Flatness Measuring Device

Abstract

The present invention provides a flatness measurement device, belonging to the field of measurement technology, which includes a base, an X-axis translation component, a Y-axis translation component, a Z-axis translation component, a plurality of carriers, and a laser rangefinder; wherein, the Y-axis translation component is arranged on the base, the X-axis translation component is connected to the Y-axis translation component, the Z-axis translation component is connected to the X-axis translation component, the carrier is connected to the Z-axis translation component and the carrier has an upper surface and a lower surface parallel to the X-Y plane, and the laser rangefinder is arranged on the base and the laser emission direction of the laser rangefinder is vertically upward. During measurement, the surface to be measured of the object to be measured is lapped on the upper surface of the carrier, the X-axis translation component and the Y-axis translation component can drive the carrier and the object to be measured to move within the X-Y plane covering the laser rangefinder, and the Z-axis translation component can drive the carrier and the object to be measured to move in the Z-axis direction. In this way, it is not affected by the shape of the object to be measured, and more accurate height differences and flatness can be obtained.

Description

Technical Field

[0001] The present invention belongs to the technical field of measurement, and particularly relates to a flatness measurement device. Background Art

[0002] OLED screens can be applied to various usage environments, and correspondingly, need to be installed on different mounting brackets. During the installation process of the OLED screen, it is necessary to ensure the flatness of the OLED screen, and thus it is also necessary to ensure the flatness of the bonding surface of the mounting bracket. Therefore, it is necessary to detect the flatness of the mounting bracket in advance. In addition, for test objects with high flatness requirements in other fields, such as mounting platforms, wafers, stages, slides, etc., it is also necessary to detect the flatness in advance.

[0003] In a traditional flatness detection method, red lead powder is smeared on the test surface of the test object, and the flatness is determined by the percentage of the spot area after contact with the standard surface in the entire standard surface. This method cannot accurately judge the flatness of the test surface and cannot obtain the height difference.

[0004] In another traditional flatness detection method, the test surface of the test object is placed horizontally upward, and a micrometer is used to measure the height difference at different positions on the test surface, and then the flatness of the test surface is calculated. This method requires the test surface to be placed horizontally upward, and the shape of the test object may be irregular, resulting in a greater difficulty in placing the test object.

[0005] Therefore, for test objects of various shapes, how to accurately and simply measure the height difference and flatness has become a technical problem that needs to be solved urgently at present. Summary of the Invention

[0006] The purpose of the present invention is to provide a flatness measurement device, aiming to solve the technical problem of how to accurately and simply measure the height difference and flatness.

[0007] To achieve the above purpose, the technical solution adopted by the present invention is: providing a flatness measurement device, including: a base, an X-axis translation assembly, a Y-axis translation assembly, a Z-axis translation assembly, a plurality of carriers, and a laser rangefinder;

[0008] Wherein, the Y-axis translation assembly is arranged on the base, the X-axis translation assembly is connected to the Y-axis translation assembly, the Z-axis translation assembly is connected to the X-axis translation assembly, the carrier is connected to the Z-axis translation assembly and the carrier has an upper surface and a lower surface parallel to the X-Y plane, and the laser rangefinder is arranged on the base and the laser emission direction of the laser rangefinder is vertically upward;

[0009] During measurement, the surface to be measured of the object to be measured is lapped on the upper surface of the carrier. The X-axis translation assembly and the Y-axis translation assembly can drive the carrier and the object to be measured to move within the X-Y plane covering the laser rangefinder, and the Z-axis translation assembly can drive the carrier and the object to be measured to move in the Z-axis direction.

[0010] In some implementation manners, the carrier includes: a mounting portion connected to the Z-axis translation assembly; and a lapping portion connected to the mounting portion and having an upper surface parallel to the X-Y plane.

[0011] In some implementation manners, the carrier further includes a first limiting portion connected to the Y-axis end of the lapping portion, and the first limiting portion has an extending distance in the Z-axis direction.

[0012] In some implementation manners, the carrier further includes a buffer pad provided on the extending side surface of the first limiting portion in the Z-axis direction.

[0013] In some implementation manners, there are multiple carriers. The carrier at the head end and the carrier at the tail end both further include a second limiting portion connected to the X-axis end of the lapping portion facing away from the adjacent carrier, and the second limiting portion has an extending distance in the Z-axis direction.

[0014] In some implementation manners, on the upper surface of the mounting portion facing away from the lapping portion, the carrier further includes a reinforcing rib provided between the mounting portion and the lapping portion.

[0015] In some implementation manners, there are multiple carriers. The Z-axis translation assembly includes: multiple Z-axis sliders, all of which are movably matched with the X-axis translation assembly and are correspondingly connected to the multiple carriers; and multiple Z-axis driving structures correspondingly matched with the multiple Z-axis sliders; wherein, the Z-axis driving structure drives the Z-axis slider to move in the Z-axis direction so that the multiple carriers are located in the same X-Y plane.

[0016] In some implementation manners, the X-axis translation assembly includes: an X-axis slide rail movably matched with the Y-axis translation assembly; multiple X-axis sliders, all of which are movably matched with the X-axis slide rail and are correspondingly connected to the multiple Z-axis sliders; and several X-axis driving structures correspondingly matched with the multiple X-axis sliders; wherein, the X-axis driving structure drives the X-axis slider to move in the X-axis direction so that the multiple carriers form different coverage ranges in the X-axis direction.

[0017] In some implementations, the X-axis drive structure is provided with one and is matched with one of the X-axis sliders. Each of the X-axis sliders is provided with a fixing hole. The X-axis translation assembly further includes: a fixing frame provided with a limiting groove extending in the X-axis direction; and a plurality of first fasteners correspondingly passing through the limiting groove and the fixing hole, so that the plurality of X-axis sliders are connected and move synchronously. Moreover, by adjusting the position of the first fasteners relative to the limiting groove, different coverage ranges in the X-axis direction are formed by the plurality of loading racks.

[0018] In some implementations, the Z-axis slider is provided with an adjustment area, and the loading racks are adaptively connected to different positions of the adjustment area, so that the plurality of loading racks are located in the same X-Y plane and different coverage ranges in the X-axis direction are formed by the plurality of loading racks.

[0019] In some implementations, the adjustment area is a plurality of adjustment holes distributed in an array, and the loading racks are adaptively connected to different adjustment holes through second fasteners.

[0020] In some implementations, the adjustment area is an adjustment groove distributed in a grid pattern, and the loading racks are adaptively connected to different positions of the adjustment groove through third fasteners.

[0021] The flatness measurement device provided by the present invention has at least the following technical effects: Compared with the traditional technology, in the flatness measurement device provided by the present invention, the laser emission direction of the laser rangefinder is set vertically upward. Before measuring the flatness of the object to be measured, the position of the loading rack is adjusted first through the X-axis translation assembly, Y-axis translation assembly and Z-axis translation assembly, and the plurality of loading racks are adjusted to be in the same X-Y plane through the laser rangefinder, X-axis translation assembly and Y-axis translation assembly to ensure the flatness of the loading rack; then the surface to be measured of the object to be measured is lapped on the upper surface of the loading rack, that is, the surface to be measured of the object to be measured is arranged downward. The height difference and flatness of the surface to be measured are measured through the laser rangefinder, X-axis translation assembly and Y-axis translation assembly. Since the loading rack has extremely high flatness, lapping the surface to be measured on the upper surface of the loading rack is not affected by the shape of the object to be measured, and it can be ensured that the surface to be measured is in a horizontal plane, and thus a more accurate height difference and flatness can be obtained. The overall structure is relatively simple, and the operation difficulty is reduced. Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0023] Figure 1 Schematic structural diagram of the flatness measuring device provided by an embodiment of the present invention;

[0024] Figure 2 For Figure 1 Enlarged schematic diagram when the adjustment area in the shown structure A is an adjustment hole;

[0025] Figure 3 For Figure 1 Enlarged schematic diagram when the adjustment area in the shown structure A is an adjustment groove;

[0026] Figure 4 Another perspective structural diagram of the flatness measuring device provided by an embodiment of the present invention;

[0027] Figure 5 For Figure 4 Enlarged schematic diagram when the shown structure B includes the first fastener;

[0028] Figure 6 For Figure 4 Enlarged schematic diagram when the shown structure B does not include the first fastener;

[0029] Figure 7 Schematic diagram when the flatness measuring device of an embodiment of the present invention detects the object to be measured;

[0030] Figure 8 Schematic structural diagram of the carrier provided by an embodiment of the present invention;

[0031] Figure 9 Schematic structural diagram of the carrier provided by an embodiment of the present invention;

[0032] Figure 10 Schematic structural diagram of the carrier provided by an embodiment of the present invention;

[0033] Figure 11 Schematic structural diagram of the carrier provided by an embodiment of the present invention;

[0034] Figure 12 Schematic structural diagram of the carrier provided by an embodiment of the present invention.

[0035] Explanation of reference numerals:

[0036] 1. Flatness measuring device 2. Object to be measured

[0037] 100. Base 200. X-axis translation assembly 210. X-axis slide rail

[0038] 220. X-axis slide 221. X-axis threaded sleeve 222. Fixed hole

[0039] 230. X-axis driving structure 231. X-axis power member 232. X-axis transmission member

[0040] 240, fixing bracket 241, limiting groove 250, first fastener

[0041] 300, Y-axis translation assembly 310, Y-axis slide rail 320, Y-axis slide block

[0042] 330, Y-axis drive structure 400, Z-axis translation assembly 410, Z-axis slide block

[0043] 411, adjustment area 4111, adjustment hole 4112, adjustment slot

[0044] 420, Z-axis drive structure 430, second fastener 440, third fastener

[0045] 500, carrier rack 510, mounting part 511, mounting hole

[0046] 520, overlapping part 521, X-axis end 522, Y-axis end

[0047] 530, first limiting part 540, buffer pad 550, second limiting part

[0048] 560, reinforcing rib 600, laser rangefinder Detailed implementation manners

[0049] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer and more understandable, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0050] It should be noted that when an element is referred to as "fixed to", "fixed", "connected to", "connected", "set on", "set in", or "fixedly set on" another element, there may or may not be an intermediate element. In this article, "a plurality of" refers to two or more quantities; "several" refers to one or more quantities.

[0051] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present invention belongs.

[0052] Please refer to Figures 1 to 12 , and now the flatness measuring device 1 provided by the embodiment of the present invention will be described.

[0053] Please refer to Figure 1 , Figure 4 and Figure 7, an embodiment of the present invention provides a flatness measurement device 1, including: a base 100, an X-axis translation assembly 200, a Y-axis translation assembly 300, a Z-axis translation assembly 400, a plurality of carriers 500, and a laser rangefinder 600; wherein, the Y-axis translation assembly 300 is disposed on the base 100, the X-axis translation assembly 200 is connected to the Y-axis translation assembly 300, the Z-axis translation assembly 400 is connected to the X-axis translation assembly 200, the carrier 500 is connected to the Z-axis translation assembly 400 and the carrier 500 has an upper surface and a lower surface parallel to the X-Y plane, and the laser rangefinder 600 is disposed on the base 100 and the laser emission direction of the laser rangefinder 600 is vertically upward.

[0054] During measurement, the surface to be measured of the object 2 to be measured is lapped on the upper surface of the carrier 500. The X-axis translation assembly 200 and the Y-axis translation assembly 300 can drive the carrier 500 and the object 2 to be measured to move within the X-Y plane covering the laser rangefinder 600, and the Z-axis translation assembly 400 can drive the carrier 500 and the object 2 to be measured to move in the Z-axis direction.

[0055] It should be noted that the X-axis translation assembly 200 can drive the Z-axis translation assembly 400, the carrier 500, and the object 2 to be measured to move together along the X-axis direction. The Y-axis translation assembly 300 can drive the X-axis translation assembly 200, the Z-axis translation assembly 400, the carrier 500, and the object 2 to be measured to move together along the Y-axis direction. The Z-axis translation assembly 400 can drive the carrier 500 and the object 2 to be measured to move together along the Z-axis direction.

[0056] The carrier 500 has an upper surface and a lower surface parallel to the X-Y plane. The flatness of the carrier 500 can be detected by the laser rangefinder 600 first, and then the surface to be measured of the object 2 to be measured is placed on the upper surface of the carrier 500 to detect the flatness. As Figure 7 shown, since the surface to be measured of the object 2 to be measured is directly lapped on the upper surface of the carrier 500, horizontally downward and facing the laser rangefinder 600, the structural shape of the object 2 other than the surface to be measured does not affect the placement method, avoiding the operation difficulty when making the surface to be measured face upward horizontally.

[0057] When there is one carrier 500, the carrier 500 can be in the shape of a grid, a rectangular window, etc., ensuring that the carrier 500 has a hollow area for the laser rangefinder 600 to detect the flatness of the surface to be measured. When there are multiple carriers 500, the carriers 500 can be in the shape of a sheet, a grid, etc., and the multiple carriers 500 are arranged at intervals to form a hollow area for the laser rangefinder 600 to detect the flatness of the surface to be measured.

[0058] In addition, when there are multiple load carriers 500, the laser rangefinder 600 can detect whether the multiple load carriers 500 are in the same X-Y plane and adjust them through the Z-axis translation assembly 400.

[0059] The flatness measurement device 1 provided by the embodiment of the present invention has at least the following technical effects: Compared with the traditional technology, in the flatness measurement device 1 provided by the embodiment of the present invention, the laser emission direction of the laser rangefinder 600 is set vertically upward. Before measuring the flatness of the object to be measured 2, first adjust the position of the load carrier 500 through the X-axis translation assembly 200, Y-axis translation assembly 300 and Z-axis translation assembly 400, and adjust the multiple load carriers 500 to be in the same X-Y plane through the laser rangefinder 600, X-axis translation assembly 200 and Y-axis translation assembly 300 to ensure the flatness of the load carrier 500; then lap the surface to be measured of the object to be measured 2 on the upper surface of the load carrier 500, that is, the surface to be measured of the object to be measured 2 is arranged downward, and measure the height difference and flatness of the surface to be measured through the laser rangefinder 600, X-axis translation assembly 200 and Y-axis translation assembly 300. Since the load carrier 500 has extremely high flatness, lapping the surface to be measured on the upper surface of the load carrier 500 is not affected by the shape of the object to be measured 2, and it can ensure that the surface to be measured is in a horizontal plane, so that a more accurate height difference and flatness can be obtained. The overall structure is relatively simple, reducing the operation difficulty.

[0060] The specific structure of the load carrier 500 will be described in detail below, but it is not limited to the structural implementation manner of the load carrier 500.

[0061] Please refer to Figures 1 to 4 、 Figures 8 to 12 In some embodiments, the load carrier 500 includes: a mounting portion 510 connected to the Z-axis translation assembly 400; and a lapping portion 520 connected to the mounting portion 510 and having an upper surface and a lower surface parallel to the X-Y plane. By detachably connecting the mounting portion 510 to the Z-axis translation assembly 400, the replacement of the load carrier 500 can be realized. For objects to be measured 2 of different sizes, the same device can be reused and diversified by replacing the load carrier 500. Before measurement, the flatness of the lower surface of the lapping portion 520 is measured by the laser rangefinder 600, and when measuring, the surface to be measured of the object to be measured 2 is placed on the upper surface of the lapping portion 520.

[0062] Combined with the specific structure of the above load carrier 500, please refer to Figure 8 and Figure 9, in some embodiments, the carrier 500 further includes a first limiting portion 530. The first limiting portion 530 is connected to the Y-axis end 522 of the overlapping portion 520, and the first limiting portion 530 has an extension distance in the Z-axis direction. It can be understood that the overlapping portion 520 has two Y-axis ends 522, and the first limiting portion 530 is provided at one or both of the two Y-axis ends 522. Since the first limiting portion 530 has an extension distance in the Z-axis direction, the limiting effect of the object 2 to be measured in the Y-axis direction can be achieved, preventing the accidental dropping of the object 2 to be measured.

[0063] Combined with the specific structure of the above-mentioned carrier 500, please refer to Figure 10 , in some embodiments, the carrier 500 further includes a buffer pad 540. The buffer pad 540 is provided on the extension side surface of the first limiting portion 530 in the Z-axis direction. It can be understood that the buffer pad 540 is provided on the extension side surface of the first limiting portion 530 facing the overlapping portion 520, which is used to reduce the impact when placing the object 2 to be measured, thereby reducing the accidental damage to the surface to be measured and ensuring the measurement accuracy of flatness.

[0064] Combined with the specific structure of the above-mentioned carrier 500, please refer to Figure 11 , in some embodiments, there are multiple carriers 500. Both the first carrier 500 at the head end and the last carrier 500 at the end further include a second limiting portion 550. The second limiting portion 550 is connected to the X-axis end 521 of the overlapping portion 520 facing away from the adjacent carrier 500, and the second limiting portion 550 has an extension distance in the Z-axis direction. It can be understood that the overlapping portion 520 has two X-axis ends 521, and the second limiting portion 550 is provided at the X-axis end 521 far from the object 2 to be measured. Since the second limiting portion 550 has an extension distance in the Z-axis direction, the limiting effect of the object 2 to be measured in the X-axis direction can be achieved, preventing the accidental dropping of the object 2 to be measured.

[0065] Combined with the specific structure of the above-mentioned carrier 500, please refer to Figure 12 , in some embodiments, on the upper surface of the mounting portion 510 facing away from the overlapping portion 520, the carrier 500 further includes a reinforcing rib 560 provided between the mounting portion 510 and the overlapping portion 520. In order to avoid the mounting portion 510 causing adverse interference and influence on the object 2 to be measured, the mounting portion 510 is provided on one side of the upper surface facing away from the overlapping portion 520. At the same time, in order to avoid the possible inclination of the overlapping portion 520 due to its relatively long length, a number of reinforcing ribs 560 are provided between the mounting portion 510 and the overlapping portion 520 to ensure the horizontality of the overlapping portion 520.

[0066] The specific structures of the X-axis translation assembly 200, the Y-axis translation assembly 300, and the Z-axis translation assembly 400 will be described in detail below, but it is not limited to the structural implementation manners of the three-axis translation assembly.

[0067] Please refer to Figures 1 to 4 , in some embodiments, there are multiple load carriers 500, and the Z-axis translation assembly 400 includes: multiple Z-axis sliders 410, all movably cooperating with the X-axis translation assembly 200 and correspondingly connected to the multiple load carriers 500; and multiple Z-axis driving structures 420, correspondingly cooperating with the multiple Z-axis sliders 410; wherein, the Z-axis driving structure 420 drives the Z-axis slider 410 to move in the Z-axis direction so that the multiple load carriers 500 are located in the same X-Y plane.

[0068] Specifically, by driving the Z-axis slider 410 to move through the corresponding Z-axis driving structure 420, the corresponding load carrier 500 can be driven to move in the Z-axis direction, so that before measurement, the multiple load carriers 500 can be adjusted to be in the same X-Y plane, that is, in the same horizontal plane, thereby ensuring that the surface to be measured is in the same X-Y plane. Of course, during measurement, the Z-axis position of the load carrier 500 and the surface to be measured can also be adjusted at any time.

[0069] The Z-axis driving structure 420 can be similar to a handwheel structure, a threaded structure, etc. Through the cooperation of the Z-axis driving structure 420 with the Z-axis slider 410 and the X-axis translation assembly 200, the movement of the Z-axis slider 410 is realized. This movement work can be in the form of sliding or rolling. In this way, the first adjustment method of the load carrier 500 and the surface to be measured can be realized. According to different implementation manners, this adjustment method can be a coarse adjustment method or a fine adjustment method.

[0070] Combined with the specific structure of the above Z-axis translation assembly 400, please refer to Figure 1 and Figure 4 , in some embodiments, the X-axis translation assembly 200 includes: an X-axis slide rail 210, movably cooperating with the Y-axis translation assembly 300; multiple X-axis sliders 220, all movably cooperating with the X-axis slide rail 210 and correspondingly connected to the multiple Z-axis sliders 410; and several X-axis driving structures 230, correspondingly cooperating with the multiple X-axis sliders 220; wherein, the X-axis driving structure 230 drives the X-axis slider 220 to move in the X-axis direction so that the multiple load carriers 500 form different coverage ranges in the X-axis direction.

[0071] Specifically, by the X-axis driving structure 230, the X-axis slider 220 can be driven to move, and further, the X-axis position of the surface to be measured during measurement can be adjusted. The X-axis driving structure 230 can drive the multiple X-axis sliders 220 to move synchronously. For example, the X-axis driving structure 230 can include an X-axis power member 231 and an X-axis transmission member 232. The X-axis transmission member 232 can specifically be a threaded rotating shaft, and each X-axis slider 220 can all have an X-axis threaded sleeve 221. Through the cooperation of the threaded rotating shaft and the X-axis threaded sleeve 221, the synchronous movement of the multiple X-axis sliders 220 is realized.

[0072] Of course, in some other embodiments, through structural design, multiple X-axis sliders 220 can be either moved synchronously or the spacing between adjacent X-axis sliders 220 can be adjusted. For example, the X-axis drive structure 230 has one and is engaged with one of the X-axis sliders 220. Each X-axis slider 220 is provided with a fixing hole 222. The X-axis translation assembly 200 further includes: a fixing frame 240 having a limiting groove 241 extending in the X-axis direction; and a plurality of first fasteners 250 correspondingly passing through the limiting groove 241 and the fixing hole 222, so that the multiple X-axis sliders 220 are connected and moved synchronously. Moreover, by adjusting the position of the first fasteners 250 relative to the limiting groove 241, different coverage ranges in the X-axis direction are formed by the multiple carriers 500.

[0073] Specifically, one of the X-axis sliders 220 has an X-axis threaded sleeve 221 which is engaged with a threaded rotating shaft, enabling one of the X-axis sliders 220 to move. At the same time, the multiple X-axis sliders 220 are connected by the fixing frame 240. To adjust the spacing between adjacent X-axis sliders 220 so as to adjust the spacing between adjacent carriers 500, a limiting groove 241 is formed in the fixing frame 240. By disassembling and installing the first fasteners 250, the spacing between adjacent X-axis sliders 220 can be adjusted.

[0074] With such an arrangement, the multiple X-axis sliders 220 can be moved synchronously and the spacing between adjacent X-axis sliders 220 can be adjusted. The adjustment method is more diverse and the applicable range is wider.

[0075] Please refer to Figure 1 , analogous to the specific structure of the X-axis translation assembly 200, the Y-axis translation assembly 300 may also include a Y-axis slide rail 310, a Y-axis slider 320 and a Y-axis drive structure 330. Among them, the Y-axis slide rail is fixedly arranged on the base 100, and the Y-axis slider 320 is fixedly connected to the X-axis slide rail 210. When the Y-axis slider 320 moves along the Y-axis slide rail 310, it drives the X-axis translation assembly 200 to move synchronously in the Y-axis direction.

[0076] The structural implementation manners of the X-axis translation assembly 200, the Y-axis translation assembly 300 and the Z-axis translation assembly 400 can be adaptively adjusted according to other methods in the mechanical field, which will not be elaborated herein.

[0077] Please refer to Figures 1 to 3, in some embodiments, the Z-axis slide 410 is provided with an adjustment area 411, and the carrier 500 is adaptively connected to different positions of the adjustment area 411, so that multiple carriers 500 are located in the same X-Y plane, and so that multiple carriers 500 form different coverage ranges in the X-axis direction. It can be understood that, for the convenience of adjustment, the adjustment area 411 is opened on the X-Z plane of the Z-axis slide 410. By adjusting the position of the carrier 500 relative to the adjustment area 411, the second adjustment method of the carrier 500 can be realized. This adjustment method can be a coarse adjustment method or a fine adjustment method according to different implementation manners. With such a setting, the adjustment area 411 and the Z-axis translation assembly 400 can jointly realize the dual adjustment of the carrier 500 in the Z-axis direction, and the adjustment area 411 and the X-axis translation assembly 200 can jointly realize the dual adjustment of the carrier 500 in the X-axis direction.

[0078] There is no limitation on the specific structure of the adjustment area 411. The following is an example.

[0079] Exemplarily, as Figure 2 shown, the adjustment area 411 is a plurality of adjustment holes 4111 distributed in an array, and the carrier 500 is adaptively connected to different adjustment holes 4111 through the second fastener 430. For example, the adjustment hole 4111 can be a threaded hole, and the second fastener 430 can be a threaded fastener, and the carrier 500 is detachably arranged through threaded cooperation. For another example, the adjustment hole 4111 can be a smooth hole with elastic beads, and the second fastener 430 can be a smooth column with a concave groove, and the carrier 500 is detachably arranged through the elastic pressing action between the elastic beads and the concave groove. Of course, the adjustment hole 4111 and the second fastener 430 can also be other forms of detachable cooperation methods, and there is no limitation on this.

[0080] Combined with the specific structure of the carrier 500 in the above embodiment, the second fastener 430 can be inserted into the mounting portion 510. Correspondingly, the mounting portion 510 is provided with a mounting hole 511, that is, the axial direction of the adjustment hole 4111 is the Y-axis direction, the extending direction of the mounting portion 510 is the Z-axis direction, the axial direction of the mounting hole 511 is the Y-axis direction, and the second fastener 430 is sequentially inserted into the mounting hole 511 and the adjustment hole 4111 along the Y-axis direction. In addition, a gasket can be provided between the second fastener 430 and the mounting portion 510 to increase the friction force and play a role in preventing loosening.

[0081] Since the multiple adjustment holes 4111 are distributed in an array and there is a certain gap between adjacent adjustment holes 4111, therefore, it can play a role in coarsely adjusting the position of the carrier 500, and specifically, the position of the carrier 500 in the Z-axis direction and the X-axis direction can be adjusted. That is, the second adjustment method is a coarse adjustment method.

[0082] Exemplarily, asFigure 3 As shown, the adjustment area 411 is composed of adjustment slots 4112 distributed in a grid pattern. The carrier 500 is adaptively connected to different positions of the adjustment slots 4112 through the third fastener 440. Specifically, compared with the multiple adjustment holes 4111, the adjustment slots 4112 distributed in a grid pattern have higher adjustment continuity, that is, relatively higher adjustment accuracy. The connection relationship among the third fastener 440, the mounting portion 510, and the adjustment slots 4112 can refer to the connection relationship among the second fastener 430, the mounting portion 510, and the adjustment holes 4111, and can also refer to the connection relationship between the fixing bracket 240 and the X-axis slider 220, which will not be elaborated here.

[0083] It can be understood that each part in the above embodiments can be freely combined or deleted to form different combined embodiments. The specific content of each combined embodiment will not be elaborated here. After this explanation, it can be considered that the description of the present invention has recorded each combined embodiment and can support different combined embodiments.

[0084] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A flatness measurement device, characterized in that, Comprising: A base, an X-axis translation assembly, a Y-axis translation assembly, a Z-axis translation assembly, a plurality of carriers, and a laser rangefinder; Wherein, the Y-axis translation assembly is disposed on the base, the X-axis translation assembly is connected to the Y-axis translation assembly, the Z-axis translation assembly is connected to the X-axis translation assembly, the carrier is connected to the Z-axis translation assembly and the carrier has an upper surface and a lower surface parallel to the X-Y plane, the laser rangefinder is disposed on the base and the laser emission direction of the laser rangefinder is vertically upward; During measurement, the to-be-measured surface of the to-be-measured object is lapped on the upper surface of the carrier, the X-axis translation assembly and the Y-axis translation assembly can drive the carrier and the to-be-measured object to move within the X-Y plane covering the laser rangefinder, and the Z-axis translation assembly can drive the carrier and the to-be-measured object to move in the Z-axis direction; The carrier includes: A mounting portion, connected to the Z-axis translation assembly; and A lapping portion, connected to the mounting portion and having an upper surface and a lower surface parallel to the X-Y plane; There are a plurality of the carriers, and the Z-axis translation assembly includes: A plurality of Z-axis sliders, all movably cooperating with the X-axis translation assembly and correspondingly connected to the plurality of carriers; and A plurality of Z-axis driving structures, correspondingly cooperating with the plurality of Z-axis sliders; Wherein, the Z-axis driving structure drives the Z-axis slider to move in the Z-axis direction so that the plurality of carriers are located in the same X-Y plane.

2. The flatness measurement device according to claim 1, characterized in that, The carrier further includes a first limiting portion, the first limiting portion is connected to the Y-axis end of the lapping portion and the first limiting portion has an extension distance in the Z-axis direction; the carrier further includes a buffer pad, and the buffer pad is disposed on the extension side surface of the first limiting portion in the Z-axis direction.

3. The flatness measurement device according to claim 1, characterized in that, There are a plurality of the carriers, and both the first carrier at the head end and the last carrier at the tail end further include a second limiting portion, the second limiting portion is connected to the X-axis end of the lapping portion facing away from the adjacent carrier and the second limiting portion has an extension distance in the Z-axis direction.

4. The flatness measurement device according to claim 1, characterized in that, On the upper surface of the mounting portion facing away from the lapping portion, the carrier further includes a reinforcing rib disposed between the mounting portion and the lapping portion.

5. The flatness measurement device according to claim 1, characterized in that The X-axis translation assembly includes: An X-axis slide rail, movably cooperating with the Y-axis translation assembly; A plurality of X-axis sliders, all movably cooperating with the X-axis slide rail and correspondingly connected to the plurality of Z-axis sliders; and A plurality of X-axis driving structures, correspondingly cooperating with the plurality of X-axis sliders; Wherein, the X-axis driving structure drives the X-axis slider to move in the X-axis direction so that the plurality of carriers form different coverage ranges in the X-axis direction.

6. The flatness measurement device according to claim 5, characterized in that There is one X-axis driving structure and it cooperates with one of the X-axis sliders, and each X-axis slider is provided with a fixing hole, and the X-axis translation assembly further includes: A fixing frame, provided with a limiting groove extending in the X-axis direction; and A plurality of first fasteners are correspondingly inserted into the limiting grooves and the fixing holes, so that the plurality of X-axis sliders are connected and move synchronously. Moreover, by adjusting the positions of the first fasteners relative to the limiting grooves, different coverage ranges in the X-axis direction are formed by the plurality of carrier frames.

7. The flatness measurement device according to claim 1, characterized in that, An adjustment area is formed on the Z-axis slider, and the carrier frames are adaptively connected to different positions in the adjustment area, so that the plurality of carrier frames are located in the same X-Y plane and different coverage ranges in the X-axis direction are formed by the plurality of carrier frames.

8. The flatness measurement device according to claim 7, wherein, The adjustment area is a plurality of adjustment holes distributed in an array, and the carrier frames are adaptively connected to different adjustment holes through second fasteners; or the adjustment area is an adjustment groove distributed in a grid pattern, and the carrier frames are adaptively connected to different positions in the adjustment groove through third fasteners.

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