Workpiece with diamond-like carbon film

Abstract

The invention discloses a workpiece with a diamond-like carbon film. The workpiece comprises a base material, a first diamond-like carbon film layer, a silicon nitride film layer, a second diamond-like carbon film layer and an elastomer layer, the first-type diamond film layer is arranged on the base material, the silicon nitride film layer is arranged on the first-type diamond film layer, the second-type diamond film layer is arranged on the silicon nitride film layer, the first-type diamond film layer, the silicon nitride film layer and the second-type diamond film layer form a diamond-like composite film structure, and the elastomer layer is arranged on the second-type diamond film layer. In addition, the ratio of the total thickness of the first diamond-like carbon film layer, the silicon nitride film layer and the second diamond-like carbon film layer to the thickness of the elastomer layer is 11: 10-29: 15, so that the elastomer layer can play a good role in improving the bending performance of the diamond-like carbon composite film structure.

Description

Technical Field

[0001] The present invention relates to the field of coating technology, and particularly to a workpiece with a diamond-like carbon film. Background Art

[0002] At present, diamond-like carbon is a material with excellent properties such as high hardness, high thermal stability, and low friction coefficient, and is widely used in fields such as automobiles, aerospace, and machining. However, traditional diamond-like carbon coatings have relatively strict limiting conditions, such as the roughness of steel, temperature, etc., and cannot meet some special requirements, such as flexibility, bendability, etc. Therefore, there is an urgent need for a technology to manufacture flexible diamond-like carbon to meet the needs of emerging fields. Summary of the Invention

[0003] An embodiment of the present invention provides a workpiece with a diamond-like carbon film for the deficiencies in the prior art. The workpiece includes a substrate, a first diamond-like carbon film layer, a silicon nitride film layer, a second diamond-like carbon film layer, and an elastomer layer; the first diamond-like carbon film layer is disposed on the substrate, the silicon nitride film layer is disposed on the first diamond-like carbon film layer, the second diamond-like carbon film layer is disposed on the silicon nitride film layer, and the elastomer layer is disposed on the second diamond-like carbon film layer. The ratio of the total thickness of the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer to the thickness of the elastomer layer is 11:10 - 29:15.

[0004] As a preferred solution, the thickness ratio of the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer is (2 - 3):(10 - 12):(2 - 3).

[0005] As a preferred solution, the thickness of the first diamond-like carbon film layer is 10 - 15 nanometers.

[0006] As a preferred solution, the thickness of the silicon nitride film layer is 50 - 60 nanometers.

[0007] As a preferred solution, the thickness of the second diamond-like carbon film layer is 10 - 15 nanometers.

[0008] As a preferred solution, the thickness of the elastomer layer is 150 - 200 nanometers.

[0009] As a preferred solution, a plurality of blind holes are provided on one side of the elastomer layer away from the second diamond-like carbon film layer.

[0010] As a preferred solution, the inner bottom surfaces of at least some of the plurality of blind holes are recessed in the direction of the second diamond-like carbon film layer.

[0011] As a preferred solution, the inner bottom surfaces of at least some of the plurality of blind holes bulge away from the second type of diamond film layer.

[0012] As a preferred solution, a groove portion is provided at an end of the blind hole away from the second type of diamond film layer. The groove portion communicates with the blind hole. The cross-sectional area of the groove portion is larger than the cross-sectional area of the blind hole. The distance between the groove portion and the second type of diamond film layer is greater than 9 / 10 of the thickness of the elastomer layer.

[0013] Compared with the prior art, the beneficial effects of the embodiments of the present invention are as follows: The embodiments of the present invention provide a workpiece with a diamond-like carbon film, which includes a substrate, a first type of diamond film layer, a silicon nitride film layer, a second type of diamond film layer, and an elastomer layer. The first type of diamond film layer is provided on the substrate, the silicon nitride film layer is provided on the first type of diamond film layer, the second type of diamond film layer is provided on the silicon nitride film layer, and the first type of diamond film layer, the silicon nitride film layer, and the second type of diamond film layer form a diamond-like carbon composite film structure. The elastomer layer is provided on the second type of diamond film layer, thereby improving the bending performance of the diamond-like carbon composite film structure. In addition, the ratio of the total thickness of the first type of diamond film layer, the silicon nitride film layer, and the second type of diamond film layer to the thickness of the elastomer layer is set between 11:10 and 29:15 to ensure that the elastomer layer can play a good role in improving the bending performance of the diamond-like carbon composite film structure. Description of the Drawings

[0014] Figure 1 is a schematic structural diagram of the workpiece with a diamond-like carbon film in the embodiment of the present invention. Detailed Embodiments

[0015] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0016] Please refer to Figure 1 , which is a schematic structural diagram of the workpiece with a diamond-like carbon film in the embodiment of the present invention.

[0017] The workpiece with a diamond-like carbon film according to an embodiment of the present invention includes a substrate, a first diamond-like carbon film layer, a silicon nitride film layer, a second diamond-like carbon film layer, and an elastomer layer; the first diamond-like carbon film layer is disposed on the substrate, the silicon nitride film layer is disposed on the first diamond-like carbon film layer, the second diamond-like carbon film layer is disposed on the silicon nitride film layer, the elastomer layer is disposed on the second diamond-like carbon film layer, and the ratio of the total thickness of the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer to the thickness of the elastomer layer is 11:10 - 29:15.

[0018] In the embodiment of the present invention, the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer form a diamond-like carbon composite film structure, and the elastomer layer is disposed on the second diamond-like carbon film layer, thereby improving the bending performance of the diamond-like carbon composite film structure. In addition, the ratio of the total thickness of the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer to the thickness of the elastomer layer is set to 11:10 - 29:15 to ensure that the elastomer layer can play a good role in improving the bending performance of the diamond-like carbon composite film structure.

[0019] In specific implementation, a coating is usually provided on the surface of the workpiece substrate according to requirements to improve the performance of the workpiece. Compared with the traditional diamond-like carbon film, the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer in the embodiment of the present invention form a diamond-like carbon composite film structure, which has good properties such as high hardness, high thermal stability, and low friction coefficient. In addition, an elastomer layer is provided on the diamond-like carbon composite film structure, which can realize bending, rotation, etc., and has wide application value. It should be noted that the silicon nitride film layer has good thermal stability. It is disposed between the two diamond-like carbon film layers to separate the first diamond-like carbon film layer and the second diamond-like carbon film layer, which can prevent the diamond-like carbon film layer from being too thick and affecting its strength, ensuring that the overall diamond-like carbon composite film structure has good strength, so that the diamond-like carbon composite film structure can remain intact when bent.

[0020] In specific implementation, the ratio of the total thickness of the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer to the thickness of the elastomer layer is set to 11:10 - 29:15. For example, it can be 11:10, 7:6, 37:30, 39:30, 7:5, 22:15, 23:15, 51:30, 9:5, 28:15, 29:15, etc. Of course, the ratio of the total thickness of the first diamond-like carbon film layer, the silicon nitride film layer, and the second diamond-like carbon film layer to the thickness of the elastomer layer can also be set to other ratios within the range of 11:10 - 29:15 according to actual usage requirements.

[0021] In an alternative embodiment, the thickness ratio of the first type of diamond film layer, the silicon nitride film layer, and the second type of diamond film layer is (2 - 3):(10 - 12):(2 - 3). For example, it can be 1:5:1, 2:10:3, 2:11:2, 2:11:3, 2:12:2, 2:12:3, 3:10:2, 3:10:3, 3:11:2, 3:11:3, 3:12:2, 3:12:3, etc. Of course, the thickness ratio of the first type of diamond film layer, the silicon nitride film layer, and the second type of diamond film layer can be set according to actual usage requirements, and no more details will be elaborated here.

[0022] In an alternative embodiment, the thickness of the first type of diamond film layer is 10 - 15 nanometers. For example, it can be 10 nanometers, 11 nanometers, 12 nanometers, 13 nanometers, 14 nanometers, 15 nanometers, etc. Of course, the thickness of the first type of diamond film layer can also be set according to actual usage requirements, and no more details will be elaborated here.

[0023] In specific implementation, for example, the first type of diamond film layer can be deposited on the surface of the substrate by chemical vapor deposition (CVD). The reaction chamber temperature is 700 - 900 °C, the reaction gases are CH4 and H2 with a ratio of 1:5, the gas pressure is 5 - 6 torr, and the reaction time is 40 - 60 minutes.

[0024] In an alternative embodiment, the thickness of the silicon nitride film layer is 50 - 60 nanometers. For example, it can be 50 nanometers, 51 nanometers, 52 nanometers, 53 nanometers, 54 nanometers, 55 nanometers, 56 nanometers, 57 nanometers, 58 nanometers, 59 nanometers, 60 nanometers, etc. Of course, the thickness of the silicon nitride film layer can also be set according to actual usage requirements, and no more details will be elaborated here.

[0025] In specific implementation, for example, the silicon nitride film layer can be formed on the first type of diamond film layer by radio frequency magnetron sputtering. Specifically, for example, Si is used as the target, N2 and Ar are mixed in a certain ratio to generate plasma. The deposition rate is 0.1 - 0.3 nm / s, the DC voltage is 200 V, the radio frequency power is 200 W, and the deposition time is 25 - 30 minutes.

[0026] In an alternative embodiment, the thickness of the second type of diamond film layer is 10 - 15 nanometers. For example, it can be 10 nanometers, 11 nanometers, 12 nanometers, 13 nanometers, 14 nanometers, 15 nanometers, etc. Of course, the thickness of the second type of diamond film layer can also be set according to actual usage requirements, and no more details will be elaborated here.

[0027] In specific implementation, for example, the same chemical vapor deposition (CVD) reactor as that used for forming the first type of diamond film layer can be adopted to deposit the second type of diamond film layer on the surface of the silicon nitride film layer, and the deposition process parameters are the same as those for depositing the first type of diamond film layer.

[0028] In an alternative embodiment, the thickness of the elastomer layer is 150 - 200 nanometers. For example, it can be 150 nanometers, 153 nanometers, 155 nanometers, 158 nanometers, 160 nanometers, 162 nanometers, 165 nanometers, 168 nanometers, 170 nanometers, 173 nanometers, 175 nanometers, 178 nanometers, 180 nanometers, 183 nanometers, 185 nanometers, 188 nanometers, 190 nanometers, 193 nanometers, 195 nanometers, 198 nanometers, 200 nanometers, etc. Of course, the thickness of the elastomer layer can also be set according to actual usage requirements, and no more details will be elaborated here.

[0029] In specific implementation, for example, the brush coating method or the roller coating method can be adopted to coat the elastomer material on the surface of the diamond-like carbon composite film structure, so that the diamond-like carbon composite film structure can perform operations such as bending.

[0030] In an alternative embodiment, the elastomer layer is polyurethane or silica gel. Of course, other elastomer materials can also be selected for the elastomer layer, and no more details will be elaborated here.

[0031] In specific implementation, the workpiece with the diamond-like carbon thin film provided by the embodiment of the present invention is subjected to thermal stability testing and bending testing. The results show that at 800 °C, the surface hardness and friction coefficient of the diamond-like carbon composite film structure change less; while in the bending test, the surface of the diamond-like carbon composite film structure can still remain intact after being bent by 180°.

[0032] In an alternative embodiment, a plurality of blind holes are provided on the side of the elastomer layer away from the second type of diamond film layer.

[0033] In this embodiment, by providing a plurality of blind holes on the side of the elastomer layer away from the second type of diamond film layer, in practical applications, when the workpiece is bent, the bending property of the overall structure of the workpiece can be improved by means of the plurality of blind holes. At the same time, since the blind holes do not penetrate the bottom surface of the elastomer layer (i.e., the side close to the second type of diamond film layer), it can be ensured that the elastomer layer and the second type of diamond film layer are joined together everywhere, thereby ensuring that the elastomer layer can enable the diamond-like carbon composite film structure to perform operations such as bending.

[0034] Specifically, the inner bottom surfaces of at least some of the plurality of blind holes are recessed in the direction towards the second type of diamond film layer.

[0035] In this embodiment, the inner bottom surface of at least some of the blind holes is recessed in the direction towards the second type of diamond film layer, that is, the inner bottom surface of the blind hole is lower in the middle and higher at the edges. Therefore, the thickness of the elastomer layer between the inner bottom surface of the blind hole and the second type of diamond film layer is thinner in the middle and thicker at the edges. Thus, when the workpiece is bent as a whole in the same direction as the recessed direction of the inner bottom surface of the above-mentioned blind hole, the thicker elastomer layer part at the edge can serve as a reinforcing rib to improve the strength of the elastomer layer, thereby ensuring reliable bending of the workpiece as a whole. At the same time, the thinner elastomer layer part in the middle can facilitate bending at a larger angle.

[0036] Specifically, the inner bottom surfaces of at least some of the plurality of blind holes bulge in the direction away from the second type of diamond film layer.

[0037] In this embodiment, the inner bottom surfaces of at least some of the blind holes bulge in the direction away from the second type of diamond film layer, that is, the inner bottom surface of the blind hole is higher in the middle and lower at the edges. Therefore, the thickness of the elastomer layer between the inner bottom surface of the blind hole and the second type of diamond film layer is thicker in the middle and thinner at the edges. Thus, when the workpiece is bent as a whole in the same direction as the bulging direction of the inner bottom surface of the blind hole, bending at a larger angle can be achieved while ensuring the strength of the elastomer layer.

[0038] In specific implementation, the inner bottom surfaces of all the blind holes can be recessed in the direction towards the second type of diamond film layer; the inner bottom surfaces of all the blind holes can also bulge in the direction away from the second type of diamond film layer; or at least some of the inner bottom surfaces of the blind holes can be recessed in the direction towards the second type of diamond film layer, while at least some of the inner bottom surfaces of the blind holes bulge in the direction away from the second type of diamond film layer; specifically, it can be set according to actual usage requirements and will not be elaborated more here.

[0039] Specifically, a groove portion is provided at the end of the blind hole away from the second type of diamond film layer. The groove portion is communicated with the blind hole. The cross-sectional area of the groove portion is larger than the cross-sectional area of the blind hole. The distance between the groove portion and the second type of diamond film layer is greater than 9 / 10 of the thickness of the elastomer layer.

[0040] In this embodiment, by providing a groove portion communicated with the blind hole at the end of the blind hole away from the second type of diamond film layer, and the cross-sectional area of the groove portion is larger than the cross-sectional area of the blind hole, bending at a larger angle can be achieved. At the same time, the distance between the groove portion and the second type of diamond film layer is greater than 9 / 10 of the thickness of the elastomer layer, so as to ensure that by setting a groove portion with a smaller depth, while improving the bendability, it is possible to avoid adverse effects on the bending operation of the elastomer layer being a diamond-like composite film structure.

[0041] In an alternative embodiment, the total cross-sectional area of the plurality of blind holes is less than 1 / 30 of the cross-sectional area of the elastomer layer, so that it can be ensured that bending can be more easily achieved while ensuring that the elastomer layer has good strength to ensure that the diamond-like composite film structure can achieve reliable bending.

[0042] Compared with the prior art, the beneficial effects of the embodiments of the present invention are as follows: The embodiments of the present invention provide a workpiece with a diamond-like thin film, which includes a substrate, a first diamond-like film layer, a silicon nitride film layer, a second diamond-like film layer, and an elastomer layer; the first diamond-like film layer is provided on the substrate, the silicon nitride film layer is provided on the first diamond-like film layer, the second diamond-like film layer is provided on the silicon nitride film layer, the first diamond-like film layer, the silicon nitride film layer, and the second diamond-like film layer constitute a diamond-like composite film structure, and the elastomer layer is provided on the second diamond-like film layer, thereby improving the bending performance of the diamond-like composite film structure. In addition, the ratio of the total thickness of the first diamond-like film layer, the silicon nitride film layer, and the second diamond-like film layer to the thickness of the elastomer layer is set at 11:10 - 29:15 to ensure that the elastomer layer can have a good effect of improving the bending performance of the diamond-like composite film structure.

[0043] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and substitutions can be made, and these improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A workpiece with a diamond-like carbon film, characterized in that, It includes a substrate, a first type of diamond film layer, a silicon nitride film layer, a second type of diamond film layer, and an elastomer layer; the first type of diamond film layer is disposed on the substrate, the silicon nitride film layer is disposed on the first type of diamond film layer, the second type of diamond film layer is disposed on the silicon nitride film layer, the elastomer layer is disposed on the second type of diamond film layer, and the ratio of the total thickness of the first type of diamond film layer, the silicon nitride film layer, and the second type of diamond film layer to the thickness of the elastomer layer is 11:10 - 29:

15.

2. The workpiece with a diamond-like carbon film as described in claim 1, characterized in that, The thickness ratio of the first type of diamond film layer, the silicon nitride film layer, and the second type of diamond film layer is (2 - 3):(10 - 12):(2 - 3).

3. The workpiece with a diamond-like carbon film according to claim 1, characterized in that, The thickness of the first type of diamond film layer is 10 - 15 nanometers.

4. The workpiece with a diamond-like carbon film as claimed in claim 1, wherein The thickness of the silicon nitride film layer is 50 - 60 nanometers.

5. The workpiece with a diamond-like carbon film as claimed in claim 1, wherein, The thickness of the second type of diamond film layer is 10 - 15 nanometers.

6. The workpiece with a diamond-like carbon film as described in claim 1, characterized in that, The thickness of the elastomer layer is 150 - 200 nanometers.

7. The workpiece with a diamond-like carbon film according to any one of claims 1-6, characterized in that, A plurality of blind holes are provided on a side of the elastomer layer away from the second type of diamond film layer.

8. The workpiece with a diamond-like carbon film according to claim 7, characterized in that, The inner bottom surfaces of at least some of the plurality of blind holes are recessed in the direction of the second type of diamond film layer.

9. The workpiece with a diamond-like carbon film according to claim 7, characterized in that, The inner bottom surfaces of at least some of the plurality of blind holes are raised in the direction away from the second type of diamond film layer.

10. The workpiece with a diamond-like carbon film as described in claim 7, characterized in that, A groove portion is provided at an end of the blind hole away from the second type of diamond film layer, the groove portion communicates with the blind hole, the cross-sectional area of the groove portion is larger than the cross-sectional area of the blind hole, and the distance between the groove portion and the second type of diamond film layer is greater than 9 / 10 of the thickness of the elastomer layer.

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