Heating device, manufacturing method thereof and equipment comprising heating device

Abstract

The invention provides a heating device, a manufacturing method thereof and equipment comprising the heating device. The heating device comprises a light-transmitting supporting unit, a temperature sensing unit, a sensing unit and a power variable unit. The light-transmitting supporting unit is provided with a supporting face and a non-supporting face which are arranged back to back. The temperature sensing unit is arranged on the non-supporting surface, and the temperature sensing unit is configured to send out corresponding sensing information according to the temperature change of each area of the power variable unit. The sensing unit is arranged on the surface, away from the light-transmitting supporting unit, of the temperature sensing unit, and the sensing unit is configured to detect the difference between the sensing information and send out a feedback signal. And the power variable unit is electrically connected with the sensing unit, and the power variable unit is configured to heat each area of the supporting surface to a preset temperature so as to heat the object to be heated, and can also receive a feedback signal to adjust the heating power of at least part of the area of the supporting surface. The heating device can reduce the heating uniformity difference of each area in the to-be-heated object.

Description

Technical Field

[0001] The invention belongs to the technical field of heat treatment equipment, and in particular relates to a heating device and a manufacturing method thereof, and equipment comprising the heating device. Background Art

[0002] In heat treatment equipment such as chemical vapor deposition equipment and annealing equipment, a heating device is usually provided to heat the object to be heated containing the functional unit layer and to heat each area in the functional unit layer evenly, thereby manufacturing a product that meets the performance requirements.

[0003] However, in the related art, the heating device may cause differences in the heating uniformity of various regions in the object to be heated. Therefore, it is urgent to provide a heating device that can reduce the differences in the heating uniformity of various regions in the object to be heated. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a heating device and a manufacturing method thereof and equipment including the heating device, wherein the heating device can reduce the occurrence of differences in heating uniformity among various regions of an object to be heated.

[0005] The present invention is implemented as follows. In the first aspect, the present invention provides a heating device, including a light-transmitting support unit, a temperature sensing unit, a sensing unit and a variable power unit. The light-transmitting support unit has a supporting surface and a non-supporting surface disposed opposite to each other, and the supporting surface is configured to support an object to be heated. The temperature sensing unit is disposed on the non-supporting surface, and the temperature sensing unit is configured to send corresponding sensing information according to the temperature changes of each area in the variable power unit. The sensing unit is disposed on the surface of the temperature sensing unit away from the light-transmitting support unit, and the sensing unit is configured to detect the difference between the sensing information and send a feedback signal. The variable power unit is electrically connected to the sensing unit, and the variable power unit is configured to heat each area of ​​the support surface to a preset temperature to heat the object to be heated, and can also receive a feedback signal to adjust the heating power of at least a part of the area of ​​the support surface, wherein the temperature of at least a part of the area is different from the preset temperature.

[0006] Furthermore, the temperature sensing unit includes a thermochromic layer or a thermochromic layer.

[0007] Furthermore, the material of the thermovariable light intensity layer includes a first luminescent material and a first binder that can emit light of different intensities under excitation at different temperatures.

[0008] Furthermore, the material of the thermotropic light intensity layer includes a first light emitting material doped with rare earth ions.

[0009] Furthermore, the first luminescent material includes a first compound with a chemical formula of RX2 or a first compound with a chemical formula of M m AB bThe second compound of , R includes at least one cation selected from lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, and yttrium, X includes at least one anion selected from fluorine, chlorine, bromine, and oxygen, M includes at least one cation selected from sodium, barium, and strontium, A includes at least one cation selected from lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, and yttrium, B includes at least one anion selected from fluorine, chlorine, bromine, and oxygen, m is in the range of 1 to 2, and b is in the range of 4 to 7.

[0010] Furthermore, the material of the thermochromic layer includes a second luminescent material and a second binder that can emit light of different colors under different temperatures, and the material of the thermochromic layer includes an organic metal framework material containing a transition metal, wherein the transition metal includes at least one of nickel, cobalt, copper and zinc.

[0011] Furthermore, the temperature sensing unit also includes a light wave emitting unit, and the light wave emitting unit is arranged between the light-transmitting support unit and the thermochromic light intensity layer, or between the light-transmitting support unit and the thermochromic layer.

[0012] Furthermore, the temperature sensing unit also includes a light board, which is arranged around the light wave emitting unit to provide background excitation light for the thermochromic light intensity layer and the thermochromic layer.

[0013] Further, the sensing unit includes at least one of a photoresistor or a photodiode.

[0014] Furthermore, the temperature sensing unit includes a thermo-variable light intensity layer, and the sensing unit includes a photoresistor.

[0015] Furthermore, the temperature sensing unit includes a thermochromic layer, and the sensing unit includes a photodiode.

[0016] Furthermore, the power variable unit includes a heating resistor, and the arrangement density of the heating resistor in the power variable unit is greater than or equal to 1-100 / cm 2 .

[0017] The present invention is implemented as follows. In the second aspect, the present invention provides a method for manufacturing a heating device as described above, comprising: forming a power variable unit; electrically connecting a sensing unit to the power variable unit; forming a temperature sensing unit on one surface of the sensing unit; and arranging a non-supporting surface of a light-transmitting support unit on another surface of the temperature sensing unit, wherein the supporting surface of the light-transmitting support unit is arranged opposite to the temperature sensing unit.

[0018] Furthermore, forming the power variable unit includes: forming a plurality of receiving grooves arranged in an array on the insulating layer; and arranging a plurality of heating resistors in the plurality of receiving grooves in a one-to-one correspondence to form the power variable unit.

[0019] Furthermore, the sensing unit and the power variable unit are electrically connected by hot-melt pressing.

[0020] Furthermore, a temperature sensing unit is formed on a surface of the sensing unit, including: mixing the material of the temperature sensing unit with a solvent to obtain a slurry; applying the slurry on a surface of the insulating layer to form a slurry layer; and curing the slurry layer to form the temperature sensing unit.

[0021] The present invention is implemented in this way. In a third aspect, the present invention provides an apparatus comprising the aforementioned heating device, or a heating device manufactured by the aforementioned manufacturing method.

[0022] Compared with the prior art, the heating device of the present invention and its manufacturing method and equipment including the heating device, wherein the heating device includes a light-transmitting support unit, a temperature sensing unit, a sensing unit and a power-variable unit. The light-transmitting support unit has a supporting surface and a non-supporting surface arranged opposite to each other, and the supporting surface is configured to support the object to be heated. The temperature sensing unit is arranged on the non-supporting surface, and the temperature sensing unit is configured to send corresponding sensing information according to the temperature changes of each area of ​​the power-variable unit. The sensing unit is arranged on the surface of the temperature sensing unit away from the light-transmitting support unit, and the sensing unit is configured to detect the difference between the sensing information and send a feedback signal. The power-variable unit is electrically connected to the sensing unit, and the power-variable unit is configured to heat each area of ​​the support surface to a preset temperature to heat the object to be heated, and can also receive a feedback signal to adjust the heating power of at least part of the area of ​​the support surface, wherein the temperature of at least part of the area is different from the preset temperature. Thus, the temperature sensing unit can send sensing information according to the temperature of each area of ​​the support surface, and the sensing information can reflect the temperature difference of each area of ​​the support surface. Then, the difference between the sensing information is detected by the sensing unit and a feedback signal is sent to the power variable unit, wherein the difference between the sensing information is the temperature difference between each area of ​​the support surface. After receiving the feedback signal, the power variable unit can adjust the heating power of the support surface that is different from the preset temperature area, thereby reducing the occurrence of heating uniformity differences in each area of ​​the object to be heated. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram showing the structure of the heating device of the present invention is shown; Figure 2 Shows a schematic diagram of the structure of a heating device provided by other embodiments of the present invention; Figure 3 A schematic diagram showing the structural principle of the manufacturing method of the heating device of the present invention is shown; Figure 4 A schematic diagram showing the structural principle of a method for manufacturing a power variable unit of a heating device of the present invention; Figure 5A schematic diagram showing the structural principle of a method for manufacturing a sensor unit of a heating device of the present invention is shown.

[0024] The reference numerals in the specific implementation manner are as follows: 10 heating device; 100 light-transmitting support unit; 110 support surface; 120 non-support surface; 200 temperature sensing units; 300 sensor units; 400 power variable units; 500 light wave transmitting units; 600: light board; 700: substrate; 800: thermochromic light intensity layer; 900: thermochromic layer. DETAILED DESCRIPTION

[0025] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0026] As described in the background technology above, in heat treatment equipment such as chemical vapor deposition equipment and annealing equipment, a heating device is usually provided to heat the object to be heated containing a functional unit layer and to heat each area in the functional unit layer evenly, thereby manufacturing a product that meets performance requirements.

[0027] For example, in the process of manufacturing each functional layer in a photovoltaic module, an annealing treatment is usually required. However, in the equipment used for the annealing treatment, the heating device usually has a phenomenon of uneven heating temperature for each functional layer. For example, the temperature in the middle area of ​​the functional layer is higher, while the temperature around it is lower, which will cause the crystal morphology of the surrounding area to change, and thus be different from the crystal morphology of the middle area. When the photovoltaic module is subjected to an aging test under the same aging environment, the film structure that has not completely reacted around it is easily destroyed, causing experimental deviations in the aging test.

[0028] Furthermore, during the packaging process of photovoltaic modules, temperature changes at different points during lamination will cause different degrees of cross-linking of the film in the module structure, and the incompletely cross-linked film still contains small molecule additives, which react with the functional layer inside the module, causing a decrease in module performance.

[0029] Therefore, there is an urgent need to provide a heating device that can reduce the difference in heating uniformity among various regions of the object to be heated.

[0030] In view of this, the present invention provides a heating device and a manufacturing method thereof, and equipment including the heating device, wherein the heating device can reduce the occurrence of differences in heating uniformity among various regions in an object to be heated.

[0031] Heating device First, see Figure 1 As shown, an embodiment of the present invention provides a heating device 10, including a light-transmitting support unit 100, a temperature sensing unit 200, a sensor unit 300 and a power variable unit 400. The light-transmitting support unit 100 has a support surface 110 and a non-support surface 120 disposed opposite to each other, and the support surface 110 is configured to support the object to be heated. The temperature sensing unit 200 is disposed on the non-support surface 120, and the temperature sensing unit 200 is configured to send corresponding sensing information according to the temperature change of each area of ​​the power variable unit 400. The sensor unit 300 is disposed on the surface of the temperature sensing unit 200 away from the light-transmitting support unit 100, and the sensor unit 300 is configured to detect the difference between the sensing information and send a feedback signal. The power variable unit 400 is electrically connected to the sensor unit 300, and the power variable unit 400 is configured to heat each area of ​​the support surface 110 to a preset temperature to heat the object to be heated, and can also receive a feedback signal to adjust the heating power of at least a part of the area of ​​the support surface 110, wherein the temperature of at least a part of the area is different from the preset temperature.

[0032] In the heating device 10 provided in the embodiment of the present invention, the temperature sensing unit 200 can send corresponding sensing information according to the temperature changes of each area of ​​the variable power unit 400. The sensing information can reflect the temperature difference of each area of ​​the object to be heated. The difference between the sensing information is detected by the sensor unit 300 and a feedback signal is sent to the variable power unit 400. The difference between the sensing information is the temperature difference between each area in the variable power unit 400. After receiving the feedback signal, the variable power unit 400 can adjust the heating power of the area on the support surface 110 that is different from the preset temperature, thereby reducing the difference in heating uniformity of each area in the object to be heated.

[0033] In the above-mentioned embodiments, the light-transmitting support unit 100 may also have a translucent or fully transparent structure, which can help to clearly observe the changes in the temperature sensing unit 200, thereby facilitating the adjustment of the heating power of the variable power unit 400 so that the temperature of each area of ​​the support surface 110 is close to the preset temperature.

[0034] In addition, the light-transmitting support unit 100 also has good thermal conductivity, which can reduce heating costs. Therefore, the light-transmitting support unit 100 can be made of a material with good thermal conductivity. Exemplarily, the material of the light-transmitting support unit 100 may include a ceramic material; further, the ceramic material may be an alumina ceramic material; further, the light-transmitting support unit 100 may include a metal-coated alumina ceramic flat plate, wherein the metal may include magnesium, aluminum, copper or an alloy thereof, and the metal-coated alumina ceramic flat plate can help the light-transmitting support unit 100 to have uniform thermal conductivity.

[0035] In the embodiment of the present invention, the temperature sensing unit 200 needs to have a high sensitivity to temperature, so as to be able to accurately and quickly sense the occurrence of temperature differences.

[0036] In some optional embodiments of the present invention, the temperature sensing unit 200 includes a thermochromic layer 800 or a thermochromic layer 900 .

[0037] In the above embodiment, when the temperature of each area on the support surface 110 is uneven, the thermochromic layer 800 or the thermochromic layer 900 corresponding to each area will emit sensing information under different temperature excitation, and the sensing information can be a change in light intensity or color. Among them, the thermochromic layer 800 in adjacent areas will produce a difference in light intensity when excited in the corresponding different temperature areas, and the difference can be detected by the sensor unit 300 and send a feedback signal. After receiving the feedback signal, the variable power unit 400 will adjust the heating power of the corresponding area. The thermochromic layer 900 in the adjacent area will emit different light wavelengths when excited in the corresponding different temperature areas. The different light wavelengths can be detected by the sensor unit 300 and send a feedback signal. After receiving the feedback signal, the variable power unit 400 will adjust the heating power of the corresponding area.

[0038] In some optional embodiments of the present invention, the temperature sensing unit 200 includes a thermo-variable light intensity layer 800. The light intensity variation information emitted by the thermo-variable light intensity layer 800 under temperature excitation is easily detected by the sensing unit 300, which can reduce the detection difficulty and shorten the detection time, thereby facilitating the improvement of the temperature adjustment efficiency and adjustment precision.

[0039] In some optional embodiments of the present invention, the material of the thermo-induced variable light intensity layer 800 includes a first luminescent material and a first binder that can emit different light intensities under different temperatures. The thermo-induced variable light intensity layer 800 formed by the first luminescent material and the first binder can improve the connection reliability between the thermo-induced variable light intensity layer 800 and the light-transmitting support unit 100 and the sensing unit 300.

[0040] In some optional embodiments of the present invention, the material of the thermo-variable light intensity layer 800 includes a first luminescent material doped with rare earth ions. By doping the first luminescent material with rare earth ions, the difference between the luminescent intensities of adjacent thermo-variable light intensity layers 800 can be increased, thereby reducing the detection difficulty of the sensing unit 300 and timely adjusting the temperature of each area.

[0041] In the above embodiments, the first light-emitting material may include a light-emitting material with a binary or ternary structure, wherein binary means that the material contains two element components, and ternary means that the material contains three element components.

[0042] Exemplarily, the material of the thermovariable light intensity layer 800 includes a first compound with a chemical formula of RX2, that is, the first compound is a binary structured light-emitting material, wherein R includes at least one cation selected from lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, and yttrium, and X includes at least one anion selected from fluorine, chlorine, bromine, and oxygen.

[0043] In some optional embodiments of the present invention, the material of the thermo-induced light intensity layer 800 includes a chemical formula of M m AB b The second compound is a ternary structure light-emitting material, wherein M includes at least one cation selected from sodium, barium, and strontium, A includes at least one cation selected from lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, and yttrium, B includes at least one anion selected from fluorine, chlorine, bromine, and oxygen, the value range of m is 1 to 2, and the value range of b is 4 to 7.

[0044] Exemplarily, the second compound may also be a compound represented by the chemical formula MAB4, M2AB7 or MAB5.

[0045] In some specific embodiments of the present invention, the material of the thermovariable light intensity layer 800 may include at least one of ytterbium-holmium-erbium doped lutetium distrontium fluoride, ytterbium-erbium doped strontium fluoride or β-phase ytterbium-erbium doped sodium yttrium fluoride.

[0046] In some specific embodiments of the present invention, the rare earth compound can be synthesized by hydrothermal / solvothermal reaction in a microwave-heated reactor.

[0047] Exemplarily, the preparation method of ytterbium-holmium-erbium doped lutetium distrontium fluoride rare earth compound is as follows: S100, mixing anhydrous ethylenediaminetetraacetic acid diamine and deionized water in a volume ratio of 1:2-10, stirring to prevent precipitation, to obtain an ethylenediaminetetraacetic acid diamine solution; S200, adding a mixed solution of lutetium-ytterbium-holmium-erbium mixed hydrochloride and strontium chloride to the above-mentioned ethylenediaminetetraacetic acid diamine solution at a cation molar ratio of 1:1; S300, stirring the solution obtained in S200, and adding 30% ammonia water dropwise until the pH value of the solution reaches 5.5-6.5; S400, adding ammonium fluoride to the solution obtained in S300 at a ratio of metal ion:fluoride ion = 1:7, during which the pH of the solution is maintained at 5.5-6.5 by using ammonia water to obtain a clear solution; S400, placing the clarified solution into a reaction kettle with a Teflon liner, heating it by microwave, and reacting it at 170° C. to 200° C. and 30 to 50 atmospheres for 8 to 12 hours to obtain a white precipitate; S500, centrifuge the white precipitate with water and ethanol, and wash several times; S600, drying the washed precipitate at 80°C to obtain ytterbium-holmium-erbium doped lutetium distrontium fluoride powder.

[0048] In other examples, ytterbium-erbium doped strontium fluoride is prepared as follows: S100, dissolving a mixed salt of strontium chloride hexahydrate, ytterbium chloride and erbium chloride in deionized water in a certain proportion to obtain a clear solution of 0.5-1 mol / L; S200, adding 16 mL to 20 mL of 0.8 mol / L to 1 mol / L sodium citrate dihydrate dropwise to the above clear solution; S300, adding 2 mL to 2.5 mL of 2.9 mol / L to 3.5 mol / L ammonium fluoride solution dropwise into the solution prepared in S200 and stirring and mixing, wherein the ratio of rare earth element cations to fluoride ions is 1:2; S400, placing the solution obtained in S300 into a reaction kettle with a Teflon liner, and heating it by microwave to react it at 170° C. to 200° C. and 30 to 50 atmospheres for 6 h to 48 h; S500, rapidly cooling the reactor to obtain a reaction product; S400, separating, centrifuging and washing the reaction product using deionized water and acetone to obtain a semi-finished product; S400, drying the semi-finished product at 70° C. to obtain ytterbium-erbium doped strontium fluoride powder.

[0049] In other examples, the preparation method of β-phase ytterbium-erbium doped sodium yttrium fluoride is as follows: S100, mixing 1.2 g to 1.5 g of sodium hydroxide, 20 mL to 40 mL of oleic acid, 10 mL to 20 mL of deionized water and 10 mL to 20 mL of anhydrous ethanol and stirring to mix evenly to obtain a first mixed solution; S200, mixing and dissolving nitrates of yttrium, ytterbium and erbium in a certain proportion in deionized water, and adding the first mixed solution to obtain a second mixed solution; S300, adding sodium fluoride to the second mixed solution and shaking to obtain a third mixed solution, wherein the molar ratio of the total amount of the rare earth elements yttrium, ytterbium, and erbium to the fluoride ion is 1:4; S400, placing the third mixed solution into a reaction kettle with a Teflon liner and heating it to react for 6h to 48h at 170° C. to 200° C. and 30 to 50 atmospheres; S500, after the reaction is completed, taking the lower layer of the reaction solution; S600, washing the precipitate with cyclohexane and ethanol, and centrifuging to obtain a semi-finished product; S700, drying the semi-finished product at 70° C. to obtain β-phase ytterbium-erbium doped sodium yttrium fluoride powder.

[0050] In some optional embodiments of the present invention, the temperature sensing unit 200 includes a thermochromic layer 900 .

[0051] In some optional embodiments of the present invention, the material of the thermochromic layer 900 includes a second luminescent material that can emit light of different colors when excited at different temperatures and a second binder.

[0052] In some optional embodiments of the present invention, the material of the thermochromic layer 900 includes an organic metal framework material containing a transition metal.

[0053] In some optional embodiments of the present invention, the transition metal includes at least one of nickel, cobalt, copper and zinc.

[0054] For example, the material of the thermochromic layer 900 may include Ni-MOF.

[0055] In some specific embodiments of the present invention, the preparation method of Ni-MOF is as follows: S100, dissolving nickel sulfate hexahydrate and 1,3,5-(pyrazolyl)benzene in a mixed solvent of methanol and distilled water (the volume ratio of methanol to distilled water is 5-3:1) at a molar ratio of (10-5):1 to obtain a mixed solution with a concentration of 0.2 mol / L-0.1 mol / L; S200, adding the mixed solution into a Teflon reactor and reacting at 130°C to 200°C for 24h to 72h to obtain an emerald green crystalline product; S300, obtaining Ni-MOF powder by drying and grinding the above-mentioned crystalline product.

[0056] In the above embodiments, the first binder and the second binder may be the same or different. For example, the first binder may be polystyrene, and the second binder may also be polystyrene, wherein polystyrene may be purchased from the market or prepared through experiments.

[0057] In some specific embodiments of the present invention, the preparation method of polystyrene is as follows: S100, dissolving polyethylene oxide-polypropylene oxide-polyethylene oxide copolymer in deionized water (mass ratio is 1% to 2%) and stirring evenly to obtain a first mixed solution; S200, adding a mixed solvent of styrene, xylene and divinylbenzene (volume ratio 5:5:1) dropwise into the first solution and stirring evenly to obtain a second mixed solution; S300, under a nitrogen atmosphere, heating and stirring the second solution at 75° C. for 30 min to 120 min to obtain a third mixed solution; S400, adding a potassium persulfate aqueous solution (0.02 g / mL) to the third solution and reacting for 2 h to 4 h to obtain a reaction product; S500, washing the reaction product with isopropanol, centrifuging, and drying to obtain polystyrene.

[0058] In some optional embodiments of the present invention, the sensing unit 300 includes a photoelectric sensor.

[0059] In some optional embodiments of the present invention, the sensing unit 300 includes at least one of a photoresistor and a photodiode.

[0060] In some optional embodiments of the present invention, the temperature sensing unit 200 includes a thermo-variable light intensity layer 800, and the sensing unit 300 includes a photoresistor. When the temperature of each area on the support surface 110 is uneven, the thermo-variable light intensity layer 800 corresponding to each area will send out sensing information under different temperature excitations, and the sensing information is the light intensity. The thermo-variable light intensity layer 800 of adjacent areas will produce a difference in light intensity when excited in the corresponding different temperature areas, and the difference can be quickly captured by the photoresistor and quickly fed back to the power variable unit 400 in the form of an electrical signal. After receiving the feedback electrical signal, the power variable unit 400 will adjust the heating power of the corresponding area.

[0061] In some optional embodiments of the present invention, the temperature sensing unit 200 includes a thermochromic layer 900, and the sensing unit 300 includes a photodiode. When the temperature of each area on the support surface 110 is uneven, the wavelengths of the excitation light waves of the thermochromic layers 900 in adjacent areas under the corresponding different temperature areas will be different, and different light wavelengths can cause the corresponding photodiodes to generate photocurrents of different sizes, that is, feedback signals. After receiving the feedback signal, the power variable unit 400 will adjust the heating power of the corresponding area.

[0062] See also Figure 2 As shown, in some optional embodiments of the present invention, the temperature sensing unit 200 further includes a light wave emitting unit 500. The light wave emitting unit 500 is disposed between the light-transmitting support unit 100 and the thermochromic light intensity layer 800, or between the light wave emitting unit 500 and the thermochromic layer 900.

[0063] Please continue reading Figure 2As shown, in some optional embodiments of the present invention, the temperature sensing unit 200 further includes a light board 600, which is arranged around the light wave emitting unit 500 to provide background excitation light for the thermochromic light intensity layer and the thermochromic layer.

[0064] In the above embodiment, the light wave emitting unit 500 can help the sensing information emitted by the temperature sensing unit 200 to be displayed uniformly, so that it can be intuitively observed whether the heating temperature on the support surface 110 is uniform. The light board 600 is arranged around the light wave emitting unit 500, which can reduce the leakage of the sensing information and enhance the display effect.

[0065] In some optional embodiments of the present invention, the light board 600 may include an LED light board 600. In addition, the LED array on the LED light board 600 has good heat resistance, for example, it can withstand a high temperature of 400°C.

[0066] In addition, the heating device 10 may further include a substrate 700 , which is disposed on a surface of the power variable unit 400 away from the sensor unit 300 . The substrate 700 can play a good supporting role.

[0067] Exemplarily, the photodiode may include a perovskite photodiode.

[0068] In some optional embodiments of the present invention, the power variable unit 400 includes a heating resistor, and the arrangement density of the heating resistor in the power variable unit 400 is greater than or equal to 1-100 / cm 2 .

[0069] In some optional embodiments of the present invention, the power variable unit 400 may further include an insulating layer, the insulating layer having a plurality of accommodating grooves corresponding to the plurality of heating resistors one by one, and the heating resistors are arranged in an array in the insulating layer.

[0070] In the above embodiment, a plurality of heating resistors are provided in the insulating layer, and the heating resistors are arranged in an array in the insulating layer. This can help to quickly and accurately control the heating temperature when heating an object to be heated with a larger area, and can also improve the heating uniformity.

[0071] In addition, in the above-mentioned embodiment, each heating resistor is electrically connected to at least one sensing unit 300 , wherein the electrical connection may be a series electrical connection or a parallel electrical connection.

[0072] In some optional embodiments of the present invention, the material of the insulating layer may be any material with insulating function known in the art, such as quartz, etc. The material of the heating resistor may also be any material known in the art, such as metal tungsten.

[0073] Method for manufacturing heating device Second, see Figure 3 As shown, the present invention provides a method for manufacturing a heating device 10 according to the first aspect of the present invention, comprising: S10, forming a power variable unit 400; S20, electrically connecting the sensor unit 300 to the power variable unit 400; S30, forming a temperature sensing unit 200 on the upper surface of the sensing unit 300; S40 , disposing the non-support surface 120 of the light-transmitting support unit 100 on the upper surface of the temperature sensing unit 200 , wherein the support surface 110 of the light-transmitting support unit 100 is disposed opposite to the temperature sensing unit 200 .

[0074] In the above-mentioned embodiment, the material of the temperature sensing unit 200 can be prepared through experiments, and the details can be referred to the description of the first aspect of the present invention, and the embodiment of the present invention will not be described in detail here.

[0075] See also Figure 4 As shown, in some optional embodiments of the present invention, forming a power variable unit 400 includes: S11, forming a plurality of receiving grooves arranged in an array on the insulating layer; S12, arranging a plurality of heating resistors in a plurality of receiving slots in a one-to-one correspondence to form a power variable unit 400.

[0076] In some optional embodiments of the present invention, the sensor unit 300 and the power variable unit 400 are electrically connected by hot-melt pressing.

[0077] See also Figure 5 As shown, in some optional embodiments of the present invention, a temperature sensing unit 200 is formed on the upper surface of the sensing unit 300, including: S31, mixing the material of the temperature sensing unit with a solvent to obtain a slurry; S32, applying the slurry on one surface of the insulating layer to form a slurry layer; S33 , curing the slurry layer to form the temperature sensing unit 200 .

[0078] In the above embodiment, the MOF material or rare earth compound and the binder polymer can be mixed in a molar ratio of 1:50 in one of ethanol, butanol, tetrahydrofuran or a mixed solvent, stirred evenly to form a slurry, and the slurry is sprayed on the surface of the insulating layer using a spray gun to form a slurry layer. The cake is dried and cured at 200°C for 30 minutes to form a temperature sensing unit 200.

[0079] In some optional embodiments of the present invention, a light wave emitting unit 500 may be disposed between the light-transmitting support unit 100 and the temperature sensing unit 200 , and a light board 600 may be welded to the side of the light wave emitting unit 500 so that the light board 600 surrounds the light wave emitting unit 500 .

[0080] The manufacturing method of the heating device provided by the present invention has simple process and low manufacturing cost.

[0081] equipment In a third aspect, the present invention provides an apparatus comprising the heating device 10 according to the first aspect of the present invention, or a heating device made by the manufacturing method according to the second aspect of the present invention.

[0082] In the above-mentioned embodiment, since the device includes the heating device 10 of the present invention, the device also has the technical effect of the heating device, and the embodiment of the present invention will not be described in detail here.

[0083] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A heating device, characterized in that: It includes a light-transmitting support unit, a temperature sensing unit, a sensor unit and a power variable unit; The light-transmitting support unit comprises a support surface and a non-support surface disposed opposite to each other, and the support surface is configured to support the object to be heated; The temperature sensing unit is disposed on the non-support surface, and the temperature sensing unit is configured to send corresponding sensing information according to the temperature change of each area in the variable power unit; The sensing unit is disposed on a surface of the temperature sensing unit away from the light-transmitting support unit, and the sensing unit is configured to detect the difference between the sensing information and send a feedback signal; The power variable unit is electrically connected to the sensor unit, and is configured to heat each area of ​​the support surface to a preset temperature to heat the object to be heated, and receive the feedback signal to adjust the heating power of at least a part of the area of ​​the support surface, wherein the temperature of at least a part of the area is different from the preset temperature.

2. The heating device according to claim 1, characterized in that The temperature sensing unit includes a thermochromic layer or a thermochromic layer.

3. The heating device according to claim 2, characterized in that: The material of the thermovariable light intensity layer includes a first luminescent material and a first binder that can emit different light intensities under different temperature excitations, wherein the first luminescent material includes a first compound with a chemical formula of RX2 or a first compound with a chemical formula of M m AB b The second compound of , R includes at least one cation selected from lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, and yttrium, X includes at least one anion selected from fluorine, chlorine, bromine, and oxygen, M includes at least one cation selected from sodium, barium, and strontium, A includes at least one cation selected from lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, and yttrium, B includes at least one anion selected from fluorine, chlorine, bromine, and oxygen, m is in the range of 1 to 2, and b is in the range of 4 to 7.

4. The heating device according to claim 2, characterized in that: The material of the thermochromic layer includes a second luminescent material and a second binder that can emit light of different colors under excitation at different temperatures, and the second luminescent material includes an organic metal framework material containing a transition metal.

5. The heating device according to claim 2, characterized in that: The temperature sensing unit also includes: The light wave emitting unit is arranged between the light-transmitting support unit and the thermochromic light intensity layer, or between the light-transmitting support unit and the thermochromic layer.

6. The heating device according to claim 5, characterized in that: The temperature sensing unit also includes: The light panel is arranged around the light wave emitting unit.

7. The heating device according to claim 1, characterized in that: The sensing unit includes at least one of a photoresistor and a photodiode.

8. The heating device according to claim 1, characterized in that The power variable unit includes a heating resistor, and the arrangement density of the heating resistor in the power variable unit is greater than or equal to 1-100 / cm 2 .

9. A method for manufacturing a heating device according to any one of claims 1 to 8, characterized in that: include: forming a power variable unit; electrically connecting the sensing unit to the power variable unit; forming a temperature sensing unit on a surface of the sensing unit; The non-supporting surface of the light-transmitting support unit is arranged on the other surface of the temperature sensing unit, wherein the supporting surface of the light-transmitting support unit is arranged opposite to the temperature sensing unit.

10. A device, characterized in that: A heating device comprising the heating device according to any one of claims 1 to 8, or a heating device made by the manufacturing method of the heating device according to claim 9.

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