Liquid processing device, gas processing device, substrate processing device, and liquid processing method

Abstract

Provided is technology that can suppress a decrease in the rate of removal of an organic solvent by activated carbon. A liquid processing device (8) is provided with an acidic liquid mixing unit (82) and an organic solvent removal unit (83). The acidic liquid mixing unit (82) mixes an acidic liquid (A) that contains an acidic component into a liquid (L) to be processed that contains an organic solvent and an alkaline constituent. The organic solvent removal unit (83) removes the organic solvent from the liquid (L) to be processed by passing the liquid (L) to be processed, which has been mixed with the acidic liquid (A), through activated carbon (831).

Images