X-ray analysis system
Patent Information
- Application Number
- AU2025332107
- Authority / Receiving Office
- AU · AU
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-09-02
- Filing Date
- 2025-07-18
- Publication Date
- 2026-08-27
Smart Images
Figure 00000000_0000_ABST
Abstract
Description
Title of Invention: X-RAY ANALYSIS SYSTEM Technical Field The present invention relates to an X-ray analysis system. Background Art There has been known an X-ray spectrometer as an instrument for analyzing elements contained in a sample or a crystal structure of a sample. A sample conveying mechanism for conveying a sample being at a location away from the X-ray spectrometer to the X-ray spectrometer is provided alongside the X-ray spectrometer in some cases. Further, when a sample loader for loading the sample that has been conveyed to the X-ray spectrometer by the sample conveying mechanism into a sample holder is provided alongside, the sample at a location away from the X-ray spectrometer can be conveyed to and analyzed in the X-ray spectrometer without any manual intervention by a user. A related-art sample loader is provided with a moving mechanism for pushing the sample between the sample conveying mechanism and the sample loader. When the sample that has been conveyed to an operating range of the moving mechanism by the sample conveying mechanism is pushed toward a sample holding position on the sample holder, the sample can be loaded inside the sample holder. Similarly, when the moving mechanism pushes the sample located at the sample holding position on the sample holder toward the sample conveying mechanism, the sample can be moved onto the sample conveying mechanism. Further, hitherto, two sample conveying mechanisms have been used in some cases. The two sample conveying mechanisms include: a first sample conveying mechanism for conveying a sample before being subjected to analysis, which is at a location away from an X-ray fluorescence spectrometer, to the X-ray fluorescence spectrometer; and a second sample conveying mechanism for conveying the sample that has been analyzed to the initial location or a different separate location. When the sample conveying mechanisms are arranged such that a position of the sample when placed on the first sample conveying mechanism is higher than that of the sample when located at the sample holding position on the sample holder, the sample can be loaded inside the sample holder only through an operation of pushing the sample from the side. Similarly, when the sample conveying mechanisms are arranged such that the position of the sample placed on the second sample conveying mechanism is lower than that of the sample at the sample holding position on the sample holder, the sample can be moved onto the sample conveying mechanism only through the operation of pushing the sample from the side. Summary of Invention Technical Problem When the sample is moved back to its initial position by using different sample conveying mechanisms as described above, a complex configuration is required. In order to simplify the configuration, it is conceivable to use a sample conveying mechanism for conveyance to the X-ray fluorescence spectrometer to move the sample from the X-ray fluorescence spectrometer back to the initial position. With this configuration, the sample conveying mechanism is required to be arranged such that the sample is positioned at the same height when placed on the sample conveying mechanism and when located at the sample holding position. However, it is difficult to precisely adjust a height of the sample conveying mechanism. Further, the sample conveying mechanism includes a movable part, and hence the height of the sample conveying mechanism may change due to vibration or the like during operation. The present disclosure has been made in view of the abovementioned problems, and has an object to provide an X-ray analysis system with a simple and compact configuration, which is capable of easily moving a sample between a sample conveying mechanism and a holder seat. Solution to Problem (1) According to one aspect of the present disclosure, there is provided an X-ray analysis system, including: a holder seat on which a sample holder configured to temporarily hold a sample is to be placed; a first sample conveying mechanism, on which the sample is to be placed, the first sample conveying mechanism being configured to convey the sample from a first position to a second position closer to the holder seat than the first position; a sample moving mechanism configured to push and move the sample located at the second position from the second position to a sample holding position on the sample holder placed on the holder seat, and push and move the sample located at the sample holding position from the sample holding position to the second position; and a first sample bridge arranged between the second position on the first sample conveying mechanism and the holder seat, the first sample bridge including: a first inclined portion, which is formed at an end on the first sample conveying mechanism side so as to gradually rise toward the holder seat; and a first support portion configured to support the sample, which is formed on the holder seat side of the first inclined portion so as to be continuous with the first inclined portion. When the sample is pushed from the second position toward the holder seat by the sample moving mechanism, an end of the sample on the sample holder side abuts against the first inclined portion of the first sample bridge, and then slides up the first inclined portion to reach the first support portion. When the sample is pushed from a position on the first support portion toward the second position by the sample moving mechanism, an end of the sample on the first sample conveying mechanism side is directly placed on the first sample conveying mechanism. (2) In the X-ray analysis system according to one aspect of the present disclosure, the first sample bridge further includes a second inclined portion, which is formed at an end on the holder seat side so as to gradually rise toward the first sample conveying mechanism, and which is formed on the holder seat side of the first support portion so as to be continuous with the first support portion and forms an angle with respect to the first support portion. (3) In the X-ray analysis system according to one aspect of the present disclosure, when the sample is pushed from the position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder seat side is directly placed at the sample holding position on the sample holder. When the sample is pushed from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample conveying mechanism side abuts against the second inclined portion of the first sample bridge, and then slides up the second inclined portion to reach the first support portion. (4) In the X-ray analysis system according to one aspect of the present disclosure, when the sample is pushed from the position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder seat side is directly placed at the sample holding position on the sample holder. When the sample is pushed from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample conveying mechanism side is directly placed on the first support portion without abutting against the second inclined portion of the first sample bridge. (5) In the X-ray analysis system according to one aspect of the present disclosure, the first inclined portion is a curved surface with an inclination gradually changing from the first sample conveying mechanism side toward the holder seat. (6) In the X-ray analysis system according to one aspect of the present disclosure, the second inclined portion is a curved surface with an inclination gradually changing from the holder seat side toward the first sample conveying mechanism. (7) The X-ray analysis system according to one aspect of the present disclosure further includes: a second sample conveying mechanism on which the sample is to be placed, the second sample conveying mechanism being configured to convey the sample between a third position and a fourth position closer to the holder seat than the third position; and a second sample bridge arranged between the fourth position on the second sample conveying mechanism and the holder seat, the second sample bridge including: a third inclined portion, which is formed at an end on the second sample conveying mechanism side so as to gradually rise toward the holder seat; and a second support portion configured to support the sample, which is formed on the holder seat side of the third inclined portion so as to be continuous with the third inclined portion. The sample moving mechanism is configured to further push and move the sample located at the fourth position from the fourth position to the sample holding position on the sample holder placed on the holder seat, and push and move the sample located at the sample holding position from the sample holding position to the fourth position. (8) In the X-ray analysis system according to one aspect of the present disclosure, the first sample bridge further includes a first support plate that is fixed to a back surface on a side opposite to a front surface on which the first support portion is formed. The first sample conveying mechanism is a belt conveyor including: a belt having a front surface on which the first position and the second position are set; and a pulley configured to rotate the belt to convey the sample from the first position to the second position. The first support plate is arranged so that a front surface of the first support plate is in contact with a back surface of the belt. (9) In the X-ray analysis system according to one aspect of the present disclosure, the second sample bridge further includes a second support plate that is fixed to a back surface on a side opposite to a front surface on which the second support portion is formed. The second sample conveying mechanism is a belt conveyor including: a belt having a front surface on which the third position and the fourth position are set; and a pulley configured to rotate the belt to convey the sample between the third position and the fourth position. The second support plate is arranged so that a front surface of the second support plate is in contact with a back surface of the belt. Brief Description of Drawings FIG. 1 is a view illustrating an X-ray analysis system. FIG. 2 is a view illustrating an interior of an X-ray spectrometer. FIG. 3 is a perspective view of a connecting portion between a first sample conveying mechanism and a sample loader. FIG. 4 is a top view of the connecting portion between the first sample conveying mechanism and the sample loader. FIG. 5 is a schematic sectional view of the connecting portion between the first sample conveying mechanism and the sample loader. FIG. 6 is one exemplary sectional view of the first sample conveying mechanism. FIG. 7 is a schematic view illustrating an interior of a measurement chamber. FIGS. 8 are explanatory views illustrating transfer of a sample between a second position and a sample holding position. FIGS. 9 are explanatory views illustrating the transfer of the sample between the second position and the sample holding position. FIGS. 10 are explanatory views illustrating the transfer of the sample between the second position and the sample holding position. FIGS. 11 are explanatory views illustrating the transfer of the sample between the second position and the sample holding position. FIGS. 12 are views illustrating cross sections of a first sample bridge according to modification examples. FIG. 13 is a top view illustrating connecting portions between a first sample conveying mechanism and a second sample conveying mechanism and a sample loader. FIG. 14 is a schematic sectional view of the connecting portions between the first sample conveying mechanism and the second sample conveying mechanism and the sample loader. Description of Embodiments [First Embodiment] Preferred embodiments (hereinafter referred to as "embodiments") for carrying out the present invention are described below with reference to the drawings. FIG. 1 is a perspective view of an X-ray analysis system 100 according to a first embodiment. FIG. 2 is a view illustrating an interior of the X-ray analysis system 100. As illustrated in FIG. 1 and FIG. 2, the X-ray analysis system 100 includes an X-ray spectrometer 102, a first sample conveying mechanism 104, and a sample loader 106. The X-ray spectrometer 102 is an instrument that uses X-rays to analyze a sample. Specifically, the X-ray spectrometer 102 is, for example, an X-ray fluorescence spectrometer that irradiates a sample with primary X-rays to analyze elements contained in the sample based on fluorescent X-rays outgoing from the sample. Further, the X-ray spectrometer 102 is an X-ray diffractometer that irradiates a sample with X-rays at a given angle to analyze a crystal structure of the sample based on diffracted X-rays. Description is given below of a case in which the X-ray spectrometer 102 is an X-ray fluorescence spectrometer. The X-ray spectrometer 102 includes a casing. A holder tray 108, a holder conveyor 110, a holder feeding space 202, a measurement chamber 204, and a preliminary exhaust chamber 206 are provided inside the casing. The holder tray 108 is a tray in which a plurality of sample holders 312 (described later) are to be placed. The holder tray 108 is used to temporarily place the sample holders 312 therein when a plurality of samples are to be continuously analyzed. The holder feeding space 202 is a space arranged within a range of conveyance by the holder conveyor 110. The holder conveyor 110 conveys the sample holder 312 between a holder seat 208 of the sample loader 106 and the holder feeding space 202. The holder conveyor 110 is arranged above the sample loader 106. The preliminary exhaust chamber 206 is a space including a vacuum pump and a leak valve (both not shown), in which the sample holder 312 is to be temporarily placed. More specifically, the preliminary exhaust chamber 206 is a chamber for, for example, transfer of the sample, and is also referred to as "load lock". The preliminary exhaust chamber 206 is arranged adjacent to the holder feeding space 202. A vacuum shutter is arranged between the preliminary exhaust chamber 206 and the holder feeding space 202. The vacuum shutter is normally in a closed state, and is opened when the sample holder 312 is conveyed between the preliminary exhaust chamber 206 and the holder feeding space 202. Further, the preliminary exhaust chamber 206 is arranged adjacent to the measurement chamber 204. A vacuum shutter is arranged between the preliminary exhaust chamber 206 and the measurement chamber 204. The vacuum shutter is normally in a closed state, and is opened when a sample is conveyed between the preliminary exhaust chamber 206 and the measurement chamber 204. A leak valve is a valve that allows introduction of atmospheric air into the preliminary exhaust chamber 206. The sample holder 312 is conveyed between the holder feeding space 202 and the measurement chamber 204 via the preliminary exhaust chamber 206. When the sample holder 312 is conveyed between the holder feeding space 202 and the preliminary exhaust chamber 206, an inside of the preliminary exhaust chamber 206 is at the atmospheric pressure, and the preliminary exhaust chamber 206 and the measurement chamber 204 are isolated from each other. When the sample holder 312 is conveyed between the measurement chamber 204 and the preliminary exhaust chamber 206, the inside of the preliminary exhaust chamber 206 is under vacuum, and the preliminary exhaust chamber 206 and the holder feeding space 202 are isolated from each other. A sample is placed on the first sample conveying mechanism 104 which then conveys the sample from a predetermined position to a position closer to the holder seat 208 than the predetermined position. The first sample conveying mechanism 104 is, for example, a belt conveyor. An embodiment in which the first sample conveying mechanism 104 is a belt conveyor will be described with reference to FIG. 3 to FIG. 6. FIG. 3 is a perspective view of a connecting portion between the first sample conveying mechanism 104 and the sample loader 106. FIG. 4 is a top view of the connecting portion. FIG. 5 is a schematic view illustrating a cross section taken along the line V-V of FIG. 4, and FIG. 6 is a schematic view illustrating a cross section taken along the line VI-VI of FIG. 4. The first sample conveying mechanism 104, which is a belt conveyor, includes a belt 302, pulleys 304, and a drive device (not shown). The belt 302 is formed of a resin, and has a constant width and a predetermined length. The first sample conveying mechanism 104 conveys a sample from any appropriate position away from the X-ray spectrometer 102 into an operating range of the sample loader 106. For example, when the X-ray spectrometer 102 is installed in a production line of a factory, the first sample conveying mechanism 104 conveys a sample from the vicinity of a manufacturing apparatus used in a step prior to X-ray analysis to a position within a range in which the sample can be loaded on the sample holder 312 by a sample moving mechanism 300 of the sample loader 106 (hereinafter referred to as "operating range of the sample moving mechanism 300"). An initial position of the sample to be conveyed (in the vicinity of the manufacturing apparatus) is hereinafter referred to as "first position 318", and a conveyance destination position (within the operating range of the sample moving mechanism 300) is hereinafter referred to as "second position 320". That is, the first position 318 and the second position 320 are set on a front surface of the belt 302. The belt 302 has a length corresponding to a distance from the first position 318 to the second position 320. The pulleys 304 convey a sample from the first position 318 to the second position 320 by rotating the belt 302. More specifically, as illustrated in FIG. 3 to FIG. 6, a plurality of pulleys 304, each having a cylindrical shape, are provided between the first position 318 and the second position 320. The belt 302 is arranged so as to be wound around all the pulleys 304. When the drive device rotates the pulleys 304, the sample is conveyed from the first position 318 to the second position 320. The sample loader 106 includes the holder seat 208, the sample moving mechanism 300, and a first sample bridge 306. On the holder seat 208, the sample holder 312 for temporarily holding a sample is placed. More specifically, the holder seat 208 is a seat-like member that is arranged within a range of conveyance by the holder conveyor 110 and the operating range of the sample moving mechanism 300. The sample holder 312 is placed on the holder seat 208. The sample holder 312 is, for example, a substantially disc-shaped saucer. A sample is placed on the saucer. A position on the sample holder 312 at which a sample is placed is hereinafter referred to as "sample holding position". The sample moving mechanism 300 pushes and moves a sample located at the second position 320 from the second position 320 to the sample holding position on the sample holder 312 placed on the holder seat 208, and pushes and moves a sample located at the sample holding position from the sample holding position to the second position 320. More specifically, the sample moving mechanism 300 includes, for example, a first pushing portion 314 and a second pushing portion 316. The first pushing portion 314 pushes a sample from the first sample conveying mechanism 104 side in a direction toward the holder seat 208. The second pushing portion 316 pushes a sample from the holder seat 208 side in a direction toward the first sample conveying mechanism 104. The first pushing portion 314 and the second pushing portion 316 each have a recessed portion formed in a portion to be in contact with a sample so as to be able to push the sample. Further, the first pushing portion 314 and the second pushing portion 316 are arranged in accordance with a height of the second position 320 and a height of the sample holding position so as to be able to push the sample. When loading a sample onto the sample holder 312, the sample moving mechanism 300 moves the first pushing portion 314 from the second position 320 toward the sample holding position. Further, when moving the sample loaded on the sample holder 312 back to the first sample conveying mechanism 104, the sample moving mechanism 300 moves the second pushing portion 316 from the sample holding position toward the second position 320. The first sample bridge 306 is arranged between the second position 320 on the first sample conveying mechanism 104 and the holder seat 208. More specifically, the first sample bridge 306 includes a first bridge plate 308 and a first support plate 310. The first bridge plate 308 in this embodiment has a substantially trapezoidal shape in sectional view of FIG. 5, and includes a first inclined portion 402, a first support portion 404, and a second inclined portion 406 on a front surface on the side to be in contact with the sample. The first inclined portion 402 is formed at an end on the first sample conveying mechanism 104 side, and is formed so as to gradually rise toward the holder seat 208. More specifically, the first inclined portion 402 is, for example, an inclined surface that is formed at the end on the first sample conveying mechanism 104 side and forms an angle with respect to a back surface of the first bridge plate 308. The first support portion 404 for supporting a sample is formed on the holder seat 208 side of the first inclined portion 402 so as to be continuous with the first inclined portion 402. More specifically, the first support portion 404 is, for example, a flat surface that is formed on the holder seat 208 side of the first inclined portion 402 so as to be adjacent thereto, and forms an angle with respect to the first inclined portion 402. The flat surface may be parallel to a horizontal plane as long as a sample can be supported thereon in a stable state, or may be tilted with respect to the horizontal plane. Further, the first support portion 404 illustrated in FIG. 3 to FIG. 6 is formed of one flat surface, but is not limited thereto. For example, the first support portion 404 may include a plurality of flat surfaces, may be a planar surface having irregularities, or may be a curved surface. That is, the first support portion 404 may have any shape as long as a function of supporting a sample thereon in a stable state can be fulfilled. The second inclined portion 406 is formed at an end on the holder seat 208 side so as to gradually rise in a direction toward the first sample conveying mechanism 104. More specifically, the second inclined portion 406 is, for example, an inclined surface that is formed on the holder seat 208 side of the first support portion 404 so as to be continuous with the first support portion 404, and forms an angle with respect to the first support portion 404. Further, in this embodiment, the angle formed between the back surface of the first bridge plate 308 and the inclined surface being the first inclined portion 402 is smaller than an angle formed between the back surface of the first bridge plate 308 and the inclined surface being the second inclined portion 406. The first support plate 310 is fixed to a back surface of the first sample bridge 306 on the side opposite to a front surface on which the first support portion 404 is formed. More specifically, the first support plate 310 is, for example, a flat sheet-shaped member having a back surface that is fixed to the sample loader 106. Further, the first support plate 310 is arranged so that a front surface of the first support plate 310 is in contact with a back surface of the belt 302 and the belt 302 is slidably movable thereon. The back surface of the first bridge plate 308 is fixed to a region of the front surface of the first support plate 310, which is not in contact with the belt 302. The second position 320 is set on the front surface of the belt 302 in a region in which the first support plate 310 and the belt 302 are in contact with each other. The first bridge plate 308 and the first support plate 310 may be formed integrally. The belt 302 has an indefinite shape, and hence deflection may occur in a state where the belt 302 is wound around the pulleys 304. Meanwhile, the first support plate 310 is fixed to the sample loader 106, and hence a position of the first support plate 310 is fixed. Thus, even when deflection occurs in the belt 302, a change in height of the second position 320 that is set immediately above the first support plate 310 can be prevented by providing the first support plate 310. The measurement chamber in a case in which the X-ray spectrometer 102 is an X-ray fluorescence spectrometer will now be described. FIG. 7 is a schematic view illustrating an interior of the measurement chamber 204. The measurement chamber 204 is a chamber in which a sample is analyzed. More specifically, as illustrated in FIG. 7, a sample stage 702, an X-ray source 704, a spectroscopic device 706, and a detector 708 are arranged in the measurement chamber 204. The sample stage 702 is a stage on which the sample holder 312 is to be placed. The X-ray source 704 irradiates a sample placed on the sample holder 312 in the measurement chamber 204 with primary X-rays from above. The primary X-rays emitted from the X-ray source 704 are radiated onto a surface of the sample. The spectroscopic element 706 spectrally separates fluorescent X-rays of a predetermined wavelength emitted from the sample. The detector 708 is arranged at a position at which the fluorescent X-rays separated by the spectroscopic device 706 are incident. The detector 708 measures intensity of the fluorescent X-rays outgoing from the sample. The detector 708 is, for example, a proportional counter. The intensity of the fluorescent X-rays is acquired by a counter (not shown) counting pulse signals output from the detector 708. The spectroscopic device 706 and the detector 708 may be provided for each element to be analyzed, or one set of the spectroscopic device 706 and the detector 708 may be rotationally moved to perform measurement. In a case where one set of the spectroscopic device 706 and the detector 708 is rotationally moved, a mechanism (goniometer) for rotationally moving the spectroscopic device 706 and the detector 708 is provided in the measurement chamber 204. Next, transfer of a sample between the second position 320 on the first sample conveying mechanism 104 and the sample holding position on the sample holder 312 will be described. The description is given of a case in which the sample has a predetermined shape (disc shape in this case). FIG. 8(a) to FIG. 9(c) are views illustrating the transfer of the sample at the time when the sample is pushed from the second position 320 toward the holder seat 208 by the sample moving mechanism 300. FIG. 8(a) to FIG. 9(c) are schematic views for explanatory purposes, and thus sizes of the components are different from actual sizes thereof. In a state illustrated in FIG. 8(a), the sample is placed at the second position 320 on the first sample conveying mechanism 104. First, the first pushing portion 314 pushes the sample located at the second position 320 toward the holder seat 208. At this time, a bottom surface of the first bridge plate 308 is at a lower level than the front surface of the belt 302 of the first sample conveying mechanism 104. Thus, an end of the sample on the sample holder 312 side abuts against the first inclined portion 402 of the first sample bridge 306 (FIG. 8(b)). After that, when the first pushing portion 314 pushes the sample toward the holder seat 208, the sample slides up the first inclined portion 402 (FIG. 8(c)) and reaches the first support portion 404 (FIG. 9(a)). In this embodiment, the first support portion 404 is a horizontal planar surface. Thus, the sample positioned on the first support portion 404 is in a stable state. Subsequently, when the sample is pushed from the position on the first support portion 404 toward the sample holding position by the sample moving mechanism 300, the end of the sample on the holder seat 208 side is directly placed at the sample holding position on the sample holder 312 (FIG. 9(b)). In this embodiment, the horizontal planar surface, which is the first support portion 404, and a surface of the saucer of the holder seat 208 are flush with each other. Further, a distance A-B between the end (position A in the drawings) of the first support portion 404 on the holder seat 208 side and an end (position B in the drawings) of the saucer on the first sample conveying mechanism 104 side is sufficiently smaller than a size of the sample. Thus, while a center of gravity of the sample is located above the first support portion 404, the end of the sample on the holder seat 208 side can be placed at the sample holding position on the sample holder 312. When the sample in a state of FIG. 9(b) is pushed toward the sample holding position by the sample moving mechanism 300, the sample reaches the sample holding position (FIG. 9(c)). The distance A-B between the end (position A in the drawings) of the first support portion 404 on the holder seat 208 side and the end (position B in the drawings) of the saucer on the first sample conveying mechanism 104 side is sufficiently smaller than the size of the sample. Thus, at the time when the center of gravity reaches above the saucer, the end of the sample on the first sample conveying mechanism 104 side lies on the first support portion 404. Thus, the sample can be transferred to the sample holding position without contacting the second inclined portion 406. After the sample is placed at the sample holding position on the sample holder 312, the sample holder 312 is conveyed into the holder feeding space 202 by the holder conveyor 110. Then, after the sample holder 312 is conveyed to the measurement chamber 204 through the preliminary exhaust chamber 206, the sample is analyzed. After the analysis is completed, the sample holder 312 is conveyed to the holder feeding space 202 through the preliminary exhaust chamber 206. Further, the sample holder 312 is conveyed to the holder seat 208 by the holder conveyor 110 (FIG. 10(a)). FIG. 10(a) to FIG. 11(b) are views illustrating the transfer of the sample at the time when the sample is pushed from the sample holding position toward the first sample conveying mechanism 104 by the sample moving mechanism 300. FIG. 10(a) to FIG. 11(b) are schematic views for explanatory purposes, and sizes of the components are different from actual sizes thereof. In this embodiment, the horizontal planar surface, which is the first support portion 404, and the front surface of the saucer of the holder seat 208 are flush with each other. Thus, when the sample is pushed from the sample holding position toward the first sample conveying mechanism 104 by the sample moving mechanism 300 (second pushing portion 316), the end of the sample on the first sample conveying mechanism 104 side is directly placed on the first support portion 404 without abutting against the second inclined portion 406 of the first sample bridge 306 (FIG. 10(b)). That is, while the center of gravity of the sample is located above the saucer, the end of the sample on the first sample conveying mechanism 104 side can be placed on the first support portion 404. When the sample is further pushed toward the first sample conveying mechanism 104, the sample reaches a position on the first support portion 404 (FIG. 10(c)). Subsequently, when the sample is pushed from the position on the first support portion 404 toward the second position 320 by the sample moving mechanism 300 (second pushing portion 316), the end of the sample on the first sample conveying mechanism 104 side is directly placed on the first sample conveying mechanism 104 (FIG. 11(a)). In this embodiment, the horizontal planar surface, which is the first support portion 404, is higher than the second position 320 (the front surface of the belt 302). Thus, when the center of gravity of the sample is shifted to the first sample conveying mechanism 104 side with respect to a boundary between the first support portion 404 and the first inclined portion 402, the sample is tilted. In this case, the end of the sample on the first sample conveying mechanism 104 side can be placed on the sample conveying mechanism 104 by setting a distance C-D between an end (position C in the drawings) of the belt 302 on the holder seat 208 side and the end (position D in the drawings) of the first support portion 404 on the first sample conveying mechanism 104 side sufficiently smaller than the sample. As a result, abutment of the sample against a side surface of the belt 302 can be prevented. Further, when the sample is further pushed from the position on the first support portion 404 toward the second position 320 by the sample moving mechanism 300, the sample reaches the second position 320 (FIG. 11(b)). As described above, when the first inclined portion 402 is formed on the first sample bridge 306, the sample can easily be transferred between the sample conveying mechanism and the holder seat 208 with a simple and compact configuration. In the embodiment described above, the position at which the sample is held on the first support portion 404 (position of the horizontal planar surface being the first support portion 404) and the sample holding position (position of the surface of the saucer of the holder seat 208) are at the same height, but the heights thereof are not limited thereto. The position at which the sample is held on the first support portion 404 may be lower than the second position 320 as long as the position is higher than a lower end of the second inclined portion 406. In this case, when the sample is pushed from the sample holding position toward the first sample conveying mechanism 104 by the sample moving mechanism 300, the end of the sample on the first sample conveying mechanism 104 side abuts against the second inclined portion 406 of the first sample bridge 306, and then slides up the second inclined portion 406 to reach the first support portion 404. Further, a shape of the first sample bridge 306 is not limited to the shape described above. More specifically, for example, FIG. 12(a) to FIG. 12(f) are schematic views illustrating modification examples of a sectional shape of the first bridge plate 308. As described above, when the position at which the sample is held on the first support portion 404 and the second position 320 are at the same height, the second inclined portion 406 may be eliminated as illustrated in FIG. 12(a) to FIG. 12(c). The lower end of the first inclined portion 402 is not required to match a back surface of the first sample bridge 306 as long as a lower end of the first inclined portion 402 is at a position lower than the second position 320 as illustrated in FIG. 12(b) and FIG. 12(e). Similarly, as illustrated in FIG. 12(e), the lower end of the second inclined portion 406 is not required to match the back surface of the first sample bridge 306 as long as the sample holding position is set at a position higher than the lower end of the second inclined portion 406. As illustrated in FIG. 12(d), the first inclined portion 402 and the second inclined portion 406 may have the same inclination. As illustrated in FIG. 12(c) and FIG. 12(f), the first inclined portion 402 may be a curved surface having an inclination gradually changing from the first sample conveying mechanism 104 side toward the holder seat 208. In this case, it is desirable that the inclination of the first inclined portion 402 be largest at a center of the first inclined portion 402, and decrease toward the first sample conveying mechanism 104 and the holder seat 208. Similarly, as illustrated in FIG. 12(f), the second inclined portion 406 may be a curved surface having an inclination gradually changing from the holder seat 208 side toward the first sample conveying mechanism 104. Further, a moving speed of the sample moving mechanism 300 may be constant or may be changed. More specifically, for example, in a process of pushing and moving the sample located at the second position 320 to the sample holding position, the first pushing portion 314 may move the sample at a constant speed. Further, after moving the sample located at the second position 320 to the position on the first support portion 404 at a constant speed, the first pushing portion 314 may be stopped for a given period of time and then move the sample located at the position on the first support portion 404 to the sample holding position at a constant speed. Similarly, in a process of pushing and moving the sample located at the sample holding position to the second position 320, the second pushing portion 316 may move the sample at a constant speed. Further, after moving the sample located at the sample holding position to the position on the first support portion 404 at a constant speed, the second pushing portion 316 may be stopped for a given period of time and then move the sample located at the position on the first support portion 404 to the second position 320 at a constant speed. Further, sizes and shapes of the portions of the first sample bridge 306 and a position at which the first sample bridge 306 is arranged are appropriately set in accordance with the size of the sample. More specifically, it is desirable that the distance A-B between the end (position A in the drawings) of the first support portion 404 on the holder seat 208 side and the end (position B in the drawings) of the saucer on the first sample conveying mechanism 104 side be half or less than the size of the sample. Here, the size of the sample refers to a length of the sample from the end on the first sample conveying mechanism 104 side to the end on the holder seat 208 side. Similarly, it is desirable that the distance C-D between the end (position C in the drawings) of the belt 302 on the holder seat 208 side and the end (position D in the drawings) of the first support portion 404 on the first sample conveying mechanism 104 side be half or less than the size of the sample. For example, the sample often has a disc shape with a diameter of 28 mm or more in order to maintain sufficient analysis accuracy. Thus, it is desirable that the distance A-B be 14 mm or less. Similarly, it is desirable that the distance C-D be 14 mm or less. The sample having a disc shape is one example. The shape is not required to be a disc shape as long as the sample has a predetermined shape. The sample holder may be selected in accordance with the size of the sample. In this case, the sizes and shapes of the portions of the first sample bridge 306 and the position at which the first sample bridge 306 is arranged may be set in accordance with a size of the sample holder. [Second Embodiment] An X-ray analysis system 100 according to a second embodiment is different from the X-ray analysis system according to the first embodiment in that a second sample conveying mechanism 1302 and a second sample bridge are provided. In the other respects, the second embodiment is the same as the first embodiment, and hence description thereof is herein omitted. FIG. 13 is a top view of connecting portions between a first sample conveying mechanism 104 and the second sample conveying mechanism 1302 and a sample loader 106 of the X-ray analysis system 100 according to the second embodiment. FIG. 14 is a schematic sectional view of the connecting portions. A sample is placed on the second sample conveying mechanism 1302 which then conveys the sample between a predetermined position and a position closer to a holder seat 208 than the predetermined position. The second sample conveying mechanism 1302 is, for example, a belt conveyor and has a configuration similar to that of the first sample conveying mechanism 104 other than an initial position before conveyance and a conveyance destination position. For example, the second sample conveying mechanism 1302 conveys a sample from an operating range of a sample moving mechanism 300 to the vicinity of an inspection apparatus that is used in a step after X-ray analysis. The conveyance destination position of a sample (in the vicinity of the inspection apparatus) is hereinafter referred to as "third position 1316", and the initial position before conveyance (within the operating range of the sample moving mechanism 300) is hereinafter referred to as "fourth position 1318". That is, the third position 1316 and the fourth position 1318 are set on a front surface of a belt 302 of the second sample conveying mechanism 1302. The belt 302 has a length corresponding to a distance from the third position 1316 to the fourth position 1318. The second sample bridge is arranged between the fourth position 1318 on the second sample conveying mechanism 1302 and the holder seat 208. A second sample bridge 1304 includes a second bridge plate 1306 and a second support plate 1314. The second bridge plate 1306 in the second embodiment has a substantially trapezoidal shape in sectional view, and has a third inclined portion 1308, a second support portion 1310, and a fourth inclined portion 1312 on a front surface on the side to be in contact with a sample. More specifically, the second sample bridge 1304 has: the third inclined portion 1308, which is formed at an end on the second sample conveying mechanism 1302 side so as to gradually rise toward the holder seat 208; the second support portion 1310 for supporting a sample, which is formed on the holder seat 208 side of the third inclined portion 1308 so as to be continuous with the third inclined portion 1308; and the fourth inclined portion 1312, which is formed at an end on the holder seat 208 side so as to gradually rise toward the second sample conveying mechanism 1302. The third inclined portion 1308 of the second sample bridge 1304 has a shape and a function similar to those of the first inclined portion 402 of the first sample bridge 306. The second support portion 1310 of the second sample bridge 1304 has a shape and a function similar to those of the first support portion 404 of the first sample bridge 306. The fourth inclined portion 1312 of the second sample bridge 1304 has a shape and a function similar to those of the second inclined portion 406 of the first sample bridge 306. The second support plate 1314 has a shape and a function similar to those of the first support plate 310. Further, the sample moving mechanism 300 in the second embodiment further pushes and moves a sample located at the fourth position 1318 from the fourth position 1318 to the sample holding position on the sample holder 312 placed on the holder seat 208, and pushes and moves a sample located at the sample holding position from the sample holding position to the fourth position 1318. As described above, the X-ray analysis system 100 according to the second embodiment includes the first sample conveying mechanism 104 and the second sample conveying mechanism 1302. For example, when the first sample conveying mechanism 104 and the second sample conveying mechanism 1302 are both belt conveyors, two belts for conveying a sample are included. Thus, according to the second embodiment, after a sample that has been conveyed from the first position 318 to the X-ray analysis system 100 is analyzed, the sample that has been analyzed can be conveyed to the third position, which is different from the first position 318. Also in the second embodiment, when the third inclined portion 1308 is formed on the second sample bridge 1304, the sample can easily be transferred between the sample conveying mechanism and the holder seat 208 with a simple and compact configuration. Reference Signs List 100 X-ray analysis system 102 X-ray spectrometer 104 first sample conveying mechanism 106 sample loader 108 holder tray 110 holder conveyor 202 holder feeding space 204 measurement chamber 206 preliminary exhaust chamber 208 holder seat 300 sample moving mechanism 302 belt 304 pulley 306 first sample bridge 308 first bridge plate 310 first support plate 312 sample holder 314 first pushing portion 316 second pushing portion 318 first position 320 second position 402 first inclined portion 404 first support portion 406 second inclined portion 702 sample stage 704 X-ray source 706 spectroscopic device 708 detector 1302 1304 second second sample conveying mechanism sample bridge 5 1306 second bridge plate 1308 third inclined portion 1310 second support portion 1312 fourth inclined portion 1314 second support plate 10 1316 third position 1318 fourth position
Claims
1. An X-ray analysis system, comprising:a holder seat on which a sample holder configured to temporarily hold a sample is to be placed;a first sample conveying mechanism, on which the sample is to be placed, the first sample conveying mechanism being configured to convey the sample from a first position to a second position closer to the holder seat than the first position;a sample moving mechanism configured to push and move the sample located at the second position from the second position to a sample holding position on the sample holder placed on the holder seat, and push and move the sample located at the sample holding position from the sample holding position to the second position; anda first sample bridge arranged between the second position on the first sample conveying mechanism and the holder seat, the first sample bridge including:a first inclined portion, which is formed at an end on the first sample conveying mechanism side so as to gradually rise toward the holder seat; anda first support portion configured to support the sample, which is formed on the holder seat side of the first inclined portion so as to be continuous with the first inclined portion,wherein, when the sample is pushed from the second position toward the holder seat by the sample moving mechanism, an end ofthe sample on the sample holder side abuts against the first inclined portion of the first sample bridge, and then slides up the first inclined portion to reach the first support portion, andwherein, when the sample is pushed from a position on the first support portion toward the second position by the sample moving mechanism, an end of the sample on the first sample conveying mechanism side is directly placed on the first sample conveying mechanism.
2. The X-ray analysis system according to claim 1, wherein the first sample bridge further includes a second inclined portion, which is formed at an end on the holder seat side so as to gradually rise toward the first sample conveying mechanism, and which is formed on the holder seat side of the first support portion so as to be continuous with the first support portion, and forms an angle with respect to the first support portion.
3. The X-ray analysis system according to claim 2, wherein, when the sample is pushed from the position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder seat side is directly placed at the sample holding position on the sample holder, andwherein, when the sample is pushed from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample conveyingmechanism side abuts against the second inclined portion of thefirst sample bridge, and then slides up the second inclinedportion to reach the first support portion.
4. The X-ray analysis system according to claim 2, wherein, when the sample is pushed from the position on the first support portion toward the sample holding position by the sample moving mechanism, the end of the sample on the holder seat side is directly placed at the sample holding position on the sample holder, andwherein, when the sample is pushed from the sample holding position toward the sample moving mechanism by the sample moving mechanism, the end of the sample on the first sample conveying mechanism side is directly placed on the first support portion without abutting against the second inclined portion of the first sample bridge.
5. The X-ray analysis system according to any one of claims 1 to 4, wherein the first inclined portion is a curved surface with an inclination gradually changing from the first sample conveying mechanism side toward the holder seat.
6. The X-ray analysis system according to any one of claims 2 to 4, wherein the second inclined portion is a curved surface with an inclination gradually changing from the holder seat side toward the first sample conveying mechanism.
7. The X-ray analysis system according to any one of claims 1 to 4, further comprising:a second sample conveying mechanism on which the sample is to be placed, the second sample conveying mechanism being configured to convey the sample between a third position and a fourth position closer to the holder seat than the third position; anda second sample bridge arranged between the fourth position on the second sample conveying mechanism and the holder seat, the second sample bridge including:a third inclined portion, which is formed at an end on the second sample conveying mechanism side so as to gradually rise toward the holder seat; anda second support portion configured to support the sample, which is formed on the holder seat side of the third inclined portion so as to be continuous with the third inclined portion,wherein the sample moving mechanism is configured to further push and move the sample located at the fourth position from the fourth position to the sample holding position on the sample holder placed on the holder seat, and push and move the sample located at the sample holding position from the sample holding position to the fourth position.
8. The X-ray analysis system according to claim 7, wherein the first sample bridge further includes a first support plate that is fixed to a back surface on a side oppositeto a front surface on which the first support portion is formed, wherein the first sample conveying mechanism is a belt conveyor including: a belt having a front surface on which the first position and the second position are set; and a pulley configured to rotate the belt to convey the sample from the first position to the second position, andwherein the first support plate is arranged so that a front surface of the first support plate is in contact with a back surface of the belt.
9. The X-ray analysis system according to claim 8, wherein the second sample bridge further includes a second support plate that is fixed to a back surface on a side opposite to a front surface on which the second support portion is formed, wherein the second sample conveying mechanism is a belt conveyor including: a belt having a front surface on which the third position and the fourth position are set; and a pulley configured to rotate the belt to convey the sample between the third position and the fourth position, andwherein the second support plate is arranged so that a front surface of the second support plate is in contact with a back surface of the belt.