electrical contacts ef facing wafers are bonded by metal-metal bonds, while the aluminum nitride material of the facing wafers are fusion bonded together (e.g., by alignment, bond wave initiation, and annealing processes, as will be well-understood by those of relevant skill in the art). Subsequently, as shown in Figure 7, the wafer stack of Figure 6 can be singulated into a plurality of die stacks 702, which can be bonded to another device 701Attorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT(e.g., an interface die, a logic die such as a controller, or a package-level substrate) with another hybrid bond including a fusion bond between facing aluminum nitride regions. In an alternative embodiment, the wafer of Figure 5 may be singulated prior to stacking a plurality of singulated dies to arrive at a similar structure as die stack 702 (e.g., to identify and stack “known good” dies for improved yields).

[0014] In accordance with another aspect of the present disclosure, an assembly may further include an encapsulating mold material that surrounds at least the sidewalls of at least some of the devices in an assembly. For example, Figure 8 is a simplified schematic cross-sectional view of a semiconductor device assembly 800 in accordance with embodiments of the present technology in which the an encapsulating mold material 801 surrounds the sidewalls of a stack of semiconductor devices (e.g., memory dies) carried by a larger semiconductor device e.g., a logic die such as a memory controller, an interface die, or a processor) bonded to one another by hybrid bonds include an aluminum nitride bonding material.

[0015] Although in the foregoing example embodiment semiconductor device assemblies have been illustrated and described as including a single first semiconductor device (with a first footprint) carrying four second semiconductor devices (with a second smaller footprint), in other embodiments other package arrangements may include a greater or lesser number of dies of greater or fewer sizes, mutatis mutandis.

[0016] Although in the foregoing example embodiments semiconductor device assemblies have been illustrated and described as including semiconductor devices bonded with hybrid bonds that include aluminum nitride bonding layers on both side of the bond line, in other embodiments semiconductor devices may be bonded by hybrid bonds that include an aluminum nitride bonding layer on one side of the bond line and a different dielectric material on the other side, such as silicon oxide, silicon nitride, silicon carbon nitride, etc.

[0017] Although in the foregoing example embodiment semiconductor device assemblies have been illustrated and described as being bonded with hybrid bonds, in other embodiments semiconductor devices can include contact structures for forming other interconnects (e.g., pillars and / or pads for solder joints, wire bonds, etc.). For example, Figure 9 illustrates a semiconductor device in which, subsequent to the planarization illustrated and described above with reference to Figure 5, metal contactAttorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT structure 909 (e.g., contact pads) are formed in an additional layer 908 of dielectric material (e.g., aluminum nitride, silicon oxide, silicon nitride, silicon carbon nitride, etc.) overlying the planarized surface of aluminum nitride layer 907, silicon nitride / silicon carbon nitride 906, and the exposed end surfaces of TSVs 903.

[0018] In accordance with one aspect of the present disclosure, the semiconductor devices illustrated in the assemblies of Figures 1-9 could be memory dies, such as dynamic random access memory (DRAM) dies, NOT-AND (NAND) memory dies, MOTOR (NOR) memory dies, magnetic random access memory (MRAM) dies, phase change memory (PCM) dies, ferroelectric random access memory (FeRAM) dies, static random access memory (SRAM) dies, or the like. In an embodiment in which multiple dies are provided in a single assembly, the semiconductor devices could be memory dies of a same kind (e.g., both NAND, both DRAM, etc.) or memory dies of different kinds (e.g., one DRAM and one NAND, etc.). In accordance with another aspect of the present disclosure, the semiconductor dies of the assemblies illustrated and described above could be logic dies (e.g., controller dies, processor dies, etc.), or a mix of logic and memory dies (e.g., a memory controller die and a memory die controlled thereby).

[0019] Figure 10 is a flow chart illustrating a method of making a semiconductor device assembly. The method may include forming, in a substrate of a semiconductor device, a plurality of TSVs extending from a front side of the substrate to an intermediate depth of the substrate (box 1010). The method may further include removing material from a rear side of the substrate opposite the front side to reveal protruding portions of the plurality of TSVs (box 1020). The method may further include depositing a layer of a dielectric material having a first thickness over the rear side of the substrate and the protruding portions of the plurality of TSVs (box 1030), and depositing a layer of aluminum nitride having a second thickness greater than the first thickness over the layer of dielectric material (box 1040). The method may further include performing a planarizing process to remove portions of the layer of aluminum nitride and the dielectric material to reveal end surfaces of the protruding portions of the plurality of TSVs (box 1050).

[0020] Any one of the semiconductor devices and semiconductor device assemblies described above with reference to Figures 1-10 can be incorporated into any of a myriad of larger and / or more complex systems, a representative example of whichAttorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT is system 1100 shown schematically in Figure 11. The system 1100 can include a semiconductor device assembly (e.g., or a discrete semiconductor device) 1102, a power source 1104, a driver 1106, a processor 1108, and / or other subsystems or components 1110. The semiconductor device assembly 1102 can include features generally similar to those of the semiconductor devices described above with reference to Figures 1-10 The resulting system 1100 can perform any of a wide variety of functions, such as memory storage, data processing, and / or other suitable functions. Accordingly, representative systems 1100 can include, without limitation, hand-held devices (e.g., mobile phones, tablets, digital readers, and digital audio players), computers, vehicles, appliances and other products. Components of the system 1100 may be housed in a single unit or distributed over multiple, interconnected units e.g., through a communications network). The components of the system 1100 can also include remote devices and any of a wide variety of computer readable media.

[0021] Specific details of several embodiments of semiconductor devices, and associated systems and methods, are described above. A person skilled in the relevant art will recognize that suitable stages of the methods described herein can be performed at the wafer level or at the die level. Therefore, depending upon the context in which it is used, the term “substrate” can refer to a wafer-level substrate or to a singulated, die-level substrate. Furthermore, unless the context indicates otherwise, structures disclosed herein can be formed using conventional semiconductor-manufacturing techniques. Materials can be deposited, for example, using chemical vapor deposition, physical vapor deposition, atomic layer deposition, plating, electroless plating, spin coating, and / or other suitable techniques. Similarly, materials can be removed, for example, using plasma etching, wet etching, chemical-mechanical planarization, or other suitable techniques.

[0022] In other embodiments, the term “substrate” can refer to a package-level substrate upon which other semiconductor devices are carried, such as a printed circuit board (PCB), an interposer, or another semiconductor device.

[0023] The devices discussed herein, including a memory device, may be formed on a semiconductor substrate or die, such as silicon, germanium, silicon-germanium alloy, gallium arsenide, gallium nitride, etc. In some cases, the substrate is a semiconductor wafer. In other cases, the substrate may be a silicon-on-insulator (SOI) substrate, such as silicon-on-glass (SOG) or silicon-on-sapphire (SOP), or epitaxialAttorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT layers of semiconductor materials on another substrate. The conductivity of the substrate, or sub-regions of the substrate, may be controlled through doping using various chemical species including, but not limited to, phosphorous, boron, or arsenic. Doping may be performed during the initial formation or growth of the substrate, by ionimplantation, or by any other doping means.

[0024] The functions described herein may be implemented in hardware, software executed by a processor, firmware, or any combination thereof. Other examples and implementations are within the scope of the disclosure and appended claims. Features implementing functions may also be physically located at various positions, including being distributed such that portions of functions are implemented at different physical locations.

[0025] As used herein, including in the claims, “or” as used in a list of items (for example, a list of items prefaced by a phrase such as “at least one of” or “one or more of’) indicates an inclusive list such that, for example, a list of at least one of A, B, or C means A or B or C or AB or AC or BC or ABC ( / .e., A and B and C). Also, as used herein, the phrase “based on” shall not be construed as a reference to a closed set of conditions. For example, an exemplary step that is described as “based on condition A” may be based on both a condition A and a condition B without departing from the scope of the present disclosure. In other words, as used herein, the phrase “based on” shall be construed in the same manner as the phrase “based at least in part on.”

[0026] As used herein, the terms “vertical,” “lateral,” “upper,” “lower,” “above,” and “below” can refer to relative directions or positions of features in the semiconductor devices in view of the orientation shown in the Figures. For example, “upper” or “uppermost” can refer to a feature positioned closer to the top of a page than another feature. These terms, however, should be construed broadly to include semiconductor devices having other orientations, such as inverted or inclined orientations where top / bottom, over / under, above / below, up / down, and left / right can be interchanged depending on the orientation.

[0027] It should be noted that the methods described above describe possible implementations, and that the operations and the steps may be rearranged or otherwise modified and that other implementations are possible. Furthermore, embodiments from two or more of the methods may be combined.Attorney Docket No. P329728.WO.01 Client Ref. No. 2024151009-WO-PCT

[0028] From the foregoing, it will be appreciated that specific embodiments of the invention have been described herein for purposes of illustration, but that various modifications may be made without deviating from the scope of the invention. Rather, in the foregoing description, numerous specific details are discussed to provide a thorough and enabling description for embodiments of the present technology. One skilled in the relevant art, however, will recognize that the disclosure can be practiced without one or more of the specific details. In other instances, well-known structures or operations often associated with memory systems and devices are not shown, or are not described in detail, to avoid obscuring other aspects of the technology. In general, it should be understood that various other devices, systems, and methods in addition to those specific embodiments disclosed herein may be within the scope of the present technology.

Claims

Attorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCTCLAIMSWhat is claimed is:1 . A method of making a semiconductor device assembly, comprising: forming, in a substrate of a semiconductor device, a plurality of through-silicon vias (TSVs) extending from a front side of the substrate to an intermediate depth of the substrate; removing material from a rear side of the substrate opposite the front side to reveal protruding portions of the plurality of TSVs; depositing a layer of a dielectric material having a first thickness over the rear side of the substrate and the protruding portions of the plurality of TSVs; depositing a layer of aluminum nitride having a second thickness greater than the first thickness over the layer of dielectric material; and performing a planarizing process to remove a portion of the layer of aluminum nitride and a portion of the dielectric material to reveal end surfaces of the protruding portions of the plurality of TSVs.

2. The method of claim 1 , wherein the dielectric material is silicon nitride or silicon carbon nitride.

3. The method of claim 1 , wherein the second thickness is at least twice the first thickness.

4. The method of claim 1 , wherein the first thickness is between about 0.5 and 2.0 pm.

5. The method of claim 1 , wherein the second thickness is between about 2.0 and 5.0 pm.

6. The method of claim 1 , wherein the polishing process is a chemical mechanical polishing (CMP) process.Attorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT7. The method of claim 1 , wherein depositing the aluminum nitride material comprises at least one of atomic layer deposition (ALD), physical vapor deposition (PVD), chemical vapor deposition (CVD), and sputtering.

8. The method of claim 1 , further comprising bonding an additional semiconductor device to the semiconductor device by forming metal-metal bonds between the revealed end surfaces and corresponding metal structures of the additional semiconductor devices and a fusion bond between the planarized aluminum nitride and a bonding surface of the additional semiconductor device.

9. The method of claim 1 , further comprising forming a plurality of contact pads over the revealed end surfaces of the protruding portions of the plurality of TSVs.

10. The method of claim 9, further comprising forming solder joints at each of the plurality of contact pads to couple the semiconductor device to an additional semiconductor device.

11. A semiconductor device, comprising: a semiconductor substrate including active circuitry at a first side and through- silicon vias (TSVs) extending from the first side to a second side opposite the first side; a dielectric layer at the second side having a first thickness and laterally surrounding protruding portions of the plurality of TSVs; a layer of aluminum nitride disposed over the dielectric layer having a second thickness greater than the first thickness and having and outermost surface coplanar with exposed end surfaces of the plurality of TSVs.

12. The semiconductor device of claim 11 , wherein the dielectric layer comprises silicon nitride or silicon carbon nitride.

13. The semiconductor device of claim 11 , wherein the second thickness is at least twice the first thickness.Attorney Docket No. P329728.WO.01Client Ref. No. 2024151009-WO-PCT14. The semiconductor device of claim 11 , wherein the first thickness is between about 0.5 and 2.0 pm.

15. The semiconductor device of claim 11 , wherein the second thickness is between about 2.0 and 5.0 pm.

16. The semiconductor device of claim 11 , wherein regions of the dielectric layer laterally surrounding the protruding portions of the plurality of TSVs are coplanar with he exposed end surfaces of the plurality of TSVs.

17. A semiconductor device assembly, comprising: a first semiconductor device having a first active surface and a rear surface opposite the active surface at which are disposed a plurality of metal through-silicon via (TSV) end surfaces coplanar with a first outer surface of a first aluminum nitride bonding layer having a first thickness and disposed over a dielectric layer having a second thickness less than the first thickness; and a second semiconductor device having a second active surface at which are disposed a plurality of metal contact structures coplanar with a second outer surface of a second aluminum nitride bonding layer, wherein each of the plurality of metal TSV end surfaces are directly bonded to a corresponding one of the plurality of metal contact structures by a metalmetal bond, and wherein the first outer surface is directly bonded to the second outer surface by a fusion bond.

18. The semiconductor device assembly of claim 17, wherein the dielectric layer comprises silicon nitride or silicon carbon nitride.

19. The semiconductor device assembly of claim 17, wherein the second thickness is at least twice the first thickness.Attorney Docket No. P329728.WO.01 Client Ref. No. 2024151009-WO-PCT20. The semiconductor device assembly of claim 17, wherein the first thickness is between about 0.5 and 2.0 pm.

21. The semiconductor device assembly of claim 17, wherein the second thickness is between about 2.0 and 5.0 pm.

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