Superstructure capable of realizing on-chip fluorescence emission intensity regulation and fine gray nano printing, preparation method and application thereof

Abstract

The present application relates to a kind of super-structure surface that can realize on-chip fluorescence emission intensity regulation and fine gray nano printing and its preparation method and application, super-structure surface includes substrate layer, waveguide layer, nano brick structure layer and quantum dot-containing fluorescent radiation layer.Periodicity of double-atom unit structure and the relative displacement between nano brick, the periodicity modulation of fluorescence emission intensity is realized using on-chip double-atom interference mechanism, and high-resolution gray fluorescence display is achieved;Through orthogonal direction space mixed double-atom unit structure, the low crosstalk direction selectivity double-channel gray display is constructed;Combining the synergistic control of fluorescence emission and pump light scattering, the exit angle and exit intensity of fluorescence and pump light are accurately regulated and encoded by unit period and displacement, and the multi-color gray nano printing display function is realized.The present application can eliminate zero-order diffraction background interference without additional optical elements, with the advantages of strong manufacturing robustness, high integration, etc., fine gray and multi-color nano printing display can be realized.

Description

Technical Field

[0001] This invention belongs to the field of micro-nano optics and fluorescence radiation technology, specifically relating to a metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, its preparation method, and its application. Background Technology

[0002] Optical display devices are crucial in modern life and represent a key research area in photonics science and technology. Metasurfaces possess unprecedented capabilities for light field manipulation, enabling the realization of various metadisplay functions. Emitting metasurfaces integrating photon sources, as compact platforms, can directly generate multifunctional customized light fields, achieving advanced functions such as emission enhancement, directional emission, chiral emission, and fluorescent lenses. This provides a new approach to meeting the miniaturization and integration requirements of advanced optical metadisplay devices.

[0003] However, previous meta-display devices have mainly focused on achieving binary image display by controlling reflected / transmitted light, with limited research on generating fine grayscale fluorescence meta-displays by controlling emitted light. While typical metasurfaces based on plasmon resonance design or Malus's law can be used to create reflected / transmitted light intensity modulators, the requirements for precise structure fabrication or polarization analyzers limit manufacturing robustness and system miniaturization. Furthermore, high-quality multicolor imaging typically requires multiple color light sources or broadband light sources; achieving multicolor meta-displays by simultaneously controlling fluorescence and pump light using a single light source remains challenging and has not been fully studied. Summary of the Invention

[0004] This invention aims to provide a metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, as well as its preparation method and application, to overcome the shortcomings of existing metasurface display devices in grayscale fluorescence display and multicolor display, and to achieve fine grayscale and multicolor nanoprinted displays that can eliminate zero-order diffraction background interference without additional optical components and have advantages such as strong manufacturing robustness and high integration.

[0005] According to one aspect of the present invention, a metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting is provided, comprising:

[0006] The sample substrate, made of fused silica, is used to support the entire metasurface structure.

[0007] A waveguide layer, disposed on the substrate, is made of silicon nitride waveguide and is used to guide the propagation of light waves;

[0008] The nanobrick structure layer, integrated on the waveguide layer, is composed of silicon unit structures. Each unit structure contains two rectangular nanobricks, and the array period of the unit structures and the relative displacement between the nanobricks can be adjusted.

[0009] A fluorescent radiation layer, covering the above structure, is a polymethyl methacrylate layer containing quantum dots.

[0010] As a further technical solution, an on-chip two-atom interference mechanism is used to periodically modulate the fluorescence emission intensity by adjusting the relative displacement between two nanobricks, thereby achieving high-resolution grayscale fluorescence display.

[0011] As a further technical solution, spatial mixing of diatomic unit structures in orthogonal directions is performed to achieve direction-selective dual-channel grayscale fluorescence display without crosstalk between channels.

[0012] As a further technical solution, fluorescence emission and pump light scattering are simultaneously controlled to achieve multi-color grayscale display using a single monochromatic light source. The diffraction angles of the emitted fluorescence and the scattered pump light are related to the unit cell period, satisfying the following:

[0013] k PL ·sin θ PL = β PL + k meta = n eff,PL · k PL +2mπ / P

[0014] k Pump ·sin θ sca = β Pump + k meta = n eff,Pump · k Pump +2mπ / P

[0015] in, k PL , k Pump , k meta These represent the wave vectors of fluorescence and pump light, as well as the effective wave vector provided by the metasurface. β PL , n eff,PL , β Pump , n eff,Pump θ represents the propagation constant and effective refractive index of the guiding fluorescence and pump light, respectively. PLθ sca The emission angles of the fluorescence and pump light. m For diffraction orders, P The period of the unit structure.

[0016] As a further technical solution, the fluorescence emitted by the quantum dots in the fluorescent radiation layer under pump light excitation and the scattered pump light are superimposed in free space to form a multicolor display effect without the need for additional filter elements.

[0017] According to one aspect of the present invention, a preparation method is provided for preparing the metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, comprising:

[0018] Depositing waveguides on a fused silica substrate;

[0019] A silicon layer is deposited on the waveguide layer using plasma-enhanced chemical vapor deposition.

[0020] Commercial photoresist is diluted in a certain proportion, spin-coated to form a thin film, and then a conductive polymer layer is spin-coated after baking.

[0021] Patterning is performed using electron beam lithography, followed by development and fixing.

[0022] A nano-brick structure layer was prepared through a process of thermal evaporation, exfoliation, and etching.

[0023] A polymethyl methacrylate layer is spin-coated onto a patterned structure as an adhesive layer, and then a solution of quantum dots is spin-coated to form a fluorescent radiation layer.

[0024] According to one aspect of the present invention, a nanoprinting method is provided, based on the metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, comprising:

[0025] By adjusting the array period and local displacement of the diatomic unit structure, grayscale modulation of fluorescence emission intensity can be achieved to realize fine grayscale nanoprinted images.

[0026] By combining the synergistic control of fluorescence emission and pump light scattering, multicolor nanoprinted patterns can be generated under a single light source.

[0027] According to one aspect of the present invention, an application of a metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting is provided, wherein the metasurface is applied to multiplexed optical displays, optical information storage or encryption, wearable optical devices, and next-generation virtual or augmented reality displays.

[0028] According to one aspect of the present invention, an application of a nanoprinting method based on a metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting is provided. The application is to use the metasurface for color nanoprinted display and the nanoprinting method in multiplexed optical displays, optical information storage or encryption, wearable optical devices, and next-generation virtual displays or augmented reality displays.

[0029] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0030] 1. This invention utilizes an on-chip light-emitting metasurface platform. The generated fine grayscale fluorescence images and multicolor images are unaffected by zero-order diffraction background interference, eliminating the need for additional optical components and simplifying the display system structure. Furthermore, the geometry and size of the nanobricks have minimal impact on the manipulation of radiation intensity. Even if the geometric parameters of the nanostructure deviate slightly from the design, the defined grayscale intensity can still be achieved, demonstrating stronger manufacturing robustness than traditional parametric scanning methods. The metasurface integrates fluorescence emission control and pump light scattering control functions, featuring a compact structure that facilitates the miniaturization and integration of display devices. It can achieve various functions such as precise control of fluorescence emission intensity, high-resolution grayscale fluorescence display, direction-selective dual-channel grayscale display, and multicolor grayscale nanoprinted display, meeting the needs of different application scenarios.

[0031] 2. This luminescent metasurface has broad application prospects in fields such as programmable fluorescent emitters, optical anti-counterfeiting, and optical information encryption and storage, which will help promote technological progress in related fields and improve product performance and security. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 The schematic diagram of the metasurface structure provided in the embodiments of the present invention shows the positional relationship of the sample substrate, waveguide layer, nanobrick structure layer and fluorescent radiation layer and the basic structure of the metasurface.

[0034] Figure 2 The structural electric field diagrams provided in the embodiments of the present invention under different relative displacements reflect the differences in electric field distribution when the relative displacement of the nanobrick changes, reflect the changes in electric field modulation and radiation light extraction intensity, and reveal the principle of fluorescence modulation.

[0035] Figure 3The fluorescence radiation intensity diagrams under different phase shifts provided in the embodiments of the present invention show the trend of fluorescence radiation intensity changing with phase shift.

[0036] Figure 4 This is a schematic diagram of the experimental apparatus provided in the embodiments of the present invention, which provides a reference for experimental operation and the repeatability of results.

[0037] Figure 5 The experimental results of dual-channel grayscale fluorescence nanoprinting provided in the embodiments of the present invention are shown in the figure, presenting dual-channel grayscale fluorescence images and verifying the dual-channel grayscale fluorescence nanoprinting function of metasurface.

[0038] Figure 6 The schematic diagram of the color display principle provided in the embodiment of the present invention illustrates the principle of achieving color display by changing the unit structure parameters.

[0039] Figure 7 Experimental diagram of multicolor grayscale nanoprinting provided in the embodiments of the present invention.

[0040] Figure 8 A conceptual diagram of a metasurface provided in an embodiment of the present invention. Detailed Implementation

[0041] This invention relates to a metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, its fabrication method, and applications, belonging to the field of micro-nano optics and display technology. The metasurface comprises a substrate layer, a waveguide layer, a nanobrick structure layer, and a fluorescent radiation layer containing quantum dots. By utilizing the periodicity of the diatomic unit structure and the relative displacement between the nanobricks, on-chip diatomic interference mechanisms are employed to achieve periodic modulation of fluorescence emission intensity, thereby achieving high-resolution grayscale fluorescence display. Through orthogonal spatial mixing of diatomic unit structures, a low-crosstalk, direction-selective dual-channel grayscale display system is constructed. Combining the synergistic control of fluorescence emission and pump light scattering, the emission angle and intensity of fluorescence and pump light are precisely controlled and encoded through unit periodicity and displacement, enabling multi-color grayscale nanoprinting display functionality. This invention eliminates zero-order diffraction background interference without additional optical components, possessing advantages such as strong manufacturing robustness and high integration, and can achieve fine grayscale and multi-color nanoprinting displays. The metasurface has broad application prospects in multiplexed optical displays, optical information storage and encryption, wearable devices, and next-generation virtual reality or augmented reality displays.

[0042] The technical solution of this invention will be described below from the perspectives of luminescent metasurface structure, light field modulation principle, dual-channel grayscale display, multi-color grayscale display, multi-color display effect, preparation method, nanoprinting method and application.

[0043] Luminescent Metasurface Structure: The metasurface of this invention comprises a sample substrate, a waveguide layer, a nanobrick structure layer, and a fluorescent radiation layer. The sample substrate is made of fused silica and is used to support the entire metasurface structure. The waveguide layer is disposed on the substrate and is composed of silicon nitride waveguides to guide light wave propagation. The nanobrick structure layer is integrated on the waveguide layer and is composed of silicon unit structures. Each unit structure contains two rectangular nanobricks, and the array period of the unit structures and the relative displacement between the nanobricks can be adjusted. The fluorescent radiation layer covers the above structure and is a polymethyl methacrylate (PMMA) layer containing quantum dots (QDs).

[0044] Light field modulation principle: Utilizing an on-chip two-atom interference mechanism, the fluorescence emission intensity is periodically modulated by adjusting the relative displacement between two nanobricks, achieving high-resolution grayscale fluorescence display. The theoretical basis for fluorescence emission intensity modulation is based on the formula:

[0045]

[0046] in ω For frequency, j For the numbering of the unit structure, x 1 / x 2 represents the relative distance from the guided wave to each elementary atom, and the propagation constant ( ). β = 2π· n eff / λ 0), n eff The effective refractive index of the waveguide mode, λ 0 represents the wavelength of light. P For the period of the unit structure, Fluorescence intensity extracted from a single nanobrick.

[0047] Dual-channel grayscale display: By spatially mixing the diatomic unit structure in orthogonal directions, direction-selective dual-channel grayscale fluorescence display is achieved, with no crosstalk between channels.

[0048] Multicolor grayscale display: Multicolor grayscale display is achieved using a single monochromatic light source by simultaneously controlling fluorescence emission and pump light scattering. The diffraction angles of the emitted fluorescence (PL) and the scattered pump light are related to the unit cell period and satisfy the formula:

[0049] k PL ·sin θ PL = β PL + k meta = n eff,PL ·k PL +2mπ / P

[0050] k Pump ·sin θ sca = β Pump + k meta = n eff,Pump · k Pump +2mπ / P

[0051] In the formula k PL , k Pump , k meta These represent the wave vectors of fluorescence and pump light, as well as the effective wave vector provided by the metasurface. β PL , n eff,PL , β Pump , n eff,Pump These are the propagation constants and effective refractive indices of the guiding fluorescence and pump light, respectively. θ PL , θ sca The emission angles of the fluorescence and pump light. m For diffraction orders, P The period of the unit structure.

[0052] Multicolor display effect: The fluorescence emitted by quantum dots in the fluorescent radiation layer under the excitation of pump light and the scattered pump light are superimposed in free space to form a multicolor display effect without the need for additional filter elements.

[0053] Preparation method: The preparation method of this metasurface includes the following steps: depositing a waveguide on a fused silica substrate; depositing a silicon layer on the waveguide layer using plasma-enhanced chemical vapor deposition; diluting a commercial photoresist (such as PMMA) at a certain ratio, spin-coating to form a thin film, baking, and then spin-coating a conductive polymer layer; patterning using electron beam lithography (EBL), followed by development and fixing; preparing a nano-brick structure layer through thermal evaporation, lift-off, and etching processes; spin-coating a PMMA layer as a binder layer on the patterned structure, and then spin-coating a solution of quantum dots to form a fluorescent radiation layer.

[0054] Nanoprinting method: A nanoprinting method based on the above metasurface includes grayscale modulation of fluorescence emission intensity by adjusting the array period and local displacement of the diatomic unit structure to achieve fine grayscale image printing; and generating multicolor nanoprinted patterns under a single light source by combining the synergistic control of fluorescence emission and pump light scattering.

[0055] Application areas: The metasurface and nanoprinting method of the present invention can be applied to multiplexed optical displays, optical information storage or encryption, wearable optical devices, and next-generation virtual or augmented reality displays.

[0056] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. In addition, the technical features of the various embodiments or individual embodiments provided by the present invention can be arbitrarily combined to form new technical solutions. Such combinations are not bound by the order of steps and / or structural composition patterns, but must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0057] This invention provides a metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, and experimentally demonstrates high-resolution grayscale modulation of fluorescence emission intensity, direction-selective dual-channel grayscale display function, and multi-color grayscale nanoprinting display.

[0058] Figure 1 This invention demonstrates the layered structure of a metasurface according to an embodiment of the present invention. The fabrication process is as follows: First, fused silica is used as a substrate, and a silicon nitride waveguide layer is fabricated on the substrate surface using plasma-enhanced chemical vapor deposition (PECVD). This waveguide layer forms a significant refractive index difference with the substrate, thereby creating an optical confinement environment to ensure low-loss propagation of fluorescence in guided mode within the waveguide. Above the waveguide layer, a silicon layer is deposited as a functional carrier layer using PECVD. Electron beam lithography (EBL) is used to expose a two-atom unit structure pattern on a PMMA photoresist coated on the silicon layer surface (as shown in the schematic diagram of the micro / nano structure in Figure 1). Each unit contains two rectangular nanobricks, and the unit period is (…). PThe relative displacement (D) of the nanobricks can be adjusted within the range of 300-500 nm, and is precisely controlled by photolithography parameters. After development and fixing, reactive ion etching (RIE) is used to transfer the pattern to the silicon layer, forming a nanobrick structure layer with subwavelength precision. This structure layer controls the emission angle and intensity of fluorescence and pump light by adjusting the period and relative displacement of the nanobricks. Finally, PMMA and a solution containing quantum dots are spin-coated onto the surface of the nanobrick structure layer to form a fluorescent radiation layer, as shown in the conceptual diagram. Figure 8 As shown, quantum dots can emit photofluorescence under pump light excitation. By controlling the spin-coating speed, the thickness of the fluorescent emission layer can be controlled at around 100-150 nm to ensure subwavelength coupling efficiency with the underlying nanobrick structure, providing the necessary optical field modulation basis for the on-chip two-atom interference mechanism.

[0059] When the relative displacement of the nanobricks is adjusted, according to the on-chip two-atom interference mechanism, different relative displacements will change the relative distance of the guided wave propagation to each elementary atom, thus affecting the superposition effect of the electric field, and ultimately causing changes in the fluorescence emission intensity. For example... Figure 2 As shown, the electric field distribution varies significantly with the change in the relative displacement of the nanobricks, and the intensity of the extracted radiation light also changes accordingly.

[0060] To gain a deeper understanding of the regulatory mechanisms of fluorescence emission intensity, refer to Figure 3 Fluorescence intensity diagrams under different phase shifts. A specific trend exists between the phase shift and the fluorescence intensity. Analyzing this trend can further clarify the influence of the interference mechanism on fluorescence emission. For example, when the phase shift varies within a certain range, the fluorescence intensity exhibits periodic increases or decreases, which is consistent with the theoretical model of diatomic interference.

[0061] During the experiment, the spectra of the metasurface unit structure were measured using an angle-resolved microscope spectrometer, such as... Figure 4 As shown. By recording fluorescence spectra at different angles and wavelengths, the consistency between the changes in fluorescence emission intensity and the theory was verified, thus allowing for a deeper exploration of the regulatory mechanism of fluorescence emission intensity. The same microscopic system ( Figure 4 ), to capture images of nanoprinted materials.

[0062] Spatially mixing diatomic unit structures in orthogonal directions enabled the design of dual-channel fluorescent grayscale nanoprinting. Simulation and experimental results are as follows: Figure 5 As shown, when the pump light is incident from the left side of the metasurface, the fluorescence of the guiding waveguide mode moves along the + x The light propagates in the X direction and is extracted by the metasurface, at which point a grayscale fluorescence image excited in the X direction can be observed; when the pump light is incident from below, the fluorescence of the guiding waveguide mode propagates along the + yThe fluorescence propagates in the Y direction and is extracted by the metasurface, allowing observation of the grayscale fluorescence image excited in the Y direction. By comparing the grayscale images under different excitation directions, the dual-channel fluorescence grayscale display function of the metasurface can be verified.

[0063] Figure 6 This diagram illustrates the principle of controlling pump light and fluorescence to form multiple colors by changing the unit structure size parameters, demonstrating the core mechanism of multicolor display achieved by metasurfaces. Figure 6 As shown, by adjusting the unit period of the nanobrick structure layer ( P ) and relative displacement of nanobricks ( D It can precisely control the diffraction angle and intensity of fluorescence and pump light, so that they are superimposed in free space to form a color display effect.

[0064] Figure 7 This visually demonstrates the color grayscale display effect achieved by the metasurface of the present invention under single light source excitation. For example... Figure 7 As shown, under pump light irradiation, pump light scattering and fluorescence radiation were simultaneously controlled by synergistically regulating the unit period and relative displacement of the nanobrick structure layer. The experiment yielded nanoprinted images with rich colors and delicate grayscale levels.

[0065] pass Figures 1 to 7 Through experimental verification, this invention achieves:

[0066] 1. Fluorescence intensity is modulated by on-chip two-atom interference excitation, and continuous gray-scale modulation of emitted fluorescence intensity is achieved by the relative displacement of unit structures, breaking through the precision limitations of traditional metasurfaces;

[0067] 2. The design of orthogonal spatial mixing constructs a direction-selective dual-channel system with low crosstalk, realizing orthogonal direction-independent grayscale fluorescent nanoprinting display;

[0068] 3. By utilizing on-chip metasurfaces to simultaneously control and encode pump light and fluorescence, a variety of colors are formed, realizing the function of colored nanoprinting.

[0069] Furthermore, by replacing quantum dot materials (such as perovskite quantum dots) or adjusting waveguide layer parameters, the technology can be extended to the ultraviolet (200-400 nm) to infrared (800-1500 nm) bands, applicable to fields such as programmable fluorescent emitters, optical anti-counterfeiting labels, and high-density optical information storage, and has the potential for interdisciplinary applications.

[0070] The above content, together with the accompanying drawings, fully demonstrates the technical innovation, experimental verification, and broad application prospects of this invention in the field of micro-nano optical displays, providing an efficient and robust solution for on-chip integrated nanoprinted displays.

[0071] The terms “comprising” and “having”, and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover a non-exclusive inclusion, such as a process, method, system, product, or apparatus that includes a series of steps or units, not necessarily limited to those explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the technical solutions of the embodiments of the present invention.

Claims

1. A metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, characterized in that, By utilizing on-chip two-atom interference, the fluorescence emission intensity is periodically modulated by adjusting the relative displacement between two nanobricks, achieving high-resolution grayscale fluorescence display, including: The sample substrate, made of fused silica, is used to support the entire metasurface structure. A waveguide layer, disposed on the substrate, is made of silicon nitride waveguide and is used to guide the propagation of light waves; The nanobrick structure layer, integrated on the waveguide layer, is composed of silicon unit structures. Each unit structure contains two rectangular nanobricks, and the array period of the unit structures and the relative displacement between the nanobricks can be adjusted. A fluorescent radiation layer, covering the above structure, is a polymethyl methacrylate layer containing quantum dots; the fluorescence emitted by the quantum dots in the fluorescent radiation layer under pump light excitation and the scattered pump light are superimposed in free space to form a multicolor display effect without the need for additional filter elements.

2. The metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting according to claim 1, characterized in that, Spatial mixing of diatomic unit structures in orthogonal directions enables direction-selective dual-channel grayscale fluorescence display with no crosstalk between channels.

3. The metasurface according to claim 1, which enables on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, is characterized in that... Simultaneously controlling fluorescence emission and pump light scattering, multicolor grayscale display is achieved using a single monochromatic light source. The diffraction angles of the emitted fluorescence and the scattered pump light are related to the unit cell period, satisfying the following: k PL ·sin θ PL = β PL + k meta = n eff,PL · k PL +2mπ / P k Pump ·sin θ sca = β Pump + k meta = n eff,Pump · k Pump +2mπ / P in, k PL , k Pump , k meta These represent the wave vectors of fluorescence and pump light, as well as the effective wave vector provided by the metasurface. β PL , n eff,PL , β Pump , n eff,Pump θ represents the propagation constant and effective refractive index of the guiding fluorescence and pump light, respectively. PL θ sca The emission angles of the fluorescence and pump light. m For diffraction orders, P The period of the unit structure.

4. A preparation method for preparing the metasurface described in any one of claims 1-3, capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, characterized in that, include: Depositing waveguides on a fused silica substrate; A silicon layer is deposited on the waveguide layer using plasma-enhanced chemical vapor deposition. Commercial photoresist is diluted in a certain proportion, spin-coated to form a thin film, and then a conductive polymer layer is spin-coated after baking. Patterning is performed using electron beam lithography, followed by development and fixing. A nano-brick structure layer was prepared through a process of thermal evaporation, exfoliation, and etching. A polymethyl methacrylate layer is spin-coated onto a patterned structure as an adhesive layer, and then a solution of quantum dots is spin-coated to form a fluorescent radiation layer.

5. A nanoprinting method, based on the metasurface described in any one of claims 1-3, capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting, characterized in that, include: By adjusting the array period and local displacement of the diatomic unit structure, grayscale modulation of fluorescence emission intensity can be achieved to realize fine grayscale nanoprinted images. By combining the synergistic control of fluorescence emission and pump light scattering, multicolor nanoprinted patterns can be generated under a single light source.

6. The application of the metasurface capable of on-chip fluorescence emission intensity modulation and fine grayscale nanoprinting according to any one of claims 1-3, characterized in that, The applications include using the metasurface in multiplexed optical displays, optical information storage or encryption, wearable optical devices, and next-generation virtual or augmented reality displays.

7. The application of the nanoprinting method according to claim 5, characterized in that, The application involves using the nanoprinting method in multiplexed optical displays, optical information storage or encryption, wearable optical devices, and next-generation virtual or augmented reality displays.

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