Air pressure control mounting device based on air bearing

Abstract

The invention discloses a pneumatic control mounting device based on an air bearing. The pneumatic control mounting device comprises a driving module, a mounting module and an angle adjusting mechanism for driving the mounting module to swing, the mounting module is provided with a through hole structure used for observing the angle of the picked chip. The mounting module comprises an air bearing and a suction nozzle assembly, and the air bearing comprises a bearing seat and a journal penetrating through the bearing seat; the suction nozzle assembly is detachably connected with the shaft neck; the bearing seat is in sliding connection with the shaft neck; a driving cavity is formed between the bearing seat and the shaft neck, air pressure is provided for the driving cavity under the control of the pressure adjusting part, the shaft neck is pushed to extend outwards to mount a chip, and the mounting force on the chip is controlled. According to the application, the pressure of the gas supplied into the driving cavity is controlled through the pressure adjusting part, the shaft neck is pushed through the gas pressure to drive the suction nozzle assembly to mount the chip and apply the mounting force, the mounting force control is more accurate, the overall structure is simple, and meanwhile, the state of the picked chip is observed and adjusted through the perforation structure, so that the chip mounting precision is improved.

Description

Technical Field

[0001] This application relates to the technical field of chip mounting, and particularly relates to a pneumatic control mounting device based on an air bearing. Background Art

[0002] A die bonder, also known as a die mounter or a wafer bonding machine, is a packaging machine. The bonding head module of the die bonder equipment is driven by other modules of the die bonder to perform operations. Under the action of driving structures such as linear motors in the driving module of the die bonder, it is driven to play the role of grasping and pressing for bonding. When bonding chips, there are relatively high requirements for the accuracy and control of the force.

[0003] For the multi-chip intelligent mounting device and its usage method with the publication number CN111883470A, during mounting, it is necessary to work through a voice coil motor, and the force value is fed back according to the current value to assist in achieving force control. Moreover, the entire solder head assembly has a complex structure and relatively large occupied space. Summary of the Invention

[0004] This application provides a pneumatic control mounting device based on an air bearing. By precisely controlling the supplied gas pressure to push the nozzle assembly to move for mounting and controlling the mounting force applied to the chip, the mounting force can be conveniently controlled with high precision, and the overall structure is simple, the overall weight is light, and the occupied space is small. The following technical solutions are adopted: The pneumatic control mounting device based on an air bearing includes a driving module, a mounting module, and an angle adjustment mechanism for driving the mounting module to swing to adjust the chip angle. The driving module is used to adjust the position of the mounting module in space; The mounting module includes an air bearing and a nozzle assembly. The air bearing includes a bearing seat and a journal. The journal is supported by an air film and slides within the bearing seat; the nozzle assembly is detachably connected to the journal; A sealed driving cavity is formed between the bearing seat and the journal. The air pressure supplied to the driving cavity is controlled by a pressure regulating component to push the nozzle component connected to the journal to mount the chip and control the mounting force applied to the chip; The mounting module is provided with a through-hole structure for observing the chip angle.

[0005] Preferably, the nozzle assembly includes a connecting portion and a nozzle portion adsorbed and connected to the bottom of the connecting portion. The nozzle portion is connected to the journal through the connecting portion. The journal and the connecting portion are provided with a communicating first air supply channel. The driving cavity is communicated with the pressure regulating component through the first air supply channel.

[0006] Preferably, it further includes a vision detection component. The vision detection component observes the angle of the chip on the nozzle portion from above through the through-hole structure.

[0007] Preferably, the perforated structure includes a through hole provided on the nozzle assembly, a placement groove for placing a transparent plate, and a relief groove located at the journal. The placement groove communicates with the through hole, and the relief groove provides an observation channel for the vision inspection component to observe the through hole.

[0008] Preferably, the angle adjustment mechanism is provided between the driving module and the mounting module for connecting the mounting module and the driving module.

[0009] Preferably, the angle adjustment mechanism can drive the mounting module to swing around the z-axis.

[0010] Preferably, a second air supply channel is provided on the journal. The second air supply channel is externally connected to a gas source to form the air film between the journal and the bearing seat.

[0011] Preferably, the angle adjustment mechanism includes a fixed table and a swing table, and a worm and worm gear mechanism provided between the fixed table and the swing table. A driving part for driving the worm and worm gear mechanism is provided on one side of the fixed table.

[0012] Preferably, the driving module includes a first driving mechanism capable of moving in the x-axis direction, and a second driving mechanism provided on the first driving mechanism and capable of moving in the z-axis direction. A third driving mechanism capable of moving in the y-axis direction is provided on the second driving mechanism.

[0013] The beneficial effects of the present application compared with the prior art are as follows: Through the pressure adjustment component, the present application can accurately control the gas pressure supplied to fill the driving cavity. The gas pressure pushes the journal to mount the chip with the nozzle assembly and apply a mounting force. At the same time, a perforated structure is provided to facilitate observing the chip features, so as to adjust the chip angle, improve the chip mounting accuracy, and make the mounting force more accurate; the mounting module only includes an air floating bearing and a nozzle assembly, so the overall structure is simple, the overall weight is light, and the volume is small.

[0014] A second air supply channel is provided inside the journal, which can form an air film between the journal and the bearing seat. Furthermore, when the journal moves in the bearing seat, no friction and heat will be generated, which can improve the force control accuracy of the mounting force. Description of the Drawings

[0015] Figure 1 is a three-dimensional structural schematic diagram of the mounting module of the present application; Figure 2 is a structural schematic diagram of the mounting module of the present application under normal conditions; Figure 3 is a structural schematic diagram of the mounting module of the present application before mounting Figure 4It is a schematic structural diagram of the angle adjustment mechanism of the present application; Figure 5 It is a schematic structural diagram of the whole of the present application.

[0016] In the figure: 1. Mounting module, 10. Aerostatic bearing, 100. Driving cavity, 101. Bearing seat, 102. Journal, 11. Nozzle assembly, 111. Connection part, 112. Nozzle part; 12. First air supply channel, 13. Second air supply channel, 14. Relief groove, 15. Through hole, 16. Placing groove, 17. Limiting component, 18. Vacuum connector; 2. Angle adjustment mechanism, 21. Fixed table, 22. Swing table, 23. Driving part, 24. Worm and worm gear mechanism; 3. Driving module, 31. First driving mechanism, 32. Second driving mechanism, 33. Third driving mechanism, 4. Pressure adjustment component, 5. Visual inspection component. Detailed implementation manners

[0017] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings of the present application. Obviously, the described embodiments of the present application are only part of the embodiments of the present application, rather than all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0018] Combined with Figures 1 to 5 , the present application will be further described in detail: The pneumatic control mounting device based on an aerostatic bearing includes a driving module 3 and a mounting module 1. The driving module 3 is used to adjust the position of the mounting module 1 in space (move along the xyz axes); the mounting module 1 includes an aerostatic bearing 10 and a nozzle assembly 11. The mounting module 1 is provided with a perforated structure for observing the angle of the chip, and the perforated structure penetrates through the mounting module 1.

[0019] The aerostatic bearing 10 includes a bearing seat 101 and a journal 102. The nozzle assembly 11 is detachably connected to the journal 102, and the journal 102 penetrates through the bearing seat 101; the journal 102 is supported by an air film and slides inside the bearing seat 101; wherein, the nozzle assembly 11 includes a connection part 111 and a nozzle part 112 provided at the bottom of the connection part 111.

[0020] The nozzle assembly 11 is adsorbed and connected to the journal 102. In this embodiment, the nozzle assembly 11 is adsorbed on the journal 102 by vacuum adsorption. In an embodiment not shown, a magnetic adsorption assembly may be provided inside the journal 102, and the nozzle assembly 11 is adsorbed by an external power supply to generate magnetic force, so as to realize quick replacement of the nozzle assembly 11, and then different specifications of chips can be picked up.

[0021] A closed driving cavity 100 is formed between the bearing seat 101 and the journal 102. Wherein, a sliding groove is provided in the bearing seat 101, and a convex block that slides in the sliding groove is provided on the journal 102, and the driving cavity 100 is formed between the convex block and the sliding groove.

[0022] In this embodiment, the pressure regulating component 4 is used to control the air pressure provided into the driving cavity 100, push the journal 102 to extend out and mount the chip, and control the mounting force on the chip. Wherein, the pressure regulating component 4 includes a proportional valve.

[0023] Compared with the prior art, in the present application, the pressure regulating component 4 controls the pressure of the gas supplied into the driving cavity 100, and then moves the journal 102 with the nozzle assembly 11 adsorbing the chip to mount the chip and apply a mounting force, so as to realize precise force control of the chip. Moreover, the overall structure is simple, light in weight, small in occupied space, and the mounting force is more accurate. The angle state of the chip can be observed through the through-hole structure, and the angle of the chip can be adjusted by the angle adjusting mechanism 2, and the mounting accuracy is higher. Through the gas pressure in the driving cavity 100.

[0024] Combined with Figure 1 and Figure 2 , a first air supply channel 12 is provided on the journal 102, and the first air supply channel 12 is used to connect the driving cavity 100 and the pressure regulating component 4. In this embodiment, an external joint communicating with the first air supply channel 12 is provided on the connecting portion 111, and the pressure regulating component 4 and the external joint can be connected by a connecting pipe.

[0025] Combined with Figure 2 , in the normal state, the journal 102 will extend outwards by its own gravity ( Figure 2 extends downwards in Figure 3 ). When mounting the chip, the driving module 3 drives the mounting module 1 to approach the position to be mounted. Combined with Figure 2 , when the nozzle portion 112 abuts against the position to be mounted, the journal 102 is pushed to move towards the bearing seat 101 side ( Figure 3 the journal 102 moves upwards in Figure 3In the middle state); at this time, the gas supplied to the driving chamber 100 is controlled by the pressure regulating member 4, and then the journal 102 is pushed downward to apply a mounting force.

[0026] Combined with Figure 5 , the driving module 3 includes a first driving mechanism 31 that can move in the x-axis direction, and a second driving mechanism 32 provided on the first driving mechanism 31 that can move in the z-axis direction. A third driving mechanism 33 that can move in the y-axis direction is provided on the second driving mechanism 32. The mounting module 1 is driven by the driving module 3 to move and adjust along the z, y, and x axes, so as to pick up or mount the chip.

[0027] Combined with Figure 4 , in order to facilitate the adjustment of the mounting angle of the chip; an angle adjustment mechanism 2 is further included. The angle adjustment mechanism 2 can drive the mounting module 1 to swing around the z-axis to adjust the chip angle; in this embodiment, the mounting module 1 is connected to the driving module 3 through the angle adjustment mechanism 2. Compared with the existing method of setting the motor on the mounting module 1, the present application can greatly reduce the weight of the mounting module 1, simplify the structure of the mounting module 1, and has a relatively small volume.

[0028] Wherein, the angle adjustment mechanism 2 includes a fixed table 21 and a swing table 22, and a worm and worm gear mechanism 24 provided between the fixed table 21 and the swing table 22. A driving part 23 for driving the worm and worm gear mechanism 24 is provided on one side of the fixed table 21. In some embodiments, the angle adjustment mechanism 2 can be an electric swing displacement table.

[0029] Combined with Figure 5 , in this embodiment, a vision detection component 5 is further included, which is used to cooperate with the vision detection component 5 to detect the angle of the picked-up chip. After the mounting module 1 picks up the chip, it moves to the bottom of the vision detection component 5. The vision detection component 5 can observe whether the angle of the chip picked up by the mounting module 1 is skewed through the through-hole structure, and cooperate with the angle adjustment mechanism 2 to swing the mounting module 1, so as to adjust the chip angle and ensure the mounting accuracy; through the through-hole structure, there is no need to provide a dedicated vision detection component for the mounting module 1 at the bottom of the mounting module 1, saving costs.

[0030] In some embodiments, a dedicated vision detection component can also be provided at the bottom for the mounting module 1 to detect the chip angle on the mounting module 1.

[0031] In this embodiment, the perforated structure includes a relief groove, a through hole 16 communicating with the suction nozzle portion 112, and a placement groove 17 for placing a transparent plate. The placement groove 17 and the through hole 16 are both formed in the connecting portion 111. The placement groove 17 communicates with the through hole 16. The relief groove 15 penetrates through the journal 102 to provide an observation channel for the vision detection component 5. The through hole 16 is located in the middle of the connecting portion 111, which can ensure that the force on the journal 102 is more uniform.

[0032] Among them, the suction nozzle portion 112, the through groove 16, the placement groove 17, and the relief groove 15 can be coaxially arranged. The vision detection component 5 sequentially passes through the relief groove 15, the transparent plate, the through hole 16, and the suction nozzle portion 112 to observe the state of the chip adsorbed on the suction nozzle portion 112.

[0033] In some embodiments, such as Figure 1 , the connecting portion 111 can extend forward (the side where the relief groove 15 opens). If the perforated structure extends forward synchronously, there is no need to provide the relief groove 15.

[0034] In this embodiment, a vacuum connector 18 for connecting a vacuum generating device is provided on the connecting portion 111. A plurality of channels (not shown) with one end communicating with the vacuum connector 18 are provided in the connecting portion 111. The other end of at least one of the channels communicates with the through hole 16, so as to form a negative pressure environment in the through hole 16, facilitating the suction nozzle portion 112 to pick up the chip. The other end of at least one of the channels is connected between the connecting portion 111 and the suction nozzle portion 112, so as to adsorb the suction nozzle portion 112 by the connecting portion 111.

[0035] Among them, the transparent plate can be a glass plate. The transparent plate can seal the top of the through hole 16. When picking up the chip, a negative pressure is generated in the through hole 16 between the transparent plate and the chip and in the suction nozzle, so as to adsorb the chip.

[0036] Combined with Figure 1 and Figure 2 , a second air supply channel 13 is provided on the journal 102. The second air supply channel 13 is externally connected to a gas source and is used to form the air film between the journal 102 and the bearing seat 101. Among them, the second air supply channel 13 includes a plurality of air ducts provided in the journal 102, which are used to supply gas between the journal 102 and the bearing seat 101, fill the gap between the journal 102 and the bearing seat 101, and form a stable air film, thereby avoiding the generation of frictional resistance during the movement and mounting of the journal 102 and affecting the mounting force control accuracy. The bearing seat 101 and the journal 102 are air floating linear bearings.

[0037] During operation, the gas supplied to form a gas film between the bearing housing 101 and the journal 102 will not affect the pressure stability of the gas within the drive chamber 100.

[0038] In some embodiments, it further includes a limiting member 17, and the limiting member 17 is used to limit the position of the journal 102 within the bearing housing 101; wherein, the limiting member 17 is disposed at the top end of the journal 102, and when the limiting member 17 abuts against the top end of the bearing housing 101, the limiting member 17 can prevent the journal 102 from disengaging from the bearing housing 101 due to gravity.

[0039] The working steps of this application are as follows: Pick up the chip, and drive the mounting module 1 to move to the pick-up station through the drive module 3, and the nozzle assembly picks up the chip.

[0040] Angle detection, the drive module 3 drives the mounting module 1 after picking up the chip to move to the bottom of the vision detection component 5, and the vision detection component 5 observes the chip picked up by the mounting module 1 through the through-hole structure on the mounting module 1 to determine whether the angle of the chip is skewed.

[0041] Adjust the chip angle. If there is skew, the angle adjustment mechanism 2 is used to drive the mounting module 1 to swing around the z-axis to adjust the chip angle; if the angle is not skewed, the step of mounting the chip is directly carried out.

[0042] Mount the chip, the drive module 3 drives the mounting module 1 to move to the mounting station, and then drives the mounting module 1 to approach the journal position of the chip; when the journal 102 touches the journal position and retracts a certain distance into the bearing housing 101, the pressure adjustment component 4 fills the drive chamber 100 with gas, pushing the journal 102 downward to apply a mounting force to the chip.

Claims

1. A pneumatic control mounting device based on an air bearing, characterized in that: It includes a driving module, a mounting module, and an angle adjustment mechanism for driving the mounting module to swing to adjust the chip angle. The driving module is used to adjust the position of the mounting module in space; The mounting module includes an air bearing and a nozzle assembly. The air bearing includes a bearing seat and a journal. The journal is supported by an air film and slides within the bearing seat; the nozzle assembly is detachably connected to the journal; A sealed driving cavity is formed between the bearing seat and the journal. The air pressure in the driving cavity is controlled by a pressure regulating component to push the nozzle component connected to the journal to mount the chip and control the mounting force on the chip; The mounting module is provided with a through perforation structure for observing the chip angle.

2. The pneumatic control mounting device based on an air bearing according to claim 1, wherein: The nozzle assembly includes a connecting portion, and a nozzle portion adsorbed and connected to the bottom of the connecting portion. The nozzle portion is connected to the journal through the connecting portion. The journal and the connecting portion are provided with a communicating first air supply channel. The driving cavity is communicated with the pressure regulating component through the first air supply channel.

3. The pneumatic control mounting device based on an air bearing according to claim 1, wherein: It further includes a vision detection component. The vision detection component observes the angle of the chip at the nozzle portion from above through the perforation structure.

4. The pneumatic control mounting device based on an air bearing according to claim 1, characterized in that: The perforation structure includes a through hole provided on the nozzle assembly, a placement groove for placing a transparent plate, and a relief groove located on the journal. The placement groove communicates with the through hole. The relief groove provides an observation channel for the vision detection component to observe the through hole.

5. The pneumatic control pick-and-place device based on an air bearing according to claim 1, wherein: The angle adjustment mechanism is provided between the driving module and the mounting module for connecting the mounting module and the driving module.

6. The air pressure control and mounting device based on an air bearing according to claim 1, wherein: The angle adjustment mechanism can drive the mounting module to swing around the z-axis.

7. The pneumatic control mounting device based on an air bearing according to claim 1, characterized in that: The journal is provided with a second air supply channel. The second air supply channel is externally connected to a gas source for forming the air film between the journal and the bearing seat.

8. The pneumatic control mounting device based on an air bearing according to claim 1, wherein: The angle adjustment mechanism includes a fixed table and a swing table, and a worm and worm gear mechanism provided between the fixed table and the swing table. A driving portion for driving the worm and worm gear mechanism is provided on one side of the fixed table.

9. The pneumatic control mounting device based on an air bearing according to claim 1, wherein: The driving module includes a first driving mechanism capable of moving in the x-axis direction, and a second driving mechanism provided on the first driving mechanism and capable of moving in the z-axis direction. A third driving mechanism capable of moving in the y-axis direction is provided on the second driving mechanism.

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