Micromechanical gyroscope driving modal vibration control method, system and equipment

Abstract

The invention discloses a micromechanical gyroscope driving modal vibration control method, system and device, which are applied to the field of gyroscopes, and the method comprises the following steps: obtaining two paths of differential vibration displacement electric signals; performing odd-even filtering separation processing on the two paths of differential vibration displacement electric signals by using a harmonic separator to respectively obtain odd wave vibration displacement electric signals and even wave vibration displacement electric signals; demodulating the odd wave vibration displacement electric signal by using a fundamental wave to obtain a fundamental wave amplitude, and demodulating the even wave vibration displacement electric signal by using a second harmonic to obtain a second harmonic amplitude; the quotient obtained by dividing the second harmonic amplitude by the fundamental wave amplitude is used as the second harmonic fundamental wave amplitude ratio; and generating an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and outputting the excitation signal to an excitation electrode of the micromechanical gyroscope. According to the invention, the excitation signal is generated according to the fundamental wave amplitude and the second harmonic amplitude, the demodulation error is reduced, the external interference is reduced, and the closed-loop control precision is improved.

Description

Technical Field

[0001] The present invention relates to the field of gyroscopes, and in particular to a method, system and device for controlling driving modal vibration of a micro-mechanical gyroscope. Background Art

[0002] The control system of a micro-electro-mechanical system (MEMS) vibrating gyroscope primarily consists of a driving mode and a sensitive mode control system. To achieve accurate angular rate detection, the vibration displacement amplitude of the driving mode must be very stable. Existing techniques analyze the vibration displacement amplitude based on the harmonic-primary ratio (HPR) in the vibration displacement signal. Since the vibration displacement signal is typically demodulated using differential detection to obtain the fundamental and third harmonic amplitudes, these amplitudes are used to calculate the control input. However, the third harmonic amplitude is typically very small and susceptible to noise interference, resulting in low control accuracy and, consequently, inability to ensure stable vibration displacement amplitude control. Summary of the Invention

[0003] In view of this, an object of the present invention is to provide a method, system and device for controlling the driving mode vibration of a micromechanical gyroscope, which solves the problem in the prior art that the micromechanical gyroscope is easily interfered by noise and thus has low control accuracy.

[0004] To solve the above technical problems, the present invention provides a method for controlling the driving mode vibration of a micromechanical gyroscope, comprising:

[0005] Acquire two differential vibration displacement electrical signals; the two differential vibration displacement electrical signals are two electrical signals obtained by converting the capacitance changes of the differential detection electrodes in the micromechanical gyroscope;

[0006] Using a harmonic separator to perform odd-order filtering and even-order separation processing on the two differential vibration displacement electrical signals, thereby obtaining odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively;

[0007] Demodulating the odd-order vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and demodulating the even-order vibration displacement electrical signal using a second harmonic to obtain a second harmonic amplitude;

[0008] taking the quotient of the second harmonic amplitude divided by the fundamental wave amplitude as the second harmonic to fundamental wave amplitude ratio;

[0009] An excitation signal is generated according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and the excitation signal is output to an excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

[0010] Optionally, before demodulating the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude, and demodulating the even-order vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude, the method further includes:

[0011] Demodulating the odd-order vibration displacement electrical signal using a first sinusoidal signal to obtain a fundamental wave phase value; wherein the first sinusoidal signal is a sinusoidal signal of the vibration angular frequency of the micromechanical gyroscope;

[0012] Obtaining the fundamental wave angular frequency and the second harmonic angular frequency according to the fundamental wave phase value;

[0013] generating a first cosine signal according to the fundamental wave angular frequency, taking the first cosine signal as the fundamental wave, and performing the step of demodulating the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude; the angular frequency of the first cosine signal being the fundamental wave angular frequency;

[0014] A second cosine signal is generated according to the second harmonic angular frequency, the second cosine signal is used as the second harmonic, and the even wave vibration displacement electrical signal is demodulated using the second harmonic to obtain the second harmonic amplitude; the angular frequency of the second cosine signal is the second harmonic angular frequency.

[0015] Optionally, generating an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value includes:

[0016] According to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, adjusting the excitation signal amplitude value;

[0017] The excitation signal is obtained by multiplying the first cosine value in the first cosine signal by the amplitude value of the excitation signal.

[0018] Optionally, adjusting the excitation signal amplitude value according to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value includes:

[0019] The excitation signal amplitude value is obtained by adjusting in a proportional-integral control manner according to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value.

[0020] Optionally, obtaining the fundamental wave angular frequency and the second harmonic angular frequency according to the fundamental wave phase value includes:

[0021] The fundamental wave angular frequency and the second harmonic angular frequency are obtained by adjustment according to the difference between the fundamental wave phase value and the reference phase value.

[0022] Optionally, adjusting to obtain the fundamental wave angular frequency and the second harmonic angular frequency according to the difference between the fundamental wave phase value and the reference phase value includes:

[0023] The fundamental wave angular frequency and the second harmonic angular frequency are obtained by adjusting in a proportional-integral control manner according to the difference between the fundamental wave phase value and the reference phase value.

[0024] Optionally, the two differential vibration displacement electrical signals are two electrical signals obtained by converting the capacitance variation of the differential detection electrodes in the micromechanical gyroscope using a charge amplifier.

[0025] The present invention also provides a micro-mechanical gyroscope driven modal vibration control system, comprising:

[0026] An acquisition module is used to acquire two differential vibration displacement electrical signals; the two differential vibration displacement electrical signals are two electrical signals obtained by converting the capacitance changes of the differential detection electrodes in the micromechanical gyroscope;

[0027] A filtering and separation module is used to perform odd-order filtering and even-order separation processing on the two differential vibration displacement electrical signals using a harmonic separator to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively;

[0028] An amplitude demodulation module is used to demodulate the odd-order vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and to demodulate the even-order vibration displacement electrical signal using a second harmonic to obtain a second harmonic amplitude;

[0029] a calculation module, configured to calculate a quotient of the second harmonic amplitude divided by the fundamental amplitude as a second harmonic-to-fundamental amplitude ratio;

[0030] The excitation signal generating module is used to generate an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and output the excitation signal to the excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

[0031] The present invention also provides a micro-mechanical gyroscope driven modal vibration control device, comprising:

[0032] Memory for storing computer programs;

[0033] The processor is configured to execute the computer program to implement the steps of the above-mentioned micromechanical gyroscope driving mode vibration control method.

[0034] The present invention also provides a computer-readable storage medium for storing a computer program, wherein the computer program, when executed by a processor, implements the steps of the above-mentioned micromechanical gyroscope drive modal vibration control method.

[0035] It can be seen that the micromechanical gyroscope drive modal vibration control method provided by the present invention includes obtaining two differential vibration displacement electrical signals, which are two electrical signals obtained by converting the capacitance change of the differential detection electrode in the micromechanical gyroscope; using a harmonic separator to perform odd-even filtering separation processing on the two differential vibration displacement electrical signals to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively, using a fundamental wave to demodulate the odd-order vibration displacement electrical signals to obtain the fundamental wave amplitude, using a second harmonic to demodulate the even-order vibration displacement electrical signals to obtain the second harmonic amplitude, dividing the second harmonic amplitude by the fundamental wave amplitude as the quotient of the second harmonic amplitude and the fundamental wave amplitude as the second harmonic fundamental wave amplitude ratio, generating an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and outputting the excitation signal to the excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope. The present invention performs odd-order and even-order filtering separation processing on the two differential vibration displacement electrical signals converted from the output of the differential detection electrode to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively, and generates an excitation signal based on the fundamental wave amplitude and second harmonic amplitude obtained by demodulation. While reducing the demodulation error, it also reduces the influence of external interference, thereby improving the accuracy of closed-loop control.

[0036] In addition, the present invention also provides a micro-mechanical gyroscope driven modal vibration control system, equipment and computer-readable storage medium, which also have the above-mentioned beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0038] Figure 1 A flow chart of a method for controlling driving mode vibration of a micromechanical gyroscope provided by an embodiment of the present invention;

[0039] Figure 2 A flowchart illustrating a method for controlling a micromechanical gyroscope drive mode vibration according to an embodiment of the present invention;

[0040] Figure 3 A schematic structural diagram of a micro-mechanical gyroscope driven modal vibration control system provided by an embodiment of the present invention;

[0041] Figure 4 A schematic structural diagram of a micromechanical gyroscope driven modal vibration control device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0042] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0043] The control system of a micro-electro-mechanical system (MEMS) vibrating gyroscope mainly consists of a driving mode control system and a sensitive mode control system. The driving circuit is used to excite the driving mode to a constant amplitude resonance, which is used to respond to the angular rate input with displacement. The sensitive circuit usually adopts a force balance closed-loop detection method, which essentially maintains the detection mass block in its initial position by applying a balancing force. Any change in amplitude will be reflected in a change in the scale factor. Therefore, in order to achieve accurate angular rate detection, the vibration displacement amplitude of the driving mode must be very stable. In order to achieve high stability in amplitude control, automatic gain control (AGC) technology is generally used. However, in traditional AGC schemes, the vibration displacement is usually controlled only based on the fundamental wave amplitude. Due to the influence of factors such as ambient temperature, the fundamental wave amplitude cannot accurately represent the actual vibration displacement, resulting in instability of the vibration displacement amplitude, which in turn causes the zero bias and scale factor to drift.

[0044] Therefore, existing technologies use the relationship between the harmonic-primary ratio (HPR) and the displacement amplitude in the vibration displacement signal. Since gyroscope vibration signals usually adopt differential detection, existing methods all use the fundamental and third harmonic amplitudes to calculate the control input. However, the third harmonic amplitude is usually very small, less than tens of millivolts, and is easily affected by noise interference, resulting in low control accuracy.

[0045] The present invention performs odd-order and even-order filtering separation processing on the two differential vibration displacement electrical signals converted from the outputs of the differential detection electrodes to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively, and generates an excitation signal according to the fundamental amplitude and second harmonic amplitude obtained by demodulation. A driving modal vibration amplitude control method based on the second harmonic-fundamental amplitude ratio is constructed to keep the vibration displacement amplitude constant and independent of the circuit gain, reduce the influence of factors such as temperature on the zero bias and scale factor, and further reduce the influence of external interference while reducing the demodulation error, thereby improving the accuracy of closed-loop control.

[0046] Please refer to Figure 1 , Figure 1A flowchart of a method for controlling the vibration of a micromechanical gyroscope drive mode provided by an embodiment of the present invention. The method may include:

[0047] S101: Acquire two differential vibration displacement electrical signals; the two differential vibration displacement electrical signals are two electrical signals obtained by converting capacitance changes of differential detection electrodes in a micromechanical gyroscope.

[0048] This embodiment converts the capacitance change of the differential detection electrodes in the micromechanical gyroscope into two electrical signals. Furthermore, since the high-frequency carrier generator generates a high-frequency carrier and loads it onto the mass block of the micromechanical gyroscope to modulate the capacitance change of the gyroscope detection electrodes of the micromechanical gyroscope, the carrier demodulator can be used to demodulate the electrical signal modulated by the high-frequency carrier to generate the final two differential vibration displacement electrical signals.

[0049] Furthermore, in order to ensure smooth acquisition of the two differential vibration displacement electrical signals, the two differential vibration displacement electrical signals may be two electrical signals obtained by converting the capacitance variation of the differential detection electrodes in the micromechanical gyroscope using a charge amplifier.

[0050] It should be noted that in this embodiment, a charge amplifier is used to convert the capacitance change of the differential detection electrode in the micromechanical gyroscope into two electrical signals, thereby obtaining two differential vibration displacement electrical signals, thereby ensuring the smooth implementation of the control method.

[0051] S102: Using a harmonic separator, perform odd-order filtering and even-order separation processing on the two differential vibration displacement electrical signals to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals, respectively.

[0052] In this embodiment, a harmonic separator is added to perform odd-order and even-order filtering separation processing on the two acquired differential vibration displacement electrical signals to form odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively.

[0053] S103: Demodulating the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude, and demodulating the even-order vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude.

[0054] In the amplitude control loop, the odd-order vibration displacement electrical signal is sent to the fundamental wave amplitude calculator to obtain the fundamental wave amplitude, and the even-order vibration displacement electrical signal is sent to the second harmonic amplitude calculator to obtain the second harmonic amplitude.

[0055] S104: The quotient of the second harmonic amplitude divided by the fundamental wave amplitude is taken as the second harmonic to fundamental wave amplitude ratio.

[0056] In the closed-loop detection of the micromechanical gyroscope force balance, the zero bias and scale factor of the micromechanical gyroscope are closely related to the vibration displacement. The zero bias can be expressed as The scaling factor can be expressed as Where τ represents the decay time constant, m represents the effective mass of the oscillator, and θ τ is the damping axis deflection angle, ω x is the resonant frequency, ||x|| is the amplitude of the vibration displacement, is the driving modal phase shift, K VF is the conversion coefficient from voltage to driving force, A g is the angular gain.

[0057] As you can see, both the bias and scale factor are related to ||x||. ||x|| is typically controlled at a fixed value, but due to environmental changes, ||x|| can vary slightly. For a micromechanical gyroscope, these small changes can significantly affect the long-term stability of the bias and scale factor.

[0058] In order to solve the problem in the prior art that when the excitation signal is adjusted directly based on the difference between the fundamental wave amplitude and the reference amplitude value, the fundamental wave amplitude will be affected by the environment, which leads to inaccurate adjustment of the excitation signal and the inability to keep the vibration displacement of the micromechanical gyroscope stable. In this application, the quotient of the second harmonic amplitude divided by the fundamental wave amplitude is used as the adjustment basis, thereby eliminating the influence of the environment and ensuring accurate control of the vibration displacement of the micromechanical gyroscope.

[0059] S105: generating an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and outputting the excitation signal to an excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

[0060] In this embodiment, an excitation signal is generated based on the second harmonic fundamental wave amplitude ratio and a reference amplitude value, wherein the reference amplitude value is pre-set. The specific numerical value of the reference amplitude value is not particularly limited in this application and can be set according to the actual application scenario. In addition, the intensity of the generated excitation signal can be adjusted in a proportional integral manner by the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, and this is also not particularly limited in this application. After determining the excitation signal, the excitation signal is output to the excitation electrode of the micromechanical gyroscope, and the vibration displacement of the micromechanical gyroscope is affected by the excitation signal. The vibration displacement of the micromechanical gyroscope is then reflected by the capacitance change of the gyroscope detection electrode. The above process is repeated, thereby achieving the stability of the drive mode vibration control of the micromechanical gyroscope.

[0061] Furthermore, in order to ensure that the fundamental wave amplitude and the second harmonic amplitude are obtained smoothly, before the above-mentioned steps of demodulating the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude and demodulating the even-order vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude, the following steps may be further included:

[0062] Step S11: Demodulate the odd-order vibration displacement electrical signal using the first sinusoidal signal to obtain a fundamental wave phase value; the first sinusoidal signal is a sinusoidal signal of the vibration angular frequency of the micromechanical gyroscope.

[0063] Step S12: Obtain the fundamental wave angular frequency and the second harmonic angular frequency according to the fundamental wave phase value.

[0064] Step S13: Generate a first cosine signal according to the fundamental wave angular frequency, use the first cosine signal as the fundamental wave, and perform the step of demodulating the odd wave vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude; the angular frequency of the first cosine signal is the fundamental wave angular frequency.

[0065] Step S14: Generate a second cosine signal according to the second harmonic angular frequency, use the second cosine signal as the second harmonic, and perform the step of demodulating the dual-wave vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude; the angular frequency of the second cosine signal is the second harmonic angular frequency.

[0066] This embodiment first uses a sinusoidal signal with an angular frequency equal to the vibration angular frequency of the micromechanical gyroscope to demodulate the odd-wave vibration displacement electrical signal and obtain the fundamental wave phase. The fundamental wave angular frequency and the second harmonic angular frequency are then obtained from the fundamental wave phase. The fundamental wave angular frequency is the angular frequency corresponding to the fundamental wave, i.e., the odd-wave vibration angular frequency, and the second harmonic angular frequency is twice the fundamental wave angular frequency. A first cosine signal with an angular frequency equal to the fundamental wave angular frequency is used as the fundamental wave, and a second cosine signal with an angular frequency equal to the second harmonic angular frequency is used as the second harmonic. This allows the fundamental wave and the second harmonic to be used to control the vibration displacement of the micromechanical gyroscope.

[0067] This embodiment utilizes the fundamental wave and the second harmonic to demodulate the odd-order vibration displacement electrical signal and the even-order vibration displacement electrical signal, respectively. In addition to obtaining the amplitude of the fundamental wave and the amplitude of the second harmonic, the fundamental wave and the harmonics are generated in advance, thereby further improving the automation and integrity of the control of the micromechanical gyroscope in this application.

[0068] Furthermore, in order to ensure stable generation of the excitation signal, the above-mentioned generation of the excitation signal according to the second harmonic fundamental wave amplitude ratio and the reference amplitude value may include:

[0069] According to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, the excitation signal amplitude value is adjusted;

[0070] The excitation signal is obtained by multiplying the first cosine value in the first cosine signal by the amplitude value of the excitation signal.

[0071] In this embodiment, the second harmonic fundamental wave amplitude ratio can be adjusted to approach the reference amplitude value based on the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value to obtain an excitation signal amplitude value, and the excitation signal amplitude value is multiplied by the first cosine value of the first cosine signal to obtain the excitation signal. In this embodiment, the angular frequency of the first cosine signal is the fundamental wave angular frequency.

[0072] Furthermore, in order to ensure the stability of the micromechanical gyroscope driving mode vibration control, the above-mentioned adjustment of the excitation signal amplitude value according to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value may include:

[0073] According to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, the excitation signal amplitude value is adjusted in a proportional-integral control manner.

[0074] In this embodiment, the excitation signal is adjusted based on the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, specifically by a proportional integral method. Applying the proportional integral method to adjust the excitation signal has the advantages of timely adjustment and ultimately eliminating the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, thereby maintaining stable vibration control of the micromechanical gyroscope drive mode.

[0075] Furthermore, in order to ensure smooth acquisition of the fundamental wave angular frequency and the second harmonic angular frequency, the above-mentioned acquisition of the fundamental wave angular frequency and the second harmonic angular frequency according to the fundamental wave phase value may include:

[0076] According to the difference between the fundamental wave phase value and the reference phase value, the fundamental wave angular frequency and the second harmonic angular frequency are adjusted.

[0077] In this embodiment, the fundamental wave phase value can be adjusted to approach the reference phase value based on the difference between the fundamental wave phase value and the reference phase value to obtain the fundamental wave angular frequency and the second harmonic angular frequency. It should be noted that the reference phase value in this embodiment is pre-set, and the specific value of the reference phase value is not particularly limited in this application and can be set according to actual application scenarios.

[0078] Furthermore, in order to ensure the accuracy of obtaining the fundamental wave angular frequency and the second harmonic angular frequency, thereby improving the control stability, the above adjustment based on the difference between the fundamental wave phase value and the reference phase value to obtain the fundamental wave angular frequency and the second harmonic angular frequency may include:

[0079] According to the difference between the fundamental wave phase value and the reference phase value, the fundamental wave angular frequency and the second harmonic angular frequency are adjusted in a proportional-integral control manner.

[0080] This embodiment performs adjustment in a proportional-integral manner according to the difference between the fundamental wave phase value and the reference phase value to obtain the final fundamental wave angular frequency and the second harmonic angular frequency, thereby further improving the stability of the micromechanical gyroscope drive mode vibration control.

[0081] A micromechanical gyroscope drive modal vibration control method provided by an embodiment of the present invention includes acquiring two differential vibration displacement electrical signals, the two differential vibration displacement electrical signals being two electrical signals obtained by converting capacitance changes of differential detection electrodes in a micromechanical gyroscope; performing odd-order filtering and even-order filtering on the two differential vibration displacement electrical signals using a harmonic separator to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals, respectively; demodulating the odd-order vibration displacement electrical signals using a fundamental wave to obtain a fundamental wave amplitude; demodulating the even-order vibration displacement electrical signals using a second harmonic to obtain a second harmonic amplitude; dividing the second harmonic amplitude by the fundamental wave amplitude as a quotient of the second harmonic to fundamental wave amplitude ratio; generating an excitation signal based on the second harmonic to fundamental wave amplitude ratio and a reference amplitude value; and outputting the excitation signal to an excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope. The present invention performs odd-order and even-order filtering separation processing on the two differential vibration displacement electrical signals converted from the output of the differential detection electrode to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively, and generates an excitation signal based on the fundamental wave amplitude and second harmonic amplitude obtained by demodulation. While reducing the demodulation error, it also reduces the influence of external interference, thereby improving the accuracy of closed-loop control. In addition, the embodiment of the present invention uses a charge amplifier to convert the capacitance change of the differential detection electrode in the micromechanical gyroscope into two electrical signals, thereby obtaining two differential vibration displacement electrical signals, thereby ensuring the smooth implementation of the control method; the odd-order vibration displacement electrical signal and the even-order vibration displacement electrical signal are demodulated using the fundamental wave and the second harmonic respectively, and in addition to obtaining the fundamental wave amplitude and the second harmonic amplitude, the fundamental wave and the harmonics are pre-generated, further improving the automation and integrity of the control of the micromechanical gyroscope in the present application; the use of a proportional integral method to adjust the excitation signal has the advantages of timely adjustment and ultimately eliminating the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, thereby maintaining the stability of the micromechanical gyroscope drive mode vibration control; according to the difference between the fundamental wave phase value and the reference phase value, the final fundamental wave angular frequency and the second harmonic angular frequency are obtained by proportional integration, further improving the stability of the micromechanical gyroscope drive mode vibration control.

[0082] To make the present invention easier to understand, the above-mentioned micro-mechanical gyroscope driving mode vibration control method can refer to Figure 2 , Figure 2 This is a flowchart illustrating a method for controlling a micromechanical gyroscope's driving mode vibration according to an embodiment of the present invention.

[0083] It should be noted that the embodiment provided Figure 2 The functions of each component are as follows:

[0084] (1) Charge amplifier: used to convert the capacitance change of the gyroscope detection electrode into an electrical signal.

[0085] (2) Odd / even harmonic separator: Utilize the positive and negative polarity characteristics of the odd and even harmonic components in the two differential signals to perform combined operations and separate the odd harmonic component Xo and the even harmonic Xe.

[0086] (3) Calculation of the second harmonic amplitude: Using the cos(2ωdt) reference signal, the input even wave signal Xe is demodulated and filtered to calculate the amplitude of the second harmonic component.

[0087] (4) Fundamental wave amplitude calculation: Using the cos(ωdt) reference signal, the input odd-order wave signal Xo is demodulated and filtered to calculate the amplitude of the fundamental wave component.

[0088] (5) Harmonic Ratio Calculator: used to calculate the ratio of the second harmonic to the fundamental amplitude HPR2.

[0089] (6) PI controller 1: It is a proportional-integral controller that controls HPR2 to a set reference value and is used to adjust the amplitude Ad of the excitation signal.

[0090] (7) Fundamental wave phase detector: Use the sin(ωdt) reference signal to demodulate and filter the input odd wave signal Xo and calculate the fundamental wave phase information.

[0091] (8) PI controller 2: It is a proportional-integral controller that controls the phase difference to a set reference value and is used to adjust the frequency ωd of the excitation signal.

[0092] (9) A numerically controlled oscillator, used to generate reference signals sin(ωdt) and cos(ωdt), sin(2ωdt) and cos(2ωdt) of corresponding frequency and doubled frequency according to the input frequency ωd.

[0093] (10) Modulator: used to multiply the amplitude value Ad by the reference signal cos(ωdt) to generate an excitation signal.

[0094] The following introduces a micromechanical gyroscope driving modal vibration control system provided by an embodiment of the present invention. The micromechanical gyroscope driving modal vibration control system described below and the micromechanical gyroscope driving modal vibration control method described above can be referred to each other.

[0095] Please refer to Figure 3 , Figure 3A schematic structural diagram of a micromechanical gyroscope driven modal vibration control system provided by an embodiment of the present invention may include:

[0096] The acquisition module 100 is used to acquire two differential vibration displacement electrical signals; the two differential vibration displacement electrical signals are two electrical signals obtained by converting the capacitance changes of the differential detection electrodes in the micromechanical gyroscope;

[0097] The filtering and separation module 200 is used to perform odd-order filtering and even-order separation processing on the two differential vibration displacement electrical signals using a harmonic separator to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively;

[0098] Amplitude demodulation module 300, used to demodulate the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude, and demodulate the even-order vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude;

[0099] A calculation module 400 is configured to calculate a quotient of the second harmonic amplitude divided by the fundamental amplitude as a second harmonic-to-fundamental amplitude ratio;

[0100] The excitation signal generating module 500 is configured to generate an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and output the excitation signal to the excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

[0101] Furthermore, the micro-mechanical gyroscope driven modal vibration control system may further include:

[0102] a phase demodulation module, configured to demodulate the odd-order vibration displacement electrical signal using a first sinusoidal signal to obtain a fundamental wave phase value; wherein the first sinusoidal signal is a sinusoidal signal of the vibration angular frequency of the micromechanical gyroscope;

[0103] An angular frequency acquisition module, configured to obtain the fundamental wave angular frequency and the second harmonic angular frequency according to the fundamental wave phase value;

[0104] a fundamental wave generating module, configured to generate a first cosine signal according to the fundamental wave angular frequency, use the first cosine signal as the fundamental wave, and perform the step of demodulating the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude; the angular frequency of the first cosine signal is the fundamental wave angular frequency;

[0105] A second harmonic generation module is configured to generate a second cosine signal based on the second harmonic angular frequency, use the second cosine signal as the second harmonic, and perform the step of demodulating the even-wave vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude; the angular frequency of the second cosine signal is the second harmonic angular frequency.

[0106] Furthermore, the excitation signal generating module 500 may include:

[0107] an excitation signal amplitude value acquiring unit, configured to adjust and obtain an excitation signal amplitude value according to a difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value;

[0108] An excitation signal acquisition unit is configured to multiply a first cosine value in the first cosine signal by an amplitude value of the excitation signal to obtain the excitation signal.

[0109] Furthermore, the excitation signal amplitude value obtaining unit may include:

[0110] The excitation signal amplitude value acquisition subunit is used to adjust the excitation signal amplitude value in a proportional-integral control manner according to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value.

[0111] Furthermore, the angular frequency acquisition module may include:

[0112] The angular frequency acquisition unit is used to adjust and obtain the fundamental wave angular frequency and the second harmonic angular frequency according to the difference between the fundamental wave phase value and the reference phase value.

[0113] Furthermore, the angular frequency acquisition unit may include:

[0114] The angular frequency acquisition subunit is used to adjust the fundamental wave angular frequency and the second harmonic angular frequency in a proportional-integral control manner according to the difference between the fundamental wave phase value and the reference phase value.

[0115] Furthermore, the two differential vibration displacement electrical signals in the acquisition module 100 may be two electrical signals obtained by converting the capacitance variation of the differential detection electrodes in the micromechanical gyroscope using a charge amplifier.

[0116] It should be noted that the order of the modules, units and sub-units in the above-mentioned micro-mechanical gyroscope driven modal vibration control system can be changed without affecting the logic.

[0117] The micromechanical gyroscope driven modal vibration control system provided by the embodiment of the present invention performs odd-order and even-order filtering separation processing on the two differential vibration displacement electrical signals converted from the differential detection electrode outputs, thereby obtaining odd-order and even-order vibration displacement electrical signals, respectively. An excitation signal is generated based on the fundamental wave amplitude and second harmonic amplitude obtained by demodulation. This reduces the demodulation error while also reducing the influence of external interference, thereby improving the accuracy of closed-loop control. In addition, the embodiment of the present invention performs charge amplification processing on the two differential vibration displacement electrical signals before performing odd-order filtering and separation processing on the two differential vibration displacement electrical signals. This facilitates the subsequent odd-order filtering and separation processing of the two differential vibration displacement electrical signals, reduces external interference, and improves the accuracy of filtering and separation. The odd-order vibration displacement electrical signals and the even-order vibration displacement electrical signals are demodulated using the fundamental wave and the second harmonic, respectively. In addition to obtaining the fundamental wave amplitude and the second harmonic amplitude, the fundamental wave and the harmonics are pre-generated, further improving the automation and integrity of the control of the micromechanical gyroscope in the present application. The use of a proportional-integral method to adjust the excitation signal has the advantages of timely adjustment and ultimately eliminating the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, thereby maintaining stable micromechanical gyroscope drive modal vibration control. The final fundamental wave angular frequency and the second harmonic angular frequency are obtained by proportional-integral adjustment based on the difference between the fundamental wave phase value and the reference phase value, further improving the stability of the micromechanical gyroscope drive modal vibration control.

[0118] The following introduces a micromechanical gyroscope driving modal vibration control device provided by an embodiment of the present invention. The micromechanical gyroscope driving modal vibration control device described below and the micromechanical gyroscope driving modal vibration control method described above can refer to each other.

[0119] Please refer to Figure 4 , Figure 4 A schematic structural diagram of a micromechanical gyroscope driven modal vibration control device provided in an embodiment of the present invention may include:

[0120] Memory 10, for storing computer programs;

[0121] The processor 20 is configured to execute a computer program to implement the steps of the above-mentioned method for controlling the driving mode vibration of a micromechanical gyroscope.

[0122] The memory 10 , the processor 20 , and the communication interface 31 all communicate with each other via the communication bus 32 .

[0123] In an embodiment of the present invention, the memory 10 is used to store one or more programs. The program may include program code, and the program code includes computer operating instructions. In an embodiment of the present application, the memory 10 may store programs for implementing the following functions:

[0124] Obtaining two differential vibration displacement electrical signals; the two differential vibration displacement electrical signals are two electrical signals obtained by converting the capacitance changes of the differential detection electrodes in the micromechanical gyroscope;

[0125] The harmonic separator is used to perform odd-order filtering and even-order separation processing on the two differential vibration displacement electrical signals to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively;

[0126] The odd-order vibration displacement electrical signal is demodulated by the fundamental wave to obtain the fundamental wave amplitude, and the even-order vibration displacement electrical signal is demodulated by the second harmonic to obtain the second harmonic amplitude;

[0127] The quotient of the second harmonic amplitude divided by the fundamental amplitude is taken as the second harmonic to fundamental amplitude ratio;

[0128] An excitation signal is generated according to the amplitude ratio of the second harmonic fundamental wave and a reference amplitude value, and the excitation signal is output to an excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

[0129] In one possible implementation, the memory 10 may include a program storage area and a data storage area, wherein the program storage area may store an operating system and applications required for at least one function, etc.; the data storage area may store data created during use.

[0130] In addition, the memory 10 may include a read-only memory and a random access memory, and provides instructions and data to the processor. A portion of the memory may also include NVRAM. The memory stores an operating system and operating instructions, executable modules or data structures, or a subset or an extended set thereof. The operating instructions may include various operating instructions for implementing various operations. The operating system may include various system programs for implementing various basic tasks and processing hardware-based tasks.

[0131] The processor 20 may be a central processing unit (CPU), an application-specific integrated circuit, a digital signal processor, a field programmable gate array, or other programmable logic device. The processor 20 may be a microprocessor or any conventional processor. The processor 20 may call a program stored in the memory 10.

[0132] The communication interface 31 may be an interface of a communication module, used for connecting to other devices or systems.

[0133] Of course, it needs to be explained that Figure 4 The structure shown does not constitute a limitation on the micro-mechanical gyroscope driven modal vibration control device in the embodiment of the present application. In actual applications, the micro-mechanical gyroscope driven modal vibration control device may include Figure 4 More or fewer components than shown, or combinations of certain components.

[0134] The computer-readable storage medium provided by an embodiment of the present invention is introduced below. The computer-readable storage medium described below and the micromechanical gyroscope driving mode vibration control method described above can be referenced to each other.

[0135] The present invention also provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the steps of the above-mentioned micromechanical gyroscope driving modal vibration control method are implemented.

[0136] The computer-readable storage medium may include: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, etc., which can store program codes.

[0137] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from the other embodiments. Reference can be made to the descriptions of the identical or similar parts between the various embodiments. For the devices disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions of the methods.

[0138] Professionals may further appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the above description has generally described the components and steps of each example according to their functions. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians may use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0139] Finally, it should be noted that, in this document, relationships such as first and second, etc., are used solely to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0140] The above is a detailed introduction to the micromechanical gyroscope drive modal vibration control method, system and equipment provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the ideas of the present invention, there may be changes in the specific implementation methods and application scopes. In summary, the contents of this specification should not be understood as limiting the present invention.

Claims

1. A method for controlling the driving mode vibration of a micromechanical gyroscope, characterized in that: include: Acquire two differential vibration displacement electrical signals; the two differential vibration displacement electrical signals are two electrical signals obtained by converting the capacitance changes of the differential detection electrodes in the micromechanical gyroscope; Using a harmonic separator to perform odd-order filtering and even-order separation processing on the two differential vibration displacement electrical signals, thereby obtaining odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively; Demodulating the odd-order vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and demodulating the even-order vibration displacement electrical signal using a second harmonic to obtain a second harmonic amplitude; taking the quotient of the second harmonic amplitude divided by the fundamental wave amplitude as the second harmonic to fundamental wave amplitude ratio; An excitation signal is generated according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and the excitation signal is output to an excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

2. The micromechanical gyroscope driving mode vibration control method according to claim 1, characterized in that: Before demodulating the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude, and demodulating the even-order vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude, the method further includes: Demodulating the odd-order vibration displacement electrical signal using a first sinusoidal signal to obtain a fundamental wave phase value; wherein the first sinusoidal signal is a sinusoidal signal of the vibration angular frequency of the micromechanical gyroscope; Obtaining the fundamental wave angular frequency and the second harmonic angular frequency according to the fundamental wave phase value; generating a first cosine signal according to the fundamental wave angular frequency, taking the first cosine signal as the fundamental wave, and performing the step of demodulating the odd-order vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude; the angular frequency of the first cosine signal being the fundamental wave angular frequency; A second cosine signal is generated according to the second harmonic angular frequency, the second cosine signal is used as the second harmonic, and the even wave vibration displacement electrical signal is demodulated using the second harmonic to obtain the second harmonic amplitude; the angular frequency of the second cosine signal is the second harmonic angular frequency.

3. The micromechanical gyroscope driving mode vibration control method according to claim 2, characterized in that: Generating an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value includes: According to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value, adjusting the excitation signal amplitude value; The excitation signal is obtained by multiplying the first cosine value in the first cosine signal by the amplitude value of the excitation signal.

4. The micromechanical gyroscope driving mode vibration control method according to claim 3, characterized in that: The step of adjusting the excitation signal amplitude value according to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value comprises: The excitation signal amplitude value is obtained by adjusting in a proportional-integral control manner according to the difference between the second harmonic fundamental wave amplitude ratio and the reference amplitude value.

5. The micro-mechanical gyroscope driving mode vibration control method according to claim 2, characterized in that: The fundamental wave angular frequency and the second harmonic angular frequency are obtained according to the fundamental wave phase value, including: The fundamental wave angular frequency and the second harmonic angular frequency are obtained by adjustment according to the difference between the fundamental wave phase value and the reference phase value.

6. The micro-mechanical gyroscope driving mode vibration control method according to claim 5, characterized in that: According to the difference between the fundamental wave phase value and the reference phase value, adjusting to obtain the fundamental wave angular frequency and the second harmonic angular frequency includes: The fundamental wave angular frequency and the second harmonic angular frequency are obtained by adjusting in a proportional-integral control manner according to the difference between the fundamental wave phase value and the reference phase value.

7. The micromechanical gyroscope driving mode vibration control method according to claim 1, characterized in that: The two differential vibration displacement electrical signals are obtained by converting the capacitance variation of the differential detection electrodes in the micromechanical gyroscope using a charge amplifier.

8. A micro-mechanical gyroscope driven modal vibration control system, characterized in that: include: An acquisition module is used to acquire two differential vibration displacement electrical signals; the two differential vibration displacement electrical signals are two electrical signals obtained by converting the capacitance changes of the differential detection electrodes in the micromechanical gyroscope; A filtering and separation module is used to perform odd-order filtering and even-order separation processing on the two differential vibration displacement electrical signals using a harmonic separator to obtain odd-order vibration displacement electrical signals and even-order vibration displacement electrical signals respectively; An amplitude demodulation module is used to demodulate the odd-order vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and to demodulate the even-order vibration displacement electrical signal using a second harmonic to obtain a second harmonic amplitude; a calculation module, configured to calculate a quotient of the second harmonic amplitude divided by the fundamental amplitude as a second harmonic-to-fundamental amplitude ratio; The excitation signal generating module is used to generate an excitation signal according to the second harmonic fundamental wave amplitude ratio and a reference amplitude value, and output the excitation signal to the excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

9. A micro-mechanical gyroscope driven modal vibration control device, characterized in that: include: Memory for storing computer programs; A processor is configured to implement the steps of the micromechanical gyroscope drive mode vibration control method according to any one of claims 1 to 7 when executing the computer program.

10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the micromechanical gyroscope driving mode vibration control method according to any one of claims 1 to 7 are implemented.

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