A needle valve and pressure tube valve composite type flow control device and working method thereof

Abstract

This invention discloses a composite flow control device of needle valve and pressure valve and its working method, which solves the problem that fluid controllers in the prior art all use single control. It has the beneficial effects of realizing the switching between pressure valve and needle valve and avoiding fluid contamination. The specific solution is as follows: A composite flow control device of needle valve and pressure valve includes a support frame, which supports a switching control structure. A needle valve and a pressure valve are arranged sequentially on one side of the switching control structure. The needle valve includes a needle valve body, a first flow channel is provided in the needle valve body, the needle valve body is connected to an isolation shell, an internal rotor is provided in the isolation shell, an external rotor is arranged circumferentially outside the isolation shell, the bottom of the isolation shell is fixedly connected to a screw, and part of the screw is located inside the internal rotor to form a helical drive between the internal rotor and the internal rotor. One end of the internal rotor is provided with a needle-shaped component that can be inserted into the first flow channel. The switching control structure includes a rotating shaft that passes through the support member. The rotating shaft is rotatable and is connected to the sun gear of the planetary gear component.

Description

Technical Field

[0001] This invention relates to the field of flow control technology, and in particular to a combined needle valve and pressure valve flow control device and its operating method. Background Technology

[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.

[0003] Ultra-clean fluid control technology is widely used in semiconductor wet processes. As an important part of semiconductor manufacturing, wet processes use chemicals such as acids, alkalis, and solvents, along with liquid media such as ultrapure water, to etch and clean the wafer surface. During these processes, it is necessary to avoid contamination from foreign substances such as particles and metals.

[0004] Moreover, in fields such as biomedicine and electronic-grade chemicals, there is also a need for ultra-clean flow control of process media, that is, to achieve media transport control while ensuring that it is not contaminated by metals, ions, particulate matter, bacteria, etc., so as to ensure the effect of subsequent processes.

[0005] Currently, there are two main types of ultra-clean flow control devices widely used in the market: one is the clamp-type, but it is generally used for large-particle grinding fluids; the other is the needle-type, which is mostly used for particle-free or micro-particle solutions. This throttling device uses a PTFE (polytetrafluoroethylene) membrane integrated with the needle structure to isolate the solution from the outside. The inventors have discovered that existing ultra-clean flow control devices have the following problems: 1) Both the pressure valve structure and the needle valve structure adopt a single control. The pressure valve structure and the needle valve structure are used for different liquids. The needle valve structure cannot be used for the control of larger particle liquids. However, in some production or test processes, it is necessary to control the flow and transport liquids of different particle sizes using the valve body and pipeline. Therefore, the existing technology sets up two sets of delivery pipelines for liquids of different particle sizes, which has the problems of large space occupation and high installation cost. 2) For the needle valve structure of the superfluid control device, the needle structure is in motion during the flow control process, and the PTFE film will be repeatedly bent. In addition, its thickness is generally less than 0.3mm, which makes it very easy to break under high pressure. Once it breaks, the superfluid control device will fail, resulting in fluid contamination. Moreover, the film is irregular in shape, making it difficult to process.

[0006] 3) The hose is installed inside the pressure valve and is connected to the plug by a screw cap. During the rotation of the screw cap, the hose is easily cut, which affects the service life of the hose. Summary of the Invention

[0007] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a composite flow control device of needle valve and pressure valve, which can realize the switching between pressure valve and needle valve.

[0008] To achieve the above objectives, the present invention is implemented through the following technical solution: A composite flow control device of needle valve and pressure valve includes a support frame, the support frame supports a switching control structure, and a needle valve and a pressure valve are arranged sequentially on one side of the switching control structure. The pressure valve includes a pressure valve body, a connecting rod member that passes through the pressure valve body and is movable relative to the pressure valve body, and a connecting part is provided at one end of the connecting rod member, and the connecting part is provided with a threaded hole; The needle valve includes a needle valve body, a first flow channel is provided inside the needle valve body, the needle valve body is connected to an isolation shell, an internal rotor is provided inside the isolation shell, an external rotor is provided circumferentially outside the isolation shell, the bottom of the isolation shell is fixedly connected to a screw, a portion of the screw is located inside the internal rotor and forms a helical drive between the internal rotor and the internal rotor, and a needle-shaped component that can be inserted into the first flow channel is provided at one end of the internal rotor. The conversion control structure includes a rotating shaft that passes through a support member. The rotating shaft is rotatable and passes sequentially through an internal gear ring attachment member and the internal gear ring before connecting to the sun gear of the planetary gear assembly. The planet gears in the planetary gear assembly mesh with the internal gear ring, which is supported by the support member and is rotatable relative to the support member. The planet gears are connected to the planet carrier, which is connected to the external rotor. The support member supports a braking component, which can contact either the planet carrier or the internal gear ring.

[0009] As described above, the flow control device can switch between two different flow control methods, namely pressure pipe valve and needle valve, by changing the control structure. The needle valve adopts internal and external dual rotors and does not use a diaphragm, thus avoiding the problem of diaphragm rupture and reducing the probability of fluid contamination. The device can use corresponding valves for flow control for liquids with different particle sizes, without the need to set up two sets of delivery pipelines, effectively reducing the overall space occupied and controlling costs.

[0010] As described above, in a composite flow control device combining a needle valve and a pressure tube valve, a pressure rod fixing frame is provided at the end of the connecting rod member away from the connecting component. The pressure rod fixing frame supports the pressure rod, and the flexible tube is located inside the pressure tube valve body. The pressure rod passes through the pressure tube valve body. The movement of the connecting rod member relative to the pressure tube valve body causes the pressure rod to move towards the flexible tube and squeeze the flexible tube. Thus, by moving the connecting rod member relative to the pressure tube valve body and the support frame, the degree of squeezing of the tube by the pressure rod is controlled, thereby controlling the flow rate of liquid through the tube. The side of the support frame is provided with a sliding groove, and the end of the pressure rod fixing frame can move along the sliding groove, which is beneficial to guiding the movement of the pressure rod fixing frame; The longitudinal section of the support frame is U-shaped, which can ensure the support of the pressure valve, needle valve and switching control structure, and facilitate the switching control structure to control the pressure valve and needle valve.

[0011] The needle valve and pressure valve composite flow control device described above also includes a controller, which is connected to a drive power source, the drive power source is connected to the rotating shaft, and the drive power source is fixedly connected to the support frame. The pressure valve body is equipped with a first distance sensor. The first distance sensor obtains the distance between the pressure rod fixing frame or the connecting component and the pressure valve body. The movement displacement of the pressure rod can be obtained through the first distance sensor. When the movement displacement of the pressure rod is at its maximum, it indicates that no liquid is passing through the flexible tube. A flow sensor is installed in the pipeline connected to the first flow channel. The flow sensor and the first distance sensor are respectively connected to the controller. The flow rate of the liquid in the pipeline can be obtained through the flow sensor, and the received signal is sent to the controller.

[0012] As described above, in a composite flow control device combining a needle valve and a pressure valve, both ends of the flexible tube are connected to a flow channel transition component via a connector structure. The flow channel transition component is also connected to the first flow channel. The flow channel transition component enables the connection between the pipeline used for conveying liquid and the pressure valve or needle valve. The connector component includes an inner connector, which is installed at the end of the flexible tube. One end of the inner connector is inserted into the flexible tube. The gland is located in the circumferential direction at the connection between the inner connector and the flexible tube. The inner connector is provided with a first limiting member to limit the gland. The outer cap is installed through the gland and fits around the inner connector in the circumferential direction. The outer cap is installed and locked through the gland and does not directly contact the flexible tube, thus avoiding cutting the flexible tube during the rotation of the outer cap.

[0013] As described above, in a combined needle valve and pressure valve flow control device, the supporting member is fixed to the supporting frame; The support member is provided with a first recess, and the internal gear ring is located in the first recess. The internal gear ring is rotatable relative to the first recess, and the first recess facilitates the limiting of the installation of the internal gear ring.

[0014] As described above, in a combined needle valve and pressure valve flow control device, the supporting member is provided with a brake on the side of the internal gear ring and the planetary carrier. The brake is a disc brake, which includes a brake caliper body, a first brake disc, and a second brake disc. The brake caliper body is fixed with two opposing fixed friction blocks. The first brake disc is fixedly connected to the planetary carrier, and the second brake disc is fixedly connected to the internal gear ring. The movable friction block is movable relative to the brake insert. The movable friction block can clamp the first brake disc with the fixed friction block on one side, or clamp the second brake disc with the fixed friction block on the other side.

[0015] As described above, in a composite flow control device of needle valve and pressure valve, the needle valve body is fixedly connected to the pressure valve body, the external rotor is connected to the planetary carrier, and the isolation shell is connected to the needle valve body, thereby fixing the position of the pressure valve body. The needle valve body is sealed to the top of the isolation shell; The channel inside the flexible tube is a second channel, which is arranged in parallel with the first flow channel.

[0016] As described above, in a composite flow control device combining a needle valve and a pressure valve, the longitudinal cross-section of the isolation shell is inverted V-shape, a guide groove is provided on the top side of the isolation shell, the needle-shaped component includes an annular part, and lugs are provided on both sides of the annular part. The lugs are inserted into the guide groove, and a protrusion is provided at the end of the annular part away from the screw. The movement of the needle-shaped component is guided by the guide groove.

[0017] As described above, a composite flow control device combining a needle valve and a pressure tube valve includes an internal rotor comprising an ultra-clean housing, a permanent magnet disposed within the ultra-clean housing, a second protrusion disposed on the top of the ultra-clean housing, and a second recess disposed on the annular component. The second protrusion and the second recess are movably connected so that the second protrusion is rotatable relative to the second recess. The external rotor includes an electromagnet located inside the electromagnet frame. One end of the electromagnet frame is engaged with the isolation shell, and the other end of the electromagnet frame is connected to the planetary carrier. Thus, the first flow channel is isolated from the outside world through the external rotor and the isolation shell, avoiding contamination of the liquid in the first flow channel. The isolation shell is provided with a first protrusion on the side away from the screw, and the first protrusion passes through the electromagnet frame and is disposed with the planetary carrier.

[0018] Secondly, the present invention also provides a method for operating a combined needle valve and pressure valve flow control device, comprising the following: When the pressure valve is working, the external braking of the internal gear ring is released while the braking of the planetary carrier is maintained. The rotating shaft rotates, and due to the helical transmission formed between the additional component of the internal gear ring and the threaded hole of the connecting component, the connecting rod component drives the connecting rod component to move relative to the valve body of the pressure valve, controlling the opening degree of the pressure valve. When the opening degree of the pressure valve is zero, the pressure valve stops working. After the pressure valve stops working, the braking of the planetary carrier is released while the braking of the internal gear ring is maintained, and then the needle valve starts working. When the needle valve is working, the external braking of the planetary carrier is released, while the braking of the internal gear ring is maintained. The rotating shaft drives the planetary gears to rotate through the sun gear, which in turn drives the planetary carrier to rotate, driving the external rotor to rotate. This drives the internal rotor to rotate and move axially at the same time, driving the needle-type component to move axially and controlling the opening of the needle valve. When the opening of the needle valve is zero, the needle valve stops working. After that, the braking of the internal gear ring is released, while the braking of the planetary carrier is maintained, and the pressure valve starts to work. Alternatively, the braking of the planetary carrier and internal gear ring can be released externally, and the planetary carrier can rotate to control the opening of the needle valve. The connecting parts move relative to the rotating shaft, thereby controlling the opening of the pressure valve.

[0019] The beneficial effects of the present invention are as follows: 1) The present invention has a set of devices with reasonable arrangement of components. The switching control structure can realize the switching between two different flow control methods, namely pressure pipe valve and needle valve. The whole device can use corresponding valves for flow control for liquids with different particle sizes to deal with fluids with different characteristics. There is no need to set up two sets of delivery pipelines, which effectively reduces the space occupied by the whole device and controls the cost.

[0020] 2) The needle valve in this invention has a reasonable structure and does not use a diaphragm, thus avoiding the problem of the diaphragm being easily broken. Moreover, the needle valve adopts a structure of external rotor, internal rotor and isolation shell. The external rotor and isolation shell isolate the first flow channel from the outside world, effectively reducing the probability of fluid contamination, and there is no need to process the difficult diaphragm.

[0021] 3) The pressure valve structure in this invention is reasonably designed. The connecting rod component passes through the pressure valve body and is fixed. The connecting rod component and the internal gear ring additional component form a helical drive. The hose and plug are connected by a screw cap. During the rotation of the screw cap, the hose is prevented from being cut by shearing force, thus ensuring the service life of the hose.

[0022] 4) The conversion control structure in this invention is reasonably designed. By cooperating with the planetary gear component and the brake, the braking of the planetary carrier or the internal gear ring can be achieved. When the planetary carrier is braked and stops rotating, the external rotor of the needle valve stops rotating and the needle valve cannot work. When the internal gear ring is braked and stops rotating, the rotating shaft continues to rotate. The connecting component drives the connecting rod component to move relative to the valve body of the pressure valve, thereby realizing the adjustment of the opening degree of the pressure valve.

[0023] 5) In this invention, the setting of the first distance sensor and the flow sensor is used to determine whether the needle valve is closed after the pressure valve is completely closed, and to send the received signal to the controller. The first distance sensor can obtain the movement displacement of the pressure rod. When the movement displacement of the pressure rod is at its maximum, it indicates that no liquid is passing through the flexible tube. This ensures that the opening of the needle valve or the pressure valve is zero before controlling the opening of the other valve, which further effectively prevents larger liquid particles from entering the needle valve and avoids damage to the needle valve. Alternatively, the movement distance of the needle valve needle component can be obtained through a second distance sensor and fed back to the controller.

[0024] 6) In this invention, the brake is reasonably set up and supported by a support member. It is located on the side of the planetary carrier and the internal gear ring. By moving the movable friction block, the movable friction block can clamp the first brake disc with the fixed friction block on one side, or clamp the second brake disc with the fixed friction block on the other side, thereby realizing the release or maintenance of the brake on the planetary carrier and the internal gear ring.

[0025] 7) The needle valve in this invention is a magnetically driven needle valve with a screw. The screw is used to achieve the stability of the internal magnetic rotor. The whole process avoids the liquid contamination caused by diaphragm rupture in the existing ultra-clean diaphragm needle valve, and also avoids the flow control instability caused by the instability or vibration of the internal magnetic rotor in the shaftless magnetic suspension structure.

[0026] 8) In this invention, the pressure valve and the needle valve are connected in parallel, which can realize a single needle valve flow control mode or a pressure valve flow control mode, or it can be in a composite mode. For example, the pressure valve is used as a bypass with a fixed cutoff area, and the needle valve is used for fluid control. Attached Figure Description

[0027] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0028] Figure 1 This is a schematic diagram of the appearance of a needle valve and pressure valve composite flow control device according to one or more embodiments of the present invention.

[0029] Figure 2 This is a schematic diagram of the needle valve cut open in the middle of a needle valve and pressure valve composite flow control device according to one or more embodiments of the present invention.

[0030] Figure 3 This is a cross-sectional schematic diagram of the needle valve in a composite flow control device of needle valve and pressure valve according to one or more embodiments of the present invention.

[0031] Figure 4 This is a schematic diagram of the pressure valve in a composite flow control device of needle valve and pressure valve according to one or more embodiments of the present invention.

[0032] Figure 5 This is a schematic diagram of the connector component at the pressure valve in a composite flow control device of needle valve and pressure valve according to one or more embodiments of the present invention.

[0033] Figure 6 This is an exploded view of the connector component at the pressure valve in a composite flow control device of needle valve and pressure valve according to one or more embodiments of the present invention.

[0034] Figure 7This is a schematic diagram of a connecting rod component in a needle valve and pressure valve composite flow control device according to one or more embodiments of the present invention.

[0035] Figure 8 This is a schematic diagram of the flow channel transition component in a needle valve and pressure valve composite flow control device according to one or more embodiments of the present invention.

[0036] Figure 9 This is a schematic diagram of the conversion control structure and drive power source in a needle valve and pressure valve composite flow control device according to one or more embodiments of the present invention.

[0037] Figure 10 This is an exploded schematic diagram of a portion of the switching control structure in a needle valve and pressure valve composite flow control device according to one or more embodiments of the present invention.

[0038] Figure 11 This is a schematic diagram of the brake setting in a needle valve and pressure valve composite flow control device according to one or more embodiments of the present invention.

[0039] The diagram exaggerates the spacing or dimensions between parts to show their positions; the diagram is for illustrative purposes only.

[0040] Among them: 1-pressure valve, 2-needle valve, 3-conversion control structure, 4-drive power source, 5-support frame, 6-flow channel transition component.

[0041] 11-Hose pressure rod, 12-Upper valve body of pressure valve, 13-Lower valve body of pressure valve, 14-Connector and hose assembly, 15-Connecting rod component, 16-First distance sensor; 141-Outer cap, 142-Inner connector, 143-Pressure cap, 144-Flexible tube; 151-Pressure rod fixing bracket, 152-Connecting rod, 153-Connecting component; 21-Needle valve body, 22-Isolation shell, 23-Needle-type component, 24-Internal rotor, 25-Screw, 26-External rotor, 27-Sealing ring, 28-Metal pad, 29-Second distance sensor, 241-Retaining ring, 242-Permanent magnet, 243-Ultra-clean housing; 261-Electromagnet, 262-Electromagnet frame; 311-Planet gear, 312-Planet carrier, 313-Sun gear, 314-Internal gear ring, 315-Rotating shaft, 316-Additional component to internal gear ring; 32-Supporting component, 33-Brake; 331-First brake disc, 332-Fixed friction block, 333-Modible friction block, 334-Brake caliper, 335-Second brake disc; 41 - Stepper motor; 42 - Stepper motor mounting bracket; 61-Inlet tee adapter structure, 62-Outlet tee adapter structure, 63-Tee valve fixing component. Detailed Implementation

[0042] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the invention. Unless otherwise specified, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0043] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, unless otherwise expressly indicated by the invention, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof. As described in the background section, the existing fluid control valves suffer from the problem of using a single control mechanism. In order to solve the above-mentioned technical problems, this invention proposes a composite flow control device that combines a needle valve and a pressure valve.

[0044] In a typical embodiment of the present invention, reference is made to Figure 1 As shown, a combined needle valve and pressure valve flow control device includes: Support frame 5 supports conversion control structure 3. Needle valve 2 and pressure valve 1 are sequentially arranged on one side of conversion control structure 3. The pressure valve 1 includes a pressure valve body, a connecting rod member 15 passing through the pressure valve body and movable relative to the pressure valve body, and a connecting part 153 provided at one end of the connecting rod member 15, the connecting part being provided with a threaded hole. The needle valve 2 includes a needle valve body 21, a first flow channel is provided inside the needle valve body 21, the needle valve body 21 is connected to the isolation shell 22, and the needle valve body 21 and the top of the isolation shell 22 are sealed together by a sealing ring 27; an internal rotor 24 is provided inside the isolation shell 22, an external rotor 26 is provided circumferentially outside the isolation shell 22, and the bottom of the isolation shell 22 is fixedly connected to the screw 25 by a threaded structure. Part of the screw 25 is located inside the internal rotor 24, and a helical drive is formed between the screw and the internal rotor. One end of the internal rotor 24 is provided with a needle-shaped component 23 that can be inserted into the first flow channel. The channel inside the flexible tube is a second channel, and the second channel is arranged in parallel with the first flow channel. The conversion control structure 3 includes a rotating shaft 315 that passes through the support member 32. The rotating shaft 315 is rotatable. The rotating shaft passes through the internal gear ring auxiliary member and the internal gear ring in sequence and is connected to the sun gear 313 of the planetary gear component. A helical transmission is formed between the internal gear ring auxiliary member and the threaded hole of the connecting member. The planet gear 311 in the planetary gear component meshes with the internal gear ring 314. The internal gear ring 314 is supported by the support member 32 and is rotatable relative to the support member. The planet gear 311 is connected to the planet carrier 312. The planet carrier 312 is connected to the external rotor. The support member supports the braking member. The braking member can contact the planet carrier or the internal gear ring respectively.

[0045] The longitudinal section of the support frame 5 is U-shaped. The support frame 5 can be a sheet metal structure, which can ensure the support of the pressure valve 1, needle valve 2 and conversion control structure 3, and facilitate the control of the pressure valve and needle valve by the conversion control structure. The flow channel transition component is located on both sides of the pressure valve and needle valve to realize the parallel connection of the two flow channels. The support component is a support plate, which is fixedly connected to the support frame.

[0046] It is easy to understand that the needle valve body 21 is fixedly connected to the pressure valve body, the external rotor is connected to the planetary carrier, and the isolation shell 22 is connected to the needle valve body, thereby fixing the position of the pressure valve body.

[0047] refer to Figure 2 As shown, a metal pad 28 is provided at the first step on the outside of the isolation shell. Fasteners pass through the metal pad 28 and the isolation shell 22 to connect with the needle valve body 21. The longitudinal section of the isolation shell 22 is an inverted V-shape. A guide groove is provided on the top side of the isolation shell 22. The needle-shaped component 23 includes an annular part. Ears are provided on both sides of the annular part. The ears are inserted into the guide groove. A protrusion is provided at the end of the annular part away from the screw 25. The protrusion forms a needle-shaped structure. The protrusion has a frustum-shaped structure and can be inserted into the first flow channel. The movement of the needle-shaped component is guided by the guide groove. A limiting part is provided in the first flow channel of the needle valve body. The limiting part is located on one side of the protrusion. The length of the limiting part is greater than the diameter of the first flow channel.

[0048] refer to Figure 3 As shown, the internal rotor 24 includes an ultra-clean housing 243. The ultra-clean housing 243 has a first hole at its center, which faces the planetary carrier. The first hole is connected to the screw 25 by a threaded structure. A permanent magnet 242 is disposed inside the ultra-clean housing 243 and is located circumferentially around the first hole. A second protrusion is disposed on the top of the ultra-clean housing 243. A second recess is disposed on the side of the annular part away from its protrusion. The second protrusion and the second recess are connected by a retaining ring 241. The retaining ring is open, and the second protrusion is rotatable relative to the second recess by the setting of the retaining ring 241. In this embodiment, the top side and the inside of the isolation shell are hollow, multiple steps are provided on the outside of the isolation shell 22, a first protrusion is provided on the bottom side of the isolation shell 22 away from the screw 25, the first protrusion passes through the electromagnet frame 262 and is set with the planetary frame, a frustum-shaped protrusion is provided at the bottom of the inner side of the isolation shell, a second opening is provided at the frustum-shaped protrusion, and the second opening is connected to the screw 25 through a threaded structure. Specifically, the external rotor includes an electromagnet 261, which is located inside the electromagnet frame 262. The electromagnet 261 can also be replaced by a permanent magnet. One end of the electromagnet frame 262 is engaged with one of the steps of the isolation shell, and the other end of the electromagnet frame is connected to the planetary carrier. Thus, the first flow channel is isolated from the outside world through the external rotor and the isolation shell, avoiding contamination of the liquid in the first flow channel.

[0049] It should be explained that the needle valve body 21, isolation shell 22, needle-type component 23, retaining ring 241, ultra-clean shell 243, and sealing ring 27 in the needle valve, and the upper valve body 12, lower valve body 13, inner connector 142, flexible tube 144, inlet tee adapter structure 61, and outlet tee adapter structure 62 in the pressure valve are all made of ultra-clean materials. Specifically, the ultra-clean materials can be existing ultra-pure (purity of 99% or higher) and wear-resistant perfluoroplastic materials (such as perfluoroalkoxy PFA, polytetrafluoroethylene PTFE, etc.).

[0050] refer to Figure 4 and Figure 7 As shown, a pressure rod fixing bracket 151 is provided at the end of the connecting rod member 15 away from the connecting component. The pressure rod fixing bracket 151 supports the pressure rod 11 at its center. The pressure rod is positioned towards the connecting component. The flexible tube 144 is located inside the pressure valve body. The pressure rod 11 passes through the pressure valve body. The movement of the connecting rod member 15 relative to the pressure valve body causes the pressure rod to move towards the flexible tube and squeeze the hose. Thus, the degree of squeezing of the hose by the pressure rod is controlled by the movement of the connecting rod member relative to the pressure valve body and the support frame, thereby controlling the flow rate of liquid through the hose. Specifically, the valve body of the pressure valve includes an upper valve body 12 and a lower valve body 13. A flexible tube is provided between the upper valve body 12 and the lower valve body 13. Recesses are provided on opposite sides of the upper valve body 12 and the lower valve body 13. The outer screw cap for locking the flexible tube and the inner plug is located in the recess. The connecting rod component specifically includes two connecting rods. The two connecting rods connect the pressure rod fixing frame 151 and the connecting component 153. The two connecting rods are located on both sides of the pressure rod fixing frame 151. The specific structure of the connecting component is similar to that of the pressure rod fixing frame. The connecting component can be a connecting block.

[0051] It is easy to understand that the support frame 5 is provided with sliding grooves on both sides, and the end of the pressure rod fixing frame can move along the sliding grooves, which is beneficial to guiding the movement of the pressure rod fixing frame 151; Additionally, it should be noted that the device also includes a controller, which is connected to a drive power source, which is connected to a rotating shaft, and the drive power source is fixedly connected to a support frame. The pressure valve body is equipped with a first distance sensor 16. The first distance sensor acquires the distance between the pressure rod fixing bracket or connecting component and the pressure valve body. The movement displacement of the pressure rod can be acquired through the first distance sensor. When the movement displacement of the pressure rod is at its maximum, it indicates that no liquid is passing through the flexible tube. A flow sensor is installed on the pipeline (inlet side) connected to the first flow channel. The flow sensor and the first distance sensor are respectively connected to the controller. The function of the flow sensor is to be used by the controller to determine whether the needle valve is closed after the pressure valve is completely closed.

[0052] Specifically, the first distance sensor 16 is installed on the upper surface of the valve body 12 of the pressure valve to obtain the displacement change of the pressure rod fixing bracket. The controller records the maximum displacement of the pressure rod fixing bracket. After the first distance sensor obtains the displacement of the pressure rod fixing bracket and sends it to the controller, the controller compares the displacement information with the recorded maximum displacement of the pressure rod fixing bracket. When the displacement is the maximum, it indicates that the opening degree of the pressure valve is zero, indicating that the pressure valve is in a completely closed state.

[0053] It is easy to understand that the controller is specifically a PLC controller or other type of controller. The controller is connected to a display screen, which can directly display the controller's comparison results of displacement and the flow value detected by the flow sensor.

[0054] In another example, a second distance sensor 29 is provided at one end of the isolation housing 22 facing the external rotor. The second distance sensor is located on the side of the first protrusion and is connected to the controller. The second distance sensor 29 detects the position of the internal rotor to determine whether the needle valve is closed.

[0055] It is easy to understand that the first distance sensor is an ultrasonic ranging sensor, the second distance sensor can be an eddy current ranging sensor, and the permanent magnet 242 is coated with a nickel (Ni) layer so that the permanent magnet can be detected by the eddy current sensor.

[0056] It should be noted that the flexible tube 144 is a flexible hose, and both ends of the flexible tube 144 are connected to the flow channel adapter 6 through a connector structure. The flow channel adapter 6 is also connected to the first flow channel. The flow channel adapter can realize the connection between the pipeline used to transport liquid and the pressure valve or needle valve. The flow channel adapter is specifically a three-way valve adapter.

[0057] refer to Figure 5 and Figure 6As shown, the connector component includes an inner connector 142 for connection with the flow channel adapter component. The inner connector 142 is installed at the end of the flexible tube 144, and one end of the inner connector 142 is inserted into the flexible tube 144. The gland 143 is located in the circumferential direction at the connection between the inner connector and the flexible tube. The inner connector is provided with a first limiting member to limit the gland. The outer cap 141 is installed through the gland and fits around the inner connector in the circumferential direction. The outer cap is installed and locked through the gland and does not directly contact the flexible tube, thus avoiding cutting the flexible tube during the rotation of the outer cap.

[0058] refer to Figure 8 As shown, the three-way valve adapter includes an inlet three-way adapter structure 61 and an outlet three-way adapter structure 62. The inlet three-way adapter structure 61 and the outlet three-way adapter structure 62 are respectively connected to the first flow channel and the two ends of the inner connector 142 in the needle valve body 21, that is, the needle valve and the pressure valve have two flow paths connected in parallel. A three-way valve fixing component 63 is provided on the top of the pressure valve body. The three-way valve fixing component 63 can be a fixing plate, which is used to fix the inlet three-way adapter structure 61 and the outlet three-way adapter structure 62. It is worth noting that the needle valve has an inlet and an outlet.

[0059] It is easy to understand that, reference Figure 9 and Figure 10 As shown, the support member 32 is a support plate with a first recess. The internal gear ring 314 is located in the first recess and is rotatable relative to the first recess. The first recess facilitates the limiting of the installation of the internal gear ring. Brakes are provided on the sides of the internal gear ring and the planetary carrier of the support member 32. The rotating shaft passes through the internal gear ring attachment member 316 and the internal gear ring in sequence. The internal gear ring attachment member refers to the rotating part fixedly connected to the internal gear ring 314. The rotating part is sleeved around the rotating shaft in the circumferential direction. The rotating part includes a first segment, which is an annular segment. One end of the annular segment is connected to the internal gear ring 314. The lower surface of the ring is fixed, and the annular segment is connected to the convex segment. That is, the rotating part is circumferentially provided with a convex segment that engages with the support member 32. The longitudinal section of the convex segment is T-shaped. The rotating part has a threaded segment on one side of the convex segment, that is, the circumferential external thread is provided on this segment so that a helical transmission is formed between the internal gear ring auxiliary member and the threaded hole of the connecting member. When the planet carrier 312 is fixed, the planetary gear transmission sequence is as follows: the rotating shaft 315 and the sun gear 313 rotate, driving the planet gear 311 to rotate, which in turn drives the internal gear ring 314 to rotate, and then drives the connecting member 153 to move axially.

[0060] In order to drive the rotating shaft 315, the driving power source 4 of the rotating shaft includes a stepper motor 41, a stepper motor mounting bracket 42 is provided on the top side of the stepper motor, and the two sides of the stepper motor mounting bracket 42 are bent to fix it to the support frame 5.

[0061] refer to Figure 11As shown, in this embodiment, the brake 33 is a disc brake, which includes a brake caliper 334, a first brake disc 331, and a second brake disc 335. The brake caliper 334 is fixed with two opposing fixed friction blocks 332. The first brake disc 331 is fixedly connected to the planetary carrier 312, and the second brake disc 335 is fixedly connected to the internal gear ring 314. The movable friction block 333 is movable relative to the brake insert. The movable friction block can clamp the first brake disc 331 with the fixed friction block on one side, or clamp the second brake disc 335 with the fixed friction block on the other side.

[0062] The flow control device provided in this embodiment can switch between two different flow control methods—pressure-operated valve and needle valve—through a switching control structure. The needle valve uses an internal and external dual rotor and does not employ a diaphragm, avoiding the problem of diaphragm rupture and reducing the probability of fluid contamination. The device can use corresponding valves for flow control of liquids with different particle sizes, eliminating the need for two sets of delivery pipelines, effectively reducing overall space requirements and controlling costs. The device is not limited to the semiconductor wet process field; by changing the materials and dimensions, it can be applied to other suitable fields. Furthermore, the response speed can be adapted to different flow control modes by changing the number of teeth on each gear.

[0063] This embodiment also provides a method for operating a combined needle valve and pressure valve flow control device, including the following: When the pressure valve 1 is working, the external braking of the internal gear ring is released while the braking of the planetary carrier is maintained. The rotating shaft rotates, and a helical transmission is formed between the additional component of the internal gear ring and the threaded hole of the connecting component. The connecting rod component drives the connecting rod component to move relative to the valve body of the pressure valve, controlling the opening degree of the pressure valve. When the opening degree of the pressure valve is zero, the pressure valve stops working. After the pressure valve stops working, the braking of the planetary carrier is released while the braking of the internal gear ring is maintained, and then the needle valve starts working. When needle valve 2 is working, the external braking of the planetary carrier is released, while the braking of the internal gear ring is maintained. The rotating shaft drives the planetary gear to rotate through the sun gear, which in turn drives the planetary carrier to rotate, driving the external rotor to rotate. This drives the internal rotor to rotate and move axially at the same time, driving the needle-type component to move axially and controlling the opening of the needle valve. When the opening of the needle valve is zero, the needle valve stops working. After that, the braking of the internal gear ring is released, while the braking of the planetary carrier is maintained, and the pressure valve starts to work. Alternatively, the braking of the planetary carrier and internal gear ring can be released externally, and the planetary carrier can rotate to control the opening of the needle valve. The connecting parts move relative to the rotating shaft, thereby controlling the opening of the pressure valve.

[0064] The first movement of the switching control structure 3 is as follows: When the full needle valve mode is selected, the controller first determines whether the pressure valve is completely shut off based on the first distance sensor 16. If it is not completely shut off, the brake 33 releases the brake on the internal gear ring 314 while maintaining the brake on the planetary carrier 312. The internal gear ring 314 is used as the output of the switching control structure 3 to drive the connecting rod member 15 and the pressure rod 11 to completely shut off the pressure valve. If the pressure valve is already in the shut-off state, the brake 33 releases the brake on the planetary carrier 312 while maintaining the brake on the internal gear ring 314. The planetary carrier 312 is used as the output of the switching control structure 3 to drive the external rotor 26 to rotate.

[0065] The second movement of the switching control structure 3 is as follows: When the full pressure valve mode is selected, the control system first determines whether the pressure valve is completely shut off based on the first distance sensor 16. If the pressure valve is not in the shut-off state, the brake 33 releases the brake on the internal gear ring 314 while maintaining the brake on the planetary carrier 312, and uses the internal gear ring 314 as the output of the switching control structure 3 to drive the pressure valve to shut off. If the pressure valve is already in the shut-off state, it then determines whether the flow rate in the flow path is zero based on the upstream flow sensor. If the flow sensor reading is not zero, it indicates that the needle valve is not in the shut-off state. Under this premise, the brake 33 releases the brake on the planetary carrier 312 while maintaining the brake on the internal gear ring 314, and uses the planetary carrier 312 as the output of the switching control structure 3 to drive the needle valve to shut off. If the flow sensor reading is zero, it indicates that the needle valve is in the shut-off state. Under this premise, the brake 33 releases the brake on the internal gear ring auxiliary component while maintaining the brake on the planetary carrier 312, and uses the internal gear ring auxiliary component as the output of the switching control structure 3 to enter the full pressure valve control mode.

[0066] Of course, in another example, if a second distance sensor is used instead of the flow sensor, when the full pressure valve mode is selected, the controller first determines whether the needle valve is fully closed based on the second distance sensor 29. If it is not fully closed, the brake 33 releases the brake on the planetary carrier 312 while maintaining the brake on the internal gear ring 314, and uses the planetary carrier 312 as the output of the switching control structure 3 to drive the needle valve to close. If the needle valve has closed, the brake 33 releases the brake on the internal gear ring auxiliary member 316 while maintaining the brake on the planetary carrier 312, and uses the internal gear ring auxiliary member as the output of the switching control structure 3 to enter the full pressure valve control mode.

[0067] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A composite flow control device combining a needle valve and a pressure valve, characterized in that, The system includes a support frame that supports the conversion control structure. A needle valve and a pressure valve are sequentially installed on one side of the conversion control structure. The pressure valve includes a pressure valve body, a connecting rod member that passes through the pressure valve body and is movable relative to the pressure valve body, and a connecting part is provided at one end of the connecting rod member, and the connecting part is provided with a threaded hole; The needle valve includes a needle valve body, a first flow channel is provided inside the needle valve body, the needle valve body is connected to an isolation shell, an internal rotor is provided inside the isolation shell, an external rotor is provided circumferentially outside the isolation shell, the bottom of the isolation shell is fixedly connected to a screw, a portion of the screw is located inside the internal rotor and forms a helical drive between the internal rotor and the internal rotor, and a needle-shaped component that can be inserted into the first flow channel is provided at one end of the internal rotor. The conversion control structure includes a rotating shaft that passes through a support member. The rotating shaft is rotatable and passes sequentially through an internal gear ring attachment member and the internal gear ring before connecting to the sun gear of the planetary gear assembly. A helical transmission is formed between the internal gear ring attachment member and the threaded hole of the connecting member. The planet gears in the planetary gear assembly mesh with the internal gear ring. The internal gear ring is supported by the support member and is rotatable relative to the support member. The planet gears are connected to the planet carrier, and the planet carrier is connected to the external rotor. The support member supports the braking member, and the braking member can contact the planet carrier or the internal gear ring respectively. A pressure rod fixing frame is provided at the end of the connecting rod member away from the connecting component. The pressure rod fixing frame supports the pressure rod. The flexible tube is located in the valve body of the pressure tube valve. The pressure rod passes through the valve body of the pressure tube valve. The movement of the connecting rod member relative to the valve body of the pressure tube valve causes the pressure rod to move toward the flexible tube and squeeze the flexible tube.

2. The composite flow control device of needle valve and pressure valve according to claim 1, characterized in that, The side of the support frame is provided with a sliding groove, and the end of the pressure rod fixing frame can move along the sliding groove; The longitudinal section of the support frame is U-shaped.

3. The composite flow control device of needle valve and pressure valve according to claim 2, characterized in that, It also includes a controller, which is connected to a drive power source, which is connected to the rotating shaft and fixedly connected to the support frame. The pressure valve body is equipped with a first distance sensor, which acquires the distance between the pressure rod fixing frame or the connecting component and the pressure valve body. A flow sensor is installed in the pipeline connected to the first flow channel, and the flow sensor and the first distance sensor are respectively connected to the controller separately.

4. The composite flow control device of needle valve and pressure valve according to claim 1, characterized in that, Both ends of the flexible tube are connected to the flow channel transition component via a joint structure, and the flow channel transition component is also connected to the first flow channel. The connector component includes an inner connector, which is installed at the end of the flexible tube. One end of the inner connector is inserted into the flexible tube. The pressure cap is located in the circumferential direction at the connection between the inner connector and the flexible tube. The inner connector is provided with a first limiting member to limit the pressure cap. The outer screw cap is installed through the pressure cap and fits around the inner connector in the circumferential direction.

5. The composite flow control device of needle valve and pressure valve according to claim 1, characterized in that, The supporting member is fixed to the supporting frame; The support member is provided with a first recess, the internal gear ring is located in the first recess, and the internal gear ring is rotatable relative to the first recess.

6. The composite flow control device of needle valve and pressure valve according to claim 3, characterized in that, The supporting member is provided with a brake on the side of the internal gear ring and the planetary carrier. The brake is a disc brake, which includes a brake caliper body, a first brake disc and a second brake disc. The brake caliper body is fixed with two opposing fixed friction blocks. The first brake disc is fixedly connected to the planetary carrier and the second brake disc is fixedly connected to the internal gear ring. The movable friction block is movable relative to the brake insert. The movable friction block can clamp the first brake disc with the fixed friction block on one side, or clamp the second brake disc with the fixed friction block on the other side.

7. The composite flow control device of needle valve and pressure valve according to claim 1, characterized in that, The needle valve body is fixedly connected to the pressure tube valve body; The needle valve body is sealed to the top of the isolation shell; The channel inside the flexible tube is a second channel, which is arranged in parallel with the first flow channel.

8. The composite flow control device of needle valve and pressure valve according to claim 1, characterized in that, The longitudinal section of the isolation shell is inverted V-shape, and a guide groove is provided on the top side of the isolation shell. The needle-shaped component includes an annular part, and ears are provided on both sides of the annular part. The ears are inserted into the guide groove, and a protrusion is provided at the end of the annular part away from the screw.

9. A composite flow control device combining a needle valve and a pressure valve according to claim 8, characterized in that, The internal rotor includes an ultra-clean housing, a permanent magnet is disposed inside the ultra-clean housing, a second protrusion is disposed on the top of the ultra-clean housing, and the annular part is disposed of a second recess, with the second protrusion and the second recess engaging and connecting. The external rotor includes an electromagnet located inside the electromagnet frame. One end of the electromagnet frame is engaged with the isolation shell, and the other end of the electromagnet frame is connected to the planetary carrier. The isolation shell is provided with a first protrusion on the side away from the screw, and the first protrusion passes through the electromagnet frame and is disposed with the planetary carrier.

10. The operating method of the needle valve and pressure valve composite flow control device according to any one of claims 1-9, characterized in that, Includes the following: When the pressure valve is working, the external braking of the internal gear ring is released while the braking of the planetary carrier is maintained. The rotating shaft rotates, and due to the helical transmission formed between the additional component of the internal gear ring and the threaded hole of the connecting component, the connecting rod component drives the connecting rod component to move relative to the valve body of the pressure valve, controlling the opening degree of the pressure valve. When the opening degree of the pressure valve is zero, the pressure valve stops working. After the pressure valve stops working, the braking of the planetary carrier is released while the braking of the internal gear ring is maintained, and then the needle valve starts working. When the needle valve is working, the external braking of the planetary carrier is released, while the braking of the internal gear ring is maintained. The rotating shaft drives the planetary gears to rotate through the sun gear, which in turn drives the planetary carrier to rotate, driving the external rotor to rotate. This drives the internal rotor to rotate and move axially at the same time, driving the needle-type component to move axially and controlling the opening of the needle valve. When the opening of the needle valve is zero, the needle valve stops working. After that, the braking of the internal gear ring is released, while the braking of the planetary carrier is maintained, and the pressure valve starts to work. Alternatively, the braking of the planetary carrier and internal gear ring can be released externally, and the planetary carrier can rotate to control the opening of the needle valve. The connecting parts move relative to the rotating shaft, thereby controlling the opening of the pressure valve.

Images