Multifunctional dust collector for cleaning chamber of thin film deposition equipment

Abstract

The invention discloses a multifunctional dust collector for cleaning a cavity of thin film deposition equipment, and relates to the technical field of superconducting quantum computing, the multifunctional dust collector comprises a dust collector body and a water filtering pipe, the water filtering pipe is installed on the left side face of the dust collector body, and a water filtering device is installed in the dust collector body. Through the cooperation of the water filtering pipe, the water filtering device, the polymer sponge filtering device, the magnetic suction dust collection head assembly and the ultrasonic dust collection head assembly, the replaceable dust collection head can be flexibly selected according to the type and the requirement of the cavity, and the magnetic suction dust collection head assembly can accurately adsorb metal substances in the metallized cavity and prevent chippings from splashing. The ultrasonic dust collection head assembly can enable film particles adhered to the inner wall of the cavity to be separated, the problem that a common dust collector is small in suction force is solved, the water filtering pipe and the water filtering device cooperate to enable dust-containing air to make full contact with water for primary purification, and the macromolecule sponge filtering device can finely intercept small particles.

Description

Technical Field

[0001] The present invention relates to the technical field of superconducting quantum computing, and specifically, it is a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device. Background Art

[0002] As a key core component in the process of thin film preparation, the internal environment stability and cleanliness of the chamber of a thin film deposition device are directly related to the quality and performance of the thin film. This chamber provides a relatively enclosed and specific space environment for thin film deposition. In the cleaning operation of the chamber of a thin film deposition device, industrial vacuum cleaners are widely used, and usually, bag-type microporous filtration is adopted.

[0003] However, the initial filtration effect of traditional industrial vacuum cleaners is poor, unable to effectively intercept fine dirt particles, and prone to causing secondary pollution. During use, the micropores are easily blocked, resulting in a continuous decline in suction and motor power. Finally, when cleaning the filter bag, the operation is inconvenient and prone to causing pollution again, harming the environment and the operation of the equipment. Moreover, the suction head cannot be flexibly replaced according to different chamber types (such as metal plating chambers, etc.), making it difficult to adapt to diverse chamber environments, resulting in poor dust removal effects and hindering the cleaning process. Therefore, we provide a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device to solve the above problems. Summary of the Invention

[0004] The purpose of the present invention is to make up for the deficiencies of the prior art and provide a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device, including a vacuum cleaner body and a water filtration pipe. The water filtration pipe is installed on the left side of the vacuum cleaner body. A water filtration device is installed inside the vacuum cleaner body. The water filtration pipe is installed at the bottom of the water filtration device. A clean water tank is installed inside the vacuum cleaner body. The clean water tank is arranged below the water filtration device. A high molecular sponge filtration device is installed inside the vacuum cleaner body. The high molecular sponge filtration device is located on top of the water filtration device. A wet and dry motor is installed inside the vacuum cleaner body. The wet and dry motor is located on top of the high molecular sponge filtration device. One end of the water filtration pipe away from the vacuum cleaner body is installed with a connecting pipe. One end of the connecting pipe away from the water filtration pipe is installed with a magnetic suction head assembly or an ultrasonic suction head assembly.

[0006] Further, the magnetic suction head assembly includes a suction head one. The suction head one is installed at one end of the connecting pipe away from the water filtration pipe. A magnetic suction device is installed inside the suction head one. The magnetic suction device includes an iron core. The iron core is fixedly connected inside the suction head one. A magnet is fixedly connected to the surface of the iron core.

[0007] Furthermore, the ultrasonic dust suction head assembly includes a second dust suction head which is installed at one end of the connecting pipe away from the water filter pipe. A radiation plate is installed inside the second dust suction head, an ultrasonic transducer is installed inside the radiation plate, a control system is installed on the outer surface of the second dust suction head, and a first battery device is installed inside the second dust suction head.

[0008] Furthermore, lamp magnifying glass assemblies are installed on the outer surfaces of both the first dust suction head and the second dust suction head. The lamp magnifying glass assembly includes a housing, and a fixing device is installed on the outer surface of the housing. The housing is respectively connected to the first dust suction head and the second dust suction head through the fixing device.

[0009] Furthermore, a rotating device is installed at the upper end of the housing, a lighting lamp is installed at the top of the rotating device, a magnifying glass body is installed on the inner wall of the lighting lamp, a control button is installed on the outer surface of the housing, and a second battery device is installed inside the housing.

[0010] Furthermore, two air outlets are installed on the upper surface of the vacuum cleaner body. Both air outlets are communicated with the polymer sponge filtering device. A sewage valve is installed on the bottom surface of the vacuum cleaner body, a water inlet valve is installed on the left side surface of the vacuum cleaner body, and a power switch is installed on the upper surface of the vacuum cleaner body.

[0011] Compared with the prior art, the multifunctional vacuum cleaner for the chamber of the cleaning film deposition equipment has the following beneficial effects:

[0012] 1. Through the cooperation among the water filter pipe, the water filtering device, the polymer sponge filtering device, the magnetic adsorption dust suction head assembly and the ultrasonic dust suction head assembly, the replaceable dust suction head design can be flexibly selected according to the chamber type and requirements. The magnetic adsorption dust suction head assembly can accurately adsorb metal substances in the metal-plated chamber and avoid debris splashing. The ultrasonic dust suction head assembly can make the film particles adhering to the inner wall of the chamber fall off, solve the problem of small suction force of ordinary vacuum cleaners, improve the cleaning ability. The water filter pipe and the water filtering device cooperate to make the dust-containing air fully contact with water for preliminary purification. The polymer sponge filtering device finely intercepts tiny particles to ensure the cleanliness of the air at the air outlet and avoid secondary pollution, which is beneficial to the environment and the health of personnel.

[0013] 2. Through the cooperation among the water inlet valve, the sewage discharge valve and the magnifying glass assembly with a light, when the water quality of the water filtration device needs to be updated, the water inlet valve can be opened to supplement clean water to the clean water tank. When a certain amount of sewage and impurities accumulate in the water filtration device, the sewage discharge valve can be opened to discharge the sewage, preventing the accumulation of sewage in the device from affecting the filtration effect. Through the cooperation of the lighting lamp and the magnifying glass body, it is possible to better detect tiny dust in the chamber. The rotating device can be used to flexibly adjust the position, enabling it to better illuminate the interior of the chamber and enlarge the observation area, thus improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic plan view of the vacuum cleaner body and the connecting pipe of the present invention;

[0015] Figure 2 is a schematic plan view of the magnetic adsorption dust suction head assembly of the present invention;

[0016] Figure 3 is a schematic plan view of the ultrasonic dust suction head assembly of the present invention;

[0017] Figure 4 is a schematic plan view of the magnifying glass assembly with a light of the present invention.

[0018] In the figure: 1. Vacuum cleaner body; 2. Water filtration pipe; 3. Water filtration device; 4. Clean water tank; 5. High molecular sponge filtration device; 6. Wet and dry motor; 7. Air outlet; 8. Sewage discharge valve; 9. Water inlet valve; 10. Power switch; 11. Connecting pipe; 12. Magnetic adsorption dust suction head assembly; 121. Dust suction head one; 122. Magnetic adsorption device; 1221. Iron core; 1222. Magnet; 13. Ultrasonic dust suction head assembly; 131. Dust suction head two; 132. Ultrasonic transducer; 133. Radiation plate; 134. Control system; 135. Battery device one; 14. Magnifying glass assembly with a light; 141. Lighting lamp; 142. Magnifying glass body; 143. Rotating device; 144. Control button; 145. Fixing device; 146. Battery device two; 147. Shell. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The principles and features of the present invention will be described below with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0020] This embodiment provides a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device, which is used for performing dust suction and cleaning operations on the chamber of a thin film deposition device in the field of superconducting quantum computing technology, and the device can achieve fine multi-layer filtration, can replace a suitable dust suction head assembly according to different chambers, and can effectively improve the dust removal and cleaning effect on different chambers.

[0021] SeeFigures 1 to 4 , a multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device, comprising a vacuum cleaner body 1 and a water filter pipe 2. The water filter pipe 2 is installed on the left side of the vacuum cleaner body 1. A water filtration device 3 is installed inside the vacuum cleaner body 1. The water filter pipe 2 is installed at the bottom of the water filtration device 3. A clean water tank 4 is installed inside the vacuum cleaner body 1. The clean water tank 4 is arranged below the water filtration device 3. A polymer sponge filtration device 5 is installed inside the vacuum cleaner body 1. The polymer sponge filtration device 5 is located on the top of the water filtration device 3. A wet and dry motor 6 is installed inside the vacuum cleaner body 1. The wet and dry motor 6 is located on the top of the polymer sponge filtration device 5. One end of the water filter pipe 2 away from the vacuum cleaner body 1 is installed with a connecting pipe 11. One end of the connecting pipe 11 away from the water filter pipe 2 is installed with a magnetic suction dust head assembly 12 or an ultrasonic dust head assembly 13.

[0022] Dust-containing air can be introduced through the connecting pipe 11 and the water filter pipe 2, so that the dust-containing air can enter the water filtration device 3, and the clean water in the clean water tank 4 forms a strong water flow to separate the dust from the dust-containing air. The clean water tank 4 is connected to the water filtration device 3 through a pipe to provide clean water for the water filtration process and store the filtered sewage. The polymer sponge filtration device 5 is installed inside the vacuum cleaner body 1 and is located above the water filtration device 3 for further fine filtration of the air after water filtration. Both the magnetic suction dust head assembly 12 and the ultrasonic dust head assembly 13 can be installed at one end of the connecting pipe 11 away from the water filter pipe 2 and can be flexibly selected according to the chamber type and requirements. By starting the wet and dry motor 6, the vacuum cleaner body 1 can start working.

[0023] The magnetic suction dust head assembly 12 includes a dust head one 121. The dust head one 121 is installed at one end of the connecting pipe 11 away from the water filter pipe 2. A magnetic suction device 122 is installed inside the dust head one 121. The magnetic suction device 122 includes an iron core 1221. The iron core 1221 is fixedly connected inside the dust head one 121. A magnet 1222 is fixedly connected to the surface of the iron core 1221.

[0024] The magnetic attraction device 122 is installed inside the first dust suction head 121. The magnetic attraction device 122 consists of a magnet 1222 and an iron core 1221. The magnet 1222 is firmly fixed on the iron core 1221, and the iron core 1221 is fixedly connected to the first dust suction head 121. The magnet 1222 uses a high-strength permanent magnet and can generate a strong magnetic field. The iron core 1221 is made of a material with high magnetic permeability and can effectively conduct the magnetic field. During use, when the main body of the vacuum cleaner operates, the first dust suction head 121 comes into contact with dust and sundries. The magnet 1222 in the magnetic attraction device 122 will adsorb ferromagnetic substances such as metal debris in the dust on the iron core 1221, preventing these metal substances from splashing everywhere during the cleaning process, while the dust or other sundries are sucked into the main body of the vacuum cleaner and then undergo water filtration cleaning, reducing the pollution of metal substances to the environment.

[0025] The ultrasonic dust suction head assembly 13 includes a second dust suction head 131. The second dust suction head 131 is installed at one end of the connecting pipe 11 away from the water filtration pipe 2. A radiation plate 133 is installed inside the second dust suction head 131, an ultrasonic transducer 132 is installed inside the radiation plate 133, a control system 134 is installed on the outer surface of the second dust suction head 131, and a first battery device 135 is installed inside the second dust suction head 131.

[0026] The radiation plate 133 is installed inside the second dust suction head 131. The ultrasonic transducer 132 is arranged inside the radiation plate 133. The control system 134 is electrically connected to the ultrasonic transducer 132. The ultrasonic transducer 132 can efficiently convert electrical energy into ultrasonic energy. The radiation plate 133 is used to evenly transfer the ultrasonic energy to the surface to be cleaned. The control system 134 can control the operation of the ultrasonic transducer 132. A plurality of micropores are provided on the surface of the radiation plate 133, and these micropores can significantly increase the propagation area of the ultrasonic wave, thereby improving the cleaning effect. The first battery device 135 provides a stable power supply for the entire ultrasonic system. During actual cleaning of the chamber, the ultrasonic transducer 132 is started to work by the control system 134 to generate ultrasonic energy, which is transferred to the surface of the chamber wall waiting to be cleaned through the radiation plate 133. Under the action of the ultrasonic wave, the dust and particulate matter vibrate and fall off from the surface, and then are sucked into the dust collector body 1 and undergo subsequent filtration treatment, effectively solving the problems of too small suction force of ordinary vacuum cleaners and difficulty in cleaning the adhered film particles in the chamber.

[0027] Lamp magnifying glass assemblies 14 are installed on the outer surfaces of both the first dust suction head 121 and the second dust suction head 131. The lamp magnifying glass assembly 14 includes a housing 147. A fixing device 145 is installed on the outer surface of the housing 147, and the housing 147 is connected to both the first dust suction head 121 and the second dust suction head 131 through the fixing device 145.

[0028] The magnifying glass component 14 with a light can be quickly installed on the outer surface of the dust suction head 121 or the dust suction head 131 through the set fixing device 145, which can provide lighting and magnification assistance during dust suction, facilitating the improvement of cleaning efficiency.

[0029] A rotating device 143 is installed at the upper end of the housing 147. A lighting lamp 141 is installed at the top of the rotating device 143. A magnifying glass body 142 is installed on the inner wall of the lighting lamp 141. A control button 144 is installed on the outer surface of the housing 147. A battery device two 136 is installed inside the housing 147.

[0030] The brightness of the lighting can be adjusted in gears through the control button 144. According to the actual needs during the chamber cleaning process, the position can be flexibly adjusted by using the rotating device 143, enabling it to better illuminate the interior of the chamber and magnify the observation area. In this way, when the operator is cleaning the chamber, there is no need to additionally search for a light source, and the tiny dust falling inside the chamber can be clearly observed through the magnifying function of the magnifying glass body 142, greatly improving the work efficiency and reducing cleaning omissions. The battery device two 146 can provide stable power supply for the entire lighting system.

[0031] A total of two air outlets 7 are installed on the upper surface of the vacuum cleaner body 1. Both air outlets 7 are communicated with the polymer sponge filtering device 5. A sewage discharge valve 8 is installed on the bottom surface of the vacuum cleaner body 1. A water inlet valve 9 is installed on the left side surface of the vacuum cleaner body 1. A power switch 10 is installed on the upper surface of the vacuum cleaner body 1.

[0032] After the polymer sponge filtering device 5 cleans the air, it can be quickly discharged from the air outlet 7. When the water quality of the water filtering device 3 needs to be updated, the water inlet valve 9 can be opened to supplement clean water to the clean water tank 4. When a certain amount of sewage and impurities accumulate in the water filtering device 3, the sewage discharge valve 8 can be opened to discharge the sewage, avoiding the accumulation of sewage in the device and affecting the filtering effect. The dry and wet motor 6 can be started to work through the power switch 10.

[0033] Working principle: When the device is in use, replace the magnetic suction dust head assembly 12 or the ultrasonic dust head assembly 13 according to the type of the chamber. Start the wet and dry motor 6 through the power switch 10 to make the vacuum cleaner body 1 start to work. Then, the dust-containing air enters the connecting pipe 11 through the replaceable magnetic suction dust head assembly 12 or the ultrasonic dust head assembly 13 of the dust head, and then enters the water filter pipe 2. Through the water filter pipe 2, the water filter device 3 and the clean water tank 4, the dust and sundries are separated by the adsorption and entrainment effects of the clean water. When working, the water filter device 3 can make the strong water flow generated by the clean water greatly enhance the dust removal ability. The air filtered by water then passes through the polymer sponge filter device 5 for filtration. Its fine pores can intercept tiny dust, ensuring clean air and discharging it from the air outlet 7. When the dust and dirt accumulate to a certain extent after the water filter device 3 has been used for a long time, open the sewage discharge valve 8 to drain the sewage, and then supplement the clean water through the water inlet valve 9. When using the magnetic suction dust head assembly 12 for dust suction, when the dust head 121 contacts the dust and sundries, the internal magnetic suction device 122 operates. Among them, the magnet 1222 generates a magnetic field, adsorbing ferromagnetic substances such as metal debris in the dust on the iron core 1221, and the remaining dust enters the subsequent water filtration link under suction. When using the ultrasonic dust head assembly 13 for dust suction, the battery device 135 supplies power to the ultrasonic transducer 132. The ultrasonic transducer 132 converts electrical energy into ultrasonic energy, and the control system 134 controls the parameters for stable operation. The ultrasonic wave is transmitted to the surface to be cleaned through the radiation plate 133. The ultrasonic vibration makes the dust and particles fall off from the surface, and then they are sucked in and filtered subsequently. The lamp magnifier assembly 14 is installed on the head of the dust head 121 or the dust head 131 through the fixing device 145, and is powered by the battery device 136. The brightness of the lighting lamp 141 is adjusted through the control button 144, and the angle and position of the lighting lamp 141 and the magnifying glass body 142 are adjusted through the rotating device 143. When cleaning the chamber, the lighting lamp 141 can illuminate the inside of the chamber, and the magnifying glass body 142 magnifies the tiny dust, facilitating the operator to discover and clean it.

[0034] The above are only the preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device, comprising a vacuum cleaner body (1) and a water filter tube (2), characterized in that: The water filter pipe (2) is installed on the left side of the vacuum cleaner body (1); a water filter device (3) is installed inside the vacuum cleaner body (1); the water filter pipe (2) is installed at the bottom of the water filter device (3); a clean water tank (4) is installed inside the vacuum cleaner body (1); the clean water tank (4) is arranged below the water filter device (3); a polymer sponge filter device (5) is installed inside the vacuum cleaner body (1); the polymer sponge filter device (5) is located on the top of the water filter device (3); a dry-wet motor (6) is installed inside the vacuum cleaner body (1); the dry-wet motor (6) is located on the top of the polymer sponge filter device (5); a connecting pipe (11) is installed at one end of the water filter pipe (2) away from the vacuum cleaner body (1); a magnetic suction head assembly (12) or an ultrasonic suction head assembly (13) is installed at one end of the connecting pipe (11) away from the water filter pipe (2).

2. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device according to claim 1, characterized in that: The magnetic suction dust head assembly (12) comprises a dust head (121), the dust head (121) being mounted at one end of the connecting pipe (11) away from the water filter pipe (2), a magnetic suction device (122) being mounted inside the dust head (121), the magnetic suction device (122) comprising an iron core (1221), the iron core (1221) being fixedly connected inside the dust head (121), and a magnet (1222) being fixedly connected to the surface of the iron core (1221).

3. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device according to claim 1, characterized in that: The ultrasonic cleaner head assembly (13) comprises a second cleaner head (131), the second cleaner head (131) being mounted at one end of the connecting pipe (11) away from the water filter pipe (2), a radiation plate (133) being mounted inside the second cleaner head (131), an ultrasonic transducer (132) being mounted inside the radiation plate (133), a control system (134) being mounted on the outer surface of the second cleaner head (131), and a battery device (135) being mounted inside the second cleaner head (131).

4. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device according to claim 2, characterized in that: The outer surfaces of the first dust collector head (121) and the second dust collector head (131) are both installed with a lighted magnifying glass assembly (14), and the lighted magnifying glass assembly (14) comprises a shell (147), and a fixing device (145) is installed on the outer surface of the shell (147), and the shell (147) is respectively connected to the first dust collector head (121) and the second dust collector head (131) through the fixing device (145).

5. A multifunctional vacuum cleaner for cleaning a chamber of a thin film deposition device according to claim 4, characterized in that: A rotating device (143) is installed at the upper end of the shell (147), a lighting lamp (141) is installed on the top of the rotating device (143), a magnifying glass body (142) is installed on the inner wall of the lighting lamp (141), a control button (144) is installed on the outer surface of the shell (147), and a battery device 2 (136) is installed inside the shell (147).

6. The multifunctional vacuum cleaner for cleaning the chamber of a thin film deposition device according to claim 1, characterized in that: The upper surface of the vacuum cleaner body (1) is provided with two air outlets (7), both of which are connected to the polymer sponge filtering device (5); the bottom surface of the vacuum cleaner body (1) is provided with a sewage discharge valve (8); the left side surface of the vacuum cleaner body (1) is provided with a water inlet valve (9); and the upper surface of the vacuum cleaner body (1) is provided with a power switch (10).

Images