Detachable block sample tray for atomic layer deposition equipment

Abstract

The invention relates to a detachable block sample tray for atomic layer deposition equipment, and the detachable block sample tray comprises a bearing part which is used for at least partially bearing a sample; the bearing part is at least partially supported on the sample table; the hollow part is used for enabling at least part of the sample to be in contact with the sample table; the hollow part is arranged on the bearing part; the positioning part is used for being matched with the sample table for positioning; and the positioning part is arranged on the bearing part. Compared with a single-layer tray in the prior art, a sample can be directly placed on the inner cavity through the hollowed-out structure, heat transfer between the sample and the inner cavity can be more direct, and secondary transfer through the tray is not needed; according to the detachable block sample tray for the atomic layer deposition equipment, provided by the invention, only the position of a sample is limited, and the distribution of precursor airflow is not influenced. The non-uniformity of the process sample is greatly improved, and the method is suitable for a large batch of small-size and small-area samples with the same specification.

Description

Technical Field

[0001] The invention relates to the technical field of atomic layer deposition, and in particular to a detachable blocking sample tray for atomic layer deposition equipment. Background Art

[0002] ALD (Atomic Layer Deposition) is a method to precisely control the thickness and composition of thin films at the micro-nano scale. The temperature has an important influence on the deposition process and film performance. During the atomic layer deposition process, the chemical reaction of a new layer of atomic film is directly related to the previous layer. This method allows only one layer of atoms to be deposited per reaction, so it is also called single atomic layer deposition.

[0003] Atomic layer deposition is the continuous introduction of at least two gas-phase precursor species onto a substrate in a heated reactor. The chemical adsorption process terminates automatically when the surface is saturated, but inappropriate process temperature hinders the physical adsorption of molecules on the surface.

[0004] When placing the sample on the sample stage, if the position of the sample is not restricted, the sample is likely to move after the chamber is closed and the vacuum pump evacuates the inner chamber to a vacuum, thus affecting the reaction effect. Summary of the invention

[0005] In view of this, the present invention provides a detachable blocking sample tray for an atomic layer deposition device.

[0006] Specifically, the present invention is achieved through the following technical solutions:

[0007] According to a first aspect of the present invention, there is provided a detachable blocking sample tray for an atomic layer deposition device, comprising:

[0008] A carrying portion, used to at least partially carry the sample; the carrying portion is at least partially supported on the sample stage;

[0009] A hollow portion, used to make at least part of the sample contact the sample stage; the hollow portion is arranged on the carrying portion;

[0010] The positioning part is used for matching and positioning with the sample stage; the positioning part is arranged on the carrying part.

[0011] Optionally, the bearing portion includes: a bearing frame, the bearing frame is at least partially supported on the sample stage, and the hollow portion and the positioning portion are arranged on the bearing frame.

[0012] Optionally, the hollow portion includes: a through hole, the through hole is arranged on the supporting frame, and the positioning portion is arranged on the supporting frame.

[0013] Optionally, the support frame comprises: a surrounding frame, the surrounding frame forms an installation space in a middle area thereof, the hollow portion is at least partially arranged in the installation space, and the positioning portion is arranged on the surrounding frame.

[0014] Optionally, the support frame further includes: a first support rod, two ends of which are respectively connected to two opposite sides of the surrounding frame.

[0015] Optionally, the supporting frame also includes: a second support rod, the two ends of the second support rod are respectively connected to two opposite sides of the frame, the second support rod is perpendicular to the first support rod, the second support rod is supported on the first support rod, and the first support rod, the second support rod and the frame are jointly arranged to form the through hole.

[0016] Optionally, the cross-section of the surrounding frame is triangular.

[0017] Optionally, the cross-section of the first support rod is triangular.

[0018] Optionally, the cross-section of the second support rod is triangular.

[0019] Optionally, the positioning portion protrudes outward from a bottom wall surface of the surrounding frame.

[0020] The technical solution provided by the present invention brings at least the following beneficial effects:

[0021] Compared with the single-layer tray in the prior art, the detachable blocking sample tray for atomic layer deposition equipment provided by the present application has a hollow setting structure that can place the sample directly on the inner cavity, which can make the heat transfer between the sample and the inner cavity more direct without the need for secondary transfer through the tray; the detachable blocking sample tray for atomic layer deposition equipment provided by the present application only limits the position of the sample without affecting the distribution of the precursor gas flow. It has greatly improved the non-uniformity of process samples and is suitable for large quantities of small-volume and small-area samples of the same specifications; the edges of the source inlet and source outlet sides are also processed into a sloped structure, and the metal strips are processed into a sloped triangular columnar structure, which is convenient for taking and placing samples and is conducive to the diffusion of the source. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0024] Figure 1 A top view of a detachable blocking sample tray for an atomic layer deposition device provided in an embodiment of the present invention;

[0025] Figure 2 A bottom view of a detachable blocking sample tray for an atomic layer deposition device provided in an embodiment of the present invention;

[0026] Figure 3 A front view of a detachable blocking sample tray for an atomic layer deposition device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] Figure 1 A detachable blocking sample tray for an atomic layer deposition device applicable to an embodiment of the present invention is schematically shown.

[0029] Reference Figure 1-3 As shown, the present application provides a detachable blocking sample tray for an atomic layer deposition device, comprising:

[0030] The carrying portion 10 is used to at least partially carry the sample; the carrying portion 10 is at least partially supported on the sample stage;

[0031] A hollow portion 20 is used to make at least part of the sample contact the sample stage; the hollow portion 20 is disposed on the carrying portion 10;

[0032] The positioning portion 30 is used for adapting and positioning with the sample stage; the positioning portion 30 is disposed on the carrying portion 10 .

[0033] In the embodiment of the present application, the carrier 10 is supported on the sample stage, the sample is supported on the carrier 10, and at least a portion of the sample is in direct contact with the sample stage through the hollow portion 20, so that it can directly receive the heat of the sample stage. The positioning portion 30 is adapted to the positioning structure on the sample stage, so that the carrier 10 is installed on the sample stage. This detachable blocking sample tray designed for atomic layer deposition (ALD) equipment is designed to optimize the heat transfer efficiency between the sample and the sample stage, and improve the distribution of the precursor gas flow on the sample, thereby improving the uniformity of the process sample, and is particularly suitable for processing a large number of small-volume and small-area samples of the same specifications.

[0034] The support part is responsible for at least partially supporting the sample to ensure the stability of the sample during the deposition process. The support part is designed to be able to firmly support on the sample stage and provide a reliable support surface for the sample.

[0035] Hollowed out part: This is one of the key innovations of the present invention. By providing a hollowed out part on the bearing part, the sample can be directly placed on the inner cavity formed by these hollowed out parts. The advantage of this is that the heat transfer between the sample and the sample stage (usually the heating stage) becomes more direct and efficient, without the need for secondary transfer through the tray material, thereby improving the efficiency and uniformity of heat transfer.

[0036] Positioning part: This part is designed to fit and position with the sample stage to ensure that the tray can be accurately and stably mounted on the sample stage to prevent movement or misalignment during the deposition process, which would affect the deposition effect.

[0037] Technical advantages:

[0038] Improved heat transfer efficiency: The hollow design allows the sample to directly contact the heating table, reducing the heat transfer path and resistance, and improving the efficiency and uniformity of heat transfer, which is crucial for the ALD process that requires precise temperature control. Optimized airflow distribution: Traditional single-layer trays may hinder the uniform distribution of precursor airflow on the sample surface, while the detachable block design of the present invention only limits the position of the sample and does not affect the free flow of the precursor airflow, thereby helping to achieve a more uniform deposition effect. Wide applicability: This tray is particularly suitable for processing a large number of small-volume and small-area samples of the same specifications, such as microelectronic devices, sensor elements, etc., which can effectively improve production efficiency and product quality.

[0039] In summary, the detachable blocking sample tray for atomic layer deposition equipment proposed in the present invention effectively solves the problems of low heat transfer efficiency and uneven airflow distribution in the prior art through innovative hollow design and precise positioning mechanism, and provides an efficient and reliable solution for batch processing of small-volume and small-area samples. This innovation not only improves the uniformity and efficiency of the ALD process, but also brings significant technological progress to the production and manufacturing of microelectronics, sensors and other fields.

[0040] Exemplarily, the carrying portion 10 includes: a carrying frame 11 , the carrying frame 11 is at least partially supported on the sample stage, and the hollow portion 20 and the positioning portion 30 are disposed on the carrying frame 11 .

[0041] In the embodiment of the present application, the carrying portion 10 includes at least one carrying rack 11 , at least part of the sample is carried on the carrying rack 11 , and the carrying rack 11 is supported on the sample stage.

[0042] Exemplarily, the hollow portion 20 includes: a through hole 21 , the through hole 21 is disposed on the supporting frame 11 , and the positioning portion 30 is disposed on the supporting frame 11 .

[0043] In the embodiment of the present application, a through hole 21 is formed on the carrier 11 , and the sample directly contacts the sample stage through the through hole 21 to receive heat from the sample stage.

[0044] Exemplarily, the support frame 11 includes: a surrounding frame 12 , wherein the surrounding frame 12 forms an installation space in a middle area thereof, the hollow portion 20 is at least partially disposed in the installation space, and the positioning portion 30 is disposed on the surrounding frame 12 .

[0045] In the embodiment of the present application, the frame 12 is square, and the middle area of ​​the frame 12 forms an installation space. The positioning portion 30 is arranged on the frame 12 and is installed in an adaptable manner with the positioning structure on the sample stage.

[0046] Exemplarily, the supporting frame 11 also includes: a first support rod 13 and a second support rod 14, the two ends of the first support rod 13 are respectively connected to the two opposite sides of the frame 12, the two ends of the second support rod 14 are respectively connected to the two opposite sides of the frame 12, the second support rod 14 is perpendicular to the first support rod 13, the second support rod 14 is supported on the first support rod 13, and the first support rod 13, the second support rod 14 and the frame 12 are jointly arranged to form the through hole 21.

[0047] In the embodiment of the present application, the two ends of the first support rod 13 and the second support rod 14 are respectively connected to the two sides of the opposite support frame 11, and the first support rod 13 and the second support rod 14 are perpendicular to each other. The first support rod 13, the second support rod 14 and the surrounding frame 12 are jointly formed to form a through hole 21, and the sample is directly in contact with the sample stage through the through hole 21 to receive heat from the sample stage.

[0048] Exemplarily, the cross section of the surrounding frame 12 is triangular.

[0049] In the embodiment of the present application, the cross-section of the frame 12 is triangular, so that the structure of the frame 12 has a certain slope, which is convenient for supporting the sample.

[0050] Exemplarily, the cross section of the first support rod 13 is triangular.

[0051] In the embodiment of the present application, the cross section of the first support rod 13 is triangular, so that the structure of the first support rod 13 has a certain slope, which is convenient for supporting the sample.

[0052] Exemplarily, the cross section of the second support rod 14 is triangular.

[0053] In the embodiment of the present application, the cross section of the second support rod 14 is triangular, so that the structure of the second support rod 14 has a certain slope, which is convenient for supporting the sample.

[0054] Exemplarily, the positioning portion 30 protrudes outward from the bottom wall surface of the surrounding frame 12 .

[0055] In the embodiment of the present application, the positioning portion 30 protrudes from the bottom wall surface of the surrounding frame 12 and is inserted into the positioning groove of the sample stage to prevent the entire detachable blocking sample tray from being misoriented.

[0056] The present application provides a detachable blocking sample tray for atomic layer deposition equipment, which is suitable for single-layer sample process and adopts a matching lower inner cavity. The lower inner cavity has a groove, which fits with the positioning part 30 at the bottom of the tray where the sample is placed. The tray is provided with a hollow structure, which only limits the position of the sample without affecting the heat conduction between the sample table and the sample. The present application provides a detachable blocking sample tray for atomic layer deposition equipment, which uses metal stainless steel material, and the overall frame is square. The middle is divided into nine grids horizontally and vertically by metal bars. The metal bars are processed into a triangular columnar structure with a slope, which is convenient for taking and placing samples and is conducive to the diffusion of the source. The edges of the source inlet and source outlet sides of the surrounding frame 12 are also processed into a triangular structure with a slope.

[0057] The present application provides a detachable blocking sample tray for an atomic layer deposition device, in which the sample is placed in a hollow area and in direct contact with the bottom of the cavity, resulting in more precise temperature control, which is beneficial to improving the uniformity of sample temperature and the uniformity of film thickness deposited on the sample surface; the material is stainless steel, which is resistant to high temperatures and not easy to deform, and has high hardness and is not easy to deform.

[0058] Compared with the single-layer tray in the prior art, the detachable blocking sample tray for atomic layer deposition equipment provided by the present application has a hollow setting structure that can place the sample directly on the inner cavity, which can make the heat transfer between the sample and the inner cavity more direct without the need for secondary transfer through the tray; the detachable blocking sample tray for atomic layer deposition equipment provided by the present application only limits the position of the sample without affecting the distribution of the precursor gas flow. It has greatly improved the non-uniformity of process samples and is suitable for large quantities of small-volume and small-area samples of the same specifications; the edges of the source inlet and source outlet sides are also processed into a sloped structure, and the metal strips are processed into a sloped triangular columnar structure, which is convenient for taking and placing samples and is conducive to the diffusion of the source.

[0059] The detachable blocking sample tray for atomic layer deposition equipment proposed in the present invention has a specific structure of the carrying part 10 as described below, aiming to provide a stable and efficient sample carrying and heat transfer solution.

[0060] Carrying part 10

[0061] The support frame 11 is the main structure of the entire tray, which is at least partially supported on the sample stage. The design of the support frame 11 needs to ensure sufficient strength and stability to support the weight of the sample during the deposition process and possible thermal stress.

[0062] Hollow part 20

[0063] Through holes 21: Through holes 21 are the main form of the hollow portion 20, which are directly disposed on the carrier 11, in particular, in the mounting space of the carrier 11. These through holes 21 allow the sample to directly contact the sample stage, thereby ensuring efficient heat transfer. The number, size and distribution of the through holes 21 should be optimized according to the size and shape of the sample to ensure the best heat transfer effect and sample stability.

[0064] Positioning unit 30

[0065] Positioning mechanism: The positioning part 30 is arranged on the carrier 11, especially on the surrounding frame 12, to ensure that the tray can be accurately and stably mounted on the sample stage. The design of the positioning part 30 should match the positioning structure on the sample stage, such as positioning grooves, positioning holes, etc., to prevent the tray from moving or misaligning during the deposition process.

[0066] Detailed structure of the carrier 11

[0067] Frame 12: Frame 12 is the main supporting structure of the carrier 11. It is square, and the middle area forms an installation space for placing samples. The cross section of frame 12 is triangular. This design not only increases the stability of the structure, but also makes frame 12 have a certain slope, which is convenient for supporting samples.

[0068] The first support rod 13 and the second support rod 14: The first support rod 13 and the second support rod 14 are respectively connected to the two opposite sides of the surrounding frame 12, and the second support rod 14 is perpendicular to the first support rod 13. The first support rod 13, the second support rod 14 and the surrounding frame 12 are together formed to form a through hole 21. This design not only ensures the stability of the through hole 21, but also provides additional support to prevent the sample from being deformed or damaged during the deposition process. The cross-sections of the first support rod 13 and the second support rod 14 are also triangular to increase the stability and support force of the structure.

[0069] Protruding design of the positioning portion 30: The positioning portion 30 protrudes outward from the bottom wall surface of the frame 12. This design enables the positioning portion 30 to be firmly inserted into the positioning groove of the sample stage, thereby preventing the entire tray from being misoriented and ensuring the accuracy and consistency of the deposition process.

[0070] In summary, the detachable blocking sample tray proposed in the present invention realizes direct heat transfer between the sample and the sample stage, optimizes the distribution of the precursor gas flow on the sample, and provides stable and efficient sample support through the innovative design of the bearing part 10, the hollow part 20 and the positioning part 30. This design is particularly suitable for processing a large number of small-volume and small-area samples of the same specifications, such as microelectronic devices, sensor elements, etc., and can significantly improve production efficiency and product quality.

[0071] It should be noted that, in the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0072] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0073] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0074] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0075] The foregoing is merely a specific embodiment of the present invention, which enables those skilled in the art to understand or implement the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A detachable blocking sample tray for an atomic layer deposition device, characterized in that: include: A carrying portion, used to at least partially carry the sample; The bearing portion is at least partially supported on the sample stage; a hollow portion, used to make at least a portion of the sample contact the sample stage; The hollow portion is disposed on the bearing portion; The positioning part is used for matching and positioning with the sample stage; the positioning part is arranged on the carrying part.

2. The detachable blocking sample tray for atomic layer deposition equipment according to claim 1, characterized in that: The bearing part comprises: a bearing frame, the bearing frame is at least partially supported on the sample stage, and the hollow part and the positioning part are arranged on the bearing frame.

3. The detachable blocking sample tray for atomic layer deposition equipment according to claim 2, characterized in that: The hollow portion includes: a through hole, the through hole is arranged on the supporting frame, and the positioning portion is arranged on the supporting frame.

4. The detachable blocking sample tray for atomic layer deposition equipment according to claim 3, characterized in that: The support frame comprises: a surrounding frame, wherein the surrounding frame forms an installation space in a middle area thereof, the hollow portion is at least partially disposed in the installation space, and the positioning portion is disposed on the surrounding frame.

5. The detachable blocking sample tray for atomic layer deposition equipment according to claim 4, characterized in that: The support frame further includes: a first support rod, two ends of which are respectively connected to two opposite sides of the surrounding frame.

6. The detachable blocking sample tray for atomic layer deposition equipment according to claim 5, characterized in that: The supporting frame also includes: a second support rod, the two ends of the second support rod are respectively connected to the two opposite sides of the frame, the second support rod is perpendicular to the first support rod, the second support rod is supported on the first support rod, and the first support rod, the second support rod and the frame are jointly arranged to form the through hole.

7. The detachable blocking sample tray for atomic layer deposition equipment according to claim 4, characterized in that: The cross section of the surrounding frame is triangular.

8. The detachable blocking sample tray for atomic layer deposition equipment according to claim 5, characterized in that: The cross section of the first support rod is triangular.

9. The detachable blocking sample tray for atomic layer deposition equipment according to claim 6, characterized in that: The cross section of the second support rod is triangular.

10. The detachable blocking sample tray for atomic layer deposition equipment according to claim 4, characterized in that: The positioning portion protrudes outward from the bottom wall surface of the surrounding frame.

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