Gallium oxide washing device convenient for removing impurities
By designing a gallium oxide washing device including a decompression chamber assembly, a driving assembly, a cleaning liquid spray assembly and a drying assembly, the problems of incomplete cleaning and slow drying in the prior art are solved, and efficient cleaning and rapid drying are achieved.
Patent Information
- Application Number
- CN202411818077.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-11
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2044-12-11
AI Technical Summary
The existing gallium oxide cleaning equipment is difficult to completely remove surface impurities during the cleaning process, and the drying process is slow, which can easily lead to impurities residues.
A gallium oxide washing device including a decompression chamber assembly, a drive assembly, a cleaning liquid spray assembly and a drying assembly is designed. The device enables efficient cleaning of the gallium oxide surface through a cleaning mechanism and accelerates the drying process using the drying assembly.
Efficient cleaning of the gallium oxide surface is achieved, completely removing impurities, and reducing the possibility of impurities residues through accelerated drying.
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Figure CN119565959A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of gallium oxide preparation auxiliary tools, in particular to a gallium oxide washing device which is convenient for removing impurities. Background Art
[0002] Gallium oxide is also known as gallium trioxide. Gallium oxide is a wide bandgap semiconductor with Eg = 4.9eV. Its conductivity and luminescence properties have long attracted people's attention. Ga2O3 is a transparent oxide semiconductor material with broad application prospects in optoelectronic devices. It is used as an insulating layer for Ga-based semiconductor materials and an ultraviolet filter. It can also be used as an O2 chemical detector.
[0003] The existing publication number is CN221017597U. An adjustable gallium oxide preparation and cleaning device comprises a box body and an adjusting mechanism. The adjusting mechanism is arranged on the top of the box body, and the adjusting mechanism comprises a soaking chamber, a flushing chamber, a sleeve, a support rod, a top plate, a connecting rod and a hanging basket. The two sides of the box body are respectively provided with a soaking chamber and a flushing chamber, and a sleeve is fixedly connected to the middle position of the top of the box body. The hydroxide precipitate of gallium to be treated is placed in the hanging basket, and is first soaked in the soaking chamber for pretreatment. After soaking, the top plate is pulled to lift it, and then the top plate is rotated to move one side of the soaked hanging basket to the flushing chamber for flushing treatment, while the other side of the hanging basket can be lifted by lifting the connecting rod, so as to facilitate the removal of materials and the placement and soaking of subsequent materials. By soaking first and then flushing, the cleaning efficiency is improved, the adjustment is convenient, and the use is flexible;
[0004] Existing equipment for cleaning gallium oxide has the following main disadvantages:
[0005] 1. When cleaning, spray the cleaning liquid on the surface of gallium oxide and then rinse with water. This cleaning method will cause impurities to remain on the surface of gallium oxide and incomplete cleaning;
[0006] 2. After cleaning, there are water droplets or cleaning liquid remaining on the surface of gallium oxide. The drying speed is slow, and impurities will remain after drying. Summary of the invention
[0007] The object of the present invention is to provide a gallium oxide washing device that is convenient for removing impurities, so as to solve the problems raised in the above background technology.
[0008] In order to achieve the above-mentioned invention object, the present invention adopts the following technical scheme:
[0009] Provided is a gallium oxide washing device for removing impurities, comprising an impurity removal chamber component, a driving component is fixedly connected to the bottom of the impurity removal chamber component, a cleaning liquid spraying component and a drying component are also fixedly connected to the bottom of the impurity removal chamber component, and a cleaning mechanism is rotatably connected in the impurity removal chamber component; wherein
[0010] The cleaning mechanism comprises:
[0011] A driven component, the driven component is fixedly installed in the impurity removal chamber component, and a plurality of brushing components are rotatably connected to the driven component, and the plurality of brushing components are arranged in a ring; wherein
[0012] The driven component comprises:
[0013] A plurality of connecting blocks, one end of which is fixedly connected to the annular track, a plurality of connecting blocks are arranged in an annular shape, the other end of which is fixedly connected to one end of a connecting rod, the connecting block is fixedly connected to one end of a sliding shaft, the other end of the sliding shaft is slidably connected to a gear ring, and one end of a plurality of brushing assemblies is fixedly connected to the gear ring; and
[0014] Several of the scrubbing components include:
[0015] A right-angle block, one end of the right-angle block is fixedly connected to the bottom of the gear ring, and the other end of the right-angle block is rotatably connected to the T-rod, one end of the T-rod is fixedly connected with a roller, and the roller abuts against the bottom of the annular track, and the upper and lower ends of the other end of the T-rod are adapted to the screw rod through threaded holes, the screw rod is rotatably connected to the clamping jaw, one end of the clamping jaw is slidably connected with a push-pull shaft, one end of the push-pull shaft is fixedly connected with a ball, the push-pull shaft is fixedly connected to one end of spring one, and the other end of the spring one is fixedly connected to the clamping jaw, both sides of the right-angle block are fixedly connected with protrusions, the other end of the push-pull shaft is rotatably connected to one end of the driven rod, the other end of the driven rod is rotatably connected to the upper end of the cleaning brush near the edge, and the cleaning brush is rotatably connected to the other end of the clamping jaw.
[0016] Furthermore, the impurity removal chamber assembly includes:
[0017] A cleaning liquid guide groove, wherein the cleaning liquid guide groove is arranged directly below the gear ring, the other end of the connecting rod is fixed to the outside of the cleaning liquid guide groove, a cleaning liquid outlet is provided at the bottom of the cleaning liquid guide groove, the cleaning liquid outlet is fixedly connected to one end of a second spring, the other end of the second spring is fixedly connected to one end of a liquid outlet shaft, a flow blocking plug is fixedly connected to the liquid outlet shaft, and a hemispherical block is fixedly connected to the other end of the liquid outlet shaft; and
[0018] The cleaning liquid guide groove is fixedly connected to the shell body, the cleaning liquid guide groove is arranged in the shell body, and a feed port is arranged on the shell body.
[0019] Furthermore, the driving assembly includes:
[0020] The motor is fixed at the bottom of the shell, and the output end of the motor is fixedly connected to a bevel gear. The outer side of the cleaning liquid guide groove is rotatably connected to a driving shaft, and the lower end of the driving shaft is fixedly connected to a bevel gear. The two bevel gears are meshed. A synchronous wheel 1 is fixedly connected to the driving shaft, and the synchronous wheel 1 is located below the cleaning liquid guide groove. A driving gear is also fixedly connected to the driving shaft, and the driving gear is located above the cleaning liquid guide groove. The driving gear is meshed with a gear ring, and a ratchet 1 is fixedly connected to the upper end of the driving shaft.
[0021] Furthermore, the cleaning liquid spraying assembly includes:
[0022] An infusion pump, wherein the infusion pump is fixedly connected to the bottom of the shell, the liquid outlet end of the infusion pump is fixedly connected to one end of the transfer tube, the other end of the transfer tube is rotatably connected to one end of the infusion tube, the infusion tube is also fixedly connected to a synchronous wheel 2, the synchronous wheel 2 and the synchronous wheel 1 are driven by a synchronous belt, the infusion tube is rotatably connected to the cleaning liquid guide groove, the other end of the infusion tube is fixedly connected to a nozzle, the infusion tube is fixedly connected to a hinge block, the hinge block is fixedly connected to one end of a connecting rod, and the other end of the connecting rod is fixedly connected to a liquid push block.
[0023] Furthermore, a liquid inlet and a liquid outlet are provided on one side of the shell, the liquid inlet end of the infusion pump is fixedly connected to one end of the hose, the hose passes through the liquid inlet, the liquid outlet and the cleaning liquid outlet are fixedly connected to the two ends of the hose respectively, and an exhaust port is provided at the upper end of the shell.
[0024] Furthermore, a limiting block is fixedly connected inside the housing; and
[0025] The drying component comprises:
[0026] A driven shaft is rotatably connected to a limit block, a lower end of the driven shaft is fixedly connected with a ratchet wheel 2, the ratchet wheel 2 is adapted to the ratchet wheel 1, an upper end of the driven shaft is fixedly connected with one end of a rotating rod 1, the other end of the rotating rod 1 is rotatably connected with one end of a rotating rod 2, the other end of the rotating rod 2 is rotatably connected with a piston, the piston is slidably connected to a storage tank, an air inlet and an air outlet are provided on the storage tank, a one-way valve is fixedly connected to the air inlet and the air outlet, and the air outlet is fixedly connected to a drying nozzle through a pipeline.
[0027] Compared with the prior art, one or more of the above technical solutions have the following beneficial effects:
[0028] 1. When cleaning gallium oxide, place the block gallium oxide between two clamping jaws, rotate the lead screw so that the two clamping jaws clamp the gallium oxide, and the cleaning brush is attached to the surface of the gallium oxide. The driving assembly rotates in the forward direction, so that the gear ring rotates, and then the roller rolls on the circular track, so that the T-bar rotates, and then the clamping jaws are driven to rotate, so that the gallium oxide clamped on the clamping jaws rotates. When the ball rotates to the position of the convex block, the push-pull shaft is ejected, and the spring is stretched, so that the driven rod rotatably connected to the other end of the push-pull shaft pushes the cleaning brush to rotate on the clamping jaw, thereby cleaning the surface of the gallium oxide. During the cleaning process, the cleaning liquid spraying assembly sprays the cleaning liquid on the surface of the gallium oxide, and the cleaning liquid spraying assembly rotates at the same time. When the driving assembly rotates in the reverse direction, the gallium oxide rotates in the reverse direction, and the cleaning brush rotates at the same time to scrub the surface of the gallium oxide, so that the cleaning is more complete and the cleaning effect is better.
[0029] 2. When the motor rotates in the opposite direction, the ratchet wheel 1 drives the ratchet wheel 2 to rotate through the adaptation of the ratchet wheel 1 and the ratchet wheel 2, and then drives the driven shaft and the rotating rod 1 to rotate. The two ends of the rotating rod 2 are respectively connected with the rotating rod 1 and the piston, so that the rotating rod 1 drives the piston to slide in the storage tank when it rotates. When the piston slides outward, the one-way valve fixedly connected to the air inlet opens, and the one-way valve fixedly connected to the air outlet closes. At this time, nitrogen enters the storage tank. When the piston slides inward, the one-way valve fixedly connected to the air inlet closes, and the one-way valve fixedly connected to the air outlet opens. At this time, nitrogen enters the drying nozzle through the pipeline and is sprayed out. Since the cleaning liquid has a high temperature when cleaning gallium oxide, and some components in the cleaning liquid will undergo oxidation-reduction reaction with metal impurities on the surface of gallium oxide, which is an exothermic reaction, the temperature in the shell is high, which can make the nitrogen sprayed from the drying nozzle heat up, which is helpful to dry the surface of gallium oxide after cleaning. At the same time, the cleaning brush can remove impurities on the surface of gallium oxide. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] The drawings in the specification that constitute a part of the present invention are used to provide further understanding of the present invention. The schematic embodiments of the present invention and their description are used to explain the present invention and do not constitute improper limitations on the present invention. In addition, the terms "installed", "set", "provided with", "connected", "connected", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be internally connected between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
[0031] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;
[0032] Figure 2 It is a schematic diagram of the overall three-dimensional structure of the present invention;
[0033] Figure 3 It is a schematic diagram of the overall three-dimensional structure of the driven component of the present invention;
[0034] Figure 4 It is a schematic diagram of the overall three-dimensional structure of the scrubbing assembly of the present invention;
[0035] Figure 5 It is a schematic diagram of the overall three-dimensional structure of the baffle of the present invention;
[0036] Figure 6 It is a schematic diagram of the overall three-dimensional structure of the driving assembly of the present invention;
[0037] Figure 7 It is a schematic diagram of the overall three-dimensional structure of the ratchet of the present invention;
[0038] Figure 8 It is a schematic diagram of the overall three-dimensional structure of the cleaning liquid spraying assembly of the present invention;
[0039] Fig. 9 It is a schematic diagram of the overall three-dimensional structure of the cleaning liquid spraying assembly of the present invention;
[0040] Fig.10 It is a schematic diagram of the overall three-dimensional structure of the drying component of the present invention;
[0041] In the accompanying drawings, the components represented by the reference numerals are listed as follows:
[0042] 1. De-impurity chamber assembly; 11. Cleaning liquid guide groove; 111. Cleaning liquid outlet; 12. Spring 2; 13. Liquid outlet shaft; 14. Flow blocking plug; 15. Hemispherical block; 16. Shell; 161. Feed inlet; 162. Liquid inlet; 163. Liquid outlet; 164. Exhaust port; 165. Limit block;
[0043] 2. Driving assembly; 21. Motor; 22. Bevel gear; 23. Driving shaft; 24. Synchronous wheel 1; 25. Driving gear; 26. Ratchet wheel 1;
[0044] 3. Cleaning liquid spraying assembly; 31. Infusion pump; 32. Transfer tube; 33. Infusion tube; 34. Synchronous wheel 2; 35. Synchronous belt; 36. Spray head; 37. Articulated block; 38. Connecting rod; 39. Liquid push block;
[0045] 4. Drying assembly; 41. Driven shaft; 42. Ratchet wheel 2; 43. Rotating rod 1; 44. Rotating rod 2; 45. Piston; 46. Storage tank; 461. Air inlet; 462. Air outlet; 47. One-way valve; 48. Pipeline; 49. Drying nozzle;
[0046] 5. Cleaning mechanism; 51. Driven assembly; 511. Connecting block; 512. Annular track; 513. Connecting rod; 514. Sliding shaft; 515. Gear ring; 52. Brush assembly; 521. Right-angle block; 5211. Bump; 522. T-bar; 523. Roller; 524. Screw rod; 525. Clamp; 526. Push-pull shaft; 527. Ball; 528. Spring 1; 529. Driven rod; 5291. Cleaning brush. DETAILED DESCRIPTION
[0047] In order to enable those skilled in the art to better understand the solution of the present application, the following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this application.
[0048] Reference Figure 1-4 As shown, a gallium oxide washing device for removing impurities is provided, comprising a de-impurity chamber component 1, a driving component 2 is fixedly connected to the bottom of the de-impurity chamber component 1, a cleaning liquid spraying component 3 and a drying component 4 are also fixedly connected to the bottom of the de-impurity chamber component 1, and a cleaning mechanism 5 is rotatably connected in the de-impurity chamber component 1; wherein
[0049] The cleaning mechanism 5 comprises:
[0050] A driven component 51 is fixedly installed in the impurity removal chamber component 1, and a plurality of brushing components 52 are rotatably connected to the driven component 51, and the plurality of brushing components 52 are arranged in a ring;
[0051] The driven component 51 includes:
[0052] A plurality of connecting blocks 511, one end of each of the connecting blocks 511 is fixedly connected to the annular track 512, the connecting blocks 511 are arranged in an annular shape, the other end of each of the connecting blocks 511 is fixedly connected to one end of a connecting rod 513, the connecting block 511 is fixedly connected to one end of a sliding shaft 514, the other end of each of the sliding shaft 514 is slidably connected to a gear ring 515, and one end of each of the brushing components 52 is fixedly connected to the gear ring 515; and
[0053] Several of the scrubbing components 52 include:
[0054] A right-angle block 521, one end of which is fixedly connected to the bottom of the gear ring 515, and the other end of which is rotatably connected to a T-shaped rod 522, one end of which is fixedly connected to a roller 523, and the roller 523 abuts against the bottom of the annular track 512, and the upper and lower ends of the other end of the T-shaped rod 522 are adapted to a screw rod 524 through threaded holes, and the screw rod 524 is rotatably connected to a clamping jaw 525, and one end of the clamping jaw 525 is slidably connected to a push-pull shaft 526. One end of the push-pull shaft 526 is fixedly connected to a sphere 527, the push-pull shaft 526 is fixedly connected to one end of a spring 528, the other end of the spring 528 is fixedly connected to the clamp 525, the two sides of the right-angle block 521 are fixedly connected to protrusions 5211, the other end of the push-pull shaft 526 is rotatably connected to one end of a driven rod 529, the other end of the driven rod 529 is rotatably connected to the upper end of a cleaning brush 5291 near the edge, and the cleaning brush 5291 is rotatably connected to the other end of the clamp 525.
[0055] When cleaning gallium oxide, the block of gallium oxide is placed between the two clamps 525, and the two clamps 525 clamp the gallium oxide by rotating the screw rod 524. The cleaning brush 5291 is attached to the surface of the gallium oxide, and the drive assembly 2 rotates in the positive direction, so that the gear ring 515 rotates, and then the roller 523 rolls on the annular track 512, so that the T-bar 522 rotates, and then the clamps 525 rotate, so that the gallium oxide clamped on the clamps 525 rotates. When the ball 527 rotates to the position of the protrusion 5211, , the push-pull shaft 526 is pushed out, and the spring 1 528 is stretched, so that the driven rod 529 rotatably connected to the other end of the push-pull shaft 526 pushes the cleaning brush 5291 to rotate on the clamp 525, thereby cleaning the surface of the gallium oxide. During the cleaning process, the cleaning liquid spraying component 3 sprays the cleaning liquid on the surface of the gallium oxide, and the cleaning liquid spraying component 3 rotates at the same time. When the driving component 2 rotates in the opposite direction, the gallium oxide rotates in the opposite direction, and the cleaning brush 5291 rotates at the same time. At this time, the drying component 4 works to dry the surface of the gallium oxide.
[0056] Reference Figure 5 and 9 As shown, the impurity removal chamber component 1 includes:
[0057] A cleaning liquid guide groove 11, wherein the cleaning liquid guide groove 11 is arranged directly below the gear ring 515, the other end of the connecting rod 513 is fixed to the outside of the cleaning liquid guide groove 11, a cleaning liquid outlet 111 is provided at the bottom of the cleaning liquid guide groove 11, the cleaning liquid outlet 111 is fixedly connected to one end of a spring 2 12, the other end of the spring 2 12 is fixedly connected to one end of a liquid outlet shaft 13, a flow blocking plug 14 is fixedly connected to the liquid outlet shaft 13, and a hemispherical block 15 is fixedly connected to the other end of the liquid outlet shaft 13; and
[0058] The cleaning liquid guide groove 11 is fixedly connected to the housing 16 . The cleaning liquid guide groove 11 is disposed in the housing 16 . A feed port 161 is disposed on the housing 16 .
[0059] A door that can be manually opened and closed is provided on the feed port 161. When the cleaning operation is performed, the door of the feed port 161 is closed. When cleaning is performed, the cleaning liquid spray assembly 3 rotates. During this process, the cleaning liquid spray assembly 3 pushes the waste liquid after cleaning to flow in the cleaning liquid guide groove 11. When the cleaning liquid spray assembly 3 rotates to the position of the hemispherical block 15, the hemispherical block 15 is pushed downward. At this time, the spring 12 is stretched, and the blocking plug 14 leaves the cleaning liquid outlet 111. At this time, the waste liquid flows out from the cleaning liquid outlet 111.
[0060] Reference Figure 6-7 As shown, the driving assembly 2 includes:
[0061] The motor 21 is fixed at the bottom of the housing 16, and a bevel gear 22 is fixedly connected to the output end of the motor 21. A driving shaft 23 is rotatably connected to the outer side of the cleaning liquid guide groove 11, and a bevel gear 22 is fixedly connected to the lower end of the driving shaft 23. The two bevel gears 22 are meshed. A synchronous wheel 24 is fixedly connected to the driving shaft 23, and the synchronous wheel 24 is located below the cleaning liquid guide groove 11. A driving gear 25 is also fixedly connected to the driving shaft 23, and the driving gear 25 is located above the cleaning liquid guide groove 11. The driving gear 25 meshes with the gear ring 515, and a ratchet 26 is fixedly connected to the upper end of the driving shaft 23.
[0062] The motor 21 is started to rotate the bevel gear 22 fixedly connected thereto. The meshing action of the two bevel gears 22 drives the driving shaft 23, the driving gear 25, the synchronous wheel 1 24 and the ratchet wheel 1 26 to rotate. The meshing action of the synchronous wheel 1 24 and the gear ring 515 drives the gear ring 515 to rotate.
[0063] Reference Figure 8 As shown, the cleaning liquid spraying assembly 3 includes:
[0064] An infusion pump 31 is fixedly connected to the bottom of the shell 16, a liquid outlet end of the infusion pump 31 is fixedly connected to one end of a transfer tube 32, the other end of the transfer tube 32 is rotatably connected to one end of an infusion tube 33, a synchronous wheel 2 34 is also fixedly connected to the infusion tube 33, the synchronous wheel 2 34 and the synchronous wheel 1 24 are driven by a synchronous belt 35, the infusion tube 33 is rotatably connected to the cleaning liquid guide groove 11, the other end of the infusion tube 33 is fixedly connected to a nozzle 36, a hinge block 37 is fixedly connected to the infusion tube 33, the hinge block 37 is fixedly connected to one end of a connecting rod 38, the other end of the connecting rod 38 is fixedly connected to a liquid push block 39.
[0065] Since the synchronous wheel 1 24 and the synchronous wheel 2 34 are driven by the synchronous belt 35, when the synchronous wheel 1 24 rotates, the synchronous wheel 2 34 is driven to rotate, thereby causing the infusion tube 33 to rotate. The rotation of the infusion tube 33 drives the hinge block 37, the connecting rod 38 and the liquid pushing block 39 to rotate. The liquid pushing block 39 pushes the waste liquid to flow in the cleaning liquid guide groove 11, and the infusion tube 33 drives the nozzle 36 to rotate when it rotates.
[0066] A liquid inlet 162 and a liquid outlet 163 are provided on one side of the shell 16. The liquid inlet end of the infusion pump 31 is fixedly connected to one end of the hose. The hose passes through the liquid inlet 162. The liquid outlet 163 and the cleaning liquid outlet 111 are fixedly connected to the two ends of the hose respectively. An exhaust port 164 is provided at the upper end of the shell 16.
[0067] The cleaning liquid, through the action of the infusion pump 31, enters the nozzle 36 from the hose passing through the liquid inlet 162 and is then sprayed out. The cleaned liquid enters the hose from the cleaning liquid outlet 111 and then flows out from the liquid outlet 163. The gas generated by cleaning can be discharged through the exhaust port 164 and collected.
[0068] Reference Fig.10 As shown, a limit block 165 is fixedly connected inside the housing 16; and
[0069] The drying component 4 includes:
[0070] A driven shaft 41 is rotatably connected to a limit block 165, a ratchet wheel 2 42 is fixedly connected to the lower end of the driven shaft 41, and the ratchet wheel 2 42 is adapted to the ratchet wheel 1 26. The upper end of the driven shaft 41 is fixedly connected to one end of a rotating rod 1 43, and the other end of the rotating rod 1 43 is rotatably connected to one end of a rotating rod 2 44. The other end of the rotating rod 2 44 is rotatably connected to a piston 45, and the piston 45 is slidably connected to a storage tank 46. An air inlet 461 and an air outlet 462 are provided on the storage tank 46, and both the air inlet 461 and the air outlet 462 are fixedly connected to a one-way valve 47, and the air outlet 462 is fixedly connected to a drying nozzle 49 through a pipe 48.
[0071] When the motor 21 rotates in the reverse direction, the ratchet 26 and the ratchet 2 42 are adapted to each other, so that the ratchet 26 drives the ratchet 2 42 to rotate, thereby driving the driven shaft 41 and the rotating rod 1 43 to rotate. The two ends of the rotating rod 2 44 are respectively connected to the rotating rod 1 43 and the piston 45, so that the rotating rod 1 43 drives the piston 45 to slide in the storage tank 46 when rotating. When the piston 45 slides outward, the one-way valve 47 fixedly connected to the air inlet 461 opens, and the one-way valve 47 fixedly connected to the air outlet 462 closes. At this time, Nitrogen enters the storage tank 46. When the piston 45 slides inward, the one-way valve 47 fixedly connected to the air inlet 461 is closed, and the one-way valve 47 fixedly connected to the air outlet 462 is opened. At this time, the nitrogen enters the drying nozzle 49 through the pipe 48 and is sprayed out. Since the cleaning liquid has a high temperature when cleaning gallium oxide, and some components in the cleaning liquid will undergo redox reaction with metal impurities on the surface of gallium oxide, which is an exothermic reaction, the temperature inside the shell 16 is relatively high, which can increase the temperature of the nitrogen sprayed from the drying nozzle 36.
[0072] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, unless otherwise specified and limited, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, or it can be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
[0073] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A gallium oxide washing device for removing impurities, characterized in that: The invention comprises a de-impurity chamber component (1), wherein a driving component (2) is fixedly connected to the bottom of the de-impurity chamber component (1), a cleaning liquid spraying component (3) and a drying component (4) are also fixedly connected to the bottom of the de-impurity chamber component (1), and a cleaning mechanism (5) is rotatably connected inside the de-impurity chamber component (1); wherein The cleaning mechanism (5) comprises: A driven component (51), the driven component (51) is fixedly installed in the impurity removal chamber component (1), and a plurality of brushing components (52) are rotatably connected to the driven component (51), and the plurality of brushing components (52) are arranged in a ring; wherein The driven component (51) comprises: A plurality of connecting blocks (511), one end of each of the connecting blocks (511) is fixedly connected to the annular track (512), the connecting blocks (511) are arranged in an annular shape, the other end of each of the connecting blocks (511) is fixedly connected to one end of a connecting rod (513), the connecting block (511) is fixedly connected to one end of a sliding shaft (514), the other end of each of the sliding shaft (514) is slidably connected to a gear ring (515), and one end of each of the brushing components (52) is fixedly connected to the gear ring (515); and Several of the scrubbing components (52) include: A right-angle block (521), one end of which is fixedly connected to the bottom of the gear ring (515), the other end of which is rotatably connected to a T-shaped rod (522), one end of which is fixedly connected to a roller (523), which abuts against the bottom of the annular track (512), the upper and lower ends of the other end of the T-shaped rod (522) are adapted to a screw rod (524) through threaded holes, the screw rod (524) is rotatably connected to a clamp (525), and one end of the clamp (525) is slidably connected to a push-pull shaft (526), One end of the push-pull shaft (526) is fixedly connected to a sphere (527), the push-pull shaft (526) is fixedly connected to one end of a spring (528), the other end of the spring (528) is fixedly connected to a clamp (525), both sides of the right-angle block (521) are fixedly connected to protrusions (5211), the other end of the push-pull shaft (526) is rotatably connected to one end of a driven rod (529), the other end of the driven rod (529) is rotatably connected to the upper end of a cleaning brush (5291) near the edge, and the cleaning brush (5291) is rotatably connected to the other end of the clamp (525).
2. A gallium oxide washing device for removing impurities according to claim 1, characterized in that: The impurity removal chamber component (1) comprises: a cleaning liquid guide groove (11), the cleaning liquid guide groove (11) being arranged directly below the gear ring (515), the other end of the connecting rod (513) being fixed to the outside of the cleaning liquid guide groove (11), the bottom of the cleaning liquid guide groove (11) being provided with a cleaning liquid outlet (111), the cleaning liquid outlet (111) being fixedly connected to one end of a second spring (12), the other end of the second spring (12) being fixedly connected to one end of a liquid outlet shaft (13), a flow blocking plug (14) being fixedly connected to the liquid outlet shaft (13), and the other end of the liquid outlet shaft (13) being fixedly connected to a hemispherical block (15); and The cleaning liquid guide groove (11) is fixedly connected to the housing (16); the cleaning liquid guide groove (11) is arranged in the housing (16); and a feed port (161) is provided on the housing (16).
3. A gallium oxide washing device for removing impurities according to claim 2, characterized in that: The driving component (2) comprises: A motor (21) is fixed at the bottom of a housing (16); a bevel gear (22) is fixedly connected to the output end of the motor (21); a driving shaft (23) is rotatably connected to the outer side of the cleaning liquid guide groove (11); a bevel gear (22) is fixedly connected to the lower end of the driving shaft (23); two bevel gears (22) are meshed; a synchronous wheel (24) is fixedly connected to the driving shaft (23); the synchronous wheel (24) is located below the cleaning liquid guide groove (11); a driving gear (25) is also fixedly connected to the driving shaft (23); the driving gear (25) is located above the cleaning liquid guide groove (11); the driving gear (25) is meshed with a gear ring (515); and a ratchet wheel (26) is fixedly connected to the upper end of the driving shaft (23).
4. A gallium oxide washing device for removing impurities according to claim 3, characterized in that: The cleaning liquid spraying assembly (3) comprises: An infusion pump (31) is fixedly connected to the bottom of a housing (16); a liquid outlet end of the infusion pump (31) is fixedly connected to one end of a transfer tube (32); the other end of the transfer tube (32) is rotatably connected to one end of an infusion tube (33); a second synchronous wheel (34) is fixedly connected to the infusion tube (33); the second synchronous wheel (34) and the first synchronous wheel (24) are driven by a synchronous belt (35); the infusion tube (33) is rotatably connected to a cleaning liquid guide groove (11); the other end of the infusion tube (33) is fixedly connected to a nozzle (36); a hinge block (37) is fixedly connected to the infusion tube (33); the hinge block (37) is fixedly connected to one end of a connecting rod (38); the other end of the connecting rod (38) is fixedly connected to a liquid push block (39).
5. A gallium oxide washing device for removing impurities according to claim 4, characterized in that: A liquid inlet (162) and a liquid outlet (163) are provided on one side of the housing (16); the liquid inlet end of the infusion pump (31) is fixedly connected to one end of a hose, the hose passes through the liquid inlet (162), the liquid outlet (163) and the cleaning liquid outlet (111) are fixedly connected to the two ends of the hose respectively, and an exhaust port (164) is provided at the upper end of the housing (16).
6. A gallium oxide washing device for removing impurities according to claim 5, characterized in that: A limit block (165) is fixedly connected inside the housing (16); and The drying component (4) comprises: A driven shaft (41), the driven shaft (41) is rotatably connected to a limit block (165), the lower end of the driven shaft (41) is fixedly connected to a ratchet wheel 2 (42), the ratchet wheel 2 (42) is adapted to a ratchet wheel 1 (26), the upper end of the driven shaft (41) is fixedly connected to one end of a rotating rod 1 (43), the other end of the rotating rod 1 (43) is rotatably connected to one end of a rotating rod 2 (44), the other end of the rotating rod 2 (44) is rotatably connected to a piston (45), the piston (45) is slidably connected to a storage tank (46), an air inlet (461) and an air outlet (462) are provided on the storage tank (46), the air inlet (461) and the air outlet (462) are both fixedly connected to a one-way valve (47), and the air outlet (462) is fixedly connected to a drying nozzle (49) through a pipeline (48).
Citation Information
Patent Citations
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