Micro electro mechanical system scanning confocal fluorescence super-resolution microscopic endoscopic imaging system and method

The integration of MEMS confocal fluorescence microendoscopy with scanning structured light super-resolution microscopy enhances imaging resolution to nanometer levels, addressing limitations in traditional systems and improving lesion and tumor detection accuracy.

CN119214568APending Publication Date: 2024-12-31GUANGDONG UNIV OF SCI & TECH
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Patent Information

Application Number
CN202411472757.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2024-12-31

AI Technical Summary

Technical Problem

Existing MEMS confocal fluorescence microendoscopic imaging systems face limitations in achieving super-resolution imaging, particularly in distinguishing individual cells due to the diffraction limit, and suffer from pixelation artifacts, signal crosstalk, and broken wires, which hinder accurate detection of lesions and malignant tumors.

Method used

A micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy system combining MEMS confocal fluorescence microendoscopy with scanning structured light super-resolution microscopy, utilizing an electro-optic modulator for intensity modulation and a MEMS two-dimensional scanning mirror to generate time-varying light beams, and applying structured light super-resolution reconstruction algorithms to process fluorescence information.

Benefits of technology

The system achieves super-resolution imaging with nanometer-level resolution, enabling accurate detection of fine structures like lesions and malignant tumors, providing clinicians with detailed and comprehensive imaging information for medical diagnosis.

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Abstract

The invention relates to the technical field of optical microscopic imaging, and discloses a micro electro mechanical system scanning confocal fluorescence super-resolution microscopic endoscopic imaging system and method. Exciting light emitted by the laser light source sequentially passes through the electrooptical modulator, the dichroic mirror, the pinhole light filter, the reflector, the objective lens, the optical fiber bundle, the achromatic lens, the MEMS two-dimensional scanning mirror and the lens group and then is focused on a sample, and the exciting light interacts with a fluorescent marker in the sample to excite the sample to generate fluorescent light; fluorescent light generated by the sample is reversely transmitted to the dichroic mirror according to the principle of light path reversibility and then is collected by the PMT detector. The SIM technology and the MEMS confocal fluorescence microendoscope imaging technology are combined, super-resolution images are obtained while in-vivo peeping is achieved, the imaging resolution is improved, more accurate and comprehensive iconography information can be provided for clinicians, and a more accurate and reliable tool is provided for the fields of scientific research and medical diagnosis.
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Description

Technical Field

[0001] The present invention relates to the technical field of optical microscopic imaging, and in particular to a micro-electromechanical system scanning confocal fluorescence super-resolution micro-endoscopic imaging system and method. Background Art

[0002] The confocal fluorescence microendoscopic imaging system represents an emerging real-time, non-invasive, cellular-level in vivo detection technology, which has brought significant innovation to the field of medical diagnosis. The system has a micron-level lateral resolution and can image suspicious lesions in real time, providing doctors with intuitive and detailed image information. Doctors can use the imaging results of the confocal microendoscopy to preliminarily determine whether the lesion tissue is worth biopsy, so as to more specifically select the lesion area for pathological section testing, effectively improving the accuracy of diagnosis.

[0003] According to the different scanning methods, confocal fluorescence microendoscopes are mainly divided into two modes: proximal scanning mode confocal fluorescence microendoscopes and distal scanning mode confocal fluorescence microendoscopes. In the proximal scanning mode, the scanning device is located at the front end of the fiber bundle. The fiber bundle is usually composed of 30,000 to 100,000 individual optical fibers. These cores are embedded in a cladding with a lower refractive index with a higher refractive index. Although the scanning device of the proximal scanning mode is simple and not limited by size, the technology faces a series of inherent defects. First, the distance between the cores may cause pixelation artifacts, seriously reducing the lateral resolution of the image. Secondly, the thin coating between adjacent core diameters will cause signal crosstalk between adjacent pixels during confocal scanning and imaging, reducing the image signal-to-noise ratio. Finally, the broken wire rate of the fiber bundle will gradually increase during use, and there will be black spots in the field of view. These challenges limit the further development of proximal scanning mode confocal endoscope technology.

[0004] In the remote scanning mode, the scanning device is located at the end of the optical fiber. MEMS (Micro-Electro-Mechanical Systems) technology is the core of the common remote scanning device of confocal fluorescence microendoscopes. As a technology for manufacturing semiconductor materials, MEMS integrates mechanical components, sensors, actuators and electronic components on a silicon substrate, and its characteristic size ranges from a few millimeters to micrometers. MEMS technology is able to perform sensing, control and driving operations at a microscopic scale, both individually and in batches. In recent years, MEMS technology has made significant progress in the field of confocal fluorescence microendoscopy imaging. Its advantages such as low rated power, fast response speed, convenient mechanical measurement array manufacturing, affordable price and good sensitivity make it a key technology widely used in the manufacture of miniaturized confocal fluorescence microendoscopes.

[0005] Although MEMS confocal fluorescence microendoscopes have significant advantages in many aspects, they face the challenge of being unable to effectively distinguish individual cells when imaging tissues due to the existence of the diffraction limit. The introduction of super-resolution microscopy techniques, such as stimulated emission depletion super-resolution microscopy, random optical reconstruction microscopy, and scanning structured illumination microscopy (Structured Illumination Microscopy, SIM), has effectively overcome the resolution limitations of traditional microscopy techniques. Compared with other super-resolution microscopy techniques, SIM technology not only has the advantage of fast imaging, but is also easy to implement on existing MEMS confocal fluorescence microendoscopes. More importantly, SIM technology has lower requirements for fluorescent dyes and sample preparation, and traditional confocal fluorescence microendoscope dyes can be adapted. Therefore, the introduction of SIM technology into MEMS confocal fluorescence microendoscope imaging technology is of great significance and has become an important research topic in this field. Summary of the invention

[0006] The purpose of the present invention is to provide a micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system and method, which combines SIM technology with MEMS confocal fluorescence microendoscopy imaging technology to achieve super-resolution images while looking inside the body, thereby improving the resolution of imaging, providing clinicians with more accurate and comprehensive imaging information, and providing more accurate and reliable tools for scientific research and medical diagnosis.

[0007] To achieve the above object, the present invention provides the following solutions:

[0008] On the one hand, the present invention provides a micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system, which includes: a laser light source, an electro-optical modulator, a dichroic mirror, a pinhole filter, a reflector, an objective lens, an optical fiber bundle, an achromatic lens, a MEMS two-dimensional scanning mirror, a lens group, and a PMT detector arranged after the dichroic mirror along the reverse transmission light path of the fluorescence obtained by exciting the sample with the excitation light;

[0009] The laser light source is used to emit excitation light; the excitation light emitted by the laser light source is sequentially focused on the sample after passing through the electro-optic modulator, the dichroic mirror, the pinhole filter, the reflector, the objective lens, the optical fiber bundle, the achromatic lens, the MEMS two-dimensional scanning mirror, and the lens group, and the excitation light interacts with the fluorescent marker in the sample to excite the sample to generate fluorescence; wherein the electro-optic modulator is used to modulate the intensity of the excitation light in the form of a required intensity modulation function;

[0010] The fluorescence generated by the sample is transmitted back to the dichroic mirror according to the reversible principle of the optical path and then collected by the PMT detector.

[0011] Furthermore, a half-wave plate is arranged between the laser light source and the electro-optic modulator.

[0012] Furthermore, a reflecting mirror is arranged between the electro-optic modulator and the dichroic mirror.

[0013] Furthermore, the pinhole filter includes a first objective lens, a pinhole, and a second objective lens which are sequentially arranged along the excitation light transmission path.

[0014] Furthermore, an emission filter and a converging lens are arranged between the dichroic mirror and the PMT detector.

[0015] Furthermore, the system also includes a computer, which is electrically connected to the electro-optic modulator, the MEMS two-dimensional scanning mirror and the PMT detector respectively. The computer controls the electro-optic modulator to modulate the intensity of the excitation light in the form of a required intensity modulation function, modulates the excitation light into a time-varying light beam with varying intensity, and then controls the MEMS two-dimensional scanning mirror to scan, and focuses the excitation light with different intensities into the sample through a lens group, and finally processes the fluorescence information according to the structured light super-resolution reconstruction algorithm to obtain a super-resolution image of the sample.

[0016] Furthermore, the optical fiber bundle adopts double-clad photonic crystal optical fiber.

[0017] On the other hand, the present invention also provides a scanning structured light confocal super-resolution microendoscopy imaging method, which is applied to the above-mentioned micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system, comprising the following steps:

[0018] The laser light source emits excitation light;

[0019] The excitation light is intensity modulated by an electro-optic modulator in the form of a desired intensity modulation function, and then filtered by a dichroic mirror into a pinhole filter;

[0020] After the excitation light is confocalized by a pinhole filter, it is deflected by a reflector and focused by an objective lens. After that, the excitation light is transmitted to an achromatic lens through a fiber bundle for collimation;

[0021] The collimated excitation light is scanned by the MEMS two-dimensional scanning mirror and focused into the sample through a lens group;

[0022] The fluorescence signal generated by the sample is transmitted in reverse according to the reversible principle of the optical path, collected by the MEMS two-dimensional scanning mirror scanning probe, and separated from the excitation light path by a dichroic mirror as parallel light after passing through the transmission fiber bundle and the objective lens. The emission filter is highly transparent to the fluorescence and highly cuts off and suppresses the noise signal other than the fluorescence signal. The fluorescence signal with high signal-to-noise ratio is focused by the converging lens to the PMT detector for detection;

[0023] The PMT detector transmits the fluorescence information to the computer, which processes the fluorescence information according to the structured light super-resolution reconstruction algorithm to obtain a super-resolution image of the sample.

[0024] Furthermore, the wavelength of the excitation light is determined according to the properties of the fluorescent marker to be excited.

[0025] According to the specific embodiments provided by the present invention, the present invention discloses the following technical effects:

[0026] The present invention combines the MEMS confocal fluorescence microscopy endoscopy technology with the scanning structured light super-resolution microscopy imaging technology to construct a MEMS scanning structured light confocal fluorescence microscopy endoscopy imaging system. The electro-optic modulator modulates the excitation light to generate a time-varying light beam with varying intensity. The modulated excitation light passes through the confocal imaging optical path (pinhole filter) and is scanned by a MEMS two-dimensional scanning mirror. The modulated excitation light is accumulated point by point into the sample and focused into the sample through a high-refractive index lens group. Finally, cumulative fringes are formed in the sample, so that the high-frequency information of the sample is mixed into the detectable passband of the microscope. The fluorescence excited by the sample returns along the original path to the PMT detector to collect the fluorescence signal. The detected image is subjected to spectrum analysis to obtain a super-resolution image. It can be seen that the present invention obtains a super-resolution image by adding an electro-optic modulator to the optical path for intensity modulation and combining it with a MEMS two-dimensional scanning mirror for scanning.

[0027] The present invention aims to solve the problem that the existing MEMS confocal fluorescence microendoscopic imaging system fails to reach the super-resolution level during the imaging process, and thus cannot accurately detect the fine structure of lesions and malignant tumors. The present invention cleverly combines scanning structured light technology and MEMS confocal fluorescence microendoscopic technology. The system successfully breaks through the limitations of traditional endoscopes, making it possible to obtain super-resolution images while performing real-time detection in the body. The broad application prospects of this technical invention cover many aspects of the field of medical imaging, providing clinicians with more accurate and comprehensive imaging information. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0029] Figure 1 A schematic diagram of the structure of a micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system provided by the present invention;

[0030] Figure 2The high-frequency information carried in different intensity modulation functions of the present invention, wherein (a) is a sinusoidal intensity modulation waveform, and (b)-(c) are intensity modulation waveforms when n=2, 3, and 6, respectively;

[0031] Explanation of the reference numerals: 1. laser light source; 2. half-wave plate; 3. electro-optic modulator; 4. reflector; 5. dichroic mirror; 6. first objective lens; 7. pinhole; 8. second objective lens; 9. reflector; 10. objective lens; 11. optical fiber bundle; 12. achromatic lens; 13. MEMS two-dimensional scanning mirror; 14. lens group; 15. sample; 16. filter; 17. converging lens; 18. PMT detector; 19. computer. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] The MEMS scanning confocal fluorescence super-resolution microendoscopic imaging system and method provided by the present invention combines MEMS confocal fluorescence microendoscopic imaging technology with scanning structured light super-resolution microendoscopic imaging technology to construct a MEMS scanning structured light confocal fluorescence microendoscopic imaging system. Then, the imaging information is processed according to the structured light super-resolution algorithm, providing a more accurate and reliable tool for scientific research and medical diagnosis.

[0034] The present invention introduces SIM technology as a powerful supplement to MEMS confocal fluorescence microendoscopy imaging technology, and its main goal is to overcome traditional limitations and improve the resolution of imaging to more accurately detect lesions and malignant tumor structures. By adopting advanced technical means, these methods achieve higher lateral resolution at the nanometer level, allowing doctors and researchers to observe and analyze the microscopic structure of cells and tissues more clearly.

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] like Figure 1As shown, the micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system provided by the present invention comprises: a laser light source 1, a half-wave plate 2, an electro-optical modulator 3, a reflector 4, a dichroic mirror 5, a pinhole filter (a first objective lens 6, a pinhole 7, a second objective lens 8), a reflector 9, an objective lens 10, an optical fiber bundle 11, an achromatic lens 12, a MEMS two-dimensional scanning mirror 13, a lens group 14, and an emission filter 16, a converging lens 17, and a PMT detector 18 arranged in sequence after the dichroic mirror 5 along the fluorescence reverse transmission optical path obtained by exciting a sample 15 with the excitation light; for example, the optical fiber bundle 11 can adopt a double-clad photonic crystal fiber;

[0037] The laser light source 1 is used to emit excitation light; the excitation light emitted by the laser light source 1 is sequentially focused into the sample 15 after passing through the laser light source 1, the half-wave plate 2, the electro-optical modulator 3, the reflector 4, the dichroic mirror 5, the first objective lens 6, the pinhole 7, the second objective lens 8, the reflector 9, the objective lens 10, the optical fiber bundle 11, the achromatic lens 12, the MEMS two-dimensional scanning mirror 13, and the lens group 14, and the excitation light interacts with the fluorescent marker in the sample 15 to excite the sample 15 to generate fluorescence; wherein the electro-optical modulator 3 is used to modulate the intensity of the excitation light in the form of a required intensity modulation function;

[0038] The fluorescence generated by the sample 15 is transmitted back to the dichroic mirror 5 according to the reversible principle of the optical path, passes through the emission filter 16 and the converging lens 17, and is collected by the PMT detector 18.

[0039] The system also includes a computer 19, which is electrically connected to the electro-optic modulator 3, the MEMS two-dimensional scanning mirror 13 and the PMT detector 18 respectively. The computer 19 controls the electro-optic modulator 3 to modulate the intensity of the excitation light in the form of a required intensity modulation function, modulates the excitation light into a time-varying light beam with varying intensity, and then controls the MEMS two-dimensional scanning mirror 13 to scan, and focuses the excitation light with different intensities into the sample 15 through the lens group 14. Finally, the fluorescence information is processed according to the structured light super-resolution reconstruction algorithm to obtain a super-resolution image of the sample 15.

[0040] The working principle of the micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system provided by the present invention is as follows:

[0041] A laser light source 1 (e.g., a semiconductor laser) generates excitation light, the wavelength of which depends on the properties of the fluorescent marker to be excited. The excitation light is modulated by a half-wave plate 2 and an electro-optical modulator 3. The polarization state of the excitation light is adjusted by adjusting the half-wave plate 2 to ensure that the modulation efficiency of the electro-optical modulator 3 is the highest, and when the excitation light passes through the electro-optical modulator 3, the laser intensity is modulated in the form of a desired intensity modulation function.

[0042] An example of the required intensity modulation function form is given below: When the electro-optic modulator works in 3-phase linear modulation mode, the intensity of the excitation light changes with time in a sinusoidal function, and its expression is:

[0043]

[0044] Where I is the required excitation light intensity, k a is the modulation frequency of the structured light, which is usually consistent with the diffraction limit of the imaging system. Figure 2 (a) shows a sinusoidal intensity modulation waveform with only one peak in one cycle. After Fourier transform, in the frequency domain, in addition to the baseband information, it only contains a high-frequency information k a .

[0045] When the electro-optic modulator 3 works in the nonlinear modulation mode, the intensity of the excitation light changes with time in a non-sinusoidal form, and the expression is:

[0046]

[0047] Among them, n represents the number of terms of the cosine function, that is, the multiple of the highest frequency.

[0048] When n=2,3,6, the intensity modulation waveforms are shown in Figure 2. Figure 2 In (b)-(d), it can be seen from the figure that within one cycle, there are multiple peaks, and each additional peak in the frequency domain (Fourier transform) indicates the existence of one more frequency multiplication information. The present invention uses SIM technology to move the high-frequency information carried in the modulation function to the baseband and parse it out through a reconstruction algorithm. The more high-frequency information is carried, the higher the imaging resolution of the system.

[0049] Subsequently, the excitation light is split by the dichroic mirror 5 and then enters the pinhole filter composed of two identical objective lenses 6, 8 and a pinhole 7. After being deflected by the reflector 9 and focused by the objective lens 10, the laser is coupled by the objective lens into the core of the fiber bundle 11 of the double-clad photonic crystal fiber for transmitting the excitation light. The excitation light emitted by the fiber bundle 11 is collimated by the achromatic lens 12, and the collimated light is scanned by the MEMS two-dimensional scanning mirror 13 and focused into the sample 15 through the high refractive index lens group 14. According to the principle of reversibility of optical path, the fluorescence signal stimulated by the modulated excitation light is collected by the MEMS scanning probe, separated from the excitation light path by parallel light through the transmission optical fiber and the coupled objective lens through the dichroic mirror 5, the emission filter 16 is highly transparent to the fluorescence and highly cuts off and suppresses the noise signal other than the fluorescence signal, the fluorescence signal with high signal-to-noise ratio is focused by the converging lens 17 to the PMT detector 18 for detection, the scanning excitation and acquisition are strictly synchronized and controlled by the computer 19 and the Labview control system, the analog signal obtained is reconstructed into a super-resolution image with nanometer resolution through the reconstruction algorithm written in MATLAB, and finally displayed and stored on the video display, finally realizing real-time super-resolution detection of the image.

[0050] On the other hand, the present invention also provides a scanning structured light confocal super-resolution microendoscopy imaging method, which is applied to the above-mentioned micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system, comprising the following steps:

[0051] The laser light source 1 emits an excitation light, the wavelength of which is determined by the properties of the fluorescent marker to be excited;

[0052] The excitation light is intensity modulated by the electro-optic modulator 3 in the form of a desired intensity modulation function, and then filtered by the dichroic mirror 5 to enter the pinhole filter;

[0053] After the excitation light is confocused by the pinhole filter, it is deflected by the reflector 9 and focused by the objective lens 10. After that, the excitation light is transmitted to the achromatic lens 12 through the optical fiber bundle 11 for collimation;

[0054] The collimated excitation light is scanned by the MEMS two-dimensional scanning mirror 13 and focused into the sample 15 through the lens group 14;

[0055] The fluorescence signal generated by the sample 15 is transmitted in reverse according to the reversible principle of the optical path, collected by the MEMS two-dimensional scanning mirror 13 scanning probe, and separated from the excitation optical path by the dichroic mirror 5 as parallel light after passing through the transmission optical fiber bundle 11 and the objective lens 10. The emission filter 16 is highly transparent to the fluorescence and highly cuts off and suppresses the noise signal other than the fluorescence signal. The fluorescence signal with high signal-to-noise ratio is focused by the converging lens 17 to the PMT detector 18 for detection;

[0056] The PMT detector 18 transmits the fluorescence information to the computer 19 , and the computer 19 processes the fluorescence information according to a structured light super-resolution reconstruction algorithm to obtain a super-resolution image of the sample 15 .

[0057] The principles and implementation methods of the present invention are described in this article using specific examples. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system, characterized in that: include: A laser light source (1), an electro-optic modulator (3), a dichroic mirror (5), a pinhole filter, a reflector (9), an objective lens (10), an optical fiber bundle (11), an achromatic lens (12), a MEMS two-dimensional scanning mirror (13), and a lens group (14) are sequentially arranged along an excitation light transmission optical path, and a PMT detector (18) is arranged after the dichroic mirror (5) along a reverse transmission optical path of fluorescence obtained by exciting a sample (15) with the excitation light; The laser light source (1) is used to emit excitation light; the excitation light emitted by the laser light source (1) sequentially passes through an electro-optic modulator (3), a dichroic mirror (5), a pinhole filter, a reflector (9), an objective lens (10), an optical fiber bundle (11), an achromatic lens (12), a MEMS two-dimensional scanning mirror (13), and a lens group (14) and is then focused onto a sample (15); the excitation light interacts with a fluorescent marker in the sample (15) to excite the sample (15) to generate fluorescence; wherein the electro-optic modulator (3) is used to modulate the intensity of the excitation light in the form of a desired intensity modulation function; The fluorescence generated by the sample (15) is transmitted back to the dichroic mirror (5) according to the reversible principle of the optical path, and then collected by the PMT detector (18).

2. The MEMS scanning confocal fluorescence super-resolution microendoscopy imaging system according to claim 1, characterized in that: A half-wave plate (2) is also provided between the laser light source (1) and the electro-optic modulator (3).

3. The MEMS scanning confocal fluorescence super-resolution microendoscopy imaging system according to claim 1, characterized in that: A reflecting mirror (4) is also provided between the electro-optic modulator (3) and the dichroic mirror (5).

4. The MEMS scanning confocal fluorescence super-resolution microendoscopy imaging system according to claim 1, characterized in that: The pinhole filter comprises a first objective lens (6), a pinhole (7), and a second objective lens (8) which are arranged in sequence along the excitation light transmission path.

5. The MEMS scanning confocal fluorescence super-resolution microendoscopy imaging system according to claim 1, characterized in that: An emission filter (16) and a converging lens (17) are also provided between the dichroic mirror (5) and the PMT detector (18).

6. The MEMS scanning confocal fluorescence super-resolution microendoscopy imaging system according to claim 1, characterized in that: The system further comprises a computer (19), wherein the computer (19) is electrically connected to the electro-optic modulator (3), the MEMS two-dimensional scanning mirror (13) and the PMT detector (18) respectively. The computer (19) controls the electro-optic modulator (3) to modulate the intensity of the excitation light in the form of a required intensity modulation function, modulating the excitation light into a time-varying light beam with varying intensity, and then controls the MEMS two-dimensional scanning mirror (13) to scan, focusing the excitation light with different intensities into the sample (15) through the lens group (14), and finally processing the fluorescence information according to the structured light super-resolution reconstruction algorithm to obtain a super-resolution image of the sample (15).

7. The MEMS scanning confocal fluorescence super-resolution microendoscopy imaging system according to claim 1, characterized in that: The optical fiber bundle (11) adopts double-clad photonic crystal optical fiber.

8. A scanning structured light confocal super-resolution microendoscopy imaging method, characterized in that: The micro-electromechanical system scanning confocal fluorescence super-resolution microendoscopy imaging system applied to any one of claims 1 to 7 comprises the following steps: The laser light source (1) emits excitation light; The excitation light is intensity modulated by an electro-optic modulator (3) in the form of a desired intensity modulation function, and then filtered by a dichroic mirror (5) and enters a pinhole filter; After the excitation light is confocused by a pinhole filter, it is deflected by a reflector (9) and focused by an objective lens (10). After that, the excitation light is transmitted to an achromatic lens (12) through an optical fiber bundle (11) for collimation. The collimated excitation light is scanned by a MEMS two-dimensional scanning mirror (13) and focused into the sample (15) through a lens group (14); The fluorescence signal generated by the sample (15) is transmitted in reverse according to the reversible principle of the optical path, collected by the MEMS two-dimensional scanning mirror (13) scanning probe, and separated from the excitation light path by the dichroic mirror (5) as parallel light after passing through the transmission optical fiber bundle (11) and the objective lens (10). The emission filter (16) is highly transparent to the fluorescence and highly cuts off and suppresses the noise signal other than the fluorescence signal. The fluorescence signal with a high signal-to-noise ratio is focused by the converging lens (17) to the PMT detector (18) for detection; The PMT detector (18) transmits the fluorescence information to the computer (19), and the computer (19) processes the fluorescence information according to the structured light super-resolution reconstruction algorithm to obtain a super-resolution image of the sample (15).

9. The scanning structured light confocal super-resolution microendoscopy imaging method according to claim 8, characterized in that: The wavelength of the excitation light is determined according to the properties of the fluorescent marker to be excited.