Structural component mounting structure

Abstract

The present invention provides a structural component mounting structure that can reduce the likelihood of incorrect mounting of structural components in a substrate processing device.　When structural components are attached to the substrate processing device, a plurality of divided bodies combine to function as functional components. In the structural component mounting structure, a divided body has mounting parts 41A, 42A. The plurality of divided bodies differ in shape from one another. The substrate processing device is provided with a first receiving part 51 to which the mounting parts 41A, 42A are detachably attached. A first engagement projection 63A is formed on either the mounting parts 41A, 42A or the first receiving part 51. A first receiving recess 43A is formed in the other of the mounting parts 41A, 42A and the first receiving part 51 and engages with the first engagement projection 63A when a specific divided body from among the plurality of divided bodies is mounted on the first receiving part 51.

Description

Mounting Structure of Structural Parts

[0001] The present invention relates to a mounting structure of structural parts.

[0002] A substrate processing apparatus has a polishing apparatus that performs chemical mechanical polishing (CMP) on a substrate (see, for example, Patent Document 1). The polishing apparatus may include a plurality of polishing units for miniaturization of the apparatus, throughput improvement, and the like.

[0003] Japanese Patent Application Laid-Open No. 2020-142329

[0004] When assembling the polishing unit for maintenance work or the like, there is a possibility of misidentifying the structural parts of the plurality of polishing units. For example, it is conceivable to attach the structural parts of the first polishing unit and the structural parts of the second polishing unit to the polishing unit in an incorrect combination. When the structural parts are incorrectly attached, interference between the parts may occur.

[0005] An aspect of the present invention aims to provide a mounting structure of structural parts that can make it difficult to cause incorrect attachment of structural parts in a substrate processing apparatus.

[0006] The mounting structure of structural parts according to Aspect 1 of the present invention is a mounting structure of structural parts that function as functional parts when a plurality of divided bodies are combined when attached to a substrate processing apparatus. The divided body has a mounting portion, the plurality of divided bodies have different shapes from each other, and the substrate processing apparatus is provided with a receiving portion to which the mounting portion is detachably attached. A convex portion is formed on one of the mounting portion and the receiving portion, and a concave portion that engages with the convex portion when a specific one of the plurality of divided bodies is attached to the receiving portion is formed on the other of the mounting portion and the receiving portion.

[0007] [[ID=2,1]] The mounting structure of structural parts according to Aspect 2 of the present invention is the mounting structure of structural parts according to Aspect 1, in which a plurality of the mounting portions are attached to at least one of the receiving portions.

[0008] The mounting structure of structural parts according to Aspect 3 of the present invention is the mounting structure of structural parts according to Aspect 1 or 2, in which the protruding direction of the convex portion is a direction orthogonal to the mounting direction of the mounting portion. <[

[0009] A mounting structure for a structural component according to aspect 4 of the present invention is a mounting structure for a structural component according to any one of aspects 1 to 3, wherein the receiving portion has a main portion having a main surface along the mounting direction of the mounting portion, and a restricting projection that protrudes from the main surface and restricts the movement of the mounting portion in the mounting direction.

[0010] The mounting structure for a structural component according to embodiment 5 of the present invention is a mounting structure for a structural component according to any one of embodiments 1 to 4, wherein at least one of the mounting portion and the receiving portion is a transparent member formed to be transparent in at least a part thereof, and the convex portion and the concave portion are visible through the transparent member when the mounting portion is attached to the receiving portion.

[0011] The mounting structure for structural components according to embodiment 6 of the present invention is a mounting structure for structural components described in any one of embodiments 1 to 5, wherein the number of divided bodies is n, n setting locations for forming the protrusions are formed in the receiving portion, and the protrusions are formed in at least one of the setting locations.

[0012] The mounting structure for a structural component according to embodiment 7 of the present invention is the mounting structure for a structural component according to embodiment 6, wherein the protrusion is formed by the head portion of a fastener having a head portion and a screw shaft, and the setting location is a screw hole into which the screw shaft is screwed.

[0013] The mounting structure for a structural component according to embodiment 8 of the present invention is a mounting structure for a structural component described in any one of embodiments 1 to 7, wherein identification information is formed on at least one of the mounting portion and the receiving portion.

[0014] The mounting structure for a structural component according to embodiment 9 of the present invention is a mounting structure for a structural component according to any one of embodiments 1 to 8, wherein the substrate processing apparatus includes a table that supports a substrate to be processed by the substrate processing apparatus, and the structural component is a cylindrical cover surrounding the table.

[0015] The mounting structure for a structural component according to embodiment 10 of the present invention is the mounting structure for a structural component described in embodiment 9, wherein at least a portion of the surface of the structural component is water-repellent, hydrophobic, or hydrophilic.

[0016] The mounting structure for a structural component according to embodiment 11 of the present invention is a mounting structure for a structural component described in any one of embodiments 1 to 10, wherein the recess is U-shaped or C-shaped.

[0017] One aspect of the present invention provides a mounting structure for structural components that can reduce the likelihood of incorrect mounting of structural components in a substrate processing apparatus.

[0018] This is a plan view of a substrate processing apparatus using a mounting structure for structural components according to the embodiment. This is a schematic perspective view of the polishing unit. This is a configuration diagram of the polishing unit. This is a perspective view of the polishing unit. This is an exploded perspective view of the polishing unit. This is a perspective view of the table cover. This is a perspective view of the table cover. This is a plan view of the table cover and the receiving part. This is a plan view of the table cover and the receiving part. This is a perspective view of the table cover. This is a perspective view of the table cover. This is a perspective view of the receiving part. This is a perspective view of the table cover and the receiving part viewed from the inside. This is a perspective view of the table cover and the receiving part viewed from the inside. This is a perspective view of the table cover and the receiving part viewed from the inside. This is a perspective view of the table cover and the receiving part viewed from the inside. This is a perspective view showing the method of attaching the table cover. This is a side view showing the method of attaching the table cover. This is a perspective view of the table cover and the receiving part. This is a perspective view of the table cover and the receiving part. This is a plan view of a modified version of the table cover and the receiving part. This is a plan view of a modified version of the table cover and the receiving part.

[0019] The mounting structure for structural components according to the embodiment of the present invention will be described below with reference to the drawings.

[0020] Figure 1 is a plan view of a substrate processing apparatus using the mounting structure for structural components according to the embodiment. Figure 2 is a schematic perspective view of the polishing unit. Figure 3 is a configuration diagram of the polishing unit.

[0021] [Substrate Processing Apparatus] As shown in Figure 1, the substrate processing apparatus 100 comprises a housing 1, a load / unload unit 2, a polishing unit 3, a cleaning unit 4, and a control unit 5. The housing 1 encloses the polishing unit 3, the cleaning unit 4, the control unit 5, etc. The internal space of the housing 1 is partitioned by partition walls 1a and 1b.

[0022] The load / unload unit 2 is equipped with multiple front load units 20. Each front load unit 20 is equipped with a wafer cassette for storing a large number of wafers (substrates). A travel mechanism 21 is laid out in the load / unload unit 2 along the arrangement of the front load units 20. Two transport robots (loaders) 22 are mounted on the travel mechanism 21. The transport robots 22 can access the wafer cassettes mounted on the front load units 20 by moving along the travel mechanism 21.

[0023] The polishing unit 3 performs polishing (planarization) of the wafer. The polishing unit 3 comprises a first polishing unit 3A, a second polishing unit 3B, a third polishing unit 3C, and a fourth polishing unit 3D. The first polishing unit 3A, the second polishing unit 3B, the third polishing unit 3C, and the fourth polishing unit 3D are arranged along the longitudinal direction of the substrate processing apparatus 100.

[0024] The first polishing unit 3A comprises a polishing table 30A, a top ring 31A, a polishing fluid supply nozzle 32A, a dresser 33A, an atomizer 34A, and a table cover 35A (see Figures 3 and 4). A polishing pad 10A having a polishing surface is attached to the polishing table 30A. The top ring 31A polishes the wafer by pressing it against the polishing pad 10A on the polishing table 30A. The polishing fluid supply nozzle 32A supplies polishing fluid and dressing fluid (e.g., pure water) to the polishing pad 10A. The dresser 33A dresses the polishing surface of the polishing pad 10A. The atomizer 34A sprays a mixed fluid of liquid (e.g., pure water) and gas (e.g., nitrogen gas) or liquid (e.g., pure water) in a mist onto the polishing surface.

[0025] The second polishing unit 3B includes a polishing table 30B to which a polishing pad 10A is attached, a top ring 31B, a polishing fluid supply nozzle 32B, a dresser 33B, an atomizer 34B, and a table cover 35B (see Figure 4). The third polishing unit 3C includes a polishing table 30C to which a polishing pad 10A is attached, a top ring 31C, a polishing fluid supply nozzle 32C, a dresser 33C, an atomizer 34C, and a table cover 35A (see Figure 4). The fourth polishing unit 3D includes a polishing table 30D to which a polishing pad 10A is attached, a top ring 31D, a polishing fluid supply nozzle 32D, a dresser 33D, an atomizer 34D, and a table cover 35B (see Figure 4).

[0026] The polishing tables 30A, 30B, 30C, and 30D are provided on the mounting surface 36 (see Figure 4). The polishing tables 30A, 30B, 30C, and 30D are examples of tables that support a wafer. The table covers 35A and 35B are covers that surround the polishing tables.

[0027] As shown in Figures 2 and 3, the polishing table 30A rotates around its axis. The wafer W is held on the lower surface of the top ring 31A. During polishing, polishing fluid is supplied from the polishing fluid supply nozzle 32A to the polishing surface of the polishing pad 10A. The wafer W is pressed against the polishing surface of the polishing pad 10A by the top ring 31A and polished.

[0028] As shown in Figure 1, a first linear transporter 6 is positioned adjacent to the first polishing unit 3A and the second polishing unit 3B. The first linear transporter 6 transports wafers between the first transport position TP1, the second transport position TP2, the third transport position TP3, and the fourth transport position TP4. A temporary storage table 180 is provided near the first linear transporter 6.

[0029] A second linear transporter 7 is positioned adjacent to the third polishing unit 3C and the fourth polishing unit 3D. The second linear transporter 7 transports wafers between the fifth transport position TP5, the sixth transport position TP6, and the seventh transport position TP7.

[0030] A lifter 11 is positioned at the first transport position TP1 to receive wafers from the transport robot 22. The lifter 11 transfers the wafer from the transport robot 22 to the first linear transporter 6. The swing transporter 12 transfers the wafer from the first linear transporter 6 to the second linear transporter 7. The wafer is then transported by the second linear transporter 7 to at least one of the third polishing unit 3C and the fourth polishing unit 3D. The wafer polished in the polishing unit 3 is then transported to the cleaning unit 4 via the swing transporter 12.

[0031] The washing section 4 is divided into a first washing chamber 190, a first transport chamber 191, a second washing chamber 192, a second transport chamber 193, and a drying chamber 194. The first washing chamber 190 is equipped with a primary washing module 201. The first transport chamber 191 is equipped with a first transport robot 209. The second washing chamber 192 is equipped with a secondary washing module 202. The second transport chamber 193 is equipped with a second transport robot 210. The drying chamber 194 is equipped with a drying module 205.

[0032] The first transport robot 209 transports the wafer W between the temporary storage table 180, the primary cleaning module 201, and the secondary cleaning module 202. The second transport robot 210 transports the wafer W between the secondary cleaning module 202 and the drying module 205. The control unit 5 controls the processing operation of the wafer W.

[0033] [Mounting Structure of Structural Components] Figure 4 is a perspective view of the first polishing unit and the second polishing unit. Figure 5 is an exploded perspective view of the first polishing unit and the second polishing unit. Figures 6 and 7 are perspective views of the table cover. Figure 8 is a plan view of the table cover and the receiving part. Figure 9 is a plan view of the table cover and the receiving part. Figures 10 and 11 are perspective views of the table cover. Figures 12 and 13 are perspective views of the receiving part. Figures 14 to 17 are perspective views of the table cover and the receiving part seen from the inside.

[0034] As shown in Figure 4, the table cover 35A of the first polishing unit 3A is formed in a cylindrical shape. The table cover 35A is positioned to surround the polishing table 30A. The table cover 35A is positioned concentrically with the polishing table 30A. The table cover 35A can receive splashes of liquid (polishing liquid, dressing liquid, etc.) from the polishing table 30A.

[0035] The table cover 35B of the second polishing unit 3B is formed in a cylindrical shape. The table cover 35B is positioned to surround the polishing table 30B. The table cover 35B is positioned concentrically with the polishing table 30B. The table cover 35B can receive splashes of liquid (polishing liquid, dressing liquid, etc.) from the polishing table 30B.

[0036] At least a portion of the surface of the table covers 35A and 35B may be water-repellent, hydrophobic, or hydrophilic. To impart surface properties such as water repellency, hydrophobicity, or hydrophilicity to the table covers 35A and 35B, the table covers 35A and 35B can be manufactured using materials that possess those properties. The surface properties of the table covers 35A and 35B can be selected according to the usage environment.

[0037] If the surfaces of table covers 35A and 35B are water-repellent or hydrophobic, dirt will be less likely to adhere to them. Therefore, the cleanliness of table covers 35A and 35B can be improved. If the surfaces of table covers 35A and 35B are hydrophilic, splashing of liquid from the polishing table will be less likely to occur. In this way, the functionality of table covers 35A and 35B can be enhanced by their surface properties.

[0038] As shown in Figure 5, the table cover 35A can be divided into a first segment 37A and a second segment 37B. When the table cover 35A is attached to the substrate processing apparatus, the first segment 37A and the second segment 37B are combined to function as a functional component. The first segment 37A and the second segment 37B are each formed in a semi-cylindrical shape. The first segment 37A and the second segment 37B are combined with their inner circumferences facing each other. The first segment 37A and the second segment 37B can be collectively referred to as "segments 37A and 37B". C1 is the central axis of the table cover 35A.

[0039] The table cover 35B can be divided into a third segment 37C and a fourth segment 37D. When the table cover 35B is attached to the substrate processing device, the third segment 37C and the fourth segment 37D are combined to function as a functional component. The third segment 37C and the fourth segment 37D are each formed in a semi-cylindrical shape. The third segment 37C and the fourth segment 37D are combined with their inner circumferences facing each other. The third segment 37C and the fourth segment 37D can be collectively referred to as "segments 37C and 37D". C2 is the central axis of the table cover 35B.

[0040] As shown in Figure 6, a rectangular concave first notch 38A is formed on the upper edge of the first segment 37A of the table cover 35A. A rectangular concave second notch 38B is formed on the upper edge of the second segment 37B. The circumferential dimension of the second notch 38B is larger than the circumferential dimension of the first notch 38A.

[0041] As shown in Figure 7, a rectangular concave third notch 38C is formed on the upper edge of the third segment 37C of the table cover 35B. A rectangular concave fourth notch 38D is formed on the upper edge of the fourth segment 37D. The circumferential dimension of the fourth notch 38D is larger than the circumferential dimension of the third notch 38C.

[0042] Table covers 35A and 35B have equal diameters. Table covers 35A and 35B are examples of "structural components". The first segment 37A, the second segment 37B, the third segment 37C, and the fourth segment 37D are examples of "segments".

[0043] The circumferential position of the first notch 38A (see FIG. 6) formed in the first divided body 37A of the table cover 35A is different from the circumferential position of the third notch 38C (see FIG. 7) formed in the third divided body 37C of the table cover 35B. The circumferential position of the second notch 38B (see FIG. 6) formed in the second divided body 37B of the table cover 35A is different from the circumferential position of the fourth notch 38D (see FIG. 7) formed in the fourth divided body 37D of the table cover 35B. Thus, the four divided bodies 37A to 37D have different notch sizes or positions. Therefore, the shapes of the four divided bodies 37A to 37D are different from each other.

[0044] As shown in FIG. 5, the arrangement direction of the polishing table 30A and the polishing table 30B is defined as the X direction. One direction in the X direction (the direction from the polishing table 30A toward the polishing table 30B) is the +X side. The direction opposite to the +X side is the -X side. A direction orthogonal to the X direction within a plane parallel to the installation surface 36 is defined as the Y direction. One direction in the Y direction is the +Y side. The direction opposite to the +Y side is the -Y side. The +Y side is the rear side (rear side) of the substrate processing apparatus. The -Y side is the front side (front side) of the substrate processing apparatus. The Z direction is orthogonal to the X direction and the Y direction. The Z direction is parallel to the central axes C1 and C2 of the table covers 35A and 35B. The Z direction is the vertical direction (height direction). The plane defined by the X direction and the Y direction is the XY plane.

[0045] A symmetry axis A1 parallel to the Y direction is defined between the polishing table 30A and the polishing table 30B. The polishing table 30A and the polishing table 30B are in positions that are line-symmetric with respect to the symmetry axis A1.

[0046] As shown in FIGS. 5 and 8, the first divided body 37A of the table cover 35A is set in a posture that is convex in a direction inclined outward (-X side) toward the front side (-Y side). The second divided body 37B is set in a posture that is convex in a direction inclined inward (+X side) toward the rear side (+Y side).

[0047] The third divided body 37C of the table cover 35B is in a posture that protrudes in a direction inclined outward (+X side) toward the front side (-Y side). The fourth divided body 37D is in a posture that protrudes in a direction inclined inward (-X side) toward the rear side (+Y side). "Outward" is the direction in which the polishing tables 30A and 30B move away from each other. "Inward" is the direction in which the polishing tables 30A and 30B approach each other.

[0048] The first divided body 37A of the table cover 35A and the third divided body 37C of the table cover 35B are in a posture that protrudes in a direction inclined outward toward the front side (-Y side). The first divided body 37A and the third divided body 37C are at positions that are line-symmetric with respect to the symmetry axis A1.

[0049] The second divided body 37B of the table cover 35A and the fourth divided body 37D of the table cover 35B are in a posture that protrudes in a direction inclined inward toward the rear side (+Y side). The second divided body 37B and the fourth divided body 37D are at positions that are line-symmetric with respect to the symmetry axis A1.

[0050] As shown in FIG. 8, the first divided body 37A includes a main body portion 40A, a first attachment portion 41A, and a second attachment portion 41B. The main body portion 40A is formed in a semi-cylindrical shape. The central axis of the main body portion 40A is the central axis C1. The first attachment portion 41A is formed on the outer peripheral surface of a portion including one end of the main body portion 40A. The second attachment portion 41B is formed on the outer peripheral surface of a portion including the other end of the main body portion 40A.

[0051] The second divided body 37B includes a main body portion 40B, a first attachment portion 42A, and a second attachment portion 42B. The main body portion 40B is formed in a semi-cylindrical shape. The central axis of the main body portion 40B is the central axis C1. The first attachment portion 42A is formed on the outer peripheral surface of a portion including one end of the main body portion 40B. The second attachment portion 42B is formed on the outer peripheral surface of a portion including the other end of the main body portion 40B.

[0052] As shown in Figures 9 and 10, the first mounting portion 41A protrudes radially outward from the outer circumferential surface of the main body portion 40A. The thickness of the first mounting portion 41A increases as it moves away from one end 40A1 of the main body portion 40A in the circumferential direction. The outer surface 41A1 of the first mounting portion 41A is a plane parallel to the tangent to the main body portion 40A at one end 40A1 and to the central axis of the main body portion 40A. The outer surface 41A1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40A at one end 40A1.

[0053] The first mounting portion 42A protrudes radially outward from the outer circumferential surface of the main body portion 40B. The thickness of the first mounting portion 42A increases as it moves away from one end 40B1 of the main body portion 40B in the circumferential direction. The outer surface 42A1 of the first mounting portion 42A is a plane parallel to the tangent to the main body portion 40B at one end 40B1 and to the central axis of the main body portion 40B. The outer surface 42A1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40B at one end 40B1.

[0054] As shown in Figure 10, the first mounting portion 41A and the first mounting portion 42A are rectangular in shape when viewed from the thickness direction of the main body portions 40A and 40B. The first mounting portion 41A and the first mounting portion 42A are identical in shape. The first mounting portion 41A and the first mounting portion 42A are at the same height. The first mounting portion 41A and the first mounting portion 42A are aligned in the circumferential direction of the main body portions 40A and 40B. The outer surface 41A1 of the first mounting portion 41A and the outer surface 42A1 of the first mounting portion 42A are flush. The first mounting portion 41A and the first mounting portion 42A can be collectively referred to as "mounting portion 41A, 42A".

[0055] As shown in Figure 8, the second mounting portion 41B protrudes radially outward from the outer circumferential surface of the main body portion 40A. The thickness of the second mounting portion 41B increases as it moves away from the other end of the main body portion 40A in the circumferential direction. The outer surface 41B1 of the second mounting portion 41B is a plane parallel to the tangent to the main body portion 40A at the other end and to the central axis of the main body portion 40A. The outer surface 41B1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40A at the other end.

[0056] The second mounting portion 42B protrudes radially outward from the outer circumferential surface of the main body portion 40B. The thickness of the second mounting portion 42B increases as it moves away from the other end of the main body portion 40B in the circumferential direction. The outer surface 42B1 of the second mounting portion 42B is a plane parallel to the tangent to the main body portion 40B at the other end and to the central axis of the main body portion 40B. The outer surface 42B1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40B at the other end.

[0057] The second mounting portion 41B and the second mounting portion 42B are rectangular in shape when viewed from the thickness direction of the main body portions 40A and 40B. The second mounting portion 41B and the second mounting portion 42B are aligned in the circumferential direction of the main body portions 40A and 40B. The outer surface 41B1 of the second mounting portion 41B and the outer surface 42B1 of the second mounting portion 42B are flush. The second mounting portion 41B and the second mounting portion 42B can be collectively referred to as "mounting portion 41B, 42B".

[0058] As shown in Figure 11, a first receiving recess 43A (recess) is formed at one location on the outer surface 41A1, 42A1 of the mounting portions 41A, 42A. The first receiving recess 43A may be formed on the first mounting portion 41A or on the first mounting portion 42A. The first receiving recess 43A is formed to reach the lower edge of the mounting portions 41A, 42A. The first receiving recess 43A is formed to open on the outer and lower surfaces of the mounting portions 41A, 42A.

[0059] In the example shown in Figure 14, when viewed from the inside of the table cover, the first receiving recess 43A is formed in the left mounting portion (first mounting portion 42A) of the mounting portions 41A and 42A.

[0060] As shown in Figure 15, a second receiving recess 43B (recess) is formed at one location on the outer surface 41B1, 42B1 of the mounting portions 41B, 42B. The second receiving recess 43B may be formed on the second mounting portion 41B or on the second mounting portion 42B. The second receiving recess 43B is formed to reach the lower edge of the mounting portions 41B, 42B. The second receiving recess 43B is formed to open on the outer and lower surfaces of the mounting portions 41B, 42B.

[0061] The second receiving recess 43B is located in a different position from the first receiving recess 43A in the longitudinal direction (left-right direction in Figure 15) of the mounting portions 41B and 42B. In the example shown in Figure 15, when viewed from the inside of the table cover, the second receiving recess 43B is formed in the left mounting portion (second mounting portion 41B) of the mounting portions 41B and 42B. The second receiving recess 43B is located closer to the center compared to the first receiving recess 43A (see Figure 14).

[0062] As shown in Figure 8, the first polishing unit 3A comprises a first receiving portion 51 (receiving portion) and a second receiving portion 52 (receiving portion). The first receiving portion 51 and the second receiving portion 52 are provided on the mounting surface 36. The first receiving portion 51 and the second receiving portion 52 are in rotationally symmetrical positions (180° symmetrical positions) with respect to the central axis C1.

[0063] As shown in Figure 12, the first receiving portion 51 comprises a main portion 61, a regulating projection 62, and a first engaging projection 63A (projection). The main portion 61 is positioned perpendicular to the mounting surface 36. The main surface 61A of the main portion 61 is a plane parallel to the central axis of the main body portions 40A and 40B of the table cover 35A. The main surface 61A of the main portion 61 faces the outer surfaces 41A1 and 42A1 of the mounting portions 41A and 42A (see Figure 10). The main portion 61 encompasses the outer surfaces 41A1 and 42A1 of the mounting portions 41A and 42A when viewed from the thickness direction. The main portion 61 is formed in a rectangular shape with a long side along the length direction of the outer surfaces 41A1 and 42A1 (tangential direction of the main body portions 40A and 40B).

[0064] As shown in Figures 12 and 13, a plurality of mounting holes 61a are formed on the main surface 61A of the main part 61. The mounting holes 61a are screw holes with threads formed on their inner circumferential surface. The plurality of mounting holes 61a are formed at different positions along the length of the main part 61. In this embodiment, there are four mounting holes 61a. The four mounting holes 61a are formed side by side with spacing between them along the length of the main part 61. The mounting holes 61a are examples of "setting locations".

[0065] As shown in Figure 13, the fastener 64 has a head portion 65 and a shaft portion 66 extending from the head portion 65. The shaft portion 66 is, for example, a screw shaft. The shaft portion 66 is inserted into the mounting hole 61a and is detachably screwed into the mounting hole 61a. The fastener 64 is, for example, a fastener attached to the mounting hole 61a by the screw of the shaft portion 66.

[0066] The fixing device 64 is attached to one of the multiple mounting holes 61a. In the example shown in Figure 12, the fixing device 64 is attached to the leftmost mounting hole 61a of the four mounting holes 61a. When the fixing device 64 is attached to the mounting hole 61a, the head portion 65 becomes a first engaging projection 63A that protrudes inward (towards the polishing table) from the main surface 61A of the main portion 61. The direction of protrusion of the first engaging projection 63A is, for example, parallel to the XY plane and towards the polishing table.

[0067] As shown in Figure 14, the first engaging projection 63A is formed in a position that fits into the first receiving recess 43A (see Figure 11) formed in the mounting portions 41A and 42A of the table cover 35A. The first engaging projection 63A can be formed in a position that fits into the first receiving recess 43A by selecting the mounting hole 61a located opposite the first receiving recess 43A and attaching the fastener 64.

[0068] The restricting projection 62 is formed on the portion of the main part 61 that includes the lower edge. The restricting projection 62 protrudes inward (towards the polishing table) from the main surface 61A of the main part 61. The restricting projection 62 extends along the length of the main part 61. The restricting projection 62 can engage with the lower edges of the mounting parts 41A and 42A to restrict the downward movement of the mounting parts 41A and 42A.

[0069] As shown in Figure 15, the second receiving portion 52 comprises a main portion 61, a restricting projection 62, and a second engaging projection 63B (projection). The main surface 61A of the main portion 61 faces the outer surfaces 41B1 and 42B1 of the mounting portions 41B and 42B (see Figure 8). Common components with the first receiving portion 51 are denoted by the same reference numerals and their description is omitted.

[0070] The fastener 64 (see Figure 13) is attached to one of the multiple mounting holes 61a in the first receiving portion 51, but to a different mounting hole 61a from the one to which the fastener 64 is attached. In the example shown in Figure 15, the fastener 64 is attached to the second mounting hole 61a from the left among the four mounting holes 61a. The head portion 65 becomes a second engaging projection 63B that protrudes inward from the main surface 61A of the main portion 61. The second engaging projection 63B is formed in a position that fits into the second receiving recess 43B formed in the mounting portions 41B and 42B.

[0071] As shown in Figure 8, the third divided body 37C comprises a main body portion 40C, a first mounting portion 41C, and a second mounting portion 41D. The main body portion 40C is formed in a semi-cylindrical shape. The central axis of the main body portion 40C is the central axis C2. The first mounting portion 41C is formed on the outer circumferential surface of the portion including one end of the main body portion 40C. The second mounting portion 41D is formed on the outer circumferential surface of the portion including the other end of the main body portion 40C.

[0072] The fourth segment 37D comprises a main body 40D, a first mounting portion 42C, and a second mounting portion 42D. The main body 40D is formed in a semi-cylindrical shape. The central axis of the main body 40D is the central axis C2. The first mounting portion 42C is formed on the outer circumferential surface of the portion of the main body 40D that includes one end. The second mounting portion 42D is formed on the outer circumferential surface of the portion of the main body 40D that includes the other end.

[0073] The first mounting portion 41C protrudes radially outward from the outer circumferential surface of the main body portion 40C. The thickness of the first mounting portion 41C increases as it moves away from one end of the main body portion 40C in the circumferential direction. The outer surface 41C1 of the first mounting portion 41C is a plane parallel to the tangent to the main body portion 40C at one end and to the central axis of the main body portion 40C. The outer surface 41C1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40C at one end.

[0074] The first mounting portion 42C protrudes radially outward from the outer circumferential surface of the main body portion 40D. The thickness of the first mounting portion 42C increases as it moves away from one end of the main body portion 40D in the circumferential direction. The outer surface 42C1 of the first mounting portion 42C is a plane parallel to the tangent to the main body portion 40D at one end and to the central axis of the main body portion 40D. The outer surface 42C1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40D at one end.

[0075] The first mounting portion 41C and the first mounting portion 42C are rectangular in shape when viewed from the thickness direction of the main body portions 40C and 40D. The first mounting portion 41C and the first mounting portion 42C are identical in shape. The first mounting portion 41C and the first mounting portion 42C are at the same height. The first mounting portion 41C and the first mounting portion 42C are aligned in the circumferential direction of the main body portions 40C and 40D. The outer surface 41C1 of the first mounting portion 41C and the outer surface 42C1 of the first mounting portion 42C are flush. The first mounting portion 41C and the first mounting portion 42C can be collectively referred to as "mounting portion 41C, 42C".

[0076] The second mounting portion 41D protrudes radially outward from the outer circumferential surface of the main body portion 40C. The thickness of the second mounting portion 41D increases as it moves away from the other end of the main body portion 40C in the circumferential direction. The outer surface 41D1 of the second mounting portion 41D is a plane parallel to the tangent to the main body portion 40C at the other end and to the central axis of the main body portion 40C. The outer surface 41D1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40C at the other end.

[0077] The second mounting portion 42D protrudes radially outward from the outer circumferential surface of the main body portion 40D. The thickness of the second mounting portion 42D increases as it moves away from the other end of the main body portion 40D in the circumferential direction. The outer surface 42D1 of the second mounting portion 42D is a plane parallel to the tangent to the main body portion 40D at the other end and to the central axis of the main body portion 40D. The outer surface 42D1 is rectangular in shape, with the longer side aligned with the tangential direction of the main body portion 40D at the other end.

[0078] The second mounting portion 41D and the second mounting portion 42D are rectangular in shape when viewed from the thickness direction of the main body portions 40C and 40D. The second mounting portion 41D and the second mounting portion 42D are aligned in the circumferential direction of the main body portions 40C and 40D. The outer surface 41D1 of the second mounting portion 41D and the outer surface 42D1 of the second mounting portion 42D are flush. The second mounting portion 41D and the second mounting portion 42D can be collectively referred to as "mounting portion 41D, 42D".

[0079] As shown in Figure 16, a third receiving recess 43C (recess) is formed at one location on the outer surface 41C1, 42C1 of the mounting portions 41C, 42C. The third receiving recess 43C may be formed on the first mounting portion 41C or on the first mounting portion 42C. The third receiving recess 43C is formed to reach the lower edge of the mounting portions 41C, 42C. The third receiving recess 43C is formed to open on the outer and lower surfaces of the mounting portions 41C, 42C.

[0080] The third receiving recess 43C is located in a position in the longitudinal direction (left-right direction in Figure 16) of the mounting portions 41C and 42C that is different from the first receiving recess 43A and the second receiving recess 43B. In the example shown in Figure 16, when viewed from the inside of the table cover, the third receiving recess 43C is formed in the right-hand mounting portion (first mounting portion 42C) of the mounting portions 41C and 42C.

[0081] As shown in Figure 17, a fourth receiving recess 43D (recess) is formed at one location on the outer surface 41D1, 42D1 of the mounting portions 41D, 42D. The fourth receiving recess 43D may be formed on the second mounting portion 41D or on the second mounting portion 42D. The fourth receiving recess 43D is formed to reach the lower edge of the mounting portions 41D, 42D. The fourth receiving recess 43D is formed to open on the outer and lower surfaces of the mounting portions 41D, 42D.

[0082] The fourth receiving recess 43D is located in a different position from the first to third receiving recesses 43A, 43B, and 43C in the longitudinal direction (left-right direction in Figure 17) of the mounting portions 41D and 42D. In the example shown in Figure 17, when viewed from the inside of the table cover, the third receiving recess 43C is formed in the right-hand mounting portion (second mounting portion 41D) of the mounting portions 41D and 42D. The fourth receiving recess 43D is located closer to the center compared to the third receiving recess 43C (see Figure 16).

[0083] As shown in Figures 11, 14 to 17, the shapes of the receiving recesses 43A to 43D may be inverted U-shape, C-shape, semicircular shape, rectangular shape, etc. If the shape of the receiving recesses 43A to 43D is inverted U-shape or C-shape, the receiving recesses 43A to 43D can be formed by cutting using a rotary tool. Therefore, the receiving recesses 43A to 43D can be easily formed.

[0084] As shown in Figure 8, the second polishing unit 3B includes a third receiving portion 53 (receiving portion) and a fourth receiving portion 54 (receiving portion). The third receiving portion 53 and the fourth receiving portion 54 are provided on the mounting surface 36. The third receiving portion 53 and the fourth receiving portion 54 are in rotationally symmetrical positions (180° symmetrical positions) with respect to the central axis C2.

[0085] As shown in Figure 16, the third receiving portion 53 comprises a main portion 61, a regulating projection 62, and a third engaging projection 63C (projection). Components common to both the first receiving portion 51 and the third receiving portion 53 are denoted by the same reference numerals and their descriptions are omitted.

[0086] The main portion 61 is positioned perpendicular to the mounting surface 36. The main surface 61A of the main portion 61 is a plane parallel to the central axis of the main body portions 40C and 40D of the table cover 35A. The main surface 61A of the main portion 61 faces the outer surfaces 41C1 and 42C1 of the mounting portions 41C and 42C. The main portion 61 encloses the outer surfaces 41C1 and 42C1 of the mounting portions 41C and 42C1 when viewed from the thickness direction. The main portion 61 is formed in a rectangular shape with a long side that is aligned with the length direction of the outer surfaces 41C1 and 42C1 (tangential direction of the main body portions 40C and 40D).

[0087] The fastener 64 (see Figure 13) is attached to one of the multiple mounting holes 61a, different from the mounting holes 61a to which the fastener 64 is attached in the first receiving portion 51 and the second receiving portion 52. In the example shown in Figure 16, the fastener 64 is attached to the rightmost mounting hole 61a of the four mounting holes 61a. The head portion 65 of the fastener 64 is a third engaging projection 63C that protrudes inward from the main surface 61A of the main portion 61. The third engaging projection 63C is formed in a position that fits into the third receiving recess 43C formed in the mounting portions 41C and 42C of the table cover 35A.

[0088] As shown in Figure 17, the fourth receiving portion 54 comprises a main portion 61, a regulating projection 62, and a fourth engaging projection 63D (projection). The main surface 61A of the main portion 61 faces the outer surfaces 41D1 and 42D1 of the mounting portions 41D and 42D (see Figure 8). Common components with the first receiving portion 51 are denoted by the same reference numerals and their description is omitted.

[0089] The fastener 64 (see Figure 13) is attached to a mounting hole 61a among the multiple mounting holes 61a, different from the mounting hole 61a to which the fastener 64 is attached in the first receiving portion 51, the second receiving portion 52, and the third receiving portion 53. In the example shown in Figure 17, the fastener 64 is attached to the mounting hole 61a located second from the right among the four mounting holes 61a. The head portion 65 becomes a fourth engaging projection 63D that protrudes inward from the main surface 61A of the main portion 61. The fourth engaging projection 63D is formed in a position that fits into the fourth receiving recess 43D formed in the mounting portions 41D and 42D.

[0090] As shown in Figures 14 to 17, the first engaging projection 63A, the second engaging projection 63B, the third engaging projection 63C, and the fourth engaging projection 63D are all at different distances from the center of the main part 61 in the longitudinal direction. Let L1 be the distance between the center of the first engaging projection 63A and the center of the main part 61 in the longitudinal direction (see Figure 14). Let L2 be the distance between the center of the second engaging projection 63B and the center of the main part 61 in the longitudinal direction (see Figure 15). Let L3 be the distance between the center of the third engaging projection 63C and the center of the main part 61 in the longitudinal direction (see Figure 16). Let L4 be the distance between the center of the fourth engaging projection 63D and the center of the main part 61 in the longitudinal direction (see Figure 17). Distances L1 to L4 are all different. For example, distances L1 to L4 have the relationship L2 < L3 < L1 < L4.

[0091] Since the distances L1 to L4 are different from each other, if the divided parts are used incorrectly, the receiving recess will have difficulty engaging with the engaging protrusion. Therefore, incorrect installation of the table covers 35A and 35B can be made less likely.

[0092] [Method of Attaching Structural Components] Figure 18 is a perspective view showing the method of attaching the table cover. Figure 19 is a side view showing the method of attaching the table cover. Figures 20 and 21 are perspective views of the table cover and the receiving part.

[0093] The method for installing the table cover 35A will be explained with reference to Figures 18 to 21. First, the installation method will be explained when the correct first divided part 37A and second divided part 37B are selected.

[0094] As shown in Figures 18 and 19, the first divided body 37A and the second divided body 37B are moved downward toward the first receiving portion 51 and the second receiving portion 52 (see Figure 8). The outer surfaces 41A1 and 42A1 of the mounting portions 41A and 42A face the main surface 61A of the main portion 61 of the first receiving portion 51.

[0095] As shown in Figure 20, the first engaging projection 63A is formed in a position that fits the first receiving recess 43A, so as the mounting portions 41A and 42A move downward, the first engaging projection 63A enters the first receiving recess 43A. Therefore, the downward movement of the mounting portions 41A and 42A is not hindered until it reaches the regulating projection 62. As shown in Figure 15, in the second receiving portion 52 as well, the second engaging projection 63B enters the second receiving recess 43B, so the downward movement of the mounting portions 41B and 42B is not hindered.

[0096] When the mounting portion reaches the regulating projection 62, the first divided body 37A and the second divided body 37B are positioned and attached to the first receiving portion 51 and the second receiving portion 52. The first divided body 37A and the second divided body 37B are combined to form the table cover 35A (see Figure 4).

[0097] Thus, when a specific segment (segment 37A, 37B) from among the multiple segments 37A to 37D is attached to the receiving parts 51, 52, the receiving recesses 43A, 43B engage with the engaging projections 63A, 63B, respectively. Therefore, the segments 37A, 37B are attached in the correct position. The table cover 35B (see Figure 8) can also be attached to the substrate processing apparatus in the same manner as the table cover 35A.

[0098] Next, we will explain the installation method when at least one of the first segment 37A and the second segment 37B is mistakenly replaced with the other segment. The following explanation will use the case where the other segment is used instead of the first segment 37A as an example.

[0099] As shown in Figure 21, in the other segment, which is different from the first segment 37A, the receiving recess of the mounting portion is not formed in a position that fits the first engaging projection 63A. Therefore, the mounting portion hits the first engaging projection 63A before reaching the regulating projection 62 and is unable to move downward. As a result, this segment cannot be attached to the first receiving portion 51. This allows the user to recognize that the segment is incorrect.

[0100] [Effects of the mounting structure for structural components according to this embodiment] According to the mounting structure for structural components according to this embodiment, a first engaging projection 63A is formed on the first receiving portion 51. A second engaging projection 63B is formed on the second receiving portion 52. A first receiving recess 43A and a second receiving recess 43B are formed on the mounting portions of the divided bodies 37A and 37B. When the correct divided bodies (divided bodies 37A and 37B) are attached to the receiving portions 51 and 52, the first receiving recess 43A engages with the first engaging projection 63A. The second receiving recess 43B engages with the second engaging projection 63B. Therefore, the divided bodies 37A and 37B can be attached to the receiving portions 51 and 52. On the other hand, if the wrong divided body is used, the receiving recess will not engage with the engaging projection, and therefore the divided body cannot be attached to the receiving portion. Thus, it is possible to make it less likely for the table cover to be attached incorrectly.

[0101] Since the multiple divided parts 37A to 37D have different shapes from each other, if they are installed incorrectly, problems such as interference between parts are likely to occur. In contrast, the mounting structure for the structural parts according to this embodiment makes it less likely for the table cover to be installed incorrectly, thus avoiding problems such as interference between parts.

[0102] As shown in Figure 8, two mounting parts 41A and 42A are attached to the first receiving part 51. Similarly, two mounting parts are attached to the second receiving part 52, the third receiving part 53, and the fourth receiving part 54, respectively. With this mounting structure, since multiple mounting parts are attached to a common receiving part, the structure can be simplified compared to the case where one mounting part is attached to one receiving part.

[0103] This mounting structure allows multiple segments to be attached to a common receiving part, ensuring that the mounting orientation of the segments is aligned and enabling the table cover to be assembled with precision. Furthermore, because multiple mounting parts are attached to a common receiving part, the structural strength of the receiving part is increased compared to the case where one mounting part is attached to one receiving part, allowing for stable attachment of the segments.

[0104] The first engaging projection 63A, the second engaging projection 63B, the third engaging projection 63C, and the fourth engaging projection 63D protrude inward (towards the polishing table) relative to the main surface 61A of the main part 61 (see Figure 12). The protruding direction of the engaging projections 63A to 63D is perpendicular to the mounting direction (downward) of the mounting parts of the divided bodies 37A and 37B. Therefore, compared to the case where the protruding direction of the engaging projections is the same as the mounting direction (up and down), the vertical dimensions of the engaging projections 63A to 63D can be reduced. Consequently, the height dimension of the mounting structure can be reduced. Thus, the height of the substrate processing apparatus can be reduced.

[0105] The first receiving portion 51 and the second receiving portion 52 each have a main portion 61 and a restricting projection 62. The main portion 61 can restrict the mounting portion from moving laterally (in the direction along the XY plane). The restricting projection 62 can restrict the mounting portion from moving in the mounting direction (downward). Therefore, the accuracy of the mounting position of the divided parts 37A and 37B relative to the first receiving portion 51 and the second receiving portion 52 can be improved.

[0106] As shown in Figure 8, there are four divided sections 37A to 37D that are attached to the substrate processing apparatus. As shown in Figures 14 to 17, four mounting holes 61a (setting locations) are formed in the main section 61 of the first receiving section 51. The engaging protrusions 63A to 63D are formed in one of the four mounting holes 61a. With this configuration, structural differences can be given to the four divided sections by a small number of engaging protrusions, thus simplifying the mounting structure of the table covers 35A and 35B.

[0107] As shown in Figure 12, the engaging projection (for example, the first engaging projection 63A) is formed by a fastener 64 having a shaft portion 66 (screw shaft) and a head portion 65. Therefore, the engaging projection can be formed simply by screwing the fastener 64 into the mounting hole 61a. Thus, the formation of the engaging projection is made easy.

[0108] As shown in Figure 4, in this embodiment, the structural components are table covers 35A and 35B. Therefore, the table covers 35A and 35B can be installed in the substrate processing apparatus without error. Thus, the wafer polishing process can proceed smoothly.

[0109] [Receiving part] (Modified version) Figure 22 is a plan view of a modified version of the table cover and the receiving part. As shown in Figure 22, identification information 70 is formed on the upper surface of the first mounting part 41A of the first divided body 37A. The identification information 70 indicates, for example, that it is the first mounting part 41A of the first divided body 37A. The identification information 70 means, for example, that this mounting part is a mounting part of the first divided body 37A and is located on the front side of the substrate processing apparatus.

[0110] The identification information 70 is formed, for example, by characters, symbols, figures, or a combination of two or more of these. The identification information 70 is formed by ink, relief, etc. The identification information 70 can be formed, for example, by printing.

[0111] Using the first segmented body 37A on which identification information 70 is formed makes it easier to confirm the installation position of the first segmented body 37A. Therefore, it becomes less likely that the table covers 35A and 35B will be installed incorrectly.

[0112] [Table Cover] (Modified Version) Figure 23 shows a modified version of the table cover and a plan view of the receiving portion. As shown in Figure 23, the divided parts 37C and 37D may be transparent members in which at least a part is formed transparent. The divided parts, which are transparent members, allow visible light to pass through from the inner surface to the outer surface. At least the mounting portions 41D and 42D of the divided parts 37C and 37D are transparent.

[0113] If the divided parts 37C and 37D are transparent, the engaging projection and receiving recess can be visually inspected from the inside of the divided parts 37C and 37D through the divided parts 37C and 37D while the mounting parts 41D and 42D are attached to the receiving part 54. Therefore, it is possible to confirm whether the engaging projection and the receiving recess are engaged. Thus, it is possible to easily confirm whether the divided parts 37C and 37D are properly attached to the receiving part.

[0114] In the example shown in Figure 23, the divided parts 37C and 37D are transparent members, but at least a portion of at least one of the mounting portion and the receiving portion may be formed transparent. For example, the receiving portion may be a transparent member, and the convex and concave portions may be visible from the outer surface through the receiving portion. Alternatively, both the mounting portion and the receiving portion may be transparent members. The transparent member may be entirely transparent, but only a portion of it may be transparent as long as the convex and concave portions can be seen.

[0115] The present invention has been described above based on the best mode, but the present invention is not limited to the best mode described above, and various modifications are possible without departing from the spirit of the invention. For example, in the example shown in Figure 8, the number of divided parts attached to the substrate processing apparatus is four, but the number of divided parts is not particularly limited as long as it is a number that can be mistaken for another. In the example shown in Figure 12, the number of divided parts is four, and the number of mounting holes 61a (setting locations) is also four. When the number of divided parts is n (where n is an integer of 2 or more), the number of setting locations formed in the receiving part may be n or a number greater than n. In the example shown in Figure 12, the number of first engaging protrusions 63A formed in the first receiving part 51 is one, but the number of engaging protrusions formed in one receiving part may be multiple. In the example shown in Figure 8, the table covers 35A and 35B are each divided into two, but the number of divisions of a single structural component is not limited to two. The number of divisions of a structural component may be any number of two or more. For example, the table cover may be divided into three parts.

[0116] In the example shown in Figure 8, two mounting parts 41A and 42A are attached to the first receiving part 51. Similarly, two mounting parts are attached to the second receiving part 52, the third receiving part 53, and the fourth receiving part 54, respectively. The number of mounting parts attached to a single receiving part is not particularly limited. The number of mounting parts attached to a single receiving part may be one or multiple (any number of two or more).

[0117] In the examples shown in Figures 6 and 7, the shapes of the four segments 37A to 37D are different from each other, but at least two of the segments may have different shapes from each other.

[0118] In the examples shown in Figures 11 and 12, an engaging projection is formed on the receiving portion of the mounting portion and a receiving recess is formed on the mounting portion. However, the opposite may also be true: a projection may be formed on the mounting portion and a recess may be formed on the receiving portion. That is, a projection may be formed on one of the mounting portion and the receiving portion, and a recess that engages with the projection may be formed on the other.

[0119] In the example shown in Figure 13, the fastener 64 is screwed into the mounting hole 61a to form the engaging projection, but the structure of the engaging projection is not particularly limited. For example, the engaging projection may be attached to the mounting hole by interlocking grooves. The engaging projection may also be attached to the main surface of the main part by the magnetic attraction force.

[0120] In the example shown in Figure 19, the mounting portions 41A and 42A are restricted from moving downward by contacting the restricting projection 62 when attached to the first receiving portion 51, but the receiving portion does not necessarily have to have a restricting projection. For example, if the downward movement of the mounting portions 41A and 42A is restricted by the upper end of the first receiving recess 43A engaging with the first engaging projection 63A, the mounting portions 41A and 42A can be stably attached to the first receiving portion 51 even if the main portion 61 does not have a restricting projection 62.

[0121] 30A, 30B, 30C, 30D... Polishing table (table), 35A, 35B... Table cover (cover), 37A... First segment (segment), 37B... Second segment (segment), 37C... Third segment (segment), 37D... Fourth segment (segment), 41A... First mounting part (mounting part), 41B... Second mounting part (mounting part), 41C... First mounting part (mounting part), 41D... Second mounting part (mounting part), 42A... First mounting part (mounting part), 42B... Second mounting part (mounting part), 42C... First mounting part (mounting part), 42D... Second mounting part (mounting part), 43A... First receiving recess (recess), 43B... 2 receiving recesses (recesses), 43C...3rd receiving recess (recess), 43D...4th receiving recess (recess), 51...1st receiving part (receiving part), 52...2nd receiving part (receiving part), 53...3rd receiving part (receiving part), 54...4th receiving part (receiving part), 61...Main part, 61a...Mounting hole (setting location), 61A...Main surface, 62...Restricting projection, 63A...1st engaging projection (projection), 63B...2nd engaging projection (projection), 63C...3rd engaging projection (projection), 63D...4th engaging projection (projection), 64...Fixing device (fastener), 65...Head part, 66...Shaft part (screw shaft), 70...Identification information, 100...Substrate processing device, W...Wafer (substrate)

Claims

1. A mounting structure for a structural component, wherein when attached to a substrate processing apparatus, a plurality of divided parts are combined to function as a functional component, wherein the divided parts have mounting portions, the plurality of divided parts have different shapes from each other, the substrate processing apparatus is provided with a receiving portion to which the mounting portion is detachably attached, a protrusion is formed on one of the mounting portion and the receiving portion, and a recess is formed on the other of the mounting portion and the receiving portion to which a specific divided part from the plurality of divided parts engages with the protrusion when it is attached to the receiving portion.

2. The mounting structure for a structural component according to claim 1, wherein a plurality of mounting portions are attached to at least one of the receiving portions.

3. The mounting structure for a structural component according to claim 1, wherein the direction of protrusion of the convex portion is perpendicular to the mounting direction of the mounting portion.

4. The mounting structure for a structural component according to claim 1, wherein the receiving portion comprises a main portion having a main surface along the mounting direction of the mounting portion, and a restricting projection protruding from the main surface to restrict the movement of the mounting portion in the mounting direction.

5. The mounting structure for a structural component according to claim 1, wherein at least one of the mounting portion and the receiving portion is a transparent member formed to be transparent in at least a portion thereof, and the convex portion and the concave portion are visible through the transparent member when the mounting portion is attached to the receiving portion.

6. The mounting structure for a structural component according to claim 1, wherein the number of divided bodies is n, n setting locations for forming the protrusions are formed in the receiving portion, and the protrusions are formed in at least one of the setting locations.

7. The mounting structure for a structural component according to claim 6, wherein the protrusion is formed by the head portion of a fastener having a head portion and a screw shaft, and the setting location is a screw hole into which the screw shaft is screwed.

8. The mounting structure for a structural component according to claim 1, wherein identification information is formed on at least one of the mounting portion and the receiving portion.

9. The mounting structure for a structural component according to claim 1, wherein the substrate processing apparatus comprises a table for supporting a substrate to be processed by the substrate processing apparatus, and the structural component is a cylindrical cover surrounding the table.

10. The mounting structure for a structural component according to claim 9, wherein at least a portion of the surface of the structural component is water-repellent, hydrophobic, or hydrophilic.

11. The mounting structure for a structural component according to claim 1, wherein the recess is U-shaped or C-shaped.

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