An ultra-short optical pulse generation system based on pulse width compression technology

Abstract

The application relates to an ultrashort light pulse generation system based on a pulse width compression technology and belongs to the technical field of optoelectronic devices.The structure is as follows: the output end of a seed pulse source (1) is connected with the input end of a pulse width expansion module (2), the output end of the pulse width expansion module (2) is connected with the input end of an energy pre-amplification module (3), the output end of the energy pre-amplification module (3) is connected with the input end of a multi-channel pulse division module (4), the output end of the multi-channel pulse division module (4) is connected with the input end of a dispersion management module (5), the output end of the dispersion management module (5) is connected with the input end of an energy amplification module (6), the output end of the energy amplification module (6) is connected with the input end of a pulse coherent superposition module (7), and the output end of the pulse coherent superposition module (7) is connected with the input end of a pulse width compression module (8). The application has the advantages of high output pulse energy, high power, ultrashort pulse width and switchable pulse type.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of optoelectronic devices, and particularly relates to an ultrashort optical pulse generation system based on a pulse width compression technology. BACKGROUND

[0002] Generally, a fiber laser adopts a rare earth ion doped fiber as a gain medium, pump light transmitted in a cladding or a core excites the rare earth ions and forms particle number inversion between energy levels, and then signal light forms oscillation in a linear cavity or a ring cavity to generate laser. Compared with a traditional solid laser, the fiber laser has advantages of simple structure, high beam quality and good reliability. The ultrashort pulse generated by the mode-locked fiber laser has characteristics of narrow pulse width, high peak power and wide spectral range, and is widely applied in scientific research, military and civil fields.

[0003] Chirp caused by dispersion and nonlinear effects makes the fiber laser generally output nanosecond or picosecond chirp pulses, and femtosecond pulses need to be compressed in pulse width. Commonly used pulse width compression devices include dispersion compensation fibers, photonic bandgap fibers and spatial grating pairs. Due to the dispersion effect of the fiber, the propagation speed of different frequency components of the pulse is different in the transmission process, so the arrival time is delayed, leading to the broadening of the pulse. That is, the linear chirp caused by the dispersion effect is the main reason for the broadening of the pulse, so the dispersion compensation fiber can be used to compensate the dispersion to zero to achieve the effect of de-chirping (pulse width compression). According to the different pulse chirp, the fiber with positive and negative dispersion can be used as a dispersion compensation fiber. Although the method of compensating dispersion by using the fiber with opposite dispersion is simple, when the power of the output pulse is very high, the power-dependent nonlinear effect of the fiber causes the pulse to be broadened and deformed, and in severe cases, even distortion and splitting occur. Therefore, this method is only suitable for pulse width compression of low power pulses.

[0004] The photonic bandgap fiber is used to guide the light in the hollow core to transmit therein by diffraction instead of total internal reflection through the microstructured cladding region with air holes, so more than 98% of the modes are confined in the air, and the nonlinearity is greatly reduced compared with the quartz core fiber. On the other hand, the photonic bandgap fiber has a large dispersion coefficient, so it can be applied to the pulse width compression of high power pulses generated by the chirp pulse amplification technology, and a small nonlinearity is introduced. However, the photonic bandgap fiber is very expensive and is not easy to be fused with a single mode fiber.

[0005] In summary, the current fiber laser system for obtaining ultrashort pulses has inherent defects and needs to be further improved. SUMMARY

[0006] In order to overcome the defects of insufficient pulse energy and insufficient pulse width generated by the traditional system, the application provides an ultrashort optical pulse generation system based on pulse width compression technology, high-energy pulses obtained by a seed pulse source module are further compressed in pulse width by a dispersion management module and a pulse width compression module to obtain ultrashort pulses, so as to obtain high-power ultrashort pulses.

[0007] The application achieves the purpose by the following technical scheme.

[0008] The ultrashort optical pulse generation system based on pulse width compression technology comprises a seed pulse source 1, a pulse width expansion module 2, an energy pre-amplification module 3, a multi-channel pulse division module 4, a dispersion management module 5, an energy amplification module 6 and a pulse coherent superposition module 7.

[0009] The structure of the seed pulse source 1 is as follows: the first pump source 101 is connected with the 980nm end of the first wavelength division multiplexer 102, the common end of the first wavelength division multiplexer 102 is connected with the input end of the first isolator 104 through the first ytterbium-doped fiber 103, the output end of the first isolator 104 is connected with the input end of the first half-wave delay device 106 through the dispersion compensation fiber 105, the output end of the first half-wave delay device 106 is connected with the input end of the first quarter-wave delay device 107, the output end of the first quarter-wave delay device 107 is connected with the polarizer 108, the polarizer 108 is connected with the input end of the second half-wave delay device 109, the output end of the second half-wave delay device 109 is connected with the input end of the third coupler 115, the 90% direct output end of the third coupler 115 is connected with the input end of the second coupler 110, the 90% direct output end of the second coupler 110 is connected with the 1060nm end of the second wavelength division multiplexer 111, the 980nm end of the second wavelength division multiplexer 111 is connected with the second pump source 112, the common end of the second wavelength division multiplexer 111 is connected with the 90% output end of the first coupler 114 through the second ytterbium-doped fiber 113, the input end of the first coupler 114 is connected with the 1060nm end of the first wavelength division multiplexer 102, the other input end of the third coupler 115 is connected with port three of the first optical circulator 120, port one of the first optical circulator 120 is connected with the input end of the fourth coupler 121, port two of the first optical circulator 120 is connected with the common end of the third wavelength division multiplexer 117, the third pump source 116 is connected with the 980nm end of the third wavelength division multiplexer 117, the 1060nm end of the third wavelength division multiplexer 117 is connected with port two of the second optical circulator 119 through the third ytterbium-doped fiber 118, port one of the second optical circulator 119 is connected with the 10% coupling output end of the third coupler 115, port three of the second optical circulator 119 is connected with the 80% direct output end of the fourth coupler 121, the other input end of the fourth coupler 121 is connected with the input end of the second quarter-wave delay device 122, the output end of the second quarter-wave delay device 122 is connected with the input end of the single-mode fiber 123 twisted with 5turns / m, the output end of the single-mode fiber 123 twisted with 5turns / m is connected with the 10% coupling output end of the fourth coupler 121 through the single-mode fiber 124, wherein the 10% coupling output end of the first coupler 114 is connected with port one of the third optical circulator 125, the 10% coupling output end of the second coupler 110 is connected with port two of the third optical circulator 125, and port three of the third optical circulator 125 is the output of the seed pulse source;

[0010] The pulse width expansion module 2 has the following optical path structure: the optical pulse is transmitted to the first grating 202 through the first mirror 201, the first grating 202 transmits the optical pulse to the second mirror 203, and then the optical pulse is reflected to the third mirror 204, the third mirror 204 reflects the optical pulse back to the first grating 202, the pulse output by the first grating 202 is transmitted to the fourth mirror 206 through the first convex lens 205 and then reflected back to the first grating 202 through the first convex lens 205, the optical pulse is transmitted to the second mirror 203 through the first grating 202, the second mirror 203 reflects the optical pulse and then the optical pulse is reflected to the first grating 202 through the third mirror 204, the optical pulse output by the first grating 202 is incident to the wave prism 207 and then reflected back to the first grating 202 through the wave prism 207, the optical pulse is transmitted to the second mirror 203 again through the first grating 202, the third mirror 204, the first grating 202, the first convex lens 205, the fourth mirror 206, and then the optical pulse is reflected back to the first grating 202, and finally the optical pulse is output through the first grating 202;

[0011] The energy pre-amplification module 3 has the following optical path structure: the optical pulse is incident to the second convex lens 301, the optical pulse is transmitted to the fifth mirror 306 through the second convex lens 301, the acousto-optic modulator 302, the third convex lens 303, the second isolator 304, and the first half-wave plate 305, the optical pulse is reflected to the sixth mirror 307 through the fifth mirror 306, and then the optical pulse is incident to the fourth convex lens 308, the optical pulse is transmitted to the seventh mirror 313 through the fourth convex lens 308, the first collimator 309, the fourth ytterbium-doped fiber 310, the second collimator 311, and the fifth convex lens 312, the pump light generated by the first photodiode 316 is transmitted to the seventh mirror 313 through the third collimator 315 and the sixth convex lens 314, and then the pump light is fused with the optical pulse incident to the seventh mirror 313, the fused optical pulse is reflected to the eighth mirror 317 through the seventh mirror 313, the eighth mirror 317 reflects the optical pulse to the second half-wave plate 318, the optical pulse is transmitted to the second grating 325 through the second half-wave plate 318, the first quarter-wave plate 319, the band-pass filter 320, and the third half-wave plate 321, the optical pulse is transmitted to the third grating 326 through the second grating 325, the third grating 326 transmits the optical pulse to the ninth mirror 327, the ninth mirror 327 reflects the pulse back to the third grating 326, and then the optical pulse is transmitted to the second grating 325 through the third grating 326, the optical pulse output by the second grating 325 is transmitted to the tenth mirror 322, and then the optical pulse is reflected to the fourth half-wave plate 323 through the tenth mirror 322, and finally the optical pulse is output through the first polarization beam splitter 324;

[0012] The multi-channel pulse splitting module 4 has the following optical path structure: the light pulse is incident on the input end of the second polarizing beam splitter 402 through the fifth half-wave plate 401, the light pulse is transmitted from the output end perpendicular to the incident direction of the second polarizing beam splitter 402 to the eleventh mirror 404 through the second quarter-wave plate 403, the eleventh mirror 404 reflects the light pulse back to the second quarter-wave plate 403, the second quarter-wave plate 403 transmits the light pulse to the second polarizing beam splitter 402 again, while the light pulse is transmitted from the other output end perpendicular to the incident direction of the second polarizing beam splitter 402 to the twelfth mirror 406 and the first piezoelectric driver 407 through the third quarter-wave plate 405, the twelfth mirror 406 reflects the light pulse back to the third quarter-wave plate 405, the third quarter-wave plate 405 transmits the light pulse back to the second polarizing beam splitter 402 again, the light pulse is output from the port parallel to the incident direction of the second polarizing beam splitter 402, transmitted to the third polarizing beam splitter 409 through the sixth half-wave plate 408, the light pulse is transmitted from the port perpendicular to the incident direction of the third polarizing beam splitter 409 to the thirteenth mirror 411 through the fourth quarter-wave plate 410, the thirteenth mirror 411 reflects the light pulse back to the fourth quarter-wave plate 410, the fourth quarter-wave plate 410 transmits the light pulse back to the third polarizing beam splitter 409 again, while the light pulse is transmitted from the other port perpendicular to the incident direction of the third polarizing beam splitter 409 to the fourteenth mirror 413 and the second piezoelectric driver 414 through the fifth quarter-wave plate 412, the fourteenth mirror 413 reflects the light pulse back to the fifth quarter-wave plate 412, the fifth quarter-wave plate 412 transmits the light pulse to the third polarizing beam splitter 409 again, and the light pulse is output from the output end parallel to the incident direction of the third polarizing beam splitter 409;

[0013] The dispersion management module 5 has the following optical path structure: the optical pulse is reflected by the fourth grating 501 to the first concave mirror 502, the first concave mirror 502 reflects the optical pulse to the fifteenth mirror 503, the optical pulse is reflected by the fifteenth mirror 503 to the first concave mirror 502, and then transmitted to the fourth grating 501, the optical pulse is transmitted again by the first concave mirror 502 and the fifteenth mirror 503 after passing through the fourth grating 501, and the optical pulse returns to the fourth grating 501 after multiple reflections, the fourth grating 501 reflects the optical pulse to the sixteenth mirror 504, the optical pulse is transmitted to the seventeenth mirror 505 through the sixteenth mirror 504, transmitted to the eighteenth mirror 506 through the seventeenth mirror 505, and then transmitted to the nineteenth mirror 507, and the optical pulse is sequentially reflected by seven mirrors for spectral shaping: the optical pulse is sequentially reflected by the twentieth mirror 508, the twenty-first mirror 509, the twenty-second mirror 510, the twenty-third mirror 511, the twenty-fourth mirror 512, the twenty-fifth mirror 513, and the twenty-sixth mirror 514, and then the optical pulse is incident on the twenty-seventh mirror 515, and the output of the twenty-seventh mirror 515 is the output of the dispersion management module.

[0014] The energy amplification module 6 has the following optical path structure: the optical pulse is incident to the input end of the first beam splitter 601, transmitted from the output end of the first beam splitter 601 to the twenty-eighth mirror 602, reflected by the twenty-eighth mirror 602 to the twenty-ninth mirror 603, reflected by the twenty-ninth mirror 603 to the thirtieth mirror 604, reflected by the thirtieth mirror 604 to the thirty-first mirror 605, reflected by the thirty-first mirror 605 to the seventh convex lens 606, transmitted through the seventh convex lens 606, the eighth convex lens 607 and the first dichroic mirror 608, and outputted by the first dichroic mirror 608, and the optical pulse is fused with the optical pulse reflected by the sixty-fifth mirror 692 to the first dichroic mirror 608, transmitted by the first dichroic mirror 608 to the first KTiAsO4 crystal 609, transmitted by the first KTiAsO4 crystal 609 to the second dichroic mirror 610, the short-wavelength optical pulse reflected by the second dichroic mirror 610 is transmitted to the thirty-second mirror 688, the long-wavelength optical pulse transmitted by the second dichroic mirror 610 is transmitted to the third dichroic mirror 611, the optical pulse reflected by the third dichroic mirror 611 is transmitted to the thirty-third mirror 689, the optical pulse transmitted by the third dichroic mirror 611 is incident to the thirty-fourth mirror 612, reflected by the thirty-fourth mirror 612 to the thirty-fifth mirror 613, reflected by the thirty-fifth mirror 613 to the ninth convex lens 614, transmitted by the ninth convex lens 614 to the tenth convex lens 615, incident to the thirty-sixth mirror 616 after passing through the tenth convex lens 615, reflected by the thirty-sixth mirror 616 to the thirty-seventh mirror 617, reflected by the thirty-seventh mirror 617 to the thirty-eighth mirror 618, reflected by the thirty-eighth mirror 618 to the thirty-ninth mirror 619, transmitted by the thirty-ninth mirror 619 to the fourth dichroic mirror 620, transmitted by the fourth dichroic mirror 620 to the second KTiAsO4 crystal 621, transmitted by the second KTiAsO4 crystal 621 to the fifth dichroic mirror 622, the optical pulse reflected by the fifth dichroic mirror 622 is transmitted to the fortieth mirror 690, the optical pulse transmitted by the fifth dichroic mirror 622 is transmitted to the sixth dichroic mirror 623, the optical pulse reflected by the sixth dichroic mirror 623 is transmitted to the forty-first mirror 691, the optical pulse transmitted by the sixth dichroic mirror 623 is incident to the eleventh convex lens 624, transmitted by the eleventh convex lens 624 to the twelfth convex lens 625, incident to the fifth grating 627 through the twelfth convex lens 625, reflected by the fifth grating 627 to the sixth grating 628, reflected by the sixth grating 628 to the first roof mirror 629, and reflected by the first roof mirror 629 to the fifth grating 627 along the input route, transmitted by the fifth grating 627 to the forty-second mirror 626, reflected by the forty-second mirror 626 to the forty-third mirror 630,transmitted through the eighth beam splitter 643, is transmitted to the ninth beam splitter 645, the light pulse reflected by the ninth beam splitter 645 is transmitted to the fifty-third reflector 646, the light pulse transmitted through the ninth beam splitter 645 is incident to the fifty-fourth reflector 647, is reflected by the fifty-fourth reflector 647 to the fifty-fifth reflector 648, and after being reflected by the fifty-fifth reflector 648 to the fifteenth convex lens 649, the light pulse passes through the fifteenth convex lens 649 and the sixteenth convex lens 650, is incident to the fifty-sixth reflector 651, is reflected by the fifty-sixth reflector 651 to the fifty-seventh reflector 652, is reflected by the fifty-seventh reflector 652 to the fifty-eighth reflector 653, is reflected by the fifty-eighth reflector 653 to the fifty-ninth reflector 654, is reflected by the fifty-ninth reflector 654 to the tenth beam splitter 655, is transmitted through the tenth beam splitter 655, and is fused with the light pulse reflected by the sixty-ninth reflector 683 to the tenth beam splitter 655 and then reflected to be output, and is incident to the fourth KTiAsO4 crystal 656, is transmitted to the eleventh beam splitter 657 by the fourth KTiAsO4 crystal 656, the light pulse reflected by the eleventh beam splitter 657 is transmitted to the sixtieth reflector 658, the light pulse transmitted through the eleventh beam splitter 657 is transmitted to the twelfth beam splitter 659, the light pulse reflected by the twelfth beam splitter 659 is transmitted to the sixty-first reflector 660, the light pulse transmitted through the twelfth beam splitter 659 is incident to the seventeenth convex lens 661, is transmitted to the eighteenth convex lens 662 by the seventeenth convex lens 661, is incident to the seventh grating 663 by the eighteenth convex lens 662, is transmitted to the sixty-second reflector 664 by the seventh grating 663, is reflected by the sixty-second reflector 664 to the sixty-third reflector 665, is transmitted to the sixty-fourth reflector 666 by the seventh grating 663, is reflected by the sixty-fourth reflector 666 to the sixty-fifth reflector 667, is transmitted to the sixty-sixth reflector 668 by the seventh grating 663, is reflected by the sixty-sixth reflector 668 to the sixty-seventh reflector 669, is transmitted to the sixty-eighth reflector 683 by the seventh grating 663, is reflected by the sixty-eighth reflector 683 to the seventh beam splitter 641, is transmitted through the seventh beam splitter 641, is fused with the light pulse reflected by the seventh beam splitter 641, is incident to the third KTiAsO4 crystal 642, is transmitted to the eighth beam splitter 643 by the third KTiAsO4 crystal 642, is reflected by the eighth beam splitter 643 to the fifty-second reflector 644, is transmitted to the ninth beam splitter 645 by the eighth beam splitter 643, is reflected by the ninth beam splitter 645 to the fifty-third reflector 646, is incident to the fifty-fourth reflector 647 by the ninth beam splitter 645, is reflected by the fifty-fourth reflector 647 to the fifty-fifth reflector 648, passes through the fifty-fifth reflector 648 and the fifteenth convex lens 649, passes through the fifteenth convex lens 649 and the sixteenth convex lens 650, is incident to the fifty-sixth reflector 651, is reflected by the fifty-sixth reflector 651 to the fifty-seventh reflector 652, is reflected by the fifty-seventh reflector 652 to the fifty-eighth reflector 653, is reflected by the fifty-eighth reflector 653 to the fifty-ninth reflector 654, is reflected by the fifty-ninth reflector 654 to the tenth beam splitter 655, is transmitted through the tenth beam splitter 655, is fused with the light pulse reflected by the tenth beam splitter 655, is incident to the fourth KTiAsO4 crystal 656, is transmitted to the eleventh beam splitter 657 by the fourth KTiAsO4 crystal 656, is reflected by the eleventh beam splitter 657 to the sixtieth reflector 658, is transmitted to the twelfth beam splitter 659 by the eleventh beam splitter 657, is reflected by the twelfth beam splitter 659 to the sixty-first reflector 660, is incident to the seventeenth convex lens 661 by the twelfth beam splitter 659, is transmitted to the eighteenth convex lens 662 by the seventeenth convex lens 661, is incident to the seventh grating 663 by the eighteenth convex lens 662, is transmitted to the sixty-second reflector 664 by the seventh grating 663, is reflected by the sixty-second reflector 664 to the sixty-third reflector 665, is transmitted to the sixty-fourth reflector 666 by the seventh grating 663, is reflected by the sixty-fourth reflector 666 to the sixty-fifth reflector 667, is transmitted to the sixty-sixth reflector 668 by the seventh grating 663, is reflected by the sixty-sixth reflector 668 to the sixty-seventh reflector 669, is transmitted to the sixty-eighth reflector 683 by the seventh grating 663, is reflected by the sixty-eighth reflector 683 to the seventh beam splitter 641, is transmitted through the seventh beam splitter 641, is fused with the light pulse reflected by the seventh beam splitter 641, is incident to the third KTiAsO4 crystal 642, is transmitted to the eighth beam splitter 643 by the third KTiAsO4 crystal 642, is reflected by the eighth beam splitter 643 to the fifty-second reflector 644, is transmitted to the ninth beam splitter 645 by the eighth beam splitter 643, is reflected by the ninth beam splitter 645 to the fifty-third reflector 646, is incident to the fifty-fourth reflector 647 by the ninth beam splitter 645, is reflected by the fifty-fourth reflector 647 to the fifty-fifth reflector 648, passes through the fifty-fifth reflector 648 and the fifteenth convex lens 649, passes through the fifteenth convex lens 649 and the sixteenth convex lens 650, is incident to the fifty-sixth reflector 651, is reflected by the fifty-sixth reflector 651 to the fifty-seventh reflector 652, is reflected by the fifty-seventh reflector 652 to the fifty-eighth reflector 653, is reflected by the fifty-eighth reflector 653 to the fifty-ninth reflector 654, is reflected by the fifty-ninth reflector 654 to the tenth beam splitter 655, is transmitted through the tenth beam splitter 655, is fused with the light pulse reflected by the tenth beam splitter 655, is incident to the fourth KTiAsO4 crystal 656, is transmitted to the eleventh beam splitter 657 by the fourth KTiAsO4 crystal 656, is reflected by the eleventh beam splitter 657 to the sixtieth reflector 658, is transmitted to the twelfth beam splitter 659 by the eleventh beam splitter 657, is reflected by the twelfth beam splitter 659 to the sixty-first reflector 660, is incident to the seventeenth convex lens 661 by the twelfth beam splitter 659, is transmitted to the eighteenth convex lens 662 by the seventeenth convex lens 661, is incident to the seventh grating 663 by the eighteenth convex lens 662, is transmitted to the sixty-second reflector 664 by the seventh grating 663, is reflected by the sixty-second reflector 664 to the sixty-third reflector 665, is transmitted to the sixty-fourth reflector 666 by the seventh grating 663, is reflected by the sixty-fourth reflector 666 to the sixty-fifth reflector 667, is transmitted to the sixty-sixth reflector 668 by the seventh grating 663, is reflected by the sixty-sixth reflector 668 to the sixty-seventh reflector 669, is transmitted to the sixty-eighth reflector 683 by the seventh grating 663, is reflected by the sixty-eighth reflector 683 to the seventh beam splitter 641, is transmitted through the seventh beam splitter 641, is fused with the light pulse reflected by the seventh beam splitter 641, is incident to the third KTiAsO4 crystal 642, is transmitted to the eighth beam splitter 643 by the third KTiAsO4 crystal 642, is reflected by the eighth beam splitter 643 to the fifty-second reflector 644, is transmitted to the ninth beam splitter 645 by the eighth beam splitter 643, is reflected by the ninth beam splitter 645 to the fifty-third reflector 646, is incident to the fifty-fourth reflector 647 by the ninth beam splitter 645, is reflected by the fifty-fourth reflector 647 to the fifty-fifth reflector 648, passes through the fifty-fifth reflector 648 and the fifteenth convex lens 649, passes through the fifteenth convex lens 649 and the sixteenth convex lens 650, is incident to the fifty-sixth reflector 651, is reflected by the fifty-sixth reflector 651 to the fifty-seventh reflector 652, is reflected by the fifty-seventh reflector 652The seventh grating 663 reflects the light pulse to the eighth grating 664, the eighth grating 664 reflects the light pulse to the second roof mirror 665, the light pulse reaches the second roof mirror 665 and is reflected back to the seventh grating 663 along the input route, the seventh grating 663 transmits the light pulse to the sixty-second mirror 666, the light pulse is reflected by the sixty-second mirror 666 to the sixty-third mirror 667, reflected by the sixty-third mirror 667 to the sixty-fourth mirror 668, reflected by the sixty-fourth mirror 668 to the knife-edge prism 684, the light pulse pumped by the laser 669 is transmitted to the thirteenth dichroic mirror 670, the light pulse reflected by the thirteenth dichroic mirror 670 is incident to the first film polarizer 672 through the seventh half-wave plate 671, the parallel polarized light pulse transmitted and output by the first film polarizer 672 is incident to the sixty-fifth mirror 692, the light pulse is reflected by the sixty-fifth mirror 692 to the first dichroic mirror 608, the perpendicular polarized light pulse reflected by the first film polarizer 672 is incident to the second film polarizer 673, the light pulse is reflected by the second film polarizer 673 and transmitted to the sixty-sixth mirror 676 through the eighth half-wave plate 674 and the fifth Yb-doped fiber 675, the light pulse is reflected by the sixty-sixth mirror 676 to the fourth dichroic mirror 620, the light pulse reflected by the fourth dichroic mirror 620 is fused with the light pulse transmitted and output by the fourth dichroic mirror 620 after being incident to the fourth dichroic mirror 620 through the thirty-ninth mirror 619, the fused light pulse is incident to the second KTiAsO4crystal 621, the light pulse output by the thirteenth dichroic mirror 670 is transmitted to the ninth half-wave plate 678 through the sixty-seventh mirror 677, the light pulse is incident to the third film polarizer 679 through the ninth half-wave plate 678, the parallel polarized light pulse transmitted and output by the third film polarizer 679 is incident to the sixty-eighth mirror 693, the light pulse is reflected by the sixty-eighth mirror 693 to the seventh dichroic mirror 641, the perpendicular polarized light pulse reflected by the third film polarizer 679 is incident to the fourth film polarizer 680, the light pulse is reflected by the fourth film polarizer 680 and transmitted to the sixty-ninth mirror 683 through the tenth half-wave plate 681 and the sixth Yb-doped fiber 682, the light pulse is reflected by the sixty-ninth mirror 683 to the tenth dichroic mirror 655, the two light pulses with the same energy and pulse duration finally incident to the knife-edge prism 684 are transmitted to the seventieth mirror 685 through the knife-edge prism 684, the light pulse is reflected by the seventieth mirror 685 to the seventy-first mirror 686 to the CaF2lens 687, the two light pulses are fused and output after passing through the CaF2lens 687;

[0015] The pulse coherent superposition module 7 has the following optical path structure: the output end of the fourth polarization beam splitter 701 outputs the light pulse in the perpendicular incidence direction, the light pulse is reflected by the seventy-second mirror 702 to the seventy-third mirror 703, reflected by the seventy-third mirror 703 to the seventy-fourth mirror 704, reflected by the seventy-fourth mirror 704 to the seventy-fifth mirror 705, reflected by the seventy-fifth mirror 705 to the fourth polarization beam splitter 701, and then output by the output end of the fourth polarization beam splitter 701 in the parallel incidence direction, the light pulse is transmitted to the fifth polarization beam splitter 707 through the eleventh half-wave plate 706 after output by the fourth polarization beam splitter 701, the light pulse is transmitted to the seventy-sixth mirror 708 along the output end of the fifth polarization beam splitter 707 perpendicular to the incidence direction, the light pulse is reflected by the seventy-sixth mirror 708 to the seventy-seventh mirror 709, reflected by the seventy-seventh mirror 709 to the seventy-eighth mirror 710, reflected by the seventy-eighth mirror 710 to the seventy-ninth mirror 711, reflected by the seventy-ninth mirror 711 to the fifth polarization beam splitter 707, and then output by the other output end parallel to the incidence direction of the fifth polarization beam splitter 707, the light pulse is transmitted to the twelfth half-wave plate 712 through the fifth polarization beam splitter 707, transmitted to the sixth polarization beam splitter 713 through the twelfth half-wave plate 712, and finally output by the sixth polarization beam splitter 713.

[0016] The pulse width compression module 8 has the following optical path structure: the light pulse is incident on the third beam splitter 802 after passing through the second beam splitter 801. A portion of the light pulse after passing through the third beam splitter 802 is transmitted to the 80th reflector 803. After being reflected by the 80th reflector 803, the light pulse is reflected sequentially by the 81st reflector 804, the 82nd reflector 805, and the 83rd reflector 806. The light pulse reflected by the 83rd reflector 806 is incident on the 9th grating 812. The 9th grating 812 reflects the light pulse to the 10th grating 813. The 10th grating 813 reflects the light pulse to the 84th reflector 814. After reaching the 84th reflector 814, the light pulse is reflected back to the 9th grating 814 along the input path. 12. The ninth grating 812 transmits the light pulse to the eighty-fifth reflector 815. The light pulse is reflected by the eighty-fifth reflector 815 to the eighty-sixth reflector 817. The light pulse is then incident on the nineteenth convex lens 835 via the eighty-sixth reflector 817. Another portion of the light pulse output from the third beam splitter 802 is transmitted to the eighty-seventh reflector 807. After being reflected by the eighty-seventh reflector 807, the light pulse passes sequentially through the eighty-eighth reflector 808, the eighty-nineth reflector 809, the ninetieth reflector 810, and the ninety-first reflector 811. The light pulse reflected by the ninety-first reflector 811 enters the ninth grating 812 in parallel with the light pulse reflected by the eighty-third reflector 806, and then passes through the tenth grating 813, the eighty-sixth reflector 815, the eighty-sixth reflector 817, and the eighty-sixth reflector 815. The fourteenth reflector 814 returns along the input path to the ninth grating 812. The light pulse is transmitted from the ninth grating 812 to the eighty-fifth reflector 815, and then reflected by the eighty-fifth reflector 815 to the ninety-second reflector 816. The light pulse is then incident on the nineteenth convex lens 835 via the ninety-second reflector 816. The light pulse is then transmitted from the other output of the second beam splitter 801 to the ninety-third reflector 818, and then to the fourth beam splitter 819. A portion of the light pulse after passing through the fourth beam splitter 819 is transmitted to the ninety-fourth reflector 820. After being reflected by the ninety-fourth reflector 820, the light pulse passes sequentially through the ninety-fifth reflector 821, the ninety-sixth reflector 822, and the ninety-third reflector 825. The light pulse reflected by the seventeenth reflector 823 is incident on the eleventh grating 829. The eleventh grating 829 reflects the light pulse to the twelfth grating 830, which in turn reflects it to the ninety-eighth reflector 831. After reaching the ninety-eighth reflector 831, the light pulse is reflected back to the eleventh grating 829 along the input path. The eleventh grating 829 transmits the light pulse to the ninety-ninth reflector 832, which then reflects it to the one hundredth reflector 834. The light pulse then enters the nineteenth convex lens 835, and another portion of the light pulse output from the fourth beam splitter 819 is transmitted to the one hundred and first reflector 824.The light pulse is reflected by the 101st mirror 824, and then passes through the 102nd mirror 825, the 103rd mirror 826, the 104th mirror 827 and the 105th mirror 828 in sequence. The light pulse reflected by the 105th mirror 828 enters the 11th grating 829 in parallel with the light pulse reflected by the 97th mirror 823. The light pulse passes through the 12th grating 830, the 98th mirror 831 and returns to the 11th grating 829 along the input route. The light pulse is transmitted to the 99th mirror 832 by the 11th grating 829. The light pulse is reflected by the 99th mirror 832 to the 106th mirror 833. The four light pulses passing through the 92nd mirror 816, the 86th mirror 817, the 106th mirror 833 and the 100th mirror 834 in parallel enter the 19th convex lens 835. The light pulses are focused and fused by the 19th convex lens 835. The fused light pulse is reflected by the 107th mirror 836 to the 108th mirror 837. The light pulse is reflected by the 108th mirror 837 to the 13th half-wave plate 838. The light pulse passes through the 13th half-wave plate 838 and enters the 7th polarization beam splitter 839. The light pulse output by the output end parallel to the incident direction of the 7th polarization beam splitter 839 is transmitted to the 109th mirror 840. The light pulse is reflected by the 109th mirror 840 to the 110th mirror 841. The light pulse is reflected by the 110th mirror 841 to the 111th mirror 842 and then to the 112th mirror 843. The light pulse reflected by the 112th mirror 843 enters the 20th convex lens 844. The light pulse passes through the 20th convex lens 844 and enters the 113th mirror 845. The light pulse output by the 113th mirror 845 is transmitted to the 114th mirror 847 through the 14th half-wave plate 846. The light pulse is reflected by the 114th mirror 847 to the second concave mirror 849. The light pulse passes through the BBO crystal 850 and enters the third concave mirror 851. The light pulse is reflected by the third concave mirror 851 to the 115th mirror 852. The light pulse output perpendicularly to the incident direction of the 7th polarization beam splitter 839 is reflected by the 117th mirror 857 and fused with the light pulse reflected by the 115th mirror 852. The fused light pulse enters the 5th beam splitter 853. The light pulse output by the 5th beam splitter 853 enters the fourth concave mirror 854. The light pulse passes through the MgO:PPLN crystal 855 and enters the fifth concave mirror 856. The light pulse is reflected by the fifth concave mirror 856 to the 116th mirror 848. The light pulse enters the second concave mirror 849 by the 116th mirror 848.After the optical pulse is transmitted to the second concave mirror 849, the optical pulse is transmitted to the BBO crystal 850, the third concave mirror 851, the first one hundred and fifteenth mirror 852, the fifth beam splitter 853, the fourth concave mirror 854, the MgO:PPLN crystal 855, the fifth concave mirror 856, the first one hundred and sixteenth mirror 848, and the optical pulse is transmitted to the twenty-first convex lens 858 after multiple reflections, and the output of the twenty-first convex lens 858 is the output of the pulse width compression module.

[0017] Advantages:

[0018] 1. The application uses a circulator to design a three-ring mode-locked fiber laser cavity, to realize switchable output of high-power noise-like pulses and dissipative soliton resonant pulses.

[0019] 2. The application uses a grating pair and an optical lens to design a multi-stage and multi-channel pulse compression structure, to realize ultra-short pulse output.

[0020] 3. The application uses a doped gain fiber and a rod-shaped fiber to design a multi-channel power amplification structure, to effectively improve the pulse power.

[0021] 4. The application uses a nonlinear crystal barium metaborate and a periodically poled lithium magnesium niobate doped with magnesium oxide to design a nonlinear frequency conversion structure, to realize deep ultraviolet pulse output. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a general structure block diagram of the application.

[0023] Figure 2 It is a seed pulse source optical path diagram used by the application.

[0024] Figure 3 It is a pulse width expansion module optical path diagram used by the application.

[0025] Figure 4 It is an energy pre-amplification module optical path diagram used by the application.

[0026] Figure 5 It is a multi-channel pulse division module optical path diagram used by the application.

[0027] Figure 6 It is a dispersion management module optical path diagram used by the application.

[0028] Figure 7 It is an energy amplification module optical path diagram used by the application.

[0029] Figure 8 It is a pulse coherent superposition module optical path diagram used by the application.

[0030] Figure 9This is the optical path diagram of the pulse width compression module used in this invention. Detailed Implementation

[0031] The working principle of the present invention will be further explained below with reference to the accompanying drawings. It should be understood that the component parameters marked in the embodiments are preferred parameters used in each embodiment, rather than limitations on the scope of protection.

[0032] Example 1: Overall Structure of the Invention

[0033] like Figure 1 As shown, the overall structure of the present invention includes: the output terminal of the seed pulse source 1 is connected to the input terminal of the pulse width expansion module 2; the output terminal of the pulse width expansion module 2 is connected to the input terminal of the energy pre-amplification module 3; the output terminal of the energy pre-amplification module 3 is connected to the input terminal of the multi-channel pulse segmentation module 4; the output terminal of the multi-channel pulse segmentation module 4 is connected to the input terminal of the dispersion management module 5; the output terminal of the dispersion management module 5 is connected to the input terminal of the energy amplification module 6; the output terminal of the energy amplification module 6 is connected to the input terminal of the pulse coherence superposition module 7; and the output terminal of the pulse coherence superposition module 7 is connected to the input terminal of the pulse width compression module 8. Example 2: Seed Pulse Source

[0034] The structure of the seed pulse source 1 is as follows: a first pump source 101 (LC962U pump source of OCLARO, central wavelength 980 nm, maximum single-mode output optical power 750 mW) is connected with a 980 nm end of a first wavelength division multiplexer 102 (980 / 1060 nm single-mode fiber wavelength division multiplexer of COMCORE), a common end of the first wavelength division multiplexer 102 is connected with an input end of a first isolator 104 (HOI-005-532 isolator of Hengyang Optics) through a first ytterbium-doped fiber 103 (PM-YDF-HI ytterbium-doped fiber of Nufern), an output end of the first isolator 104 is connected with an input end of a first half-wave retarder 106 (LCC1221-B - Half-Wave LC Retarder, Ø20 mm CA, ARC: 650-1050 nm) through a dispersion compensation fiber 105 (DCM-DK-425 dispersion compensation fiber of OFS), an output end of the first half-wave retarder 106 is connected with an input end of a first quarter-wave retarder 107 (FR600QM-Mounted Quarter-Wave Fresnel Rhomb Retarder), an output end of the first quarter-wave retarder 107 is connected with a polarizer 108 (ILP1550SM-APC of Thorlabs), the polarizer 108 is connected with an input end of a second half-wave retarder 109 (LCC1221-B - Half-Wave LC Retarder, Ø20 mm CA, ARC: 650-1050 nm), an output end of the second half-wave retarder 109 is connected with an input end of a third coupler 115 (fiber coupler with model number FUSED-12-1060-7 / 125-50 / 50-3U-3mm produced by OZ-OPTICS), a 90% direct output end of the third coupler 115 is connected with an input end of a second coupler 110 (fiber coupler with model number FUSED-12-1060-7 / 125-50 / 50-3U-3mm produced by OZ-OPTICS), a 90% direct output end of the second coupler 110 is connected with a 1060 nm end of a second wavelength division multiplexer 111 (980 / 1060 nm single-mode fiber wavelength division multiplexer of COMCORE), a 980 nm end of the second wavelength division multiplexer 111 is connected with a second pump source 112 (LC962U pump source of OCLARO, central wavelength 980 nm, maximum single-mode output optical power 750 mW),The common end of the second wavelength division multiplexer 111 is connected to the 90% output end of the first coupler 114 (fiber coupler FUSED-12-1060-7 / 125-50 / 50-3U-3mm produced by OZ-OPTICS) through a second ytterbium-doped fiber 113 (PM-YDF-HI ytterbium-doped fiber produced by Nufern), the input end of the first coupler 114 is connected to the 1060nm end of the first wavelength division multiplexer 102, the other input end of the third coupler 115 (fiber coupler FUSED-12-1060-7 / 125-50 / 50-3U-3mm produced by OZ-OPTICS) is connected to port three of the first optical circulator 120 (ODiate F-CIR-13-N-FA), the port one of the first optical circulator 120 is connected to the input end of the fourth coupler 121 (fiber coupler FUSED-12-1060-7 / 125-50 / 50-3U-3mm produced by OZ-OPTICS), the port two of the first optical circulator 120 is connected to the common end of the third wavelength division multiplexer 117 (980 / 1060nm single-mode fiber wavelength division multiplexer produced by COMCORE), the third pump source 116 (pump source LC962U produced by OCLARO, center wavelength 980nm, maximum single-mode output optical power 750mW) is connected to the 980nm end of the third wavelength division multiplexer 117, the 1060nm end of the third wavelength division multiplexer 117 is connected to port two of the second optical circulator 119 (ODiate F-CIR-13-N-FA) through a third ytterbium-doped fiber 118 (PM-YDF-HI ytterbium-doped fiber produced by Nufern), the port one of the second optical circulator 119 is connected to the 10% coupling output end of the third coupler 115, the port three of the second optical circulator 119 is connected to the 80% direct output end of the fourth coupler 121, the other input end of the fourth coupler 121 is connected to the input end of the second quarter-wave retarder 122, the output end of the second quarter-wave retarder 122 (FR600QM - Mounted Quarter-Wave Fresnel Rhomb Retarder) is connected to the input end of the single-mode fiber 123 twisted at 5turns / m, the output end of the single-mode fiber 123 (Lucent 980) twisted at 5turns / m is connected to the 10% coupling output end of the fourth coupler 121 through the single-mode fiber 124 (Lucent 980), wherein the 10% coupling output end of the first coupler 114 is connected to port one of the third optical circulator 125, the 10% coupling output end of the second coupler 110 is connected to port two of the third optical circulator 125, and port three of the third optical circulator 125 is the output of the seed pulse source.

[0035] Example 3 Pulse width expansion module

[0036] The pulse width expansion module 2 has the following optical path structure: the optical pulse is transmitted to the first grating 202 (LightSmyth company T-1702-1030s) through the first mirror 201 (Hengyuan Optics GMH12-005-AU mirror), the first grating 202 transmits the optical pulse to the second mirror 203 (Hengyuan Optics GMH12-005-AU mirror), and then reflects to the third mirror 204 (Hengyuan Optics GMH12-005-AU mirror), the third mirror 204 reflects the optical pulse back to the first grating 202, the pulse output by the first grating 202 is transmitted to the fourth mirror 206 (Hengyuan Optics GMH12-005-AU mirror) through the first convex lens 205 (Hengyuan Optics GLH12-002-002-NIR convex lens), and then reflected back to the first grating 202 through the first convex lens 205, the optical pulse is transmitted to the second mirror 203 through the first grating 202, the second mirror 203 reflects the optical pulse and then reflects it back to the first grating 202 through the third mirror 204, the optical pulse output by the first grating 202 is incident to the wave prism 207 (Union Optics company POP0012-5 wave prism) and reflected back to the first grating 202 through the wave prism 207, the optical pulse is transmitted to the second mirror 203 again through the first grating 202, and then reflected back to the first grating 202 through the third mirror 204, the first grating 202, the first convex lens 205, the fourth mirror 206, and multiple reflections, the optical pulse is output through the first grating 202, and the pulse width expansion module 2 compresses the pulse width.

[0037] Example 4 Energy pre-amplification module

[0038] The energy pre-amplification module 3 has the following optical path structure: the optical pulse is incident to the second convex lens 301 (Hengyang Optics GLH12-002-002-NIR convex lens), the optical pulse is incident to the fifth mirror 306 (Hengyang Optics GMH12-005-AU mirror) after passing through the second convex lens 301, the acousto-optic modulator 302 (Fiber-Q acousto-optic modulator of Gooch & Housego company), the third convex lens 303 (Hengyang Optics GLH12-002-002-NIR convex lens), the second isolator 304 (HOI-005-532 isolator of Hengyang Optics company), the first half-wave plate 305 (Hengyang Optics WPZ3240-248 half-wave plate), is reflected to the sixth mirror 307 (Hengyang Optics GMH12-005-AU mirror) after being reflected to the fifth mirror 306, and is incident to the fourth convex lens 308 (Hengyang Optics GLH12-002-002-NIR convex lens) after passing through the fourth convex lens 308, the first collimator 309 (M011 collimator of WT&T company), the fourth ytterbium-doped optical fiber 310 (Er80-4 / 125 ytterbium-doped optical fiber of Thorlabs company), the second collimator 311 (M011 collimator of WT&T company), the fifth convex lens 312 (Hengyang Optics GLH12-002-002-NIR convex lens), the seventh mirror 313 (Hengyang Optics GMH12-005-AU mirror), the pump light generated by the first photodiode 316 (D4F2P22-976 photodiode of DILAS company) is fused with the optical pulse incident to the seventh mirror 313 before passing through the third collimator 315 (M011 collimator of WT&T company), the sixth convex lens 314 (Hengyang Optics GLH12-002-002-NIR convex lens). The fused optical pulse is reflected to the eighth mirror 317 (Hengyang Optics GMH12-005-AU mirror) after being reflected to the seventh mirror 313, the eighth mirror 317 reflects the optical pulse to the second half-wave plate 318 (Hengyang Optics WPZ3240-248 half-wave plate), the optical pulse is incident to the second grating 325 (LSFSG-1000-3318-94 grating of LightSmyth company) after passing through the second half-wave plate 318, the first quarter-wave plate 319 (WPZ4310-248 quarter-wave plate of Hengyang Optics company), the band-pass filter 320 (CW4L2 filter of YUNSANDA company) and the third half-wave plate 321 (Hengyang Optics WPZ3240-248 half-wave plate). The optical pulse is transmitted to the third grating 326 after passing through the second grating 325, and the third grating 326 transmits the optical pulse to the ninth mirror 327 (Hengyang Optics GMH12-005-AU mirror).The ninth mirror 327 reflects the pulse back to the third grating 326 (LightSmyth LSFSG-1000-3318-94 grating), and the light pulse is transmitted to the second grating 325 through the third grating 326. The light pulse output by the second grating 325 is transmitted to the tenth mirror 322 (Hantech Optics GMH12-005-AU mirror), and is reflected by the tenth mirror 322 into the fourth half-wave plate 323 (Hantech Optics WPZ3240-248 half-wave plate), and finally output through the first polarizing beam splitter 324 (Kongtum QTFBC-1309 polarizing beam splitter). The energy pre-amplification module 3 reduces the pulse repetition frequency and performs pre-shaping compensation for the loss caused by the placement of the acousto-optic modulator in the configuration.

[0039] Example 5 Multi-channel pulse splitting module

[0040] The multi-channel pulse splitting module 4 has the following optical path structure: the light pulse is incident on the input end of the second polarization beam splitter 402 (Kongtum company QTFBC-1216 polarization beam splitter) through the fifth half-wave plate 401 (Hengyang optical WPZ2410-248 half-wave plate), the light pulse is transmitted to the eleventh mirror 404 (Hengyang optical GMH12-005-AU mirror) through the second quarter-wave plate 403 (Hengyang optical WPZ4410-248 quarter-wave plate) from the output end perpendicular to the incident direction of the second polarization beam splitter 402, the eleventh mirror 404 reflects the light pulse back to the second quarter-wave plate 403, and the second quarter-wave plate 403 transmits the light pulse back to the second polarization beam splitter 402 again, while the light pulse is transmitted to the twelfth mirror 406 (Hengyang optical GMH12-005-AU mirror) and the first piezoelectric driver 407 (GO STAGE LLS4545) through the third quarter-wave plate 405 (Hengyang optical WPZ4410-248 quarter-wave plate) from the other output end perpendicular to the incident direction of the second polarization beam splitter 402, the twelfth mirror 406 reflects the light pulse back to the third quarter-wave plate 405, and the third quarter-wave plate 405 transmits the light pulse back to the second polarization beam splitter 402 again, the light pulse is output from the port parallel to the incident direction of the second polarization beam splitter 402 and transmitted to the third polarization beam splitter 409 (Kongtum company QTFBC-1216 polarization beam splitter) through the sixth half-wave plate 408 (Hengyang optical WPZ2410-248 half-wave plate), the light pulse is transmitted to the thirteenth mirror 411 (Hengyang optical GMH12-005-AU mirror) through the fourth quarter-wave plate 410 (Hengyang optical WPZ4410-248 quarter-wave plate) from the port perpendicular to the incident direction of the third polarization beam splitter 409, the thirteenth mirror 411 reflects the light pulse back to the fourth quarter-wave plate 410, and the fourth quarter-wave plate 410 transmits the light pulse back to the third polarization beam splitter 409 again, while the light pulse is transmitted to the fourteenth mirror 413 (Hengyang optical GMH12-005-AU mirror) and the second piezoelectric driver 414 (GO STAGE LLS4545) through the fifth quarter-wave plate 412 (Hengyang optical WPZ4410-248 quarter-wave plate) from the other port perpendicular to the incident direction of the third polarization beam splitter 409, the fourteenth mirror 413 reflects the light pulse back to the fifth quarter-wave plate 412, and the fifth quarter-wave plate 412 transmits the light pulse to the third polarization beam splitter 409 again, and the light pulse is output from the output end parallel to the incident direction of the third polarization beam splitter 409.

[0041] Embodiment 6 dispersion management module

[0042] The dispersion management module 5 has the following optical path structure: the light pulse is transmitted to the fourth grating 501 (LightSmyth LSFSG-1000-5085-94 grating), reflected by the fourth grating 501 to the first concave mirror 502 (Gooch & Housego GMH-13 concave mirror), reflected by the first concave mirror 502 to the fifteenth mirror 503 (Gooch & Housego GMH12-005-AU mirror), transmitted to the first concave mirror 502 after being reflected by the fifteenth mirror 503, transmitted to the fourth grating 501 through the first concave mirror 502, transmitted again through the first concave mirror 502 and the fifteenth mirror 503 after being transmitted by the fourth grating 501, and returned to the fourth grating 501 after multiple reflections, reflected by the fourth grating 501 to the sixteenth mirror 504 (Gooch & Housego GMH12-005-AU mirror), transmitted to the seventeenth mirror 505 (Gooch & Housego GMH12-005-AU mirror) through the sixteenth mirror 504, transmitted to the eighteenth mirror 506 (Gooch & Housego GMH12-005-AU mirror) through the seventeenth mirror 505, and transmitted to the nineteenth mirror 507 (Gooch & Housego GMH12-005-AU mirror) through the eighteenth mirror 506, and the light pulse is spectrally shaped by the seven mirrors in sequence: the light pulse is reflected by the twentieth mirror 508 (Gooch & Housego GMH12-005-AU mirror), the twenty-first mirror 509 (Gooch & Housego GMH12-005-AU mirror), the twenty-second mirror 510 (Gooch & Housego GMH12-005-AU mirror), the twenty-third mirror 511 (Gooch & Housego GMH12-005-AU mirror), the twenty-fourth mirror 512 (Gooch & Housego GMH12-005-AU mirror), the twenty-fifth mirror 513 (Gooch & Housego GMH12-005-AU mirror), and the twenty-sixth mirror 514 (Gooch & Housego GMH12-005-AU mirror) in sequence, and then incident on the twenty-seventh mirror 515 (Gooch & Housego GMH12-005-AU mirror), and the output of the twenty-seventh mirror 515 is the output of the dispersion management module; the dispersion management module pre-compensates the nonlinear phase shift accumulated in the pulse transmission process through dispersion management, and compresses the pulse width.

[0043] Embodiment 7 Energy amplification module

[0044] The energy amplification module 6 has the following optical path structure: the optical pulse is incident to the input end of the first beam splitter 601 (SIGMAOBCL20-1064-R5), transmitted from the output end of the first beam splitter 601 to the twenty-eighth mirror 602 (Hengyuan Optics GMH12-005-AU mirror), reflected by the twenty-eighth mirror 602 to the twenty-ninth mirror 603 (Hengyuan Optics GMH12-005-AU mirror), reflected by the twenty-ninth mirror 603 to the thirtieth mirror 604 (Hengyuan Optics GMH12-005-AU mirror), the thirtieth mirror 604 reflects the optical pulse to the thirty-first mirror 605 (Hengyuan Optics GMH12-005-AU mirror), the optical pulse is reflected by the thirty-first mirror 605 to the seventh convex lens 606 (Hengyuan Optics GLH12-002-002-NIR convex lens), the optical pulse passes through the seventh convex lens 606, the eighth convex lens 607 (Hengyuan Optics GLH12-002-002-NIR convex lens), the first dichroic mirror 608 (Thorlabs DMSP1180 dichroic mirror), is transmitted and output by the first dichroic mirror 608, the optical pulse is fused with the optical pulse reflected by the sixty-fifth mirror 692 (Hengyuan Optics GMH12-005-AU mirror) to the first dichroic mirror 608 after reflection, the fused optical pulse is transmitted to the first KTiAsO4 crystal 609 (DIENTECH, density 3.454g / cm 3KTA crystal), the light pulse is transmitted to the second dichroic mirror 610 (Thorlabs DMSP1180 dichroic mirror) through the first KTiAs04 crystal 609, the short-wavelength light pulse reflected from the second dichroic mirror 610 is transmitted to the thirty-second mirror 688 (HANTHWARE GMH12-005-AU mirror), the long-wavelength light pulse transmitted from the second dichroic mirror 610 is transmitted to the third dichroic mirror 611 (Thorlabs DMSP1180 dichroic mirror), the light pulse reflected by the third dichroic mirror 611 is transmitted to the thirty-third mirror 689 (HANTHWARE GMH12-005-AU mirror), the light pulse transmitted from the third dichroic mirror 611 is incident to the thirty-fourth mirror 612 (HANTHWARE GMH12-005-AU mirror), the light pulse is reflected by the thirty-fourth mirror 612 to the thirty-fifth mirror 613 (HANTHWARE GMH12-005-AU mirror), reflected by the thirty-fifth mirror 613 to the ninth convex lens 614 (HANTHWARE GLH12-002-002-NIR convex lens), transmitted to the tenth convex lens 615 (HANTHWARE GLH12-002-002-NIR convex lens) through the ninth convex lens 614, and incident to the thirty-sixth mirror 616 (HANTHWARE GMH12-005-AU mirror) after passing through the tenth convex lens 615, the light pulse is reflected by the thirty-sixth mirror 616 to the thirty-seventh mirror 617 (HANTHWARE GMH12-005-AU mirror), reflected by the thirty-seventh mirror 617 to the thirty-eighth mirror 618 (HANTHWARE GMH12-005-AU mirror), reflected by the thirty-eighth mirror 618 to the thirty-ninth mirror 619 (HANTHWARE GMH12-005-AU mirror), transmitted to the fourth dichroic mirror 620 (Thorlabs DMSP1180 dichroic mirror) through the thirty-ninth mirror 619, transmitted to the second KTiAs04 crystal 621 (DIENTECH density 3.454 g / cm 3The light pulses are transmitted to the second KTiAs04crystal 621, and then transmitted to the fifth dichroic mirror 622 (Thorlabs DMSP1180 dichroic mirror) through the second KTiAs04crystal 621. The light pulses reflected by the fifth dichroic mirror 622 are transmitted to the fourth mirror 690 (Gooch & Housego GMH12-005-AU mirror). The light pulses transmitted by the fifth dichroic mirror 622 are transmitted to the sixth dichroic mirror 623 (Thorlabs DMSP1180 dichroic mirror) through the sixth dichroic mirror 623. The light pulses reflected by the sixth dichroic mirror 623 are transmitted to the fourth mirror 691 (Gooch & Housego GMH12-005-AU mirror). The light pulses transmitted by the sixth dichroic mirror 623 are incident on the eleventh convex lens 624 (Gooch & Housego GLH12-002-002-NIR convex lens) through the eleventh convex lens 624. The light pulses are transmitted to the twelfth convex lens 625 (Gooch & Housego GLH12-002-002-NIR convex lens) through the twelfth convex lens 625. The light pulses are incident on the fifth grating 627 (LightSmyth LSFSG-1000-3225-94 grating) through the fifth grating 627. The fifth grating 627 reflects the light pulses to the sixth grating 628 (LightSmyth LSFSG-1000-3225-94 grating). The sixth grating 628 reflects the light pulses to the first roof mirror 629 (Hongsheng Optoelectronics HS-002103). The light pulses are reflected back to the fifth grating 627 along the input route after reaching the first roof mirror 629 (Hongsheng Optoelectronics HS-002103). The fifth grating 627 transmits the light pulses to the fourth mirror 626 (Gooch & Housego GMH12-005-AU mirror). The light pulses are reflected by the fourth mirror 626 to the fourth mirror 630 (Gooch & Housego GMH12-005-AU mirror). The light pulses are reflected by the fourth mirror 630 (Gooch & Housego GMH12-005-AU mirror) to the fourth mirror 631 (Gooch & Housego GMH12-005-AU mirror). The light pulses are reflected by the fourth mirror 631 to the fourth mirror 632 (Gooch & Housego GMH12-005-AU mirror). The light pulses are reflected by the fourth mirror 632 to the fourth mirror 633 (Gooch & Housego GMH12-005-AU mirror). The light pulses are reflected by the fourth mirror 633 to the knife-edge prism 684 (SIGMA KOKI KRPB-25-10H). The light pulses are transmitted from the other output end of the first beam splitter 601 to the fourth mirror 634 (Gooch & Housego GMH12-005-AU mirror). The light pulses are reflected by the fourth mirror 634 to the fourth mirror 635 (Gooch & Housego GMH12-005-AU mirror). The light pulses are reflected by the fourth mirror 635 to the fourth mirror 636 (Gooch & Housego GMH12-005-AU mirror),reflected by the 49th mirror 636 to the 50th mirror 637 (HANTHO GMH12-005-AU mirror), reflected by the 50th mirror 637 to the 51st mirror 638 (HANTHO GMH12-005-AU mirror), reflected by the 51st mirror 638 to the 13th convex lens 639 (HANTHO GLH12-002-002-NIR convex lens), and then incident on the 14th convex lens 640 (HANTHO GLH12-002-002-NIR convex lens) after passing through the 13th convex lens 639 and the 14th convex lens 640, and then incident on the 7th dichroic mirror 641 (Thorlabs DMSP1180 dichroic mirror) through the 14th convex lens 640, and then transmitted by the 7th dichroic mirror 641, and then combined with the light pulse reflected by the 68th mirror 693 (HANTHO GMH12-005-AU mirror) after being incident on the 7th dichroic mirror 641, and then incident on the 3rd KTiAsO4 crystal 642 (DIENTECH, density 3.454 g / cm, 3KTA crystal), the light pulse is transmitted to the eighth dichroic mirror 643 (Thorlabs DMSP1180 dichroic mirror) through the third KTiAs04 crystal 642, the light pulse reflected from the eighth dichroic mirror 643 is reflected to the fifty-second mirror 644 (HANTHWARE GMH12-005-AU mirror), the light pulse transmitted from the eighth dichroic mirror 643 is transmitted to the ninth dichroic mirror 645 (Thorlabs DMSP1180 dichroic mirror), the light pulse reflected by the ninth dichroic mirror 645 is transmitted to the fifty-third mirror 646, the light pulse transmitted by the ninth dichroic mirror 645 is incident to the fifty-fourth mirror 647 (HANTHWARE GMH12-005-AU mirror), reflected by the fifty-fourth mirror 647 to the fifty-fifth mirror 648 (HANTHWARE GMH12-005-AU mirror), and then reflected by the fifty-fifth mirror 648 to the fifteenth convex lens 649 (HANTHWARE GLH12-002-002-NIR convex lens), and then the light pulse passes through the fifteenth convex lens 649 and the sixteenth convex lens 650 (HANTHWARE GLH12-002-002-NIR convex lens), and is incident to the fifty-sixth mirror 651 (HANTHWARE GMH12-005-AU mirror), and then the light pulse is reflected by the fifty-sixth mirror 651 to the fifty-seventh mirror 652 (HANTHWARE GMH12-005-AU mirror), reflected by the fifty-seventh mirror 652 to the fifty-eighth mirror 653, reflected by the fifty-eighth mirror 653 (HANTHWARE GMH12-005-AU mirror) to the fifty-ninth mirror 654 (HANTHWARE GMH12-005-AU mirror), reflected by the fifty-ninth mirror 654 to the tenth dichroic mirror 655 (Thorlabs DMSP1180 dichroic mirror), and then transmitted and output, and the light pulse is fused with the light pulse reflected by the sixtyninth mirror 683 after being reflected by the tenth dichroic mirror 655, and then incident to the fourth KTiAs04 crystal 656 (DIENTECH, density 3.454 g / cm 3The light pulse is transmitted via the fourth KTiAsO4 crystal 656 to the eleventh dichroic mirror 657 (Thorlabs DMSP1180 dichroic mirror). The light pulse reflected from the eleventh dichroic mirror 657 is transmitted to the sixtieth mirror 658 (Hengyang Optics GMH12-005-AU dichroic mirror). The light pulse transmitted from the eleventh dichroic mirror 657 is transmitted to the twelfth dichroic mirror 659 (Thorlabs DMSP1180 dichroic mirror). The light pulse reflected by the dichroic mirror 659 is transmitted to the sixty-first reflecting mirror 66 (Hengyang Optics GMH12-005-AU reflecting mirror). The light pulse transmitted from the twelfth dichroic mirror 659 is incident on the seventeenth convex lens 661 (Hengyang Optics GLH12-002-002-NIR convex lens), and then transmitted to the eighteenth convex lens 662 (Hengyang Optics GLH12-002-002-NIR convex lens). Finally, the light pulse is incident on the seventh grating. 663 (LightSmyth LFSSG-1000-3225-94 grating), the seventh grating 663 reflects the light pulse to the eighth grating 664 (LightSmyth LFSSG-1000-3225-94 grating), the eighth grating 664 reflects the light pulse to the second roof mirror 665 (Hongsheng Optoelectronics HS-002103), and after reaching the second roof mirror 665, the light pulse is reflected back to the seventh grating 663 along the input path. The grating 663 transmits the light pulse to the sixty-second reflector 666 (Hengyang Optics GMH12-005-AU reflector). The light pulse is reflected by the sixty-second reflector 666 to the sixty-third reflector 667 (Hengyang Optics GMH12-005-AU reflector), then reflected again by the sixty-third reflector 667 to the sixty-fourth reflector 668 (Hengyang Optics GMH12-005-AU reflector), and finally reflected by the sixty-fourth reflector 668 to the knife-edge prism 684 (SIGMA). The KOKI KRPB-25-10H laser, pumped by laser 669 (EKSPLA APL2105 commercial picosecond Nd:YAG laser), transmits light pulses to the thirteenth dichroic mirror 670 (Thorlabs DMSP1180 dichroic mirror). The light pulses reflected from the thirteenth dichroic mirror 670 pass through the seventh half-wave plate 671 (Hengyang Optics WPZ2310-248 half-wave plate) and are incident on the first thin-film polarizer 672. The parallel polarized light pulses transmitted through the first thin-film polarizer 672 (Thorlabs LPNIRE11S) are incident on the sixty-fifth mirror 692 (Hengyang Optics GMH12-005-AU mirror). The light pulses reflected by the sixty-fifth mirror 692 are then reflected by the first dichroic mirror 608, and the vertically polarized light pulses reflected by the first thin-film polarizer 672 are incident on the second thin-film polarizer 673 (Thorlabs LPNIRE11S).The light pulse is reflected by the second thin film polarizer 673, transmitted to the eighth half wave plate 674 (Hengyuan Optics WPZ2310-248 half wave plate), the fifth Yb-doped fiber 675 (Nufern PM-YDF-HI Yb-doped fiber), and reflected by the sixty-sixth mirror 676 (Hengyuan Optics GMH12-005-AU mirror). The light pulse is reflected by the fourth dichroic mirror 620 to the fourth dichroic mirror 620, and the light pulse reflected by the fourth dichroic mirror 620 is fused with the light pulse transmitted by the fourth dichroic mirror 620 after being incident on the fourth dichroic mirror 620 through the thirty-ninth mirror 619. The fused light pulse is incident on the second KTiAsO4 crystal 621. The light pulse output from the thirteenth dichroic mirror 670 is transmitted to the ninth half wave plate 678 (Hengyuan Optics WPZ2310-248 half wave plate) through the sixty-seventh mirror 677 (Hengyuan Optics GMH12-005-AU mirror). The light pulse is incident on the third thin film polarizer 679 through the ninth half wave plate 678 (Hengyuan Optics WPZ2310-248 half wave plate). The parallel polarized light pulse transmitted by the third thin film polarizer 679 (Thorlabs LPNIRE11S) is incident on the sixty-eighth mirror 693 (Hengyuan Optics GMH12-005-AU mirror). The light pulse is reflected by the seventh dichroic mirror 641. The perpendicular polarized light pulse reflected by the third thin film polarizer 679 is incident on the fourth thin film polarizer 680 (Thorlabs LPNIRE11S). The light pulse is reflected by the fourth thin film polarizer 680, transmitted to the sixtyninth mirror 683 (Hengyuan Optics GMH12-005-AU mirror) through the tenth half wave plate 681 (Hengyuan Optics WPZ2310-248 half wave plate) and the sixth Yb-doped fiber 682 (Nufern PM-YDF-HI Yb-doped fiber). The light pulse is reflected by the sixtyninth mirror 683 to the tenth dichroic mirror 655. Finally, the two light pulses with the same energy and pulse duration are transmitted to the seventieth mirror 685 through the knife-edge prism 684. The light pulse is reflected by the seventieth mirror 685 (Hengyuan Optics GMH12-005-AU mirror) to the seventy-first mirror 686 (Hengyuan Optics GMH12-005-AU mirror) to the CaF2 lens 687 (Hengyuan Optics GWH51-012). The two light pulses are fused and output after being transmitted by the CaF2 lens 687. The energy amplification module performs multi-channel power amplification on the pulse.

[0045] Embodiment 8 Pulse coherent superposition module

[0046] The pulse coherence superposition module 7 has the following optical path structure: the light pulse is incident on the fourth polarization beam splitter 701 (Kongtum QTFBC-1216 polarization beam splitter), and the light pulse is output from the output end of the fourth polarization beam splitter 701 perpendicular to the incident direction. The light pulse is reflected by the seventy-second reflector 702 (Hengyang Optics GMH12-005-AU reflector) to the seventy-third reflector 703 (Hengyang Optics GMH12-005-AU reflector), and then reflected by the seventy-third reflector 703 to the seventy-fourth reflector 704 (Hengyang Optics GMH12). The light pulse, after being reflected by the 74th reflector 704 to the 75th reflector 705 (Hengyang Optics GMH12-005-AU reflector), is reflected back to the fourth polarization beam splitter 701. The pulse is then output from the output end of the fourth polarization beam splitter 701 parallel to the incident direction. After being output from the fourth polarization beam splitter 701, the light pulse is transmitted through the 11th half-wave plate 706 (Hengyang Optics WPZ2310-248 half-wave plate) to the fifth polarization beam splitter 707 (Kongtum QTFBC-1216 polarization beam splitter). The light pulse is transmitted along the output end of the fifth polarization beam splitter 707 perpendicular to the incident direction to the seventy-sixth reflector 708 (Hengyang Optics GMH12-005-AU reflector). The light pulse is reflected by the seventy-sixth reflector 708 to the seventy-seventh reflector 709 (Hengyang Optics GMH12-005-AU reflector), then reflected by the seventy-seventh reflector 709 to the seventy-eighth reflector 710 (Hengyang Optics GMH12-005-AU reflector), and finally reflected by the seventy-eighth reflector 710 to the seventy-ninth reflector 711 (Hengyang Optics GMH12-005-AU reflector). The light pulse is reflected back to the fifth polarization beam splitter 707 by the seventy-ninth reflecting mirror 711. The light pulse is output through another output end parallel to the incident direction of the fifth polarization beam splitter 707. The light pulse is transmitted through the fifth polarization beam splitter to the twelfth half-wave plate 712 (Hengyang Optics WPZ2310-248 half-wave plate), and then transmitted through the twelfth half-wave plate 712 to the sixth polarization beam splitter 713 (Kongtum QTFBC-1216 polarization beam splitter). Finally, it is output by the sixth polarization beam splitter 713. The pulse coherence superposition module coherently superimposes the multi-channel amplified light pulses into a single beam.

[0047] Example 9: Pulse Width Compression Module

[0048] The pulse width compression module 8 has the following optical path structure: the optical pulse is incident to the third beam splitter 802 (SIGMA OBCL20-1064-R5) through the second beam splitter 801 (SIGMA OBCL20-1064-R5), part of the optical pulse passing through the third beam splitter 802 is transmitted to the eighty-first mirror 804 (Hengyuan Optics GMH12-005-AU mirror), the optical pulse is reflected by the eighty-first mirror 804 and then is reflected by the eighty-second mirror 805 (Hengyuan Optics GMH12-005-AU mirror) and the eighty-third mirror 806 (Hengyuan Optics GMH12-005-AU mirror) in turn, the optical pulse reflected by the eighty-third mirror 806 is incident to the ninth grating 812 (LightSmyth LSFSG-1000-3225-94 grating), the ninth grating 812 reflects the optical pulse to the tenth grating 813 (LightSmyth LSFSG-1000-3225-94 grating), the tenth grating 813 reflects the optical pulse to the eighty-fourth mirror 814 (Hengyuan Optics GMH12-005-AU mirror), the optical pulse is reflected back to the ninth grating 812 along the input route after reaching the eighty-fourth mirror 814, the ninth grating 812 transmits the optical pulse to the eighty-fifth mirror 815 (Hengyuan Optics GMH12-005-AU mirror), the optical pulse is reflected by the eighty-fifth mirror 815 to the eighty-sixth mirror 817 (Hengyuan Optics GMH12-005-AU mirror), and then is incident to the nineteenth convex lens 835 (Hengyuan Optics GLH12-002-002-NIR convex lens) through the eighty-sixth mirror 817, another part of the optical pulse output from the third beam splitter 802 is transmitted to the eighty-seventh mirror 807 (Hengyuan Optics GMH12-005-AU mirror), the optical pulse is reflected by the eighty-seventh mirror 807 and then is reflected by the eighty-eighth mirror 808 (Hengyuan Optics GMH12-005-AU mirror), the eighty-ninth mirror 809 (Hengyuan Optics GMH12-005-AU mirror), the ninetieth mirror 810 (Hengyuan Optics GMH12-005-AU mirror) and the ninety-first mirror 811 (Hengyuan Optics GMH12-005-AU mirror) in turn, the optical pulse reflected by the ninety-first mirror 811 enters the ninth grating 812 in parallel with the optical pulse reflected by the eighty-third mirror 806, and then returns to the ninth grating 812 along the input route through the tenth grating 813 and the eighty-fourth mirror 814, the optical pulse is transmitted to the eighty-fifth mirror 815 by the ninth grating 812, and then is reflected by the eighty-fifth mirror 815 to the ninety-second mirror 816 (Hengyuan Optics GMH12-005-AU mirror), and then is incident to the nineteenth convex lens 835 through the ninety-second mirror 816,The light pulse is transmitted by the other output end of the second beam splitter 801 to the ninety-third mirror 818 (Gooch & Housego GMH12-005-AU mirror), transmitted through the ninety-third mirror 818 to the fourth beam splitter 819 (SIGMA Optics C20-1064-R5), and the light pulse is transmitted through the fourth beam splitter 819 to the ninety-fourth mirror 820 (Gooch & Housego GMH12-005-AU mirror), and the light pulse is reflected by the ninety-fourth mirror 820 in turn to the ninety-fifth mirror 821 (Gooch & Housego GMH12-005-AU mirror), the ninety-sixth mirror 822 (Gooch & Housego GMH12-005-AU mirror), and the ninety-seventh mirror 823 (Gooch & Housego GMH12-005-AU mirror), and the light pulse reflected by the ninety-seventh mirror 823 is incident on the eleventh grating 829 (LightSmyth LSFSG-1000-3225-94 grating), the eleventh grating 829 reflects the light pulse to the twelfth grating 830 (LightSmyth LSFSG-1000-3225-94 grating), the twelfth grating 830 reflects the light pulse to the ninety-eighth mirror 831 (Gooch & Housego GMH12-005-AU mirror), and the light pulse reaches the ninety-eighth mirror 831 and is reflected back to the eleventh grating 829 along the input route, the eleventh grating 829 transmits the light pulse to the ninety-ninth mirror 832 (Gooch & Housego GMH12-005-AU mirror), and the light pulse is reflected by the ninety-ninth mirror 832 to the one-hundredth mirror 834 (Gooch & Housego GMH12-005-AU mirror), and is incident on the nineteenth convex lens 835 (Gooch & Housego GLH12-002-002-NIR convex lens) through the one-hundredth mirror 834, and the other part of the light pulse output from the fourth beam splitter 819 is transmitted to the one-hundred-and-first mirror 824 (Gooch & Housego GMH12-005-AU mirror), and the light pulse is reflected by the one-hundred-and-first mirror 824 in turn to the one-hundred-and-second mirror 825 (Gooch & Housego GMH12-005-AU mirror), the one-hundred-and-third mirror 826 (Gooch & Housego GMH12-005-AU mirror), the one-hundred-and-fourth mirror 827 (Gooch & Housego GMH12-005-AU mirror), and the one-hundred-and-fifth mirror 828 (Gooch & Housego GMH12-005-AU mirror), and the light pulse reflected by the one-hundred-and-fifth mirror 828 enters the eleventh grating 829 in parallel with the light pulse reflected by the ninety-seventh mirror 823, and then passes through the twelfth grating 830, the ninety-eighth mirror 831, and returns to the eleventh grating 829 along the input route, and the light pulse is transmitted by the eleventh grating 829 to the ninety-ninth mirror 832, and the light pulse is reflected by the ninety-ninth mirror 832 to the one-hundred-and-sixth mirror 833 (Gooch & Housego GMH12-005-AU mirror),The fourth beam of light pulses is reflected by the 106th mirror 833 to the 19th convex lens 835, and the four beams of light pulses respectively pass through the 92nd mirror 816, the 86th mirror 817, the 106th mirror 833 and the 100th mirror 834 to enter the 19th convex lens 835 in parallel, and the light pulses are focused after passing through the 19th convex lens 835 (GLH12-002-002-NIR convex lens of Hengyuan Optics), and then fused, and the fused light pulses are reflected by the 107th mirror 836 (GMH12-005-AU mirror of Hengyuan Optics) to the 108th mirror 837 (GMH12-005-AU mirror of Hengyuan Optics), reflected by the 108th mirror 837 to the 13th half wave plate 838 (WPZ2310-248 half wave plate of Hengyuan Optics), and then enter the seventh polarization beam splitter 839 (QTFBC-1216 polarization beam splitter of Kongtum) through the 13th half wave plate 838, and the light pulses output by the output end parallel to the incident direction of the seventh polarization beam splitter 839 are transmitted to the 109th mirror 840 (GMH12-005-AU mirror of Hengyuan Optics), reflected by the 109th mirror 840 to the 110th mirror 841 (GMH12-005-AU mirror of Hengyuan Optics), reflected by the 110th mirror 841 to the 111th mirror 842 (GMH12-005-AU mirror of Hengyuan Optics), and then reflected by the 112th mirror 843 (GMH12-005-AU mirror of Hengyuan Optics) to the 20th convex lens 844 (GLH12-002-002-NIR convex lens of Hengyuan Optics), and then the light pulses enter the 113th mirror 845 (GMH12-005-AU mirror of Hengyuan Optics) through the 20th convex lens 844, and the light pulses output by the 113th mirror 845 are transmitted to the 114th mirror 847 (GMH12-005-AU mirror of Hengyuan Optics) through the 14th half wave plate 846 (WPZ2310-248 half wave plate of Hengyuan Optics), and then reflected by the 114th mirror 847 to the second concave mirror 849 (GMH-13 concave mirror of Hengyuan Optics), and then enter the third concave mirror 851 (GMH-13 concave mirror of Hengyuan Optics) through the BBO crystal 850 (β-BaB2O4 crystal), and then reflected by the third concave mirror 851 to the 115th mirror 852 (GMH12-005-AU mirror of Hengyuan Optics), and the light pulses output by the seventh polarization beam splitter 839 perpendicular to the incident direction are reflected by the 117th mirror 857 (GMH12-005-AU mirror of Hengyuan Optics) and then fused with the light pulses reflected by the 115th mirror 852, and the fused light pulses enter the fifth beam splitter 853,The light pulse output from the fifth beam splitter 853 (SIGMAOBCL20-1064-R5) is incident on the fourth concave mirror 854. The light pulse then passes through the fourth concave mirror 854 (Hengyang Optics GMH-13 concave mirror), then through the MgO:PPLN crystal 855 (Covesion MSFG578-0.5), and finally onto the fifth concave mirror 856 (Hengyang Optics GMH-13 concave mirror). The light pulse is then reflected by the fifth concave mirror 856 to the 116th reflector 848 (Hengyang Optics GMH12-005-AU reflector), and finally incident on the second concave mirror. The optical pulse is transmitted through mirror 849, then through BBO crystal 850, third concave mirror 851, 115th reflector 852, fifth beam splitter 853, fourth concave mirror 854, MgO:PPLN crystal 855, fifth concave mirror 856, and 116th reflector 848. After multiple reflections, the optical pulse returns to the third concave mirror 851, and is then transmitted through the third concave mirror 851 to the 21st convex lens 858 (Hengyang Optics GLH12-002-002-NIR convex lens). The output of the 21st convex lens 858 is the output of the pulse width compression module, and finally, the optical pulse is output. The pulse width compression module 8 further compresses the pulse width and shifts the center wavelength of the optical pulse, outputting a deep ultraviolet pulse.

[0049] Example 10: Working principle of the present invention

[0050] The working principle of the present invention will be explained in conjunction with the above embodiments and accompanying drawings.

[0051] The seed pulse source 1, with its three-ring mode-locked fiber laser cavity, generates two different types of pulse outputs: high-power noise-like pulses and dissipative soliton resonance pulses. The pulse width extension module 2 compresses the pulse spectral width to prevent damage to the amplified devices. The acousto-optic modulator 302 reduces the optical pulse repetition frequency, allowing for higher pulse energy in subsequent structures. Because the very short femtosecond pulses are accompanied by extremely wide bandwidths, these broadband pulses experience gain narrowing during amplification. The spectral shaping structure, composed of the fourth grating 501, the first concave mirror 502, the fifteenth mirror 503, and the seventh mirror, pre-compensates for this gain narrowing effect, compressing the pulse width. The energy amplification module 6 uses multi-channel multiplexing technology for power amplification. The pulse width compression module 8 is designed to further compress the pulse width by using a multi-path pulse compression structure of grating pairs and optical lenses. Finally, the optical pulse uses nonlinear crystal barium borate and periodically polarized magnesium oxide-doped lithium niobate to achieve the final center wavelength shift, resulting in deep ultraviolet ultrashort pulse output.

Claims

1. An ultrashort optical pulse generation system based on pulse width compression technology, the structure of which is as follows: the output end of the seed pulse source (1) is connected to the input end of the pulse width expansion module (2), the output end of the pulse width expansion module (2) is connected to the input end of the energy pre-amplification module (3), the output end of the energy pre-amplification module (3) is connected to the input end of the multi-channel pulse segmentation module (4), the output end of the multi-channel pulse segmentation module (4) is connected to the input end of the dispersion management module (5), the output end of the dispersion management module (5) is connected to the input end of the energy amplification module (6), the output end of the energy amplification module (6) is connected to the input end of the pulse coherence superposition module (7), and the output end of the pulse coherence superposition module (7) is connected to the input end of the pulse width compression module (8); The structure of the seed pulse source (1) is as follows: the first pump source (101) is connected to the 980nm end of the first wavelength division multiplexer (102), the common end of the first wavelength division multiplexer (102) is connected to the input end of the first isolator (104) through the first ytterbium-doped fiber (103), the output end of the first isolator (104) is connected to the input end of the first half-wave delayer (106) through the dispersion compensation fiber (105), the output end of the first half-wave delayer (106) is connected to the input end of the first quarter-wave delayer (107), the output end of the first quarter-wave delayer (107) is connected to the polarizer (108), the polarizer (108) is connected to the input end of the second half-wave delayer (109), and the second half-wave delayer (109) is connected to the input end of the second half-wave delayer (109). The output of 09) is connected to the input of the third coupler (115). 90% of the direct output of the third coupler (115) is connected to the input of the second coupler (110). 90% of the direct output of the second coupler (110) is connected to the 1060nm end of the second wavelength division multiplexer (111). The 980nm end of the second wavelength division multiplexer (111) is connected to the second pump source (112). The common end of the second wavelength division multiplexer (111) is connected to the 90% output of the first coupler (114) via the second ytterbium-doped fiber (113). The input of the first coupler (114) is connected to the 1060nm end of the first wavelength division multiplexer (102). The other input of the third coupler (115) is connected to the second... Port 3 of the first optical circulator (120) is connected. Port 1 of the first optical circulator (120) is connected to the input of the fourth coupler (121). Port 2 of the first optical circulator (120) is connected to the common terminal of the third wavelength division multiplexer (117). The third pump source (116) is connected to the 980nm terminal of the third wavelength division multiplexer (117). The 1060nm terminal of the third wavelength division multiplexer (117) is connected to Port 2 of the second optical circulator (119) via the third ytterbium-doped fiber (118). Port 1 of the second optical circulator (119) is connected to the 10% coupled output terminal of the third coupler (115). Port 3 of the second optical circulator (119) is connected to the 80% direct output terminal of the fourth coupler (121). The other input of the coupler (121) is connected to the input of the second quarter-wave delay (122). The output of the second quarter-wave delay (122) is connected to the input of the single-mode fiber (123) twisted with 5 turns / m. The output of the single-mode fiber (123) twisted with 5 turns / m is connected to the 10% coupling output of the fourth coupler (121) via the single-mode fiber (124). The 10% coupling output of the first coupler (114) is connected to port one of the third optical circulator (125). The 10% coupling output of the second coupler (110) is connected to port two of the third optical circulator (125). Port three of the third optical circulator (125) is the output of the seed pulse source. The pulse width extension module (2) has the following optical path structure: the light pulse is transmitted to the first grating (202) via the first reflector (201), the first grating (202) transmits the light pulse to the second reflector (203), and then reflects it to the third reflector (204). The third reflector (204) reflects the light pulse back to the first grating (202). The pulse output by the first grating (202) is transmitted to the fourth reflector (206) via the first convex lens (205), and then reflected back to the first grating (202) via the first convex lens (205). The light pulse is then transmitted to the second reflector (202) via the first grating (202). (203) The second reflector (203) reflects the light pulse and then it is reflected by the third reflector (204) and then incident on the first grating (202). The light pulse output by the first grating (202) is incident on the porro prism (207) and reflected back to the first grating (202) by the porro prism (207). After passing through the first grating (202), the light pulse passes through the second reflector (203), the third reflector (204), the first grating (202), the first convex lens (205), and the fourth reflector (206) again. After multiple reflections, it returns to the first grating (202) and is output through the first grating (202). The energy pre-amplification module (3) has the following optical path structure: the light pulse is incident on the second convex lens (301), and after passing through the second convex lens (301), the acousto-optic modulator (302), the third convex lens (303), the second isolator (304), and the first half-wave plate (305), the light pulse is incident on the fifth reflector (306). After being reflected by the fifth reflector (306) to the sixth reflector (307), the light pulse is incident on the fourth convex lens (308). After passing through the fourth convex lens (308), the first collimator (309), the fourth ytterbium-doped fiber (310), the second collimator (311), and the fifth convex lens (312), the light pulse is incident on the seventh reflector (313). The pump light generated by the first photodiode (316) is fused with the light pulse previously incident on the seventh reflector (313) after passing through the third collimator (315) and the sixth convex lens (314). The light pulse is reflected by the seventh mirror (313) to the eighth mirror (317), and the eighth mirror (317) reflects the light pulse to the second half-wave plate (318). The light pulse passes through the second half-wave plate (318), the first quarter-wave plate (319), the bandpass filter (320), and the third half-wave plate (321) before being incident on the second grating (325). The light pulse is transmitted through the second grating (325) to the third grating (326), and the third grating (326) transmits the light pulse to the ninth mirror (327). The ninth mirror (327) reflects the pulse back to the third grating (326), and the light pulse is transmitted through the third grating (326) to the second grating (325). The light pulse output from the second grating (325) is transmitted to the tenth mirror (322) and reflected by the tenth mirror (322) to the fourth half-wave plate (323), and finally output through the first polarization beam splitter (324). The multi-channel pulse splitting module (4) has the following optical path structure: the light pulse is incident on the input end of the second polarization beam splitter (402) through the fifth half-wave plate (401), and the light pulse is transmitted from the output end of the second polarization beam splitter (402) perpendicular to the incident direction through the second quarter-wave plate (403) to the eleventh mirror (404). The eleventh mirror (404) reflects the light pulse back to the second quarter-wave plate (403), and the second quarter-wave plate (403) transmits the light pulse to the second polarization beam splitter (402) again. At the same time, the light pulse is transmitted from the other output end of the second polarization beam splitter (402) perpendicular to the incident direction through the third quarter-wave plate (405) to the twelfth mirror (406) and the first piezoelectric driver (407). The light pulse is then reflected back to the third quarter-wave plate (405) by the twelfth mirror (406), and the third quarter-wave plate (405) transmits the light pulse back to the second polarization beam splitter (402) again. The light pulse is then transmitted from the second polarization beam splitter (402) through the second half-wave plate (401) to the input end of the second polarization beam splitter (402). 02) The output from the port parallel to the incident direction is transmitted to the third polarization beam splitter (409) via the sixth half-wave plate (408). The light pulse is transmitted from the port of the third polarization beam splitter (409) perpendicular to the incident direction via the fourth quarter-wave plate (410) to the thirteenth mirror (411). The thirteenth mirror (411) reflects the light pulse back to the fourth quarter-wave plate (410), and the fourth quarter-wave plate (410) transmits the light pulse back to the third polarization beam splitter (409) again. The light pulse is transmitted from another port of the third polarization beam splitter (409) perpendicular to the incident direction through the fifth quarter-wave plate (412) to the fourteenth mirror (413) and the second piezoelectric driver (414). The light pulse is then reflected back to the fifth quarter-wave plate (412) by the fourteenth mirror (413). The fifth quarter-wave plate (412) transmits the light pulse to the third polarization beam splitter (409) again. The light pulse is then output from the output end of the third polarization beam splitter (409) parallel to the incident direction. The dispersion management module (5) has the following optical path structure: the light pulse is reflected by the fourth grating (501) to the first concave mirror (502), the first concave mirror (502) reflects the light pulse to the fifteenth mirror (503), the light pulse is reflected by the fifteenth mirror (503) to the first concave mirror (502), and then transmitted to the fourth grating (501) via the first concave mirror (502). After passing through the fourth grating (501), the light pulse is transmitted again via the first concave mirror (502) and the fifteenth mirror (503). After multiple reflections, the light pulse returns to the fourth grating (501), the fourth grating (501) reflects the light pulse to the sixteenth mirror (504), and the light pulse is transmitted through the sixteenth mirror (503) to the fourth grating (501). 4) The light pulse is transmitted to the seventeenth reflector (505), then to the eighteenth reflector (506), and then to the nineteenth reflector (507). The light pulse undergoes spectral shaping through the seven reflectors in sequence. After being reflected by the twentieth reflector (508), the twenty-first reflector (509), the twenty-second reflector (510), the twenty-third reflector (511), the twenty-fourth reflector (512), the twenty-fifth reflector (513), and the twenty-sixth reflector (514), the light pulse is incident on the twenty-seventh reflector (515). The output of the twenty-seventh reflector (515) is the output of the dispersion management module. The energy amplification module (6) has the following optical path structure: a light pulse is incident on the input end of the first beam splitter (601), and is transmitted from the output end of the first beam splitter (601) to the twenty-eighth reflector (602). The light pulse is reflected by the twenty-eighth reflector (602) to the twenty-ninth reflector (603), and then reflected by the twenty-ninth reflector (603) to the thirtieth reflector (604). The thirtieth reflector (604) reflects the light pulse to the thirty-first reflector (605). The light pulse is reflected by the thirty-first reflector (605) to the seventh convex lens (606). After passing through the seventh convex lens (606), the eighth convex lens (607), and the first dichroic mirror (608), the light pulse passes through the first dichroic mirror (608). The transmitted light pulse merges with the light pulse reflected from the sixty-fifth mirror (692) to the first dichroic mirror (608) and then reflected back. The merged light pulse is transmitted through the first dichroic mirror (608) to the first KTiAsO4 crystal (609), and then through the first KTiAsO4 crystal (609) to the second dichroic mirror (610). The short-wavelength light pulse reflected from the second dichroic mirror (610) is transmitted to the thirty-second mirror (688), and the long-wavelength light pulse transmitted from the second dichroic mirror (610) is transmitted to the third dichroic mirror (611). The light pulse reflected from the third dichroic mirror (611) is transmitted to the thirty-third mirror (689), and the light pulse transmitted from the third dichroic mirror (611) is incident on the third dichroic mirror (611). Fourteen mirrors (612) reflect the light pulse to thirty-fifth mirrors (613), then to the ninth convex lens (614), and then to the tenth convex lens (615). After passing through the tenth convex lens (615), the light pulse is incident on the thirty-sixth mirror (616), reflected by the thirty-sixth mirror (616) to the thirty-seventh mirror (617), then to the thirty-eighth mirror (618), then to the thirty-ninth mirror (619), and finally to the fourth dichroic mirror (620). The light pulse is transmitted from the dichroic mirror (620) to the second KTiAsO4 crystal (621), and then transmitted from the second KTiAsO4 crystal (621) to the fifth dichroic mirror (622). The light pulse reflected from the fifth dichroic mirror (622) is transmitted to the fortieth mirror (690), and then transmitted from the fifth dichroic mirror (622) to the sixth dichroic mirror (623). The light pulse reflected from the sixth dichroic mirror (623) is transmitted to the forty-first mirror (691), and then transmitted from the sixth dichroic mirror (623) to the eleventh convex lens (624). The light pulse transmitted from the eleventh convex lens (624) is transmitted to the twelfth convex lens (625), and then transmitted from the twelfth convex lens (625) to the fifth grating (627).The fifth grating (627) reflects the light pulse to the sixth grating (628), the sixth grating (628) reflects the light pulse to the first roof mirror (629), and after reaching the first roof mirror (629), the light pulse is reflected back to the fifth grating (627) along the input path. The fifth grating (627) transmits the light pulse to the forty-second mirror (626), the light pulse is reflected by the forty-second mirror (626) to the forty-third mirror (630), then by the forty-third mirror (630) to the forty-fourth mirror (631), by the forty-fourth mirror (631) to the forty-fifth mirror (632), by the forty-fifth mirror (632) to the forty-sixth mirror (633), and by the forty-sixth mirror (633) to the forty-sixth mirror (633). 33) The light pulse is reflected to the knife-edge prism (684) and transmitted from the other output end of the first beam splitter (601) to the forty-seventh mirror (634). The light pulse is reflected by the forty-seventh mirror (634) to the forty-eighth mirror (635), then to the forty-ninth mirror (636), then to the fiftieth mirror (637), and finally to the fifty-first mirror (638). The light pulse is reflected by the fifty-first mirror (638) to the thirteenth convex lens (639). After passing through the thirteenth convex lens (639) and the fourteenth convex lens (640), the light pulse is incident on the seventh dichroic mirror (640). (641) After the light pulse is transmitted through the seventh dichroic mirror (641), it merges with the light pulse reflected after being incident on the seventh dichroic mirror (641) along the sixty-eighth reflecting mirror (693). The merged light pulse is incident on the third KTiAsO4 crystal (642) through the seventh dichroic mirror (641). The light pulse is transmitted through the third KTiAsO4 crystal (642) to the eighth dichroic mirror (643). The light pulse reflected from the eighth dichroic mirror (643) is reflected to the fifty-second reflecting mirror (644). The light pulse transmitted from the eighth dichroic mirror (643) is transmitted to the ninth dichroic mirror (645). The light pulse reflected by the ninth dichroic mirror (645) is transmitted to the fifty-third reflecting mirror (646). The light pulse transmitted by the ninth dichroic mirror (645) is incident on the third KTiAsO4 crystal (642). The light pulse is reflected by the 54th reflector (647) to the 55th reflector (648), then by the 55th reflector (648) to the 15th convex lens (649). The light pulse then passes through the 15th convex lens (649) and the 16th convex lens (650), and is incident on the 56th reflector (651). The light pulse is reflected by the 56th reflector (651) to the 57th reflector (652), then by the 57th reflector (652) to the 58th reflector (653), then by the 58th reflector (653) to the 59th reflector (654), and finally by the 59th reflector (654) to the 10th dichroic mirror (655). The light pulse is then transmitted and output through the 10th dichroic mirror (655).The light pulse, after being reflected by the sixty-ninth mirror (683) to the tenth dichroic mirror (655), is fused and incident on the fourth KTiAsO4 crystal (656). The light pulse is then transmitted through the fourth KTiAsO4 crystal (656) to the eleventh dichroic mirror (657). The light pulse reflected from the eleventh dichroic mirror (657) is transmitted to the sixtieth mirror (658). The light pulse transmitted from the eleventh dichroic mirror (657) is transmitted to the twelfth dichroic mirror (659). The light pulse reflected from the twelfth dichroic mirror (659) is transmitted to the sixty-first mirror (660). The light pulse transmitted from the twelfth dichroic mirror (659) is incident on the seventeenth convex lens (661) and transmitted through the seventeenth convex lens (661). The light pulse is incident on the 18th convex lens (662) and then onto the 7th grating (663). The 7th grating (663) reflects the light pulse onto the 8th grating (664), which in turn reflects it onto the 2nd roof mirror (665). After reaching the 2nd roof mirror (665), the light pulse is reflected back to the 7th grating (663) along the input path. The 7th grating (663) then transmits the light pulse to the 62nd mirror (666). The light pulse is reflected by the 62nd mirror (666) to the 63rd mirror (667), then to the 64th mirror (668), and finally to the knife-edge prism (684). The light pulse pumped by the laser (669) is transmitted to the thirteenth dichroic mirror (670). The light pulse reflected from the thirteenth dichroic mirror (670) passes through the seventh half-wave plate (671) and is incident on the first thin-film polarizer (672). The parallel polarized light pulse transmitted through the first thin-film polarizer (672) is incident on the sixty-fifth mirror (692). After being reflected by the sixty-fifth mirror (692) to the first dichroic mirror (608), the vertically polarized light pulse reflected by the first thin-film polarizer (672) is incident on the second thin-film polarizer (673). After being reflected by the second thin-film polarizer (673), the light pulse passes through the eighth half-wave plate (674) and the fifth ytterbium-doped fiber (675) and is transmitted to the sixty-sixth mirror (676). 6) The light pulse is reflected by the sixty-sixth mirror (676) to the fourth dichroic mirror (620). The light pulse reflected by the fourth dichroic mirror (620) merges with the light pulse that is incident on the fourth dichroic mirror (620) through the thirty-ninth mirror (619) and then transmitted out through the fourth dichroic mirror (620). The merged light pulse is incident on the second KTiAsO4 crystal (621). The light pulse output from the thirteenth dichroic mirror (670) is transmitted to the ninth half-wave plate (678) through the sixty-seventh mirror (677). The light pulse is incident on the third thin-film polarizer (679) through the ninth half-wave plate (678). The parallel polarized light pulse transmitted out through the third thin-film polarizer (679) is incident on the sixty-eighth mirror (693).The light pulse is reflected by the sixty-eighth mirror (693) to the seventh dichroic mirror (641). The vertically polarized light pulse reflected by the third thin-film polarizer (679) is incident on the fourth thin-film polarizer (680). After being reflected by the fourth thin-film polarizer (680), the light pulse is transmitted through the tenth half-wave plate (681) and the sixth ytterbium-doped fiber (682) to the sixty-ninth mirror (683). The light pulse is reflected by the sixty-ninth mirror (683) to the tenth dichroic mirror (655). Finally, two light pulses with the same energy and pulse duration are incident on the knife-edge prism (684). The light pulses are transmitted through the knife-edge prism (684) to the seventieth mirror (685). The light pulses are reflected by the seventieth mirror (685) to the seventy-first mirror (686) and then to the CaF2 lens (687). The two light pulses are merged by the CaF2 lens (687) and then output. The pulse coherence superposition module (7) has the following optical path structure: the optical pulse is output from the output end of the fourth polarization beam splitter (701) perpendicular to the incident direction; the optical pulse is reflected by the seventy-second mirror (702) to the seventy-third mirror (703), reflected by the seventy-third mirror (703) to the seventy-fourth mirror (704), reflected by the seventy-fourth mirror (704) to the seventy-fifth mirror (705), reflected by the seventy-fifth mirror (705) back to the fourth polarization beam splitter (701), and then output from the output end of the fourth polarization beam splitter (701) parallel to the incident direction. After being output from the fourth polarization beam splitter (701), the optical pulse is transmitted to the fifth polarization beam splitter (707) via the eleventh half-wave plate (706). The optical pulse travels along the fifth polarization beam splitter (707)... The light pulse is transmitted from the output end perpendicular to the incident direction to the seventy-sixth mirror (708). The light pulse is reflected by the seventy-sixth mirror (708) to the seventy-seventh mirror (709), then by the seventy-seventh mirror (709) to the seventy-eighth mirror (710), then by the seventy-eighth mirror (710) to the seventy-ninth mirror (711), and then by the seventy-ninth mirror (711) back to the fifth polarization beam splitter (707). The light pulse is output from another output end parallel to the incident direction of the fifth polarization beam splitter (707). The light pulse is transmitted from the fifth polarization beam splitter (707) to the twelfth half-wave plate (712), then by the twelfth half-wave plate (712) to the sixth polarization beam splitter (713), and finally output from the sixth polarization beam splitter (713). The pulse width compression module (8) has the following optical path structure: the light pulse is incident on the third beam splitter (802) after passing through the second beam splitter (801). Part of the light pulse after passing through the third beam splitter (802) is transmitted to the 80th reflector (803). After being reflected by the 80th reflector (803), the light pulse is reflected in sequence by the 81st reflector (804), the 82nd reflector (805), and the 83rd reflector (806). The light pulse reflected by the 83rd reflector (806) is incident on the 9th grating (812). The 9th grating (812) reflects the light pulse to the 10th grating (813). The 10th grating (813) reflects the light pulse to the 84th reflector (814). The light pulse reaches the 84th reflector (814). The light pulse is reflected back to the ninth grating (812) after passing through the mirror (814) along the input path. The ninth grating (812) transmits the light pulse to the eighty-fifth mirror (815). The light pulse is reflected by the eighty-fifth mirror (815) to the eighty-sixth mirror (817). It is then incident on the nineteenth convex lens (835) through the eighty-sixth mirror (817). Another part of the light pulse output from the third beam splitter (802) is transmitted to the eighty-seventh mirror (807). After being reflected by the eighty-seventh mirror (807), the light pulse passes sequentially through the eighty-eighth mirror (808), the eighty-nineth mirror (809), the ninetieth mirror (810), and the ninety-first mirror (811). The light pulse reflected by the ninety-first mirror (811) The light pulse reflected by the 83rd mirror (806) enters the 9th grating (812) in parallel, then passes through the 10th grating (813), the 84th mirror (814), and returns to the 9th grating (812) along the input path. The light pulse is then transmitted from the 9th grating (812) to the 85th mirror (815), reflected by the 85th mirror (815) to the 92nd mirror (816), and incident on the 19th convex lens (835) through the 92nd mirror (816). The light pulse is then transmitted from the other output end of the second beam splitter (801) to the 93rd mirror (818), and then transmitted through the 93rd mirror (818) to the fourth beam splitter (819). The light pulse passes through the fourth beam splitter (819) and is then transmitted to the 93rd mirror (818). Part of the pulse is transmitted to the ninety-fourth reflector (820). After being reflected by the ninety-fourth reflector (820), the light pulse is reflected in sequence by the ninety-fifth reflector (821), the ninety-sixth reflector (822), and the ninety-seventh reflector (823). The light pulse reflected by the ninety-seventh reflector (823) is incident on the eleventh grating (829). The eleventh grating (829) reflects the light pulse to the twelfth grating (830). The twelfth grating (830) reflects the light pulse to the ninety-eighth reflector (831). After reaching the ninety-eighth reflector (831), the light pulse is reflected back to the eleventh grating (829) along the input path. The eleventh grating (829) transmits the light pulse to the ninety-ninth reflector (832).The light pulse is reflected by the 99th mirror (832) to the 100th mirror (834), and then incident on the 19th convex lens (835) via the 100th mirror (834). Another portion of the light pulse output from the fourth beam splitter (819) is transmitted to the 101st mirror (824). After being reflected by the 101st mirror (824), the light pulse passes sequentially through the 102nd mirror (825), the 103rd mirror (826), the 104th mirror (827), and the 105th mirror (828). The light pulse reflected by the 105th mirror (828) and the light pulse reflected by the 97th mirror (823) enter the 11th grating (829) in parallel, and then pass through the 12th grating (830), the 19th convex lens (835), and the 105th convex lens (835). The light pulse is transmitted from the 98th mirror (831) and returns to the 11th grating (829) along the input path. The light pulse is transmitted from the 11th grating (829) to the 99th mirror (832), and then reflected by the 99th mirror (832) to the 106th mirror (833). The light pulse is then incident on the 19th convex lens (835) through the 106th mirror (833). The four light pulses, which pass through the 92nd mirror (816), the 86th mirror (817), the 106th mirror (833), and the 100th mirror (834), enter the 19th convex lens (835) in parallel. The light pulses are focused and merged by the 19th convex lens (835), and the merged light pulse is reflected by the 107th mirror (836). The light pulse is incident on the 108th reflector (837), and is reflected by the 108th reflector (837) to the 13th half-wave plate (838). After passing through the 13th half-wave plate (838), it is incident on the 7th polarization beam splitter (839). The light pulse output from the output end of the 7th polarization beam splitter (839) parallel to the incident direction is transmitted to the 109th reflector (840). The light pulse is reflected by the 109th reflector (840) to the 110th reflector (841), and then reflected by the 111th reflector (842) to the 112th reflector (843). The light pulse reflected by the 112th reflector (843) is incident on the 20th convex lens (844). The light pulse is incident on the 113th mirror (845) after passing through the 20th convex lens (844). The light pulse output from the 113th mirror (845) is transmitted to the 114th mirror (847) through the 14th half-wave plate (846). The light pulse is reflected by the 114th mirror (847) to the second concave mirror (849), and then incident on the third concave mirror (851) through the BBO crystal (850). The light pulse is reflected by the third concave mirror (851) to the 115th mirror (852). The light pulse output perpendicular to the incident direction by the seventh polarizing beam splitter (839) is reflected by the 117th mirror (857) and then merged with the light pulse reflected by the 115th mirror (852).The fused light pulse is incident on the fifth beam splitter (853). The light pulse output from the fifth beam splitter (853) is incident on the fourth concave mirror (854). The light pulse passes through the fourth concave mirror (854), then through the MgO:PPLN crystal (855), and then through the fifth concave mirror (856). The light pulse is reflected by the fifth concave mirror (856) to the 116th mirror (848), and then through the 116th mirror (848) to the second concave mirror (849). The light pulse is transmitted to the second concave mirror (849) and then through the BBO crystal (855). (850), third concave mirror (851), 115th reflector (852), fifth beam splitter (853), fourth concave mirror (854), MgO:PPLN crystal (855), fifth concave mirror (856), 116th reflector (848). After multiple reflections, the light pulse returns to the third concave mirror (851). The light pulse is transmitted through the third concave mirror (851) to the twenty-first convex lens (858). The output of the twenty-first convex lens (858) is the output of the pulse width compression module, and finally, the light pulse is output.

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