A battery cell precursor supply device

Abstract

The present invention provides a precursor supply device for a battery cell and a method thereof, wherein the device comprises: a base assembly, including a substrate, and the substrate is provided with a through hole for circulating gas. The present invention adjusts the distance between the substrate and the conveying assembly by means of an adjusting assembly, and the adjusting assembly adjusts the substrate and the conveying assembly to be close to each other, so that the distribution area of ​​the first precursor does not contact the distribution area of ​​the second precursor, and a passivation layer of multiple atomic layers is formed on the battery cell. The adjusting assembly adjusts the substrate and the conveying assembly to be away from each other, so that the first precursor and the second precursor contact each other in the end surface space of the battery cell and form aluminum oxide particles, and a passivation layer is formed on the battery cell by chemical vapor deposition, realizing the conversion between the atomic layer deposition method and the chemical vapor deposition method, so that the aluminum oxide layer on the battery cell meets both high-precision and fast deposition, and improves production efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of battery manufacturing, and in particular to a battery sheet precursor supply device and method thereof. Background Art

[0002] In the production process of solar cells, back passivation is required. The passivation material forms a passivation layer on the surface of the cell, which helps to reduce the carrier recombination on the surface of the cell, thereby improving the minority carrier life of the cell and the overall performance of the battery. The passivation layer has high chemical stability and good insulation properties, which can effectively block the contact between the carrier and the silicon wafer surface and reduce the surface recombination loss. The passivation layer on the cell is currently passivated by ALD and CVD. ALD, which stands for Atomic Layer Deposition, is a precise thin film deposition technology that accurately deposits the required materials layer by layer on the solid surface to form a thin film with precise controllable thickness and extremely high uniformity. CVD, which stands for Chemical Vapor Deposition, is a commonly used material synthesis method. Gases containing pre-deposited elements or compounds can be introduced into the reaction chamber. Under appropriate temperature, pressure and catalyst conditions, these gases undergo chemical reactions and are deposited on the substrate surface to form a solid film.

[0003] Atomic layer deposition and chemical vapor deposition are used for back passivation of battery cells. Due to the different deposition principles of atomic layer deposition and chemical vapor deposition, back passivation of battery cells mostly adopts a single deposition method. At present, when supplying precursors, battery cell deposition devices can only meet one of the atomic layer deposition method or chemical vapor deposition method. Among them, a single deposition method cannot simultaneously meet the requirements of high-precision deposition of the battery cell passivation layer and rapid deposition of the battery cell passivation layer to the required thickness, that is, it is impossible to shorten the deposition time while ensuring high-precision deposition on the battery cell, and the production efficiency is low. Summary of the invention

[0004] The purpose of the present invention is to provide a cell precursor supply device and method thereof, which can meet the requirements of high-precision deposition of cell passivation layer while shortening cell back passivation time, thus solving the problem of low production efficiency of ordinary cell back passivation.

[0005] To achieve the above-mentioned purpose, in a first aspect, the present invention provides a precursor supply device for a battery cell, comprising: a base component, comprising a substrate, the substrate being provided with through holes for circulating gas; a gas supply component, mounted on the substrate, the gas supply component being used to supply precursors, the precursors comprising a first precursor and a second precursor; a first distribution component, mounted on the bottom end surface of the substrate, the first distribution component being connected to the gas outlet end of the gas supply component, the first distribution component being used to spray the first precursor; a second distribution component, mounted on the bottom end surface of the substrate, the second distribution component being connected to the gas outlet end of the gas supply component, the second distribution component being used to spray the second precursor; a conveying component, connected to The first distribution component and the second distribution component are arranged opposite to each other, and the conveying component is used to transport the battery cell; the adjustment component is used to adjust the distance between the substrate and the conveying component; in a working state, the adjustment component adjusts the substrate and the conveying component to be close to each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component are not in contact, which is used to form a passivation layer on the battery cell by atomic layer deposition, and the adjustment component adjusts the substrate and the conveying component to be away from each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component are in contact, which is used to form a passivation layer on the battery cell by chemical vapor deposition.

[0006] The present invention adjusts the distance between the substrate and the conveying component by means of an adjusting component. The adjusting component adjusts the substrate and the conveying component to be close to each other, so that the distribution area of ​​the first precursor is not in contact with the distribution area of ​​the second precursor, and a passivation layer of multiple atomic layers is formed on the battery cell. The adjusting component adjusts the substrate and the conveying component to be away from each other, so that the first precursor and the second precursor are in contact with each other in the end surface space of the battery cell and form aluminum oxide particles, and a passivation layer is formed on the battery cell by chemical vapor deposition, thereby realizing the conversion between the atomic layer deposition method and the chemical vapor deposition method, so that the aluminum oxide layer on the battery cell can simultaneously meet the requirements of high-precision and fast deposition, thereby improving production efficiency.

[0007] In some embodiments, the adjustment component includes a telescopic rod, which is connected to the substrate and / or the conveying component and is used to adjust the distance between the substrate and the conveying component. The beneficial effect is that the distance between the substrate and the conveying component is adjusted by providing power through the telescopic rod.

[0008] In some embodiments, the telescopic end of the telescopic rod is fixedly connected to the top surface of the substrate, the fixed end of the telescopic rod is connected to the chamber of the battery cell processing device, and the telescopic rod is used to adjust the distance between the substrate and the conveying assembly. The beneficial effect is that the telescopic end of the telescopic rod fixes the top surface of the substrate, and the telescopic end of the telescopic rod drives the substrate to rise and fall to adjust the distance between the substrate and the conveying assembly.

[0009] In some embodiments, the conveyor assembly includes a conveyor frame and a conveyor belt; the bottom end surface of the conveyor frame is fixedly connected to the telescopic end of the telescopic rod, the fixed end of the telescopic rod is connected to the chamber of the battery cell processing device, and the telescopic rod is used to adjust the distance between the substrate and the conveyor frame; the conveyor belt is arranged on the conveyor frame, and the conveyor belt is used to transport the battery cells. The beneficial effect is that the bottom of the conveyor frame is connected to the telescopic end of the telescopic rod, and the telescopic rod drives the conveyor frame to rise and fall, thereby adjusting the distance between the battery cells and the conveyor assembly.

[0010] In some embodiments, the first distribution component and the second distribution component both include a distribution member and a plurality of injection members; the distribution member of the first distribution component and the distribution member of the second distribution component are both connected to the gas supply component for conveying the precursor; the injection member connects the distribution member of the first distribution component and the distribution member of the second distribution component for injecting the precursor; the plurality of injection members of the first distribution component and the plurality of injection members of the second distribution component are arranged at intervals and arranged on the same horizontal plane. The beneficial effect is that the plurality of injection members are arranged on the same plane, ensuring that the injection distance of the first precursor and the second precursor is the same as that of the battery sheet at the bottom, and at the same time ensuring that the injection distribution range of the first precursor and the second precursor is the same, thereby better controlling the distribution range of the first precursor and the second precursor.

[0011] In some embodiments, the distribution member includes a distribution rod; a plurality of connection holes are arranged on the distribution rod, the air inlet end of the distribution rod is connected to the air supply assembly, the connection hole is connected to the injection member, and the distribution rod is used to transport the precursor and introduce a plurality of the injection members. The beneficial effect is that the plurality of injection members can quickly introduce the corresponding first precursor and second precursor through the distribution rod, and the first precursor and the second precursor can be synchronously injected in multiple stages through the plurality of injection members.

[0012] In some embodiments, the injection member includes a crossbar, a bottom plate and an injection plate; the air inlet end of the crossbar is connected to the connection hole, and the crossbar is used to transport the precursor; the bottom plate is connected to the air outlet end of the crossbar, and a groove is provided on the bottom plate for circulating gas; the injection plate is arranged between the air outlet end of the crossbar and the bottom plate, and a plurality of injection holes are arranged on the injection plate, and the injection holes correspond to the grooves for injecting the precursor. The beneficial effect is that the plurality of injection holes on the injection plate are used to inject the first precursor and the second precursor, and form a plurality of adjacent injection areas for covering the battery cell with spray treatment.

[0013] In some embodiments, the gas supply assembly includes a gas distribution plate, a first pipeline and a second pipeline; the gas distribution plate is installed on the top surface of the substrate, and the gas distribution plate connects the first pipeline and the second pipeline to distribute the first precursor and the second precursor; the gas outlet end of the first pipeline is connected to the distribution rod of the first distribution assembly to transport the first precursor; the gas outlet end of the second pipeline is connected to the distribution rod of the second distribution assembly to transport the second precursor. The beneficial effect is that the first precursor and the second precursor are distributed through the hollow cavity inside the distribution rod to supply the first precursor and the second precursor to multiple injection parts.

[0014] In some embodiments, a top plate is installed on the top surface of the substrate, and the top plate covers the through-hole distribution area on the substrate and divides the top space of the substrate into a plurality of channels so that the precursors can flow in the channels. The beneficial effect is that a stronger negative pressure environment is formed through the multiple flow channels on the top plate, so that the first precursor and the second precursor can be quickly and centrally discharged through the through-holes on the substrate, thereby improving the discharge efficiency of the first precursor and the second precursor.

[0015] In a second aspect, an embodiment of the present invention provides a method for supplying precursors to a battery cell, including: the gas supply component introduces the first precursor into a first distribution component, and introduces the second precursor into a second distribution component; the conveying component conveys the battery cell to below the base component; the adjusting component adjusts the base component and the conveying component to be close to each other, so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component are not in contact, so as to form a passivation layer on the battery cell by atomic layer deposition; the adjusting component adjusts the base component and the conveying component to be away from each other, so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component are in contact, so as to form a passivation layer on the battery cell by chemical vapor deposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the three-dimensional structure of a first embodiment of a cell precursor supply device provided by the present invention;

[0017] Figure 2 A schematic diagram of the exploded structure of the first embodiment of the battery cell precursor supply device provided by the present invention;

[0018] Figure 3 A bottom view of a substrate of a cell precursor supply device provided for the present invention;

[0019] Figure 4 A schematic diagram of the three-dimensional structure of a second embodiment of a cell precursor supply device provided by the present invention;

[0020] Figure 5A diagram of a first use state of a first embodiment of a battery cell precursor supply device provided by the present invention;

[0021] Figure 6 A diagram of a second use state of the first embodiment of a cell precursor supply device provided by the present invention;

[0022] Figure 7 A diagram of a first use state of a second embodiment of a cell precursor supply device provided by the present invention;

[0023] Figure 8 A diagram of a second use state of a second embodiment of a cell precursor supply device provided by the present invention;

[0024] Fig. 9 A schematic diagram of the explosion structure of the injection member of the battery cell precursor supply device is provided for the present invention;

[0025] Fig.10 A schematic diagram of the injection state of the injection hole of the battery cell precursor supply device is provided for the present invention;

[0026] Fig.11 Schematic diagram of the infinite space submerged turbulent jet model. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the present invention clearer, the technical scheme in the embodiment of the present application will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0029] In this application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0031] At present, when supplying precursors, the cell deposition device can only satisfy one of the atomic layer deposition method or the chemical vapor deposition method. Among them, a single deposition method cannot simultaneously satisfy the high-precision deposition of the cell passivation layer and the rapid deposition of the cell passivation layer to the required thickness, that is, it cannot guarantee the short deposition time while ensuring high-precision deposition on the cell, and the production efficiency is low.

[0032] In view of the above problems, the embodiments of the present invention provide the following technical solutions to overcome the above problems.

[0033] Figure 1 A schematic diagram of the three-dimensional structure of a first embodiment of a cell precursor supply device is provided for the present invention. Figure 2 A schematic diagram of the exploded structure of the first embodiment of the battery cell precursor supply device provided by the present invention. Figure 3 A bottom view of a substrate of a cell precursor supply device is provided for the present invention. Figure 4 A schematic diagram of the three-dimensional structure of a second embodiment of a cell precursor supply device is provided for the present invention. Figure 5 A diagram of the first use state of the first embodiment of a cell precursor supply device provided for the present invention (the first use state is deposition by atomic layer deposition). Figure 6 A diagram of the second use state of the first embodiment of the cell precursor supply device provided for the present invention (the second use state is deposition by chemical vapor deposition). Figure 7 A diagram of a first use state of a second embodiment of a battery cell precursor supply device is provided for the present invention. Figure 8 A second usage state diagram of the second embodiment of the battery cell precursor supply device of the present invention is provided. Fig. 9 A schematic diagram of the explosion structure of the injection component of the battery cell precursor supply device is provided for the present invention. Fig.10 A schematic diagram of the injection state of the injection hole of the battery cell precursor supply device is provided for the present invention. Fig.11 Schematic diagram of the infinite space submerged turbulent jet model.

[0034] like Figure 1-Figure 10 As shown, in a specific embodiment of the present invention, a precursor supply device for a battery cell includes: a base component 1, including a substrate 101, and the substrate 101 is provided with a through hole 102 for circulating gas; a gas supply component 2, installed on the substrate 101, and the gas supply component 2 is used to supply precursors, and the precursors include a first precursor and a second precursor; a first distribution component 3, which is installed on the bottom end surface of the substrate 101, and the first distribution component 3 is connected to the gas outlet end of the gas supply component 2, and the first distribution component 3 is used to spray the first precursor; a second distribution component 4, which is installed on the bottom end surface of the substrate 101, and the second distribution component 4 is connected to the gas outlet end of the gas supply component 2, and the second distribution component 4 is used to spray the second precursor; a conveying component 5, The conveying component 5 is arranged opposite to the first distribution component 3 and the second distribution component 4, and is used to transport the battery cells; the adjusting component 6 is used to adjust the distance between the substrate 101 and the conveying component 5; in the working state, the adjusting component 6 adjusts the substrate 101 and the conveying component 5 to be close to each other, so that the first precursor sprayed by the first distribution component 3 and the second precursor sprayed by the second distribution component 4 are not in contact, which is used to form a passivation layer on the battery cell by atomic layer deposition; the adjusting component 6 adjusts the substrate 101 and the conveying component 5 to be away from each other, so that the first precursor sprayed by the first distribution component 3 and the second precursor sprayed by the second distribution component 4 are in contact, which is used to form a passivation layer on the battery cell by chemical vapor deposition.

[0035] Specifically, the substrate 101 in the base component 1 provides a connection base for the components of the device. When the passivation layer is formed by atomic layer deposition, the through hole 102 on the substrate 101 is used to timely guide out the first precursor and the second precursor, wherein the first precursor is trimethylaluminum (TMA) carried by an inert gas, and the second precursor is water vapor carried by an inert gas, so as to avoid the first precursor and the second precursor from combining to form aluminum oxide, which affects the quality of the atomic layer deposited aluminum oxide layer on the battery cell, and in the later stage of forming the aluminum oxide passivation layer on the battery cell by chemical vapor deposition, the through hole 102 is used to guide out the remaining gas. The gas supply component 2 introduces the first precursor and the second precursor into the first distribution component 3 and the second distribution component 4 respectively, wherein the first distribution component 3 sprays the first precursor and the second distribution component 4 sprays the second precursor, and the first precursor and the second precursor both diffuse rapidly. The conveying component 5 conveys the battery cell to the lower end of the first distribution component 3 and the second distribution component 4, so that the sprayed and diffused first precursor and the second precursor contact the battery cell, and the distance between the substrate 101 and the conveying component 5 is adjusted by the adjusting component 6, thereby adjusting the contact state between the first precursor and the second precursor and the battery cell. In the working state, as Figure 5 and Figure 7 As shown, the regulating component 6 regulates the substrate 101 and the conveying component 5 to be close to each other. Due to the space distance limitation formed between the substrate 101 and the conveying component 5, the distribution range of the first precursor and the second precursor injection is also limited, so that the distribution area of ​​the first precursor does not contact the distribution area of ​​the second precursor, and after the first precursor and the second precursor contact the battery cell, the excess first precursor and the second precursor are discharged through the through hole 102 on the substrate 101, so that the first precursor and the second precursor are separately in contact with the battery cell, and the first precursor and the second precursor atomic layer film are formed on the battery cell. The battery cell moves back and forth so that the first precursor and the second precursor of the atomic layer are combined to form a multi-layer atomic layer aluminum oxide layer, that is, a passivation layer is formed on the battery cell by atomic layer deposition, as shown in FIG. Figure 6 and Figure 8 As shown, the adjusting component 6 adjusts the substrate 101 and the conveying component 5 to move away from each other. Since the distance between the substrate 101 and the conveying component 5 is large enough, the first precursor sprayed by the first distribution component 3 and the second precursor sprayed by the second distribution component 4 form aluminum oxide particles in the space on the upper end surface of the battery cell, and the aluminum oxide particles are deposited on the battery cell, that is, a passivation layer is formed on the battery cell by chemical vapor deposition.

[0036] In the present invention, the distance between the substrate 101 and the conveying component 5 is adjusted by the adjusting component 6. The adjusting component 6 adjusts the substrate 101 and the conveying component 5 to be close to each other, so that the distribution area of ​​the first precursor is not in contact with the distribution area of ​​the second precursor, and a passivation layer of multiple atomic layers is formed on the battery cell. The adjusting component 6 adjusts the substrate 101 and the conveying component 5 to be away from each other, so that the first precursor and the second precursor are in contact with each other in the end surface space of the battery cell and form aluminum oxide particles, and a passivation layer is formed on the battery cell by chemical vapor deposition, thereby realizing the conversion between the atomic layer deposition method and the chemical vapor deposition method, so that the aluminum oxide layer on the battery cell can meet both high-precision and fast deposition, thereby improving production efficiency.

[0037] In a specific embodiment of the present invention, Figure 1-Figure 8 As shown, the adjustment component 6 includes a telescopic rod 601, which is connected to the substrate 101 and / or the conveying component 5, and is used to adjust the distance between the substrate 101 and the conveying component 5. The telescopic rod 601 provides power to adjust the distance between the substrate 101 and the conveying component 5. One way (the second embodiment) is that the substrate 101 is mobile, the conveying component 5 is fixed, and the telescopic rod 601 is specifically connected to the substrate 101, and the telescopic rod 601 drives the substrate 101 to move, and the distance between the substrate 101 and the conveying component 5 is adjusted. Another way (the first embodiment) is that the substrate 101 is fixed, the conveying component 5 is mobile, and the telescopic rod 601 is specifically connected to the conveying component 5, and the telescopic rod 601 drives the conveying component 5 to move, and the distance between the conveying component 5 and the substrate 101 is adjusted. The telescopic rod 601 is a telescopic rod-shaped object, and the telescopic rod 601 includes an automatically controlled telescopic rod such as a hydraulic telescopic rod, an electric telescopic rod, and a pneumatic telescopic rod, which is used to automatically control and adjust the distance between the base component 1 and the conveying component 5 .

[0038] In a specific embodiment of the present invention, Figure 4 , Figure 7 and Figure 8 As shown, the telescopic end of the telescopic rod 601 is fixedly connected to the top surface of the substrate 101, and the fixed end of the telescopic rod 601 is connected to the chamber of the battery cell processing device. The telescopic rod 601 is used to adjust the distance between the substrate 101 and the conveying assembly 5. The telescopic end of the telescopic rod 601 fixes the top surface of the substrate 101, and the telescopic end of the telescopic rod 601 drives the substrate 101 to rise and fall to adjust the distance between the substrate 101 and the conveying assembly 5.

[0039] In a specific embodiment of the present invention, Figure 1 , Figure 2 , Figure 5 and Figure 6As shown, the conveying assembly 5 includes a conveying frame and a conveyor belt; the bottom end surface of the conveying frame is fixedly connected to the telescopic end of the telescopic rod 601, the fixed end of the telescopic rod 601 is connected in the chamber of the battery cell processing device, and the telescopic rod 601 is used to adjust the distance between the substrate 101 and the conveying frame; the conveyor belt is arranged on the conveying frame, and the conveyor belt is used to transport the battery cells. The conveying assembly 5 is mainly composed of a conveying frame and a conveyor belt, and the conveyor belt is installed on the conveying frame for transporting the battery cells. The bottom of the conveying frame is connected to the telescopic end of the telescopic rod 601, and the other end of the telescopic rod 601 is fixed in the chamber of the battery cell processing device. The telescopic rod 601 drives the conveying frame to rise and fall, thereby adjusting the distance between the battery cell and the conveying assembly 5.

[0040] In a specific embodiment of the present invention, Figure 2 and Figure 3 As shown, the first distribution component 3 and the second distribution component 4 both include distribution parts and several injection parts, wherein the distribution parts and injection parts in the first distribution component 3 and the second distribution component 4 have the same structure and function and are described as the same component; the distribution parts of the first distribution component 3 and the distribution parts of the second distribution component 4 are both connected to the gas supply component 2 for conveying the precursor; the injection parts connect the distribution parts of the first distribution component 3 and the distribution parts of the second distribution component 4 for injecting the precursor; the several injection parts of the first distribution component 3 and the several injection parts of the second distribution component 4 are arranged at intervals and arranged on the same horizontal plane. The distribution parts included in the first distribution component 3 and the second distribution component 4 distribute the first precursor and the second precursor, and then distribute the first precursor and the second precursor in the corresponding several injection parts through the distribution components, and inject the first precursor and the second precursor through the several injection parts to form the injection distribution area of ​​the first precursor and the second precursor, and the several injection parts in the first distribution component 3 and the several injection parts in the second distribution component 4 are arranged at intervals, so that the first precursor and the second precursor distribution area injected by the injection parts are distributed at intervals. Several injection parts are arranged on the same plane to ensure that the injection distance of the first precursor and the second precursor is the same as the bottom battery cell, and at the same time ensure that the injection distribution range of the first precursor and the second precursor is the same, thereby better controlling the distribution range of the first precursor and the second precursor.

[0041] In a specific embodiment of the present invention, Figure 2 and Figure 3As shown, the distribution member includes a distribution rod 301; a plurality of connection holes are arranged on the distribution rod 301, the air inlet end of the distribution rod 301 is connected to the air supply component 2, and the connection hole is connected to the injection member, and the distribution rod 301 is used to transport the precursor and introduce a plurality of injection members. The hollow distribution rod 301 distributes the first precursor and the second precursor introduced by the air supply component 2, and enables the plurality of injection members connected to the distribution rod 301 of the first distribution component 3 to inject the first precursor, and the plurality of injection members connected to the distribution rod 301 of the second distribution component 4 to inject the second precursor, so that the plurality of injection members quickly introduce the corresponding first precursor and the second precursor through the distribution rod 301, and the plurality of injection members synchronously inject the first precursor and the second precursor in multiple stages.

[0042] Further, such as Figure 2 As shown, the cross section of the distribution rod 301 is square, and the plurality of connection holes on the distribution rod 301 are arranged at equal intervals, and the connection holes are used to connect the injection member accordingly. The distribution rod 301 with a square cross section is convenient for matching and fitting to be connected to the bottom end surface of the substrate 101, so that the distribution rod 301 is stably connected to the bottom end surface of the substrate 101, and at the same time, the plurality of connection holes at equal intervals on the distribution rod 301 are connected to the injection member, so that the plurality of injection members are installed at equal intervals on the distribution rod 301, so that the first precursor distribution area and the second precursor distribution area injected by the injection member are distributed at equal intervals.

[0043] In a specific embodiment of the present invention, Fig. 9 As shown, the injection member includes a crossbar 302, a bottom plate 304 and an injection plate 305; the air inlet end of the crossbar 302 is connected to the connecting hole, and the crossbar 302 is used to transport the precursor; the bottom plate 304 is connected to the air outlet end of the crossbar 302, and a groove is provided on the bottom plate 304 for circulating gas; the injection plate 305 is arranged between the air outlet end of the crossbar 302 and the bottom plate 304, and a plurality of injection holes 306 are arranged on the injection plate 305, and the injection holes 306 correspond to the grooves and are used to inject the precursor. The air outlet end of the crossbar 302 is connected to the bottom plate 304, and the bottom plate 304 is used to limit the installation of the injection plate 305, and the injection holes 306 on the injection plate 305 are arranged corresponding to the grooves on the bottom plate 304 to avoid obstructing the injection of the injection holes 306, and the bottom plate 304 is bolted to the crossbar 302 to facilitate the installation and disassembly of the bottom plate 304 and the injection plate 305. The plurality of spray holes 306 on the spray plate 305 are used to spray the first precursor and the second precursor and form a plurality of adjacent spray areas for performing a covering spraying process on the battery cell.

[0044] Further, such as Fig. 9As shown, an annular sealing groove is provided on the gas outlet end of the cross bar 302 and the bottom plate 304, and a sealing ring 303 is embedded and installed in the sealing groove of the cross bar 302 and the sealing groove of the bottom plate 304. The cross bar 302 and the bottom plate 304 are both embedded and installed with the sealing ring through the annular sealing groove. After the injection plate 305 is limitedly installed, the cross bar 302, the injection plate 305 and the bottom plate 304 are all sealed and connected to avoid gas leakage, and the overall sealing performance is good.

[0045] In a specific embodiment of the present invention, Figure 1 , Figure 2 and Figure 3 As shown, the gas supply component 2 includes a gas distribution plate 201, a first pipeline 202 and a second pipeline 203; the gas distribution plate 201 is installed on the top surface of the substrate 101, and the gas distribution plate 201 connects the first pipeline 202 and the second pipeline 203 to distribute the first precursor and the second precursor; the gas outlet end of the first pipeline 202 is connected to the distribution rod 301 of the first distribution component 3 to transport the first precursor; the gas outlet end of the second pipeline 203 is connected to the distribution rod 301 of the second distribution component 4 to transport the second precursor. Specifically, the gas distribution plate 201 is connected to the first precursor and the second precursor input pipeline, and the gas distribution plate 201 distributes the first precursor and the second precursor to the corresponding first pipeline 202 and the second pipeline 203. The first pipeline 202 and the second pipeline 203 are connected to one end of the distribution rod 301 (not shown in the figure). The first pipeline 202 and the second pipeline 203 respectively introduce the first precursor and the second precursor into one end of the distribution rod 301, and distribute them through the hollow cavity inside the distribution rod 301 to supply the first precursor and the second precursor to multiple injection parts.

[0046] Further, such as Figure 3 As shown, two groups of first pipes 202 and second pipes 203 are connected to the gas distribution plate 201 and are connected to the two ends of the distribution rod 301. The two groups of first pipes 202 and second pipes 203 introduce the first precursor and the second precursor simultaneously through the two ends of the distribution rod 301, so that the first precursor and the second precursor can be distributed more quickly in the distribution rod 301, while reducing the loss of internal pressure of the rod-shaped distribution rod 301, thereby reducing the pressure difference between several injection parts on the distribution rod 301, and ensuring that the distribution area of ​​the first precursor and the distribution area of ​​the second precursor are sprayed uniformly.

[0047] Further, such as Fig. 9As shown, a plurality of the injection holes 306 are arranged in the middle of the injection plate 305 and are arranged in the same straight line to inject the precursor in the same straight line. A plurality of injection holes 306 are arranged in the middle of the injection plate 305 and are arranged in the same straight line, which can better locate the injection position of the injection plate 305 and allow the precursor to be injected in the same straight line to better control the injection distribution range.

[0048] Further, such as Fig.10 As shown, the diameter of the outlet portion of the injection hole 306 increases gradually, and it is conical, so that the distribution area of ​​the injection precursor is conical. The diameter of the outlet portion of the injection hole 306 increases gradually along the gas ejection direction, and a conical injection space is formed at the outlet end of the injection hole 306. The precursor ejected from the conical outlet portion of the injection hole 306 is a conical area, which better controls the distribution range of the precursor. The specific principle is as follows;

[0049] The precursor in the injection hole 306 has a certain pressure and is injected into the lower end space, that is, the gas is injected into a limited space, such as Fig.10 As shown, the injection stage is divided into a jet section, a vortex section and a free expansion section, wherein the jet section is to contact the first precursor and the second precursor with the solar panel, and the gas in the vortex section and the free expansion section is absorbed, which does not affect the injection state of the gas. The jet section is similar to the infinite space submerged turbulent jet model. The infinite space submerged turbulent jet model is now used to analyze the jet section of the gas injection in a finite space, and an infinite space submerged turbulent jet model is established. With the injection hole 306 vertical section and the injection pole of the gas in the injection hole 306 as point O, the following can be established: Fig.11 The coordinate system shown; the jet core velocity is , half of the angle between the outer boundary of the jet is , the radius of the jet section is R, and the distance from the radius of the jet section to the extreme point is X, the relationship between the jet radius:

[0050] The radius R of the jet cross section is proportional to the distance X from the cross section to the extreme point O;

[0051] ;

[0052] For circular cross-section: K=3.4

[0053] According to the geometric relationship ; is the turbulence coefficient;

[0054]

[0055]

[0056] When the turbulence coefficient remains unchanged, the jet cross-sectional radius R is proportional to the distance Related, that is, the jet area and distance Related;

[0057] Where s is the distance from the outlet to the cross section;

[0058] is the exit radius;

[0059] is the distance from the pole to the cross section;

[0060] is the dimensionless distance from the pole to any cross section;

[0061] is the distance from point O to the injection port;

[0062] By analogy with the jet section in a finite space and using the infinite space submerged turbulent jet model, it can be obtained that, when the outlet velocity in the injection hole 306 is constant, the range of the injection in the injection stage is related to the distance between the injection hole 306 and the battery cell. By controlling the distance between the injection hole 306 and the battery cell, the distribution range of the first precursor and the distribution range of the second precursor can be controlled, thereby achieving the purpose of controlling whether the first precursor and the second precursor are in contact or not.

[0063] In a specific embodiment of the present invention, Figure 2 As shown, a top plate 103 is installed on the top surface of the substrate 101, and the top plate 103 covers the distribution area of ​​the through holes 102 on the substrate 101, and divides the top space of the substrate 101 into a plurality of channels, so that the precursors can flow in the channels. The top plate 103 installed on the upper end of the substrate 101 divides its upper end area into a plurality of circulation channels. When the excess first precursor and the second precursor are exported, a stronger negative pressure environment is formed through the plurality of circulation channels on the top plate 103, so that the first precursor and the second precursor can be quickly and centrally exported through the through holes 102 on the substrate 101, thereby improving the efficiency of exporting the first precursor and the second precursor.

[0064] A cell precursor supply method is applied to a cell precursor supply device, the cell precursor supply method comprising: the gas supply component 2 introduces the first precursor into the first distribution component 3, and introduces the second precursor into the second distribution component 4; the conveying component 5 conveys the cell to the bottom of the base component 1; the adjusting component 6 adjusts the base component 1 and the conveying component 5 to be close to each other, so that the first precursor sprayed by the first distribution component 3 and the second precursor sprayed by the second distribution component 4 are not in contact, so as to form a passivation layer on the cell by atomic layer deposition; the adjusting component 6 adjusts the base component 1 and the conveying component 5 to be away from each other, so that the first precursor sprayed by the first distribution component 3 and the second precursor sprayed by the second distribution component 4 are in contact, so as to form a passivation layer on the cell by chemical vapor deposition.

[0065] Specifically, the battery cells are transported to the bottom of the first distribution component 3 and the second distribution component 4 by the conveying component 5 at the bottom of the base component 1, and the conveying component 5 drives the battery cells to reciprocate. The base component 1 is provided with an exhaust device to form a negative pressure on the top surface of the base component 1; the first precursor and the second precursor in the precursor are pressurized and introduced into the gas supply component 2; the gas supply component 2 introduces the first precursor into the first distribution component 3, and introduces the second precursor into the second distribution component 4;

[0066] The regulating component 6 regulates the base component 1 and the conveying component 5 to be close to each other, and the distance between the substrate 101 and the conveying component 5 is reduced, so as to limit the distribution range of the first precursor and the second precursor, and the diffusion area of ​​the first precursor does not contact the diffusion area of ​​the second precursor, so that the first precursor at the atomic layer level is covered on the battery cell, and the battery cell moves back and forth, so that the first precursor and the second precursor meet and form an atomic layer deposited aluminum oxide layer; the excess first precursor and the second precursor after spraying to the battery cell pass through the through hole 102 and are discharged by the exhaust device; a multi-layer atomic layer deposited aluminum oxide layer is formed on the reciprocating battery cell;

[0067] The regulating component 6 regulates the base component 1 and the conveying component 5 to move away from each other, and the distance between the substrate 101 and the conveying component 5 increases. The first precursor diffusion region contacts the second precursor diffusion region, so that the first precursor and the second precursor meet and contact in the top area of ​​the cell. The first precursor and the second precursor contact to form aluminum oxide particles and deposit on the atomic layer deposited aluminum oxide layer of the cell, and form an aluminum oxide layer by chemical vapor deposition. A multi-layer aluminum oxide layer formed by chemical vapor deposition is formed on the reciprocating cell, and reaches the required thickness. The excess first precursor and the diffused second precursor pass through the through hole 102 on the substrate 101 and are discharged by the exhaust device. The cell passivation completes the cell back passivation operation, and the cell is removed for subsequent operations.

[0068] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto, and any changes or replacements within the technical scope disclosed in the embodiment of the present application should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application should be based on the protection scope of the claims.

Claims

1. A battery cell precursor supply device, characterized in that: include: The base assembly includes a substrate, wherein the substrate is provided with through holes for circulating gas; A gas supply component is installed on the substrate, and the gas supply component is used to supply precursors, and the precursors include a first precursor and a second precursor; A first distribution component is installed on the bottom end surface of the substrate, the first distribution component is connected to the gas outlet end of the gas supply component, and the first distribution component is used to spray the first precursor; A second distribution component is installed on the bottom end surface of the substrate, the second distribution component is connected to the gas outlet end of the gas supply component, and the second distribution component is used to spray the second precursor; A conveying assembly, arranged opposite to the first distribution assembly and the second distribution assembly, and the conveying assembly is used to transport the battery cells; An adjusting component, used for adjusting the distance between the substrate and the conveying component; In a working state, the adjusting component adjusts the substrate and the conveying component to be close to each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component do not contact each other, so as to form a passivation layer on the battery cell by atomic layer deposition. The adjusting component adjusts the substrate and the conveying component to be away from each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component contact each other, so as to form a passivation layer on the battery cell by chemical vapor deposition.

2. The cell precursor supply device according to claim 1, characterized in that: The adjusting assembly comprises a telescopic rod, which is connected to the substrate and / or the conveying assembly and is used to adjust the distance between the substrate and the conveying assembly.

3. The cell precursor supply device according to claim 2, characterized in that: The telescopic end of the telescopic rod is fixedly connected to the top surface of the substrate, and the fixed end of the telescopic rod is connected to the chamber of the battery cell processing device. The telescopic rod is used to adjust the distance between the substrate and the conveying assembly.

4. The cell precursor supply device according to claim 2, characterized in that: The conveying assembly comprises a conveying frame and a conveying belt; The bottom end surface of the conveyor rack is fixedly connected to the telescopic end of the telescopic rod, the fixed end of the telescopic rod is connected in the chamber of the battery cell processing device, and the telescopic rod is used to adjust the distance between the substrate and the conveyor rack; The conveyor belt is arranged on the conveyor frame, and the conveyor belt is used for transporting battery cells.

5. The cell precursor supply device according to claim 1, characterized in that: The first distribution assembly and the second distribution assembly each include a distribution member and a plurality of injection members; The distribution member of the first distribution assembly and the distribution member of the second distribution assembly are both connected to the gas supply assembly for conveying the precursor; The injection member connects the distribution member of the first distribution assembly and the distribution member of the second distribution assembly, and is used to inject the precursor; The plurality of injection members of the first distribution assembly and the plurality of injection members of the second distribution assembly are arranged at intervals and on the same horizontal plane.

6. The cell precursor supply device according to claim 5, characterized in that: The distribution member includes a distribution rod; The distribution rod is provided with a plurality of connection holes, the air inlet end of the distribution rod is connected to the air supply assembly, the connection holes are connected to the injection components, and the distribution rod is used to transport the precursor and introduce the plurality of injection components.

7. The cell precursor supply device according to claim 6, characterized in that: The injection member comprises a crossbar, a bottom plate and an injection plate; The air inlet end of the crossbar is connected to the connecting hole, and the crossbar is used to transport the precursor; The bottom plate is connected to the gas outlet end of the cross bar, and a groove is provided on the bottom plate for gas circulation; The injection plate is arranged between the gas outlet end of the cross bar and the bottom plate, and a plurality of injection holes are arranged on the injection plate. The injection holes correspond to the grooves and are used for injecting the precursor.

8. The cell precursor supply device according to claim 7, characterized in that: The gas supply assembly includes a gas distribution plate, a first pipeline and a second pipeline; The gas distributor is installed on the top surface of the substrate, and the gas distributor connects the first pipeline and the second pipeline to distribute the first precursor and the second precursor; The gas outlet end of the first pipeline is connected to the distribution rod of the first distribution assembly to transport the first precursor; The gas outlet end of the second pipeline is connected to the distribution rod of the second distribution assembly for conveying the second precursor.

9. The cell precursor supply device according to claim 1, characterized in that: A top plate is installed on the top surface of the substrate, and the top plate covers the through-hole distribution area on the substrate and divides the top space of the substrate into a plurality of channels so that the precursor can flow in the channels.

10. A method for supplying precursor to a battery cell, characterized in that: The cell precursor supply device according to any one of claims 1 to 9, wherein the cell precursor supply method comprises: The gas supply assembly introduces the first precursor into a first distribution assembly, and introduces the second precursor into a second distribution assembly; The conveying assembly conveys the battery sheet to below the base assembly; The regulating component regulates the substrate component and the conveying component to be close to each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component do not contact each other, so as to form a passivation layer on the battery cell by atomic layer deposition; The regulating component regulates the base component and the conveying component to move away from each other so that the first precursor sprayed by the first distribution component contacts the second precursor sprayed by the second distribution component, so as to form a passivation layer on the battery cell by chemical vapor deposition.

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