Substrate carrier loading device, substrate processing system, and operating method of substrate carrier loading device

Abstract

The present invention relates to a substrate carrier loading device that provides a substrate to a process chamber by mounting a substrate carrier on a load port, a substrate processing system, and an operating method of the substrate carrier loading device. The substrate carrier loading device may comprise: a load port which is provided on one side of a loading chamber in a first direction, and in which a substrate carrier that accommodates the substrate and is transferred by a carrier transfer unit is seated to perform loading or unloading of the substrate with respect to the loading chamber; and a buffer unit provided above the load port and provided to support and temporarily store one or more substrate carriers.

Description

Substrate carrier loading device, substrate processing system, and method of operating the substrate carrier loading device

[0001] The present invention relates to a substrate carrier loading device, a substrate processing system, and a method of operating a substrate carrier loading device. More specifically, it relates to a substrate carrier loading device, a substrate processing system, and a method of operating a substrate carrier loading device that places a substrate carrier in a loading port and provides a substrate to a process chamber.

[0002] In a substrate processing system, a substrate carrier, such as a Front Opening Unified Pod (FOUP), containing the substrate is placed in a Load Port using a carrier transport unit, such as an Overhead Hoist Transport (OHT), which moves along a transport rail to perform a process, to start the process, and the substrate is processed through the process of returning the substrate carrier from the Load Port after the process is finished.

[0003] A substrate carrier containing a substrate(s) is placed in each load port(s), and a substrate transfer robot in the loading chamber retrieves the substrates stored in the carriers and transfers them to the process chamber. Once the process is completed in the process chamber, the substrates are placed back into the substrate carriers waiting at the load ports. Finally, the substrate carriers that have completed storage are returned from the load ports by the carrier transfer unit.

[0004] Conventionally, substrate carriers were placed in the load port solely by a carrier transfer unit, and substrates were sequentially withdrawn from the carrier to complete the process, after which they were placed back into the carrier and returned. Consequently, the waiting time before starting the process for the substrate(s) of the subsequent (or next) carrier was inevitably long. This led to an increase in idle time for the process chamber, resulting in a problem of reduced productivity.

[0005] Therefore, there is a need for a device and method capable of increasing the transfer efficiency of a substrate carrier to a load port.

[0006] (Patent Document 1) Korean Published Patent No. 10-2006-0106167

[0007] The present invention provides a substrate carrier loading device having a buffer portion capable of temporarily storing a substrate carrier, a substrate processing system, and a method of operating the substrate carrier loading device.

[0008] A substrate carrier loading device according to one embodiment of the present invention comprises: a load port provided on one side of a first direction of a loading chamber, on which a substrate carrier is seated to receive the substrate and transported by a carrier transport unit to perform loading or unloading of the substrate with respect to the loading chamber; and a buffer unit provided above the load port and provided to support and temporarily store one or more of the substrate carriers, wherein the buffer unit may include a first plate supporting the substrate carrier; and a first plate driving unit that moves the first plate in the first direction so that at least a portion of the first plate is selectively provided on the transport path of the substrate carrier between the carrier transport unit and the load port.

[0009] It may further include a transport unit that transfers the substrate carrier between the buffer unit and the load port.

[0010] The above buffer portion may further include a second plate provided on the upper part of the first plate and supporting a number of substrate carriers different from that of the first plate.

[0011] The above buffer portion further includes a fixed plate that supports the substrate carrier and is positioned on the other side of the first plate in the first direction, and the second plate can support a plurality of the substrate carriers in the first direction.

[0012] The above buffer unit may further include a second plate driving unit that moves the second plate in the first direction.

[0013] The above-described return unit may include a gripper for grasping and releasing the substrate carrier; a first driving unit for moving the gripper in the first direction; and a lifting unit for raising and lowering the gripper.

[0014] Each of the first plate and the second plate may be arranged in a plurality in a second direction intersecting the first direction, and the conveying unit may further include a second driving unit that moves the gripper in the second direction.

[0015] The above buffer portion may further include a sensor provided on the fixed plate to detect the support state of the substrate carrier.

[0016] The above buffer portion may further include anti-detachment members provided to the first plate and the second plate, respectively.

[0017]

[0018] A substrate processing system according to another embodiment of the present invention may include: a substrate carrier loading device according to one embodiment of the present invention; the loading chamber provided on the other side of the first direction of the loading port; and a process chamber for performing a processing process on the substrate loaded through the loading chamber.

[0019]

[0020] A method of operating a substrate carrier loading device according to another embodiment of the present invention comprises: a process of placing a first substrate carrier, in which a plurality of first substrates are accommodated, onto a loading port; a process of bringing the plurality of first substrates from the first substrate carrier placed onto the loading port into a loading chamber; a process of storing a second substrate carrier, in which a plurality of second substrates are accommodated, in a buffer section; a process of storing the first substrate carrier in the buffer section in an empty state; and a process of placing the second substrate carrier from the buffer section onto the loading port; wherein the process of storing the second substrate carrier in the buffer section may include a process of moving a first plate of the buffer section in a first direction; and a process of placing the second substrate carrier onto the first plate.

[0021] The process of storing the first substrate carrier in an empty state in the buffer section may include the process of placing the first substrate carrier in an empty state onto the second plate of the buffer section provided on the upper part of the first plate.

[0022] The method further includes the process of introducing the plurality of second substrates into the loading chamber from the second substrate carrier seated in the load port; and the process of storing the second substrate carrier in the buffer in an empty state, wherein the process of storing the second substrate carrier in the buffer in an empty state may include the process of seating the second substrate carrier in an empty state on one side or the other side of the first direction of the first substrate carrier of the second plate.

[0023] The method further includes: a process of storing a third substrate carrier containing a plurality of third substrates in the buffer section; a process of placing the third substrate carrier from the buffer section onto the load port; a process of bringing the plurality of third substrates from the third substrate carrier placed onto the load port into the loading chamber; and a process of storing the third substrate carrier in the buffer section in an empty state; wherein the process of storing the third substrate carrier in the buffer section may include a process of moving the first plate to the side of the first direction; and a process of placing the third substrate carrier onto the first plate.

[0024] The process of storing the third substrate carrier in an empty state in the buffer section may include the process of moving the second plate in the first direction; and the process of placing the third substrate carrier in an empty state on a fixed plate provided on the other side of the first plate in the first direction.

[0025] A substrate carrier loading device according to an embodiment of the present invention includes a buffer section capable of temporarily storing substrate carriers, so that when all substrate carriers are loaded in a load port, subsequent substrate carriers can be stored in the buffer section until the substrate carriers loaded in the load port are returned, and subsequent substrate carriers can be loaded in the load port within a short time after the substrate carriers are returned from the load port.

[0026] In addition, in the case of a batch-type process chamber capable of simultaneously performing processes on multiple substrates, the substrate can be withdrawn and the empty substrate carrier can be temporarily stored in the buffer section so that the subsequent substrate carrier can be subsequently placed in the load port. This allows the number of substrates that can be loaded through the loading chamber for a single process to be increased by withdrawing the substrate(s) contained in the subsequent substrate carrier. After the process is completed, all substrates are stored in the subsequent substrate carrier and returned, and then the empty substrate carrier that was temporarily stored in the buffer section can be placed in the load port to store the substrates that have completed the process.

[0027] Here, a substrate carrier can be transferred between the buffer section and the load port through a return unit, allowing the substrate carrier to be placed on the load port regardless of the carrier transfer section, and multiple substrate carriers can be stored in the buffer section and arranged in multiple rows. At this time, the buffer section can be configured in multiple stages, consisting of a lower section composed of a first plate and a fixed plate and an upper section composed of a second plate, to store multiple substrate carriers in multiple stages, and the substrate carrier can be supported on the lower first plate by moving the first plate, and the substrate carrier can be supported on the lower fixed plate by moving the second plate.

[0028] A substrate processing system including such a substrate carrier loading device can increase the number of substrates that can be loaded into a process chamber or increase the number of process chambers to increase the quantity of substrates that can be processed at once, and can also supply substrates by seating subsequent substrate carriers into the load port without delay, thereby reducing process waiting time and increasing productivity.

[0029] Meanwhile, in the method of operating the substrate carrier loading device of the present invention, a subsequent substrate carrier (e.g., a second substrate carrier) is filled from the first plate at the bottom, and an empty substrate carrier (e.g., a first substrate carrier in an empty state) is filled from the second plate at the top, so that the subsequent substrate carrier and the empty substrate carrier can be efficiently stored in the buffer section.

[0030] FIG. 1 is a schematic cross-sectional view showing a substrate carrier load device according to an embodiment of the present invention.

[0031] FIG. 2 is a schematic perspective view showing a first plate, a first plate driving unit, and a fixed plate according to an embodiment of the present invention.

[0032] FIG. 3 is a schematic perspective view showing a second plate and a second plate driving unit according to an embodiment of the present invention.

[0033] FIG. 4 is a schematic perspective view showing a conveying unit according to an embodiment of the present invention.

[0034] FIG. 5 is a schematic front view showing a substrate carrier load device according to an embodiment of the present invention.

[0035] FIG. 6 is a schematic plan view showing a substrate processing system according to another embodiment of the present invention.

[0036] FIG. 7 is a flowchart illustrating a method of operating a substrate carrier load device according to another embodiment of the present invention.

[0037] Embodiments of the present invention will be described in more detail below with reference to the attached drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms; these embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention. In the description, the same reference numerals are assigned to identical components, and the drawings may be partially exaggerated in size to accurately describe the embodiments of the present invention, and the same reference numerals in the drawings refer to the same elements.

[0038]

[0039] FIG. 1 is a schematic cross-sectional view showing a substrate carrier load device according to an embodiment of the present invention.

[0040] Referring to FIG. 1, a substrate carrier loading device (100) according to one embodiment of the present invention may include: a loading port (110) provided on one side of a first direction (11) of a loading chamber (210) and on which a substrate carrier (50) is seated, which is transported by a carrier transport unit (230) and in order to perform loading or unloading of a substrate with respect to the loading chamber (210); and a buffer unit (120) provided above the loading port (110) and provided to support one or more substrate carriers (50) so as to be temporarily stored.

[0041] A load port (110) may be provided on one side (e.g., the front) of the first direction (11) of the loading chamber (210), and a substrate carrier (50) in which the substrate is received and transported by a carrier transport unit (230) may be placed to perform loading and / or unloading of the substrate with respect to the loading chamber (210), and the substrate received (or contained) in the substrate carrier (50) may be withdrawn and loaded into the process chamber (220) through the loading chamber (210). Here, the substrate carrier (50) may be a Front Opening Unified Pod (FOUP) capable of storing multiple substrates, and the load port (110) may be a space where the substrate carrier (50) waits for the removal of the substrate(s) to be processed in the process chamber (220), and at the same time, a space where the substrate carrier (50) waits until the substrate(s) that have been processed in the process chamber (220) are stored again.

[0042] For example, when a substrate carrier (50) is placed in a load port (110), a FOUP door can be opened, and a substrate transfer robot (211) of a loading chamber (210) can take out the substrate from the substrate carrier (50) and load it into a process chamber (220), and a processing process can be performed on the substrate loaded into the process chamber (220). At this time, in the case of a batch type process chamber (220), the substrate transfer robot (211) can take out the substrate and load it onto a substrate boat, and load the substrate boat loaded with multiple substrates into the process chamber (220) to perform a processing process on multiple substrates simultaneously.

[0043] The buffer section (120) may be provided above the load port (110) and may be provided to support and temporarily store one or more substrate carriers (50), may temporarily store a subsequent substrate carrier (50) in which a plurality of said substrates are stored, and may also temporarily store an empty substrate carrier (50) after the said substrate(s) are withdrawn from the load port (110).

[0044] Here, the carrier transport unit (230) can transport the substrate carrier (50) to a position corresponding to the load port (110) (or a position corresponding to the load port), raise the substrate carrier (50) between the load port (110), and lower the substrate carrier (50) to be placed on the load port (110). For example, the carrier transport unit (230) may be an overhead hoist transport (OHT) and may include a transport vehicle and a transport rail, and the transport vehicle may move along the transport rail to reach a position corresponding to the load port (110), and may lower the substrate carrier (50) being transported in a vertical direction to be placed on the load port (110). Additionally, the carrier transfer unit (230) may transfer the substrate carrier (50) in which the substrate(s) that have completed the process are (re)stored, and may transfer the substrate carrier (50) by moving it along the transfer rail after raising the substrate carrier (50) vertically from the load port (110).

[0045] At this time, the substrate carrier load device (100) may include an Equipment Front End Module (EFEM).

[0046] FIG. 2 is a schematic perspective view showing a first plate, a first plate driving unit, and a fixed plate according to an embodiment of the present invention, where FIG. 2 (a) shows the first plate in its original position and FIG. 2 (b) shows the first plate moved to one side of the first direction.

[0047] Referring to FIG. 2, the buffer section (120) may include a first plate (121) that supports the substrate carrier (50); and a first plate driving section (123) that moves the first plate (121) in the first direction (11) so that at least a portion of the first plate (121) is selectively provided on the transfer path of the substrate carrier (50) between the carrier transfer section (230) and the load port (110). The first plate (121) may support the substrate carrier (50) and may support and temporarily store at least one substrate carrier (50). Here, the first plate (121) can move in the first direction (11) and, by the first plate drive unit (123), move to one side of the first direction (11) so that at least a portion may be provided on the transfer path (or lifting path) of the substrate carrier (50) between the carrier transfer unit (230) and the load port (110), and may receive and temporarily store the substrate carrier (50) descending from the carrier transfer unit (230).

[0048] The first plate drive unit (123) can move the first plate (121) in a first direction (11), and at least a portion of the first plate (121) can be selectively provided on the transfer path of the substrate carrier (50) between the carrier transfer unit (230) and the load port (110). For example, the first plate drive unit (123) may include a sliding member (123a), such as a rail, and the first plate (121) can be moved in the first direction (11) by sliding along the sliding member (123a) by power such as a motor.

[0049] Accordingly, the substrate carrier loading device (100) according to the present invention includes a buffer section (120) capable of temporarily storing a substrate carrier (50), so that when all substrate carriers (50) are mounted on the load port (110), subsequent substrate carriers (50) can be stored in the buffer section (120) until the substrate carriers (50) mounted on the load port (110) are returned (or removed), and subsequent substrate carriers (50) can be mounted on the load port (110) within a short time after the substrate carriers (50) are returned from the load port (110).

[0050] The substrate carrier loading device (100) according to the present invention may further include a transport unit (130) that transfers a substrate carrier (50) between a buffer unit (120) and a load port (110).

[0051] The return unit (130) can transfer a substrate carrier (50) between the buffer section (120) and the load port (110), can temporarily store the substrate carrier (50) from the load port (110) in the buffer section (120), and can also place (or transfer) the substrate carrier (50) temporarily stored in the buffer section (120) onto the load port (110). For example, the return unit (130) can be provided on the upper part of the buffer section (120), and can raise the substrate carrier (50) from the load port (110) and then lower it at a position corresponding to the first plate (121) (or a position corresponding to the first plate) to support (or place) it on the first plate (121).

[0052] Accordingly, the substrate carrier loading device (100) according to the present invention can transfer a substrate carrier (50) between a buffer section (120) and a load port (110) through a transport unit (130), so that the substrate carrier (50) can be placed on the load port (110) regardless of the carrier transport section (230), and a plurality of substrate carriers (50) can be stored in the buffer section (120) and the substrate carriers (50) can be arranged in a plurality of rows.

[0053] FIG. 3 is a schematic perspective view showing a second plate and a second plate driving unit according to an embodiment of the present invention, where FIG. 3 (a) shows the second plate in its original position and FIG. 3 (b) shows the second plate moved to one side of the first direction.

[0054] Referring to FIG. 3, the buffer section (120) may further include a second plate (122) that is provided on the upper part of the first plate (121) and supports a number of substrate carriers (50) different from that of the first plate (121). The second plate (122) may be provided on the upper part of the first plate (121) and may support a number of substrate carriers (50) different from that of the first plate (121), and the buffer section (120) may be configured in two stages (or multiple stages) and may (temporarily) store a plurality of substrate carriers (50). Here, the second plate (122) may support a greater number of substrate carriers (50) than the first plate (121) and may support and temporarily store two or more substrate carriers (50). For example, the second plate (122) can support two substrate carriers (50), and the first plate (121) can support one substrate carrier (50). At this time, the second plate (122) may be provided on the upper part of the first plate (121) to cover the upper part of the first plate (121), but the first plate (121) may be moved to one side of the first direction (11) through the first plate driving unit (123) to transfer (or temporarily store) the substrate carrier (50) from the carrier transfer unit (230) and / or the return unit (130) to the first plate (121).

[0055] The buffer section (120) supports the substrate carrier (50) and may further include a fixed plate (125) positioned on the other side of the first direction (11) of the first plate (121) to fix its position. The fixed plate (125) may be positioned on the other side of the first direction (11) of the first plate (121) (e.g., rear) to fix its position without movement and may support at least one substrate carrier (50). Here, the other side refers to the opposite side of the first side, and if the first side of the first direction (11) is the front, the other side of the first direction (11) may be the rear. At this time, the fixed plate (125) may form a first shelf section at the bottom together with the first plate (121).

[0056] At this time, the second plate (122) is extended in the first direction (11) to support a plurality of substrate carriers (50) in the first direction (11) and can support and temporarily store two or more substrate carriers (50). That is, the second plate (122) can be not covered (or open) with the transport unit (130) so that it can support and temporarily store a plurality (i.e., a plurality) of substrate carriers (50), and can form the upper second shelf section and can support the same number of substrate carriers (50) as the first shelf section formed by the first plate (121) and the fixed plate (125).

[0057] Additionally, the buffer unit (120) may further include a second plate driving unit (124) that moves the second plate (122) in the first direction (11). The second plate driving unit (124) can move the second plate (122) in the first direction (11) and expose (or open) the upper side (or top) of the fixed plate (125) that was covered by the second plate (122). By doing so, even if the second plate (122) extends to the upper side of the fixed plate (125) to support a plurality of substrate carriers (50) in the first direction (11) and covers the upper side of the fixed plate (125), the upper side of the fixed plate (125) can be selectively opened to temporarily store the substrate carriers (50) on the fixed plate (125). For example, the second plate drive unit (124) may be configured similarly (or identically) to the first plate drive unit (123) and may include a sliding member such as a sliding member (123a), and the second plate (122) may be moved in the first direction (11) by sliding along the sliding member by power such as a motor.

[0058] At this time, the second plate (122) can move a distance shorter than the length of the first direction (11) of the second plate (122) in the first direction (11), and when the second plate (122) supports two substrate carriers (50) and the first plate (121) and the fixed plate (125) each support one substrate carrier (50), it can move only half (or one unit) of the length of the first direction (11) of the second plate (122). Accordingly, the second plate (122) can be moved to one side of the first direction (11) to open only the upper part of the fixed plate (125), and the substrate carrier (50) can be supported on the fixed plate (125) for (temporary) storage, and when the second plate (122) is in its original position, the first plate (121) can be moved to one side of the first direction (11) to support the substrate carrier (50) on the first plate (121).

[0059] Accordingly, the substrate carrier load device (100) according to the present invention may store a plurality of substrate carriers (50) in multiple stages by configuring the buffer section (120) in multiple stages, with the lower section (or the first shelf section) composed of a first plate (121) and a fixed plate (125) and the upper section (or the second shelf section) composed of a second plate (122). Additionally, the substrate carrier (50) may be supported on the first plate (121) at the bottom by moving the first plate (121) in the first direction (11), and the substrate carrier (50) may be supported on the fixed plate (125) at the bottom by moving the second plate (122). That is, the buffer section (120) can support the same number of substrate carriers (50) in the first shelf section and the second shelf section, respectively, and the first shelf section and the second shelf section may have different configurations from each other, and the first shelf section may be a composite configuration of a driving type (the first plate) and a fixed type (the fixed plate), and the second shelf section may be a single configuration of a driving type (the second plate).

[0060] FIG. 4 is a schematic perspective view showing a conveying unit according to an embodiment of the present invention, FIG. 4(a) shows the standby state of the conveying unit, FIG. 4(b) shows the movement and descent of the gripper to one side of the first direction, and FIG. 4(c) shows the movement of the gripper to the other side of the first direction.

[0061] Referring to FIG. 4, the return unit (130) may include a gripper (131) for holding and releasing a substrate carrier (50); a first driving unit (132) for moving the gripper (131) in a first direction (11); and a lifting unit (133) for lifting the gripper (131). The gripper (131) can hold and release the substrate carrier (50), can be moved in a first direction (11) by the first driving unit (132), and can be lifted by the lifting unit (133). Through this, the return unit (130) can support the substrate carrier (50) on the first plate (121), the second plate (122), and / or the fixed plate (125) of the buffer unit (120) to temporarily store it, and then place it on the load port (110). For example, the gripper (131) may be composed of a block body, a grip motor installed on the block body, a movable arm that moves linearly along the motor shaft of the grip motor, a pair of inclined plates installed at both ends of the movable arm and having inclined holes formed therein, and a pair of gripping brackets that are spaced apart or narrowed according to the forward and backward movement of the movable arm, with a through pin installed that moves within the inclined holes. The grip motor can provide power to grip the substrate carrier (50), and the movable arm can move linearly to one side when the motor shaft of the grip motor rotates in one direction and move linearly in the opposite direction when it rotates in the other direction. The gripping bracket is installed by penetrating the block body, and the through pin is provided on the upper surface, and the through pin moves within the inclined holes to narrow the space between the pair of gripping brackets to grip the substrate carrier (50) or widen the space between the pair of gripping brackets to release the gripped substrate carrier (50).

[0062] The first driving unit (132) can move the gripper (131) in the first direction (11), move the gripper (131) to one side of the first direction (11) to position it at a location corresponding to the load port (110), and move the gripper (131) to the other side of the first direction (11) to position it at a location corresponding to the rear end (part) of the second plate (122) and / or the fixed plate (125). For example, the first driving unit (132) may be configured such that the gripper (131) can slide in the first direction (11), and may include a casing and first to third moving blocks. The first movable block may be installed so as to be slidable in the first direction (11) on the casing and may slide independently in the first direction (11) on the casing, and the second movable block may be installed so as to be slidable in the first direction (11) on the lower side of the first movable block and may slide independently in the first direction (11) while moving along the first movable block in the first direction (11) at the same time. And the third moving block can be installed on the lower side of the second moving block so as to be slidable in the first direction (11) on the second moving block and can be connected to the lifting unit (133), and can move in the first direction (11) along the first moving block and the second moving block, and can simultaneously slide independently in the first direction (11) on the second moving block, and can move the lifting unit (133) in the first direction (11) together with the gripper (131).

[0063] The lifting unit (133) can raise the gripper (131) in the up and down direction (or vertical direction), and can lower the gripper (131) holding the substrate carrier (50) in the vertical direction at a position corresponding to the load port (110) to place the substrate carrier (50) on the load port (110), and can lower the gripper (131) holding the substrate carrier (50) in the vertical direction at a position corresponding to the rear end (part) of the second plate (122) and / or the fixed plate (125) to support the substrate carrier (50) on the rear end (part) of the second plate (122) and / or the fixed plate (125). For example, the lifting unit (133) may be connected to the first driving unit (132) and may be composed of a lifting motor installed in the first driving unit (132), a shaft that rotates by receiving power from the motor shaft of the lifting motor, a plurality of pulleys installed spaced apart from the shaft and rotating together with the shaft, and a connecting band wound around the pulleys and having its end connected to the gripper (131). The lifting motor may provide power to enable the gripper (131) to move up and down, and the shaft is connected to the motor shaft of the lifting motor through a power connection means such as a chain or pulley, so that when the motor shaft rotates, the shaft may also rotate. Additionally, 2 to 4 pulleys may be installed at regular intervals on the shaft, the connecting band may have its end connected to the gripper (131), and the connecting band wound around the 2 to 4 pulleys may be extended vertically and connected to the gripper (131). Through this, when the lifting motor rotates and the connecting band is released from the pulley, the gripper (131) can descend in a vertical direction, and when the connecting band is wound around the pulley, the gripper (131) can ascend in a vertical direction.

[0064] FIG. 5 is a schematic front view showing a substrate carrier load device according to an embodiment of the present invention.

[0065] Referring to FIG. 5, each of the first plate (121) and the second plate (122) may be arranged in multiple numbers in a second direction (12) that intersects the first direction (11), and a fixing plate (125) corresponding to the first plate (121) may also be arranged in multiple numbers in the second direction (12), and nine or more substrate carriers (50) can be stored in the buffer section (120). That is, the first shelf section and the second shelf section can each support multiple substrate carriers (50) in the first direction (11) as well as support multiple substrate carriers (50) in the second direction (12).

[0066] In a batch-type process chamber (220), the number of substrate carriers (50) is determined according to the substrate processing capacity. For example, to process 50 substrates, a total of 6 substrate carriers (50) are required per process chamber (220), consisting of 2 substrate carriers (50) for product substrates, 3 substrate carriers (50) for dummy substrates, and 1 substrate carrier (50) for monitoring substrates. If 2 process chambers (220) are used to increase production volume (or processing volume per batch), 12 substrate carriers (50) are required. If 2 subsequent substrate carriers (50) for product substrates and 1 subsequent substrate carrier (50) for monitoring substrates are included, a buffer section (120) capable of storing 15 substrate carriers (50) is required. Accordingly, the substrate carrier loading device (100) according to the present invention can store two substrate carriers (50) in the first direction (11) and four substrate carriers (50) in the second direction (12) respectively in the first shelf section and the second shelf section, thereby allowing the buffer section (120) to have a storage capacity of 16 substrate carriers (50), thus providing a buffer section (120) that has a storage capacity of 15 required quantities.

[0067] At this time, the return unit (130) may further include a second drive unit (134) for moving the gripper (131) in a second direction (12). The second drive unit (134) can move the gripper (131) in a second direction (12), position the gripper (131) in a location corresponding to a different first plate (121), second plate (122) and / or fixed plate (125) in the second direction (12), and can correspond to multiple storage locations with a single gripper (131) while moving in the first direction (11) and the second direction (12). For example, the second drive unit (134) may include a straight rail extending in the second direction (12), and the casing of the first drive unit (132) may slide along the straight rail in the second direction (12), and as the casing moves in the second direction (12), the gripper (131) may move in the second direction (12) together with the first to third moving blocks and the lifting unit (133).

[0068] Meanwhile, the return unit (130) may also transfer (or return) a substrate carrier (50) between the first plate (121) and the second plate (122), between the first plate (121) and the fixed plate (125), between the second plate (122) and the fixed plate (125), and between a plurality of different first plates (121), a plurality of second plates (122), and a plurality of fixed plates (125) while moving the gripper (131) in the first direction (11) and the second direction (12) within the buffer unit (120) through the first drive unit (132) and the second drive unit (134).

[0069] The buffer section (120) may further include a sensor (126) provided on the fixed plate (125) to detect the support status of the substrate carrier (50). The sensor (126) is provided on the fixed plate (125) to detect the support status of the substrate carrier (50), and through the sensor (126), it can be determined whether the substrate carrier (50) is supported on the fixed plate (125). Since the upper side (or top) of the fixed plate (125) is covered by the second plate (122) and is located further inside (or rear) than the first plate (121), it is difficult to visually confirm whether the substrate carrier (50) is supported; therefore, the sensor (126) can be installed on the fixed plate (125) to detect (or confirm) whether the substrate carrier (50) is supported.

[0070] For example, the sensor (126) may be installed on the fixed plate (125) to detect the seating of the substrate carrier (50), and may be composed of multiple sensors to obtain a detection result corresponding to the shape of the substrate carrier (50), and accordingly, the shape of the substrate carrier (50) may be determined through the detection result of the sensor (126).

[0071] Meanwhile, the sensor (126) may also be provided on the first plate (121), which is covered by the second plate (122), and may detect whether the substrate carrier (50) is supported on the first plate (121), as well as detect the support state of the substrate carrier (50) to ensure that the substrate carrier (50) remains in place without moving out of the storage position (or support position) even when the first plate (121) moves in the first direction (11). It may also be provided on the second plate (122) to detect the support state of the substrate carrier (50) to determine whether the substrate carrier (50) moves out of the storage position (or support position) due to the first direction (11) of the second plate (122).

[0072] Additionally, the buffer portion (120) may further include a detachment prevention member (127) provided to the first plate (121) and the second plate (122), respectively. The detachment prevention member (127) may be provided to the first plate (121) and the second plate (122), respectively, and may prevent the substrate carrier (50) from detaching when the first plate (121) and the second plate (122) move in the first direction (11). For example, the detachment prevention member (127) may be provided in the form of a blocking wall at one end of the first direction (11) of the first plate (121) and the second plate (122), and may also be provided at least partially in the form of sidewalls on both sides of the first plate (121) and the second plate (122). In the case where the anti-detachment member (127) is configured in a clamping manner using a hook or the like, if the substrate carrier (50) is not released due to a malfunction while in a clamped state, damage may occur to the return unit (130) or the carrier transfer unit (230). However, in the present invention, the anti-detachment member (127) is provided in the form of a blocking wall so that the anti-detachment member (127) can be prevented from coming off without a separate drive unit, and accordingly, damage to the return unit (130) and / or the carrier transfer unit (230) due to a malfunction can be prevented.

[0073]

[0074] FIG. 6 is a schematic plan view showing a substrate processing system according to another embodiment of the present invention.

[0075] Referring to FIG. 6, a substrate processing system according to another embodiment of the present invention will be examined in more detail, and details that overlap with the previously described parts regarding the substrate carrier loading device according to one embodiment of the present invention will be omitted.

[0076] A substrate processing system (200) according to another embodiment of the present invention may include: a substrate carrier loading device (100) according to one embodiment of the present invention; the loading chamber (210) provided on the other side of the first direction (11) of the loading port (110); and a process chamber (220) for performing a processing process on the substrate loaded through the loading chamber (210).

[0077] The substrate carrier loading device (100) may be a substrate carrier loading device (100) according to an embodiment of the present invention and may be equipped with a buffer part (120) capable of temporarily storing a substrate carrier (50), and the substrate carrier loading device (100) is described in detail above.

[0078] A loading chamber (210) may be provided on the other side of the first direction (11) of a load port (110) and may include a substrate transfer robot (211). When a substrate carrier (50) is placed on the load port (110) and the FOUP door is opened, the substrate transfer robot (211) may take out a substrate from the substrate carrier (50) and load it into a process chamber (220). In the case of a batch type process chamber (220), the substrate transfer robot (211) may take out the substrate and load it onto a substrate boat.

[0079] The process chamber (220) can perform a processing process on the substrate loaded through the loading chamber (210), and when the substrate is withdrawn from the substrate carrier (50) by the substrate transfer robot (211) and loaded into the process chamber (220), a processing process can be performed on the substrate loaded into the process chamber (220). In the case of a batch-type process chamber (220), when the substrate is withdrawn from the substrate carrier (50) by the substrate transfer robot (211) and loaded into the substrate boat, the substrate boat loaded with a plurality of substrates can be loaded into the process chamber (220) so that a processing process can be performed on a plurality of substrates simultaneously. Here, the loading chamber (210) and the process chamber (220) can be connected (or communicated) through a load lock chamber and / or a gate valve (215).

[0080] Accordingly, the substrate processing system (200) according to the present invention includes a substrate carrier loading device (100) so that the number of substrates that can be loaded into the process chamber (220) can be increased, or the number of process chambers (220) can be increased to increase the quantity of substrates that can be processed at once, and a subsequent substrate carrier (50) can be placed in the load port (110) without delay to supply the substrates, thereby reducing the process waiting time and increasing productivity.

[0081] Meanwhile, the substrate processing system (200) of the present invention may further include a carrier transfer unit (230) that transfers a substrate carrier (50) to a position corresponding to a load port (110).

[0082] The carrier transport unit (230) can transport the substrate carrier (50) to a position corresponding to the load port (110) (or a position corresponding to the load port), raise the substrate carrier (50) between the load port (110), and lower the substrate carrier (50) to be placed on the load port (110). For example, the carrier transport unit (230) may be an overhead hoist transport (OHT) and may include a transport vehicle and a transport rail, and the transport vehicle may move along the transport rail to reach a position corresponding to the load port (110), and may lower the substrate carrier (50) being transported in a vertical direction to be placed on the load port (110). Additionally, the carrier transfer unit (230) may transfer the substrate carrier (50) in which the substrate(s) that have completed the process are (re)stored, and may transfer the substrate carrier (50) by moving it along the transfer rail after raising the substrate carrier (50) vertically from the load port (110).

[0083]

[0084] FIG. 7 is a flowchart illustrating a method of operating a substrate carrier load device according to another embodiment of the present invention.

[0085] With reference to FIG. 7, a method of operating a substrate carrier load device according to another embodiment of the present invention will be examined in more detail. However, matters that overlap with the previously described parts regarding the substrate carrier load device according to one embodiment of the present invention and the substrate processing system according to another embodiment of the present invention will be omitted.

[0086] A method of operating a substrate carrier loading device according to another embodiment of the present invention may include: a process of placing a first substrate carrier containing a plurality of first substrates into a loading port (S100); a process of bringing the plurality of first substrates from the first substrate carrier placed in the loading port into a loading chamber (S200); a process of storing a second substrate carrier containing a plurality of second substrates in a buffer section (S300); a process of storing the first substrate carrier in the buffer section in an empty state (S400); and a process of placing the second substrate carrier from the buffer section into the loading port (S500).

[0087] First, a first substrate carrier containing a plurality of first substrates is placed in a load port (S100). The first substrate carrier containing a plurality of first substrates can be placed in the load port, the first substrate carrier can be placed directly in the load port by a carrier transfer unit, or the first substrate carrier that was temporarily stored in a buffer unit can be placed in the load port by a return unit.

[0088] Next, the plurality of first substrates are brought into the loading chamber from the first substrate carrier mounted on the load port (S200). The plurality of first substrates can be brought into the loading chamber from the first substrate carrier mounted on the load port, and when the first substrate carrier is mounted on the load port, the FOUP door can be opened and the plurality of first substrates can be brought into the loading chamber. For example, a substrate transfer robot provided in the loading chamber can withdraw the plurality of first substrates from the first substrate carrier and bring them into the loading chamber, and the plurality of first substrates brought into the loading chamber can be loaded into a process chamber, and a processing process can be performed on the plurality of first substrates loaded into the process chamber. At this time, if the process chamber is of the batch type, the substrate transfer robot can extract the plurality of first substrates and load them onto a substrate boat, and load the substrate boat loaded with the plurality of first substrates into the process chamber to perform a processing process on the plurality of first substrates simultaneously.

[0089] Then, a second substrate carrier containing a plurality of second substrates is (temporarily) stored in a buffer section (S300). A second substrate carrier containing a plurality of second substrates can be stored in a buffer section, and the second substrate carrier may be a subsequent substrate carrier (of the first substrate carrier), and the second substrate carrier can be temporarily stored in the buffer section while the first substrate carrier is seated on the load port. At this time, the carrier transfer section or the return unit may support the second substrate carrier in the buffer section to temporarily store it.

[0090] Next, the first substrate carrier is stored (temporarily) in the buffer section in an empty state (S400). The first substrate carrier can be stored in the buffer section in an empty state, and the first substrate carrier in an empty state can be temporarily stored in the buffer section until the processing process for the plurality of first substrates withdrawn from the first substrate carrier is completed. At this time, the first substrate carrier in an empty state can be temporarily stored in the buffer section by the conveying unit transferring the first substrate carrier in an empty state from the load port to the buffer section.

[0091] Then, the second substrate carrier from the buffer unit is placed on the load port (S500). The second substrate carrier from the buffer unit can be placed on the load port, and the second substrate carrier that was temporarily stored in the buffer unit can be placed on the load port by the return unit.

[0092] Here, the process of storing the second substrate carrier in the buffer section (S300) may include the process of moving the first plate of the buffer section in a first direction (S310); and the process of placing the second substrate carrier on the first plate (S320).

[0093] The first plate of the buffer unit can be moved in a first direction (S310). The first plate of the buffer unit can be moved in a first direction, and the first plate can be moved to one side of the first direction by the first plate driving unit so that at least a portion of the first plate is provided on the transfer path (or lifting path) of the substrate carrier between the carrier transfer unit and the load port, and the second substrate carrier descending in a vertical direction from the carrier transfer unit can be received.

[0094] And the second substrate carrier can be placed on the first plate (S320). The second substrate carrier can be placed on the first plate that has been moved to one side of the first direction, and the second substrate carrier, which is lowered vertically by the carrier transport unit, can be placed on the first plate and temporarily stored.

[0095] Additionally, the process of storing the first substrate carrier in an empty state in the buffer section (S400) may include the process of placing the first substrate carrier in an empty state onto the second plate of the buffer section provided on the upper part of the first plate (S410).

[0096] An empty first substrate carrier can be placed on the second plate of the buffer section provided on the upper part of the first plate (S410). An empty first substrate carrier can be placed on the second plate of the buffer section provided on the upper part of the first plate, and the transport unit can transport the empty first substrate carrier from the load port to the buffer section and place it on the second plate. Since the upper side (or top) of the second plate is not obscured, the empty first substrate carrier can be moved from the load port to the storage position (or corresponding position) of the second plate via the transport unit and placed on the second plate.

[0097] The method of operating a substrate carrier loading device according to the present invention may further include the process of bringing the plurality of second substrates into the loading chamber from the second substrate carrier seated in the loading port (S600); and the process of storing the second substrate carrier in the buffer section in an empty state (S700).

[0098] Next, the plurality of second substrates can be brought into the loading chamber from the second substrate carrier seated in the load port (S600). The plurality of second substrates can be brought into the loading chamber from the second substrate carrier seated in the load port, and when the second substrate carrier is seated in the load port, the pod door can be opened and the plurality of second substrates can be brought into the loading chamber. For example, the substrate transfer robot can withdraw the plurality of second substrates from the second substrate carrier and bring them into the loading chamber, and the plurality of second substrates brought into the loading chamber can be loaded into the process chamber, and a processing process can be performed on the plurality of second substrates loaded into the process chamber.

[0099] And the second substrate carrier can be stored (temporarily) in the buffer section in an empty state (S700). The second substrate carrier can be stored in the buffer section in an empty state, and the second substrate carrier in an empty state can be temporarily stored in the buffer section until the processing process for the plurality of second substrates withdrawn from the second substrate carrier is completed. At this time, the second substrate carrier in an empty state can be temporarily stored by supporting it in the buffer section by the transfer unit transferring the second substrate carrier in an empty state from the load port to the buffer section.

[0100] Here, the process of storing the second substrate carrier in an empty state in the buffer section (S700) may include the process of placing the second substrate carrier in an empty state on one side or the other side of the first direction of the first substrate carrier of the second plate (S710).

[0101] An empty second substrate carrier can be placed on one side or the other side of the first direction of the first substrate carrier of the second plate (S710). An empty second substrate carrier can be placed on one side or the other side of the first direction of the first substrate carrier of the second plate, and the transport unit can transfer the empty second substrate carrier from the load port to the buffer section and place it on one side or the other side of the first direction of the first substrate carrier of the second plate. Since the upper side (or top) of the second plate is not obscured, the empty second substrate carrier can be moved from the load port to one side or the other side of the first direction of the empty first substrate carrier via the transport unit and placed on the second plate. At this time, the first substrate carrier and the second substrate carrier in an empty state may be arranged (or positioned) in the order of the first substrate carrier and the second substrate carrier from one side (or front) of the first direction to the other side (or rear) and (temporarily) stored, and the first substrate carrier in an empty state may be positioned (or supported) on the second plate on the first side (or front) of the first direction, and the second substrate carrier in an empty state may be positioned (or supported) on the second plate on the other side (or rear) of the first direction.

[0102] The method of operating a substrate carrier loading device according to the present invention may further include: a process of storing a third substrate carrier containing a plurality of third substrates in the buffer section (S650); a process of placing the third substrate carrier from the buffer section onto the load port (S750); a process of bringing the plurality of third substrates from the third substrate carrier placed onto the load port into the loading chamber (S800); and a process of storing the third substrate carrier in the buffer section in an empty state (S900).

[0103] And a third substrate carrier containing a plurality of third substrates can be (temporarily) stored in the buffer section (S650). A third substrate carrier containing a plurality of third substrates can be stored in the buffer section, and the third substrate carrier may be a subsequent substrate carrier of the second substrate carrier, and the third substrate carrier can be temporarily stored in the buffer section while the second substrate carrier is seated in the load port. At this time, the carrier transfer section or the return unit can support the third substrate carrier in the buffer section to temporarily store it.

[0104] Next, the third substrate carrier can be placed from the buffer unit onto the load port (S750). The third substrate carrier can be placed from the buffer unit onto the load port, and the third substrate carrier, which was temporarily stored in the buffer unit by the return unit, can be placed onto the load port.

[0105] And, the plurality of third substrates can be brought into the loading chamber from the third substrate carrier seated in the load port (S800). The plurality of third substrates can be brought into the loading chamber from the third substrate carrier seated in the load port, and when the third substrate carrier is seated in the load port, the pod door can be opened and the plurality of third substrates can be brought into the loading chamber. For example, the substrate transfer robot can withdraw the plurality of third substrates from the third substrate carrier and bring them into the loading chamber, and the plurality of third substrates brought into the loading chamber can be loaded into the process chamber, and a processing process can be performed on the plurality of third substrates loaded into the process chamber.

[0106] Next, the third substrate carrier can be stored (temporarily) in the buffer section in an empty state (S900). The third substrate carrier can be stored in the buffer section in an empty state, and the third substrate carrier in an empty state can be temporarily stored in the buffer section until the processing process for the plurality of third substrates withdrawn from the third substrate carrier is completed. At this time, the third substrate carrier in an empty state can be temporarily stored by supporting it in the buffer section by the conveying unit transferring the third substrate carrier in an empty state from the load port to the buffer section.

[0107] Here, the process of storing the third substrate carrier in the buffer (S650) may include the process of moving the first plate to the side of the first direction (S651); and the process of placing the third substrate carrier on the first plate (S652).

[0108] The first plate can be moved to one side of the first direction (S651). The first plate can be moved to one side of the first direction, and the first plate can be moved to one side of the first direction by the first plate driving unit so that at least a portion of the first plate is provided on the transfer path of the substrate carrier between the carrier transfer unit and the load port, and the third substrate carrier descending vertically from the carrier transfer unit can be received.

[0109] And the third substrate carrier can be placed on the first plate (S652). The third substrate carrier can be placed on the first plate that has been moved to one side of the first direction, and the third substrate carrier, which is lowered vertically by the carrier transport unit, can be placed on the first plate and temporarily stored.

[0110] Additionally, the process of storing the third substrate carrier in an empty state in the buffer section (S900) may include the process of moving the second plate in the first direction (S610); and the process of placing the third substrate carrier in an empty state on a fixed plate provided on the other side of the first direction of the first plate (S620).

[0111] The second plate can be moved in the first direction (S610). The second plate can be moved in the first direction, and the second plate can be moved to one side of the first direction by the second plate driving unit so that the upper side (or top) of the fixed plate provided on the other side of the first direction of the first plate is opened (or not covered), and thereby the third substrate carrier in an empty state can be supported (or seated) on the fixed plate and (temporarily) stored.

[0112] And, the third substrate carrier in an empty state can be placed on a fixed plate provided on the other side of the first direction of the first plate (S620). The third substrate carrier in an empty state can be placed on a fixed plate provided on the other side of the first direction of the first plate, and as the second plate is moved to one side of the first direction and provided on the other side of the first direction of the first plate, the upper (or upper side) of the fixed plate that was covered by the second plate can be opened, and accordingly, the third substrate carrier in an empty state can be placed (or supported) on the fixed plate and (temporarily) stored.

[0113] In this manner, the fourth substrate carrier, ..., the nth substrate carrier are temporarily stored in the buffer section and placed in the load port, and a processing process can be performed for a plurality of substrates accommodated (or housed) in a plurality of substrate carriers without a long waiting period. Here, the first substrate carrier, the second substrate carrier, the third substrate carrier, the fourth substrate carrier, ..., the nth substrate carrier may be the same substrate carrier simply divided in order, and the first substrate, the second substrate, and the third substrate may also be the same substrate simply divided in order.

[0114] Accordingly, in the method of operating the substrate carrier loading device of the present invention, the second substrate carrier and / or the third substrate carrier (i.e., subsequent substrate carrier(s)) are filled from the first plate at the bottom, and the first substrate carrier in an empty state and / or the second substrate carrier in an empty state (i.e., empty substrate carrier(s)) are filled from the second plate at the top, thereby allowing the subsequent substrate carrier and the empty substrate carrier to be efficiently stored in the buffer section.

[0115]

[0116] Thus, the present invention includes a buffer section capable of temporarily storing substrate carriers, so that when all substrate carriers are seated in the load port, subsequent substrate carriers can be stored in the buffer section until the substrate carriers seated in the load port are returned, and subsequent substrate carriers can be seated in the load port within a short time after the substrate carriers are returned from the load port. In addition, in the case of a batch-type process chamber capable of performing processes on multiple substrates simultaneously, since substrates can be withdrawn and empty substrate carriers can be temporarily stored in the buffer section to subsequently seat subsequent substrate carriers in the load port, substrates contained in subsequent substrate carriers can also be withdrawn, thereby increasing the number of substrates that can be loaded through the loading chamber for a single process. Furthermore, after the process is completed, after all substrates are received in the subsequent substrate carriers and returned, the empty substrate carriers that were temporarily stored in the buffer section can be subsequently seated in the load port to receive the substrates for which the process has been completed. Here, a substrate carrier can be transferred between the buffer section and the load port through a return unit, allowing the substrate carrier to be placed on the load port regardless of the carrier transfer section, and multiple substrate carriers can be stored in the buffer section and arranged in multiple rows. At this time, the buffer section can be configured in multiple stages, consisting of a lower section composed of a first plate and a fixed plate and an upper section composed of a second plate, to store multiple substrate carriers in multiple stages, and the substrate carrier can be supported on the lower first plate by moving the first plate, and the substrate carrier can be supported on the lower fixed plate by moving the second plate.When such a substrate carrier loading device is used in a substrate processing system, the number of substrates that can be loaded into the process chamber or the number of process chambers can be increased to increase the quantity of substrates that can be processed at once. Furthermore, subsequent substrate carriers can be loaded into the load port without delay to supply substrates, thereby reducing process waiting time and increasing productivity. Meanwhile, subsequent substrate carriers can be filled starting from the first plate at the bottom and empty substrate carriers can be filled starting from the second plate at the top, allowing the subsequent substrate carriers and empty substrate carriers to be efficiently stored in the buffer section.

[0117]

[0118] Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the embodiments described above, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible without departing from the gist of the present invention as claimed in the claims. Accordingly, the technical scope of protection of the present invention should be determined by the following claims.

Claims

1. A load port provided on one side of a first direction of a loading chamber, on which a substrate carrier is seated to receive the substrate and transported by a carrier transport unit for performing loading or unloading of the substrate with respect to the loading chamber; and A buffer portion provided above the load port and configured to support one or more substrate carriers for temporary storage; The above buffer unit is, A first plate supporting the substrate carrier; and A substrate carrier loading device comprising a first plate driving unit that moves the first plate in the first direction so that at least a portion of the first plate is selectively provided on the transfer path of the substrate carrier between the carrier transfer unit and the load port.

2. In Claim 1, A substrate carrier loading device further comprising a conveying unit that transfers the substrate carrier between the buffer section and the load port.

3. In Claim 2, The above buffer unit is, A substrate carrier load device further comprising a second plate provided on the upper part of the first plate and supporting a number of substrate carriers different from that of the first plate.

4. In Claim 3, The above buffer unit is, It further includes a fixing plate that supports the substrate carrier and is positioned on the other side of the first plate in the first direction to fix its position, and The second plate above is a substrate carrier load device that supports a plurality of substrate carriers in the first direction.

5. In Claim 4, The above buffer unit is, A substrate carrier load device further comprising a second plate driving unit that moves the second plate in the first direction.

6. In Claim 3, The above-mentioned return unit is, A gripper that holds and releases the above substrate carrier; A first driving unit for moving the above gripper in the first direction; and A substrate carrier load device including a lifting part for raising and lowering the above gripper.

7. In Claim 6, Each of the first plate and the second plate is arranged in multiple numbers in a second direction intersecting the first direction, and The above-mentioned return unit is a substrate carrier loading device further comprising a second driving unit that moves the gripper in the second direction.

8. In Claim 4, A substrate carrier loading device comprising a buffer portion provided on the fixed plate and further including a sensor that detects the support state of the substrate carrier.

9. In Claim 3, The above buffer section further comprises a substrate carrier load device including a detachment prevention member provided to the first plate and the second plate, respectively.

10. A substrate carrier load device according to any one of claims 1 to 9; The loading chamber provided on the other side of the first direction of the load port; and A substrate processing system comprising: a process chamber for performing a processing process on the substrate loaded through the loading chamber.

11. A process of seating a first substrate carrier, which accommodates a plurality of first substrates, onto a load port; A process of introducing the plurality of first substrates into a loading chamber from the first substrate carrier seated in the load port; A process of storing a second substrate carrier, in which a plurality of second substrates are accommodated, in a buffer section; The process of storing the first substrate carrier in the buffer in an empty state; and The process of placing the second substrate carrier from the buffer portion onto the load port; is included. The process of storing the second substrate carrier in the buffer portion is The process of moving the first plate of the above buffer unit in a first direction; and A method of operating a substrate carrier loading device comprising the process of mounting the second substrate carrier on the first plate.

12. In Claim 11, A method of operating a substrate carrier loading device, wherein the process of storing the first substrate carrier in an empty state in the buffer section includes the process of placing the first substrate carrier in an empty state onto the second plate of the buffer section provided on the upper part of the first plate.

13. In Claim 12, A process of introducing the plurality of second substrates into the loading chamber from the second substrate carrier seated in the load port; and The process of storing the second substrate carrier in the buffer in an empty state is further included, A method of operating a substrate carrier loading device, wherein the process of storing the second substrate carrier in an empty state in the buffer section includes the process of placing the second substrate carrier in an empty state on one side or the other side of the first direction of the first substrate carrier of the second plate.

14. In Claim 13, A process of storing a third substrate carrier containing a plurality of third substrates in the buffer unit; A process of placing the third substrate carrier from the buffer section onto the load port; A process of introducing the plurality of third substrates into the loading chamber from the third substrate carrier seated in the load port; and The process of storing the third substrate carrier in the buffer in an empty state is further included, The process of storing the above-mentioned third substrate carrier in the buffer portion is, A process of moving the first plate to the one side of the first direction; and A method of operating a substrate carrier loading device comprising the process of mounting the third substrate carrier on the first plate.

15. In Claim 14, The process of storing the above-mentioned third substrate carrier in an empty state in the buffer section is, The process of moving the second plate in the first direction; and A method of operating a substrate carrier loading device comprising the process of seating the third substrate carrier in an empty state on a fixed plate provided on the other side of the first direction of the first plate.

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