A fast wafer position quantity detection system based on visual recognition

Abstract

The present invention discloses a rapid wafer position quantity detection system based on visual recognition, and relates to the technical field of wafer visual detection. The detection system comprises a machine platform; a mechanical arm installed in the machine platform; a detection chamber fixed on one side of the machine platform and provided with an observation window; a carrier assembly fixed in the detection chamber and used for clamping a film box; a detection assembly fixed on the observation window and located in the detection chamber; a reflective assembly fixed on an inner wall of the detection chamber away from the observation window, and the reflective assembly corresponds to the detection assembly. The present invention can avoid major changes to the detection chamber by installing the detection assembly on the observation window, thereby saving costs, and can improve the light distribution inside the detection chamber through the reflective assembly, thereby facilitating the detection of the detection assembly.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer visual inspection, and in particular to a rapid wafer position quantity inspection system based on visual recognition. Background Art

[0002] In the semiconductor wafer manufacturing process, it is crucial for the process machine to accurately identify the number and position of wafers in the cassette. Realizing this automated identification function can significantly improve the efficiency of the robotic arm in picking up and placing wafers, thereby saving valuable time and reducing the consumption of process gases. Especially in large-scale wafer semiconductor manufacturing plants, due to the large number of equipment and huge production capacity, accurate and efficient wafer identification and positioning technology is of great significance for improving overall production efficiency, maximizing the advantages of equipment, and avoiding production capacity losses.

[0003] To achieve this goal, semiconductor manufacturers need to invest in R&D or adopt advanced wafer identification and positioning technologies. These technologies may include high-precision visual systems, smart sensors, and supporting software algorithms. Through the comprehensive application of these technologies, the process machine can obtain the number and location information of the wafers in the cassette in real time, and accurately guide the robot arm to perform pick-and-place operations.

[0004] The existing inspection system uses the built-in visual sensor of the stage to perform inspections, and reports the number and position information of the detected chips to the software system in real time. The robotic arm can then accurately and quickly grab the chips at the specified position for subsequent semiconductor process steps based on the chip information already stored in the software system. However, when there is insufficient light in the equipment, the inspection results will be inaccurate, and the sensor angle cannot be adjusted, making it unsuitable for wafer boxes of various specifications.

[0005] In view of the above problems, the present invention provides a rapid wafer position quantity detection system based on visual recognition to solve the above problems. Summary of the invention

[0006] To achieve the above object, the present invention provides the following technical solution: a rapid wafer position quantity detection system based on visual recognition, comprising:

[0007] Machine;

[0008] A mechanical arm, installed in the machine platform;

[0009] An inspection chamber is fixed on one side of the machine platform and is provided with an observation window;

[0010] A stage assembly, fixed in the detection chamber, for clamping the film box;

[0011] A detection component, fixed on the observation window and located in the detection chamber;

[0012] A reflective component is fixed to the inner wall of the detection chamber away from the observation window, and the reflective component corresponds to the detection component;

[0013] Among them, the detection component includes a hinge, one end of the hinge is fixed on the observation window, and the other end face is fixed with a detection plate, on which a visual sensor is detachably installed, and one end face of the detection plate away from the hinge is hinged to one end of an adjusting cylinder body, and the other end of the adjusting cylinder body is hinged to a mounting plate, and the mounting plate is fixed on the observation window.

[0014] Further, preferably, the stage assembly comprises:

[0015] A fixed plate, fixed in the detection chamber;

[0016] A lifting motor is fixed on the fixing plate;

[0017] The carrier is slidably arranged on the fixed plate and driven by a screw-nut structure with the lifting motor;

[0018] A threaded rod, rotatably disposed on the lower end surface of the carrier and driven by an adjustment motor fixed on the carrier;

[0019] The adjusting blocks are configured as two, both of which are threadedly connected to the threaded rod, and the upper end surfaces of which are slidably connected to the carrier;

[0020] The pressing plate adopts a plurality of guide posts and is slidably arranged on the side where the two adjusting blocks are away from each other.

[0021] Further, preferably, a tension spring is provided between the pressing plate and the adjusting block.

[0022] Further, preferably, the reflective assembly includes:

[0023] A fixed frame, fixed to the inner wall of the inspection chamber;

[0024] A deflection plate, rotatably arranged on an end surface of the fixing frame away from the detection chamber;

[0025] A worm gear is rotatably arranged on one side of the fixing frame;

[0026] a turbine wheel, fixed to one end of the deflection plate and meshing with the worm;

[0027] A rotating assembly mounted on the deflection plate;

[0028] A clamping assembly, fixed on the rotating assembly;

[0029] The reflector is detachably mounted in the clamping assembly, and a clamping platform is fixed on the reflector, and the clamping platform is in a truncated cone shape.

[0030] Further, preferably, the rotating assembly comprises:

[0031] a bearing seat fixed to the deflection plate;

[0032] A rotating disk, which is rotatably arranged in the bearing seat by a rotating shaft;

[0033] A first motor, fixed to the deflection plate;

[0034] A bevel gear is fixed at one end of the rotating shaft and is transmission-connected to the first motor.

[0035] Further, preferably, the clamping assembly comprises:

[0036] A driving platform, fixed on the rotating disk;

[0037] a gear set rotatably disposed in the driving platform and driven by a second motor fixed on the driving platform;

[0038] The clamping screws are configured as three and arranged circumferentially on the rotating disk;

[0039] A sliding block is threadedly connected to the clamping screw, and one end of a hinged rod is hingedly connected to the sliding block;

[0040] The articulation tables are configured as three, circumferentially arranged on the driving table and corresponding to the clamping screws;

[0041] The clamping block has one end surface hinged on the hinged platform and the other end surface hinged on one end of the hinged rod.

[0042] Further, preferably, a clamping groove is provided in the clamping block, and the clamping grooves in the three clamping blocks together form a truncated cone shape.

[0043] Compared with the prior art, the present invention provides a rapid wafer position quantity detection system based on visual recognition, which has the following beneficial effects:

[0044] The present invention can avoid major changes to the inspection chamber and save costs by installing the inspection component on the observation window, and can improve the light distribution inside the inspection chamber through the reflective component, so as to facilitate the inspection of the inspection component, and when the wafers in the film box are inspected, the position and quantity information of the wafers are transmitted to the stage assembly, and then the stage assembly can adjust the position of the film box through the lifting motor and the adjustment motor, so that the position of each wafer in the film box is the same, thereby reducing the adjustment frequency of the robot arm, and when inspecting film boxes of different specifications, the angle of the visual sensor can be adjusted by adjusting the cylinder body, and the reflective component performs corresponding angle adjustment, thereby improving the light distribution inside the inspection chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a schematic diagram of the overall structure of a rapid wafer position quantity detection system based on visual recognition;

[0046] Figure 2 It is a structural schematic diagram of a stage assembly in a rapid wafer position quantity detection system based on visual recognition;

[0047] Figure 3 A schematic diagram of the structure of a detection component in a rapid wafer position quantity detection system based on visual recognition;

[0048] Figure 4 A schematic diagram of the structure of a reflective component in a rapid wafer position quantity detection system based on visual recognition;

[0049] Figure 5 A schematic diagram of the structure of a clamping component in a rapid wafer position quantity detection system based on visual recognition;

[0050] In the figure: 1, machine platform; 2, robot arm; 3, detection chamber; 4, stage assembly; 5, film box; 6, observation window; 7, detection assembly; 8, reflective assembly; 41, fixing plate; 42, lifting motor; 43, stage; 44, threaded rod; 45, adjustment motor; 46, adjustment block; 47, pressing plate; 71, hinge; 72, detection plate; 73, visual sensor; 74, adjustment cylinder; 75, mounting plate; 81, fixing frame; 82, offset Rotating plate; 83, worm; 84, turbine; 85, rotating assembly; 86, clamping assembly; 87, reflector; 88, clamping table; 851, bearing seat; 852, rotating disk; 853, rotating shaft; 854, bevel gear; 861, driving table; 862, gear set; 863, second motor; 864, clamping screw; 865, sliding block; 866, articulated rod; 867, articulated table; 868, clamping block; 869, clamping groove. DETAILED DESCRIPTION

[0051] Reference Figure 1-Figure 5 The present invention provides a technical solution: a rapid wafer position quantity detection system based on visual recognition, comprising:

[0052] Machine 1;

[0053] A mechanical arm 2, installed in the machine platform 1;

[0054] The inspection chamber 3 is fixed on one side of the machine platform 1 and is provided with an observation window 6;

[0055] The stage assembly 4 is fixed in the detection chamber 3 and is used to clamp the film box 5;

[0056] A detection component 7, fixed on the observation window 6 and located in the detection chamber 3;

[0057] A reflective component 8 is fixed to the inner wall of the detection chamber 3 away from the observation window 6, and the reflective component 8 corresponds to the detection component 7;

[0058] Among them, the detection component 7 includes a hinge 71, one end face of the hinge 71 is fixed on the observation window 6, and the other end face is fixed with a detection plate 72, on which a visual sensor 73 is detachably installed, and one end of the detection plate 72 away from the hinge 71 is hinged to one end of an adjusting cylinder 74, and the other end of the adjusting cylinder 74 is hinged to a mounting plate 75, and the mounting plate 75 is fixed on the observation window 6.

[0059] Among them, by installing the detection component 7 on the observation window 6, major changes to the detection chamber 3 can be avoided, saving costs, and the reflective component 8 can improve the light distribution inside the detection chamber 3, thereby facilitating the detection of the detection component.

[0060] In this embodiment, the stage assembly 4 includes:

[0061] A fixing plate 41, fixed in the detection chamber 3;

[0062] A lifting motor 42 is fixed on the fixing plate 41;

[0063] The carrier 43 is slidably disposed on the fixed plate 41 and driven by a screw-nut structure with the lifting motor 42;

[0064] A threaded rod 44 is rotatably disposed on the lower end surface of the carrier 43 and is driven by an adjustment motor 45 fixed on the carrier 43;

[0065] The adjusting blocks 46 are configured as two, both of which are threadedly connected to the threaded rod 44, and the upper end surfaces of which are slidably connected to the carrier 43;

[0066] The pressing plate 47 is slidably arranged on a side where the two adjusting blocks 46 are away from each other by using a plurality of guide posts.

[0067] That is to say, when the wafers in the film box 5 are inspected, the position and quantity information of the wafers are transmitted to the stage assembly 4, and then the stage assembly 4 can adjust the position of the film box 5 through the lifting motor 42 and the adjustment motor 45, so that the position of each wafer in the film box 5 is the same, reducing the adjustment frequency of the robot arm.

[0068] As a preferred embodiment, a tension spring is provided between the pressing plate 47 and the adjusting block 46 .

[0069] That is to say, the two pressing plates 47 can clamp the film box 5 by stretching the spring, so as to facilitate the adjustment of the position of the film box 5 .

[0070] In this embodiment, the reflective component 8 includes:

[0071] A fixing frame 81 is fixed to the inner wall of the detection chamber 3;

[0072] A deflection plate 82 is rotatably disposed on an end surface of the fixing frame 81 away from the detection chamber 3;

[0073] A worm 83, rotatably disposed on one side of the fixing frame 81;

[0074] a turbine 84, fixed to one end of the deflection plate 82 and meshing with the worm 83;

[0075] A rotating assembly 85 is mounted on the deflection plate 82;

[0076] A clamping assembly 86, fixed on the rotating assembly 85;

[0077] The reflector 87 is detachably mounted in the clamping assembly 86 , and a clamping platform 88 is fixed on the reflector 87 , and the clamping platform 88 is in a truncated cone shape.

[0078] It should be noted that different reflective materials can be installed in different areas on the reflective plate 87 so that the intensity of the light can be adjusted by the rotating component 85 .

[0079] As a preferred embodiment, the rotating assembly 85 includes:

[0080] A bearing seat 851 is fixed on the deflection plate 82;

[0081] The rotating disk 852 is rotatably disposed in the bearing seat 851 by using a rotating shaft 853;

[0082] A first motor, fixed on the deflection plate 82;

[0083] The bevel gear 854 is fixed to one end of the rotating shaft 853 and is drivingly connected to the first motor.

[0084] When detecting film boxes 5 of different specifications, the angle of the visual sensor 73 can be adjusted by adjusting the cylinder 74 , and the reflective component 8 performs corresponding angle adjustment to improve the light distribution inside the detection chamber 3 .

[0085] As a preferred embodiment, the clamping assembly 86 includes:

[0086] A driving platform 861 is fixed on the rotating disk 852;

[0087] A gear set 862 is rotatably disposed in the driving platform 861 and driven by a second motor 863 fixed on the driving platform 861;

[0088] The clamping screws 864 are configured as three and are circumferentially arranged on the rotating disk 852;

[0089] A sliding block 865 is threadedly connected to the clamping screw 864, and one end of a hinge rod 866 is hinged to the sliding block 865;

[0090] The articulation platforms 867 are configured as three and are arranged circumferentially on the driving platform 861 and correspond to the clamping screws 864;

[0091] The clamping block 868 has one end surface hinged on the hinged platform 867 and the other end surface hinged on one end of the hinged rod 866 .

[0092] As a preferred embodiment, a clamping groove 869 is provided in the clamping block 868, and the three clamping grooves 869 in the clamping block 868 together form a truncated cone shape.

[0093] Specifically, the film box 5 is first installed on the stage assembly 4, and then the angle of the visual sensor 73 is adjusted, so that the position and number of wafers in the film box 5 can be detected. While adjusting, the deflection plate 82 in the reflective assembly 8 is synchronously adjusted in angle, so that the reflective plate 87 corresponds to the visual sensor 73, and the light distribution inside the detection chamber 3 is improved. By installing the detection assembly 7 on the observation window 6, it is possible to avoid major changes to the detection chamber 3, saving costs, and the reflective assembly 8 can improve the light distribution inside the detection chamber, thereby facilitating the detection of the detection assembly. When the wafers in the film box 5 are detected, the position and quantity information of the wafers are transmitted to the stage assembly 4, and then the stage assembly 4 can adjust the position of the film box 5 through the lifting motor 42 and the adjustment motor 45, so that the position of each wafer in the film box 5 is the same, reducing the adjustment frequency of the robot 2, and when detecting film boxes 5 of different specifications, the angle of the visual sensor 73 can be adjusted by adjusting the cylinder body 74, and the reflective assembly 8 performs corresponding angle adjustment, thereby improving the light distribution inside the detection chamber 3.

[0094] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A rapid wafer position quantity detection system based on visual recognition, characterized in that: include: Machine (1); A mechanical arm (2) installed in the machine platform (1); An inspection chamber (3) is fixed on one side of the machine platform (1) and is provided with an observation window (6); A carrier assembly (4) fixed in the detection chamber (3) and used for clamping the film box (5); A detection component (7) fixed on the observation window (6) and located in the detection chamber (3); A reflective component (8) is fixed to an inner wall of the detection chamber (3) away from the observation window (6), and the reflective component (8) corresponds to the detection component (7); The detection assembly (7) comprises a hinge (71), one end face of the hinge (71) is fixed to the observation window (6), and the other end face is fixed with a detection plate (72), a visual sensor (73) is detachably mounted on the detection plate (72), one end of the detection plate (72) away from the hinge (71) is hinged to one end of an adjustment cylinder (74), the other end of the adjustment cylinder (74) is hinged to a mounting plate (75), and the mounting plate (75) is fixed to the observation window (6); The carrier assembly (4) comprises: A fixed plate (41) fixed in the detection chamber (3); A lifting motor (42) fixed on the fixing plate (41); The carrier (43) is slidably disposed on the fixed plate (41) and is driven by a screw-nut structure with the lifting motor (42); A threaded rod (44) rotatably disposed on the lower end surface of the carrier (43) and driven by an adjustment motor (45) fixed on the carrier (43); The adjusting blocks (46) are configured as two, both of which are threadedly connected to the threaded rod (44), and the upper end surfaces of which are slidably connected to the carrier (43); A pressing plate (47) is slidably arranged on a side of the two adjustment blocks (46) that are away from each other using a plurality of guide posts; The reflective component (8) comprises: A fixing frame (81) fixed to the inner wall of the detection chamber (3); A deflection plate (82) rotatably disposed on an end surface of the fixing frame (81) away from the detection chamber (3); A worm (83) rotatably disposed on one side of the fixing frame (81); A turbine (84) fixed to one end of the deflection plate (82) and meshing with the worm (83); A rotating assembly (85) mounted on the deflection plate (82); A clamping assembly (86) fixed on the rotating assembly (85); The reflective plate (87) is detachably mounted in the clamping assembly (86), and a clamping platform (88) is fixed on the reflective plate (87), wherein the clamping platform (88) is in the shape of a truncated cone.

2. According to the fast wafer position quantity detection system based on visual recognition in claim 1, it is characterized in that: A tension spring is provided between the pressing plate (47) and the adjusting block (46).

3. The rapid wafer position quantity detection system based on visual recognition according to claim 1 is characterized in that: The rotating assembly (85) comprises: A bearing seat (851) fixed on the deflection plate (82); A rotating disk (852) is rotatably disposed in the bearing seat (851) by means of a rotating shaft (853); a first motor fixed on the deflection plate (82); A bevel gear (854) is fixed to one end of the rotating shaft (853) and is drivingly connected to the first motor.

4. The rapid wafer position quantity detection system based on visual recognition according to claim 3 is characterized in that: The clamping assembly (86) comprises: A driving platform (861) fixed on the rotating disk (852); a gear set (862) rotatably disposed in the driving platform (861) and driven by a second motor (863) fixed on the driving platform (861); The clamping screws (864) are configured as three and are circumferentially arranged on the rotating disk (852); A sliding block (865) is threadedly connected to the clamping screw (864), and one end of a hinged rod (866) is hingedly connected to the sliding block (865); The articulation platforms (867) are configured as three and are arranged circumferentially on the driving platform (861) and correspond to the clamping screws (864); The clamping block (868) has one end surface hinged on the hinged platform (867) and the other end surface hinged on one end of the hinged rod (866).

5. The rapid wafer position quantity detection system based on visual recognition according to claim 4 is characterized in that: A clamping groove (869) is provided in the clamping block (868), and the clamping grooves (869) in the three clamping blocks (868) together form a truncated cone shape.

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