A gas laser discharge cavity and its adjustment detection system and adjustment detection method

Abstract

The present application discloses a discharge chamber of a gas laser, comprising: a long strip-shaped first electrode and a second electrode that are parallel to each other and disposed inside a discharge chamber housing. The discharge chamber housing is provided with at least one observation window and is sealed with a sealing plate made of a transparent corrosion-resistant material. That is, the present application uses a sealing plate made of a transparent material to seal the observation window, so that the staff can observe the discharge condition of the internal electrodes of the discharge chamber through the observation window. Moreover, since the observation window is disposed along the extending direction of the first electrode and the second electrode, it is convenient to observe the effect of electrode adjustment through the observation window. The present application also provides a gas laser discharge chamber adjustment detection system and an adjustment detection method combined with the discharge chamber. Through the adjustment detection system and method, the observation window of the discharge chamber can be fully utilized to simply and effectively adjust the electrodes in the discharge chamber.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, in particular to a discharge cavity of a gas laser and its adjustment and detection system, and an adjustment and detection method applied to the adjustment and detection system. Background Art

[0002] A gas laser is a laser with a gas as the working medium. The density of the active particles in the gas is small, and a relatively large volume of the working medium is required to obtain sufficient power output. Therefore, the volume of a gas laser is generally relatively large. The commonly used and mature excitation method for gas lasers is longitudinal electrical excitation. Its structure is that two long and parallel electrodes are installed in the discharge cavity, and the working gas is located between the two parallel electrodes. In order to have sufficient output power, the two parallel electrodes are often made very long, and the uniformity of the discharge between the electrodes seriously affects the output power and beam quality of the laser.

[0003] Most of the discharge cavities of gas lasers adopt a metal tube structure, and it is impossible to observe the discharge situation between the internal electrodes. Therefore, it is very difficult to ensure that the laser has sufficient power output and qualified beam quality. Due to the requirements of gas lasers for a vacuum-sealed environment, the cavity cannot be opened at any time. When the gas laser is working, there is a high-repetition-rate high-voltage discharge, which will generate discharge dust and pollute the surface of the cavity. Therefore, the problem of surface pollution of the cavity is also an important parameter affecting the normal operation of the laser. Summary of the Invention

[0004] The present invention provides a discharge cavity of a gas laser, an adjustment and detection system, and an adjustment and detection method to solve the problem of uneven discharge caused by too long electrode length in the prior art, and further solve the problem of surface pollution of the cavity caused by the inability to open the inner surface for cleaning at any time.

[0005] The present application provides a discharge cavity of a gas laser, including a discharge cavity housing and mutually parallel long-strip first and second electrodes arranged inside the discharge cavity housing. It is characterized in that the discharge cavity housing is provided with at least one observation window, the observation window is arranged along the extending direction of the first and second electrodes, and is sealed by a sealing plate made of a transparent corrosion-resistant material.

[0006] Optionally, the sealing plate is installed in the observation window through a tenon and mortise structure, a sealing material is arranged on the joint surface of the tenon and mortise structure, and a fastener for sealing is arranged at the connection of the tenon and mortise structure; wherein, the sealing material includes indium metal.

[0007] Optionally, the sealing plate is provided with an air inlet and an air extraction port with obliquely opened holes, as well as an air inlet nozzle and an air extraction nozzle assembled with the air inlet and the air extraction port through threads. The outer end surfaces at the air inlet and the air extraction port are provided with grooves, and the air inlet nozzle and the air extraction nozzle are provided with protrusions combined with the grooves. A sealing material is filled in the grooves and at the protrusions. After the air inlet nozzle and the air extraction nozzle are assembled through the threads, airtight sealing is achieved through the sealing material indium metal.

[0008] Optionally, a random wedge structure for suppressing the shock wave of electrode discharge is arranged on the inner surface of the sealing plate.

[0009] Optionally, an adjusting mechanism for adjusting the parallelism of the electrodes is arranged on the upper and lower strip electrodes.

[0010] In addition, the present application provides an adjustment and detection system for a gas laser discharge cavity, including: a gas laser discharge cavity, an observer, and a one-dimensional laser; the gas laser discharge cavity includes a discharge cavity housing and parallel long strip-shaped first and second electrodes arranged inside the discharge cavity housing. The discharge cavity housing is provided with at least one observation window, and the observation window is arranged along the extending direction of the first and second electrodes. The observation window is sealed by a sealing plate made of a transparent material; the observer is arranged outside the discharge cavity and is used to observe the discharge situation between the first and second electrodes through the observation window; the one-dimensional laser is placed beside the observer and is used as a reference light source for adjusting the parallelism of the first and second electrodes.

[0011] Optionally, the one-dimensional laser is slidably placed on a guide rail arranged along the extending direction of the first and second electrodes, and the one-dimensional laser also has an adjusting mechanism in the vertical direction.

[0012] Optionally, the observer includes an image processing system composed of a CCD camera, an image acquisition card, and a computer.

[0013] Correspondingly, the present application also provides an adjustment and detection method for a gas laser discharge cavity, including: making the gas laser discharge cavity work to cause the internal electrodes to discharge;

[0014] Using the observer to observe the discharge inside the discharge cavity through the observation window on the side of the gas laser discharge cavity to determine whether there is a bright and dark area; if so, using the reference light provided by the one-dimensional laser to adjust the parallelism of the electrodes until the discharge inside the discharge cavity is normal; if not, execute the next step;

[0015] Adjusting the air pressure inside the discharge cavity through the air inlet nozzle and the air extraction nozzle on the sealing plate; under different air pressure conditions, execute the above adjustment steps;

[0016] If the discharge in the discharge chamber is normal under different preset air pressure conditions, the adjustment is completed.

[0017] Optionally, the observer is an image processing system composed of a CCD camera, an image acquisition card and a computer for processing images.

[0018] Among them, the steps of processing the acquired images include:

[0019] The CCD camera acquires discharge images and performs average denoising.

[0020] Eliminate non-target areas.

[0021] Calculate the contrast and target features.

[0022] Form a spectral response curve and check whether the curve is balanced and smooth; if the curve is uniformly smooth, there is no bright and dark area; if the curve is not uniformly smooth, there is a bright and dark area.

[0023] Compared with the prior art, the present application has the following advantages:

[0024] For the gas laser discharge chamber provided by the present application, there are long strip-shaped first electrodes and second electrodes arranged in parallel inside the discharge chamber housing. The discharge chamber housing is provided with at least one observation window, and the observation window is arranged along the extension direction of the first electrode and the second electrode, and is sealed by a sealing plate made of a transparent corrosion-resistant material. That is, the present application uses a transparent and corrosion-resistant sealing plate to seal the observation window, so that the staff can observe the discharge condition of the internal electrodes of the discharge chamber through the observation window. Moreover, since the observation window is arranged along the extension direction of the first electrode and the second electrode, it is convenient to observe the effect of electrode adjustment through the observation window, thereby facilitating the adjustment of the electrodes and further enabling the discharge chamber to obtain a better discharge effect. Therefore, through the discharge chamber provided with an observation window parallel to the electrodes, the output power and beam quality of the laser can be simply and effectively improved. The present application also provides a gas laser discharge chamber adjustment detection system combined with the discharge chamber. Through this adjustment detection system, the observation window of the discharge chamber can be fully utilized to realize the adjustment of the electrodes in the discharge chamber. The present application also provides a gas laser discharge chamber adjustment detection method, which is used for the adjustment detection system to realize the adjustment of the electrodes in the discharge chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] For the convenience of those skilled in the art to understand, the present invention will be further described below with reference to the accompanying drawings.

[0026] Figure 1 Shows a schematic structural diagram of a gas laser discharge chamber provided by an embodiment of the present application;

[0027] Figure 2 The figure shows a schematic diagram of a sealing plate provided according to an embodiment of the present application;

[0028] Figure 3 The figure shows a schematic diagram of an adjustment detection system for a gas laser discharge cavity provided according to an embodiment of the present application;

[0029] Figure 4 The figure shows a flowchart of an adjustment detection method for a gas laser discharge cavity provided according to an embodiment of the present application;

[0030] Figure 5 The figure shows a flowchart of processing an image provided according to an embodiment of the present application;

[0031] Figure 6 The figure shows a schematic diagram of image acquisition for a certain length provided according to an embodiment of the present application. Detailed implementation manners

[0032] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the connotation of the present application. Therefore, the present application is not limited by the specific implementations disclosed below.

[0033] Please refer to Figure 1 , Figure 1 This is a schematic structural diagram of the gas laser discharge cavity of the present application. In this embodiment, a gas laser discharge cavity 1 is provided. To clearly show the internal structure of the discharge cavity 1, the end caps at both the front and rear ends of the discharge cavity 1 are removed in the figure to observe the internal structure of the discharge cavity 1. In actual use, end caps are installed at both the front and rear ends of the discharge cavity 1, and generally, the electrodes in the discharge cavity 1 are installed on the end caps. Since the present application focuses on the improvement of the observation window of the discharge cavity 1, this part of the structure will not be introduced.

[0034] The gas laser discharge cavity 1 includes: a discharge cavity housing 1-1, and at least a pair of mutually parallel long-strip-shaped first electrodes (not shown) and second electrodes (not shown) are provided inside the discharge cavity housing 1.

[0035] The sizes of the strip-shaped first electrode and second electrode can be set according to actual needs, and the placement directions of the strip-shaped first electrode and second electrode are parallel to the central axis of the discharge chamber housing 1-1. For the strip-shaped first electrode and second electrode, an adjustment mechanism is provided to adjust the parallelism between the two. Generally, the strip-shaped first electrode and second electrode are installed on the end cover of the open discharge chamber housing 1-1 in the figure and are connected to a power source through a terminal outside a certain side end cover. At the installation positions of the above-mentioned first electrode and second electrode, an adjustment mechanism is also provided to adjust the first electrode and second electrode to adjust the parallelism between the two.

[0036] At least one observation window 1-1-1 is provided on the side of the discharge chamber housing 1-1. The size of the observation window 1-1-1 is set according to actual needs. Moreover, the observation window 1-1-1 is arranged along the extension direction of the first electrode and the second electrode. The specific length of the observation window 1-1-1 needs to facilitate the user to effectively observe the strip electrodes through the observation window 1-1-1 when adjusting the parallelism between the electrodes. In addition, as a more preferred solution, the observation window 1-1-1 can be symmetrically arranged on both sides of the discharge chamber housing to facilitate more convenient and clear observation of the inside of the discharge chamber housing 1-1.

[0037] As Figure 1 shown, the observation window 1-1-1 on the side of the discharge chamber housing 1-1 is sealed by a sealing plate 1-2 made of a transparent material. Since most of the gases inside the discharge chamber 1 are corrosive, the sealing plate 1-2 is made of a corrosion-resistant material. According to needs, the sealing plate 1-2 is connected to the discharge chamber housing 1-1 through fasteners. Specifically, the fasteners are fastening screws that can fasten the sealing plate 1-2 and the discharge chamber housing 1-1 together.

[0038] Preferably, as Figure 2 shown, Figure 2 shown is a schematic diagram of viewing from the inside to the outside of the sealing plate 1-2. A tenon-shaped structure in the shape of a quadrangular frustum is provided on the inner side of the sealing plate 1-2. A groove structure that can just be combined with the tenon-shaped structure is provided at the observation window 1-1-1, and a sealing material is applied to the joint surface between the tenon-shaped structure and the groove structure. When the fasteners fasten the sealing plate 1-2 to the discharge chamber housing 1-1, the tenon-shaped structure of the sealing plate 1-2 just combines with the groove structure at the observation window 1-1-1 of the discharge chamber housing 1-1, and because a sealing material is provided on the joint surface, under the action of the fasteners, the sealing plate 1-2 reliably seals the discharge chamber 1.

[0039] It should be noted that during the operation of the laser, high-voltage discharges with a repetitive frequency occur in the electrodes inside the discharge chamber 1, generating discharge dust that contaminates the inner surface of the discharge chamber 1. To solve the problem of the discharge dust generated by the electrode discharge contaminating the inner surface of the discharge chamber 1, an air inlet 1-2-3 and an air extraction port 1-2-2 for discharging the discharge dust from the discharge chamber are provided on the sealing plate 1-2. To make the discharge dust discharge more thoroughly, the air inlet 1-2-3 and the air extraction port 1-2-2 are set as obliquely opened round holes, as Figure 2 shown. An air inlet 1-2-3 and an air extraction port 1-2-2 are provided on the sealing plate 1-2. The air inlet 1-2-3 and the air extraction port 1-2-2 are assembled with an air inlet nozzle 1-3 and an air extraction nozzle 1-4 through threads. To make the sealing between the air inlet nozzle 1-3 and the air extraction nozzle 1-4 and the air inlet 1-2-3 and the air extraction port 1-2-2 tighter, grooves are provided on the outer end surfaces at the air inlet 1-2-3 and the air extraction port 1-2-2. Protrusions that are combined with the grooves are provided on the outer edges of the air inlet nozzle 1-3 and the air extraction nozzle 1-4, and a sealing material is filled at the combined position between the grooves and the protrusions, so that the air inlet nozzle 1-3 and the air extraction nozzle 1-4 achieve airtight sealing through the sealing structure on the basis of the threaded assembly, preventing the gas inside the discharge chamber from leaking through this combined position.

[0040] It should be noted that since the working substance of most gas lasers is an unstable and corrosive gas, the corrosive gas is likely to react with the fluororubber ring commonly used for sealing in a vacuum, generating impurities and contaminating the working gas, which is not conducive to the long-term operation of the gas laser.

[0041] In practical applications, taking advantage of the characteristics of indium metal, which has stable properties, is not easily reactive with the working gas, and has a relatively soft texture, enabling a good sealing effect, indium metal is used as the sealing material, so that the gas laser can operate for a long time.

[0042] It should be noted that during the operation of the laser, due to the high-frequency discharge of the electrodes inside the discharge chamber 1, as the repetitive frequency increases, the time interval between adjacent pulses becomes shorter and shorter, and the subsequent pulses are more significantly affected by the previous pulses, generating discharge shock waves. The density perturbations caused by the discharge shock waves and the density perturbations caused by the pulsed discharge shock waves will deteriorate the uniformity of the gain medium, thereby affecting the output parameters of the laser, including pulse energy, spot quality, and beam divergence angle, etc. To obtain a relatively stable glow discharge, the density perturbations caused by the shock waves must be controlled within an acceptable range.

[0043] In practical applications, the inner surface of the sealing plate 2 can be designed as an uneven surface structure according to the principle of diffuse reflection of light waves, aiming to disperse, reflect, and absorb the shock wave, thereby suppressing the shock wave and obtaining stable glow discharge. There are various specific implementation methods, and a preferred method is to design the inner surface of the sealing plate 2 as a random wedge-shaped structure 1-2-1.

[0044] Corresponding to the gas laser discharge cavity described above, the present application also provides an adjustment and detection system for a gas laser discharge cavity.

[0045] As Figure 3 shown, the adjustment and detection system of the laser discharge cavity includes: a gas laser discharge cavity, an observer, and a one-dimensional laser.

[0046] The gas laser discharge cavity is the same as the first embodiment described above, including a discharge cavity housing 1-1 and parallel strip-shaped first and second electrodes disposed inside the discharge cavity housing 1-1. The discharge cavity housing is provided with at least one observation window 1-1-1, and the observation window 1-1-1 is disposed along the extending direction of the first and second electrodes. The observation window 1-1-1 is sealed by a sealing plate 1-2 made of a transparent material.

[0047] Since the first and second strip-shaped electrodes are disposed in parallel inside the discharge cavity housing 1-1 of the present application, and the working gas is located between the two parallel electrodes, in order to obtain sufficient power output, the two parallel electrodes are often made very long. Since the uniformity of the discharge between the electrodes seriously affects the output power and beam quality of the laser, and the uniformity of the discharge mainly depends on the parallelism of the strip-shaped first and second electrodes, it is particularly important to ensure the parallelism of the strip-shaped first and second electrodes.

[0048] In practical applications, to ensure the parallelism of the strip-shaped first and second electrodes, at least one of the first and second electrodes is provided with an electrode adjustment mechanism that can adjust the parallelism outside the discharge cavity. Through this electrode adjustment mechanism, the parallelism of the first and second electrodes can be adjusted. A specific electrode adjustment mechanism can be, for example, an adjustment screw disposed at the end of the discharge cavity. In order to achieve accurate adjustment, an external device for observing the parallelism is required; in the adjustment and detection system of the laser discharge cavity provided in this embodiment, an observer 2 for observing the discharge situation and a one-dimensional laser 3 for providing a reference for parallelism adjustment are disposed outside the discharge cavity.

[0049] The observer 2 is used to observe the discharge condition of the electrode inside the discharge chamber housing 1-1 through the discharge chamber observation window 1-1-1 provided on the outside of the discharge chamber housing 1-1. If the discharge condition is found to be uneven, adjustments can be made. In this embodiment, an image processing system composed of a CCD camera, an image acquisition card and a computer is specifically used. The CCD camera can collect the discharge image inside the discharge chamber in real time. The image acquisition card can collect the images collected by the CCD camera in sequence and send them to the computer connected to the image acquisition card in real time. After receiving the images with sequence sent by the acquisition card, the computer analyzes the images and outputs a spectral response curve reflecting the parallelism between the long strip electrodes. The smoothness of the spectral response curve can reflect whether the discharge of the first electrode and the second electrode is uniform.

[0050] The inline laser 3 is used to provide a reference when adjusting the parallelism between the electrodes. The inline laser 3 can provide a straight light beam to the outside. The inline laser 3 is slidably installed on a slide rail 4 parallel to the first and second electrodes of the long strip. When it is adjusted and installed, the straight light beam emitted by the inline laser 3 can be used as a horizontal reference. By observing whether the gap between the light beam and the calibrated electrode (such as the first electrode or the second electrode) is uniform, it can be determined whether the calibrated electrode is installed horizontally. If the gap is observed to be uniform, it can be determined that the calibrated electrode is parallel to the light beam, thereby confirming that the calibrated electrode is horizontal; if the gap is uneven, the gap can be adjusted to be sufficiently uniform by adjusting the electrode adjustment mechanism, and finally the calibrated electrode is in a horizontal state. Since the first electrode and the second electrode are at different heights in the horizontal direction, the slide rail 4 is also provided with an adjustment mechanism 5 capable of vertical adjustment. The adjustment mechanism 5 can be used to adjust the line-shaped laser 3 in the vertical direction to different heights corresponding to the first electrode or the second electrode, so that the line-shaped laser 3 can be used to adjust the first electrode and the second electrode at different heights. The slide rail 4 is used as a reference and needs to be carefully adjusted during installation so that it is in a relatively standard horizontal state. When using the line-shaped laser 3 to adjust the first electrode or the second electrode, it is generally necessary to remove the sealing plate 1-2 of the observation window 1-1-1 for adjustment operations.

[0051] Corresponding to the above-mentioned adjustment detection system for a gas laser discharge cavity, the present application also provides an adjustment detection method for a gas laser discharge cavity using the adjustment detection system.

[0052] Please refer to Figure 4, which is a flowchart of an embodiment of a method for adjusting and detecting a discharge cavity of a gas laser provided by this application. For the parts that are the same as those in the above-mentioned gas laser discharge cavity adjustment and detection system, they will not be repeated here. Please refer to the corresponding parts of the above-mentioned gas laser discharge cavity adjustment and detection system. A method for adjusting and detecting a discharge cavity of a gas laser provided by this application includes:

[0053] Step S101: Make the gas laser discharge cavity 1 work and make the internal electrodes discharge.

[0054] Step S103: Use the observer 2 to observe the discharge inside the discharge cavity 1 through the observation window 1-1-1 and judge whether there are bright and dark areas.

[0055] Since the sealing plate 1-2 is made of a transparent material, the observer 2 can observe the discharge situation between the electrodes through the sealing plate 1-2, and collect the discharge images in real time through the observer 2 to observe whether there are bright and dark areas in the electrode discharge area. If so, adjustment is required. Correspondingly, execute step S105. If not, directly execute step S107. For the specific method of observing whether there are bright and dark areas in the electrode discharge area, please refer to Figure 5 and the subsequent description of Figure 5 .

[0056] Step S105: Use the reference light provided by the linear laser 3 to adjust the parallelism of the electrodes inside the discharge cavity housing 1-1.

[0057] In this step, the parallelism of the electrodes inside the discharge cavity housing 1-1 is adjusted by the reference light provided by the linear laser 3. Its specific principle has been described before and will not be repeated here.

[0058] The specific operations of this step include: stopping the discharge operation of the gas laser discharge cavity 1, observing the gap between the reference light and the electrode to be adjusted according to the reference light provided by the linear laser 3, and adjusting the electrode adjustment mechanism according to the gap situation. By making the gap uniform, the electrode to be adjusted is in the required horizontal state; after the adjustment is completed, return to the above step S101 until the judgment result of step S103 is negative, then execute the next step S107.

[0059] Step S107: Adjust the air pressure inside the discharge cavity 1 through the air inlet nozzle 1-3 and the air extraction nozzle 1-4. Under different air pressure conditions, execute the above steps S101 - S105.

[0060] The purpose of this step is to test the discharge conditions of the discharge cavity 1 under different air pressure conditions so that the discharge cavity 1 can work normally within the possible air pressure range.

[0061] Step S109: Determine whether the preset air pressures have all been adjusted. If so, the adjustment is completed.

[0062] As described above, the observer can adopt an image processing system for processing images, which is composed of a CCD camera 2-1, an image acquisition card (not shown), and a computer 2-2. Figure 5 As shown, the steps for processing the acquired images include:

[0063] The CCD camera acquires the discharge images and performs average denoising.

[0064] Eliminate non-target areas.

[0065] Calculate the contrast and target features.

[0066] Form a spectral response curve and check whether the curve is balanced and smooth. If the curve is uniformly smooth, there is no bright and dark area. If the curve is not uniformly smooth, there is a bright and dark area.

[0067] Specifically, please refer to Figure 6 the shown image acquisition diagram. The image acquisition diagram is an image acquisition diagram of a small section of the electrode. The CCD camera forms the spectral response curve on the left according to the energy of the acquired image. It can be seen that the curve in the figure is relatively smooth, and the color depth distribution of the acquired image is relatively flat, which can meet the usage requirements of the laser. However, there is still room for improvement. If we want to further improve the output beam quality of the laser, we can further adjust the electrode through the electrode adjustment mechanism to make the spectral response curve acquired by the image processing system smoother, thereby improving the output beam quality of the laser.

[0068] Although this application is disclosed above with preferred embodiments, it is not used to limit this application. Any person skilled in the art can make possible changes and modifications without departing from the spirit and scope of this application. Therefore, the protection scope of this application should be subject to the scope defined by the claims of this application.

Claims

1. A gas laser discharge cavity, comprising: A discharge chamber housing, and long-strip first and second electrodes arranged in parallel inside the discharge chamber housing, characterized in that the discharge chamber housing is provided with at least one observation window, the observation window is arranged along the extending direction of the first electrode and the second electrode, for observing the discharge inside the discharge chamber housing, judging whether there is a bright and dark area, and sealed with a sealing plate made of a transparent corrosion-resistant material; the sealing plate is provided with an air inlet and an air extraction port with obliquely opened holes, and an air inlet nozzle and an air extraction nozzle assembled with the air inlet and the air extraction port through threads.

2. The gas laser discharge cavity according to claim 1, characterized in that, The sealing plate is installed on the observation window through a tenon and mortise structure, a sealing material is arranged on the joint surface of the tenon and mortise structure, and a fastener for sealing is arranged at the connection of the tenon and mortise structure; Wherein, the sealing material includes indium metal.

3. The gas laser discharge cavity according to claim 2, characterized in that, Grooves are arranged on the outer end surfaces at the air inlet and the air extraction port, protrusions combined with the grooves are arranged on the air inlet nozzle and the air extraction nozzle, a sealing material is filled in the grooves and at the protrusions, and the air inlet nozzle and the air extraction nozzle are hermetically sealed through the sealing material indium metal after being assembled through the threads.

4. The gas laser discharge cavity according to claim 2, characterized in that, A random wedge-shaped structure for suppressing the shock wave of electrode discharge is arranged on the inner surface of the sealing plate.

5. The gas laser discharge cavity according to claim 1, characterized in that, Adjusting mechanisms for adjusting the parallelism of the electrodes are arranged on the long-strip upper electrode and the lower electrode.

6. An adjustment and detection system for a discharge cavity of a gas laser, characterized in that Including: A gas laser discharge chamber, an observer, and a linear laser as described in any one of claims 1-5; the observer is arranged outside the discharge chamber, and is used to observe the discharge situation between the first electrode and the second electrode through the observation window; the linear laser is placed beside the observer and is used as a reference light source for adjusting the parallelism of the first electrode and the second electrode.

7. The adjustment and detection system for the discharge cavity of the gas laser according to claim 6, characterized in that, The linear laser is slidably placed on a guide rail arranged along the extending direction of the first electrode and the second electrode, and the linear laser also has an adjusting mechanism in the vertical direction.

8. The adjustment detection system for the discharge cavity of a gas laser according to claim 6, characterized in that The observer includes an image processing system composed of a CCD camera, an image acquisition card, and a computer.

9. A method for adjusting and detecting a discharge cavity of a gas laser, characterized in that, Including: Making the gas laser discharge chamber work and discharging the internal electrodes; Using the observer to observe the discharge inside the discharge chamber through the observation window on the side of the gas laser discharge chamber to judge whether there is a bright and dark area; If so, using the reference light provided by the linear laser to adjust the parallelism of the electrodes until the discharge in the discharge chamber is normal; if not, performing the next step; Adjusting the air pressure inside the discharge chamber through the air inlet nozzle and the air extraction nozzle on the sealing plate; under different air pressure conditions, performing the above adjustment steps; Judging whether the preset air pressures have all been adjusted, if so, the adjustment ends.

10. The adjustment and detection method for the discharge cavity of the gas laser according to claim 9, characterized in that, The observer is an image processing system composed of a CCD camera, an image acquisition card, and a computer for processing images; Wherein, the steps of processing the acquired images include: The CCD camera acquires the discharge image and performs average denoising; Removing non-target areas; Calculating the contrast and target features; Forming a spectral response curve and checking whether the curve is balanced and smooth; if the curve is uniformly smooth, there is no bright and dark area; if the curve is not uniformly smooth, there is a bright and dark area.

Images