Concentricity detection method after installation of vacuum system

Abstract

The invention belongs to the technical field of concentricity detection, and particularly relates to a concentricity detection method after vacuum system installation, and the method comprises the following steps: 1, vacuum system preparation: transferring a vacuum system needing concentricity detection to a detection plane, placing the vacuum system, and carrying out the levelness test; 2, tool main body preparation is conducted, specifically, tools with four 0.3 mm small holes are manufactured, two tools are based on a workpiece supporting assembly, and two tools are based on a device mounting flange; and 3, tool main body installation, wherein the four tools are installed at the positions, with the concentricity requirement, in the vacuum system correspondingly, and it is ensured that the tools are tightly connected with the system in a matched mode. According to the invention, the performance and reliability of the vacuum system are improved, high-quality delivery and effective long-term maintenance are also ensured, and the trust and satisfaction of users are further enhanced.

Description

Technical Field

[0001] The invention belongs to the technical field of concentricity detection, and in particular relates to a method for detecting the concentricity of a vacuum system after installation. Background Art

[0002] A vacuum system is a system that uses a variety of technical means to reduce the pressure of air or other gases to an extremely low level, creating a near-vacuum environment. It is widely used in scientific research, industrial manufacturing, semiconductor production, and material testing. In a vacuum system, key components include vacuum chambers, vacuum pumps, gas detection instruments, valves, cooling systems, sensors and control systems, as well as seals and connectors. The vacuum chamber is used to hold samples or items to be processed and provide a closed low-pressure environment. The function of the vacuum pump is to remove the gas in the vacuum chamber and reduce the internal pressure to achieve the required vacuum degree. Gas detection instruments are used to monitor the gas composition and pressure in the vacuum chamber to ensure that the system reaches the expected vacuum level. Valves are used to control the inflow and outflow of gas to adjust and maintain the vacuum state.

[0003] In some high vacuum applications, cooling systems are used to control the temperature of the system to prevent overheating. Sensors and control systems are responsible for real-time monitoring of the vacuum state and automatic adjustment to ensure stable operation of the system. Seals and connectors ensure good sealing between the vacuum chamber and various components to prevent gas leakage. Depending on the specific application requirements, the design and configuration of the vacuum system can be adjusted to ensure that it achieves the required accuracy, stability and functional integrity in operation.

[0004] The existing vacuum system lacks the means to detect concentricity after installation. The performance and reliability of the vacuum system are poor, which is not conducive to the long-term operation of the vacuum system. The existing detection means have great interference and potential damage to the system, and are prone to cause physical damage to the system during the detection process, which is not conducive to maintaining the integrity and function of the system. Therefore, we propose a method for concentricity detection of the vacuum system after installation to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a method for detecting the concentricity of a vacuum system after installation, which can improve the performance and reliability of the vacuum system, ensure high-quality delivery and effective long-term maintenance, and further enhance user trust and satisfaction.

[0006] The technical solution adopted by the present invention is as follows: A method for detecting concentricity of a vacuum system after installation, the method comprising the following steps: Step 1. Vacuum system preparation: Move the vacuum system to be tested for concentricity to the test plane, place it, and test its levelness; Step 2. Preparing the tooling body: Make four tools with 0.3 mm small holes, two of which are based on the workpiece support assembly and two are based on the device mounting flange; Step 3. Install the tooling body: Install the four tools at the positions with concentricity requirements in the vacuum system to ensure a tight fit between the tooling and the system; Step 4. Light spot observation and evaluation: Punch in through the laser light source on one side and place developing paper at the exit of the last tooling, ensure that the light source is stable and the light is perpendicular to the aperture, and record the spot pattern on the developing paper; Check whether the light spot on the developing paper presents a uniform diffraction pattern. If the light spot is uniform, it means that the position concentricity of the four fixtures meets the requirements; if the light spot is uneven or other complex patterns appear, it means that the concentricity does not meet the requirements; Step 5. Adjust and retest: According to the observation results of the light spot, adjust the position of the tooling to ensure that it is aligned and meets higher concentricity requirements. After each adjustment, reinstall the tooling and observe the light spot; When the spot pattern continuously displays a uniform diffraction pattern, it is confirmed that the concentricity of the system meets the usage requirements; Step 6. Removal of tooling and system delivery: After confirming that the concentricity meets the requirements, carefully remove the tooling installed in the vacuum system to ensure that the system is not damaged during the removal process; Clean the vacuum system after inspection and adjustment and prepare it for delivery, provide inspection report and confirmation documents to ensure the concentricity inspection results of the system are certified; Step 7. Record and archive: Record the results of each inspection step in detail, including a description of the spot pattern, details of any adjustment operations, and the final confirmed concentricity status. Archive the inspection records and reports for future reference and quality control.

[0007] In a preferred embodiment, the vacuum system comprises a first vacuum chamber and a second vacuum chamber which are symmetrically arranged, and the first vacuum chamber and the second vacuum chamber are connected via a docking flange.

[0008] In a preferred embodiment, the tooling body includes two symmetrically arranged workpiece support assemblies and a first device mounting flange and a second device mounting flange, and the first device mounting flange and the second device mounting flange are symmetrically arranged, and the two workpiece support assemblies are respectively provided with a first small hole tooling and a second small hole tooling, and the first device mounting flange and the second device mounting flange are respectively provided with a third small hole tooling and a fourth small hole tooling.

[0009] In a preferred embodiment, the vacuum system preparation also includes selecting a transportation method based on the size and weight of the vacuum system, using a high-precision level or electronic level to perform a level test, measuring at multiple locations on the system, recording the level data of each measuring point, and comparing it with the allowable tolerance range, adjusting the support points or foundation of the system based on the results of the level test, and after the adjustment is completed, re-performing the level test to confirm that the system has reached the required level standard.

[0010] In a preferred embodiment, the preparation of the tool body also includes using a microscope or precision measuring tools to measure the diameter of the small hole, making necessary adjustments and corrections to the aperture, assembling the manufactured tool body, support assembly and flange, and performing functional testing after assembly to ensure that the tool is installed in the specified position of the vacuum system and the small holes are accurately aligned, and using measuring tools to check various dimensions of the tool, including the aperture, the overall size of the tool and the docking status of various components.

[0011] In a preferred embodiment, the installation of the tooling body also includes removing dust, oil or any debris that may interfere with the installation of the tooling at the position where concentricity is required in the vacuum system, cleaning it with a dust-free cloth or an air blowing tool, marking the installation position of each tooling according to the design drawing or installation plan of the vacuum system, placing the tooling at the marked position in the vacuum system, checking whether the installation position of the tooling is completely aligned with the docking position of the vacuum system, checking the installation accuracy of the tooling with precision tools, checking the fixing status of all tooling, and ensuring that the tooling does not loosen after installation.

[0012] In a preferred embodiment, the light spot observation and evaluation also includes installing or fixing the laser light source on one side of the vacuum system so that it can be accurately aligned with the position of the small hole of the tooling to be detected, adjusting the direction and position of the laser light source to ensure that the light is perpendicular to the small hole aperture of the tooling and parallel to the channel direction of the small hole, adjusting the exposure time according to the intensity of the laser light source and the light sensitivity of the developing paper, analyzing the light spot pattern on the developing paper, adjusting the position or angle of the tooling according to the analysis results of the light spot pattern to optimize the concentricity, and recording the light spot pattern and its characteristics observed each time, including the shape, size and distribution of the light spot.

[0013] In a preferred embodiment, the adjustment and re-testing also include analyzing the uniformity and symmetry of the pattern based on the results of the first light spot observation, determining whether there is a concentricity error, formulating an adjustment plan based on the analysis results, fine-tuning the position of the tooling, the light spot pattern showing an angle deviation, adjusting the angle of the tooling so that the light passes through the small hole of the tooling as vertically as possible and parallel to the channel direction of the small hole, reinstalling the adjusted tooling in the vacuum system, recording the new light spot pattern on the developing paper, comparing the newly recorded light spot pattern with the previous results, and checking whether there is any improvement.

[0014] In a preferred embodiment, the removal of the tooling and system delivery also includes first removing the part of the tooling based on the workpiece support assembly, gently loosening the fixing clamps or bolts to ensure that the tooling is gradually released, and then removing the part of the tooling based on the device mounting flange, carefully removing the connecting parts between the flange and the tooling, and after the removal is completed, checking the interfaces and connection parts of the vacuum system to ensure that there is no damage or looseness caused by the removal operation, and cleaning the external surface of the system to ensure that there is no dirt, fingerprints or other external contaminants.

[0015] In a preferred embodiment, the recording and archiving also includes recording the specific conditions of the light spot pattern on the developing paper, including the shape, size, distribution and any abnormal conditions of the light spot, using images or photos for supplementary records, and recording the operating steps of each adjustment in detail, including the position, angle, and tightening status of the tooling before and after adjustment, recording the final concentricity test results, including the consistency and symmetry of all light spot patterns, and scanning or saving the test records and reports as electronic files.

[0016] The technical effects achieved by the present invention are: By using the observation and evaluation of the spot pattern, the concentricity of the system can be accurately detected to ensure the alignment accuracy of each component of the system, which is crucial to the performance and stability of the vacuum system. Through systematic adjustment and re-testing, the concentricity error can be effectively reduced to ensure the reliability and stability of the system during use, avoiding performance degradation or failure caused by concentricity problems. Each inspection step and adjustment operation is recorded in detail, which not only helps traceability and verification process, but also provides detailed data support for future quality control and improvement, including multiple steps of adjustment and inspection to ensure that concentricity meets high quality requirements. This method can ensure that the system meets the expected performance standards before delivery; When removing the tooling, take care to avoid damage to the system and protect the integrity of the system. A careful inspection of the tooling and system during the removal process will help prevent any potential damage. By ensuring that the concentricity of the system meets the use requirements, the user's operating experience can be improved and the maintenance or adjustment requirements caused by system problems can be reduced; The diffraction pattern can reveal the tiny concentricity errors between the pinholes. Even very small deviations can be detected through changes in the light spot. There is no need to directly contact the internal components of the vacuum system, reducing interference and potential damage to the system. The pinhole and diffraction principles are very sensitive to changes in concentricity and can detect very small deviations, thereby ensuring the high accuracy of the system, being able to quickly obtain test results, and timely feedback on the uniformity and concentricity status of the light spot, which is convenient for rapid adjustment and optimization. No physical damage will be caused to the system during the test process, maintaining the integrity and functionality of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of a vacuum system of a method for detecting concentricity of a vacuum system after installation of the present invention; Figure 2 It is a cross-sectional schematic diagram of a vacuum system of a method for detecting concentricity of a vacuum system after installation according to the present invention; Figure 3 It is a schematic diagram of the detection steps of a method for detecting concentricity of a vacuum system after installation according to the present invention.

[0018] In the figure: 1 first vacuum chamber, 2 second vacuum chamber, 3 docking flange, 4 workpiece support assembly, 5 first device mounting flange, 6 second device mounting flange, 7 first small hole tooling, 8 second small hole tooling, 9 third small hole tooling, 10 fourth small hole tooling. DETAILED DESCRIPTION

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0020] See also Figure 1-3 As shown, the present invention provides a method for detecting concentricity of a vacuum system after installation, and the concentricity detection method comprises the following steps: Step 1. Vacuum system preparation: Move the vacuum system to be tested for concentricity to the test plane, place it, and test its levelness; Step 2. Preparing the tooling body: Make four tools with 0.3 mm small holes, two of which are based on the workpiece support assembly and two are based on the device mounting flange; Step 3. Install the tooling body: Install the four tools at the positions with concentricity requirements in the vacuum system to ensure a tight fit between the tooling and the system; Step 4. Light spot observation and evaluation: Punch in through the laser light source on one side and place developing paper at the exit of the last tooling, ensure that the light source is stable and the light is perpendicular to the aperture, and record the spot pattern on the developing paper; Check whether the light spot on the developing paper presents a uniform diffraction pattern. If the light spot is uniform, it means that the position concentricity of the four fixtures meets the requirements; if the light spot is uneven or other complex patterns appear, it means that the concentricity does not meet the requirements; Step 5. Adjust and retest: According to the observation results of the light spot, adjust the position of the tooling to ensure that it is aligned and meets higher concentricity requirements. After each adjustment, reinstall the tooling and observe the light spot; When the spot pattern continuously displays a uniform diffraction pattern, it is confirmed that the concentricity of the system meets the usage requirements; Step 6. Removal of tooling and system delivery: After confirming that the concentricity meets the requirements, carefully remove the tooling installed in the vacuum system to ensure that the system is not damaged during the removal process; Clean the vacuum system after inspection and adjustment and prepare it for delivery, provide inspection report and confirmation documents to ensure the concentricity inspection results of the system are certified; Step 7. Record and archive: Record the results of each inspection step in detail, including a description of the spot pattern, details of any adjustment operations, and the final confirmed concentricity status. Archive the inspection records and reports for future reference and quality control.

[0021] The vacuum system comprises a first vacuum chamber 1 and a second vacuum chamber 2 which are symmetrically arranged. The first vacuum chamber 1 and the second vacuum chamber 2 are connected via a docking flange 3 .

[0022] The tooling body includes two symmetrically arranged workpiece support assemblies 4 and a first device mounting flange 5 and a second device mounting flange 6, and the first device mounting flange 5 and the second device mounting flange 6 are symmetrically arranged, and the two workpiece support assemblies 4 are respectively provided with a first small hole tooling 7 and a second small hole tooling 8, and the first device mounting flange 5 and the second device mounting flange 6 are respectively provided with a third small hole tooling 9 and a fourth small hole tooling 10.

[0023] Preparation of the vacuum system also includes selecting a handling method based on the size and weight of the vacuum system, performing a level test using a high-precision level or electronic level, taking measurements at multiple locations on the system, recording the level data for each measurement point, and comparing it with the allowable tolerance range. Based on the results of the level test, adjust the support points or foundation of the system. After the adjustments are completed, re-test the level to confirm that the system has reached the required level standard.

[0024] The preparation of the tooling body also includes using a microscope or precision measuring tools to measure the diameter of the small hole, making necessary adjustments and corrections to the aperture, assembling the manufactured tooling body, support components and flanges, and performing functional tests after assembly to ensure that the tooling is installed in the specified position of the vacuum system and that the small holes are accurately aligned. Use measuring tools to check the various dimensions of the tooling, including the aperture, the overall size of the tooling and the docking of various components.

[0025] The installation of the main body of the tooling also includes removing dust, oil or any debris that may interfere with the installation of the tooling at the position required for concentricity in the vacuum system, cleaning it with a dust-free cloth or air blowing tool, marking the installation position of each tooling according to the design drawings or installation plan of the vacuum system, placing the tooling at the marked position in the vacuum system, checking whether the installation position of the tooling is completely aligned with the docking position of the vacuum system, using precision tools to check the installation accuracy of the tooling, checking the fixing status of all tooling, and ensuring that the tooling does not loosen after installation.

[0026] The light spot observation and evaluation also includes installing or fixing the laser light source on one side of the vacuum system so that it can be accurately aligned with the position of the small hole of the tooling that needs to be detected, adjusting the direction and position of the laser light source to ensure that the light is perpendicular to the aperture of the small hole of the tooling and parallel to the channel direction of the small hole, adjusting the exposure time according to the intensity of the laser light source and the light sensitivity of the developing paper, analyzing the light spot pattern on the developing paper, adjusting the position or angle of the tooling according to the analysis results of the light spot pattern to optimize the concentricity, and recording the light spot pattern and its characteristics observed each time, including the shape, size and distribution of the light spot.

[0027] Adjustment and re-testing also include analyzing the uniformity and symmetry of the pattern based on the results of the first spot observation, determining whether there is a concentricity error, formulating an adjustment plan based on the analysis results, fine-tuning the position of the tooling, the spot pattern showing angle deviation, adjusting the angle of the tooling so that the light passes through the small hole of the tooling as vertically as possible and parallel to the channel direction of the small hole, reinstalling the adjusted tooling in the vacuum system, recording the new spot pattern on the developing paper, comparing the newly recorded spot pattern with the previous results, and checking whether there is any improvement.

[0028] The removal of the tooling and system delivery also includes first removing the part of the tooling based on the workpiece support component, gently loosening the fixing clamps or bolts to ensure that the tooling is gradually released, and then removing the part of the tooling based on the device mounting flange, carefully removing the connecting parts between the flange and the tooling, and after the removal is completed, checking the interfaces and connections of the vacuum system to ensure that there is no damage or looseness caused by the removal operation, and cleaning the external surface of the system to ensure that there is no dirt, fingerprints or other external contaminants.

[0029] Recording and archiving also include recording the specific conditions of the light spot pattern on the developing paper, including the shape, size, distribution and any abnormal conditions of the light spot, using images or photos to supplement the records, and recording the operating steps of each adjustment in detail, including the position, angle, and tightening status of the tooling before and after adjustment, recording the final concentricity test results, including the consistency and symmetry of all light spot patterns, and scanning or saving the test records and reports as electronic files.

[0030] In the present invention, by using the observation and evaluation of the spot pattern, the concentricity of the system can be accurately detected to ensure the alignment accuracy of the various components of the system, which is crucial to the performance and stability of the vacuum system. Through systematic adjustment and re-testing, the concentricity error can be effectively reduced to ensure the reliability and stability of the system during use, and avoid performance degradation or failure caused by concentricity problems. Each inspection step and adjustment operation is recorded in detail, which not only helps traceability and verification process, but also provides detailed data support for future quality control and improvement, including multiple steps of adjustment and inspection to ensure that concentricity meets high quality requirements. This method can ensure that the system meets the expected performance standards before delivery; When removing the tooling, take care to avoid damage to the system and protect the integrity of the system. A careful inspection of the tooling and system during the removal process will help prevent any potential damage. By ensuring that the concentricity of the system meets the use requirements, the user's operating experience can be improved and the maintenance or adjustment requirements caused by system problems can be reduced; The diffraction pattern can reveal the tiny concentricity errors between the pinholes. Even very small deviations can be detected through changes in the light spot. There is no need to directly contact the internal components of the vacuum system, reducing interference and potential damage to the system. The pinhole and diffraction principles are very sensitive to changes in concentricity and can detect very small deviations, thereby ensuring the high accuracy of the system, being able to quickly obtain test results, and timely feedback on the uniformity and concentricity status of the light spot, which is convenient for rapid adjustment and optimization. No physical damage will be caused to the system during the test process, maintaining the integrity and functionality of the system.

[0031] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. A method for detecting concentricity of a vacuum system after installation, characterized in that: The concentricity detection method comprises the following steps: Step 1. Vacuum system preparation: Move the vacuum system to be tested for concentricity to the test plane, place it, and test its levelness; Step 2. Preparing the tooling body: Make four tools with 0.3 mm small holes, two of which are based on the workpiece support assembly and two are based on the device mounting flange; Step 3. Install the tooling body: Install the four tools at the positions with concentricity requirements in the vacuum system to ensure a tight fit between the tooling and the system; Step 4. Light spot observation and evaluation: Punch in through the laser light source on one side and place developing paper at the exit of the last tooling, ensure that the light source is stable and the light is perpendicular to the aperture, and record the spot pattern on the developing paper; Check whether the light spot on the developing paper presents a uniform diffraction pattern. If the light spot is uniform, it means that the position concentricity of the four fixtures meets the requirements; if the light spot is uneven or other complex patterns appear, it means that the concentricity does not meet the requirements; Step 5. Adjust and retest: According to the observation results of the light spot, adjust the position of the tooling to ensure that it is aligned and meets higher concentricity requirements. After each adjustment, reinstall the tooling and observe the light spot; When the spot pattern continuously displays a uniform diffraction pattern, it is confirmed that the concentricity of the system meets the usage requirements; Step 6. Removal of tooling and system delivery: After confirming that the concentricity meets the requirements, carefully remove the tooling installed in the vacuum system to ensure that the system is not damaged during the removal process; Clean the vacuum system after inspection and adjustment and prepare it for delivery, provide inspection report and confirmation documents to ensure the concentricity inspection results of the system are certified; Step 7. Record and archive: Record the results of each inspection step in detail, including a description of the spot pattern, details of any adjustment operations, and the final confirmed concentricity status. Archive the inspection records and reports for future reference and quality control.

2. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The vacuum system comprises a first vacuum chamber (1) and a second vacuum chamber (2) which are symmetrically arranged, and the first vacuum chamber (1) and the second vacuum chamber (2) are connected via a butt flange (3).

3. A method for detecting concentricity of a vacuum system after installation according to claim 2, characterized in that: The tooling body comprises two symmetrically arranged workpiece support assemblies (4) and a first device mounting flange (5) and a second device mounting flange (6), wherein the first device mounting flange (5) and the second device mounting flange (6) are symmetrically arranged, and the two workpiece support assemblies (4) are respectively provided with a first small hole tooling (7) and a second small hole tooling (8), and the first device mounting flange (5) and the second device mounting flange (6) are respectively provided with a third small hole tooling (9) and a fourth small hole tooling (10).

4. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The vacuum system preparation also includes selecting a handling method based on the size and weight of the vacuum system, using a high-precision level or electronic level to perform a level test, measuring at multiple locations on the system, recording the level data for each measurement point, and comparing it with the allowable tolerance range, adjusting the support points or foundation of the system based on the results of the level test, and re-performing a level test after the adjustment is completed to confirm that the system has reached the required level standard.

5. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The preparation of the tooling body also includes using a microscope or precision measuring tools to measure the diameter of the small hole, adjusting and correcting the aperture, assembling the manufactured tooling body, support components and flanges, and performing functional tests after the assembly is completed to ensure that the tooling is installed in the specified position of the vacuum system and the small holes are accurately aligned, and using measuring tools to check the various dimensions of the tooling, including the aperture, the overall size of the tooling and the docking of various components.

6. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The installation of the tooling body also includes cleaning the position where concentricity is required in the vacuum system with a dust-free cloth or an air blowing tool, marking the installation position of each tooling according to the design drawing or installation plan of the vacuum system, placing the tooling at the marked position in the vacuum system, checking whether the installation position of the tooling is completely aligned with the docking position of the vacuum system, checking the installation accuracy of the tooling with precision tools, checking the fixing status of all tooling, and ensuring that the tooling does not loosen after installation.

7. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The light spot observation and evaluation also includes installing or fixing the laser light source on one side of the vacuum system so that it can be accurately aligned with the position of the small hole of the tooling that needs to be detected, adjusting the direction and position of the laser light source to ensure that the light is perpendicular to the small hole of the tooling, adjusting the exposure time according to the intensity of the laser light source and the light sensitivity of the developing paper, analyzing the light spot pattern on the developing paper, adjusting the position or angle of the tooling according to the analysis results of the light spot pattern to optimize the concentricity, and recording the light spot pattern and its characteristics observed each time, including the shape, size and distribution of the light spot.

8. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The adjustment and re-testing also include analyzing the uniformity and symmetry of the pattern according to the first spot observation results, determining whether there is a concentricity error, formulating an adjustment plan according to the analysis results, fine-tuning the position of the tooling, the spot pattern display angle deviation, adjusting the angle of the tooling so that the light passing through the small hole of the tooling is parallel to the channel direction of the small hole, reinstalling the adjusted tooling in the vacuum system, recording the new spot pattern on the developing paper, comparing the newly recorded spot pattern with the previous result, and checking whether there is any improvement.

9. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The dismantling of the tooling and system delivery also includes first dismantling the part of the tooling based on the workpiece support assembly, loosening the fixing clamps or bolts to ensure that the tooling is gradually released, and then dismantling the part of the tooling based on the device mounting flange, removing the connecting parts between the flange and the tooling, and after the dismantling is completed, checking the interfaces and connection parts of the vacuum system and cleaning the external surface of the system.

10. A method for detecting concentricity of a vacuum system after installation according to claim 1, characterized in that: The records and archives also include recording the specific conditions of the light spot pattern on the developing paper, including the shape, size, distribution and any abnormal conditions of the light spot, using images or photos to supplement the records, recording the operating steps of each adjustment in detail, including the position, angle and tightening status of the tooling before and after adjustment, recording the final concentricity test results, including the consistency and symmetry of all light spot patterns, and scanning or saving the test records and reports as electronic files.

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