Diaphragm vacuum pump

Abstract

The invention relates to the field of vacuum pumps, in particular to a diaphragm vacuum pump. The suction pump comprises a pump body, a working cavity is formed in the pump body, a diaphragm is arranged in the working cavity, and the working cavity is divided into a suction cavity and an air cavity by the diaphragm; the suction cavity is communicated with an air inlet hole and an air outlet hole, the air outlet hole is formed in the upper portion, the air inlet hole is formed in the lower portion, and ball valves are arranged in the air inlet hole and the air outlet hole; the ball valve comprises a ball seat and a sealing ball, an inner cavity of the ball seat comprises a cylindrical face and a spherical face connected to the bottom of the cylindrical face, and a buffering supporting rod is arranged in the sealing ball. In the falling process of the sealing ball, the sealing ball is buffered through the buffering supporting rod, the impact force between the sealing ball and the ball seat is reduced, the service life of the sealing ball is prolonged, meanwhile, through cooperation of the buffering supporting rod and the spherical surface of the bottom of the ball seat, the sealing ball rotates with the buffering supporting rod as a fulcrum in the falling process, and the sealing ball is prevented from falling off. And sundries adhered to the communicating opening in the bottom of the ball seat are brought out, the contact reliability of the sealing ball and the ball seat is improved, and then the sealing performance is improved.

Description

Technical Field

[0001] The invention relates to the field of vacuum pumps, and in particular to a diaphragm vacuum pump. Background Art

[0002] A vacuum pump is a device or equipment that uses mechanical, physical, chemical or physicochemical methods to evacuate the container to obtain a vacuum. Generally speaking, a vacuum pump is a device that uses various methods to improve, generate and maintain a vacuum in a closed space. A diaphragm vacuum pump relies on the back and forth movement of the diaphragm to change the volume of the studio to inhale and exhaust gas. In other words, the working principle of a diaphragm vacuum pump mainly relies on the circular motion of the motor to drive the internal mechanical device to make the diaphragm inside the pump reciprocate, or to make the diaphragm reciprocate through other driving methods, compressing and stretching the air in the pump chamber to form a vacuum or positive pressure, thereby achieving the inhalation and exhaust of gas.

[0003] The diaphragm vacuum pump needs to use a ball valve to switch the gas path during the process of inhaling and exhausting gas. For example, a diaphragm oil-free vacuum pump disclosed in the authorization announcement number CN 107461319 B uses a float and a baffle (ball valve) to switch the gas path. The ball valve is easily damaged due to repeated collisions between the ball and the valve seat during operation. At the same time, the valve seat is prone to dust and debris on the bottom after long-term use, resulting in poor sealing between the ball and the valve seat, affecting gas transmission.

[0004] The information disclosed in the background technology section of the present invention is only intended to deepen the understanding of the general background technology of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to those skilled in the art. Summary of the invention

[0005] According to the deficiencies of the prior art, the present invention proposes a diaphragm vacuum pump to solve the problems of the existing diaphragm vacuum pump having a ball that is easily damaged by strong impact and has poor sealing.

[0006] A diaphragm vacuum pump of the present invention adopts the following technical scheme: comprising a pump body, a working chamber is formed inside the pump body, a diaphragm is arranged in the working chamber, the diaphragm divides the working chamber into a suction chamber and an air chamber; the suction chamber is connected with an air inlet and an air outlet, the air outlet is located at the top, the air inlet is located at the bottom, and ball valves are arranged in the air inlet and the air outlet; a moving rod is also arranged in the pump body, one end of the moving rod extends into the air chamber and is connected with the diaphragm, and the moving rod can move along its axis to make the diaphragm reciprocate, thereby changing the volume of the suction chamber, thereby inhaling and exhausting gas; The ball valve comprises a ball seat and a sealing ball, the ball seat is arranged at the air inlet and the air outlet, and the sealing ball is arranged in the ball seat; The ball seat has an inner cavity with an open top, the inner cavity diameter of the ball seat is larger than the outer diameter of the sealing ball, the inner cavity of the ball seat includes a cylindrical surface and a spherical surface connected to the bottom of the cylindrical surface, and the bottom of the ball seat is provided with a connecting port that passes through from top to bottom, and the diameter of the connecting port is smaller than the diameter of the sealing ball; the sealing ball is configured so that its center of gravity and geometric center are collinear but do not overlap, and a buffer support rod is provided inside the sealing ball, the buffer support rod is obliquely inserted into the sealing ball and is located in the hemisphere where the center of gravity of the sealing ball is located, the buffer support rod can slide elastically relative to the sealing ball, and initially one end of the buffer support rod extends outward from the sealing ball and points to the spherical surface of the inner cavity of the ball seat.

[0007] Optionally, the buffer support rod is a fixed-length rod, and an elastic member is provided in the sealing ball, one end of the elastic member is connected to the sealing ball, and the other end is connected to one end of the buffer support rod located inside the sealing ball, and the elastic member initially causes the buffer support rod to extend out of the sealing ball.

[0008] Optionally, the buffer support rod is an elastic telescopic rod, one end of which is located inside the sealing ball and is detachably connected to the sealing ball, and the elastic telescopic rod is initially in an extended state.

[0009] Optionally, the end of the buffer support rod is an arc-shaped surface, and when the buffer support rod is completely located inside the sealing ball, the arc-shaped surface is matched with the outer peripheral wall of the sealing ball.

[0010] Optionally, a counterweight block is arranged inside the sealing ball, and the counterweight block and the buffer support rod are located in the same hemisphere.

[0011] Optionally, the cylindrical surface of the inner cavity of the ball seat is provided with a plurality of ribs, the ribs extend in the vertical direction and are evenly distributed in the circumferential direction, and the ribs are in sliding contact with the sealing ball.

[0012] Optionally, a stopper is provided on the top of the ball seat, and the stopper can prevent the sealing ball from being separated from the ball seat.

[0013] Optionally, two working chambers are formed in the pump body, the two working chambers are spaced apart along the axis of the pump body, a diaphragm is provided in each working chamber, the air chambers of the two working chambers are arranged opposite to each other, and the two ends of the moving rod are respectively located in the two air chambers and connected to the corresponding diaphragms.

[0014] Optionally, a power device is also provided in the pump body, and the power device includes a main air channel, a first control air channel and a second control air channel arranged in the pump body. One end of the first control air channel and the second control air channel can be connected to the main air channel, and the other end is respectively connected to two air cavities. One end of the main air channel away from the first control air channel and the second control air channel is connected to a high-pressure air source. An air distribution valve is provided at the junction of the main air channel, the first control air channel and the second control air channel. The air distribution valve is used to make the first control air channel and the second control air channel alternately connected to the main air channel, and each air cavity is provided with an exhaust valve connected to the outside world.

[0015] Optionally, an air inlet channel and an exhaust channel are formed in the pump body, the air inlet channel is connected to the air inlet hole, and the exhaust channel is connected to the air outlet hole; an air inlet and an air outlet are also provided on the pump body, one end of the air inlet is connected to the air inlet channel, and the other end is used to connect to the target container, and one end of the air outlet is connected to the exhaust channel, and the other end is connected to the outside world.

[0016] The beneficial effects of the present invention are as follows: in a diaphragm vacuum pump of the present invention, a buffer support rod capable of elastic sliding is arranged in the sealing ball, and the sealing ball is buffered by the buffer support rod during the falling process of the sealing ball, thereby reducing the impact force between the sealing ball and the ball seat, which helps to improve the service life of the sealing ball; further, the buffer support rod cooperates with the spherical surface at the bottom of the ball seat, so that the sealing ball rotates with the buffer support rod as a fulcrum during the falling process, bringing out debris adhered to the connecting port at the bottom of the ball seat, thereby improving the contact reliability between the sealing ball and the ball seat, and further improving the sealing performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the overall structure of a diaphragm vacuum pump of the present invention; Figure 2 A side view of a diaphragm vacuum pump of the present invention; Figure 3 for Figure 2 Middle AA section view; Figure 4 for Figure 3 Enlarged view of point B in the middle.

[0019] In the figure: 100, pump body; 101, middle column shell; 1011, air cavity; 1012, first control air channel; 1013, second control air channel; 102, side spherical shell; 1021, suction cavity; 110, base; 111, air inlet; 1111, air inlet; 120, air outlet; 121, air outlet; 200, diaphragm; 300, moving rod; 310, connecting plate; 400, ball valve; 410, ball seat; 4101, cylindrical surface; 4102, spherical surface; 4103, connecting port; 411, rib plate; 412, stopper; 420, sealing ball; 421, buffer support rod; 422, elastic member; 423, counterweight; 500. Gas distribution valve. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0021] like Figures 1 to 4 As shown, a diaphragm vacuum pump provided by an embodiment of the present invention includes a pump body 100, a working chamber is formed inside the pump body 100, a diaphragm 200 is arranged in the working chamber, and the diaphragm 200 divides the working chamber into a suction chamber 1021 and an air chamber 1011; the suction chamber 1021 is connected with an air inlet and an air outlet, the air outlet is located at the top, and the air inlet is located at the bottom, and ball valves 400 are arranged in the air inlet and the air outlet to control the opening and closing of the air inlet and the air outlet.

[0022] A moving rod 300 is also provided in the pump body 100 , one end of which extends into the air cavity 1011 and is connected to the diaphragm 200 . The moving rod 300 can move along its axis to make the diaphragm 200 reciprocate, thereby changing the volume of the suction cavity 1021 , thereby inhaling and exhausting gas.

[0023] The ball valve 400 includes a ball seat 410 and a sealing ball 420. The ball seat 410 is arranged at the air inlet and the air outlet, and the sealing ball 420 is arranged in the ball seat 410. The ball seat 410 has an inner cavity with an open top, and the inner cavity diameter of the ball seat 410 is larger than the outer diameter of the sealing ball 420. The inner cavity of the ball seat 410 includes a cylindrical surface 4101 and a spherical surface 4102 connected to the bottom of the cylindrical surface 4101. The bottom of the ball seat 410 is provided with a connecting port 4103 that passes through from top to bottom, and the diameter of the connecting port 4103 is smaller than the diameter of the sealing ball 420.

[0024] The sealing ball 420 is configured so that its center of gravity and geometric center are colinear but not overlapped. A buffer support rod 421 is provided inside the sealing ball 420. The buffer support rod 421 is obliquely inserted into the sealing ball 420 and is located in the hemisphere where the center of gravity of the sealing ball 420 is located. The buffer support rod 421 can slide elastically relative to the sealing ball 420. Initially, one end of the buffer support rod 421 extends outward from the sealing ball 420 and points to the spherical surface 4102 of the inner cavity of the ball seat 410.

[0025] When the scheme of this embodiment is in use, when the diaphragm 200 is agitated toward the suction chamber 1021, the volume of the suction chamber 1021 decreases, the upper sealing ball 420 moves upward relative to the ball seat 410 to open the air outlet, and the lower sealing ball 420 moves downward relative to the ball seat 410 to block the air hole, and the gas in the suction chamber 1021 is discharged from the air outlet; when the diaphragm 200 is agitated toward the air cavity 1011, the volume of the suction chamber 1021 increases, the upper sealing ball 420 moves downward relative to the ball seat 410 to block the air outlet, and the lower sealing ball 420 moves upward relative to the ball seat 410 to open the blocking hole, and the gas in the target container is sucked through the air inlet, and this alternating reciprocating process is repeated to evacuate the target container.

[0026] In the process of the sealing ball 420 moving up and down inside the ball seat 410, when the sealing ball 420 moves downward, the buffer support rod 421 gradually abuts against the spherical surface 4102 at the bottom of the ball seat 410. After the buffer support rod 421 abuts against the spherical surface 4102 of the ball seat 410, the buffer support rod 421 elastically retracts into the sealing ball 420, which can provide a certain amount of buffering for the sealing ball 420, thereby helping to increase the service life of the sealing ball 420. Furthermore, the buffer support rod 421 abuts against the spherical surface 4102 at the bottom of the ball seat 410, so that the sealing ball 420 can move with the buffer support rod 421 as the fulcrum. When the sealing ball 420 rotates and falls to the bottom of the ball seat 410, the rotation of the sealing ball 420 can bring out the debris at the connecting port 4103, so as to prevent the debris attached to the connecting port 4103 from affecting the sealing performance of the sealing ball 420 and the ball valve 400. At the same time, since the position of the buffer support rod 421 abutting the spherical surface 4102 of the inner cavity of the ball seat 410 during the falling process of the sealing ball 420 is not fixed, but may be at any position in the circumferential direction, the surface of the sealing ball 420 rolling in contact with the bottom of the ball seat 410 is different each time it falls, which helps to evenly clean the connecting port 4103 in the circumferential direction and further improve the sealing performance.

[0027] Regarding the arrangement of the buffer support rod 421, in one embodiment, the buffer support rod 421 is a fixed-length rod, and an elastic member 422 is arranged inside the sealing ball 420, one end of the elastic member 422 is connected to the sealing ball 420, and the other end is connected to one end of the buffer support rod 421 located inside the sealing ball 420, and the elastic member 422 initially makes the buffer support rod 421 extend out of the sealing ball 420. Preferably, the elastic member 422 is a spring.

[0028] In other embodiments, the buffer support rod 421 is an elastic telescopic rod, one end of which is located inside the sealing ball 420 and is detachably connected to the sealing ball 420, and the elastic telescopic rod is initially in an extended state. Preferably, the elastic telescopic rod can be threadedly connected to the sealing ball 420, so that the buffer support rod 421 is easy to install, disassemble, repair and replace.

[0029] Furthermore, the end of the buffer support rod 421 is an arc-shaped surface. When the buffer support rod 421 is completely located inside the sealing ball 420, the arc-shaped surface is matched with the outer peripheral wall of the sealing ball 420, which is beneficial for the sealing ball 420 to seal the connecting hole.

[0030] In a further embodiment, a counterweight 423 is provided inside the sealing ball 420, and the counterweight 423 and the buffer support rod 421 are located in the same hemisphere. The counterweight 423 is arranged so that the center of gravity of the sealing ball 420 is colinear with its geometric center and is located in the hemisphere where the buffer support rod 421 is located, so that the buffer support can always extend obliquely downward. In other words, when the sealing ball 420 moves downward, the buffer support rod 421 abuts against the spherical bottom surface of the inner cavity of the ball seat 410 to make the sealing ball 420 rotate. When the sealing ball 420 moves upward, the sealing ball 420 can be reset under the action of gravity, so that the support can always extend obliquely downward, so as to facilitate the next abutment with the spherical bottom surface of the inner cavity of the ball seat 410.

[0031] In a further embodiment, a cylindrical surface 4101 of the inner cavity of the ball seat 410 is provided with a plurality of ribs 411, which extend in the vertical direction and are evenly distributed in the circumferential direction. The ribs 411 are in sliding contact with the sealing ball 420. The provision of the ribs 411 can limit the position of the sealing ball 420 in the ball seat 410, so that the sealing ball 420 can move up and down along the ball seat 410 as much as possible, thereby reducing the radial shaking of the sealing ball 420 in the ball seat 410.

[0032] In a further embodiment, a stopper 412 is provided on the top of the ball seat 410, and the stopper 412 can prevent the sealing ball 420 from being separated from the ball seat 410. Furthermore, the stopper 412 can be made of rubber material, which can buffer the movement of the sealing ball 420 and reduce the noise generated when the sealing ball 420 hits the stopper 412. Preferably, the stopper 412 is in the shape of a cross, which can better block the sealing ball 420.

[0033] In a further embodiment, two working chambers are formed in the pump body 100, and the two working chambers are spaced apart along the axis of the pump body 100. A diaphragm 200 is disposed in each working chamber, and the air chambers 1011 of the two working chambers are disposed opposite to each other. The two ends of the moving rod 300 are respectively located in the two air chambers 1011 and connected to the corresponding diaphragms 200. Further, connecting plates 310 are disposed at both ends of the moving rod 300, and the connecting plates 310 are connected to the diaphragm 200, thereby increasing the contact area between the moving rod 300 and the diaphragm 200 and making the connection more reliable.

[0034] Reference Figure 3During the use of the solution of this embodiment, when the moving rod 300 moves to the left, it drives the two diaphragms 200 to agitate to the left, and the volume of the left suction chamber decreases. The sealing ball 420 in the air outlet corresponding to the left suction chamber 1021 moves upward to open the air outlet, and the sealing ball 420 in the air inlet moves downward to close the air inlet, and the gas in the left suction chamber is discharged from the air outlet. At the same time, the volume of the right suction chamber 1021 increases, and the sealing ball 420 in the air outlet corresponding to the right suction chamber 1021 moves downward to close the air outlet, and the sealing ball 420 in the air inlet moves upward to open the air inlet, and the right suction chamber 1021 inhales air through the air inlet; then the moving rod 300 moves to the right to drive the two diaphragms 200 to agitate to the right, and the left suction chamber 1021 inhales air, and the right suction chamber 1011 exhausts air, and this is repeated alternately. By setting two working chambers, the device can continuously suction the target container, thereby improving efficiency.

[0035] In a further embodiment, an air inlet channel and an air exhaust channel are formed in the pump body 100, the air inlet channel is connected to the air inlet hole, and the air exhaust channel is connected to the air outlet hole. The pump body 100 is also provided with an air inlet 1111 and an air outlet 121, one end of the air inlet 1111 is connected to the air inlet channel, and the other end is used to connect to the target container, and one end of the air outlet 121 is connected to the exhaust channel, and the other end is connected to the outside world for easy exhaust.

[0036] In a further embodiment, a power device is further disposed in the pump body 100 , and the power device is configured to enable the moving rod 300 to reciprocate along its axis, thereby causing the diaphragm 200 to reciprocate.

[0037] In one embodiment, the power device can use a reciprocating motion mechanism in the related art to drive the moving rod 300 to move back and forth, and drive the first diaphragm 200 and the second diaphragm 200 to move back and forth through the movement of the moving rod 300. For example, the power device can use a reciprocating motion mechanism such as an eccentric cam mechanism, a reciprocating screw mechanism, an incomplete gear mechanism, a crank slider mechanism, etc., which will not be described in detail here.

[0038] In other embodiments, the present invention is preferred, the power device can also be implemented by the pneumatic method in the related art, specifically, the power device includes a main airway, a first control airway 1012 and a second control airway 1013 arranged in the pump body 100, one end of the first control airway 1012 and the second control airway 1013 can be connected to the main airway, and the other end is respectively connected to the two air cavities 1011, the end of the main airway away from the first control airway 1012 and the second control airway 1013 is connected to the high-pressure gas source, and the junction of the main airway, the first control airway 1012 and the second control airway 1013 is provided with a gas distribution valve 500, and the gas distribution valve 500 is used to make the first control airway 1012 and the second control airway 1013 alternately connected to the main airway. Each air cavity 1011 is provided with an exhaust valve connected to the outside, and the exhaust valve is used to discharge the gas in the air cavity 1011.

[0039] The solution of this embodiment can alternately deliver the gas of the main airway to the two air cavities 1011 through the arrangement of the gas distribution valve 500. Figure 3 , it is defined that the first control air channel 1012 is connected to the air cavity 1011 on the left side. When the air distribution valve 500 slides to connect the main air channel and the first control air channel 1012, the compressed air enters the air cavity 1011 on the left side through the main air channel and the first control air channel 1012. Under the action of air pressure, the left diaphragm 200 agitates toward the corresponding suction cavity 1021, and drives the right diaphragm 200 to agitate toward its corresponding air cavity 1011 through the moving rod 300, the left suction cavity 1021 is exhausted, and the right suction cavity 1021 is inhaled. At the same time, the gas in the right air cavity 1011 The air is discharged from the pump body 100 through the exhaust valve. When the gas distribution valve 500 slides to connect the main air channel and the second control air channel 1013, the compressed air enters the air cavity 1011 on the right side through the main air channel and the second control air channel 1013, and the right side diaphragm 200 agitates toward the corresponding suction cavity 1021, and drives the left side diaphragm 200 to agitate toward the corresponding air cavity 1011 through the moving rod 300, the right side suction cavity 1021 is exhausted, and the left side suction cavity 1021 is intaken, and at the same time, the gas in the left side air cavity 1011 is discharged from the pump body 100 through the exhaust valve, and this is repeated alternately.

[0040] In a further embodiment, to facilitate assembly, disassembly and maintenance, the pump body 100 includes an intermediate column shell 101 and a side spherical shell 102. There are two side spherical shells 102, and the two side spherical shells 102 are detachably connected to the left and right sides of the intermediate column shell 101, respectively. A cavity is provided at one end of the intermediate column shell 101 and the side spherical shell 102 that are close to each other. The diaphragm 200 is arranged at the connection between the intermediate column shell 101 and the side spherical shell 102, and an elastic sealing ring is provided at the outer edge of the diaphragm 200, which is sealed and connected to the intermediate column shell 101 and the side spherical shell 102.

[0041] Furthermore, the diaphragm vacuum pump of the present invention further comprises a base 110 , which is detachably connected to the bottom of the two side spherical shells 102 , and is used to support the pump body 100 .

[0042] An air inlet pipe 111 is formed on the base 110 , an air inlet channel is formed in the air inlet pipe 111 , and an air inlet port 1111 is arranged on the air inlet pipe 111 ; the tops of the two side spherical shells 102 are detachably connected with an air outlet pipe 120 , an air outlet channel is formed in the air outlet pipe 120 , and an air outlet port 121 is arranged on the air outlet pipe 120 .

[0043] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A diaphragm vacuum pump, characterized in that: The pump body comprises a pump body, a working chamber is formed inside the pump body, a diaphragm is arranged in the working chamber, and the diaphragm divides the working chamber into a suction chamber and an air chamber; the suction chamber is connected with an air inlet and an air outlet, the air outlet is located at the top, and the air inlet is located at the bottom, and ball valves are arranged in the air inlet and the air outlet; a moving rod is also arranged in the pump body, one end of the moving rod extends into the air chamber and is connected with the diaphragm, and the moving rod can move along its axis to make the diaphragm reciprocate, thereby changing the volume of the suction chamber, thereby inhaling and exhausting gas; The ball valve comprises a ball seat and a sealing ball, the ball seat is arranged at the air inlet and the air outlet, and the sealing ball is arranged in the ball seat; The ball seat has an inner cavity with an open top, the inner cavity diameter of the ball seat is larger than the outer diameter of the sealing ball, the inner cavity of the ball seat includes a cylindrical surface and a spherical surface connected to the bottom of the cylindrical surface, and the bottom of the ball seat is provided with a connecting port that passes through from top to bottom, and the diameter of the connecting port is smaller than the diameter of the sealing ball; the sealing ball is configured so that its center of gravity and geometric center are collinear but do not overlap, and a buffer support rod is provided inside the sealing ball, the buffer support rod is obliquely inserted into the sealing ball and is located in the hemisphere where the center of gravity of the sealing ball is located, the buffer support rod can slide elastically relative to the sealing ball, and initially one end of the buffer support rod extends outward from the sealing ball and points to the spherical surface of the inner cavity of the ball seat.

2. A diaphragm vacuum pump according to claim 1, characterized in that: The buffer support rod is a fixed-length rod, and an elastic member is arranged in the sealing ball. One end of the elastic member is connected to the sealing ball, and the other end is connected to one end of the buffer support rod located inside the sealing ball. The elastic member initially makes the buffer support rod extend out of the sealing ball.

3. A diaphragm vacuum pump according to claim 1, characterized in that: The buffer support rod is an elastic telescopic rod, one end of which is located inside the sealing ball and is detachably connected to the sealing ball. The elastic telescopic rod is initially in an extended state.

4. A diaphragm vacuum pump according to claim 1, characterized in that: The end of the buffer support rod is an arc surface, and when the buffer support rod is completely located inside the sealing ball, the arc surface is matched with the outer peripheral wall of the sealing ball.

5. A diaphragm vacuum pump according to claim 1, characterized in that: A counterweight block is arranged inside the sealing ball, and the counterweight block and the buffer support rod are located in the same hemisphere.

6. A diaphragm vacuum pump according to claim 1, characterized in that: The cylindrical surface of the inner cavity of the ball seat is provided with a plurality of ribs, which extend in the vertical direction and are evenly distributed in the circumferential direction, and the ribs are in sliding contact with the sealing ball.

7. A diaphragm vacuum pump according to claim 1, characterized in that: A stopper is arranged on the top of the ball seat, and the stopper can prevent the sealing ball from being separated from the ball seat.

8. A diaphragm vacuum pump according to claim 1, characterized in that: Two working chambers are formed in the pump body, and the two working chambers are spaced apart along the axis of the pump body. A diaphragm is arranged in each working chamber, and the air chambers of the two working chambers are arranged oppositely. The two ends of the moving rod are respectively located in the two air chambers and connected to the corresponding diaphragms.

9. A diaphragm vacuum pump according to claim 8, characterized in that: A power device is also provided in the pump body, and the power device includes a main air channel, a first control air channel and a second control air channel arranged in the pump body. One end of the first control air channel and the second control air channel can be connected to the main air channel, and the other end is respectively connected to two air cavities. One end of the main air channel away from the first control air channel and the second control air channel is connected to a high-pressure air source. An air distribution valve is provided at the junction of the main air channel, the first control air channel and the second control air channel. The air distribution valve is used to make the first control air channel and the second control air channel alternately connected to the main air channel, and each air cavity is provided with an exhaust valve connected to the outside world.

10. A diaphragm vacuum pump according to claim 7, characterized in that: An air inlet channel and an air exhaust channel are formed in the pump body, the air inlet channel is connected to the air inlet hole, and the exhaust channel is connected to the air outlet hole; an air inlet and an air outlet are also provided on the pump body, one end of the air inlet is connected to the air inlet channel, and the other end is used to connect to the target container, and one end of the air outlet is connected to the exhaust channel, and the other end is connected to the outside world.

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