Hemispherical charged particle energy analyzer

Abstract

The invention discloses a hemispherical charged particle energy analyzer, which belongs to the technical field of charged particle energy spectrum testing, and comprises an inner / outer hemispherical electrode, an electrostatic lens, a deceleration electrode, a detector and a fringe electric field correction electrode, through the arrangement of the inner and outer concentric fringe electric field correction electrodes, the fringe electric field effect of the inner hemisphere electrode and the outer hemisphere electrode can be effectively corrected, and an effective fringe electric field correction effect is realized in different charged particle initial energy and selective passing energy test scenes. The problem that the flight track of charged particles is widened due to the fringe electric field effect is effectively relieved, and the energy resolution of energy spectrum testing is improved. Furthermore, the electrostatic lens adopts an eccentric incidence mode to enable the charged particles to enter the hemispherical deflector from the eccentric position, the eccentric incidence mode can further restrain the problem of broadening of the trajectory of the charged particles, and the energy spectrum resolution is improved.

Description

Technical Field

[0001] The invention relates to the technical field of charged particle energy spectrum testing, and in particular to a hemispherical charged particle energy analyzer. Background Art

[0002] Advanced analysis and testing technologies for charged particle spectroscopy, such as X-ray photoelectron spectroscopy XPS, ultraviolet photoelectron spectroscopy UPS, Auger electron spectroscopy AES, ion scattering spectroscopy ISS, and electron energy loss spectroscopy EELS, are widely used in scientific research and engineering application fields such as material analysis, condensed matter physics, surface physical chemistry, semiconductor integrated circuits, new energy, and corrosion protection characterization. The hemispherical charged particle energy analyzer is based on the principle that "the orbit of charged particles moving under the inverse square electric field between the inner and outer hemispherical electrodes is the Kepler orbit", has excellent energy resolution and transmission rate, and is widely used in the above-mentioned charged particle spectroscopy analysis and testing technologies, and is the core component of this type of analytical instrument.

[0003] For an ideal hemispherical charged particle energy analyzer, the electric field between the inner and outer hemispherical electrodes changes in the form of an inverse square. In actual situations, there is a significant fringe electric field effect at the edges of the inner and outer hemispherical electrodes. This fringe electric field increases the track width of the charged particle motion trajectory, resulting in a decrease in the energy resolution of the analyzer. And as the gap between the inner and outer hemispherical electrodes increases, the fringe electric field effect becomes more serious. Therefore, how to correct the fringe electric field effect is crucial to obtaining a good charged particle energy spectrum test resolution.

[0004] There are currently two correction methods for the fringing electric field: the Herzog correction and the Jost correction. Although the above two correction methods have a certain improvement effect on the correction of the fringing electric field, they still cannot meet the requirements of higher energy spectrum resolution for fringing electric field correction. Summary of the invention

[0005] The purpose of the present invention is to overcome the problems of the prior art and provide a hemispherical charged particle energy analyzer.

[0006] The objective of the present invention is achieved through the following technical scheme: a hemispherical charged particle energy analyzer, comprising an inner hemispherical electrode, an outer hemispherical electrode, an electrostatic lens, a deceleration electrode and a detector, wherein the inner hemispherical electrode, the outer hemispherical electrode, the electrostatic lens and the detector are all mounted on the deceleration electrode, the centers of the inner hemispherical electrode and the outer hemispherical electrode coincide with each other, and the inner hemispherical electrode and the outer hemispherical electrode form a hemispherical deflector having the function of energy selective passage for charged particles; the electrostatic lens is arranged at the incident end of the hemispherical deflector, and the detector is arranged at the exit end of the hemispherical deflector, characterized in that it also comprises a fringe electric field correction electrode arranged on the deceleration electrode, and the center of gravity of the fringe electric field correction electrode is on the same axis as the centers of the inner hemispherical electrode and the outer hemispherical electrode.

[0007] In one example, the electrostatic lens uses an eccentric incidence method to incident charged particles from an eccentric position onto the hemispherical deflector.

[0008] In one example, the potential of the fringe electric field correction electrode changes following the potential of the deceleration electrode.

[0009] In one example, the fringe electric field correction electrode is in any one of a ring shape, a disk shape, and an arc shape.

[0010] In one example, the edge electric field correction electrode includes a concentric inner ring electrode and an outer ring electrode, and the radius R3 of the inner ring electrode, the radius R4 of the outer ring electrode, the radius R1 of the inner hemispherical electrode, and the radius R2 of the outer hemispherical electrode satisfy: R1 <R3<R4<R2。

[0011] In one example, the fringe electric field correction electrode is detachably disposed on the deceleration electrode.

[0012] In one example, the center of gravity of the deceleration electrode is on the same axis as the center of the inner hemispherical electrode, the center of the outer hemispherical electrode, and the center of gravity of the fringe electric field correction electrode.

[0013] In one example, the surfaces of the inner hemispherical electrode and the outer hemispherical electrode are gold plated or graphite sprayed.

[0014] In one example, the electrostatic lens includes a multi-segment electrode, and the inner surface of the electron channel of the multi-segment electrode is gold-plated or graphite-sprayed.

[0015] In one example, the distance between the center of gravity of the detector and the center of the inner hemispherical electrode is greater than the radius R1 of the inner hemispherical electrode and smaller than the radius R2 of the outer hemispherical electrode.

[0016] It should be further explained that the technical features corresponding to the above examples can be combined or replaced with each other to form a new technical solution.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. In one example, by setting up concentric fringe electric field correction electrodes inside and outside, the fringe electric field effects of the inner hemispherical electrode and the outer hemispherical electrode can be effectively corrected, and effective fringe electric field correction can be achieved in test scenarios with different charged particle initial energies and selected pass energies, effectively alleviating the problem of widening of the charged particle flight trajectory caused by the fringe electric field effect, and improving the energy resolution of the energy spectrum test.

[0019] 2. In one example, charged particles are incident on a hemispherical deflector from an eccentric position by eccentric incidence. This eccentric incidence method can further suppress the problem of charged particle trajectory broadening. That is, the two methods of solving the charged particle trajectory broadening, eccentric incidence of charged particles and edge electric field correction, are combined to further improve the energy spectrum resolution.

[0020] 3. In one example, the fringe electric field correction electrode can follow the potential change of the deceleration electrode. By accurately configuring the potential of the fringe electric field correction electrode, the test error is further eliminated and the energy resolution of the test energy spectrum is improved.

[0021] 4. In one example, the edge electric field correction electrode includes concentric inner ring electrodes and outer ring electrodes, which can ensure the consistency and symmetry of the electric field, thereby ensuring energy resolution.

[0022] 5. In one example, the edge electric field correction electrode is detachably arranged on the deceleration electrode, which is convenient for replacement and more flexible for potential adjustment.

[0023] 6. In one example, the center of gravity of the deceleration electrode is on the same axis as the center of the inner hemispherical electrode, the center of the outer hemispherical electrode, and the center of gravity of the edge electric field correction electrode, which can form a uniform electric field so that the motion trajectory of charged particles can be precisely controlled when passing through the hemispherical deflector.

[0024] 7. In one example, the surface of the inner hemispherical electrode, the surface of the outer hemispherical electrode, and the inner surface of the electron channel of the multi-segment electrode of the electrostatic lens are gold-plated or graphite-sprayed, which can reduce the scattering and energy loss of charged particles inside the analyzer and improve the accuracy and resolution of energy analysis.

[0025] 8. In one example, the distance between the center of gravity of the detector and the center of the inner hemispherical electrode is greater than R1 and less than R2, so as to ensure that the charged particles can accurately enter the detector along a predetermined trajectory, thereby improving the accuracy and efficiency of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The specific implementation methods of the present invention are further described in detail below in conjunction with the accompanying drawings. The accompanying drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The same reference numerals are used in these drawings to represent the same or similar parts. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute improper limitations on the present application.

[0027] Figure 1 A schematic diagram of the structure of an energy analyzer provided as an example of the present invention;

[0028] Figure 2 A schematic diagram of electric field equipotential lines of an ideal full spherical shell and a hemispherical shell provided as an example of the present invention;

[0029] Figure 3 A schematic diagram of electric field equipotential lines of a real full-spherical shell and a hemispherical shell provided as an example of the present invention;

[0030] Figure 4 A schematic diagram of electric field equipotential lines after adding a fringe electric field correction electrode provided in an example of the present invention;

[0031] Figure 5 A schematic diagram of potential lines and charged particle trajectories when the edge electric field effect is not corrected for an example of the present invention;

[0032] Figure 6 A schematic diagram of potential lines and charged particle trajectories after correction using off-center incidence and fringe electric field correction electrodes provided for an example of the present invention.

[0033] In the figure: 1-inner hemisphere electrode; 2-outer hemisphere electrode; 3-fringe electric field correction electrode; 4-entrance slit; 5-electrostatic lens; 6-deceleration electrode; 7-magnetic shielding sleeve; 8-detector; 9-signal amplifier; 10-counting acquisition card; 11-charged particle test energy spectrum; 12-charged particle excitation source; 13-sample; 14-single charged particle flight path; 15-degree of electron particle trajectory broadening. DETAILED DESCRIPTION

[0034] The technical solution of the present invention is described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] In the description of the present invention, it should be noted that the directions or positional relationships indicated by "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are directions or positional relationships based on the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the use of ordinal numbers (e.g., "first and second", "first to fourth", etc.) is to distinguish objects, and is not limited to this order, and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0038] In one example, if Figure 1 As shown, a hemispherical charged particle energy analyzer includes an inner hemispherical electrode 1, an outer hemispherical electrode 2, a fringe electric field correction electrode 3, an electrostatic lens 5, a deceleration electrode 6 and a detector 8. The inner hemispherical electrode 1, the outer hemispherical electrode 2, the fringe electric field correction electrode 3, the electrostatic lens 5 and the detector 8 are all installed on the deceleration electrode. Preferably, the inner hemispherical electrode 1, the outer hemispherical electrode 2, the fringe electric field correction electrode 3, the electrostatic lens 5 and the detector 8 are all insulated and installed on the deceleration electrode to facilitate independent potential control. Among them, the center of the sphere of the inner hemispherical electrode 1, the center of the sphere of the outer hemispherical electrode 2, the center of gravity of the fringe electric field correction electrode 3 and the center of gravity of the deceleration electrode 6 are on the same axis; the insulated installation can be fastened and connected by non-ferromagnetic fasteners such as insulating nuts. The electrostatic lens 8 is arranged at the incident end of the hemispherical deflector, and is used to image the charged particles generated and emitted by the sample in a variety of lens modes selected according to the user's test requirements and decelerate them to the entrance slit 4 of the hemispherical deflector. Preferably, a magnetic shielding sleeve is provided on the electrostatic lens 8 to prevent interference from external magnetic fields. The detector (8) is arranged at the output end of the hemispherical deflector, and is used to receive and detect the charged particles after being screened and deflected by the hemispherical deflector. Furthermore, the detector is connected to a counting acquisition card 10 via a signal amplifier 9, and the counting acquisition card 10 converts the signal transmitted by the signal amplifier 9 into a countable digital pulse, thereby obtaining a charged particle test energy spectrum 11.

[0039] Furthermore, the inner hemispherical electrode 1, the outer hemispherical electrode 2, and the fringe electric field correction electrode 3 are all made of non-ferromagnetic metal conductors with low density such as aluminum alloy. The radius R1 of the inner hemispherical electrode 1 is smaller than the radius R2 of the outer hemispherical electrode 2, and the centers of the inner hemispherical electrode 1 and the outer hemispherical electrode 2 coincide with each other. The inner hemispherical electrode 1 and the outer hemispherical electrode 2 form a hemispherical deflector with energy selective passing function for charged particles. The charged particles with energy passing requirements jointly determined by the radius R1 of the inner hemispherical electrode 1 and the applied voltage V1 and the radius R2 of the outer hemispherical electrode 2 and the applied voltage V2 will pass through the channel between the inner hemispherical electrode 1 and the outer hemispherical electrode 2, and finally be detected and counted by the detector 8.

[0040] When the hemispherical charged particle energy analyzer of the present invention is used, it needs to be used in conjunction with a charged particle excitation source. The charged particle excitation source 12 can be an X-ray, ultraviolet light source or electrons, ions, etc., which is used to generate and emit charged particles to excite or collide with the sample 13. The sample 13 can be a solid, liquid or gas. Figure 1 As shown, when the charged particle excitation source 12 excites the sample 13, charged particles such as photoelectrons, Auger electrons, secondary electrons, or scattered ions will be generated. All or part of the charged particles excited by the above process leave the sample 13 and fly forward. The flight direction and route of the charged particles are illustrated by a single charged particle flight trajectory 14.

[0041] The charged particles fly forward and enter the electrostatic lens 5, which performs real-space imaging, inverse-space imaging, or other imaging according to the requirements of the energy spectrum test on the charged particle beam. Generally speaking, for charged particles with higher energy, they must be decelerated while performing the above-mentioned imaging, and the deceleration function is realized by the deceleration electrode 6. The above entire imaging and deceleration process is carried out simultaneously, and this process can be described by the electron optical theory. The charged particle beam that has been imaged and decelerated enters the hemispherical deflector through the entrance slit 4 of the hemispherical deflector. In the hemispherical deflector, under the inverse square electric field constructed by the inner hemispherical electrode 1 (potential is V1) and the outer hemispherical electrode 2 (potential is V2), the charged particles fly according to the principle that "the motion orbit of the charged particles under the inverse square electric field between the inner and outer hemispherical electrodes is a Kepler orbit".

[0042] Ideally, according to the principle that "the trajectory of charged particles in the inverse square electric field between the inner and outer hemispherical electrodes is a Kepler trajectory", the charged particle detector 8 of different energies detects and counts. Specifically, the concentric spherical shell electric field is equivalent to the centripetal force field, and the Coulomb gravity and the universal gravitation are also inverse square relationship. Therefore, the trajectory of the charged particle in the centripetal force field satisfies Kepler's law. Under the premise that its trajectory does not interfere with the inner and outer spherical shells, the trajectory of the charged particle is as follows: Figure 2 The ellipse shown in the figure has one focus at the center of the spherical shell. If the incident speed and direction of the charged particle meet certain conditions, the particle motion trajectory can be specialized into a special ellipse with zero eccentricity, that is, a perfect circular orbit. The above description is a description of the motion of charged particles under ideal spherical shell conditions. Due to the constraints of the configuration of the hemispherical energy analyzer, the configuration of the hemispherical shell destroys the symmetry of the spherical shell, and the electric field at the edge deviates from the electric field distribution under ideal conditions. The electric field equipotential lines of the ideal spherical shell and hemispherical shell are as follows: Figure 2In the case of an ideal centripetal force field, the equipotential lines should form concentric circles on the cross-section diagram, but the configuration of the hemispherical bottom plate destroys the symmetry and distorts the electric field. At this time, the equipotential lines of the electric field of the global shell and the hemispherical shell are as follows: Figure 3 As shown, the incident electrons are affected by the distorted electric field before entering the ideal centripetal force field area, so that after the monoenergetic electron beam with a certain divergence angle enters the deflector, the image on the detector plane on the other side is distorted and the projection area of ​​the image is enlarged, which deteriorates the energy resolution capability of energy analysis. At this time, the edge electric field effect of the inner hemispherical electrode 1 and the outer hemispherical electrode 2 will also disturb the motion trajectory of the charged particles. This disturbance will further reduce the energy resolution, especially when the difference between the inner and outer hemisphere radii (R2-R1) is large, this effect will be more obvious.

[0043] The present invention introduces a correction electrode to improve the electric field distribution in the incident area of ​​charged particles, so that the electric field distribution in the incident area can be restored to the ideal spherical shell electric field as much as possible. Specifically, the correction electrode can improve the energy resolution capability of the energy analyzer for incident charged particles, which is manifested in that after the monoenergetic electron beam is incident on the hemispherical energy analyzer at a certain divergence angle, its image projection area on one side of the detector is smaller than the projection area that has not been corrected by the correction electrode. After charged particles of different energies are incident into the energy analyzer, the images of charged particles of different energies are imaged in different areas of the detector plane. Due to the divergence angle of the incident particles, the images of charged particles of different energies overlap. The correction electrode alleviates the image overlap problem, thereby improving the energy resolution capability and sensitivity of the energy analyzer. The electric field equipotential lines after the present invention introduces the correction electrode are as follows: Figure 4 As shown, it can be seen that the correction electrode greatly improves the electric field distribution in the incident area of ​​charged particles, restores the electric field distribution in the incident area to the ideal full-sphere shell electric field as much as possible, and improves the energy resolution capability of the energy analyzer.

[0044] In one example, while correcting the electric field edge effect, the distance between the main optical axis of the electrostatic lens 5, the straight line through the optical center and the center of the inner hemispherical electrode 1, R0≠R1+R2 / 2, and the charged particles emitted from the electrostatic lens 5 are eccentrically incident relative to the average radius hemisphere of the inner hemispherical electrode 1 and the outer hemispherical electrode 2, that is, the electrostatic lens 5 uses an eccentric incidence method to incident the charged particles from an eccentric position to the hemispherical deflector. This incidence method can further reduce the projection area of ​​the charged particles imaged on the detector plane, thereby further correcting the problem of widening of the charged particle trajectory caused by the edge electric field.

[0045] Optionally, through physical modeling and charged particle flight trajectory experiments, the optimal eccentric incidence method can be found to minimize the problem of charged particle trajectory broadening and improve the energy spectrum resolution of the test instrument. First, by establishing a physical model to describe the motion trajectory of charged particles in the electrostatic lens, the initial energy, mass and charge of the particles, as well as the electric field distribution of the lens, need to be considered in the modeling process. Then, simulation software is used to perform simulation experiments, and the flight trajectory of particles under different conditions is observed by changing the initial conditions of eccentric incidence, such as the angle of incidence, position and energy. Through comparative analysis, the eccentric incidence method that gives the highest resolution of the particle beam can be determined.

[0046] In one example, the potential of the fringe electric field correction electrode 3 changes with the potential of the deceleration electrode 6. At this time, the potential of the fringe electric field correction electrode 3 is equal to the potential of the deceleration electrode 6, so as to accurately configure the potential of the fringe electric field correction electrode to further eliminate test errors and improve the energy resolution of the test energy spectrum.

[0047] In one example, the edge electric field correction electrode 3 is any one of a ring shape, a disk shape, and an arc shape. Preferably, the edge electric field correction electrode 3 includes a concentric inner ring electrode and an outer ring electrode, and the radius R3 of the inner ring electrode, the radius R4 of the outer ring electrode, the radius R1 of the inner hemispherical electrode 1, and the radius R2 of the outer hemispherical electrode 2 satisfy the following relationship:

[0048] The radius R1 of the inner hemispherical electrode 1 is less than the radius R3 of the inner ring electrode of the fringe electric field correction electrode 3 ; the radius R4 of the outer ring electrode of the fringe electric field correction electrode 3 is less than the radius R2 of the outer hemispherical electrode 2 .

[0049] In one example, the edge electric field correction electrode 3 is detachably disposed on the deceleration electrode 6, which is convenient for replacement and more flexible in potential adjustment.

[0050] In one example, the center of gravity of the deceleration electrode 6 is on the same axis as the center of the inner hemispherical electrode 1, the center of the outer hemispherical electrode 2, and the center of gravity of the edge electric field correction electrode 3, so that a uniform electric field can be formed, so that the motion trajectory of charged particles when passing through the hemispherical deflector can be precisely controlled.

[0051] In one example, the inner hemispherical electrode 1 and the outer hemispherical electrode 2 can be made of a material with an inner surface treated with gold plating or spraying graphite. Furthermore, the electrostatic lens 5 includes at least four segments of electrodes, which are made of non-ferromagnetic and low-density metal conductors such as aluminum alloy, and the inner surfaces of the electron channels of the four segments of electrodes are gold plated or sprayed with graphite, so as to reduce the scattering and energy loss of charged particles inside the analyzer and improve the accuracy and resolution of energy analysis.

[0052] In one example, the detector 8 is one of electron multipliers such as a single channel electron multiplier (SCD), a multi-channel electron multiplier (MCD), and a microchannel plate electron multiplier (MCP). The detector includes a receiving anode or a fluorescent screen device for pulsed electronic signals. Further, the distance between the center of gravity of the detector 8 and the center of the hemispherical electrode 1 is greater than R1 and less than R2.

[0053] The above examples are combined to obtain a preferred example of the present invention, in which the hemispherical charged particle energy analyzer includes an inner hemispherical electrode 1, an outer hemispherical electrode 2, a fringe electric field correction electrode 3, an electrostatic lens 5, a deceleration electrode 6, a detector 8, a signal amplifier 9, a counting acquisition card 10, etc. Since there is a fringe electric field effect at the hemispherical edge of the inner hemispherical electrode 1 and the outer hemispherical electrode 2, the fringe electric field effect will bring a disturbance effect to the motion trajectory of the charged particles. When the fringe electric field effect is not corrected, the potential line and the charged particle trajectory are as shown in FIG. Figure 5 As shown in the figure, the blue line is the potential line and the red line is the charged particle track. The present invention adopts a fringe electric field correction design scheme that combines two correction methods, eccentric incident of charged particles and fringe electric field correction, which can effectively solve the problem of charged particle track line widening caused by fringe electric fields. The corrected potential line and charged particle track are as shown in Figure 6 As shown in the figure, the blue line is the potential line, and the red line is the charged particle trace. It can be seen that after correction, the degree of widening of the electron particle trace is significantly reduced by 15, thereby greatly improving the energy resolution of the charged particle energy spectrum test. The eccentric incidence correction refers to the charged particles being incident on the hemispherical deflector from an appropriate eccentric position to correct the widening problem of the charged particle trajectory caused by the edge electric field. The edge electric field correction refers to the correction of the electrode to alleviate the drastic change of the edge potential gradient of the inner and outer hemispheres caused by the edge electric field effect, thereby effectively solving the problem of widening of the charged particle trajectory. It can be widely used in X-ray photoelectron energy spectrum, ultraviolet photoelectron energy spectrum, Auger electron energy spectrum, ion scattering spectrum, electron energy loss spectrum and other charged particle energy spectrum analysis and testing, which can meet the use requirements of different occasions and is easy to promote and apply.

[0054] The above specific implementation methods are detailed descriptions of the present invention. It cannot be determined that the specific implementation methods of the present invention are limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions and substitutions can be made without departing from the concept of the present invention, which should be regarded as belonging to the protection scope of the present invention.

Claims

1. A hemispherical charged particle energy analyzer, comprising an inner hemispherical electrode (1), an outer hemispherical electrode (2), an electrostatic lens (5), a deceleration electrode (6) and a detector (8), wherein the inner hemispherical electrode (1), the outer hemispherical electrode (2), the electrostatic lens (5) and the detector (8) are all mounted on the deceleration electrode (6), the sphere centers of the inner hemispherical electrode (1) and the outer hemispherical electrode (2) coincide, and the inner hemispherical electrode (1) and the outer hemispherical electrode (2) form a hemispherical deflector having an energy selective passing function for charged particles; the electrostatic lens (8) is arranged at the incident end of the hemispherical deflector, and the detector (8) is arranged at the exit end of the hemispherical deflector, characterized in that: It also includes a fringe electric field correction electrode (3) arranged on the deceleration electrode (6), wherein the center of gravity of the fringe electric field correction electrode (3) is located on the same axis as the center of the inner hemispherical electrode (1) and the center of the outer hemispherical electrode (2).

2. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The electrostatic lens (5) uses an eccentric incidence method to cause the charged particles to be incident from an eccentric position onto the hemispherical deflector.

3. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The potential of the fringe electric field correction electrode (3) changes following the potential of the deceleration electrode (6).

4. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The fringe electric field correction electrode (3) is in any one of a ring shape, a disk shape, and an arc shape.

5. The hemispherical charged particle energy analyzer according to claim 4, characterized in that: The edge electric field correction electrode (3) comprises a concentric inner annular electrode and an outer annular electrode, wherein the radius R3 of the inner annular electrode, the radius R4 of the outer annular electrode, the radius R1 of the inner hemispherical electrode (1), and the radius R2 of the outer hemispherical electrode (2) satisfy: R1 <R3<R4<R2。 6. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The fringe electric field correction electrode (3) is detachably arranged on the deceleration electrode (6).

7. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The center of gravity of the deceleration electrode (6) is located on the same axis as the center of gravity of the inner hemispherical electrode (1), the center of gravity of the outer hemispherical electrode (2), and the center of gravity of the fringe electric field correction electrode (3).

8. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The surfaces of the inner hemispherical electrode (1) and the outer hemispherical electrode (2) are subjected to gold plating or graphite spraying.

9. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The electrostatic lens (8) comprises a multi-segment electrode, and the inner surface of the electron channel of the multi-segment electrode is subjected to gold plating or graphite spraying treatment.

10. The hemispherical charged particle energy analyzer according to claim 1, characterized in that: The distance between the center of gravity of the detector (8) and the center of the inner hemispherical electrode (1) is greater than the radius R1 of the inner hemispherical electrode (1) and smaller than the radius R2 of the outer hemispherical electrode (2).

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