Ignition control method of remote plasma source

Through self-learning ignition threshold calibration method and LSF-BP model to predict load impedance and dynamically adjust the ignition voltage, the problem that traditional remote plasma source ignition voltage cannot be adjusted adaptively is solved, high success rate and stability are achieved, and equipment damage and maintenance costs are reduced.

CN120252023AActive Publication Date: 2025-07-04江苏神州半导体科技股份有限公司
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Patent Information

Application Number
CN202510740220.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-05
Publication Date
2025-07-04
Estimated Expiration
2045-06-05

AI Technical Summary

Technical Problem

The ignition voltage of traditional remote plasma sources cannot be adjusted adaptively, resulting in low ignition success rate and easy equipment damage. Especially when the load impedance changes under different environmental conditions, the prior art cannot effectively adjust the ignition voltage, resulting in increased equipment damage and maintenance costs.

Method used

The self-learning ignition threshold calibration method is adopted to collect gas flow, gas pressure and cavity temperature in real time, use the LSF-BP model to predict the load impedance value, dynamically adjust the ignition voltage threshold, and combine it with an adjustable turn ratio coupled transformer to achieve hardware-level impedance matching to ensure accurate adjustment of the ignition voltage.

Benefits of technology

It improves the ignition success rate, reduces equipment damage, reduces maintenance costs, improves the adaptability and reliability of the equipment, and ensures uniformity and consistency of the process.

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Abstract

The invention discloses an ignition control method of a remote plasma source in the technical field of remote plasma sources, which comprises the following steps: S1, setting a gas current excitation threshold value, and introducing excitation gas; s2, judging whether an ignition signal is received or not, and if yes, closing a relay and entering a constant current stage; s3, whether system ignition is normal or not is judged, and if not, the ignition voltage is adjusted through a self-learning type ignition threshold value calibration method; s4, the output power is improved, and the ignition voltage is adjusted through an ignition threshold calibration method during the period; s5, entering a constant power stage when the output power reaches the full-load power; according to the self-learning type ignition threshold value calibration method, gas flow, gas pressure and cavity temperature are collected in real time, a current load impedance value is predicted through an LSF-BP model, and an ignition voltage threshold value is updated according to the current load impedance value. According to the method, the ignition threshold is dynamically adjusted according to the operation condition, the ignition stability can be effectively improved, and equipment damage and maintenance cost are reduced.
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