A method for angle calibration and error analysis of a wide-angle arc detector

Abstract

This invention provides a method for angle calibration and error analysis of a wide-angle arc detector, comprising: determining at least three diffraction peak data of a standard sample and calibrating a first parameter, a second parameter, and a third parameter based on the diffraction peak data; establishing analytical expressions for the first parameter, the second parameter, and the third parameter; solving for the first parameter, the second parameter, and the third parameter based on the analytical expressions for the first parameter, the second parameter, and the third parameter; obtaining the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test based on the first parameter, the second parameter, and the third parameter; and using matrix formulas to solve for the error of the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test. This invention solves the problems of limited descriptions of arc detector calibration in existing technologies and the large errors in measuring samples with arc detectors.

Description

Technical Field

[0001] This invention relates to the field of detector angle calibration technology, and in particular to a method for angle calibration and error analysis of a wide-angle arc detector. Background Technology

[0002] Wide-angle X-ray scattering (WAXS) or diffraction (WAXD or XRD) is a common physical method for characterizing the ordered structure of materials (such as crystals). It can measure the structure of crystals, such as interplanar spacing, lamellar size, and stacking height. For example, for incident X-rays of 8 keV, the required angle is usually less than 90°. WAXS, after Fourier transform, can also measure the radial distribution function (RDF) of amorphous materials with long-range disorder and short-range order, thereby obtaining fine structural information such as the coordination number, coordination distance, short-range ordered domains, amorphous quality, and true density. However, it requires a wide measurement angle range to effectively suppress the cutoff effect of the Fourier transform. For example, for incident light of 8 keV, the maximum angle should preferably not be less than 120°. Due to size limitations, conventional detectors can only record intensity information over such a wide angle range by scanning, which is time-consuming and makes in-situ measurements difficult. One-dimensional arc detectors can cover a wide range of angles in a single exposure. Combined with a high-intensity synchrotron radiation source, the requirements for in-situ RDF measurement can be met. Although the arc detector is one-dimensional, it can be used to characterize isotropic structural materials.

[0003] A one-dimensional arc detector has a center point called the detector center. The measured angle is accurate only if the sample is located at the center and the incident light passes through it; otherwise, a certain error will occur. Although mechanical adjustments can reduce this error, calibration with a standard sample is still an effective method to improve accuracy. Perhaps because arc detectors are not yet widely used, there are few reports on their calibration. Summary of the Invention

[0004] To overcome the shortcomings of the prior art, the purpose of this invention is to provide a method for angle calibration and error analysis of a wide-angle arc detector. This invention solves the problems of limited information on the calibration of arc detectors and large errors in the measurement of samples by arc detectors in the prior art.

[0005] To achieve the above objectives, the present invention provides the following solution:

[0006] A method for angle calibration and error analysis of a wide-angle arc detector, comprising:

[0007] Adjust the wide-angle arc detector to match the optical path of the WAXS instrument;

[0008] Based on the calibrated wide-angle arc detector, construct the instrument geometry of the wide-angle arc detector;

[0009] Based on the instrument geometry of the wide-angle arc detector, at least three diffraction peak data of the standard sample are determined, and the first parameter, second parameter, and third parameter are calibrated based on the diffraction peak data.

[0010] Establish the analytical expressions for the first parameter, the second parameter, and the third parameter. Solve for the first parameter, the second parameter, and the third parameter based on the analytical expressions for the first parameter, the second parameter, and the third parameter respectively.

[0011] The analytical expression for the first parameter is:

[0012]

[0013] The analytical expression for the second parameter is:

[0014]

[0015] The analytical expression for the third parameter is:

[0016]

[0017] in, t l =tan(2θ) l ), l = A, B, C;

[0018] The angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test is obtained based on the first parameter, the second parameter and the third parameter;

[0019] Based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the error of the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test is solved using matrix formula.

[0020] Preferably, the adjustment of the wide-angle arc detector to match the optical path of the WAXS instrument includes:

[0021] The attitude of the wide-angle arc detector is adjusted so that the wide-angle arc detector is positioned above the sample to be tested and the beam, thus obtaining a wide-angle arc detector with the attitude adjusted.

[0022] The position of the wide-angle arc detector, which has been adjusted to the correct orientation, is adjusted so that the incident light passes through the center point of the wide-angle detector, thus obtaining a properly adjusted wide-angle arc detector.

[0023] Preferably, the step of constructing the instrument geometry of the wide-angle arc detector based on the calibrated wide-angle arc detector includes:

[0024] Obtain the relative positional relationship between the calibrated wide-angle arc detector, the sample to be tested, the incident light, and the scattered light;

[0025] The instrument geometry of the wide-angle arc detector is constructed based on the relative positional relationship.

[0026] Preferably, the formula for calculating the angle corresponding to the point on the detector of any scattered signal of the sample under test is:

[0027]

[0028] in, It is a radian measure of angles.

[0029] Preferably, the step of calculating the error of the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test using a matrix formula, based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, includes:

[0030] Based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the differential approximation error is obtained by using differential approximation.

[0031] The matrix formula is obtained by taking the composite derivative of the formula for calculating the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the analytical expression of the first parameter, the analytical expression of the second parameter, and the analytical expression of the third parameter;

[0032] Based on the solution of the matrix formula, the error of the angle corresponding to the point on the detector of any scattered signal of the sample under test is obtained.

[0033] Preferably, the expression for the differential approximation error is:

[0034]

[0035] in, 2θ A ,2θ B ,2θ C The six parameters of the three standard diffraction peaks of a standard sample are the positions on the three detectors and the angles of the three XRDs.

[0036] Preferably, the expression for the matrix formula is:

[0037]

[0038] Where i represents Figure 3 The pixel X on the arc is numbered, i = 1, 2, 3, ..., m, where i = 1 is the pixel corresponding to the integration start point O, and i = m is the pixel corresponding to the integration end point. When there are n standard diffraction peaks, there are n(n-1)(n-2) / 6 possible combinations of any three peaks selected from different diffraction peaks. j represents any one of these n(n-1)(n-2) / 6 possible combinations, i.e., j = 1, 2, 3, ..., n(n-1)(n-2) / 6. Each combination contains six known parameters. 2θ A 2θ B and 2θ C Each parameter has three possible errors: positive, negative, and zero. Therefore, there are 3 possible combinations of errors for the six parameters. 6 =729 cases, which constitute The angle error Δ2θ at a certain point X on the line X The possible distribution of X is given by k, where k represents any one of the 729 possible angle error cases for point X, i.e., k = 1, 2, 3, ..., 729.

[0039] According to specific embodiments provided by the present invention, the present invention discloses the following technical effects:

[0040] This invention provides a method for angle calibration and error analysis of a wide-angle arc detector. By adjusting the instrument and constructing the geometric relationship of the wide-angle arc detector, this invention establishes analytical formulas for parameter calibration and error analysis, analyzes the error, improves the universality of the instrument under various states and the accuracy of the detector's detection angle, and fills the gap in the existing technology for detector calibration. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 A flowchart illustrating a method for angle calibration and error analysis of a wide-angle arc detector provided in an embodiment of the present invention;

[0043] Figure 2 A schematic diagram illustrating nine relationships between the center point of the one-dimensional arc detector, the sample point, and the through X-ray provided for embodiments of the present invention;

[0044] Figure 3 This invention provides a schematic diagram illustrating the relationship between the detector, sample, incident light, and scattered light under non-ideal conditions, as part of an embodiment of the invention.

[0045] Figure 4 This is a schematic diagram of the angle calibration error distribution model of a one-dimensional arc detector provided in an embodiment of the present invention;

[0046] Figure 5 A schematic diagram of a method for angle calibration and error analysis of a wide-angle arc detector provided in an embodiment of the present invention. Detailed Implementation

[0047] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0048] The purpose of this invention is to provide a method for angle calibration and error analysis of a wide-angle arc detector. This invention solves the problems of limited calibration of arc detectors and large errors in the measurement of samples by arc detectors in the prior art.

[0049] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0050] like Figure 1 As shown, this invention provides a method for angle calibration and error analysis of a wide-angle arc detector, including:

[0051] Step 100: Adjust the wide-angle arc detector to match the optical path of the WAXS instrument;

[0052] Step 200: Based on the calibrated wide-angle arc detector, construct the instrument geometry of the wide-angle arc detector;

[0053] Step 300: Based on the instrument geometry of the wide-angle arc detector, determine at least three diffraction peak data of the standard sample and calibrate the first parameter, second parameter, and third parameter based on the diffraction peak data;

[0054] Step 400: Establish the analytical expressions for the first parameter, the second parameter, and the third parameter; and solve for the first parameter, the second parameter, and the third parameter based on the analytical expressions for the first parameter, the second parameter, and the third parameter.

[0055] Step 500: Obtain the angle corresponding to the point on the detector of the arbitrary scattering signal of the sample under test based on the first parameter, the second parameter and the third parameter;

[0056] Step 600: Based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, use the matrix formula to solve for the error of the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test.

[0057] Furthermore, the adjustment of the wide-angle arc detector to match the optical path of the WAXS instrument includes:

[0058] The attitude of the wide-angle arc detector is adjusted so that the wide-angle arc detector is positioned above the sample to be tested and the beam, thus obtaining a wide-angle arc detector with the attitude adjusted.

[0059] The position of the wide-angle arc detector, which has been adjusted to the correct orientation, is adjusted so that the incident light passes through the center point of the wide-angle detector, thus obtaining a properly adjusted wide-angle arc detector.

[0060] Specifically, the size and divergence of a synchrotron radiation beam are typically large horizontally and small vertically, resulting in higher resolution of the scattered signal in the vertical direction compared to the horizontal direction. Therefore, an arc detector is usually placed above the sample and the beam. First, the arc detector's orientation is adjusted so that it is positioned above the sample and the beam, and the photosensitive arc on the detector is in the same vertical plane as the incident light. Since the photosensitive arc of the detector has a certain width (e.g., the width of the photosensitive arc of a one-dimensional arc-shaped Mythen144K detector is 8 mm), this requirement is easily achieved. Then, the detector position is further adjusted so that the incident light approximately passes through the center point of the detector. The optical path of a WAXS instrument is generally fixed, requiring adjustment of the detector position and orientation to match the optical path.

[0061] Furthermore, the step of constructing the instrument geometry of the wide-angle arc detector based on the calibrated wide-angle arc detector includes:

[0062] Obtain the relative positional relationship between the calibrated wide-angle arc detector, the sample to be tested, the incident light, and the scattered light;

[0063] The instrument geometry of the wide-angle arc detector is constructed based on the relative positional relationship.

[0064] Specifically, the geometric relationship here refers to the relative positional relationship between the detector, sample, incident light, and scattered light. The detector center point and the sample point may or may not coincide. The sample point and the position of the direct light are fixed, meaning the incident light always passes through the sample point, but not necessarily through the detector center point. Therefore, there are a total of nine scenarios, such as... Figure 2As shown. ① represents the ideal case, while the others represent non-ideal cases. In the ideal case, the photosensitive arc of the one-dimensional arc detector, the detector center point, and the incident light are all in the same vertical plane, the sample is located at the center of the one-dimensional arc detector, and the incident X-ray passes through the detector center. In reality, non-ideal cases are likely more common. In this case, the instrument parameters and angle calibration become particularly important. Here, we use... Figure 2 Taking scenario 9 as an example, we calibrate using a standard sample and analyze the corresponding errors. Similar analysis and processing can be performed for other scenarios.

[0065] Figure 3 and Figure 2 This corresponds to situation ⑨. In this case, the center point of the one-dimensional arc detector is S′; O and P are the integration start and end points, respectively; A, B, and C are the positions of the three diffraction peaks of the standard sample on the detector; X is any point on the detector where the sample scattering signal is located; R is the detector radius, and OS′=AS′=BS′=CS′=XS′=PS′=R. The direct light EF does not pass through point S′ but passes through the sample point S, which is offset from S′. EF, O⌒P, and SS′ are coplanar, and S0=SS′. In this case, the instrument parameters become three: the angle β between the radius corresponding to the integration start point O and the horizontal line E′F′ is ∠OS′E′; the distance between S′ and S is S0=SS′; and the angle α between SS′ and the horizontal direct light is ∠SS′F′. To label these three parameters, three standard diffraction peaks are needed, whose positions on the detector are marked as A, B, and C, with corresponding angles of 2θ. A =∠ASE, 2θ B =∠BSE and 2θ C =∠CSE.

[0066] After solving for these three instrument parameters, the angle 2θ corresponding to point X on the detector of the arbitrary scattered signal of the sample can be calculated. X =∠XSE.

[0067] Based on the above instrument geometric relationships, the analytical expressions for the instrument parameters β, α, and S0 can be derived as shown in equations (1), (2), and (3), respectively:

[0068]

[0069]

[0070]

[0071] in: t l =tan(2θ) l ), l = A, B, C.

[0072] Based on known data t from the three diffraction peaks of the standard sample l , and 2θ l β, α, and S0 can be obtained from the above three equations. Then, by substituting these three instrument parameters into equation (4), 2θ can be obtained. X :

[0073]

[0074] in, It is an angle measured in radians. In fact, based on the above method, it is possible to... Figure 2 Analyzing all scenarios, the sign of the calculated S0 and α values ​​determines the scenario, as shown in Table 1. Theoretically, while the formula can be simplified for ideal scenario ①, requiring only data from one standard diffraction peak, and for scenarios ②, ④, ⑥, and ⑧, requiring only two standard diffraction peaks for calibration, in practice, it is usually difficult to predict the scenario beforehand. Using three standard diffraction peaks covers all nine possible scenarios. Therefore, the formula has universality. Table 1 shows the correspondence between instrument status and parameters, as shown below:

[0075] Table 1. Correspondence between Instrument Status and Parameters

[0076]

[0077] Furthermore, based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the error of the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test is solved using a matrix formula, including:

[0078] Based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the differential approximation error is obtained by using differential approximation.

[0079] The matrix formula is obtained by taking the composite derivative of the formula for calculating the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the analytical expression of the first parameter, the analytical expression of the second parameter, and the analytical expression of the third parameter;

[0080] Based on the solution of the matrix formula, the error of the angle corresponding to the point on the detector of any scattered signal of the sample under test is obtained.

[0081] Specifically, the above calibration requires data from the three diffraction peaks of the standard sample, i.e. Figure 3 shown and These six parameters. 2θ X It is an implicit function of these six parameters, that is

[0082]

[0083] 2θ X Error Δ2θ X Its differential δ2θ can be used X Approximately, while δ2θ X It can be expanded using the first-order Taylor formula into equation (5):

[0084]

[0085] Combining equation (5) with equations (1-4) and performing composite differentiation, we can transform the error δ²θ into a matrix representation. X Equation (6):

[0086]

[0087] In matrix (6), i represents Figure 3 middle The pixel X on the arc is numbered, i = 1, 2, 3, ..., m, where i = 1 is the pixel corresponding to the integration start point O, and i = m is the pixel corresponding to the integration end point. When there are n (>3) standard diffraction peaks, according to the permutations and combinations, there are n(n-1)(n-2) / 6 possible combinations of randomly selecting three peaks (labeled A, B, C) from different diffraction peaks. j represents any one of the n(n-1)(n-2) / 6 possible combinations, i.e., j = 1, 2, 3, ..., n(n-1)(n-2) / 6. Each combination has six known parameters. 2θ A 2θ B and 2θ C Each parameter's error has three possible values: positive, negative, and zero. As an estimate, we can assume... and The absolute value of Δ2θ is generally no greater than the size of a pixel in the detector (for example, the size of a pixel in a one-dimensional arc-shaped Mythen 144K detector is 50 μm). A Δ2θ B and Δ2θ C The absolute value is generally no greater than 0.02° (the step size of a conventional XRD instrument's step scan). Therefore, the possible combinations of errors for the six parameters are 3. 6 =729 cases, which constitute The angle error Δ2θ at a certain point X on the line X The possible distribution of X. k represents any one of the 729 possible angle error cases for point X, i.e., k = 1, 2, 3, ..., 729. Therefore, given m and n, the error distribution for each of the above cases can be estimated using matrix (6).

[0088] Take the absolute value of each of the 729 angular errors at each pixel X, and then average them as |δ²θ|. ij This is used to express the average angular error of the selected standard diffraction peak combination at point X, expressed by equation (7):

[0089]

[0090] Bundle Figure 3 Active arc of the detector The angular error of all pixels on the surface |δ2θ| ij The average value is then taken and denoted as |δ²θ|. j This average value is used to express the average angular error of the selected j-th standard diffraction peak combination over the entire integration interval O⌒P, and is represented by equation (8):

[0091]

[0092] Coverage (R) C ) and dispersion (R D The span of the selected j-th diffraction peak combination in the detector integration interval and the degree of their mutual dispersion are quantitatively expressed as shown in equations (9) and (10):

[0093]

[0094]

[0095] Obviously, 0 <R C <1,R C The larger the value, the wider the span of the three selected diffraction peaks, and the closer it is to the span of the maximum integration interval, meaning higher coverage; 0 <R D <1,R D The closer the value is to 0.5, the more uniform the distribution of the three selected diffraction peaks, that is, the better the dispersion.

[0096] With R C R D and |δ2θ| j Using coordinates, a 3D graph can be drawn, such as... Figure 4 As shown, it vividly illustrates the calibration results of selecting all 1140 ((20×19×18) / (3×2×1)) combinations of three diffraction peaks from the theoretically 20 standard diffraction peaks that are evenly spaced throughout the detector's active region. Figure 3 Active arc of the detector The average angular error of all pixels within the integration interval. Interestingly, Figure 4The error surface distribution shown resembles a chair, with smaller errors at the bottom and larger errors at the armrests and backrest. In other words, R... C The larger the value of R, the closer it is to 1, and the smaller the error; D The closer it is to 0.5, the smaller the error. Figure 4 This is precisely the model of the angle calibration error distribution. In practice, it can be based on... Figure 4 The error corresponding to the standard diffraction peak combination used can be estimated, or conversely, a suitable standard diffraction peak combination can be selected according to the error control requirements.

[0097] Select one or more standard samples and test them under the same conditions as the sample to be tested to obtain at least three standard diffraction peaks and collect the corresponding background samples.

[0098] Background subtraction and peak fitting are performed on the diffraction or scattering curves of standard and experimental samples. Instrument parameters β, α, and S0 are calculated using formulas (1), (2), and (3) above, and the scattering or diffraction angle of the sample is calculated using formula (4). To improve calibration accuracy, three standard diffraction peaks with a large span and relatively uniform dispersion covering the detector are selected for combined calibration. See details... Figure 4 As shown.

[0099] The beneficial effects of this invention are as follows:

[0100] This embodiment clearly provides analytical expressions for detector position and attitude parameters (i.e., instrument parameters) and angle calibration, as well as the corresponding analytical expressions for error analysis, which greatly improves the accuracy of prediction for the sample to be tested.

[0101] This invention provides explicit analytical expressions for instrument parameters, angle calibration, and their errors, for various instrument states (see...). Figure 2 It has universality, realizes the unified calibration of instrument parameters and angles, and the given angle calibration error model is of guiding significance for selecting diffraction peaks of standard samples.

[0102] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0103] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. Furthermore, those skilled in the art will recognize that, based on the ideas of the present invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A method for angle calibration and error analysis of a wide-angle arc detector, characterized in that, include: Adjust the wide-angle arc detector to match the optical path of the WAXS instrument; Based on the calibrated wide-angle arc detector, construct the instrument geometry of the wide-angle arc detector; Based on the instrument geometry of the wide-angle arc detector, at least three diffraction peak data of the standard sample are determined, and the first parameter, second parameter, and third parameter are calibrated based on the diffraction peak data. Establish the analytical expressions for the first parameter, the second parameter, and the third parameter. Solve for the first parameter, the second parameter, and the third parameter based on the analytical expressions for the first parameter, the second parameter, and the third parameter respectively. The analytical expression for the first parameter is: ； The analytical expression for the second parameter is: ； The analytical expression for the third parameter is: ； in, , , l = A, B, C; The angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test is obtained based on the first parameter, the second parameter and the third parameter; Based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the error of the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test is solved by matrix formula. The formula for calculating the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test is as follows: ； in, Angles are measured in radians. The error of calculating the angle corresponding to the point on the detector based on the arbitrary scattered signal of the sample under test, using a matrix formula, includes: Based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the differential approximation error is obtained by using differential approximation. The matrix formula is obtained by taking the composite derivative of the formula for calculating the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the analytical expression of the first parameter, the analytical expression of the second parameter, and the analytical expression of the third parameter; Based on the solution of the matrix formula, the error of the angle corresponding to the point on the detector of any scattered signal of the sample under test is obtained. The error of calculating the angle corresponding to the point on the detector based on the arbitrary scattered signal of the sample under test, using a matrix formula, includes: Based on the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the differential approximation error is obtained by using differential approximation. The matrix formula is obtained by taking the composite derivative of the formula for calculating the angle corresponding to the point on the detector of the arbitrary scattered signal of the sample under test, the analytical expression of the first parameter, the analytical expression of the second parameter, and the analytical expression of the third parameter; Based on the solution of the matrix formula, the error of the angle corresponding to the point on the detector of any scattered signal of the sample under test is obtained. The expression for the matrix formula is: ； Where i represents the non-ideal case The pixel X on the arc is numbered, i = 1, 2, 3, ..., m, where i = 1 is the pixel corresponding to the integration start point O, and i = m is the pixel corresponding to the integration end point. When there are n standard diffraction peaks, there are n(n-1)(n-2) / 6 possible combinations of any three peaks selected from different diffraction peaks. j represents any one of these n(n-1)(n-2) / 6 possible combinations, i.e., j = 1, 2, 3, ..., n(n-1)(n-2) / 6. Each combination contains six known parameters. , , 2θ A 2θ B and 2θ C Each parameter has three possible errors: positive, negative, and zero. Therefore, there are 3 possible combinations of errors for the six parameters. 6 =729 cases, which constitute Angular error at point X on the line The possible distribution of X is given by k, where k represents any one of the 729 possible angle error cases for point X, i.e., k = 1, 2, 3, ..., 729.

2. The method for angle calibration and error analysis of a wide-angle arc detector according to claim 1, characterized in that, The adjustment of the wide-angle arc detector to match the optical path of the WAXS instrument includes: The attitude of the wide-angle arc detector is adjusted so that the wide-angle arc detector is positioned above the sample to be tested and the beam, thus obtaining a wide-angle arc detector with the attitude adjusted. The position of the wide-angle arc detector, which has been adjusted to the correct orientation, is adjusted so that the incident light passes through the center point of the wide-angle arc detector, thus obtaining a properly adjusted wide-angle arc detector.

3. The method for angle calibration and error analysis of a wide-angle arc detector according to claim 1, characterized in that, The step of constructing the instrument geometry of the wide-angle arc detector based on the calibrated detector includes: Obtain the relative positional relationship between the calibrated wide-angle arc detector, the sample to be tested, the incident light, and the scattered light; The instrument geometry of the wide-angle arc detector is constructed based on the relative positional relationship.

4. The method for angle calibration and error analysis of a wide-angle arc detector according to claim 1, characterized in that, The expression for the differential approximation error is: ； in, , , ,2θ A ,2θ B ,2θ C The six parameters of the three standard diffraction peaks of a standard sample are the positions on the three detectors and the angles of the three XRDs.

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