Gas-guide tube renovating method and gas-guide tube renovating equipment

Abstract

A gas-guide tube renovation method comprises the following steps that S1, a gas-guide tube is cut into a plurality of sections of tube bodies, then the inner wall renovation procedure and the outer wall renovation procedure are conducted on the tube bodies, and the inner wall renovation procedure S11 comprises the steps that an inner hole of each tube body is renovated through a reaming tool, and meanwhile cooling liquid is continuously injected from the tail end of the inner hole of each tube body; in the outer wall renovating procedure S12, the pipe body is driven to rotate around the axis of the pipe body and is moved in the axial direction, so that the peripheral wall of the pipe body from the head end to the tail end is ground and renovated by a grinding wheel; s2, the pipe body subjected to the inner wall renovating procedure and the outer wall renovating procedure is degreased and cleaned through a cleaning solution; and S3, the cleaned pipe body is re-spliced or welded to be recovered into the gas-guide pipe. According to the renovating method of the scheme, a large amount of processing time can be saved, the processing cost is reduced, new materials do not need to be input again, the material cost is saved, and therefore the use cost of a client side is effectively reduced. The invention further provides gas-guide tube renovation equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of airway refurbishment, and in particular to an airway refurbishment method and an airway refurbishment device. Background Art

[0002] The chemical vapor deposition process requires the use of quartz or silicon gas pipes to introduce process gases into the deposition chamber. When the gas pipe is transporting gas, some of the reaction gas will form a thin film inside and outside the pipe, and the thickness of the film is unevenly distributed along the length of the pipe, which leads to a continuous reduction in the inner hole of the gas pipe and insufficient gas flow.

[0003] Taking into account the semiconductor chip manufacturing process, there are high requirements for the quality and dimensional accuracy of the inner hole wall of the air duct. Air ducts that do not meet the requirements can only be scrapped and replaced. This leads to a large consumption of tube components used in semiconductor manufacturing and a high product cost, resulting in a high cost of use.

[0004] The existing conventional refurbishment method is to expand the hole through a deep hole drilling device with water outlet from the center. This method has two disadvantages. First, when the hollow drilling tool is long, the tool rigidity is poor. When it is mechanically squeezed and pushed, it will bend, causing the drilling direction to shift. Second, because the refurbished product itself is a hollow tube body, the coolant cannot effectively stay in the tube during drilling, resulting in poor drilling effect. The thinner tube body is easily broken under vibration.

[0005] Another background technology is to use quicksand polishing and grinding on the inside of the hole of the air guide tube and sandblasting on the outside of the hole, but these methods can only be used when the thickness of the deposits inside and outside the tube is uniform, because quicksand polishing and sandblasting are both non-selective equivalent elimination, and therefore the dimensional accuracy of the inner and outer diameters of the tube body cannot be guaranteed again. Summary of the invention

[0006] The purpose of the present invention is to solve the problem in the prior art that as the use time of the air duct increases, thin film deposition will occur on the inner and outer walls of the tube, resulting in unstable gas flow through the air duct and affecting the manufacture of semiconductor chips.

[0007] In order to solve the above problems, the present invention provides an airway refurbishment method, comprising the following steps: S1. Cut the airway into several sections, and then perform inner wall renovation and outer wall renovation on the sections. The inner wall renovation process S11 is as follows: a hole-expanding tool driven to rotate by a driving machine head is configured, the outer diameter of the hole-expanding tool is selected according to the diameter of the inner hole of the pipe body, and then the head end of the inner hole of the pipe body is sent to the hole-expanding tool in a coaxial manner, so that the hole-expanding tool expands the inner hole of the pipe body, and at the same time, coolant is continuously injected from the tail end of the inner hole of the pipe body, and after the hole-expanding tool completes the renovation of the inner hole of the pipe body, the pipe body is moved away from the hole-expanding tool; The outer wall renovation step S12 is: arranging a grinding wheel driven by a grinding motor to rotate, bringing the outer peripheral wall of the head end of the tube body into contact with the outer peripheral side of the grinding wheel and ensuring that the axis of the tube body and the grinding wheel are parallel, and then driving the tube body to rotate around its own axis while moving the tube body axially, so that the outer peripheral wall of the tube body from the head end to the tail end is all ground and renovated by the grinding wheel; S2. The tube body that has completed the inner wall renovation process and the outer wall renovation process is degreased and cleaned by a cleaning fluid; S3. Re-join or re-weld the cleaned tube body to restore it to the air guide tube.

[0008] The above scheme first cuts the air guide tube into a tube body of suitable length, so that the inner wall renovation process and the outer wall renovation process can be conveniently carried out. The inner wall renovation process uses a reaming tool to expand the hole from the head end to the tail end of the inner hole of the tube body, and at the same time, continuously injects coolant from the tail end of the inner hole of the tube body so that the coolant flows in the opposite direction of the expanding direction of the reaming tool, thereby achieving better cooling and chip removal, thereby realizing the renovation of the inner wall of the tube body; and in the outer wall renovation process, the tube body is driven to rotate around its own axis while moving the tube body axially, so that the outer peripheral wall of the tube body from the head end to the tail end is ground and refurbished by the grinding wheel, ensuring that the outer wall of the tube body can form a good roundness after being ground by the grinding wheel, thereby realizing the renovation of the outer wall of the tube body; then, the tube body is degreased and cleaned with a cleaning liquid, and the cleaned tube body is re-spliced ​​or welded to be restored to an air guide tube, thereby realizing the renovation of the air guide tube and restoring the service life of the air guide tube. Compared with remanufacturing new pipes for replacement, the refurbishment method of the above scheme can save a lot of processing time and reduce processing costs, and does not require the re-investment of new materials, saving material costs, thereby effectively reducing the client's cost of use.

[0009] Preferably, in step S11, the reaming tool is a solid structure, and the tool head of the reaming tool is a conical silicon carbide grinding head. The reaming tool with a solid structure can ensure better rigidity and improve the concentricity during reaming operations on the pipe body, while the silicon carbide grinding head is not easy to cause damage to the pipe body.

[0010] Preferably, in step S11, the tube body is clamped by a tube transferring clamp, which is driven by a linear drive to move in a direction close to or away from the reaming tool, and the linear drive gradually moves the tube transferring clamp holding the tube body toward the reaming tool for reaming in a feeding manner corresponding to pecking drilling, thereby ensuring the stability of the tube body through the tube transferring platform, and adjusting the feed amount of the tube body during the reaming process through the linear drive.

[0011] Preferably, the linear drive component uses a feeding method corresponding to pecking drilling as follows: each time it drives the tube moving clamp forward 0.05mm and backward 0.02mm, and repeats this process until the reaming tool moves from the head end of the inner hole of the tube body to the tail end, thereby ensuring that the reaming tool will not damage the inner hole of the tube body and the reaming effect is stable.

[0012] Preferably, in step S2, the tube body is first immersed in a KOH solution with a temperature of 50°C and a concentration of 5% for 20 minutes, and then immersed in a HCl solution with a temperature of 30°C and a concentration of 10% for 30 minutes, so as to achieve degreasing cleaning.

[0013] The present invention also provides an airway refurbishment device, comprising an inner wall refurbishment device and an outer wall refurbishment device; The inner wall renovation device comprises an inner wall renovation platform, a driving machine head, a reaming tool and a pipe transfer clamping platform, wherein the driving machine head is fixed to the front of the inner wall renovation platform, the pipe transfer clamping platform is located at the rear of the inner wall renovation platform and is used to clamp the pipe body, a liquid supply pipe is provided at the rear of the pipe transfer clamping platform, the inner wall renovation platform is provided with a linear driving member for driving the pipe transfer clamping platform to move in the front-rear direction, the front end of the reaming tool is connected to the driving machine head and the rear end faces the pipe transfer clamping platform; The outer wall renovation device includes an outer wall renovation platform, a grinding wheel, a grinding motor, a guide wheel, a guide frame and a bracket, the grinding motor is fixed to the left side of the outer wall renovation platform, the grinding wheel is driven by the grinding motor to rotate with the front-to-back direction as the axis, the guide frame is arranged on the right side of the outer wall renovation platform, the guide wheel is rotatably connected to the guide frame, the guide wheel has the front-to-back direction as the axis and the front end of the guide wheel axis is lower than the rear end, the bracket is fixed to the outer wall renovation platform along the front-to-back direction and is located between the grinding wheel and the guide wheel, the left and right sides of the upper part of the bracket are respectively provided with a left baffle and a right baffle, and a tube body can pass between the left baffle and the right baffle, the left baffle is provided with a notch corresponding to the position of the grinding wheel, and the right baffle is provided with a notch corresponding to the position of the guide wheel.

[0014] Compared with the prior art, the inner wall renovation device of the above scheme realizes stable clamping of the tube body by means of the tube transfer clamping platform, and controls the movement amount of the tube transfer platform by means of the linear drive member, so that the reaming tool can reaming the inner hole of the tube body on the tube transfer clamping platform, and the liquid supply pipe can continuously inject coolant into the inner hole of the tube body on the tube transfer clamping platform, so that the coolant flows in the opposite direction of the reaming direction of the reaming tool, thereby achieving better cooling and chip removal, thereby realizing the renovation of the inner wall of the tube body; and the outer wall renovation device supports the tube body by means of the bracket, so that the tube body is located between the left baffle plate and the right baffle plate, The grinding wheel can pass through the gap of the left baffle and contact the tube body, and the guide wheel can pass through the gap of the right baffle and contact the tube body. When the grinding motor drives the grinding wheel to rotate, the tube body will rotate around its own axis. At the same time, since the guide wheel has the front-to-back direction as its axis and the front end of the guide wheel axis is lower than the rear end, when the guide wheel is driven by the tube body to rotate, the guide wheel will apply a forward force to the tube body, causing the tube body to continuously move forward, so that the outer peripheral wall of the tube body from the head end to the tail end is ground and refurbished by the grinding wheel, ensuring that the outer wall of the tube body can form a better roundness after being ground by the grinding wheel, thereby realizing the refurbishment of the outer wall of the tube body.

[0015] In an improved solution, the tube moving clamping platform is provided with an upper clamping plate and a lower clamping plate, the lower clamping plate is connected to the output end of the linear drive, the upper side of the lower clamping plate is provided with a lower receiving groove extending in the front-to-back direction, the lower side of the upper clamping plate is provided with an upper receiving groove extending in the front-to-back direction, the upper clamping plate is stacked on top of the lower clamping plate, so that the upper receiving groove and the lower receiving groove can clamp and fix the tube body, and the rear part of the lower clamping plate is provided with a liquid supply joint, the front end of the liquid supply joint is arranged toward the rear side of the lower receiving groove and the rear end is connected to the liquid supply pipe. The front end of the liquid supply joint is used to connect to the tube body in the lower receiving groove, so as to provide cooling liquid to the inner hole of the tube body on the one hand, and to support the tube body in the front-to-back direction on the other hand, to ensure that the tube body does not move backward when the reaming tool reams the inner hole of the tube body.

[0016] In an improved solution, the linear drive component includes a guide rail and a screw motor pair both arranged in the front-to-back direction. The tube moving clamp is slidably connected to the guide rail, and the tube moving clamp is provided with a tube moving screw table screwed to the screw motor pair. The movement of the tube moving slide is controlled by the screw motor pair with high precision and good stability.

[0017] In an improved solution, the inner wall renovation device also includes a limiting slide slidably connected to the guide rail, the limiting slide is located between the tube moving clamp and the driving head, and the limiting slide is provided with a clamping seat for clamping the tube body, so that the tube body extending out of the movable clamping seat is clamped to ensure the stability of the tube body when being expanded.

[0018] In an improved solution, the outer wall renovation device also includes an adjustment rail fixed to the right side of the outer wall renovation platform, and an adjustment screw arranged parallel to the adjustment rail. The adjustment rail is arranged along the left and right directions, and the guide frame is slidably connected to the adjustment rail, and the guide frame is provided with an adjustment screw hole threadedly engaged with the adjustment screw, so that the position of the guide frame is controlled by the adjustment screw, and the distance between the guide wheel and the grinding wheel is adjusted to adapt to pipes of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 An overall schematic diagram of an inner wall renovation device for an airway renovation device Figure 1 ; Figure 2 An overall schematic diagram of an inner wall renovation device for an airway renovation device Figure 2 ; Figure 3 It is an overall schematic diagram of an outer wall renovation device of an airway renovation device; Figure 4 A schematic diagram of the front side of an outer wall renovation device of an airway renovation device; Figure 5 A schematic top view of an outer wall renovation device of an air duct renovation device; Figure 6 For along Figure 5 Schematic diagram of the cross-section along the AA section line.

[0020] Description of reference numerals: a1, inner wall renovation platform; a11, guide rail; a12, lead screw motor pair; a13, limit slide; a14, clamp seat; a2, drive head; a3, reaming tool; a4, pipe transfer clamp; a41, upper clamping plate; a411, upper receiving groove; a42, lower clamping plate; a421, lower receiving groove; a43, upper fixing block; a44, lower fixing block; a45, pipe transfer screw platform; a5, liquid supply pipe; a6, liquid supply connector; b1, outer wall renovation platform; b2, grinding wheel; b3, grinding motor; b4, guide wheel; b5, guide frame; b51, receiving frame; b511, rotating shaft; b52, base frame; b521, shaft seat; b522, adjusting screw hole; b53, height adjustment piece; b6, bracket; b61, left baffle; b62, right baffle; b63, notch; b7, adjusting rail; b8, adjusting screw. DETAILED DESCRIPTION

[0021] It should be understood by those skilled in the art that the following embodiments are only used to explain the technical principles of the embodiments of the present application and are not intended to limit the protection scope of the embodiments of the present application. Those skilled in the art may adjust them as needed to adapt to specific application scenarios.

[0022] In the description of the following embodiments, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of this application can be understood according to specific circumstances.

[0023] In the embodiments of the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0024] The present application is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] Example 1 Embodiment 1 of the present invention provides an airway refurbishment method, comprising the following steps: S1. Cut the airway tube into several sections, and then perform inner wall renovation and outer wall renovation on the tube. The inner wall renovation process S11 is as follows: a reaming tool a3 driven to rotate by a driving machine head a2 is configured, the outer diameter of the reaming tool a3 is selected according to the diameter of the inner hole of the pipe body, and then the head end of the inner hole of the pipe body is sent to the reaming tool a3 in a coaxial manner, so that the reaming tool a3 reams the inner hole of the pipe body, and at the same time, coolant is continuously injected from the tail end of the inner hole of the pipe body, and after the reaming tool a3 completes the reaming renovation of the inner hole of the pipe body, the pipe body is moved away from the reaming tool a3; The outer wall renovation process S12 is as follows: a grinding wheel b2 driven by a grinding motor b3 is arranged to abut the outer peripheral wall of the head end of the tube body against the outer peripheral side of the grinding wheel b2 and ensure that the axis of the tube body and the grinding wheel b2 are parallel, and then the tube body is driven to rotate around its own axis while moving the tube body axially, so that the outer peripheral wall of the tube body from the head end to the tail end is ground and renovated by the grinding wheel b2; S2. The tube body that has completed the inner wall renovation process and the outer wall renovation process is degreased and cleaned by a cleaning fluid; S3. Re-join or re-weld the cleaned tube body to restore it to the air guide tube.

[0026] The above scheme first cuts the air guide tube into a tube body of appropriate length, so that the inner wall renovation process and the outer wall renovation process can be conveniently carried out. In the inner wall renovation process, the hole is expanded from the head end to the tail end of the outer hole of the tube body by the expansion tool a3, and at the same time, the coolant is continuously injected from the tail end of the inner hole of the tube body so that the coolant flows in the opposite direction of the expansion direction of the expansion tool a3, thereby achieving better cooling and chip removal, thereby realizing the renovation of the inner wall of the tube body; and in the outer wall renovation process, the tube body is driven to rotate around its own axis while moving the tube body axially, so that the outer peripheral wall of the tube body from the head end to the tail end is ground and refurbished by the grinding wheel b2, ensuring that the outer wall of the tube body can form a good roundness after being ground by the grinding wheel b2, thereby realizing the renovation of the outer wall of the tube body; then, the tube body is degreased and cleaned with a cleaning liquid, and the cleaned tube body is re-spliced ​​or welded to be restored to the air guide tube, so that the renovation of the air guide tube can be realized and the service life of the air guide tube can be restored. Compared with remanufacturing new pipes for replacement, the refurbishment method of the above scheme can save a lot of processing time and reduce processing costs, and does not require the re-investment of new materials, saving material costs, thereby effectively reducing the client's cost of use.

[0027] The order of the inner wall renovation step S11 and the outer wall renovation step S12 can be swapped. Figure 1-6 As shown, in the inner wall renovation process S11, a reaming tool a3 driven to rotate by a driving machine head a2 is configured, and the outer diameter of the reaming tool a3 is selected according to the diameter of the inner hole of the pipe body. The pipe body is used to be fixed on a pipe moving clamp a4, and the pipe moving clamp a4 is driven by a linear driving member on the inner wall renovation platform a1 to move forward and backward, so that the head end of the inner hole of the pipe body is sent to the reaming tool a3 in a coaxial manner through the pipe moving clamp a4, so that the reaming tool a3 reams the inner hole of the pipe body, and at the same time, coolant is continuously injected into the tail end of the inner hole of the pipe body through the liquid supply pipe on the rear side of the pipe moving clamp a4. After the reaming tool a3 completes the reaming renovation of the inner hole of the pipe body, the pipe moving clamp a4 moves the pipe body away from the reaming tool a3;

[0028] The outer wall renovation process S12 is as follows: a grinding wheel b2 driven to rotate by a grinding motor b3 is arranged, the tube body is placed on a bracket a6 and located between a left baffle b61 and a right baffle b62, the outer peripheral wall of the head end of the tube body is abutted against the outer peripheral side of the grinding wheel b2 and the axes of the tube body and the grinding wheel b2 are ensured to be parallel, when the grinding wheel b2 is driven to rotate by the grinding motor b3, the tube body is driven by the grinding wheel b2 to rotate around its own axis, and at the same time, the tube body moves axially under the action of the guide wheel b4, so that the outer peripheral wall of the tube body from the head end to the tail end is ground and renovated by the grinding wheel b2; In step S11, the reaming tool a3 is preferably a solid structure, and the tool head of the reaming tool a3 is a conical silicon carbide grinding head. The solid structure of the reaming tool a3 can ensure good rigidity and improve the concentricity during the reaming operation on the pipe body, while the silicon carbide grinding head is not easy to cause damage to the pipe body.

[0029] In step S11, the pipe body is clamped by the pipe transfer clamping platform a4, which is driven by the linear drive to move in a direction close to or away from the reaming tool a3. The linear drive gradually moves the pipe transfer clamping platform a4 holding the pipe body toward the reaming tool a3 to reaming in a feeding manner corresponding to pecking drilling, thereby ensuring the stability of the pipe body through the pipe transfer platform, and adjusting the feeding amount of the pipe body during the reaming process through the linear drive. The linear drive can be a form in the prior art, such as a lead screw motor pair a12.

[0030] The linear drive part feeds in the corresponding manner to pecking drilling as follows: each time, the tube-moving clamp a4 is driven forward 0.05 mm and backward 0.02 mm, and this process is repeated until the reaming tool a3 moves from the head end to the tail end of the inner hole of the tube body, thereby ensuring that the reaming tool a3 does not damage the inner hole of the tube body and the reaming effect is stable.

[0031] In addition, in step S2, the tube body is first immersed in a KOH solution with a temperature of 50°C and a concentration of 5% for 20 minutes, and then immersed in a HCl solution with a temperature of 30°C and a concentration of 10% for 30 minutes, so as to achieve degreasing cleaning.

[0032] Example 2 like Figure 1-6 As shown, embodiment 2 of the present invention further provides an airway refurbishment device, including an inner wall refurbishment device and an outer wall refurbishment device; The inner wall renovation device comprises an inner wall renovation platform a1, a driving machine head a2, a reaming tool a3 and a tube transfer clamping platform a4, wherein the driving machine head a2 is fixed to the front of the inner wall renovation platform a1, the tube transfer clamping platform a4 is located at the rear of the inner wall renovation platform a1 and is used to clamp the tube body, a liquid supply pipe a5 is provided at the rear of the tube transfer clamping platform a4, the inner wall renovation platform a1 is provided with a linear driving member for driving the tube transfer clamping platform a4 to move in the front-back direction, the front end of the reaming tool a3 is connected to the driving machine head a2 and the rear end faces the tube transfer clamping platform a4; The outer wall renovation device includes an outer wall renovation platform b1, a grinding wheel b2, a grinding motor b3, a guide wheel b4, a guide frame b5 and a bracket b6. The grinding motor b3 is fixed to the left side of the outer wall renovation platform b1. The grinding wheel b2 is driven by the grinding motor b3 to rotate with the front-to-back direction as the axis. The guide frame b5 is arranged on the right side of the outer wall renovation platform b1. The guide wheel b4 is rotatably connected to the guide frame b5. The guide wheel b4 is axially arranged in the front-to-back direction and the front end of the axis of the guide wheel b4 is lower than the rear end. The bracket b6 is fixed to the outer wall renovation platform b1 along the front-to-back direction and is located between the grinding wheel b2 and the guide wheel b4. A left baffle b61 and a right baffle b62 are respectively provided on the left and right sides of the upper part of the bracket b6, and a tube body can pass through the left baffle b61 and the right baffle b62. The left baffle b61 is provided with a notch b63 corresponding to the position of the grinding wheel b2, and the right baffle b62 is provided with a notch b63 corresponding to the position of the guide wheel b4.

[0033] The inner wall renovation device of the above scheme realizes stable clamping of the tube body through the tube transfer clamping platform a4, and controls the movement amount of the tube transfer platform through the linear drive member, so that the reaming tool a3 can reaming the inner hole of the tube body on the tube transfer clamping platform a4, and the liquid supply pipe a5 can continuously inject coolant into the inner hole of the tube body on the tube transfer clamping platform a4, so that the coolant flows in the opposite direction of the reaming direction of the reaming tool a3, thereby achieving better cooling and chip removal, thereby realizing the renovation of the inner wall of the tube body; and the outer wall renovation device supports the tube body through the bracket b6, so that the tube body is located between the left baffle b61 and the right baffle b62, so that the grinding wheel b2 can pass through the left baffle b61 and the right baffle b62. The notch b63 of the baffle b61 is in contact with the tube body, and the guide wheel b4 can pass through the notch b63 of the right baffle b62 and contact the tube body. When the grinding motor b3 drives the grinding wheel b2 to rotate, the tube body will rotate around its own axis. At the same time, since the guide wheel b4 takes the front-to-back direction as the axis and the front end of the axis of the guide wheel b4 is lower than the rear end, when the guide wheel b4 is driven by the tube body to rotate, the guide wheel b4 will apply a forward force to the tube body, causing the tube body to continuously move forward, so that the outer peripheral wall of the tube body from the head end to the tail end is ground and refurbished by the grinding wheel b2, ensuring that the outer wall of the tube body can form a better roundness after being ground by the grinding wheel b2, thereby realizing the refurbishment of the outer wall of the tube body.

[0034] In this embodiment, the tube transfer clamping platform a4 is provided with an upper clamping plate a41 and a lower clamping plate a42, the lower clamping plate a42 is fixedly arranged relative to the tube transfer clamping platform a4, the upper side of the lower clamping plate a42 is provided with a lower receiving groove a421 extending in the front-to-back direction, the lower side of the upper clamping plate a41 is provided with an upper receiving groove a411 extending in the front-to-back direction, the upper clamping plate a41 is stacked on the upper side of the lower clamping plate a42, so that the upper receiving groove a411 and the lower receiving groove a421 can clamp and fix the tube body, and the rear part of the lower clamping plate a42 is provided with a liquid supply connector a6, the front end of the liquid supply connector a6 is arranged toward the rear side of the lower receiving groove a421 and the rear end is connected to the liquid supply pipe a5. The front end of the liquid supply connector a6 is used to connect to the tube body in the receiving groove, so as to provide cooling liquid to the inner hole of the tube body on the one hand, and to support the tube body in the front-to-back direction on the other hand, so as to ensure that the tube body will not move backward when the reaming tool a3 reams the inner hole of the tube body.

[0035] In the modification plan, the upper side of the upper splint a41 is connected to an upper fixed block a43, which is preferably made of metal so as to have good structural strength, and the upper splint a41 is preferably made of PVC material so as to have a certain deformation ability to avoid damage to the tube body; the lower side of the lower splint a42 is connected to a lower fixed block a44, which is preferably made of metal so as to have good structural strength, and the lower splint a42 is preferably made of PVC material so as to have a certain deformation ability to avoid damage to the tube body.

[0036] Furthermore, the lower clamping plate a42 and the lower fixing block a44 are both fixed relative to the pipe clamping platform a4, the upper fixing block a43 and the upper clamping plate a41 are both provided with a plurality of mounting holes along the vertical direction, and the lower clamping plate a42 is provided with a plurality of screw holes along the vertical direction, and the mounting holes correspond to the screw holes one by one, so that by arranging screws in the mounting holes and screwing the lower ends of the screws to the screw holes of the lower clamping plate a42, the upper clamping plate a41 and the lower clamping plate a42 can be fitted and fixed, and by rotating the screws, the fitting tightness of the upper clamping plate a41 and the lower clamping plate a42 can be controlled to ensure the appropriate clamping pressure of the upper clamping plate a41 and the lower clamping plate a42 on the tube body, thereby preventing the tube body from loosening due to too small a clamping force or breaking due to too large a clamping force.

[0037] In this embodiment, the linear drive member includes a guide rail a11 and a lead screw motor pair a12 both arranged in the front-rear direction, the pipe moving clamping platform a4 is slidably connected to the guide rail a11, and the pipe moving clamping platform a4 is provided with a pipe moving screw platform a45 screwed to the lead screw motor pair a12, and the movement of the pipe moving slide is controlled by the lead screw motor pair a12, with high precision and good stability. Of course, the linear drive member can also be in other forms, such as an electric cylinder, etc., and this design is not limited to this.

[0038] As an optimization of the inner wall renovation device, the inner wall renovation device also includes a limit slide a13 slidably connected to the guide rail a11, the limit slide a13 is located between the tube moving clamping platform a4 and the driving machine head a2, and the limit slide a13 is provided with a clamping seat a14 for clamping the tube body, so that the clamping seat a14 clamps the tube body extending out of the moving clamping platform to ensure the stability of the tube body when the hole is expanded. More specifically, the clamping seat a14 is annular, and a rubber ring is provided on the inner ring side of the clamping seat a14, so that the tube body is clamped by the rubber ring.

[0039] In this embodiment, the outer wall renovation device also includes an adjustment rail b7 fixed to the right side of the outer wall renovation platform b1, and an adjustment screw b8 arranged parallel to the adjustment rail b7. The adjustment rail b7 is arranged along the left and right direction, and the guide frame b5 is slidably connected to the adjustment rail b7, and the guide frame b5 is provided with an adjustment screw hole b522 threadedly engaged with the adjustment screw b8, so that the position of the guide frame b5 is controlled by the adjustment screw b8, and the distance between the guide wheel b4 and the grinding wheel b2 is adjusted to adapt to pipes of different sizes.

[0040] As an optimization of the outer wall renovation device, the guide frame b5 includes a receiving frame b51, a base frame b52 and a height adjusting member b53. The adjusting screw hole b522 is arranged at the lower part of the base frame b52. The upper side of the base frame b52 is provided with an axle seat b521 with an axis along the left-right direction. The guide wheel b4 is rotatably connected to the upper side of the receiving frame b51 with the front-back direction as the axis. The lower side of the receiving frame b51 is provided with a rotating shaft b511 rotatably connected to the axle seat b521, and a spacing is left between the receiving frame b51 and the base frame b52. The height adjusting member b53 is preferably a cylinder. 3 is connected to the base frame b52, and the output end of the height-adjusting member b53 is rotatably connected to the front end of the receiving frame b51, so that when the height-adjusting member b53 controls the front end of the receiving frame b51 to approach the base frame b52, the height of the front part of the receiving frame b51 is lower than the height of the rear part, that is, the guide wheel b4 takes the front-to-back direction as the axis and the front end of the axis of the guide wheel b4 is lower than the rear end. The height-adjusting member b53 can change the inclination angle of the axis of the guide wheel b4, change the magnitude of the forward force applied by the guide wheel b4 to the pipe body, and realize the adjustment of the moving speed of the pipe body.

[0041] In addition, the upper side surface of the bracket b6 is designed to be inclined with the left side higher and the right side lower, so that the tube body can better fit to the guide wheel b4, that is, the tube body can be better pushed by the guide wheel b4 and move forward.

[0042] It should be noted that, in the description of the present application, the terms "inside", "outside", etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. This is only for the convenience of description and does not indicate or imply that the device or component must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present application; all directional indications (such as up, down, left, right, front, back, inside, and outside) are only used to explain the relative positional relationship, movement, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0043] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "in the present embodiment", "specific example", or "some examples" etc. means that the specific features, mechanisms, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, mechanisms, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0044] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A method for refurbishing an airway, characterized in that: The steps include: S1. Cut the airway into several sections, and then perform inner wall renovation and outer wall renovation on the sections. The inner wall renovation process S11 is as follows: a hole-expanding tool (a3) ​​driven to rotate by a driving machine head (a2) is configured, the outer diameter of the hole-expanding tool (a3) ​​is selected according to the diameter of the inner hole of the pipe body, and then the head end of the inner hole of the pipe body is sent to the hole-expanding tool (a3) ​​in a coaxial manner, so that the hole-expanding tool (a3) ​​expands the inner hole of the pipe body, and at the same time, coolant is continuously injected from the tail end of the inner hole of the pipe body. After the hole-expanding tool (a3) ​​completes the renovation of the inner hole of the pipe body, the pipe body is moved away from the hole-expanding tool (a3); The outer wall renovation step S12 is as follows: a grinding wheel (b2) driven to rotate by a grinding motor (b3) is arranged, the outer peripheral wall of the head end of the tube body is brought into contact with the outer peripheral side of the grinding wheel (b2) and the axes of the tube body and the grinding wheel (b2) are ensured to be parallel, and then the tube body is driven to rotate around its own axis while the tube body is moved axially, so that the outer peripheral wall of the tube body from the head end to the tail end is ground and renovated by the grinding wheel (b2); S2. The tube body that has completed the inner wall renovation process and the outer wall renovation process is degreased and cleaned by a cleaning fluid; S3. Re-join or re-weld the cleaned tube body to restore it to the air guide tube.

2. The airway refurbishment method according to claim 1, characterized in that: In step S11, the reaming tool (a3) ​​is a solid structure, and the tool head of the reaming tool (a3) ​​is a conical silicon carbide grinding head.

3. The airway refurbishment method according to claim 1, characterized in that: In step S11, the tube body is clamped by the tube transfer clamp (a4), and the tube transfer clamp (a4) is driven by a linear drive component to move in a direction close to or away from the reaming tool (a3). The linear drive component gradually moves the tube transfer clamp (a4) holding the tube body toward the reaming tool (a3) ​​for reaming in a feeding manner corresponding to pecking drilling.

4. The airway refurbishment method according to claim 3, characterized in that: The linear drive member feeds in a manner corresponding to pecking drilling as follows: each time the tube moving clamp (a4) is driven forward 0.05 mm and backward 0.02 mm, and this process is repeated until the reaming tool (a3) ​​moves from the head end of the inner hole of the tube body to the tail end.

5. The airway refurbishment method according to claim 1, characterized in that: In step S2, the tube body is first immersed in a KOH solution with a temperature of 50°C and a concentration of 5% for 20 minutes, and then immersed in a HCl solution with a temperature of 30°C and a concentration of 10% for 30 minutes, so as to achieve degreasing cleaning.

6. An airway refurbishment device, characterized in that: It includes an inner wall renovation device and an outer wall renovation device; The inner wall renovation device comprises an inner wall renovation platform (a1), a driving machine head (a2), a reaming tool (a3) ​​and a tube transfer clamping platform (a4), wherein the driving machine head (a2) is fixed to the front of the inner wall renovation platform (a1), the tube transfer clamping platform (a4) is located at the rear of the inner wall renovation platform (a1) and is used to clamp the tube body, a liquid supply pipe (a5) is provided at the rear of the tube transfer clamping platform (a4), the inner wall renovation platform (a1) is provided with a linear driving member for driving the tube transfer clamping platform (a4) to move in a front-to-back direction, and the front end of the reaming tool (a3) ​​is connected to the driving machine head (a2) and the rear end faces the tube transfer clamping platform (a4); The outer wall renovation device comprises an outer wall renovation platform (b1), a grinding wheel (b2), a grinding motor (b3), a guide wheel (b4), a guide frame (b5) and a bracket (b6), wherein the grinding motor (b3) is fixed to the left side of the outer wall renovation platform (b1), the grinding wheel (b2) is driven by the grinding motor (b3) to rotate with the front-rear direction as the axis, the guide frame (b5) is arranged on the right side of the outer wall renovation platform (b1), the guide wheel (b4) is rotatably connected to the guide frame (b5), the guide wheel (b4) has the front-rear direction as the axis and the guide wheel (b4) ) axis, the front end is lower than the rear end, the bracket (b6) is fixed to the outer wall renovation platform (b1) along the front-to-back direction and is located between the grinding wheel (b2) and the guide wheel (b4), the left and right sides of the upper part of the bracket (b6) are respectively provided with a left baffle (b61) and a right baffle (b62), and the space between the left baffle (b61) and the right baffle (b62) is open for the tube to pass through, the left baffle (b61) is provided with a notch (b63) at a position corresponding to the grinding wheel (b2), and the right baffle (b62) is provided with a notch (b63) at a position corresponding to the guide wheel (b4).

7. The airway refurbishment device according to claim 6, characterized in that: The tube transfer clamping platform (a4) is provided with an upper clamping plate (a41) and a lower clamping plate (a42), the upper side of the lower clamping plate (a42) is provided with a lower receiving groove (a421) extending in the front-to-back direction, the lower side of the upper clamping plate (a41) is provided with an upper receiving groove (a411) extending in the front-to-back direction, the upper clamping plate (a41) is stacked on the upper side of the lower clamping plate (a42) so that the upper receiving groove (a411) and the lower receiving groove (a421) can clamp and fix the tube body, and the rear part of the lower clamping plate (a42) is provided with a liquid supply connector (a6), the front end of the liquid supply connector (a6) is arranged toward the rear side of the lower receiving groove (a421) and the rear end is connected to the liquid supply pipe (a5).

8. The airway refurbishment device according to claim 6 or 7, characterized in that: The linear drive component comprises a guide rail (a11) and a lead screw motor pair (a12) both arranged in the front-rear direction; the tube moving clamping platform (a4) is slidably connected to the guide rail (a11); and the tube moving clamping platform (a4) is provided with a tube moving screw platform (a45) threadedly engaged with the lead screw motor pair (a12).

9. The airway refurbishment device according to claim 8, characterized in that: The inner wall renovation device also includes a limiting slide (a13) slidably connected to the guide rail (a11), the limiting slide (a13) is located between the tube transfer clamping platform (a4) and the driving machine head (a2), and the limiting slide (a13) is provided with a clamping seat (a14) for clamping the tube body.

10. The airway refurbishment device according to claim 6, characterized in that: The outer wall renovation device also includes an adjustment rail (b7) fixed to the right side of the outer wall renovation platform (b1), and an adjustment screw (b8) arranged parallel to the adjustment rail (b7), the adjustment rail (b7) being arranged along the left-right direction, the guide frame (b5) being slidably connected to the adjustment rail (b7), and the guide frame (b5) being provided with an adjustment screw hole (b522) threadedly engaged with the adjustment screw (b8).

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