Device and method for realizing micro-nano optical control on planar solid substrate

Abstract

The invention discloses a device for realizing micro-nano optical control on a planar solid substrate. The device comprises a pulse laser; the energy adjusting element is used for adjusting the energy of the pulse laser emitted by the pulse laser; the focusing objective lens is used for focusing the incident pulse laser beam to form a driving light spot; the substrate is used for supporting a controlled micro-nano sample; the two-dimensional motion mechanism is used for controlling and driving the relative position of the light spot and the micro-nano sample; the substrate is in Van der Waals contact with the micro-nano sample; and during control, the driving light spot is asymmetrically focused on the micro-nano sample. The method is easy and convenient to operate and high in repeatability, has the remote and non-contact characteristics of general light control, and can realize high-precision, arbitrary-direction and long-distance optical control on a solid interface with high adhesion force in a breakthrough manner under the condition that no special requirements are provided for experimental instruments.

Description

Technical Field

[0001] The present invention relates to the field of optical manipulation, and particularly to a device and method for realizing micro-nano optical manipulation on a planar solid substrate. Background Art

[0002] Micro-nano manipulation refers to the technology of manipulating substances with micron and nano sizes at the micro scale. Micro-nano optical manipulation refers to manipulating objects with micron and nano sizes by using optical means such as lasers, focusing optical elements, and optical path deflection elements at the micro scale. It has the characteristics of being remote and non-contact, and can ensure to the greatest extent that the objects to be manipulated are not contaminated or mechanically damaged during the manipulation process.

[0003] Traditional micro-nano optical manipulation is generally realized in a liquid or gas environment, collectively referred to as a fluid environment. Among them, the single-beam optical tweezer technology first invented and proposed by scientist Arthur Ashkin of Bell Labs in 1986 won the Nobel Prize in Physics in 2018 in recognition of its outstanding achievements in the field of biochemistry. In addition, Chinese scientist Steven Chu also won the Nobel Prize in Physics in 1997 for his manipulation and research on cold atoms using optical tweezer technology. Optical tweezer technology mainly uses the momentum of light to exert a force on matter in the interaction between light and matter. A tightly focused light beam can capture microscopic objects that should perform random Brownian motion in a fluid, manipulate their movement, and study their properties. However, the force generated by the momentum of light is very small and can only be used to overcome the viscous resistance in a fluid environment. Its magnitude is much smaller than the frictional force on a solid interface. Therefore, traditional optical manipulation means cannot be applied to a solid environment. In addition to optical tweezers, other light manipulation technologies, including photophoretic force, photoelectrostatic force, etc., rely on a liquid environment and cannot be extended to a solid interface.

[0004] At the macroscopic scale, researchers have proposed that optical manipulation robots can be made using the photothermal deformation generated by the light absorption of an object. Generally, liquid crystal materials, polymer materials, or phase change materials with large photo-induced deformation capabilities are used. In addition, the sizes of these optical manipulation robots are generally above the millimeter level, and their movement depends on patterning the original material to process structures similar to mechanical feet or animal joints in order to achieve stable movement. Due to the existence of mechanical feet, the contact area between these optical manipulation robots and the planar solid substrate will be greatly reduced, which objectively promotes the movement of the robots. However, directly using the original material without patterning for optical manipulation of a planar solid substrate at the micro scale is still an unsolved problem due to the difficulty of overcoming the huge frictional resistance. The solution to this problem will have a significant impact on fields such as the preparation and processing of micro-nano optical devices, two-dimensional material interface science, and top-down micro-nano assembly. Summary of the Invention

[0005] In view of the deficiency of the prior art in accurately manipulating micro-scale objects on a planar solid substrate, the present invention provides a device and method for high-precision manipulation of micro-objects on a solid interface by using pulsed laser and a simple laser processing vertical optical path.

[0006] The present invention is specifically implemented through the following technical solutions:

[0007] A device for realizing micro-nano optical manipulation on a planar solid substrate, comprising:

[0008] A pulsed laser;

[0009] An energy adjustment element for adjusting the energy of the pulsed laser emitted from the pulsed laser;

[0010] A focusing objective lens for focusing the incident pulsed laser beam to form a driving light spot;

[0011] A substrate for supporting the controlled micro-nano sample;

[0012] A two-dimensional motion mechanism for controlling the relative position of the driving light spot and the micro-nano sample;

[0013] There is a van der Waals contact between the substrate and the micro-nano sample; during manipulation, the driving light spot is asymmetrically focused on the micro-nano sample.

[0014] The asymmetry refers to an initial offset of the light spot center relative to the centroid of the micro-nano material (sample), especially the centroid of the micro-nano material with a regular geometric shape. After the micro-nano material moves, it tends to eliminate this asymmetry. When it finally stops moving, the offset between the light spot center and the centroid of the micro-nano material will decrease or become zero.

[0015] Preferably, it further includes:

[0016] An illumination light source;

[0017] An optical imaging device for determining the initial position of the driving light spot and performing real-time imaging on the entire process of optical manipulation.

[0018] The optical imaging device is a photosensitive element, a charge-coupled device, a microscope camera, etc. If necessary, it can be combined with a computer and a display screen for imaging. It is used to enable the operator to observe the relative position of the manipulated object and the light spot center while performing the micro-nano optical manipulation on the planar solid substrate, facilitating the real-time monitoring and control of the movement of the manipulated object.

[0019] Preferably, it further includes an optical path element for optical path orientation, and the optical path element is composed of one or more of a mirror, a lens, a dichroic mirror, etc.

[0020] The pulsed laser outputs a driving light source for manipulating micro-nano objects. The energy adjustment element is used to adjust the energy of the initial pulsed laser output by the pulsed laser to meet the needs of driving the micro-nano sample, thereby realizing the optical manipulation of the controlled micro-nano sample. When adjusting the pulsed laser, the minimum limit is that the finally obtained driving spot can overcome the frictional force of the micro-nano sample to achieve movement, and the maximum limit is to avoid burning the micro-nano sample. The actual value of the laser energy that the energy adjustment element needs to adjust can be determined according to the actually required moving speed. The energy adjustment element is an attenuation sheet or an energy adjustment device built in the pulsed laser.

[0021] The focusing objective lens is used to focus the laser beam output by the pulsed laser, and finally form a driving spot.

[0022] The substrate is a planar substrate, that is, a planar solid substrate; the planar solid substrate is a common planar substrate in micro-nano optical manufacturing and laboratories, and it can be a solid substrate made of any material with a flat surface, such as silicon wafers, glass slides, sapphire substrates, indium tin oxide substrates, etc. The absorbent material and the substrate are affected by the van der Waals adhesion force. When the two move relative to each other, the absorbent material will be affected by the frictional force.

[0023] The two-dimensional motion mechanism is a displacement stage; the displacement stage carries a planar solid substrate, and the micro-nano material to be manipulated is transferred on the substrate.

[0024] The displacement stage is a manual mechanical displacement stage or an electric displacement stage. The substrate is placed on the displacement stage and can carry the planar solid substrate fixed thereon to move in various directions and set distances; by using the displacement stage, the moving direction and moving distance of the sample fixed thereon can be controlled, so as to continuously change and update the relative offset between the shape center of the micro-object to be manipulated and the spot center.

[0025] The micro-nano sample has micro-nano dimensions and has light absorption for the pulsed laser light source, and is a micro-nano absorbent material. It can be metal micro-sheets, nano-wires obtained by chemical synthesis or micro-nano processing methods, two-dimensional materials peeled off by the tape transfer method, etc.

[0026] The pulsed laser is a broadband light source or a single-wavelength light source, and the microscopic material to be manipulated can absorb at least a part of the wavelength range output by the laser.

[0027] The pulsed laser can be a broadband light source, including a supercontinuum light source; or a single-wavelength pulsed laser light source, including nanosecond pulsed laser, picosecond pulsed laser, femtosecond pulsed laser, etc.

[0028] The intensity distribution of the focused light spot generally satisfies the Gaussian distribution, with the strongest intensity in the middle and Gaussian attenuation along the radial direction, having circular symmetry characteristics. That is, preferably, the light spot is a Gaussian light spot. The focusing objective lens can focus the pulsed laser light spot into a Gaussian light spot and focus it on the microscopic object (micro-nano sample) to be manipulated. During manipulation, the center of the Gaussian light spot deviates from the centroid of the micro-nano sample to achieve the asymmetry.

[0029] Preferably, the diameter of the Gaussian light spot is generally smaller than the maximum lateral dimension of the light-absorbing micro-nano material, so as to further ensure that the transient deformation generated by the asymmetry of light absorption is sufficient to overcome the action of friction.

[0030] Preferably, starting from the centroid of the micro-nano sample, the center of the Gaussian light spot is located on the line connecting the centroid of the micro-nano sample and its edge, but does not coincide with the centroid.

[0031] As a further preference, in order to ensure the simultaneous introduction of sufficient asymmetry and sufficient light absorption, starting from the centroid of the micro-nano sample, the center of the Gaussian light spot is located at 1 / 4 to 3 / 4 of the line connecting the centroid of the micro-nano sample and its edge. As a further preference, the center of the Gaussian light spot is located around the middle position of the line connecting the centroid of the micro-nano sample and its edge and slightly closer to the edge. As a more specific preference, starting from the centroid of the micro-nano sample, the center of the Gaussian light spot is located at 1 / 2 to 3 / 4 of the line connecting the centroid of the micro-nano sample and its edge.

[0032] A method for realizing micro-nano optical manipulation on a planar solid substrate, using the device described in any of the above technical solutions for manipulation, including:

[0033] (1) Place the substrate with the controlled micro-nano sample on the support surface of the two-dimensional motion mechanism;

[0034] (2) Turn on the pulsed laser to form a driving light spot, and control the obtained driving light spot to be asymmetrically focused on the controlled micro-nano sample;

[0035] (3) At the same time, turn on the two-dimensional motion mechanism to move the substrate, maintain the asymmetric state, and the micro-nano sample will move to achieve the micro-nano optical manipulation.

[0036] In the method of the present invention, a micro-nano sized light-absorbing material (i.e., micro-nano sample) is transferred onto a planar solid substrate and mounted on a displacement stage, so that the light-absorbing material is in relatively close contact with the substrate; then the pulsed laser is asymmetrically focused on the above light-absorbing material by using the objective lens of the microscope system or a separate objective lens, and the light-absorbing material will move to eliminate the asymmetry in the initial state; through the observation of the optical imaging system, continuously move the displacement stage to change the relative position of the focused light spot and the microchip, and the microchip will move continuously.

[0037] Furthermore, the method for realizing micro-nano optical manipulation on a planar solid substrate includes:

[0038] Move the displacement stage so that the microscopic object to be manipulated (micro-nano sample) enters the field of view of the optical imaging system, and control the center of the pulsed light spot focused by the optical path focusing system to act on the object to be manipulated, but deviate from the shape center of the object to be manipulated.

[0039] Turn on the pulsed laser. The pulsed laser will be focused by the optical path focusing system to a position deviating from the shape center of the microscopic object to be manipulated. The microscopic object to be manipulated moves towards the center of the light spot until the shape center of the object to be manipulated basically coincides with the center of the light spot.

[0040] Move the displacement stage again so that the shape center of the microscopic object deviates from the center of the light spot again. The microscopic object will move towards the center of the light spot again until the offset between its shape center and the center of the light spot is approximately zero.

[0041] Repeat the above steps, and the microscopic object will move along the path set by the operator on the planar substrate. The way to set the path is to control the offset direction and offset size of the shape center of the microscopic object relative to the center of the light spot each time the displacement stage is moved.

[0042] In the present invention, the single-pulse energy and frequency of the pulsed laser can be actively regulated to adapt to the driving thresholds and thermal accumulation conditions of different materials. When the pulse frequency remains unchanged, the greater the single-pulse energy, the greater the movement distance of the micro-nano sample under the action of each pulse; when the single-pulse energy remains unchanged, the higher the repetition frequency, the faster the movement speed of the micro-nano sample.

[0043] Preferably, the repetition frequency, single-pulse energy, and the number of output pulses of the pulsed laser can all be actively regulated. The pulsed laser controller can be a computer, a control chip, a control circuit board, a signal generator, etc., mainly to control the repetition frequency, single-pulse energy, and number of pulses of the pulsed laser, thereby achieving more precise manipulation of the microscopic object on the planar solid substrate.

[0044] Before implementing the manipulation, quantitatively obtain the positional relationship between the center of the Gaussian light spot and the centroid of the micro-nano sample and the position and direction of the movement direction of the micro-nano sample in advance; implement the manipulation and use this quantitative positional relationship to control the movement direction of the micro-nano sample.

[0045] Before implementing the manipulation, for a specific micro-nano sample material, quantitatively obtain the speed relationship between the light spot energy and light spot frequency and the movement speed of the micro-nano sample in advance. Implement the manipulation and use this speed quantitative relationship to control the movement speed of the micro-nano sample.

[0046] Of course, real-time adjustment can also be directly performed during the manipulation process. That is, during actual manipulation, the described optical imaging device can be used to enable the operator to observe the motion of the micro-object being manipulated in real time, and then change the parameters of the pulsed laser and the offset between the laser spot and the center of the micro-object shape in real time. Uniform speed, variable speed, linear or arbitrary direction control of the micro-nano sample can be achieved.

[0047] The principle of realizing micro-nano optical manipulation on a planar solid substrate is briefly described as follows: The micro-nano material absorbs the energy of the pulsed laser incident vertically (of course, it can also be in other directions) and undergoes a photothermal effect. Due to the pulsed nature of this heat source, the material will generate pulsed thermal expansion and contraction and excite elastic waves inside the material, thereby causing elastic deformation of the material. When the driving spot irradiates the micro-nano material asymmetrically, the material will undergo asymmetric elastic deformation, thus generating a directionality of motion, that is: when the material finally reaches thermal equilibrium after the heating and cooling processes, the material will exhibit a displacement from the centroid of the material towards the center of the heat source (spot center). We continuously adjust the distance between the sample centroid and the spot to maintain this driving force, and finally achieve all-round manipulation of the micro-nano sample.

[0048] Through the method of the present invention, a micro-nano-sized light-absorbing material is transferred onto a planar solid substrate to make it in full contact with the substrate. The substrate is placed on a displacement stage, and the pulsed laser is asymmetrically focused on the microplate by using a microscope system. The microplate moves towards the direction with stronger light absorption, accompanied by translational motion of the center of mass and in-plane rotation; by adjusting the displacement stage to continuously change the relative position between the focused spot and the microplate, the microplate will move continuously according to the absorption asymmetry. By controlling the magnitude of the above asymmetry, the repetition frequency of the pulsed laser, the single-pulse energy, etc., the speed of the microplate movement, the stop position and posture of the movement can be precisely adjusted; by controlling the relative position between the spot and the microplate, the microplate can be precisely manipulated to move in any direction.

[0049] The beneficial effects of the present invention are: The present invention realizes the optical driving of micro-nano objects on the most common solid interface - a planar solid substrate by using common instruments and a simple optical path system, making up for the deficiency that traditional optical manipulation means can only be limited to the liquid environment. Brief Description of the Drawings

[0050] Figure 1 It is a schematic diagram of the optical manipulation device of the planar solid substrate of the present invention.

[0051] Reference numerals 1-8 respectively represent:

[0052] 1 - Pulse laser, 2 - Attenuator, 3 - Dichroic mirror, 4 - Focusing objective lens, 5 - Illumination light source, 6 - Manipulated micro - nano sample, 7 - Planar solid substrate, 8 - Displacement stage, 9 - Optical imaging device, 10 - Lens I, 11 - Lens II, 12 - Mirror.

[0053] Figure 2 This is the effect demonstration of the planar solid - substrate optical manipulation method of the present invention on two - dimensional materials exfoliated by (tape) mechanical exfoliation. Among them, a large multi - layer graphite on a silicon substrate is manipulated by laser to move, while another small multi - layer graphite is not asymmetrically irradiated by the pulsed laser and stays still, serving as the motion reference for the manipulated multi - layer graphite.

[0054] Figure 3 This is the experimental effect demonstration of the planar solid - substrate optical manipulation method of the present invention. Among them, five different micro - gold flakes on a quartz glass substrate are irradiated by an asymmetric pulsed - laser spot. By continuously adjusting the displacement stage, the relative position between the spot and the center of the gold flake is continuously changed, guiding the above - mentioned five micro - gold flakes to move to different positions on the substrate and form a pattern respectively. After a single assembly, the gold flakes can be moved to other positions to build the next pattern. This technology can achieve erasable and reconfigurable top - down optical - controlled assembly. Detailed implementation manners

[0055] The present invention will be further described in detail with reference to the accompanying drawings and specific implementation examples, but the implementation manners of the present invention are not limited thereto.

[0056] An apparatus and method for realizing micro - nano optical manipulation on a planar solid substrate, including a pulse laser, a focusing objective lens, an illumination light source, an attenuator, a displacement stage and any planar substrate carried by the displacement stage, an optical imaging device and some necessary optical - path components.

[0057] Among them, the pulse laser is a broadband light source or a single - wavelength light source, which can be one of a super - continuum light source, a nanosecond pulsed laser, a picosecond pulsed laser and a femtosecond pulsed laser; the single - pulse energy and repetition frequency of the pulse laser can be actively regulated.

[0058] Among them, the focusing objective lens focuses the incident pulsed - laser beam into a Gaussian spot with a diameter in the range of hundreds of nanometers to micrometers.

[0059] Among them, the attenuator can externally regulate the single - pulse energy output by the pulse laser.

[0060] Among them, the displacement stage is a manual mechanical or electric displacement stage, which can carry a planar solid substrate fixed thereon and move in various directions and at a set distance. In the optical manipulation experiment of the planar solid substrate, the displacement stage can be used to carry the movement of the planar solid substrate to change the relative position between the focused Gaussian spot and the shape center of the manipulated sample in real time, so as to manipulate the sample to perform continuous directional movement.

[0061] Among them, the optical imaging device is a charge-coupled device, a microscope camera, etc., which can perform real-time imaging on the entire process of optical manipulation, facilitating the operator to master the experimental process and sample information.

[0062] Among them, the optical path component generally includes one or more lenses, dichroic mirrors, mirrors, and their combinations, etc., which play the role of adjusting and controlling the optical path.

[0063] As Figure 1 shown, a device for realizing micro-nano optical manipulation on a planar solid substrate. In this embodiment, the device is composed of a pulsed laser 1, a rotating attenuator 2, a dichroic mirror 3, a focusing objective 4, an illumination light source 5, a planar solid substrate 7, a displacement stage 8, an optical imaging device 9, a lens I 10, a lens II 11, a mirror 12, etc.

[0064] During use, the pulsed laser 1 emits laser pulses, which enter the rotating attenuator 2 as driving beams. The rotating attenuator 2 can adjust the transmitted single-pulse energy of the laser pulses after passing through the attenuator 2. The dichroic mirror 3 has a high reflection characteristic for the wavelength of the pulsed laser, and can reflect the laser beam incident at 45° to the focusing objective 4. The pulsed beam is focused into a Gaussian spot by the objective 4 and irradiates on the surface of the micro-nano sample 6. The sample 6 has van der Waals contact with the planar solid substrate 7 below it. The planar solid substrate 7 is fixed on the displacement stage 8. By moving the displacement stage 8, the relative position between the shape center (centroid) of the sample 6 and the center of the Gaussian spot can be adjusted, realizing the asymmetric irradiation of the pulsed laser spot on the sample, that is, the centroid of the sample 6 does not coincide with the center of the Gaussian spot. Due to the asymmetric elastic deformation of the micro-nano sample 6, when the single-pulse energy exceeds a certain threshold, the sample 6 can overcome the frictional force exerted by the substrate 7 and move. The divergent illumination light source 5 is converged into a parallel beam by the lens 10 and enters the focusing objective 4, providing illumination conditions for the experiment. The illumination beam carrying the microscopic image information of the experimental process and the driving beam are combined at the dichroic mirror 3 and sequentially pass through the lens 11 and the mirror 12 to reach the optical imaging device 9. The optical imaging device 9 is connected to a computer and can perform real-time imaging on the experimental process. The operator can search for the sample and conduct optical manipulation experiments according to the imaging information.

[0065] Using the above implementation method, the mechanically exfoliated two-dimensional material (a piece of multi-layer graphite) can be manipulated to move in any orientation on the planar solid substrate, such asFigure 2 as shown Figure 2 Shown is the movement process of a (relatively large) micron multi-layer graphite relative to a smaller multi-layer graphite (stationary) on a silicon substrate.

[0066] Take Figure 2 as an example. First, move the displacement stage so that the target two-dimensional material enters the imaging field of view of the optical imaging device. Turn on the pulsed laser. The pulsed laser beam emitted by the laser is focused by the objective lens into a driving spot. By adjusting the displacement stage, the relative position between the center of the driving spot and the centroid of the target two-dimensional material is adjusted to achieve asymmetric illumination. Adjust the rotating attenuator to control the pulsed laser energy until the two-dimensional material makes an initial movement (observed through the optical imaging device), that is, the pulsed laser energy reaches the driving threshold of the target material. When the attenuator is adjusted to the appropriate position, move the displacement stage to control the relative position between the driving spot and the centroid of the target two-dimensional material to make the target two-dimensional material move in a directed and continuous manner. When it moves to the preset position, stop moving the displacement stage or turn off the light source (or block the light path) to stop the movement of the target material. If you want to continue to adjust the position of the target material, you can turn on the light source again and repeat the above steps to achieve erasable and reconfigurable fine adjustment.

[0067] Using the above implementation method, metal sheets obtained by chemical synthesis or micro-nano processing can be manipulated for optical assembly on a planar substrate, as Figure 3 shown Figure 3 Shown is that five micron gold sheets are used to achieve erasable and reconfigurable assembly on a planar solid substrate. Figure 3 The scale in

[0068] The above are only selected implementation examples of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A device for realizing micro-nano optical manipulation on a planar solid substrate, characterized in that, it includes: a pulsed laser; an energy adjustment element for adjusting the energy of the pulsed laser emitted from the pulsed laser; a focusing objective lens for focusing the incident pulsed laser beam to form a driving spot; a substrate for supporting the controlled micro-nano sample; a two-dimensional motion mechanism for controlling the relative position of the driving spot and the micro-nano sample; the substrate and the micro-nano sample are in van der Waals contact; during manipulation, the driving spot is asymmetrically focused on the micro-nano sample.

2. The device for realizing micro-nano optical manipulation on a planar solid substrate according to claim 1, characterized in that, it further includes: an illumination light source; an optical imaging device for determining the initial position of the driving spot and for real-time imaging of the entire process of optical manipulation.

3. The device for realizing micro-nano optical manipulation on a planar solid substrate according to claim 1, characterized in that, it further includes an optical path element for optical path orientation, and the optical path element is composed of one or more of a mirror, one or more lenses, and one or more dichroic mirrors.

4. The device for realizing micro-nano optical manipulation on a planar solid substrate according to claim 1, characterized in that, the two-dimensional motion mechanism is a manual mechanical or electric displacement stage, and the substrate is placed on the displacement stage; the energy adjustment element is an attenuation sheet; the optical imaging device is a photosensitive element, a charge-coupled device, or a microscope camera.

5. The device for realizing micro-nano optical manipulation on a planar solid substrate according to claim 1, characterized in that, the substrate is a planar substrate; the micro-nano sample is a metal micron sheet, a nanowire, a two-dimensional material peeled off by the tape transfer method, and any other micro-nano scale object that can generate a photothermal effect; the pulsed laser is a broadband light source or a single-wavelength light source; the pulsed laser is one of a supercontinuum light source, a nanosecond pulsed laser, a picosecond pulsed laser, and a femtosecond pulsed laser.

6. The device for realizing micro-nano optical manipulation on a planar solid substrate according to claim 1, characterized in that, the spot is a Gaussian spot, and the center of the Gaussian spot deviates from the centroid of the micro-nano sample; the diameter of the Gaussian spot is smaller than the maximum lateral dimension of the light-absorbing micro-nano material.

7. The device for realizing micro-nano optical manipulation on a planar solid substrate according to claim 6, characterized in that, starting from the centroid of the micro-nano sample, the center of the Gaussian spot is located on the line connecting the centroid of the micro-nano sample and its edge, but does not coincide with the centroid.

8. A method for realizing micro-nano optical manipulation on a planar solid substrate, characterized in that, using the device according to any one of claims 1 to 7, including: (1) Placing the substrate with the controlled micro-nano sample on the support surface of the two-dimensional motion mechanism; (2) Turning on the pulsed laser to form a driving spot, and controlling the obtained driving spot to be asymmetrically focused on the controlled micro-nano sample; (3) Simultaneously turning on the two-dimensional motion mechanism to move the substrate, maintaining the asymmetric state, and the micro-nano sample will move to realize the micro-nano optical manipulation.

9. The method for realizing micro-nano optical manipulation on a planar solid substrate according to claim 8, It is characterized in that Before implementing the manipulation, quantitatively obtain the positional and directional relationship between the center of the Gaussian light spot and the centroid of the micro-nano sample and the moving direction of the micro-nano sample in advance; when implementing the manipulation, use this positional and directional quantitative relationship to achieve the manipulation of the moving direction of the micro-nano sample.

10. The method for realizing micro-nano optical manipulation on a planar solid substrate according to claim 8 It is characterized in that Before implementing the manipulation, for a specific micro-nano sample material, quantitatively obtain the velocity quantitative relationship between the light spot energy and the light spot frequency and the moving speed of the micro-nano sample in advance; when implementing the manipulation, use this velocity quantitative relationship to achieve the manipulation of the moving speed of the micro-nano sample.

Images