Liquid source conveying system and method and semiconductor process equipment

Abstract

The invention relates to a liquid source conveying system and method and semiconductor process equipment. The liquid source conveying system comprises a first liquid storage unit, a second liquid storage unit, a third liquid storage unit, a fourth liquid storage unit, a first power gas supply unit, a second power gas supply unit, a first purging gas supply unit, a second purging gas supply unit and a first vacuum unit. The device has the advantages that the first purging gas supply unit can press dissolved liquid in the third liquid storage unit into the first liquid storage unit, the second liquid storage unit and the plurality of pipelines, so that the first liquid storage unit, the second liquid storage unit and the plurality of pipelines can be cleaned through the dissolved liquid; therefore, the liquid source adhering to the pipe wall and remaining in the first liquid storage unit and the second liquid storage unit can be dissolved and discharged, and then the cleanliness of cleaning the first liquid storage unit, the second liquid storage unit and the multiple pipelines is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of special liquid source delivery, and in particular to a liquid source delivery system, method and semiconductor process equipment. Background Art

[0002] In the production process of the semiconductor industry, CVD machines are indispensable to a series of special liquids, and the precise delivery of these liquids depends on a professional liquid source delivery system. The system integrates multiple key components such as liquid storage unit, buffer unit, gas supply unit, gas-liquid separation unit, exhaust unit, purge unit, pipeline unit and pressure monitoring unit.

[0003] However, for some special liquids with strong metal pipe wall adhesion, such as TDMAT, CP-Hf, CP-Zr and IP235, the existing purging technology is still difficult to completely remove them. At the same time, in terms of safety assurance, the system also lacks a complete leakage detection mechanism, which to some extent limits the further improvement of its performance.

[0004] Currently, no effective solution has been proposed for the problem that the existing conveying system in the relevant technology is unable to clean the liquid with strong adhesion to the metal pipe wall. Summary of the invention

[0005] The purpose of the present invention is to provide a liquid source delivery system, method and semiconductor process equipment to address the deficiencies in the prior art, so as to solve the problems existing in the related art that the existing delivery system cannot clean the liquid with strong adhesion to the metal pipe wall.

[0006] To achieve the above object, the technical solution adopted by the present invention is:

[0007] In a first aspect, the present invention provides a liquid source delivery system, comprising:

[0008] A first liquid storage unit, the first liquid storage unit is used to store a liquid source;

[0009] A second liquid storage unit, which is connected to the first liquid storage unit and the process equipment through pipelines, and is located downstream of the first liquid storage unit, and is used to buffer the liquid source and transport the liquid source to the process equipment;

[0010] A third liquid storage unit, the third liquid storage unit is connected to the first liquid storage unit and the second liquid storage unit through pipelines, and is used to store the dissolved liquid and transport the dissolved liquid to the first liquid storage unit and the second liquid storage unit;

[0011] a fourth liquid storage unit, the fourth liquid storage unit being connected to the first liquid storage unit and the second liquid storage unit through pipelines, and being used for storing waste liquid;

[0012] a first power gas supply unit, the first power gas supply unit being connected to the first power gas source and the first liquid storage unit through pipelines, and being used to supply the first power gas to the first liquid storage unit so that the liquid source of the first liquid storage unit flows to the second liquid storage unit;

[0013] a second power gas supply unit, the second power gas supply unit being connected to the second power gas source and the second liquid storage unit through pipelines, and being used for supplying the second power gas to the second liquid storage unit so that the liquid source of the second liquid storage unit flows toward the process equipment;

[0014] a first purge gas supply unit, the first purge gas supply unit being connected to the first purge gas source, the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit through pipelines, respectively, and being used to deliver the first purge gas to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively, so as to press the liquid source in the pipeline into the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively;

[0015] a second purge gas supply unit, the second purge gas supply unit is connected to the second purge gas source and the third liquid storage unit through pipelines, and is used to deliver the second purge gas to the third liquid storage unit to press the dissolved liquid into the pipeline, the first liquid storage unit, and the second liquid storage unit, respectively, so that the dissolved liquid cleans the pipeline, the first liquid storage unit, and the second liquid storage unit;

[0016] A first vacuum unit, wherein the first vacuum unit is connected to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively, and is used to perform vacuum treatment on the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit.

[0017] In some of the embodiments, it also includes:

[0018] A gas-liquid separation unit, which is connected to the second liquid storage unit and the process equipment through pipelines, and is located downstream of the second liquid storage unit, and is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit to remove gas in the liquid source and to transport the liquid source after gas-liquid separation to the process equipment;

[0019] The second vacuum unit is communicated with the gas-liquid separation unit and is used to discharge the gas generated by the gas-liquid separation unit.

[0020] In some of the embodiments, it also includes:

[0021] a volatilization unit, the volatilization unit being connected to the fourth liquid storage unit and the exhaust device respectively, and being used for discharging the volatilized liquid in the pipeline and the fourth liquid storage unit;

[0022] A third vacuum unit is connected to the first vacuum unit and is used to accelerate the volatilization of the liquid.

[0023] In some of the embodiments, it also includes:

[0024] A liquid leakage monitoring unit, wherein the liquid leakage monitoring unit is arranged in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, and is used for real-time monitoring of liquid leakage of the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit.

[0025] In some of the embodiments, it also includes:

[0026] A medium monitoring unit is communicated with the third liquid storage unit and is located downstream of the third liquid storage unit, and is used to monitor whether the medium output by the third liquid storage unit is liquid.

[0027] In some of the embodiments, it also includes:

[0028] A safety assurance unit is arranged at the top of the environment where the liquid source delivery system is located, and is used to monitor environmental information.

[0029] In a second aspect, the present invention further provides a semiconductor process equipment, comprising:

[0030] A liquid source delivery system as described in the first aspect.

[0031] In a third aspect, the present invention further provides a liquid source delivery method, which is applied to the liquid source delivery system as described in the first aspect or the semiconductor process equipment as described in the second aspect.

[0032] The present invention adopts the above technical solution, and has the following technical effects compared with the prior art:

[0033] A liquid source delivery system, method and semiconductor process equipment of the present invention connects a first power gas supply unit with a first liquid storage unit, connects a second power gas supply unit with a second liquid storage unit, connects a first purge gas supply unit with the first liquid storage unit, a second liquid storage unit, a third liquid storage unit and a fourth liquid storage unit respectively, and connects a second purge gas supply unit with a third liquid storage unit, so that the solution in the third liquid storage unit can be injected into the first liquid storage unit, the second liquid storage unit and a plurality of pipelines, thereby cleaning the first liquid storage unit, the second liquid storage unit and a plurality of pipelines with the solution, so that the liquid source adhering to the pipe wall and remaining in the first liquid storage unit and the second liquid storage unit can be dissolved and discharged, thereby improving the cleanliness of the first liquid storage unit, the second liquid storage unit and the plurality of pipelines. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a schematic diagram of a liquid source delivery system according to an embodiment of the present invention (I);

[0035] Figure 2 is a schematic diagram of a first liquid storage unit according to an embodiment of the present invention;

[0036] Figure 3 is a schematic diagram of a second liquid storage unit according to an embodiment of the present invention;

[0037] Figure 4 is a schematic diagram of a third liquid storage unit according to an embodiment of the present invention;

[0038] Figure 5 is a schematic diagram of a fourth liquid storage unit according to an embodiment of the present invention;

[0039] Figure 6 is a schematic diagram of a first power gas supply unit according to an embodiment of the present invention;

[0040] Figure 7 is a schematic diagram of a second power gas supply unit according to an embodiment of the present invention;

[0041] Figure 8 is a schematic diagram of a first purge gas supply unit according to an embodiment of the present invention;

[0042] Fig. 9 is a schematic diagram of a second purge gas supply unit according to an embodiment of the present invention;

[0043] Fig.10 is a schematic diagram of a first vacuum unit according to an embodiment of the present invention;

[0044] Fig.11 is a schematic diagram of a liquid source delivery system according to an embodiment of the present invention (II);

[0045] Fig.12 is a schematic diagram of a gas-liquid separation unit and a second vacuum unit according to an embodiment of the present invention;

[0046] Fig.13 is a schematic diagram of a liquid source delivery system according to an embodiment of the present invention (III);

[0047] Fig.14 is a schematic diagram of a volatilization unit and a third vacuum unit according to an embodiment of the present invention;

[0048] Fig.15 is a schematic diagram of a liquid source delivery system according to an embodiment of the present invention (IV);

[0049] Fig.16 is a schematic diagram of a liquid leakage monitoring unit according to an embodiment of the present invention;

[0050] Fig.17 is a schematic diagram of a security assurance unit according to an embodiment of the present invention;

[0051] Fig.18 It is a specific embodiment of the liquid source delivery system according to an embodiment of the present invention.

[0052] The accompanying drawings are marked as follows: 100, first liquid storage unit; 101, first liquid storage element; 102, first control valve element; 103, second control valve element; 104, third control valve element; 105, first pressure monitoring element; 106, second pressure monitoring element; 200, second liquid storage unit; 201, second liquid storage element; 202, fourth control valve element; 203, fifth control valve element; 204, sixth control valve element; 205, seventh control valve element; 206, third pressure monitoring element; 207, fourth pressure monitoring element; 300, third liquid storage unit; 301, third liquid storage element; 302, eighth control valve element; 303, ninth control valve element; 304, tenth control valve element 1, the first control valve element; 305, the eleventh control valve element; 306, the fifth pressure monitoring element; 400, the fourth liquid storage unit; 401, the fourth liquid storage element; 402, the twelfth control valve element; 403, the sixth pressure monitoring element; 500, the first power gas supply unit; 501, the thirteenth control valve element; 502, the first pressure regulating element; 503, the seventh pressure monitoring element; 600, the second power gas supply unit; 601, the fourteenth control valve element; 602, the second pressure regulating element; 603, the eighth pressure monitoring element; 700, the first purge gas supply unit; 701, the fifteenth control valve element; 702, the sixteenth control valve element; 703, the seventeenth control valve element; 704, the tenth 8 control valve element; 705, 19th control valve element; 706, micro-leakage regulating element; 707, 3rd pressure regulating element; 708, 9th pressure monitoring element; 800, 2nd purge gas supply unit; 801, 20th control valve element; 802, 4th pressure regulating element; 803, 10th pressure monitoring element; 900, 1st vacuum unit; 901, 21st control valve element; 902, 22nd control valve element; 903, 23rd control valve element; 904, 24th control valve element; 905, 25th control valve element; 906, 11th pressure monitoring element; 1000, gas-liquid separation unit; 1001, gas-liquid separation element; 1002, 26th control valve element; 10 03, the twenty-seventh control valve element; 1100, the second vacuum unit; 1101, the twenty-eighth control valve element; 1102, the twelfth pressure monitoring element; 1200, the volatilization unit; 1201, the twenty-ninth control valve element; 1202, the thirtieth control valve element; 1300, the third vacuum unit; 1301, the thirty-first control valve element; 1400, the leakage monitoring unit; 1401, the containing element; 1402, the first leakage detection element; 1403, the second leakage detection element; 1500, the medium monitoring unit; 1600, the safety guarantee unit; 1601, the smoke monitoring element; 1602, the ultraviolet infrared switch element; 1603, the liquid spray element; 1604, the blowing element. DETAILED DESCRIPTION

[0053] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0054] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0055] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0056] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units that are not listed, or may also include other steps or units inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there may be three relationships, for example, "A and / or B" can represent: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0057] Example 1

[0058] This embodiment relates to the liquid source delivery system of the present invention.

[0059] An exemplary embodiment of the present invention is as follows Figure 1As shown, a liquid source delivery system includes a first liquid storage unit 100, a second liquid storage unit 200, a third liquid storage unit 300, a fourth liquid storage unit 400, a first power gas supply unit 500, a second power gas supply unit 600, a first purge gas supply unit 700, a second purge gas supply unit 800 and a first vacuum unit 900. The first liquid storage unit 100 is used to store the liquid source; the second liquid storage unit 200 is connected to the first liquid storage unit 100 and the process equipment through pipelines, and is located downstream of the first liquid storage unit 100, and is used to buffer the liquid source and deliver the liquid source to the process equipment; the third liquid storage unit 300 is connected to the first liquid storage unit 100 and the second liquid storage unit 200 through pipelines, and is used to store the dissolved liquid and deliver the dissolved liquid to the first liquid storage unit 100 and the second liquid storage unit 200; the fourth liquid storage unit 400 is connected to the first liquid storage unit 100 and the second liquid storage unit 200 through pipelines, and is used to store the dissolved liquid and deliver the dissolved liquid to the first liquid storage unit 100 and the second liquid storage unit 200. The first power gas supply unit 500 is connected to the first power gas source and the first liquid storage unit 100 through pipelines, and is used to supply the first power gas to the first liquid storage unit 100 so that the liquid source of the first liquid storage unit 100 flows to the second liquid storage unit 200; the second power gas supply unit 600 is connected to the second power gas source and the second liquid storage unit 200 through pipelines, and is used to supply the second power gas to the second liquid storage unit 200 so that the liquid source of the second liquid storage unit 200 flows to the process equipment; the first purge gas supply unit 700 is connected to the first power gas source and the first liquid storage unit 1 ... The first purge gas source, the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400 are connected through pipelines, and are used to respectively deliver the first purge gas to the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400 so as to press the liquid source, the dissolved liquid, and the waste liquid in the pipeline into the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400 respectively; the second purge gas supply unit 800 is respectively connected to the second purge gas source, the third liquid storage unit 300, and the fourth liquid storage unit 400. 00 is connected through a pipeline, and is used to transport the second purge gas to the third liquid storage unit 300 to press the dissolved liquid into the pipeline, the first liquid storage unit 100, and the second liquid storage unit 200 respectively so that the dissolved liquid cleans the pipeline, the first liquid storage unit 100, and the second liquid storage unit 200; the first vacuum unit 900 is respectively connected with the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400, and is used to perform vacuum treatment on the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300 and the fourth liquid storage unit 400.

[0060] It should be noted that the first end and the second end in the present invention are two ends in the length direction thereof.

[0061] It should be noted that the first power gas source and the second power gas source include but are not limited to He.

[0062] It should be noted that the first purge gas source and the second purge gas source include but are not limited to He and N2.

[0063] like Figure 2 As shown, the first liquid storage unit 100 includes a first liquid storage element 101, a first delivery pipeline element and a second delivery pipeline element. The first liquid storage element 101 is used to store a liquid source; the first delivery pipeline element is respectively connected to the first liquid storage element 101, the first power gas supply unit 500, and the first purge gas supply unit 700 for delivering gas; the second delivery pipeline element is respectively connected to the first liquid storage element 101, the second liquid storage unit 200, and the first purge gas supply unit 700 for delivering gas and liquid.

[0064] Specifically, the first end of the first delivery pipeline element is connected to the first power gas supply unit 500 and the first purge gas supply unit 700, and the second end of the first delivery pipeline element is connected to the first liquid storage element 101; the first end of the second delivery pipeline element is connected to the first liquid storage element 101, the second end of the second delivery pipeline element is connected to the second liquid storage unit 200, and the middle part of the second delivery pipeline element is connected to the first purge gas supply unit 700.

[0065] It should be noted that the second end of the first delivery pipeline element extends into the interior of the first liquid storage element 101 and extends to a position close to the top wall inside the first liquid storage element 101; the first end of the second delivery pipeline element extends into the interior of the first liquid storage element 101 and extends to a position close to the bottom wall inside the first liquid storage element 101.

[0066] In some of the embodiments, the first liquid storage element 101 includes but is not limited to a stainless steel barrel; the first delivery pipeline element includes but is not limited to a stainless steel pipe; and the second delivery pipeline element includes but is not limited to a stainless steel pipe.

[0067] Furthermore, the first liquid storage unit 100 further includes a first control valve element 102 and a second control valve element 103. The first control valve element 102 is disposed in the first delivery pipeline element to control the flow of the first delivery pipeline element; the second control valve element 103 is disposed in the second delivery pipeline element to control the flow of the second delivery pipeline element.

[0068] Specifically, the first control valve element 102 includes a first pneumatic diaphragm valve, wherein the first pneumatic diaphragm valve is provided with a first delivery pipeline element for automatically controlling the flow between the first delivery pipeline element and the first liquid storage element 101 .

[0069] Specifically, the second control valve element 103 includes a second pneumatic diaphragm valve, a third pneumatic diaphragm valve, a first manual diaphragm valve, a fourth pneumatic diaphragm valve and a fifth pneumatic diaphragm valve. Among them, the second pneumatic diaphragm valve is arranged in the second delivery pipeline element, and is used to automatically control the flow between the second delivery pipeline element and the first liquid storage element 101; the third pneumatic diaphragm valve is arranged in the second delivery pipeline element and is located downstream of the second pneumatic diaphragm valve; the first manual diaphragm valve is arranged in the second delivery pipeline element and is located downstream of the second pneumatic diaphragm valve; the fourth pneumatic diaphragm valve is arranged in the second delivery pipeline element and is located downstream of the first manual diaphragm valve; the fifth pneumatic diaphragm valve is arranged at the second end of the second delivery pipeline element and is connected to the second liquid storage unit 200, and is used to automatically control the flow between the second output pipeline element and the second liquid storage unit 200.

[0070] Furthermore, the first liquid storage unit 100 further includes a first bypass pipeline element and a third control valve element 104. The first bypass pipeline element is respectively connected to the first delivery pipeline element and the second delivery pipeline element for bypass; the third control valve element 104 is arranged on the first bypass pipeline element for controlling the flow of the first bypass pipeline element.

[0071] Specifically, the first end of the first bypass line element is connected to the first delivery line element, and the connection point is located downstream of the first pneumatic diaphragm valve. The second end of the first bypass line element is connected to the second delivery line element, and the connection point is located downstream of the second pneumatic diaphragm valve and upstream of the third pneumatic diaphragm valve.

[0072] In some of the embodiments, the first bypass line element includes, but is not limited to, a stainless steel pipe.

[0073] Specifically, the third control valve element 104 includes a sixth pneumatic diaphragm valve, wherein the sixth pneumatic diaphragm valve is disposed in the first bypass pipeline element, and is used to automatically control the flow of the first bypass pipeline element.

[0074] Furthermore, the first liquid storage unit 100 further includes a first pressure monitoring element 105, a second pressure monitoring element 106, a first liquid level monitoring element and a first weight monitoring element. The first pressure monitoring element 105 is connected to the first delivery pipeline element for monitoring the pressure of the first delivery pipeline element; the second pressure monitoring element 106 is connected to the second delivery pipeline element for monitoring the pressure of the second delivery pipeline element; the first liquid level monitoring element is arranged inside the first liquid storage element 101 for monitoring the liquid level of the first liquid storage element 101; the first weight monitoring element is arranged at the bottom of the first liquid storage element 101 for monitoring the weight of the first liquid storage element 101.

[0075] Specifically, the connection point between the first pressure monitoring element 105 and the first delivery pipeline element is located upstream of the first pneumatic diaphragm valve; the connection point between the second pressure monitoring element 106 and the second delivery pipeline element is located downstream of the second pneumatic diaphragm valve and upstream of the third pneumatic diaphragm valve.

[0076] In some of the embodiments, the first pressure monitoring element 105 includes but is not limited to a pressure sensor; the second pressure monitoring element 106 includes but is not limited to a pressure sensor; the first liquid level monitoring element includes but is not limited to a liquid level sensor; and the first weight monitoring element includes but is not limited to a scale.

[0077] like Figure 3 As shown, the second liquid storage unit 200 includes a second liquid storage element 201, a third delivery pipeline element, a fourth delivery pipeline element and at least one fifth delivery pipeline element. The second liquid storage element 201 is respectively connected to the first liquid storage unit 100 for buffering the liquid source; the third delivery pipeline element is respectively connected to the second liquid storage element 201, the second power gas supply unit 600, and the first purge gas supply unit 700 for delivering gas; the fourth delivery pipeline element is respectively connected to the second liquid storage element 201 and the first purge gas supply unit 700 for delivering the liquid source; the fifth delivery pipeline element is respectively connected to the fourth delivery pipeline element and the process equipment for delivering the liquid source to the process equipment.

[0078] Specifically, the first end of the third delivery pipeline element is respectively connected to the second power gas supply unit 600 and the first purge gas supply unit 700, and the second end of the third delivery pipeline element is connected to the second liquid storage element 201; the first end of the fourth delivery pipeline element is connected to the second liquid storage element 201; the first end of the fifth delivery pipeline element is respectively connected to the second end of the fourth delivery pipeline element and the first purge gas supply unit 700, and the second end of the fifth delivery pipeline element is connected to the process equipment.

[0079] It should be noted that the second end of the third delivery pipeline element extends into the interior of the second liquid storage element 201 and extends to a position inside the second liquid storage element 201 close to the top wall; the first end of the fourth delivery pipeline element extends into the interior of the second liquid storage element 201 and extends to a position inside the second liquid storage element 201 close to the bottom wall.

[0080] It should be noted that there are several fifth conveying pipeline elements, the first ends of several fifth conveying pipeline elements are connected in parallel with the second end of the fourth conveying pipeline element, and the second ends of several fifth conveying pipeline elements are respectively connected to corresponding process equipment or to multiple air inlets on a process equipment.

[0081] It should be noted that the number of the fifth delivery pipeline elements can be set according to the number of process equipment or the number of air inlets on one process equipment, and no excessive restrictions are imposed herein.

[0082] In some of the embodiments, the second liquid storage element 201 includes but is not limited to a stainless steel barrel; the third delivery pipeline element includes but is not limited to a stainless steel tube; the fourth delivery pipeline element includes but is not limited to a stainless steel tube; the fifth delivery pipeline element includes but is not limited to a stainless steel tube.

[0083] Furthermore, the second liquid storage unit 200 further includes a fourth control valve element 202, a fifth control valve element 203 and at least one sixth control valve element 204. The fourth control valve element 202 is disposed in the third delivery pipeline element to control the flow of the third delivery pipeline element; the fifth control valve element 203 is disposed in the fourth delivery pipeline element to control the flow of the fourth delivery pipeline element; the sixth control valve element 204 is disposed in the fifth delivery pipeline element to control the flow of the fifth delivery pipeline element.

[0084] Specifically, the fourth control valve element 202 includes a seventh pneumatic diaphragm valve, wherein the seventh pneumatic diaphragm valve is disposed in the third delivery pipeline element, and is used to automatically control the flow between the third delivery pipeline element and the second liquid storage element 201 .

[0085] Specifically, the fifth control valve element 203 includes an eighth pneumatic diaphragm valve, a ninth pneumatic diaphragm valve and a second manual diaphragm valve. The eighth pneumatic diaphragm valve is arranged in the fourth delivery pipeline element, and is used to automatically control the flow between the second liquid storage element 201 and the fourth delivery pipeline element; the ninth pneumatic diaphragm valve is arranged in the fourth delivery pipeline element, and is located downstream of the eighth pneumatic diaphragm valve; the second manual diaphragm valve is arranged in the fourth delivery pipeline element, and is located downstream of the eighth pneumatic diaphragm valve, and is used to manually control the flow between the fourth delivery pipeline element and the fifth delivery pipeline element.

[0086] It should be noted that the number of the sixth control valve elements 204 matches the number of the fifth delivery line elements. It should be understood that the number of the sixth control valve elements 204 is the same as the number of the fifth delivery line elements.

[0087] More specifically, the sixth control valve element 204 includes a tenth pneumatic diaphragm valve and a third manual diaphragm valve. The tenth pneumatic diaphragm valve is disposed in the fifth delivery pipeline element for automatically controlling the flow between the fifth delivery pipeline element and the fourth delivery pipeline element; the third manual diaphragm valve is disposed in the fifth delivery pipeline element and is located downstream of the tenth pneumatic diaphragm valve for manually controlling the flow between the fifth delivery pipeline element and the fourth delivery pipeline element.

[0088] Furthermore, the second liquid storage unit 200 further includes a second bypass pipeline element and a seventh control valve element 205. The first end of the second bypass pipeline element is connected to the first liquid storage unit 100, and the second end of the second bypass pipeline element is connected to the fourth delivery pipeline element for bypass; the seventh control valve element 205 is arranged on the second bypass pipeline element for controlling the flow of the second bypass pipeline element.

[0089] Specifically, the first end of the second bypass pipeline element is connected to the second delivery pipeline element, and the connection point is located downstream of the fourth pneumatic diaphragm valve and upstream of the fifth pneumatic diaphragm valve. The second end of the second bypass pipeline element is connected to the fourth delivery pipeline element, and the connection point is located between the eighth pneumatic diaphragm valve and the ninth pneumatic diaphragm valve.

[0090] In some of the embodiments, the second bypass line element includes, but is not limited to, a stainless steel pipe.

[0091] Specifically, the seventh control valve element 205 includes an eleventh pneumatic diaphragm valve, wherein the eleventh pneumatic diaphragm valve is disposed in the second bypass pipeline element, and is used to control the flow of the second bypass pipeline element.

[0092] Furthermore, the second liquid storage unit 200 further includes a third pressure monitoring element 206, a fourth pressure monitoring element 207, a second liquid level monitoring element and a second weight monitoring element. The third pressure monitoring element 206 is connected to the third delivery pipeline element for monitoring the pressure of the third delivery pipeline element; the fourth pressure monitoring element 207 is connected to the fourth delivery pipeline element for monitoring the pressure of the fourth delivery pipeline element; the second liquid level monitoring element is arranged inside the second liquid storage element 201 for detecting the liquid level of the second liquid storage element 201; the second weight monitoring element is arranged at the bottom of the second liquid storage element 201 for monitoring the weight of the second liquid storage element 201.

[0093] Specifically, the connection point between the third pressure monitoring element 206 and the third delivery pipeline element is located upstream of the seventh pneumatic diaphragm valve; the connection point between the fourth pressure monitoring element 207 and the fourth delivery pipeline element is located downstream of the eighth pneumatic diaphragm valve and upstream of the ninth pneumatic diaphragm valve.

[0094] In some of the embodiments, the third pressure monitoring element 206 includes but is not limited to a pressure sensor; the fourth pressure monitoring element 207 includes but is not limited to a pressure sensor; the second liquid level monitoring element includes but is not limited to a liquid level sensor; and the second weight monitoring element includes but is not limited to a scale.

[0095] like Figure 4As shown, the third liquid storage unit 300 includes a third liquid storage element 301, a sixth delivery pipeline element, a seventh delivery pipeline element, an eighth delivery pipeline element and at least one ninth delivery pipeline element. The third liquid storage element 301 is connected to the first liquid storage unit 100 for storing the dissolved liquid; the sixth delivery pipeline element is respectively connected to the third liquid storage element 301, the first purge gas supply unit 700, and the second purge gas supply unit 800 for delivering gas; the seventh delivery pipeline element is respectively connected to the third liquid storage element 301, the first liquid storage unit 100, the second liquid storage unit 200, and the first purge gas supply unit 700 for delivering gas and liquid; the eighth delivery pipeline element is connected to the seventh delivery pipeline element for delivering liquid; the ninth delivery pipeline element is respectively connected to the eighth delivery pipeline element and the second liquid storage unit 200 for delivering liquid.

[0096] Specifically, the first end of the sixth delivery pipeline element is connected to the first purge gas supply unit 700 and the second purge gas supply unit 800, and the second end of the sixth delivery pipeline element is connected to the third liquid storage element 301; the first end of the seventh delivery pipeline element is connected to the third liquid storage element 301, and the second end of the seventh delivery pipeline element is connected to the second delivery pipeline element and the first purge gas supply unit 700 respectively, and the connection point is located between the second pressure monitoring element 106 and the third pneumatic diaphragm valve; the first end of the eighth delivery pipeline element is connected to the seventh delivery pipeline element, and the second end of the eighth delivery pipeline element is connected in parallel with the first ends of multiple ninth delivery pipeline elements; the second end of the ninth delivery pipeline element is connected to the fifth delivery pipeline element, and the connection point between the ninth delivery pipeline element and the fifth delivery pipeline element is located between the tenth pneumatic diaphragm valve and the third manual diaphragm valve.

[0097] It should be noted that the second end of the sixth delivery pipeline element extends into the interior of the third liquid storage element 301 and extends to a position inside the third liquid storage element 301 close to the top wall; the first end of the seventh delivery pipeline element extends into the interior of the third liquid storage element 301 and extends to a position inside the third liquid storage element 301 close to the bottom wall.

[0098] It should be noted that there are a plurality of ninth delivery pipeline elements, and the plurality of ninth delivery pipeline elements are respectively connected to the corresponding fifth delivery pipeline elements.

[0099] It should be noted that the number of the ninth delivery line elements matches the number of the fifth delivery line elements. It should be understood that the number of the ninth delivery line elements is the same as the number of the fifth delivery line elements.

[0100] In some of the embodiments, the third liquid storage element 301 includes but is not limited to a stainless steel barrel; the sixth delivery pipeline element includes but is not limited to a stainless steel tube; the seventh delivery pipeline element includes but is not limited to a stainless steel tube; the eighth delivery pipeline element includes but is not limited to a stainless steel tube; and the ninth delivery pipeline element includes but is not limited to a stainless steel tube.

[0101] Furthermore, the third liquid storage unit 300 further includes an eighth control valve element 302, a ninth control valve element 303, a tenth control valve element 304 and an eleventh control valve element 305. The eighth control valve element 302 is disposed on the sixth delivery pipeline element to control the circulation of the sixth delivery pipeline element; the ninth control valve element 303 is disposed on the seventh delivery pipeline element to control the circulation of the seventh delivery pipeline element; the tenth control valve element 304 is disposed on the eighth delivery pipeline element to control the circulation of the eighth delivery pipeline element; and the eleventh control valve element 305 is disposed on the ninth delivery pipeline element to control the circulation of the ninth delivery pipeline element.

[0102] Specifically, the eighth control valve element 302 includes a twelfth pneumatic diaphragm valve, wherein the twelfth pneumatic diaphragm valve is disposed in the sixth delivery pipeline element, and is used to automatically control the flow between the sixth delivery pipeline element and the third liquid storage element 301 .

[0103] Specifically, the ninth control valve element 303 includes a thirteenth pneumatic diaphragm valve, a fourteenth pneumatic diaphragm valve and a fifteenth pneumatic diaphragm valve. The thirteenth pneumatic diaphragm valve is arranged on the seventh delivery pipeline element, and is used to automatically control the flow between the seventh delivery pipeline element and the third liquid storage element 301; the fourteenth pneumatic diaphragm valve is arranged on the seventh delivery pipeline element, and is located downstream of the thirteenth pneumatic diaphragm valve; the fifteenth pneumatic diaphragm valve is arranged on the seventh delivery pipeline element, and is located downstream of the fourteenth pneumatic diaphragm valve, and is used to automatically control the flow between the seventh delivery pipeline element and the second delivery pipeline element.

[0104] Specifically, the tenth control valve element 304 includes a sixteenth pneumatic diaphragm valve, wherein the sixteenth pneumatic diaphragm valve is disposed on the eighth delivery pipeline element, and is used to automatically control the flow between the seventh delivery pipeline element and the eighth delivery pipeline element.

[0105] Specifically, the eleventh control valve element 305 includes a seventeenth pneumatic diaphragm valve, wherein the seventeenth pneumatic diaphragm valve is disposed on the ninth delivery pipeline element, and is used to automatically control the flow between the ninth delivery pipeline element and the fifth delivery pipeline element.

[0106] It should be noted that the number of the eleventh control valve element 305 matches the number of the ninth delivery pipeline element. It should be understood that the number of the eleventh control valve element 305 is the same as the number of the ninth delivery pipeline element.

[0107] Furthermore, the third liquid storage unit 300 further includes a fifth pressure monitoring element 306 and a third weight monitoring element. The fifth pressure monitoring element 306 is connected to the sixth delivery pipeline element and is used to monitor the pressure inside the sixth delivery pipeline element; the third weight monitoring element is disposed at the bottom of the third liquid storage element 301 and is used to monitor the weight of the third liquid storage element 301.

[0108] Specifically, the connection point between the fifth pressure monitoring element 306 and the sixth delivery pipeline element is located upstream of the twelfth pneumatic diaphragm valve.

[0109] In some of the embodiments, the fifth pressure monitoring element 306 includes but is not limited to a pressure sensor; the third weight monitoring element includes but is not limited to a scale.

[0110] like Figure 5 As shown, the fourth liquid storage unit 400 includes a fourth liquid storage element 401 and a tenth delivery pipeline element. The fourth liquid storage element 401 is connected to the first liquid storage unit 100 and the second liquid storage unit 200 through pipelines, respectively, for storing waste liquid; the tenth delivery pipeline element is connected to the fourth liquid storage element 401, the first liquid storage unit 100, the second liquid storage unit 200, and the first purge gas supply unit 700, respectively, for delivering liquid.

[0111] Specifically, the first end of the tenth delivery pipeline element has two branch pipelines, which are respectively connected to the second delivery pipeline element, the fifth delivery pipeline element, and the first purge gas supply unit 700, and the connection point between one branch pipeline and the second delivery pipeline element is located between the second pressure monitoring element 106 and the third pneumatic diaphragm valve, and the connection point between the other branch pipeline and the fifth delivery pipeline element is located between the fourth pressure monitoring element 207 and the ninth pneumatic diaphragm valve.

[0112] It should be noted that the second end of the tenth delivery pipeline element extends into the interior of the fourth liquid storage element 401 and extends to a position close to the top wall inside the fourth liquid storage element 401 .

[0113] In some of the embodiments, the fourth liquid storage element 401 includes but is not limited to a stainless steel barrel; the tenth delivery pipeline element includes but is not limited to a stainless steel pipe.

[0114] Furthermore, the fourth liquid storage unit 400 further includes a twelfth control valve element 402. The twelfth control valve element 402 is disposed in the tenth delivery pipeline element, and is used to control the flow of the tenth delivery pipeline element.

[0115] Specifically, the tenth control valve element 304 includes an eighteenth pneumatic diaphragm valve, a nineteenth pneumatic diaphragm valve, a twentieth pneumatic diaphragm valve, and a twenty-first pneumatic diaphragm valve. The eighteenth pneumatic diaphragm valve is arranged on the tenth conveying pipeline element, and is used to automatically control the flow between the tenth conveying pipeline element and the second conveying pipeline element; the nineteenth pneumatic diaphragm valve is arranged on the tenth conveying pipeline element, and is used to automatically control the flow between the tenth conveying pipeline element and the fifth conveying pipeline element; the twentieth pneumatic diaphragm valve is arranged on the tenth conveying pipeline element; the twenty-first pneumatic diaphragm valve is arranged on the tenth conveying pipeline element, and is located downstream of the twentieth pneumatic diaphragm valve, and is used to automatically control the flow between the tenth conveying pipeline element and the fourth liquid storage element 401.

[0116] Furthermore, the fourth liquid storage unit 400 further includes a sixth pressure monitoring element 403 and a fourth weight monitoring element. The sixth pressure monitoring element 403 is connected to the tenth delivery pipeline element and is used to monitor the pressure inside the tenth delivery pipeline element; the fourth weight monitoring element is arranged at the bottom of the fourth liquid storage element 401 and is used to monitor the weight of the fourth liquid storage element 401.

[0117] Specifically, the connection point between the sixth pressure monitoring element 403 and the tenth delivery pipeline element is located between the eighteenth pneumatic diaphragm valve and the nineteenth pneumatic diaphragm valve.

[0118] In some of the embodiments, the sixth pressure monitoring element 403 includes but is not limited to a pressure sensor; the fourth weight monitoring element includes but is not limited to a scale.

[0119] like Figure 6 As shown, the first power gas supply unit 500 includes a first power gas supply element. The first power gas supply element is connected to the first power gas source and the first liquid storage unit 100 through pipelines, and is used to supply the first power gas to the first liquid storage unit 100 so that the liquid source of the first liquid storage unit 100 flows to the second liquid storage unit 200.

[0120] Specifically, the first end of the first motive gas supply element is in communication with the first motive gas source, and the second end of the first motive gas supply element is in communication with the first end of the first delivery pipeline element.

[0121] In some of the embodiments, the first motive gas supply element includes, but is not limited to, a stainless steel tube.

[0122] Furthermore, the first power gas supply unit 500 further includes a thirteenth control valve element 501. The thirteenth control valve element 501 is disposed in the first power gas supply element and is used to control the flow of the first power gas supply element.

[0123] Specifically, the thirteenth control valve element 501 includes a fourth manual diaphragm valve, a first one-way valve, a fifth manual diaphragm valve and a twenty-second pneumatic diaphragm valve. Among them, the fourth manual diaphragm valve is arranged on the first power gas supply element, and is used to manually control the flow between the first power gas supply element and the first power gas source; the first one-way valve is arranged on the first power gas supply element and is located downstream of the fourth manual diaphragm valve, and is used to make the gas inside the first power gas supply element flow in one direction; the fifth manual diaphragm valve is arranged on the first power gas supply element and is located downstream of the fourth manual diaphragm valve; the twenty-second pneumatic diaphragm valve is arranged on the first power gas supply element and is located downstream of the fifth manual diaphragm valve, and is used to automatically control the flow between the first power gas supply element and the first delivery pipeline element.

[0124] Furthermore, the first power gas supply unit 500 further includes a first pressure regulating element 502 and a seventh pressure monitoring element 503. The first pressure regulating element 502 is disposed in the first power gas supply element for regulating the pressure inside the first power gas supply element; the seventh pressure monitoring element 503 and the first power gas supply element are used to monitor the pressure inside the first power gas supply element.

[0125] Specifically, the first pressure regulating element 502 is located downstream of the first one-way valve and upstream of the fifth manual diaphragm valve; the connection point between the seventh pressure monitoring element 503 and the first power gas supply element is located downstream of the first pressure regulating element 502 and upstream of the fifth manual diaphragm valve.

[0126] In some of the embodiments, the first pressure regulating element 502 includes but is not limited to a pressure regulating valve; the seventh pressure monitoring element 503 includes but is not limited to a pressure sensor.

[0127] like Figure 7 As shown, the second power gas supply unit 600 includes a second power gas supply element, which is connected to the second power gas source and the second liquid storage unit 200 through pipelines, and is used to supply the second power gas to the second liquid storage unit 200 so that the liquid source of the second liquid storage unit 200 flows to the process equipment.

[0128] Specifically, a first end of the second power gas supply element is in communication with the second power gas source, and a second end of the second power gas supply element is in communication with the fourth delivery pipeline element.

[0129] In some of the embodiments, the second motive gas supply element includes, but is not limited to, a stainless steel tube.

[0130] Furthermore, the second power gas supply unit 600 further includes a fourteenth control valve element 601. The fourteenth control valve element 601 is disposed in the second power gas supply element and is used to control the flow of the second power gas supply element.

[0131] Specifically, the fourteenth control valve element 601 includes a sixth manual diaphragm valve, a second one-way valve, a seventh manual diaphragm valve and a twenty-third pneumatic diaphragm valve. Among them, the sixth manual diaphragm valve is arranged on the second power gas supply element, and is used to manually control the flow between the second power gas supply element and the second power gas source; the second one-way valve is arranged on the second power gas supply element, and is located downstream of the sixth manual diaphragm valve, and is used to make the gas inside the second power gas supply element flow in one direction; the seventh manual diaphragm valve is arranged on the second power gas supply element, and is located downstream of the second one-way valve; the twenty-third pneumatic diaphragm valve is arranged on the second power gas supply element, and is located downstream of the seventh manual diaphragm valve, and is used to automatically control the flow between the second power gas supply element and the fourth delivery pipeline element.

[0132] Furthermore, the second power gas supply unit 600 further includes a second pressure regulating element 602 and an eighth pressure monitoring element 603. The second pressure regulating element 602 is disposed on the second power gas supply element for regulating the pressure of the second power gas supply element; the eighth pressure monitoring element 603 and the second power gas supply element are used to monitor the pressure of the second power gas supply element.

[0133] Specifically, the second pressure regulating element 602 is located downstream of the second one-way valve and upstream of the seventh manual diaphragm valve; the connection point between the eighth pressure monitoring element 603 and the second power gas supply element is located downstream of the second pressure regulating element 602 and upstream of the seventh manual diaphragm valve.

[0134] In some embodiments, the second pressure regulating element 602 includes but is not limited to a pressure regulating valve; the eighth pressure monitoring element 603 includes but is not limited to a pressure sensor.

[0135] like Figure 8As shown, the first purge gas supply unit 700 includes a first purge pipeline element, a second purge pipeline element, a third purge pipeline element, a fourth purge pipeline element, a fifth purge pipeline element and a sixth purge pipeline element. The first purge pipeline element is connected to the first purge gas source and is used to deliver the first purge gas; the second purge pipeline element is connected to the first purge pipeline element and the first liquid storage unit 100, respectively, and is used to deliver the first purge gas to the first liquid storage unit 100 so as to press the liquid source in the pipeline into the first liquid storage unit 100; the third purge pipeline element is connected to the first purge pipeline element and the second liquid storage element 201 of the second liquid storage unit 200, respectively, and is used to deliver the first purge gas to the second liquid storage element 201 so as to press the liquid source in the pipeline into the second liquid storage unit 200; the fourth purge pipeline element is connected to the first purge pipeline element and the second liquid storage element 202 of the second liquid storage unit 200, respectively, and is used to deliver the first purge gas to the second liquid storage element 201 so as to press the liquid source in the pipeline into the second liquid storage unit 200; the fifth purge pipeline element is connected to the first purge pipeline element and the second liquid storage element 203 of the second liquid storage unit 200, respectively, and is used to deliver the first purge gas to ... The first purge pipeline element is connected to the third liquid storage unit 300 and is used to transport the first purge gas to the third liquid storage unit 300 so as to fluidize the dissolved liquid in the pipeline into the third liquid storage unit 300; the fifth purge pipeline element is connected to the first purge pipeline element and the fourth liquid storage unit 400 respectively, and is used to transport the first purge gas to the fourth liquid storage unit 400 so as to fluidize the waste liquid in the pipeline into the fourth liquid storage unit 400; the sixth purge pipeline element is connected to the first purge pipeline element and the eighth delivery pipeline element of the third liquid storage unit 300 respectively, and is used to transport the first purge gas to the eighth delivery pipeline element so as to discharge the liquid in the third liquid storage unit 300.

[0136] Specifically, the first end of the first purge pipeline element is connected to the first purge gas source; the first end of the second purge pipeline element is connected to the second end of the first purge pipeline element, and the second end of the second purge pipeline element is respectively connected to the first end of the first delivery pipeline element and the second delivery pipeline element, and the connection point between the second purge pipeline element and the second delivery pipeline element is located between the second pressure monitoring element 106 and the third pneumatic diaphragm valve; the first end of the third purge pipeline element is connected to the second end of the first purge pipeline element, and the second end of the third purge pipeline element is respectively connected to the first ends of the fourth delivery pipeline element and the fifth delivery pipeline element, and the connection point between the third purge pipeline element and the fifth delivery pipeline element is located between the fourth pressure monitoring element 207 and the ninth pneumatic diaphragm valve. valves; the first end of the fourth purge pipeline element is connected to the second end of the first purge pipeline element, and the second end of the fourth purge pipeline element is connected to the first end of the sixth delivery pipeline element and the seventh delivery pipeline element respectively, and the connecting point between the fourth purge pipeline element and the seventh delivery pipeline element is located between the thirteenth pneumatic diaphragm valve and the fourteenth pneumatic diaphragm valve; the first end of the fifth purge pipeline element is connected to the second end of the first purge pipeline element, and the second end of the fifth purge pipeline element is connected to the tenth delivery pipeline element, and the connecting point is located between the sixth pressure monitoring element 403 and the nineteenth pneumatic diaphragm valve; the first end of the sixth purge pipeline element is connected to the second end of the first purge pipeline element, and the second end of the sixth purge pipeline element is connected to the ninth delivery pipeline element.

[0137] In some of the embodiments, the first purge pipeline element includes but is not limited to a stainless steel tube; the second purge pipeline element includes but is not limited to a stainless steel tube; the third purge pipeline element includes but is not limited to a stainless steel tube; the fourth purge pipeline element includes but is not limited to a stainless steel tube; the fifth purge pipeline element includes but is not limited to a stainless steel tube; and the sixth purge pipeline element includes but is not limited to a stainless steel tube.

[0138] Further, the first purge gas supply unit 700 further includes a fifteenth control valve element 701, a sixteenth control valve element 702, a seventeenth control valve element 703, an eighteenth control valve element 704 and a nineteenth control valve element 705. Among them, the fifteenth control valve element 701 is arranged on the first purge pipeline element, and is used to control the circulation of the first purge pipeline element; the sixteenth control valve element 702 is arranged on the third purge pipeline element, and is used to control the circulation of the third purge pipeline element; the seventeenth control valve element 703 is arranged on the fourth purge pipeline element, and is used to control the circulation of the fourth purge pipeline element; the eighteenth control valve element 704 is arranged on the fifth purge pipeline element, and is used to control the circulation of the fifth purge pipeline element; the nineteenth control valve element 705 is arranged on the fifth purge pipeline element, and is used to control the circulation of the fifth purge pipeline element.

[0139] Specifically, the fifteenth control valve element 701 includes a twenty-fourth pneumatic diaphragm valve and a third one-way valve. The twenty-fourth pneumatic diaphragm valve is disposed in the first purge pipeline element, and is used to automatically control the flow of the first purge gas source and the first purge pipeline element; the third one-way valve is disposed in the first purge pipeline element, and is located downstream of the twenty-fourth pneumatic diaphragm valve, and is used to make the gas in the first purge pipeline element flow in one direction.

[0140] Specifically, the sixteenth control valve element 702 includes a twenty-fifth pneumatic diaphragm valve, a twenty-sixth pneumatic diaphragm valve and a twenty-seventh pneumatic diaphragm valve. The twenty-fifth pneumatic diaphragm valve is arranged on the second purge pipeline element; the twenty-sixth driving diaphragm valve is arranged on the second purge pipeline element and is located downstream of the twenty-fifth pneumatic diaphragm valve, and is used to automatically control the flow between the second purge pipeline element and the first delivery pipeline element; the twenty-seventh pneumatic diaphragm valve is arranged on the second purge pipeline element and is located downstream of the twenty-fifth pneumatic diaphragm valve, and is used to automatically control the flow between the second purge pipeline element and the second delivery pipeline element.

[0141] Specifically, the seventeenth control valve element 703 includes a twenty-eighth pneumatic diaphragm valve, a twenty-ninth pneumatic diaphragm valve and a thirtieth pneumatic diaphragm valve. The twenty-eighth pneumatic diaphragm valve is arranged on the third purge pipeline element; the twenty-ninth pneumatic diaphragm valve is arranged on the third purge pipeline element and is located downstream of the twenty-eighth pneumatic diaphragm valve, and is used to automatically control the flow between the third purge pipeline element and the fourth delivery pipeline element; the thirtieth pneumatic diaphragm valve is arranged on the third purge pipeline element and is located downstream of the twenty-eighth pneumatic diaphragm valve, and is used to automatically control the flow between the third purge pipeline element and the fifth delivery pipeline element.

[0142] Specifically, the eighteenth control valve element 704 includes a thirty-first pneumatic diaphragm valve, a thirty-second pneumatic diaphragm valve and a thirty-third pneumatic diaphragm valve. The thirty-first pneumatic diaphragm valve is arranged on the fourth purge pipeline element; the thirty-second pneumatic diaphragm valve is arranged on the fourth purge pipeline element and is located downstream of the thirty-first pneumatic diaphragm valve, and is used to automatically control the flow of the fourth purge pipeline element and the sixth delivery pipeline element; the thirty-second pneumatic diaphragm valve is arranged on the fourth purge pipeline element and is located downstream of the thirty-first pneumatic diaphragm valve, and is used to automatically control the flow of the fourth purge pipeline element and the seventh delivery pipeline element.

[0143] Specifically, the nineteenth control valve element 705 includes a thirty-fourth pneumatic diaphragm valve and a thirty-fifth pneumatic diaphragm valve. The thirty-fourth pneumatic diaphragm valve is disposed on the fifth purge pipeline element; the thirty-fifth pneumatic diaphragm valve is disposed on the fifth purge pipeline element and is located downstream of the thirty-fourth pneumatic diaphragm valve, and is used to automatically control the flow of the fifth purge pipeline element and the tenth delivery pipeline element.

[0144] In addition, in order to make the gas in the sixth purge pipeline element flow in one direction, a one-way valve is provided on the sixth purge pipeline element.

[0145] Furthermore, the first purge gas supply unit 700 further includes a micro-leakage regulating element 706, a third pressure regulating element 707 and a ninth pressure monitoring element 708. The micro-leakage regulating element 706 is disposed in the first purge pipeline element for micro-leaking the first purge gas; the third pressure regulating element 707 is disposed in the first purge pipeline element for regulating the pressure of the first purge pipeline element; the ninth pressure monitoring element 708 and the first purge pipeline element are used to monitor the pressure of the first purge pipeline element.

[0146] Specifically, the micro-leakage regulating element 706 is located between the twenty-fourth pneumatic diaphragm valve and the third one-way valve; the third pressure regulating element 707 is located downstream of the third one-way valve; and the connection point between the ninth pressure monitoring element 708 and the first purge pipeline element is located downstream of the third pressure regulating element 707.

[0147] In some of the embodiments, the micro-leakage regulating element 706 includes but is not limited to a pneumatic micro-leakage valve; the third pressure regulating element 707 includes but is not limited to a pressure regulating valve; and the ninth pressure monitoring element 708 includes but is not limited to a pressure sensor.

[0148] like Fig. 9 As shown, the second purge gas supply unit 800 includes a seventh purge pipeline element. The seventh purge pipeline element is respectively connected to the second purge gas source and the third liquid storage unit 300, and is used to transport the first purge gas to the third liquid storage unit 300 to force the solution into the pipeline, the first liquid storage unit 100, and the second liquid storage unit 200, so that the solution cleans the pipeline, the first liquid storage unit 100, and the second liquid storage unit 200.

[0149] Specifically, the first end of the seventh purge pipeline element is in communication with the second purge gas source, and the second end of the seventh purge pipeline element is in communication with the first end of the sixth delivery pipeline element.

[0150] In some of the embodiments, the seventh purge line element includes, but is not limited to, a stainless steel tube.

[0151] Furthermore, the second purge gas supply unit 800 further includes a twentieth control valve element 801. The twentieth control valve element 801 is disposed in the seventh purge pipeline element, and is used to control the flow of the seventh purge pipeline element.

[0152] Specifically, the twentieth control valve element 801 includes an eighth manual diaphragm valve, a fourth one-way valve and a thirty-sixth pneumatic diaphragm valve. The eighth manual diaphragm valve is arranged in the seventh purge pipeline element, and is used to manually control the flow between the seventh purge pipeline element and the second purge gas source; the fourth one-way valve is arranged in the seventh purge pipeline element, and is located downstream of the eighth manual diaphragm valve, and is used to make the gas in the seventh purge pipeline element flow in one direction; the thirty-sixth pneumatic diaphragm valve is arranged in the seventh purge pipeline element, and is located downstream of the fourth one-way valve, and is used to automatically control the flow between the seventh purge pipeline element and the sixth delivery pipeline element.

[0153] Furthermore, the second purge gas supply unit 800 further includes a fourth pressure regulating element 802 and a tenth pressure monitoring element 803. The fourth pressure regulating element 802 is disposed in the seventh purge pipeline element for regulating the pressure inside the seventh purge pipeline element; the tenth pressure monitoring element 803 is connected to the seventh purge pipeline element for monitoring the pressure inside the seventh purge pipeline element.

[0154] Specifically, the fourth pressure regulating element 802 is located between the fourth one-way valve and the thirty-sixth pneumatic diaphragm valve; the connection point between the tenth pressure monitoring element 803 and the seventh purge pipeline element is located between the fourth pressure regulating element 802 and the thirty-sixth pneumatic diaphragm valve.

[0155] In some of the embodiments, the fourth pressure regulating element 802 includes but is not limited to a pressure regulating valve; the tenth pressure monitoring element 803 includes but is not limited to a pressure sensor.

[0156] like Fig.10 As shown, the first vacuum unit 900 includes a first exhaust pipeline element, a first vacuum pipeline element, a second vacuum pipeline element, a third vacuum pipeline element and a fourth vacuum pipeline element. The first exhaust pipeline element is connected to the exhaust gas treatment device for conveying exhaust gas; the first vacuum pipeline element is connected to the first liquid storage unit 100, the first exhaust pipeline element and the vacuum generator respectively, for vacuum treatment of the first liquid storage unit 100; the second vacuum pipeline element is connected to the second liquid storage unit 200, the first exhaust pipeline element and the first vacuum pipeline element respectively, for vacuum treatment of the second liquid storage unit 200; the third vacuum pipeline element is connected to the third liquid storage unit 300, the first exhaust pipeline element and the first vacuum pipeline element respectively, for vacuum treatment of the third liquid storage unit 300; the fourth vacuum pipeline element is connected to the fourth liquid storage unit 400, the first exhaust pipeline element and the first vacuum pipeline element respectively, for vacuum treatment of the fourth liquid storage unit 400.

[0157] Specifically, the first end of the first exhaust pipeline element is connected to the vacuum generating device; the first end of the first vacuum pipeline element is connected to the second end of the first exhaust pipeline element, the second end of the first vacuum pipeline element is connected to the second purge pipeline element, and the connection point is located between the twenty-sixth pneumatic diaphragm valve and the twenty-seventh pneumatic diaphragm valve; the first end of the second vacuum pipeline element is connected to the second end of the first exhaust pipeline element, the second end of the second vacuum pipeline element is connected to the third purge pipeline element, and the connection point is located between the twenty-ninth pneumatic diaphragm valve and the thirtieth pneumatic diaphragm valve; the first end of the third vacuum pipeline element is connected to the first exhaust pipeline element, the second end of the third vacuum pipeline element is connected to the fourth purge pipeline element, and the connection point is located between the thirty-second pneumatic diaphragm valve and the thirty-third pneumatic diaphragm valve; the first end of the fourth vacuum pipeline element is connected to the first exhaust pipeline element, the second end of the fourth vacuum pipeline element is connected to the fifth purge pipeline element, and the connection point is located upstream of the thirty-fifth pneumatic diaphragm valve.

[0158] In some of the embodiments, the first exhaust pipeline component includes but is not limited to a stainless steel tube; the first vacuum pipeline component includes but is not limited to a stainless steel tube; the second vacuum pipeline component includes but is not limited to a stainless steel tube; the third vacuum pipeline component includes but is not limited to a stainless steel tube; and the fourth vacuum pipeline component includes but is not limited to a stainless steel tube.

[0159] Furthermore, the first vacuum unit 900 further includes a twenty-first control valve element 901, a twenty-second control valve element 902, a twenty-third control valve element 903, a twenty-fourth control valve element 904, and a twenty-fifth control valve element 905. The twenty-first control valve element 901 is disposed in the first exhaust pipeline element to control the circulation of the first exhaust pipeline element; the twenty-second control valve element 902 is disposed in the first vacuum pipeline element to control the circulation of the first vacuum pipeline element; the twenty-third control valve element 903 is disposed in the second vacuum pipeline element to control the circulation of the second vacuum pipeline element; the twenty-fourth control valve element 904 is disposed in the third vacuum pipeline element to control the circulation of the third vacuum pipeline element; and the twenty-fifth control valve element 905 is disposed in the fourth vacuum pipeline element to control the circulation of the fourth vacuum pipeline element.

[0160] Specifically, the twenty-first control valve element 901 includes a thirty-seventh pneumatic diaphragm valve. The thirty-seventh pneumatic diaphragm valve is disposed in the first exhaust pipeline element and is used to automatically control the flow between the first exhaust pipeline element and the exhaust gas treatment device.

[0161] Specifically, the twenty-second control valve component 902 includes a thirty-eighth pneumatic diaphragm valve, wherein the thirty-eighth pneumatic diaphragm valve is disposed on the first vacuum pipeline component and is used to automatically control the flow between the first exhaust pipeline component and the first vacuum pipeline component.

[0162] Specifically, the twenty-third control valve component 903 includes a thirty-ninth pneumatic diaphragm valve, wherein the thirty-ninth pneumatic diaphragm valve is disposed on the second vacuum pipeline component, and is used to automatically control the flow between the first exhaust pipeline component and the second vacuum pipeline component.

[0163] Specifically, the twenty-fourth control valve component 904 includes a fortieth pneumatic diaphragm valve, wherein the fortieth pneumatic diaphragm valve is disposed on the third vacuum pipeline component, and is used to automatically control the flow between the first exhaust pipeline component and the third vacuum pipeline component.

[0164] Specifically, the twenty-fifth control valve component 905 includes a forty-first pneumatic diaphragm valve. The forty-first pneumatic diaphragm valve is disposed on the fourth vacuum pipeline component and is used to automatically control the flow between the first exhaust pipeline component and the fourth vacuum pipeline component.

[0165] Furthermore, the first vacuum unit 900 further includes an eleventh pressure monitoring element 906. The eleventh pressure monitoring element 906 is communicated with the first exhaust pipeline element and is used to monitor the pressure of the first exhaust pipeline element.

[0166] Specifically, the connection point between the eleventh pressure monitoring element 906 and the first exhaust line element is located downstream of the thirty-sixth pneumatic diaphragm valve.

[0167] In some of these embodiments, the eleventh pressure monitoring element 906 includes but is not limited to a pressure sensor.

[0168] The method of using this embodiment is as follows:

[0169] (I) Liquid source transportation

[0170] Manually opening the fourth manual diaphragm valve to allow the first power gas from the first power gas source to flow to the first power gas supply element;

[0171] The system turns on the first pressure regulating element 502 to regulate the pressure of the first power gas in the first power gas supply element, so that the gas pressure in the first power gas supply element meets the standard;

[0172] When the air pressure detected by the seventh pressure monitoring element 503 meets the standard, the fifth manual diaphragm valve is manually opened and the system automatically opens the twenty-second pneumatic diaphragm valve, so that the first power gas supply element and the first delivery pipeline element are in communication;

[0173] The system opens the first pneumatic diaphragm valve, so that the first delivery pipeline element is connected to the first liquid storage element 101, so that the first power gas enters the first liquid storage element 101;

[0174] The system opens the second pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve and the fifth pneumatic diaphragm valve and manually opens the first manual diaphragm valve, so that the second delivery pipeline element is connected with the first liquid storage element 101 and the second liquid storage element 201, so that the liquid source inside the first liquid storage element 101 enters the second liquid storage element 201 through the second delivery pipeline element under the action of the first power gas, thereby buffering the liquid source;

[0175] Manually opening the sixth manual diaphragm valve to allow the second power gas from the second power gas source to flow to the second power gas supply element;

[0176] The system turns on the second pressure regulating element 602 to regulate the pressure of the second power gas in the second power gas supply element, so that the gas pressure in the second power gas supply element meets the standard;

[0177] When the air pressure monitored by the eighth pressure monitoring element 603 meets the standard, the seventh manual diaphragm valve is manually opened and the system automatically opens the twenty-third pneumatic diaphragm valve, so that the second power gas supply element and the fourth delivery pipeline element are in communication;

[0178] The system opens the seventh pneumatic diaphragm valve, so that the third delivery pipeline element is connected to the second liquid storage element 201, so that the second power gas enters the second liquid storage element 201;

[0179] The second manual diaphragm valve and the third manual diaphragm valve are manually opened and the system automatically opens the eighth pneumatic diaphragm valve, the ninth pneumatic diaphragm valve and the tenth pneumatic diaphragm valve, so that the liquid source inside the second liquid storage element 201 enters the process equipment through the fourth delivery pipeline element and the fifth delivery pipeline element.

[0180] (II) Cleaning the first liquid storage unit 100

[0181] The system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline component;

[0182] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0183] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0184] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve and the twenty-seventh pneumatic diaphragm valve, so that the first purge gas can enter the first liquid storage element 101 through the second purge pipeline element and the second delivery pipeline element, and then the liquid source in the second delivery pipeline element can be pressed into the first liquid storage element 101;

[0185] Manually opening the eighth manual diaphragm valve to allow the second purge gas from the second purge gas source to enter the seventh purge pipeline component;

[0186] The system turns on the fourth pressure regulating element 802 to regulate the pressure of the second purge gas in the seventh purge pipeline element, so that the gas pressure in the seventh purge pipeline element meets the standard;

[0187] The system opens the thirty-sixth pneumatic diaphragm valve and the twelfth pneumatic diaphragm valve, so that the second purge gas can enter the third liquid storage element 301 through the seventh purge pipeline element and the sixth delivery pipeline element;

[0188] The system opens the thirteenth pneumatic diaphragm valve, the fourteenth pneumatic diaphragm valve and the fifteenth pneumatic diaphragm valve, so that the dissolved liquid in the third liquid storage element 301 can flow to the first liquid storage element 101 through the seventh delivery pipeline element, the second purge pipeline element and the second delivery pipeline element, so that the dissolved liquid can dissolve the residual liquid source in the first liquid storage element 101;

[0189] After sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline component;

[0190] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0191] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0192] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the eighteenth pneumatic diaphragm valve, the twentieth pneumatic diaphragm valve, and the twenty-first pneumatic diaphragm valve, so that the first purge gas can press the waste water in the first liquid storage element 101 into the fourth liquid storage element 401;

[0193] When the waste liquid in the first liquid storage element 101 is emptied, the system opens the sixth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve to discharge the gas in each pipeline;

[0194] When the exhaust operation is completed, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0195] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0196] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0197] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, and the sixth pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0198] After the purge is completed, the system opens the sixth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve to discharge the gas in each pipeline.

[0199] (III) Cleaning the second liquid storage element 201 of the second liquid storage unit 200

[0200] The system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline component;

[0201] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0202] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0203] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-ninth pneumatic diaphragm valve and the thirtieth pneumatic diaphragm valve, so that the first purge gas can enter the second liquid storage element 201 through the third purge pipeline element and the fourth delivery pipeline element, and then the solution in the fourth delivery pipeline element can be fluidized into the second liquid storage element 201;

[0204] Manually opening the eighth manual diaphragm valve to allow the second purge gas from the second purge gas source to enter the seventh purge pipeline component;

[0205] The system turns on the fourth pressure regulating element 802 to regulate the pressure of the second purge gas in the seventh purge pipeline element, so that the gas pressure in the seventh purge pipeline element meets the standard;

[0206] The system opens the thirty-sixth pneumatic diaphragm valve and the twelfth pneumatic diaphragm valve, so that the second purge gas can enter the third liquid storage element 301 through the seventh purge pipeline element and the sixth delivery pipeline element;

[0207] The system opens the thirteenth pneumatic diaphragm valve, the fourteenth pneumatic diaphragm valve, the fifteenth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, and the eleventh pneumatic diaphragm valve, so that the dissolved liquid in the third liquid storage element 301 can flow to the second liquid storage element 201 through the seventh delivery pipeline element, the second purge pipeline element, the second delivery pipeline element, the second bypass pipeline element, and the fourth delivery pipeline element, so that the dissolved liquid can dissolve the residual liquid source in the second liquid storage element 201;

[0208] After sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline component;

[0209] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0210] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0211] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the eleventh pneumatic diaphragm valve, the nineteenth pneumatic diaphragm valve, the twentieth pneumatic diaphragm valve, and the twenty-first pneumatic diaphragm valve, so that the first purge gas can press the waste water in the second liquid storage element 201 into the fourth liquid storage element 401;

[0212] When the waste liquid in the second liquid storage element 201 is emptied, the system opens the seventh pneumatic diaphragm valve, the eleventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, the thirty-eighth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the twenty-eighth pneumatic diaphragm valve, the twenty-ninth pneumatic diaphragm valve, and the thirtieth pneumatic diaphragm valve, thereby discharging the gas in the pipeline;

[0213] When the exhaust operation is completed, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0214] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0215] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0216] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the twenty-eighth pneumatic diaphragm valve, the twenty-ninth pneumatic diaphragm valve, and the thirtieth pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0217] After the purge is completed, the system opens the seventh pneumatic diaphragm valve, the eleventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, the thirty-eighth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the twenty-eighth pneumatic diaphragm valve, the twenty-ninth pneumatic diaphragm valve, and the thirtieth pneumatic diaphragm valve to discharge the gas in the pipeline.

[0218] (IV) Cleaning the fifth delivery pipeline element of the second liquid storage unit 200

[0219] The system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline component;

[0220] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0221] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0222] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the seventeenth pneumatic diaphragm valve and manually opens the third manual diaphragm valve, thereby discharging the liquid source in the fifth delivery pipeline element;

[0223] After the liquid source is completely discharged, manually opening the eighth manual diaphragm valve so that the second purge gas from the second purge gas source enters the seventh purge pipeline component;

[0224] The system turns on the fourth pressure regulating element 802 to regulate the pressure of the second purge gas in the seventh purge pipeline element, so that the gas pressure in the seventh purge pipeline element meets the standard;

[0225] The system opens the thirty-sixth pneumatic diaphragm valve and the twelfth pneumatic diaphragm valve, so that the second purge gas can enter the third liquid storage element 301 through the seventh purge pipeline element and the sixth delivery pipeline element;

[0226] The system opens the thirteenth pneumatic diaphragm valve, the fourteenth pneumatic diaphragm valve, the sixteenth pneumatic diaphragm valve, and the seventeenth pneumatic diaphragm valve, so that the dissolved liquid in the third liquid storage element 301 can flow to the fifth delivery pipeline element through the seventh delivery pipeline element, the eighth delivery pipeline element, and the ninth delivery pipeline element, so that the dissolved liquid can dissolve the residual liquid source in the fifth delivery pipeline element;

[0227] After sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline component;

[0228] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0229] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0230] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the seventeenth pneumatic diaphragm valve and manually opens the third manual diaphragm valve, thereby discharging the waste liquid in the fifth delivery pipeline element;

[0231] After the waste liquid is completely discharged, the gas in the pipeline is discharged.

[0232] (V) Cleaning the third liquid storage unit 300

[0233] The system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline component;

[0234] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0235] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0236] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the thirty-first pneumatic diaphragm valve and the thirty-third pneumatic diaphragm valve, so that the first purge gas can enter the third liquid storage element 301 through the fourth purge pipeline element and the seventh delivery pipeline element, and then the solution in the seventh delivery pipeline element can be fluidized into the third liquid storage element 301;

[0237] When the dissolved liquid in the pipeline is emptied, the system opens the twelfth pneumatic diaphragm valve, the thirteenth pneumatic diaphragm valve, the thirty-first pneumatic diaphragm valve, the thirty-second pneumatic diaphragm valve, the fortieth pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve to discharge the gas in the pipeline;

[0238] When the exhaust operation is completed, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0239] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0240] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0241] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the thirty-first pneumatic diaphragm valve, the thirty-second pneumatic diaphragm valve and the thirty-third pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0242] After the purge is completed, the system opens the twelfth pneumatic diaphragm valve, the thirteenth pneumatic diaphragm valve, the thirty-first pneumatic diaphragm valve, the thirty-second pneumatic diaphragm valve, the fortieth pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve to discharge the gas in the pipeline.

[0243] (VI) Cleaning the fourth liquid storage unit 400

[0244] The system opens the 41st pneumatic diaphragm valve, the 35th pneumatic diaphragm valve, and the 38th pneumatic diaphragm valve, thereby exhausting the gas in the pipeline;

[0245] When the gas in the pipeline is exhausted, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0246] The system turns on the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0247] The system turns on the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard;

[0248] When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the thirty-fourth pneumatic diaphragm valve and the thirty-fifth pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0249] After the purge is completed, the system opens the 41st pneumatic diaphragm valve, the 35th pneumatic diaphragm valve, and the 38th pneumatic diaphragm valve to exhaust the gas in the pipeline.

[0250] The advantage of this embodiment is that by connecting the first power gas supply unit with the first liquid storage unit, connecting the second power gas supply unit with the second liquid storage unit, connecting the first purge gas supply unit with the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, and connecting the second purge gas supply unit with the third liquid storage unit, the solution in the third liquid storage unit can be liquidated into the first liquid storage unit, the second liquid storage unit, and a plurality of pipelines, so that the first liquid storage unit, the second liquid storage unit, and a plurality of pipelines can be cleaned by the solution, so that the liquid source adhering to the pipe wall and remaining in the first liquid storage unit and the second liquid storage unit can be dissolved and discharged, thereby improving the cleanliness of the first liquid storage unit, the second liquid storage unit, and the plurality of pipelines.

[0251] Example 2

[0252] This embodiment is a variation of Embodiment 1.

[0253] like Fig.11As shown, the liquid source delivery system also includes a gas-liquid separation unit 1000 and a second vacuum unit 1100. The gas-liquid separation unit 1000 is respectively connected to the second liquid storage unit 200 and the process equipment through pipelines, and is located downstream of the second liquid storage unit 200, and is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit 200 to remove the gas in the liquid source and to deliver the liquid source after gas-liquid separation to the process equipment; the second vacuum unit 1100 is connected to the gas-liquid separation unit 1000, and is used to discharge the gas generated by the gas-liquid separation unit 1000.

[0254] like Fig.12 As shown, the gas-liquid separation unit 1000 includes a gas-liquid separation element 1001 and a third bypass pipeline element. The gas-liquid separation element 1001 is connected to the second liquid storage unit 200 and is located downstream of the second liquid storage unit 200, and is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit 200 to remove the gas in the liquid source, and flow the liquid source subjected to gas-liquid separation to the process equipment; the first end of the third bypass pipeline element is connected to the pipeline connecting the gas-liquid separation element 1001 and the second liquid storage unit 200, and the second end of the third bypass pipeline element is connected to the pipeline connecting the gas-liquid separation element 1001 and the process equipment, and is used to protect the entire pipeline.

[0255] Specifically, the gas-liquid separation element 1001 is arranged in the fourth conveying pipeline element and is located downstream of the fourth pressure monitoring element 207 and upstream of the ninth pneumatic diaphragm valve; the connection point between the first end of the third bypass pipeline element and the fourth conveying pipeline element is located between the fourth pressure monitoring element 207 and the gas-liquid separation element 1001, and the connection point between the second end of the third bypass pipeline element and the fourth conveying pipeline element is located between the ninth pneumatic diaphragm valve and the gas-liquid separation element 1001.

[0256] In some of the embodiments, the gas-liquid separation element 1001 includes but is not limited to a gas-liquid separator; the third bypass pipeline element includes but is not limited to a stainless steel pipe.

[0257] Furthermore, the gas-liquid separation unit 1000 further includes a twenty-sixth control valve element 1002 and a twenty-seventh control valve element 1003. The twenty-sixth control valve element 1002 is disposed in a pipeline connected to the gas-liquid separation element 1001, and is used to control the flow between the gas-liquid separation element 1001 and the second liquid storage unit 200 and the process equipment; the twenty-seventh control valve element 1003 is disposed in the third bypass pipeline element, and is used to control the flow of the third bypass pipeline element.

[0258] Specifically, the twenty-sixth control valve element 1002 includes a forty-second pneumatic diaphragm valve and a forty-third pneumatic diaphragm valve. The forty-second pneumatic diaphragm valve is disposed on the fourth delivery pipeline element and is located between the gas-liquid separation element 1001, the first end of the third bypass pipeline element and the connection point of the fourth delivery pipeline element; the forty-third pneumatic diaphragm valve is disposed on the fourth delivery pipeline element and is located between the gas-liquid separation element 1001, the second end of the third bypass pipeline element and the fourth delivery pipeline element.

[0259] Specifically, the twenty-seventh control valve element 1003 includes a forty-fourth pneumatic diaphragm valve and a forty-fifth pneumatic diaphragm valve, wherein the forty-fourth pneumatic diaphragm valve is disposed at the first end of the third bypass line element, and the forty-fifth pneumatic diaphragm valve is disposed at the second end of the third bypass line element.

[0260] like Fig.12 As shown, the second vacuum unit 1100 includes a fifth vacuum pipeline element, wherein the fifth vacuum pipeline element is connected to the vacuum generating device and the gas-liquid separation unit 1000 respectively, and is used to discharge the gas generated by the gas-liquid separation unit 1000.

[0261] Specifically, the first end of the fifth vacuum line component is communicated with the vacuum generator, and the second end of the fifth vacuum line component is communicated with the gas-liquid separation component 1001 .

[0262] In some of these embodiments, the fifth vacuum line component includes, but is not limited to, a stainless steel tube.

[0263] Furthermore, the second vacuum unit 1100 includes a twenty-eighth control valve element 1101 and a twelfth pressure monitoring element 1102. The twenty-eighth control valve element 1101 is disposed in the fifth vacuum pipeline element for controlling the flow of the fifth vacuum pipeline element; the twelfth pressure monitoring element 1102 is connected to the fifth vacuum pipeline element for monitoring the pressure inside the fifth vacuum pipeline element.

[0264] Specifically, the twenty-eighth control valve element 1101 includes a forty-sixth pneumatic diaphragm valve and a ninth manual diaphragm valve. The forty-sixth pneumatic diaphragm valve is disposed in the fifth vacuum pipeline element; the ninth manual diaphragm valve is disposed in the connecting pipeline between the twelfth pressure monitoring element 1102 and the fifth vacuum pipeline element, and is located upstream of the forty-sixth pneumatic diaphragm valve.

[0265] In some of the embodiments, the twelfth pressure monitoring element 1102 includes but is not limited to a pressure sensor.

[0266] The method of using this embodiment is as follows:

[0267] When the fourth delivery pipeline element delivers the liquid source to the process equipment, the system opens the 42nd pneumatic diaphragm valve and the 43rd pneumatic diaphragm valve to allow the front and rear ends of the gas-liquid separation element 1001 to flow, thereby allowing the gas-liquid separation element 1001 to separate the gas in the liquid source;

[0268] While the gas-liquid separation element 1001 is working, the system opens the 46th pneumatic diaphragm valve, so that the vacuum generator can discharge the gas generated by the gas-liquid separation element 1001 through the fifth vacuum pipeline element;

[0269] When the gas-liquid separation element 1001 fails to work normally, the system opens the 44th pneumatic diaphragm valve and the 45th pneumatic diaphragm valve to allow the liquid source in the fourth delivery pipeline element to be delivered to the process equipment through the third bypass pipeline element.

[0270] The advantage of this embodiment is that, by providing the gas-liquid separation unit and the second vacuum unit, the liquid source output by the second liquid storage unit can be separated into gas and liquid, thereby improving the purity of the liquid source.

[0271] Example 3

[0272] This embodiment is a variation of Embodiments 1 to 2.

[0273] like Fig.13 As shown, the liquid source delivery system further includes a volatilization unit 1200 and a third vacuum unit 1300. The volatilization unit 1200 is respectively connected to the fourth liquid storage unit 400 and the exhaust device to discharge the volatilized liquid in the pipeline and the fourth liquid storage unit 400; the third vacuum unit 1300 is connected to the first vacuum unit 900 to accelerate the volatilization of the liquid.

[0274] like Fig.14 As shown, the volatilization unit 1200 includes a first volatilization pipeline element and a second volatilization pipeline element. The first volatilization pipeline element is respectively connected to the fourth liquid storage unit 400 and the exhaust device, and is used to volatilize and discharge the liquid inside the fourth liquid storage unit 400; the second volatilization pipeline element is respectively connected to the first volatilization pipeline element and the third liquid storage unit 300, and is used to volatilize and discharge the liquid inside the pipeline.

[0275] Specifically, the first end of the first volatile pipeline element is connected to the fourth liquid storage element 401, and the second end of the first volatile pipeline element is connected to the exhaust gas treatment equipment; the first end of the second volatile pipeline element is connected to the first volatile pipeline element, and the second end of the second volatile pipeline element is connected to the seventh delivery pipeline element, and the connection point is located between the fourteenth pneumatic diaphragm valve and the fifteenth pneumatic diaphragm valve.

[0276] In some of the embodiments, the first volatilization pipeline component includes but is not limited to a stainless steel tube; the second volatilization pipeline component includes but is not limited to a stainless steel tube.

[0277] Furthermore, the volatilization unit 1200 includes a twenty-ninth control valve element 1201 and a thirtieth control valve element 1202. The twenty-ninth control valve element 1201 is disposed in the first volatilization pipeline element to control the flow of the first volatilization pipeline element; the thirtieth control valve element 1202 is disposed in the second volatilization pipeline element to control the flow of the second volatilization pipeline element.

[0278] Specifically, the twenty-ninth control valve element 1201 includes a forty-seventh pneumatic diaphragm valve, a forty-eighth pneumatic diaphragm valve, a fifth one-way valve and a tenth manual diaphragm valve. Among them, the forty-seventh pneumatic diaphragm valve is arranged on the first volatilization pipeline element, and is used to control the flow between the first volatilization pipeline element and the fourth liquid storage element 401; the forty-eighth pneumatic diaphragm valve is arranged on the first volatilization pipeline element and is located downstream of the forty-seventh pneumatic diaphragm valve; the fifth one-way valve is arranged on the first volatilization pipeline element and is located downstream of the forty-seventh pneumatic diaphragm valve, and is used to make the gas in the first volatilization pipeline element flow in one direction; the tenth manual diaphragm valve is arranged on the first volatilization pipeline element and is located downstream of the fifth one-way valve, and is used to control the flow between the first volatilization pipeline element and the exhaust gas treatment equipment.

[0279] In some of the embodiments, the twenty-ninth control valve element 1201 includes but is not limited to a diaphragm valve and a one-way valve.

[0280] Specifically, the thirtieth control valve element 1202 includes a sixth one-way valve, wherein the sixth one-way valve is disposed on the second volatilization pipeline element, and is used to allow the second volatilization pipeline element to communicate with the exhaust gas treatment device.

[0281] like Fig.14 As shown, the third vacuum unit 1300 includes a sixth vacuum pipeline component. The sixth vacuum pipeline component is connected to the first vacuum unit 900 and is used to accelerate the volatilization of the liquid.

[0282] Specifically, a first end of the sixth vacuum line component is in communication with the vacuum generator, and a second end of the sixth vacuum line component is in communication with the first exhaust line component.

[0283] In some of these embodiments, the sixth vacuum line component includes, but is not limited to, a stainless steel tube.

[0284] Furthermore, the third vacuum unit 1300 includes a thirty-first control valve element 1301. The thirty-first control valve element 1301 is disposed on the sixth vacuum pipeline element to control the flow of the sixth vacuum pipeline element.

[0285] Specifically, the thirty-first control valve component 1301 includes a forty-ninth pneumatic diaphragm valve, wherein the forty-ninth pneumatic diaphragm valve is arranged on the sixth vacuum pipeline component, and is used to control the flow between the sixth vacuum pipeline component and the vacuum generator.

[0286] The method of using this embodiment is as follows:

[0287] The residual liquid in the fourth liquid storage element 401 and the seventh delivery pipeline element can be freely volatilized and discharged through the first volatilization pipeline element and the second volatilization pipeline element respectively.

[0288] The advantage of this embodiment is that the residual liquid in the fourth liquid storage unit or the seventh delivery pipeline element can be discharged through the volatilization unit, thereby improving the cleanliness of the pipeline.

[0289] Example 4

[0290] This embodiment is a variation of Embodiments 1 to 3.

[0291] like Fig.15 As shown, the liquid source delivery system further includes a liquid leakage monitoring unit 1400. The liquid leakage monitoring unit 1400 is disposed in the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400, and is used to monitor the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400 for liquid leakage in real time.

[0292] like Fig.16 As shown, the leakage monitoring unit 1400 also includes a containing element 1401, a plurality of first leakage detection elements 1402 and a second leakage detection element 1403. The containing element 1401 is used to contain the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300 and the fourth liquid storage unit 400; the plurality of first leakage detection elements 1402 are arranged in the containing element 1401, and correspond to the bottom of the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300 and the fourth liquid storage unit 400 respectively, and are used to perform leakage detection on the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300 and the fourth liquid storage unit 400; the second leakage detection element 1403 is arranged in the containing element 1401, and is used to detect whether there is liquid accumulation in the containing element 1401.

[0293] Specifically, the containing element 1401 is arranged in a basin-shaped structure, and the first liquid storage element 101 , the second liquid storage element 201 , the third liquid storage element 301 , and the fourth liquid storage element 401 are placed inside the containing element 1401 .

[0294] In some of these embodiments, the containing element 1401 includes, but is not limited to, a stainless steel basin.

[0295] Specifically, the number of the first leakage detection elements is four, and the four first leakage detection elements 1402 are respectively disposed at the bottom of the first liquid storage element 101 , the second liquid storage element 201 , the third liquid storage element 301 , and the fourth liquid storage element 401 .

[0296] In some of the embodiments, the first liquid leakage detection element 1402 includes but is not limited to a paper tape liquid leakage detector; the second liquid leakage detection element 1403 includes but is not limited to a float liquid leakage detector.

[0297] The method of use of this embodiment is the same as that of Embodiment 1 and will not be described again here.

[0298] The advantage of this embodiment is that, in the event of leakage in the first liquid storage element, the second liquid storage element, the third liquid storage element, and the fourth liquid storage element, the first leakage detection element and the second leakage detection element can promptly and effectively monitor the leakage, thereby facilitating observation by staff and improving work safety.

[0299] Example 5

[0300] This embodiment is a variation of Embodiments 1 to 4.

[0301] like Fig.15 As shown, the liquid source delivery system further includes a medium monitoring unit 1500. The medium monitoring unit 1500 is connected to the third liquid storage unit 300 and is located downstream of the third liquid storage unit 300 to monitor whether the medium output by the third liquid storage unit 300 is liquid.

[0302] Specifically, the medium monitoring unit 1500 is disposed on the seventh delivery pipeline element, and is used to detect whether the medium in the seventh delivery pipeline element is liquid. If it is not liquid, that is, the content of the dissolved liquid in the third liquid storage element 301 is too low, the third liquid storage element 301 needs to be replaced.

[0303] In some of the embodiments, the medium monitoring unit 1500 includes but is not limited to an ultrasonic sensor.

[0304] The usage and advantages of this embodiment are the same as those of Embodiment 1 and will not be described in detail here.

[0305] Example 6

[0306] This embodiment is a variation of Embodiments 1 to 5.

[0307] like Fig.15 As shown, the liquid source delivery system further includes a safety assurance unit 1600. The safety assurance unit 1600 is disposed on the top of the environment where the liquid source delivery system is located, and is used to monitor environmental information.

[0308] like Fig.17 As shown, the safety assurance unit 1600 includes a smoke monitoring element 1601, a liquid spraying element 1603, an ultraviolet infrared switch and an air blowing element 1604. The smoke monitoring element 1601 is arranged at the top of the environment where the liquid source delivery system is located, and is used to monitor the smoke information of the environment; the liquid spraying element 1603 is arranged at the top of the environment where the liquid source delivery system is located, and is used to spray liquid to the environment; the ultraviolet infrared switch is arranged at the top of the environment where the liquid source delivery system is located, and is used to monitor whether there is an open flame in the environment; the air blowing element 1604 is arranged at the top of the environment where the liquid source delivery system is located, and is used to discharge the gas in the environment.

[0309] In some of the embodiments, the smoke monitoring element 1601 is a smoke detector.

[0310] In some of the embodiments, the liquid spraying element 1603 is a spray head.

[0311] In some embodiments, the ultraviolet infrared switch is an infrared switch (IR Switch).

[0312] In some of these embodiments, the air blowing element 1604 includes but is not limited to an exhaust fan.

[0313] In some of the embodiments, the safety assurance unit 1600 further includes a gas monitoring element, a flame monitoring element, and a temperature monitoring element.

[0314] The advantages of this embodiment are that in the event of leakage or combustion in the liquid source delivery system, a smoke monitoring element is used to issue an early warning; a liquid spray element is used for spraying to reduce the concentration of related gases and liquids in the environment to prevent explosions; and a blowing element can be used to quickly discharge the gases in the environment to the exhaust gas treatment system.

[0315] Example 7

[0316] This embodiment relates to the semiconductor process equipment in the present invention.

[0317] A semiconductor process equipment includes the liquid source delivery system as described in Examples 1 to 6.

[0318] The semiconductor process equipment further includes a first power gas source, a second power gas source, a first purge gas source, a second purge gas source, a first vacuum device, a second vacuum device, a third vacuum device and an exhaust gas treatment device. The first power gas source is connected to the first power gas supply unit 500, the second power gas source is connected to the second power gas supply unit 600; the first purge gas source is connected to the first purge gas supply unit 700; the second purge gas source is connected to the second purge gas supply unit 800; the first vacuum device is connected to the first vacuum unit 900; the second vacuum device is connected to the second vacuum unit 1100; the third vacuum device is connected to the third vacuum unit 1300; and the exhaust gas treatment device is connected to the volatilization unit 1200.

[0319] The method of use of this embodiment is the same as that of Embodiments 1 to 6, and will not be described again here.

[0320] The technical effects of this embodiment are the same as those of Embodiments 1 to 6, and will not be described in detail here.

[0321] Example 8

[0322] This embodiment relates to a liquid source delivery method in the present invention.

[0323] A liquid source delivery method, applied to the liquid source delivery system as described in embodiments 1 to 6 or the semiconductor process equipment as described in embodiment 7, comprising:

[0324] (I) Liquid source transportation

[0325] The first power gas supply unit 500 delivers the first power gas to the first liquid storage unit 100, so that the liquid source of the first liquid storage unit 100 flows to the second liquid storage unit 200;

[0326] The second power gas supply unit 600 delivers the second power gas to the second liquid storage unit 200 so that the liquid source of the second liquid storage unit 200 flows toward the process equipment.

[0327] It should be noted that the specific implementation method can refer to Example 1.

[0328] (II) Cleaning the first liquid storage unit 100

[0329] The first purge gas supply unit 700 delivers the first purge gas to the first liquid storage unit 100 to pressurize the liquid source in the pipeline into the first liquid storage unit 100;

[0330] When the liquid source in the pipeline is pressed into the first liquid storage unit 100, the second purge gas supply unit 800 delivers the second purge gas to the third liquid storage unit 300, so that the solution in the third liquid storage unit 300 cleans the pipeline and the first liquid storage unit 100;

[0331] When the dissolving liquid is added to the first liquid storage unit 100, the first purge gas supply unit 700 delivers the first purge gas to the first liquid storage unit 100, so that the waste liquid of the first liquid storage unit 100 flows to the fourth liquid storage unit 400;

[0332] When the waste liquid in the first liquid storage unit 100 is emptied, the first vacuum unit 900 evacuates the gas in the first liquid storage unit 100;

[0333] When the first liquid storage unit 100 is in vacuum, the first purge gas supply unit 700 delivers the first purge gas to the first liquid storage unit 100 to purge the first liquid storage unit 100;

[0334] When the purging of the first liquid storage unit 100 is completed, the first vacuum unit 900 evacuates the first purge gas inside the first liquid storage unit 100 .

[0335] It should be noted that the specific implementation method can refer to Example 1.

[0336] (III) Cleaning the second liquid storage unit 200

[0337] The first purge gas supply unit 700 delivers the first purge gas to the second liquid storage unit 200 to pressurize the liquid source in the pipeline into the second liquid storage unit 200;

[0338] When the liquid source in the pipeline is pressed into the second liquid storage unit 200, the second purge gas supply unit 800 delivers the second purge gas to the third liquid storage unit 300, so that the solution in the third liquid storage unit 300 cleans the pipeline and the second liquid storage unit 200;

[0339] When the dissolving liquid is added to the second liquid storage unit 200, the first purge gas supply unit 700 delivers the first purge gas to the second liquid storage unit 200, so that the waste liquid of the second liquid storage unit 200 flows to the fourth liquid storage unit 400;

[0340] When the waste liquid in the second liquid storage unit 200 is emptied, the first vacuum unit 900 evacuates the gas in the second liquid storage unit 200;

[0341] When the second liquid storage unit 200 is in vacuum, the first purge gas supply unit 700 delivers the first purge gas to the second liquid storage unit 200 to purge the second liquid storage unit 200;

[0342] When the purging of the second liquid storage unit 200 is completed, the first vacuum unit 900 evacuates the first purge gas of the second liquid storage unit 200 .

[0343] It should be noted that the specific implementation method can refer to Example 1.

[0344] (IV) Cleaning the third liquid storage unit 300

[0345] The first purge gas supply unit 700 delivers the first purge gas to the third liquid storage unit 300 to fluidize the solution in the pipeline into the third liquid storage unit 300;

[0346] When the solution in the pipeline flows into the third liquid storage unit 300, the first vacuum unit 900 evacuates the gas in the third liquid storage unit 300;

[0347] When the third liquid storage unit 300 is in vacuum, the first purge gas supply unit 700 delivers the first purge gas to the third liquid storage unit 300 to purge the third liquid storage unit 300;

[0348] When the purging of the third liquid storage unit 300 is completed, the first vacuum unit 900 evacuates the first purge gas inside the third liquid storage unit 300 .

[0349] It should be noted that the specific implementation method can refer to Example 1.

[0350] (V) Cleaning the fourth liquid storage unit 400

[0351] The first vacuum unit 900 evacuates the gas in the fourth liquid storage unit 400;

[0352] When the fourth liquid storage unit 400 is in vacuum, the first purge gas supply unit 700 delivers the first purge gas to the fourth liquid storage unit 400 to purge the fourth liquid storage unit 400;

[0353] When the purging of the fourth liquid storage unit 400 is completed, the first vacuum unit 900 evacuates the first purge gas of the fourth liquid storage unit 400 .

[0354] It should be noted that the specific implementation method can refer to Example 1.

[0355] Furthermore, the liquid source delivery method further comprises:

[0356] (VI) Gas-Liquid Separation

[0357] The gas-liquid separation unit 1000 performs gas-liquid separation on the liquid source flowing out of the second liquid storage unit 200 to remove gas in the liquid source, and flows the liquid source after gas-liquid separation to the process equipment;

[0358] The second vacuum unit 1100 exhausts the gas generated by the gas-liquid separation unit 1000 .

[0359] It should be noted that the specific implementation method can refer to Example 2.

[0360] (VII) Liquid Evaporation

[0361] The volatilization unit 1200 volatilizes and discharges the liquid in the pipeline and the fourth liquid storage unit 400; and / or

[0362] The first vacuum unit 900 is communicated with the fourth liquid storage unit 400 to accelerate the volatilization of the liquid in the fourth liquid storage unit 400 .

[0363] It should be noted that the specific implementation method can refer to Example 3.

[0364] (VIII) Leakage monitoring

[0365] The liquid leakage monitoring unit 1400 is used to detect liquid leakage of the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300 and the fourth liquid storage unit 400;

[0366] The liquid leakage monitoring unit 1400 is used to detect whether there is liquid accumulation.

[0367] It should be noted that the specific implementation method can refer to Example 4.

[0368] (IX) Ultrasonic monitoring

[0369] The medium monitoring unit 1500 monitors whether the medium outputted from the third liquid storage unit 300 is liquid, so as to detect whether the dissolution in the third liquid storage unit 300 is sufficient.

[0370] It should be noted that the specific implementation method can refer to Example 5.

[0371] Example 9

[0372] This embodiment relates to a specific implementation of the liquid source delivery system and method of the present invention.

[0373] like Fig.18 The first liquid storage unit 100 includes a liquid storage tank (Bulk Bank), pneumatic diaphragm valves (PV1A, PV1B, PV1C, LPIL, RCV, PV2B), a manual diaphragm valve (MV2L), and pressure sensors (PT1L, PT2L).

[0374] The second liquid storage unit 200 includes a liquid storage tank (Process TANK), pneumatic diaphragm valves (PV2A, PV2C, PV2D, LPIR, LP1, LP2, LP3, LP4), manual diaphragm valves (MV2R, LM1, LM2, LM3, LM4), and pressure sensors (PT1R, PT2R).

[0375] The third liquid storage unit 300 includes a liquid storage tank (Solvent Tank), pneumatic diaphragm valves (PV3A, PV3B, PV16, PV11, PV12, LPV1, LPV2, LPV3, LPV4), and a pressure sensor (PT6).

[0376] The fourth liquid storage unit 400 includes a liquid storage tank (Recovery Tank), a pneumatic diaphragm valve (PV4A), and a pressure sensor (PT7).

[0377] The first power gas supply unit 500 includes manual diaphragm valves (MV5L, MV4L), a one-way valve (CV2), a pressure regulating valve (REG1), a pressure sensor (PT5L), and a pneumatic diaphragm valve (PV5L).

[0378] The second power gas supply unit 600 includes manual diaphragm valves (MV5R, MV4R), a one-way valve (CV3), a pressure regulating valve (REG4), a pressure sensor (PT5R), and a pneumatic diaphragm valve (PV5R).

[0379] The first purge gas supply unit 700 includes pneumatic diaphragm valves (PG1, PV4L, PV2L, PV1L, PV4R, PV2R, PV1R, PV18, PV19, PV20, PV24, PV25, PV26), a micro-leakage valve (PGBV), a one-way valve (CV1), a pressure regulating valve (REG2), and a pressure sensor (PT4).

[0380] The second purge gas supply unit 800 includes a manual diaphragm valve (MV6), a one-way valve (CV5), a pressure regulating valve (REG3), a pneumatic diaphragm valve (PV15), and a pressure sensor (PT8).

[0381] The first vacuum unit 900 includes a pneumatic diaphragm valve (PV9L, PV3L, PV3R, PV17, PV23), a manual diaphragm valve (MPV1), and a pressure sensor (PV1).

[0382] The gas-liquid separation unit 1000 includes a pneumatic diaphragm valve (LPIR, PV6R, PV7R, PV8R) and a gas-liquid separator (DEGASSER).

[0383] The second vacuum unit 1100 includes a pneumatic diaphragm valve (PV9R), a manual diaphragm valve (MPV2), and a pressure sensor (PV2).

[0384] The volatilization unit 1200 includes a pneumatic diaphragm valve (PV4B, PV22, PV27), a manual diaphragm valve (MV7), and a one-way valve (CV6, CV7).

[0385] The third vacuum unit 1300 includes a pneumatic diaphragm valve (PV28) and a one-way valve (CV8).

[0386] The liquid leakage monitoring unit 1400 includes a paper tape liquid leakage detector (Leak detection tape) and a float liquid leakage detector (LEAK SENSOR).

[0387] The medium monitoring unit 1500 includes an ultrasonic sensor (US).

[0388] Specifically, the liquid source delivery method of this embodiment is as follows:

[0389] (I) Liquid source transportation

[0390] Manually open MV5L to allow the first power gas from the first power gas source to flow to the first power gas supply element;

[0391] The system turns on REG1 to adjust the pressure of the first power gas in the first power gas supply element so that the gas pressure in the first power gas supply element meets the standard;

[0392] When the air pressure monitored by PT5L meets the standard, MV4L is manually opened and the system automatically opens PV5L, so that the first power gas supply component and the first delivery pipeline component are in communication;

[0393] The system opens PV1A so that the first delivery pipeline element is connected to the Bulk Bank, thereby allowing the first power gas to enter the Bulk Bank;

[0394] The system opens PV1B, LPIL, PCV and PV2B and manually opens MV2L, so that the second delivery pipeline element is connected with BulkBank and Process TANK, so that the liquid source inside the Bulk Bank enters the Process TANK through the second delivery pipeline element under the action of the first power gas, thereby buffering the liquid source;

[0395] Manually open MV5R to allow the second motive gas from the second motive gas source to flow to the second motive gas supply element;

[0396] The system turns on REG4 to adjust the pressure of the second power gas in the second power gas supply element so that the gas pressure in the second power gas supply element meets the standard;

[0397] When the gas pressure monitored by PT5R meets the standard, MV4R is manually opened and the system automatically opens PV5R, so that the second power gas supply element and the fourth delivery pipeline element are in communication;

[0398] The system opens PV2A so that the third delivery pipeline element is connected to the Process TANK, thereby allowing the second motive gas to enter the Process TANK;

[0399] Manually open MV2R and LM4 and the system automatically opens PV2C and LPIR, so that the liquid source flows to the DEGASSER through the fourth delivery pipeline element, so that the DEGASSER can separate the liquid source into gas and liquid;

[0400] Manually open MV2R, LM1, LM2, LM3, LM4 and system open LP1, LP2, LP3, LP4, so that the liquid source inside the fourth delivery pipeline element flows to the fifth delivery pipeline element and enters the process equipment;

[0401] In addition, in the event that the DEGASSER fails to work properly, the system opens PV7R and PV8R, allowing the liquid source to flow to the process equipment through the third bypass pipeline element.

[0402] (II) Cleaning of the first liquid storage unit 100

[0403] The system automatically turns on PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0404] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0405] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0406] When the gas pressure monitored by PT4 meets the standard, the system opens PV4L and PV1L, so that the first purge gas can enter the Bulk Bank through the second purge pipeline element and the second delivery pipeline element, and then the liquid source in the second delivery pipeline element can be pressed into the Bulk Bank;

[0407] Manually open MV6 to allow the second purge gas from the second purge gas source to enter the seventh purge pipeline element;

[0408] The system turns on REG3 to adjust the pressure of the second purge gas in the seventh purge pipeline component, so that the gas pressure in the seventh purge pipeline component meets the standard;

[0409] The system opens PV15 and PV3A, so that the second purge gas can enter the Solvent Tank through the seventh purge pipeline component and the sixth delivery pipeline component;

[0410] The system opens PV3B, PV16 and PV11, so that the solution in Solvent Tank can flow to Bulk Bank through the seventh delivery pipeline element, the second purge pipeline element and the second delivery pipeline element, so that the solution can dissolve the residual liquid source in Bulk Bank;

[0411] After sufficient dissolution, the system automatically turns on PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0412] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0413] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0414] When the gas pressure detected by PT4 meets the standard, the system opens PV4L, PV2L, PV1C, PV13, PV21, and PV4A, so that the first purge gas can press the waste water in the Bulk Bank into the Recovery Tank;

[0415] When the waste liquid inside the Bulk Bank is emptied, the system opens PV1C, PV2L, PV1L, PV3L, and PV9L to discharge the gas in each pipeline;

[0416] When the exhaust operation is completed, the system automatically turns on PG1 to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0417] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0418] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0419] When the gas pressure detected by PT4 meets the standard, the system opens PV4L, PV2L, PV1L, and PV1C, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0420] After the purge is completed, the system opens PV1C, PV2L, PV1L, PV3L, and PV9L to exhaust the gas in the pipeline.

[0421] (III) Cleaning the Second Liquid Storage Element 201 of the Second Liquid Storage Unit 200

[0422] The system automatically turns on PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0423] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0424] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0425] When the gas pressure detected by PT4 meets the standard, the system opens PV4R, PV1R, and PV2C, so that the first purge gas can enter the Process TANK through the third purge pipeline component and the fourth delivery pipeline component, and then the solution in the fourth delivery pipeline component can be pressed into the Process TANK;

[0426] Manually open MV6 to allow the second purge gas from the second purge gas source to enter the seventh purge pipeline element;

[0427] The system turns on REG3 to adjust the pressure of the second purge gas in the seventh purge pipeline component, so that the gas pressure in the seventh purge pipeline component meets the standard;

[0428] The system opens PV15 and PV3B, so that the second purge gas can enter the third liquid storage element 301 through the seventh purge pipeline element and the sixth delivery pipeline element;

[0429] The system opens PV3B, PV16, PV11, PV1L, LPIL, MV2L, RCV, PV2D, and PV2C, so that the solution in the Solvent Tank can flow to the Process TANK through the seventh delivery pipeline element, the second purge pipeline element, the second delivery pipeline element, the second bypass pipeline element, and the fourth delivery pipeline element, so that the solution can dissolve the residual liquid source in the Process TANK;

[0430] After sufficient dissolution, the system automatically turns on PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0431] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0432] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0433] When the gas pressure detected by PT4 meets the standard, the system opens PV4L, PV1L, LPIL, MV2L, RCV, PV2D, PV14, PV21, and PV4A, so that the first purge gas can press the waste water in the Process Tank into the Recovery Tank;

[0434] When the waste liquid inside the Process TANK is emptied, the system opens PV9L, PV3L, PV1L, LPIL, MV2L, RCV, PV2C, PV2D, PV2A, PV2R, PV1R, and PV3R to exhaust the gas in the pipeline;

[0435] When the exhaust operation is completed, the system automatically turns on PG1 to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0436] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0437] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0438] When the gas pressure detected by PT4 meets the standard, the system opens PV4L, PV1L, LPIL, MV2L, RCV, PV2B, PV4R, PV2R, PV1R, and PV2C, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0439] After the purge is completed, the system opens PV9L, PV3L, PV1L, LPIL, MV2L, RCV, PV2C, PV2D, PV2A, PV2R, PV1R, and PV3R to exhaust the gas in the pipeline.

[0440] (IV) Cleaning the Fifth Delivery Pipeline Component of the Second Liquid Storage Unit 200

[0441] The system automatically turns on PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0442] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0443] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0444] When the air pressure detected by PT4 meets the standard, the system opens LPV1, LPV2, LPV3, LPV4 and manually opens LM1, LM2, LM3, LM4, so as to discharge the liquid source in the fifth delivery pipeline element;

[0445] After the liquid source is completely discharged, MV6 is manually opened to allow the second purge gas of the second purge gas source to enter the seventh purge pipeline element;

[0446] The system turns on REG3 to adjust the pressure of the second purge gas in the seventh purge pipeline component, so that the gas pressure in the seventh purge pipeline component meets the standard;

[0447] The system opens PV15 and PV3A, so that the second purge gas can enter the fifth delivery pipeline element through the seventh purge pipeline element and the sixth delivery pipeline element;

[0448] The system opens PV3B, PV16, PV12, LPV1, LPV2, LPV3, and LPV4, so that the solution in the Solvent Tank can flow to the fifth delivery pipeline element through the seventh delivery pipeline element, the eighth delivery pipeline element, and the ninth delivery pipeline element, so that the solution can dissolve the residual liquid source in the fifth delivery pipeline element;

[0449] After sufficient dissolution, the system automatically turns on PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0450] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0451] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0452] When the air pressure detected by PT4 meets the standard, the system opens LPV1, LPV2, LPV3, LPV4 and manually opens LM1, LM2, LM3, LM4, so as to discharge the waste liquid in the fifth delivery pipeline element;

[0453] After the waste liquid is completely discharged, the gas in the pipeline is discharged.

[0454] (V) Cleaning of the Third Liquid Storage Unit 300

[0455] The system automatically turns on PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0456] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0457] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0458] When the gas pressure detected by PT4 meets the standard, the system opens PV18, PV20, and PV3B, so that the first purge gas can enter the Solvent Tank through the fourth purge pipeline element and the seventh delivery pipeline element, and then the solution in the seventh delivery pipeline element can be pressed into the Solvent Tank;

[0459] When the solution in the pipeline is emptied, the system opens PV3A, PV13, PV3B, PV20, PV17, and PV9L to discharge the gas in the pipeline;

[0460] When the exhaust operation is completed, the system automatically turns on PG1 to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0461] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0462] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0463] When the air pressure detected by PT4 meets the standard, the system opens PV18, PV19, and PV20, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0464] After the purge is completed, the system opens PV3A, PV13, PV3B, PV20, PV17, and PV9L to exhaust the gas in the pipeline.

[0465] (VI) Cleaning of the Fourth Liquid Storage Unit 400

[0466] The system opens PV25, PV26, PV23, and PV9L, thereby exhausting the gas in the pipeline;

[0467] When the gas in the pipeline is emptied, the system automatically turns on PG1 to allow the first purge gas from the first purge gas source to enter the first purge pipeline element;

[0468] The system opens the PGBV and adjusts the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element;

[0469] The system turns on REG2 to adjust the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard;

[0470] When the air pressure detected by PT4 meets the standard, the system opens PV24, PV25, and PV26, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0471] After the purge is completed, the system opens PV25, PV26, PV23, and PV9L to exhaust the gas in the pipeline.

[0472] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0473] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A liquid source delivery system, characterized in that: include: A first liquid storage unit, the first liquid storage unit is used to store a liquid source; A second liquid storage unit, which is connected to the first liquid storage unit and the process equipment through pipelines, and is located downstream of the first liquid storage unit, and is used to buffer the liquid source and transport the liquid source to the process equipment; A third liquid storage unit, the third liquid storage unit is connected to the first liquid storage unit and the second liquid storage unit through pipelines, and is used to store the dissolved liquid and transport the dissolved liquid to the first liquid storage unit and the second liquid storage unit; a fourth liquid storage unit, the fourth liquid storage unit being connected to the first liquid storage unit and the second liquid storage unit through pipelines, and being used for storing waste liquid; a first power gas supply unit, the first power gas supply unit being connected to the first power gas source and the first liquid storage unit through pipelines, and being used to supply the first power gas to the first liquid storage unit so that the liquid source of the first liquid storage unit flows to the second liquid storage unit; a second power gas supply unit, the second power gas supply unit being connected to the second power gas source and the second liquid storage unit through pipelines, and being used for supplying the second power gas to the second liquid storage unit so that the liquid source of the second liquid storage unit flows toward the process equipment; a first purge gas supply unit, the first purge gas supply unit being connected to the first purge gas source, the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit through pipelines, respectively, and being used to deliver the first purge gas to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively, so as to press the liquid source, the dissolved liquid, and the waste liquid in the pipeline into the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively; a second purge gas supply unit, the second purge gas supply unit is connected to the second purge gas source and the third liquid storage unit through pipelines, and is used to deliver the second purge gas to the third liquid storage unit to press the dissolved liquid into the pipeline, the first liquid storage unit, and the second liquid storage unit, respectively, so that the dissolved liquid cleans the pipeline, the first liquid storage unit, and the second liquid storage unit; A first vacuum unit, wherein the first vacuum unit is connected to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively, and is used to perform vacuum treatment on the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit.

2. The liquid source delivery system according to claim 1, characterized in that: The first liquid storage unit comprises: A first liquid storage element, the first liquid storage element is used to store a liquid source; a first delivery pipeline element, the first delivery pipeline element being respectively connected to the first liquid storage element, the first power gas supply unit, and the first purge gas supply unit, and being used for delivering gas; A second delivery pipeline element, which is connected to the first liquid storage element, the second liquid storage unit, and the first purge gas supply unit, respectively, and is used for delivering gas and liquid; and / or The second liquid storage unit comprises: a second liquid storage element, the second liquid storage element being in communication with the first liquid storage unit and being used for buffering a liquid state source; a third delivery pipeline element, the third delivery pipeline element being respectively connected to the second liquid storage element, the second power gas supply unit, and the first purge gas supply unit, for delivering gas; a fourth delivery pipeline element, the fourth delivery pipeline element being connected to the second liquid storage element and the first purge gas supply unit respectively, and being used for delivering a liquid source; at least one fifth delivery pipeline element, the fifth delivery pipeline element being connected to the fourth delivery pipeline element and the process equipment respectively, and being used for delivering the liquid source to the process equipment; and / or The third liquid storage unit comprises: a third liquid storage element, the third liquid storage element being in communication with the first liquid storage unit and being used for storing the dissolved liquid; a sixth delivery pipeline element, the sixth delivery pipeline element being respectively connected to the third liquid storage element, the first purge gas supply unit, and the second purge gas supply unit, and being used for delivering gas; a seventh delivery pipeline element, the seventh delivery pipeline element being connected to the third liquid storage element, the first liquid storage unit, the second liquid storage unit, and the first purge gas supply unit, respectively, and being used for delivering gas and liquid; an eighth delivery pipeline element, the eighth delivery pipeline element being in communication with the seventh delivery pipeline element and being used for delivering liquid; at least one ninth delivery pipeline element, the ninth delivery pipeline element being connected to the eighth delivery pipeline element and the second liquid storage unit respectively, for delivering liquid; and / or The fourth liquid storage unit comprises: a fourth liquid storage element, the fourth liquid storage element being connected to the first liquid storage unit and the second liquid storage unit through pipelines, respectively, and being used for storing waste liquid; a tenth delivery pipeline element, the tenth delivery pipeline element being connected to the fourth liquid storage element, the first liquid storage unit, the second liquid storage unit, and the first purge gas supply unit, respectively, for delivering liquid; and / or The first power gas supply unit comprises: a first power gas supply element, the first power gas supply element being connected to the first power gas source and the first liquid storage unit through pipelines, and being used for supplying the first power gas to the first liquid storage unit so that the liquid source of the first liquid storage unit flows to the second liquid storage unit; and / or The second power gas supply unit comprises: a second power gas supply element, the second power gas supply element being connected to the second power gas source and the second liquid storage unit through pipelines, and being used for supplying the second power gas to the second liquid storage unit so that the liquid source of the second liquid storage unit flows toward the process equipment; and / or The first purge gas supply unit comprises: a first purge pipeline element, wherein the first purge pipeline element and a first purge gas source are used to deliver a first purge gas; a second purge pipeline element, the second purge pipeline element being connected to the first purge pipeline element and the first liquid storage unit respectively, and being used for conveying a first purge gas to the first liquid storage unit to pressurize the liquid source in the pipeline into the first liquid storage unit; a third purge pipeline element, the third purge pipeline element being connected to the first purge pipeline element and the second liquid storage element of the second liquid storage unit, respectively, and being used for conveying the first purge gas to the second liquid storage unit to pressurize the liquid source in the pipeline into the second liquid storage unit; a fourth purge pipeline element, the fourth purge pipeline element being in communication with the first purge pipeline element and the third liquid storage unit, respectively, and being used for conveying a first purge gas to the third liquid storage unit to pressurize the solution in the pipeline into the third liquid storage unit; a fifth purge pipeline element, the fifth purge pipeline element being connected to the first purge pipeline element and the fourth liquid storage unit respectively, and being used for conveying a first purge gas to the fourth liquid storage unit so as to press the waste liquid in the pipeline into the fourth liquid storage unit; a sixth purge pipeline element, the sixth purge pipeline element being connected to the first purge pipeline element and the third liquid storage unit respectively, and being used for conveying a first purge gas to the third liquid storage unit to discharge the liquid in the third liquid storage unit; and / or The second purge gas supply unit comprises: a seventh purge pipeline element, the seventh purge pipeline element being connected to the second purge gas source and the third liquid storage unit respectively, and being used for conveying the second purge gas to the third liquid storage unit to force the solution into the pipeline, the first liquid storage unit, and the second liquid storage unit so that the solution cleans the pipeline, the first liquid storage unit, and the second liquid storage unit; and / or The first vacuum unit comprises: a first exhaust line element, the first exhaust line element being in communication with a vacuum generating device and being used for conveying exhaust gas; a first vacuum pipeline element, the first vacuum pipeline element being connected to the first liquid storage unit, the first exhaust pipeline element, and the vacuum generator, respectively, and being used for performing vacuum treatment on the first liquid storage unit; a second vacuum pipeline element, the second vacuum pipeline element being respectively connected with the second liquid storage unit, the first exhaust pipeline element, and the first vacuum pipeline element, and being used for performing vacuum treatment on the second liquid storage unit; a third vacuum pipeline element, the third vacuum pipeline element being respectively connected with the third liquid storage unit, the first exhaust pipeline element, and the first vacuum pipeline element, and being used for performing vacuum treatment on the third liquid storage unit; A fourth vacuum pipeline element, wherein the fourth vacuum pipeline element is respectively connected to the fourth liquid storage unit, the first exhaust pipeline element, and the first vacuum pipeline element, and is used for performing vacuum treatment on the fourth liquid storage unit.

3. The liquid source delivery system according to claim 2, characterized in that: The first liquid storage unit also includes: a first control valve element, the first control valve element being disposed in the first delivery pipeline element and being used to control the flow of the first delivery pipeline element; a second control valve element, the second control valve element being arranged in the second delivery pipeline element and being used for controlling the flow of the second delivery pipeline element; and / or The first liquid storage unit also includes: A first bypass pipeline element, the first bypass pipeline element is communicated with the first delivery pipeline element and the second delivery pipeline element respectively, and is used for bypass; a third control valve element, the third control valve element being arranged in the first bypass line element and being used for controlling the flow of the first bypass line element; and / or The second liquid storage unit also includes: a fourth control valve element, the fourth control valve element being disposed on the third delivery pipeline element and being used to control the flow of the third delivery pipeline element; a fifth control valve element, the fifth control valve element being disposed on the fourth delivery pipeline element and being used to control the flow of the fourth delivery pipeline element; at least one sixth control valve element, the sixth control valve element being arranged in the fifth delivery pipeline element and being used for controlling the flow of the fifth delivery pipeline element; and / or The second liquid storage unit also includes: a second bypass pipeline element, wherein a first end of the second bypass pipeline element is in communication with the first liquid storage unit, and a second end of the second bypass pipeline element is in communication with the fourth delivery pipeline element for bypass; a seventh control valve element, the seventh control valve element being arranged in the second bypass line element and being used for controlling the flow of the second bypass line element; and / or The third liquid storage unit further includes: an eighth control valve element, the eighth control valve element being disposed on the sixth delivery pipeline element and being used to control the flow of the sixth delivery pipeline element; a ninth control valve element, the ninth control valve element being disposed on the seventh delivery pipeline element and being used to control the flow of the seventh delivery pipeline element; a tenth control valve element, the tenth control valve element being disposed on the eighth delivery pipeline element and being used to control the flow of the eighth delivery pipeline element; an eleventh control valve element, the eleventh control valve element being disposed in the ninth delivery pipeline element and being used to control the flow of the ninth delivery pipeline element; and / or The fourth liquid storage unit further includes: a twelfth control valve element, the twelfth control valve element being disposed on the tenth delivery pipeline element and being used to control the flow of the tenth delivery pipeline element; and / or The first power gas supply unit also includes: a thirteenth control valve element, the thirteenth control valve element being disposed on the first power gas supply element and being used to control the flow of the first power gas supply element; and / or The second power gas supply unit also includes: a fourteenth control valve element, the fourteenth control valve element being disposed on the second power gas supply element and being used to control the flow of the second power gas supply element; and / or The first purge gas supply unit further comprises: a fifteenth control valve element, the fifteenth control valve element being disposed in the first purge pipeline element and being used to control the flow of the first purge pipeline element; a sixteenth control valve element, the sixteenth control valve element being disposed in the third purge pipeline element and being used to control the flow of the third purge pipeline element; a seventeenth control valve element, the seventeenth control valve element being disposed on the fourth purge pipeline element and being used to control the flow of the fourth purge pipeline element; an eighteenth control valve element, the eighteenth control valve element being disposed on the fifth purge pipeline element and being used to control the flow of the fifth purge pipeline element; a nineteenth control valve element, the nineteenth control valve element being disposed on the fifth purge pipeline element and being used for controlling the flow of the fifth purge pipeline element; and / or The second purge gas supply unit further comprises: a twentieth control valve element, the twentieth control valve element being disposed on the seventh purge line element and being used for controlling the flow of the seventh purge line element; and / or The first vacuum unit also includes: a twenty-first control valve element, the twenty-first control valve element being disposed in the first exhaust pipe element and being used to control the flow of the first exhaust pipe element; a twenty-second control valve element, the twenty-second control valve element being disposed on the first vacuum pipeline element and being used to control the flow of the first vacuum pipeline element; a twenty-third control valve element, the twenty-third control valve element being disposed on the second vacuum pipeline element and being used to control the flow of the second vacuum pipeline element; a twenty-fourth control valve element, the twenty-fourth control valve element being disposed on the third vacuum pipeline element and being used to control the flow of the third vacuum pipeline element; A twenty-fifth control valve element, the twenty-fifth control valve element is arranged on the fourth vacuum pipeline element, and is used to control the flow of the fourth vacuum pipeline element.

4. The liquid source delivery system according to claim 2, characterized in that: The first liquid storage unit also includes: a first pressure monitoring element, the first pressure monitoring element being in communication with the first delivery pipeline element and being used to monitor the pressure of the first delivery pipeline element; a second pressure monitoring element, the second pressure monitoring element being in communication with the second delivery pipeline element and being used for monitoring the pressure of the second delivery pipeline element; a first liquid level monitoring element, which is disposed inside the first liquid storage element and is used to monitor the liquid level of the first liquid storage element; a first weight monitoring element, which is disposed at the bottom of the first liquid storage element and is used to monitor the weight of the first liquid storage element; and / or The second liquid storage unit also includes: a third pressure monitoring element, the third pressure monitoring element being in communication with the third delivery pipeline element and being used for monitoring the pressure of the third delivery pipeline element; a fourth pressure monitoring element, the fourth pressure monitoring element being in communication with the fourth delivery pipeline element and being used for monitoring the pressure of the fourth delivery pipeline element; a second liquid level monitoring element, which is disposed inside the second liquid storage element and is used to detect the liquid level of the second liquid storage element; a second weight monitoring element, which is disposed at the bottom of the second liquid storage element and is used to monitor the weight of the second liquid storage element; and / or The third liquid storage unit further includes: a fifth pressure monitoring element, the fifth pressure monitoring element being in communication with the sixth delivery pipeline element and being used for monitoring the pressure of the sixth delivery pipeline element; a third weight monitoring element, the third weight monitoring element being disposed at the bottom of the third liquid storage element and being used for monitoring the weight of the third liquid storage element; and / or The fourth liquid storage unit further includes: a sixth pressure monitoring element, the sixth pressure monitoring element being in communication with the tenth delivery pipeline element and being used for monitoring the pressure of the tenth delivery pipeline element; a fourth weight monitoring element, the fourth weight monitoring element being disposed at the bottom of the fourth liquid storage element and being used for monitoring the weight of the fourth liquid storage element; and / or The first power gas supply unit also includes: a first pressure regulating element, the first pressure regulating element being disposed on the first power gas supply element and being used to regulate the pressure of the first power gas supply element; a seventh pressure monitoring element, the seventh pressure monitoring element and the first power gas supply element being used to monitor the pressure of the first power gas supply element; and / or The second power gas supply unit also includes: a second pressure regulating element, the second pressure regulating element being disposed on the second power gas supply element and being used to regulate the pressure of the second power gas supply element; an eighth pressure monitoring element, the eighth pressure monitoring element and the second power gas supply element being used to monitor the pressure of the second power gas supply element; and / or The first purge gas supply unit further comprises: A micro-leakage regulating element, the micro-leakage regulating element being arranged on the first purge pipeline element and being used for micro-leaking the first purge gas; a third pressure regulating element, the third pressure regulating element being disposed in the first purge pipeline element and being used to regulate the pressure of the first purge pipeline element; a ninth pressure monitoring element, the ninth pressure monitoring element and the first purge line element being used to monitor the pressure of the first purge line element; and / or The second purge gas supply unit further comprises: a fourth pressure regulating element, the fourth pressure regulating element being disposed on the seventh purge pipeline element and being used for regulating the pressure of the seventh purge pipeline element; a tenth pressure monitoring element, the tenth pressure monitoring element being in communication with the seventh purge line element and being used for monitoring the pressure of the seventh purge line element; and / or The first vacuum unit also includes: An eleventh pressure monitoring element, the eleventh pressure monitoring element is in communication with the first exhaust pipeline element and is used to monitor the pressure of the first exhaust pipeline element.

5. The liquid source delivery system according to claims 1 to 4, characterized in that: Also includes: A gas-liquid separation unit, which is connected to the second liquid storage unit and the process equipment through pipelines, and is located downstream of the second liquid storage unit, and is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit to remove gas in the liquid source and to transport the liquid source after gas-liquid separation to the process equipment; A second vacuum unit, the second vacuum unit is connected to the gas-liquid separation unit and is used to discharge the gas generated by the gas-liquid separation unit; and / or a volatilization unit, the volatilization unit being connected to the fourth liquid storage unit and the exhaust device respectively, and being used for discharging the volatilized liquid in the pipeline and the fourth liquid storage unit; a third vacuum unit, the third vacuum unit being in communication with the first vacuum unit and being used to accelerate the volatilization of the liquid; and / or a liquid leakage monitoring unit, the liquid leakage monitoring unit being arranged in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit, and being used for real-time monitoring of liquid leakage of the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit; and / or a medium monitoring unit, the medium monitoring unit being in communication with the third liquid storage unit and being located downstream of the third liquid storage unit, and being used for monitoring whether the medium outputted by the third liquid storage unit is liquid; and / or A safety assurance unit is arranged at the top of the environment where the liquid source delivery system is located, and is used to monitor environmental information.

6. The liquid source delivery system according to claim 5, characterized in that: The gas-liquid separation unit comprises: a gas-liquid separation element, the gas-liquid separation element being in communication with the second liquid storage unit and being located downstream of the second liquid storage unit, and being used for performing gas-liquid separation on the liquid source flowing downstream of the second liquid storage unit to remove gas in the liquid source and for flowing the liquid source undergoing gas-liquid separation to the process equipment; a third bypass pipeline element, wherein a first end of the third bypass pipeline element is connected to a pipeline connecting the gas-liquid separation element and the second liquid storage unit, and a second end of the third bypass pipeline element is connected to a pipeline connecting the gas-liquid separation element and a process device, for protecting the entire pipeline; and / or The second vacuum unit comprises: a fifth vacuum pipeline component, the fifth vacuum pipeline component being connected to the vacuum generating device and the gas-liquid separation unit respectively, and being used for discharging the gas generated by the gas-liquid separation unit; and / or The volatilization unit comprises: a first volatilization pipeline element, the first volatilization pipeline element being connected to the fourth liquid storage unit and the exhaust device respectively, and being used for volatilizing and discharging the liquid in the fourth liquid storage unit; a second volatilization pipeline element, which is respectively connected to the first volatilization pipeline element and the third liquid storage unit, and is used to volatilize and discharge the liquid in the pipeline; and / or The third vacuum unit comprises: a sixth vacuum pipeline element, the sixth vacuum pipeline element being in communication with the first vacuum unit and being used for accelerating the volatilization of the liquid; and / or The leakage monitoring unit also includes: a containing element, the containing element being used to contain the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit; a plurality of first liquid leakage detection elements, which are arranged in the accommodating element and correspond to the bottoms of the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit, respectively, and are used to perform liquid leakage detection on the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit; A second liquid leakage detection element is disposed in the accommodating element and is used to detect whether there is liquid accumulation in the accommodating element.

7. The liquid source delivery system according to claim 6, characterized in that: The gas-liquid separation unit also includes: a twenty-sixth control valve element, the twenty-sixth control valve element being disposed in a pipeline communicating with the gas-liquid separation element, and being used to control the flow of the gas-liquid separation element and the second liquid storage unit and the process equipment; a twenty-seventh control valve element, the twenty-seventh control valve element being disposed in the third bypass pipeline element and being used for controlling the flow of the third bypass pipeline element; and / or The second vacuum unit comprises: a twenty-eighth control valve element, the twenty-eighth control valve element being disposed on the fifth vacuum pipeline element and being used to control the flow of the fifth vacuum pipeline element; a twelfth pressure monitoring element, the twelfth pressure monitoring element being in communication with the fifth vacuum line element and being used for monitoring the pressure inside the fifth vacuum line element; and / or The volatilization unit comprises: a twenty-ninth control valve element, the twenty-ninth control valve element being disposed on the first volatilization pipeline element and being used for controlling the flow of the first volatilization pipeline element; a thirtieth control valve element, the thirtieth control valve element being disposed in the second volatilization pipeline element and being used for controlling the flow of the second volatilization pipeline element; and / or The third vacuum unit comprises: A thirty-first control valve component is provided on the sixth vacuum pipeline component and is used to control the flow of the sixth vacuum pipeline component.

8. A semiconductor process equipment, characterized in that: include: A liquid source delivery system as claimed in any one of claims 1 to 7.

9. A liquid source delivery method, characterized in that: Applicable to the liquid source delivery system as claimed in claims 1 to 7 or the semiconductor process equipment as claimed in claim 8, comprising: (I) Liquid source transportation The first power gas supply unit delivers the first power gas to the first liquid storage unit, so that the liquid source of the first liquid storage unit flows to the second liquid storage unit; The second power gas supply unit delivers the second power gas to the second liquid storage unit so that the liquid source of the second liquid storage unit flows toward the process equipment; (II) Cleaning the first liquid storage unit The first purge gas supply unit delivers the first purge gas to the first liquid storage unit to pressurize the liquid source in the pipeline into the first liquid storage unit; When the liquid source in the pipeline is pressed into the first liquid storage unit, the second purge gas supply unit delivers the second purge gas to the third liquid storage unit, so that the solution in the third liquid storage unit cleans the pipeline and the first liquid storage unit; When the first liquid storage unit is filled with the dissolving liquid, the first purge gas supply unit delivers the first purge gas to the first liquid storage unit, so that the waste liquid of the first liquid storage unit flows to the fourth liquid storage unit; When the waste liquid in the first liquid storage unit is emptied, the first vacuum unit empties the gas in the first liquid storage unit; When the first liquid storage unit is in vacuum, the first purge gas supply unit delivers the first purge gas to the first liquid storage unit to purge the first liquid storage unit; When the first liquid storage unit is purged, the first vacuum unit evacuates the first purge gas inside the first liquid storage unit; (III) Cleaning the second liquid storage unit The first purge gas supply unit delivers the first purge gas to the second liquid storage unit to pressurize the liquid source in the pipeline into the second liquid storage unit; When the liquid source in the pipeline is pressed into the second liquid storage unit, the second purge gas supply unit delivers the liquid to the third liquid storage unit. a second purge gas to allow the solution in the third liquid storage unit to clean the pipeline and the second liquid storage unit; When the dissolving liquid is added to the second liquid storage unit, the first purge gas supply unit delivers the first purge gas to the second liquid storage unit, so that the waste liquid of the second liquid storage unit flows to the fourth liquid storage unit; When the waste liquid in the second liquid storage unit is emptied, the first vacuum unit evacuates the gas in the second liquid storage unit; When the second liquid storage unit is in vacuum, the first purge gas supply unit delivers the first purge gas to the second liquid storage unit to purge the second liquid storage unit; When the purging of the second liquid storage unit is completed, the first vacuum unit evacuates the first purging gas from the second liquid storage unit; (IV) Cleaning the third liquid storage unit The first purge gas supply unit delivers the first purge gas to the third liquid storage unit to press the solution in the pipeline into the third liquid storage unit; When the solution in the pipeline is pressed into the third liquid storage unit, the first vacuum unit evacuates the gas in the third liquid storage unit; When the third liquid storage unit is in vacuum, the first purge gas supply unit delivers the first purge gas to the third liquid storage unit to purge the third liquid storage unit; When the purging of the third liquid storage unit is completed, the first vacuum unit evacuates the first purging gas inside the third liquid storage unit; (V) Cleaning the fourth liquid storage unit A first vacuum unit evacuates the gas in the fourth liquid storage unit; When the fourth liquid storage unit is in vacuum, the first purge gas supply unit delivers the first purge gas to the fourth liquid storage unit to purge the fourth liquid storage unit; When the purging of the fourth liquid storage unit is completed, the first vacuum unit evacuates the first purging gas of the fourth liquid storage unit.

10. The liquid source delivery method according to claim 9, characterized in that: Also includes: (VI) Gas-Liquid Separation The gas-liquid separation unit performs gas-liquid separation on the liquid source flowing out of the second liquid storage unit to remove gas in the liquid source, and flows the liquid source after gas-liquid separation to the process equipment; The second vacuum unit discharges the gas generated by the gas-liquid separation unit; and / or (VII) Liquid Evaporation The volatilization unit volatilizes and discharges the liquid in the pipeline and the fourth liquid storage unit; and / or The first vacuum unit is connected to the fourth liquid storage unit to accelerate the volatilization of the liquid in the fourth liquid storage unit; and / or (VIII) Leakage monitoring The liquid leakage monitoring unit is used to detect liquid leakage of the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit; The leakage monitoring unit is used to detect whether there is fluid accumulation; (IX) Ultrasonic monitoring The medium monitoring unit monitors whether the medium output by the third liquid storage unit is liquid, so as to detect whether the dissolution of the third liquid storage unit is sufficient.

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