Method and device for automatically detecting performance of array light source metasurface projection device

Abstract

The application discloses a kind of array light source super surface projection device performance automatic detection method and device, method includes: receiving preliminary acquisition array speckle image and calculating axial offset, according to axis offset sending translation instruction to three-axis wafer sample stage to make array speckle accurate centering, obtain adjusted array speckle centering image and carry out mask plate segmentation to obtain image dot matrix information, after extracting corresponding speckle feature information, array speckle centering image is carried out contrast analysis, obtains speckle contrast information, speckle feature information and speckle contrast information are combined as performance comprehensive detection result.The above method, by calculating axial offset and realizing the accurate centering of speckle, by contrast analysis and speckle feature extraction, realize the quick and accurate calculation of speckle contrast and the quick extraction of speckle feature information, to obtain the performance comprehensive detection result of comprehensive performance detection to super surface projection device.

Description

Technical Field

[0001] The present invention relates to the field of metasurface device detection technology, and in particular to a method and device for automatically detecting the performance of an array light source metasurface projection device. Background Art

[0002] With the continuous development of optical technology and the increasing maturity of advanced nano-processing technology, metasurface DOE (Diffractive Optical Elements) projectors are highly integrated and can integrate complex optical functions into a compact chip-level component. They can be more closely integrated with other optoelectronic devices such as light sources and detectors to achieve a more compact optical path design, and have attracted much attention in scientific research and industrial fields. At present, it is difficult to fully guarantee the consistency between design values ​​and process manufacturing during the process of processing. In order to efficiently and quickly perform wafer-level testing on array light source metasurface projection devices, it is necessary to perform performance testing on each metasurface projection device to determine accurate performance indicators and select good products.

[0003] In the existing technology, metasurface projection devices can be manually inspected. However, manual inspection is inefficient and is not an ideal solution for large-scale production. In addition, there is no standard definition method for the performance indicators of array light source metasurface projection devices, and a comprehensive analysis of multiple performance indicators of metasurface projection devices is required. In order to ensure the performance of array light source metasurface projection devices, a professional high-precision end-to-end automated inspection equipment is urgently needed to achieve fast and accurate automatic inspection of the performance indicators of array light source metasurface projection devices. Therefore, the inspection methods for array light source metasurface projection devices in the existing technical methods have the problem of low inspection efficiency. Summary of the Invention

[0004] An embodiment of the present invention provides a method for automatically detecting the performance of an array light source metasurface projection device, which aims to solve the problem of low detection efficiency in the detection methods for array light source metasurface projection devices in the prior art.

[0005] In a first aspect, an embodiment of the present invention provides a method for automatically detecting the performance of an array light source metasurface projection device, wherein the automatic performance detection method is applied to a detection terminal, wherein the detection terminal establishes communication connections with the array light source, the three-axis wafer sample stage, and the visual camera respectively to realize the transmission of data information, and the array light source, the three-axis wafer sample stage, the imaging light screen, and the visual camera are arranged in sequence along the same optical axis, and the method includes:

[0006] receive an array speckle image obtained by the visual camera imaging the light screen, and calculate an axial offset corresponding to the array speckle image according to a preset convex hull rectangle detection algorithm;

[0007] send a corresponding translation instruction to the three-axis wafer sample stage according to the axial offset, so as to drive the three-axis wafer sample stage to translate and realize accurate centering of the array speckle;

[0008] obtain an array speckle centering image obtained by the visual camera after array speckle centering, and perform mask segmentation on the array speckle centering image according to a preset segmentation algorithm to obtain corresponding image dot array information;

[0009] extract speckle features from the array speckle centering image according to a preset extraction rule and the image dot array information to obtain corresponding speckle feature information;

[0010] perform contrast analysis on the array speckle centering image according to a preset speckle contrast algorithm and the speckle feature information to obtain corresponding speckle contrast information;

[0011] combine the speckle feature information and the speckle contrast information to obtain a corresponding performance comprehensive detection result.

[0012] In a second aspect, the embodiment of the present application also provides a performance automatic detection device of an array light source metasurface projection device, wherein the performance automatic detection device comprises a detection terminal, an array light source, a three-axis wafer sample stage, an imaging light screen and a visual camera, the detection terminal is in communication connection with the array light source, the three-axis wafer sample stage, the visual camera and a distance measuring sensor to realize transmission of data information, and the array light source, the three-axis wafer sample stage, the imaging light screen and the visual camera are arranged along the same optical axis in sequence.

[0013] The array light source adjusts light source power according to an adjustment instruction from the detection terminal.

[0014] The three-axis wafer sample stage drives the to-be-tested metasurface projection device to move horizontally and vertically, and the distance measuring sensor is arranged on one side of the array light source.

[0015] The detection terminal is used to execute the performance automatic detection method of the array light source metasurface projection device as described in the first aspect.

[0016] In a third aspect, the embodiments of the present application further provide a computer device, wherein the device comprises a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory complete the communication among each other through the communication bus.

[0017] a memory for storing a computer program;

[0018] a processor for executing the program stored on the memory, so as to realize the steps of the performance automatic detection method of the array light source metasurface projection device according to the first aspect.

[0019] In a fourth aspect, the embodiments of the present application further provide a computer readable storage medium having a computer program stored thereon, wherein the computer program is executed by a processor to realize the steps of the performance automatic detection method of the array light source metasurface projection device according to the first aspect.

[0020] The embodiments of the present application provide a performance automatic detection method of an array light source metasurface projection device, which comprises the following steps: receiving a preliminary collected array speckle image and calculating an axial offset, sending a translation instruction to a three-axis wafer sample stage according to the axial offset so as to accurately center the array speckle, obtaining an adjusted array speckle centering image and performing mask separation to obtain image dot array information, extracting corresponding speckle feature information, performing contrast analysis on the array speckle centering image, obtaining speckle contrast information, and combining the speckle feature information and the speckle contrast information as a performance comprehensive detection result. The above method realizes accurate centering of the speckle by calculating the axial offset, realizes rapid and accurate calculation of the speckle contrast and rapid extraction of the speckle feature information through contrast analysis and speckle feature extraction, and thus obtains the performance comprehensive detection result for comprehensive performance detection of the metasurface projection device. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed in the embodiment description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0022] Figure 1 The method flowchart of the performance automatic detection method of the array light source metasurface projection device provided by the embodiments of the present application;

[0023] Figure 2 The application scenario schematic diagram of the performance automatic detection method of the array light source metasurface projection device provided by the embodiments of the present application;

[0024] Figure 3A structural schematic diagram of a performance automatic detection device of an array light source metasurface projection device provided by an embodiment of the present application is shown in the figure.

[0025] Figure 4 A structural diagram of a detachable load mold provided by an embodiment of the present application is shown in the figure.

[0026] Figure 5 A structural diagram of a detachable mold provided by an embodiment of the present application is shown in the figure.

[0027] Figure 6 An application effect diagram of a performance automatic detection method of an array light source metasurface projection device provided by an embodiment of the present application is shown in the figure.

[0028] Figure 7 Another application effect diagram of a performance automatic detection method of an array light source metasurface projection device provided by an embodiment of the present application is shown in the figure.

[0029] Figure 8 Still another application effect diagram of a performance automatic detection method of an array light source metasurface projection device provided by an embodiment of the present application is shown in the figure.

[0030] Figure 9 Still another application effect diagram of a performance automatic detection method of an array light source metasurface projection device provided by an embodiment of the present application is shown in the figure.

[0031] Figure 10 A schematic block diagram of a detection terminal provided by an embodiment of the present application is shown in the figure.

[0032] Figure 11 A schematic block diagram of a computer device provided by an embodiment of the present application is shown in the figure. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0034] It should be understood that, when used in the present specification and the appended claims, the terms "comprise" and "include" indicate the presence of the described features, integers, steps, operations, elements, and / or components, but do not exclude one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0035] It should also be understood that the terms used in the present specification are only for the purpose of describing particular embodiments and are not intended to limit the present invention. As used in the present specification and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms unless the context clearly indicates otherwise.

[0036] It should be further understood that the term "and / or" used in the present description and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.

[0037] See also Figure 1 As shown in the figure, the embodiment of the present invention provides a method for automatically detecting the performance of an array light source metasurface projection device. The method is applied to a detection terminal 10 and is executed by an application software installed in the detection terminal 10. Figure 2 As shown, the detection terminal 10 establishes communication connections with the array light source 1, the three-axis wafer sample stage 2 and the visual camera 4 respectively to realize the transmission of data information. The detection terminal 10 can send control instructions to the array light source 1, the three-axis wafer sample stage 2 and the visual camera 4, and the detection terminal 10 can also receive data information collected by each component; Figure 3 As shown, the array light source 1, the three-axis wafer sample stage 2, the imaging light screen 3 and the visual camera 4 are arranged in sequence along the same optical axis. The light source power of the array light source 1 is adjustable, and the array light source 1 can be a VCSEL (Vertical-Cavity Surface-Emitting Laser) array light source; the array light source 1 is used to provide vertical-cavity surface-emitting lasers with adjustable power. The three-axis wafer sample stage 2 is used to place uncut metasurface projection device wafers, and can accurately move the wafer in the X-axis, Y-axis and Z-axis directions. The distance sensor 5 is provided on one side of the array light source 1, and the distance sensor 5 is used to measure the distance information between the wafer and the imaging light screen. The visual camera 4 is used to collect original image raw data (raw format image data), and the light spot of the metasurface projector to be tested is projected onto the imaging light screen 3 to form a speckle imaging. The image formed by the speckle imaging can be collected by the visual camera 4. The detection terminal 10 can be a terminal device with image analysis and data processing functions, such as a laptop computer, desktop computer, tablet computer or mobile phone. As Figure 1 As shown, the method includes steps S110 to S160.

[0038] S110 , receiving an array speckle image obtained by capturing the imaging light screen with the visual camera, and calculating an axial offset corresponding to the array speckle image according to a preset convex hull rectangle detection algorithm.

[0039] The speckle imaging in the imaging light screen can be imaged by a visual camera to obtain an array speckle image (raw format image data), and the visual camera transmits the array speckle image to a detection terminal. Then, the detection terminal can calculate an axial offset corresponding to the array speckle image according to the convex hull rectangle detection algorithm, and the axial offset is also the offset of the center point of the array speckle image and the image center coordinate in the x / y plane.

[0040] In a specific embodiment, step S110 includes the following sub-steps: extracting a speckle dot array profile from the array speckle image; obtaining the rectangular vertex coordinates corresponding to the speckle dot array profile according to the convex hull calculation function in the convex hull rectangle detection algorithm; analyzing the rectangular vertex coordinates according to the analysis function in the convex hull rectangle detection algorithm to obtain the corresponding array speckle center point coordinates; and calculating the geometric deviation between the array speckle center point coordinates and the image center coordinates of the array speckle image as the corresponding axial offset.

[0041] The array speckle image obtained by initial acquisition is processed to extract a speckle dot array profile. The pixel contrast of each pixel point in the array speckle image can be calculated, and the pixel contrast is used to reflect the pixel difference between the pixel point and the surrounding pixel points. The greater the pixel difference, the greater the pixel contrast. The pixel points with greater pixel contrast can be extracted to obtain the speckle dot array profile.

[0042] The pixel point set formed by the pixel points in the speckle dot array profile is calculated by the convex hull calculation function to obtain the rectangular vertex coordinates of the convex hull corresponding to the pixel point set. The convex hull calculation function for calculating the boundary points of the convex hull and determining the vertex coordinates of the rectangle is shown in formula (1):

[0043] (1);

[0044] Wherein, the rectangular vertex coordinates of the convex hull are P1: (x1, y1), P2: (x2, y2), P3: (x3, y3), and P4: (x4, y4).

[0045] The rectangular vertex coordinates are further analyzed by the analysis function to calculate the array speckle center point coordinates. The analysis function can be a calculation function constructed based on Cramer's rule, and can be specifically represented by formula (2):

[0046] (2);

[0047] Wherein, the coordinates of the array speckle center point coordinates P0 can be represented as (x0, y0), and the corresponding relationship between a1, a2, b1, b2, c1 and c2 and the rectangular vertex coordinates can be represented by formula (3):

[0048] (3).

[0049] After obtaining the array speckle center coordinate P0, the geometric deviation between the array speckle center coordinate and the image center coordinate of the array speckle image can be calculated. The image center coordinate is the average value of the four vertex coordinate values ​​of the array speckle image. Figure 6 As shown in the figure, the image center coordinates are the intersection coordinates of the cross lines, where the white bright spot P0 is the array speckle center coordinate, and the axial offset between P0 and the image center coordinates is also the corresponding Figure 6 The direction and length of the diagonal arrow.

[0050] S120 , sending a corresponding translation instruction to the three-axis wafer sample stage according to the axial offset, so as to drive the three-axis wafer sample stage to translate and achieve precise centering of the array speckle.

[0051] The inspection terminal can send corresponding translation commands based on the axis offset. These translation commands are used to correct deviations in the array speckle pattern. These translation commands control the three-axis wafer sample stage translation, which in turn drives the metasurface projector (i.e., the wafer) under test to translate synchronously, moving the center of the beam spot to the image center coordinates for precise alignment of the array speckle pattern.

[0052] S130 , obtaining an array speckle centering image acquired by the visual camera after array speckle centering, and performing mask segmentation on the array speckle centering image according to a preset segmentation algorithm to obtain corresponding image dot matrix information.

[0053] By capturing images again with the visual camera, the array speckle alignment image can be obtained. At this point, the obtained array speckle alignment image can be mask segmented using a segmentation algorithm to obtain image lattice information, which contains information about each speckle.

[0054] In a specific embodiment, step S130 includes the sub-steps of: performing mask segmentation on the array speckle centering image according to the mask configured in the segmentation algorithm; and numbering the speckle dot arrays contained in the segmented speckle blocks to obtain corresponding image dot matrix information.

[0055] The segmentation algorithm is pre-configured with an irregular mask, which can be applied to the array speckle centering image, and the array speckle centering image is segmented by the mask. In the embodiment of the present application, the metasurface projection device is designed with 660 projection points, and the image formed by the mask segmentation is as follows: Figure 7 As shown; through mask segmentation, the dot matrix of each level is accurately divided.

[0056] Furthermore, by segmenting the mask, a number of corresponding speckle blocks can be obtained, and the speckle arrays contained in each speckle block can be numbered, thereby organizing the complex image information in an orderly manner and facilitating the targeted analysis of the characteristics of each array. The image array information obtained by numbering the speckle arrays in each speckle block is as follows: Figure 8 shown.

[0057] S140 , performing speckle feature extraction on the array speckle centering image according to a preset extraction rule and the image dot matrix information to obtain corresponding speckle feature information.

[0058] Furthermore, speckle features are extracted from the array speckle centering image by extracting rules and image lattice information, thereby obtaining speckle feature information that can reflect relevant features of the array speckle centering image.

[0059] In a specific embodiment, step S140 includes the sub-steps of: performing image pixel identification on the array speckle centering image according to the extraction rule to obtain a corresponding speckle image contour and speckle position information; and determining the center pixel coordinates of each speckle according to the image dot matrix information, the speckle position information, and the speckle image contour to obtain the speckle feature information.

[0060] Specifically, pixel recognition can be performed on the array speckle centering image using extraction rules. For example, the pixel contrast of each pixel in the array speckle centering image is calculated, pixels with greater contrast are extracted (e.g., the top 20% of pixels with greater contrast), and closed contours are determined for the extracted pixels, thereby extracting a speckle image contour with a closed circular contour. Furthermore, the pixel coordinates of the topmost, bottommost, leftmost, and rightmost pixels in the speckle image contour are obtained as the corresponding speckle position information.

[0061] Furthermore, the coordinate value of each contour point in the speckle image contour is determined according to the speckle position information, and the average value of the coordinate value of each contour point in the speckle image contour is calculated. The average value of the coordinate value of the contour point is used as the corresponding central pixel coordinate. Then, a central pixel coordinate can be determined corresponding to the speckle image contour of each speckle. A speckle image contour corresponds to a speckle number in the image dot matrix information. The speckle number can be associated with the central pixel coordinate of each speckle, thereby obtaining the speckle feature information corresponding to the central pixel coordinate position with the speckle number.

[0062] In a specific embodiment, after determining the central pixel coordinates of each speckle based on the image dot matrix information, the speckle position information, and the speckle image profile, the method further includes: extracting a spot area image of each speckle from the array speckle centering image based on the central pixel coordinates of each speckle and the speckle image profile; obtaining physical characteristic parameters corresponding to the spot area image of each speckle; and combining the central pixel coordinates of each speckle and the physical characteristic parameters into the speckle feature information.

[0063] After determining the center pixel coordinates of each speckle, the spot area image of each speckle can be extracted from the array speckle centering image according to the center pixel coordinates of the speckle and the speckle image contour. Specifically, the interception center point of the speckle in the array speckle centering image can be determined by the center pixel coordinates of the speckle, and the interception range can be determined by the speckle image contour corresponding to the center pixel coordinates. The array speckle centering image can be partially intercepted using the interception center point and the interception range of each speckle, thereby extracting the local image corresponding to the interception center point and the interception range as the spot area image of the speckle. The obtained single spot area image is as follows: Figure 9 shown.

[0064] The physical characteristic parameters of the spot area image of each speckle are further obtained. The physical characteristic parameters include speckle brightness (calculated by averaging the brightness of each pixel in the spot area image), speckle diameter (the average value of the distance between each contour point in the speckle image contour and the central pixel coordinates of the speckle), and speckle secondary classification (the level of the speckle block to which the speckle belongs in the mask).

[0065] The speckle feature information can be obtained by combining the obtained center pixel coordinates with the speckle number and the physical characteristic parameters.

[0066] S150 , performing contrast analysis on the array speckle centering image according to a preset speckle contrast algorithm and the speckle feature information to obtain corresponding speckle contrast information.

[0067] The array speckle centering image is contrast analyzed by using a speckle contrast algorithm and speckle characteristic information, thereby obtaining speckle contrast information that accurately reflects the speckle contrast characteristics.

[0068] In a specific embodiment, step S150 includes the sub-steps of: determining a corresponding speckle middle row coordinate and a speckle middle column coordinate according to the speckle feature information; performing frequency domain transform processing on corresponding pixels in the array speckle centering image according to the speckle middle row coordinate and the speckle middle column coordinate to obtain corresponding row frequency domain transform data and column frequency domain transform data; performing interpolation processing on the row frequency domain transform data and the column frequency domain transform data according to interpolation parameters in the speckle contrast algorithm to obtain corresponding row spectrum interpolation data and column spectrum interpolation data; performing normalization processing on the row spectrum interpolation data and the column spectrum interpolation data according to a normalization function in the speckle contrast algorithm to obtain corresponding row normalized spectrum intensity data and column normalized spectrum intensity data; counting the number of data points in the row normalized spectrum intensity data and the column normalized spectrum intensity data that are greater than an intensity threshold in the speckle contrast algorithm to obtain corresponding statistical information; and calculating the statistical information according to a contrast calculation formula in the speckle contrast algorithm to obtain corresponding speckle contrast information.

[0069] Specifically, the corresponding speckle middle row coordinates and speckle middle column coordinates can be first determined based on the center pixel coordinates of each speckle in the speckle feature information, and then the corresponding pixels can be obtained from the array speckle centering image based on the speckle middle row coordinates and the speckle middle column coordinates. This step is to obtain the middle row image data and middle column image data of the spot area from the array speckle centering image based on the center pixel coordinates of the speckle. The middle row image data and middle column image data can be recorded as and , where x is the index of the pixel position in the middle row and y is the index of the pixel position in the middle column.

[0070] Further frequency domain transformation processing is performed on the middle row image data corresponding to the middle row coordinate of the speckle and the middle column image data corresponding to the middle column coordinate of the speckle, so as to obtain the row frequency domain transformation data corresponding to the middle row image data. , and the column frequency domain transform data corresponding to the middle column image data .

[0071] According to the interpolation parameters, the row frequency domain transformation data and the column frequency domain transformation data are interpolated respectively. If the interpolation parameter is 1×100, the row frequency domain transformation data Interpolate to a size of 1×100 to obtain the interpolated data As the row spectrum interpolation data, where the same interpolation method is used to transform the column frequency domain data Perform interpolation processing to obtain column spectrum interpolation data .

[0072] The row spectrum interpolation data obtained after the normalization function is interpolated and column spectrum interpolation data Normalization is performed separately, where the normalization function can be expressed using formula (4) and formula (5) as follows:

[0073] (4);

[0074] (5);

[0075] Then we can get the corresponding row spectrum interpolation data The corresponding row-normalized spectral intensity data and interpolated data with column spectrum The corresponding column-normalized spectral intensity data .

[0076] Furthermore, the number of data points in the row-normalized spectrum intensity data and the column-normalized spectrum intensity data that are greater than the intensity threshold in the speckle contrast algorithm can be counted. For example, if the intensity threshold is set to 0.3, the row-normalized spectrum intensity data can be counted. The number of data points exceeding 0.3 is used to obtain the number of row data points. , its statistical process can be expressed by formula (6):

[0077] (6);

[0078] Similarly, the statistical column normalized spectrum intensity data The number of data points exceeding the intensity threshold is obtained to obtain the column data point statistics. , the statistical process can be expressed by formula (7):

[0079] (7);

[0080] The obtained statistical number of row data points and column data points can be used as statistical information. The above statistical information is calculated according to the contrast calculation formula in the speckle contrast algorithm to obtain the corresponding speckle contrast information. Specifically, the contrast calculation formula can be expressed as formula (8):

[0081] (8);

[0082] Among them, Contrast is the speckle contrast information finally calculated.

[0083] In a specific embodiment, performing frequency domain transformation processing on corresponding pixels in the array speckle centering image according to the speckle middle row coordinate and the speckle middle column coordinate to obtain corresponding row frequency domain transformation data and column frequency domain transformation data includes: performing frequency domain transformation on corresponding middle row pixels and middle column pixels in the array speckle centering image according to the speckle middle row coordinate and the speckle middle column coordinate to obtain corresponding row pixel frequency domain transformation information and column pixel frequency domain transformation information; performing frequency domain data processing on the row pixel frequency domain transformation information and the column pixel frequency domain transformation information to obtain corresponding row pixel frequency spectrum intensity map and column pixel frequency spectrum intensity map; and symmetrically flipping the row pixel frequency spectrum intensity map and the column pixel frequency spectrum intensity map about a central axis to obtain corresponding row frequency domain transformation data and column frequency domain transformation data.

[0084] The process of frequency domain transformation includes performing frequency domain transformation on the middle row pixels (i.e., middle row image data) corresponding to the middle row coordinates of the speckle. Perform discrete Fourier transform (DFT) to obtain frequency domain data I row,DET (f) , the calculation formula can be expressed as follows using formula (9):

[0085] (9);

[0086] in, N is the number of pixels in the middle row image data, i is the imaginary unit, I row,DET (f) That is the frequency domain transformation information of the row pixels. The same method can be used to calculate the image data in the middle column Corresponding column pixel frequency domain transformation information I col,DET (f) .

[0087] By performing frequency domain data processing on the obtained row pixel frequency domain transformation information, the corresponding row pixel spectrum intensity map can be obtained. The specific process of frequency domain data processing can be expressed by formula (10) as follows:

[0088] (10);

[0089] Similarly, frequency domain data processing is performed on the frequency domain transformation information of the column pixels to obtain the corresponding column pixel spectrum intensity map. The specific process can be expressed by formula (11) as follows:

[0090] (11).

[0091] After obtaining the row pixel spectrum intensity map and the column pixel spectrum intensity map through the above steps, the symmetric flipping adjustment is performed based on the central axis of the intensity map, and the row frequency domain conversion data corresponding to the row pixel spectrum intensity map and the column frequency domain conversion data corresponding to the column pixel spectrum intensity map are obtained. .

[0092] S160, combine the speckle feature information and the speckle contrast information to obtain a corresponding performance comprehensive detection result.

[0093] Combining the speckle feature information and the speckle contrast information, the performance comprehensive detection result corresponding to the current to-be-tested hyper-surface projector is obtained. Since the speckle feature information contains physical characteristic parameters such as speckle brightness, speckle diameter, and order definition, the performance comprehensive detection result integrating all measured indexes and data is obtained, so as to realize the function of detection index expansion. By integrating all measured indexes and data, a report containing related indexes, light source parameters, and indexes of each order is automatically generated, which provides comprehensive and intuitive basis for in-depth analysis and use of users.

[0094] The performance automatic detection method of the array light source hyper-surface projection device disclosed in the above embodiment includes: receiving a preliminarily collected array speckle image and calculating an axial offset, sending a translation instruction to a three-axis wafer sample stage according to the axial offset to accurately center the array speckle, obtaining an adjusted array speckle centered image and performing mask segmentation to obtain image dot array information, extracting corresponding speckle feature information, and then performing contrast analysis on the array speckle centered image to obtain speckle contrast information, and combining the speckle feature information and the speckle contrast information as a performance comprehensive detection result. The above method, by calculating the axial offset and realizing the accurate centering of the speckle, through contrast analysis and speckle feature extraction, realizes the rapid and accurate calculation of the speckle contrast and the rapid extraction of the speckle feature information, so as to obtain the performance comprehensive detection result for comprehensive performance detection of the hyper-surface projection device.

[0095] ​An embodiment of the present invention also provides an automatic performance detection device for an array light source metasurface projection device, which includes a detection terminal 10, an array light source 1, a three-axis wafer sample stage 2, an imaging light screen 3 and a visual camera 4. The detection terminal 10 establishes communication connections with the array light source 1, the three-axis wafer sample stage 2, the visual camera 4 and the ranging sensor 5 respectively to realize the transmission of data information. The array light source 1, the three-axis wafer sample stage 2, the imaging light screen 3 and the visual camera 4 are arranged in sequence along the same optical axis; the array light source 1 adjusts the light source power according to the adjustment instruction from the detection terminal 10; the metasurface projector to be tested is fixed on the three-axis wafer sample stage 2, and the three-axis wafer sample stage 2 drives the metasurface projector to be tested to move horizontally and vertically; the ranging sensor 5 is provided on one side of the array light source 1. The detection terminal 10 is used to execute any embodiment of the aforementioned automatic performance detection method for array light source metasurface projection devices. Specifically, please refer to Figure 2 and Figure 3 , Figure 2 Schematic diagram of an application scenario of the automatic performance detection method of the array light source metasurface projection device provided by an embodiment of the present invention, Figure 3 Schematic diagram of the structure of the automatic performance detection device of the array light source metasurface projection device provided in an embodiment of the present invention.

[0096] The adjustable VCSEL array light source 1 primarily generates vertical cavity surface emitting laser (VCSEL) array light, which, through a metasurface projection device, projects a large number of speckled light onto the imaging screen 3. The array light source 1 is used to provide a specific power of vertical cavity surface emitting laser array light. The power of this light source is controllable within a range of 0-5000 μW, with adjustable intervals of 10 μW. It can be automatically adjusted based on a set value to accommodate different sample testing requirements. The operating power range of the array light source 1 can be automatically adjusted based on the speckle pattern at the center of the screen, or it can be preset. The three-axis wafer sample stage 2 is used to hold uncut metasurface projection device wafers and can precisely move the wafer in the X, Y, and Z axes. A distance sensor 5 is provided on one side of the array light source 1 to measure the distance between the wafer and the imaging screen. A visual camera 4 is used to capture raw image data (raw format image data). The speckle pattern formed by the light spot projected by the metasurface projector (i.e., the wafer) under test is projected onto the imaging screen 3, and the visual camera 4 captures the image formed by the speckle pattern.

[0097] The visual camera can use a 20-megapixel high-definition area array CCD industrial camera with high sensitivity and resolution to provide rich and clear image details, ensure the quality of the speckle image data on the captured light screen, and provide accurate information for image processing and analysis in subsequent algorithm modules.

[0098] like Figure 10 As shown, the detection terminal 10 is specifically configured with the following units: an axial offset acquisition unit 110, configured to receive the array speckle image obtained by the visual camera performing image acquisition on the imaging light screen, and calculate the axial offset corresponding to the array speckle image according to a preset convex hull rectangle detection algorithm; a translation instruction sending unit 120, configured to send a corresponding translation instruction to the three-axis wafer sample stage according to the axial offset, so as to drive the three-axis wafer sample stage to translate and realize accurate centering of the array speckle; an image segmentation unit 130, configured to obtain the array speckle centering image obtained by the visual camera after the array speckle is centered, and calculate the axial offset corresponding to the array speckle image according to a preset convex hull rectangle detection algorithm; The array speckle centering image is subjected to a mask segmentation method to obtain corresponding image lattice information; a speckle feature information acquisition unit 140 is configured to perform speckle feature extraction on the array speckle centering image according to a preset extraction rule and the image lattice information to obtain corresponding speckle feature information; a contrast analysis unit 150 is configured to perform contrast analysis on the array speckle centering image according to a preset speckle contrast algorithm and the speckle feature information to obtain corresponding speckle contrast information; and a performance comprehensive test result acquisition unit 160 is configured to combine the speckle feature information with the speckle contrast information to obtain a corresponding performance comprehensive test result.

[0099] In a more specific embodiment, Figure 4 The three-axis wafer sample stage 2 is provided with a detachable loading mold 6; the detachable loading mold 6 includes a wafer stage 61 and a square groove 62 provided in the wafer stage 61; the square groove 62 is fixed with a detachable mold 63 adapted to different wafer sizes. Figure 5 As shown, Figure 5 (a) in the middle corresponds to 12-inch wafers. Figure 5 (b) in the middle corresponds to 8-inch wafers. Figure 5 Middle (c) corresponds to 6-inch wafers.

[0100] The three-axis wafer sample stage 2 is used for precise placement and movement of wafers. The square recess 62 has dimensions of 500mm x 500mm, which allows for the placement of a 500mm x 500mm removable mold 63. The removable mold 63 has slots for 12-, 8-, and 6-inch wafers. The removable mold 63, in conjunction with the wafer stage 61, enables precise three-dimensional displacement of the wafer, ensuring accurate alignment of the metasurface projection device on the wafer and providing accurate physical positioning for subsequent testing.

[0101] The automatic performance testing device for an array light source metasurface projection device provided in an embodiment of the present invention utilizes the aforementioned automatic performance testing method for an array light source metasurface projection device. The device receives a preliminarily acquired array speckle image and calculates an axial offset. Based on the axial offset, a translation command is sent to a three-axis wafer sample stage to precisely center the array speckle pattern. The adjusted array speckle centering image is acquired and mask segmentation is performed to obtain image dot information. After extracting the corresponding speckle feature information, contrast analysis is performed on the array speckle centering image to obtain speckle contrast information. The speckle feature information and the speckle contrast information are combined as a comprehensive performance test result. The aforementioned method, by calculating the axial offset and achieving precise speckle centering, and through contrast analysis and speckle feature extraction, achieves rapid and accurate calculation of speckle contrast and rapid extraction of speckle feature information, thereby obtaining a comprehensive performance test result for the comprehensive performance test of the metasurface projection device.

[0102] Compared with existing technologies, the present invention offers the following advantages: 1. It provides a method and apparatus for automatically testing the performance of array-source metasurface projection devices. The system achieves end-to-end integration and automation, including the coordinated operation of hardware components and the smooth integration of software algorithms, ensuring efficient operation of the entire testing process and enabling efficient, rapid, and accurate wafer-level performance testing of array-source metasurface projection devices. 2. It designs and optimizes an adjustable VCSEL array light source to control the primary generation of vertical-cavity surface-emitting laser array light, ensuring the stability of the light source and providing consistent and reliable array light source output. 3. It proposes an array speckle convex hull rectangle detection and centering algorithm to quickly and accurately guide the stage for fully automated array speckle centering. 4. It proposes a speckle mask segmentation algorithm that primarily performs mask segmentation on the centered image, accurately segmenting speckle patterns at each level. 5. It proposes a contrast algorithm that combines frequency domain analysis with statistical calculations to accurately and rapidly evaluate speckle contrast. 6. It designs a removable mold suitable for wafer-level testing to ensure the system's scalability and flexibility, enabling it to accommodate wafers of varying specifications.

[0103] The above-mentioned automatic performance detection method of the array light source metasurface projection device can be implemented in the form of a computer program. The computer program can be used in Figure 11 Runs on the computer device shown.

[0104] See also Figure 11 , Figure 11 is a schematic block diagram of a computer device provided by an embodiment of the present invention. The computer device may be a detection terminal for executing the automatic performance detection method of the array light source metasurface projection device to automatically detect the performance of the metasurface projection device.

[0105] See Figure 11The computer device 500 includes a processor 502, a memory, and a communication interface 505 connected through a communication bus 501, wherein the memory can include a storage medium 503 and an internal memory 504.

[0106] The storage medium 503 can store an operating system 5031 and a computer program 5032. The computer program 5032, when executed, can enable the processor 502 to perform the performance automatic detection method of the array light source metasurface projection device, wherein the storage medium 503 can be a volatile storage medium or a non-volatile storage medium.

[0107] The processor 502 is configured to provide computing and control capabilities to support the operation of the entire computer device 500.

[0108] The internal memory 504 provides an environment for the execution of the computer program 5032 in the storage medium 503, and the computer program 5032, when executed by the processor 502, can enable the processor 502 to perform the performance automatic detection method of the array light source metasurface projection device.

[0109] The communication interface 505 is configured to perform network communication, such as providing transmission of data information, etc. Figure 11 The structure shown in FIG. 5 is only a block diagram of part of the structure related to the scheme of the present application, and does not constitute a limitation on the computer device 500 to which the scheme of the present application is applied. Specifically, the computer device 500 can include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0110] The processor 502 is configured to run the computer program 5032 stored in the memory to implement the corresponding functions in the performance automatic detection method of the array light source metasurface projection device described above.

[0111] Those skilled in the art can understand that Figure 11 The embodiments of the computer device shown in FIG. 5 do not constitute a limitation on the specific structure of the computer device. In other embodiments, the computer device can include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components. For example, in some embodiments, the computer device can only include a memory and a processor, and in such embodiments, the structure and functions of the memory and the processor are consistent with those of the memory 504 and the processor 502 shown in the embodiment of FIG. 5, and will not be described here. Figure 11

[0112] ​It should be understood that, in the embodiments of the present application, the processor 502 can be a central processing unit (CPU), and can also be other general-purpose processors, digital signal processors (DSPs), application specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or any conventional processor.

[0113] In another embodiment of the present application, a computer readable storage medium is provided. The computer readable storage medium can be a volatile or non-volatile computer readable storage medium. The computer readable storage medium stores a computer program, wherein the computer program is executed by a processor to implement the steps included in the method for automatically detecting the performance of the array light source metasurface projection device.

[0114] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described devices, apparatuses and units can refer to the corresponding processes in the foregoing method embodiments, which will not be described here. Those of ordinary skill in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be realized in electronic hardware, computer software or a combination of both. In order to clearly illustrate the interchangeability of hardware and software, the components and steps of each example have been described in the foregoing description in a general manner. Whether the functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. The skilled person can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0115] In several embodiments provided by the present application, it should be understood that the disclosed devices, apparatuses and methods can be implemented in other ways. For example, the above-described device embodiments are merely schematic, for example, the division of the units is merely logical function division, and actual implementation can have another division manner, or units with the same function can be combined into one unit, for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the coupling or direct coupling or communication connection between the units shown or discussed can be indirect coupling or communication connection through some interfaces, devices or units, and can also be electrical, mechanical or other form of connection.

[0116] The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected according to actual needs to achieve the objectives of the embodiments of the present invention.

[0117] In addition, the functional units in the various embodiments of the present invention may be integrated into a single processing unit, each unit may exist physically separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or software functional units.

[0118] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, or the portion that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a computer-readable storage medium and includes several instructions for causing a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned computer-readable storage medium includes various media that can store program code, such as a USB flash drive, a mobile hard drive, a read-only memory (ROM), a magnetic disk, or an optical disk.

[0119] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and such modifications or substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. A method for automatically detecting the performance of an array light source metasurface projection device, characterized in that: The automatic performance detection method is applied to a detection terminal, wherein the detection terminal establishes communication connections with an array light source, a three-axis wafer sample stage, and a visual camera respectively to realize data information transmission. The array light source, the three-axis wafer sample stage, the imaging light screen, and the visual camera are sequentially arranged along the same optical axis. The method includes: receiving an array speckle image obtained by acquiring an image of the imaging light screen by the visual camera, and calculating an axial offset corresponding to the array speckle image according to a preset convex hull rectangle detection algorithm; Sending a corresponding translation instruction to the three-axis wafer sample stage according to the axial offset to drive the three-axis wafer sample stage to translate and achieve precise centering of the array speckle; Acquiring an array speckle centering image acquired by the visual camera after array speckle centering, and performing mask segmentation on the array speckle centering image according to a preset segmentation algorithm to obtain corresponding image dot matrix information; performing speckle feature extraction on the array speckle centering image according to preset extraction rules and the image dot matrix information to obtain corresponding speckle feature information; performing a contrast analysis on the array speckle centering image according to a preset speckle contrast algorithm and the speckle feature information to obtain corresponding speckle contrast information; The speckle feature information is combined with the speckle contrast information to obtain a corresponding comprehensive performance test result.

2. The automatic performance detection method of the array light source metasurface projection device according to claim 1 is characterized in that: The calculating the axial offset corresponding to the array speckle image according to a preset convex hull rectangle detection algorithm includes: Extracting a speckle array profile from the array speckle image; Obtaining the coordinates of the rectangle vertices corresponding to the speckle array outline according to the convex hull calculation function in the convex hull rectangle detection algorithm; Analyzing the coordinates of the rectangle vertices according to the analytical function in the convex hull rectangle detection algorithm to obtain the corresponding coordinates of the array speckle center point; The geometric deviation between the coordinates of the center point of the array speckle pattern and the image center coordinates of the array speckle image is calculated as the corresponding axial offset.

3. The automatic performance detection method of the array light source metasurface projection device according to claim 1 is characterized in that: The performing mask segmentation on the array speckle centering image according to a preset segmentation algorithm to obtain corresponding image dot matrix information includes: Performing mask segmentation on the array speckle centering image according to the mask configured in the segmentation algorithm; The speckle arrays contained in the segmented speckle blocks are numbered to obtain the corresponding image dot matrix information.

4. The automatic performance detection method of the array light source metasurface projection device according to claim 1 is characterized in that: The extracting speckle features from the array speckle centering image according to the preset extraction rules and the image dot matrix information to obtain corresponding speckle feature information includes: performing image pixel recognition on the array speckle centering image according to the extraction rule to obtain corresponding speckle image contour and speckle position information; The central pixel coordinates of each speckle are determined according to the image dot matrix information, the speckle position information and the speckle image contour to obtain the speckle feature information.

5. The automatic performance detection method of the array light source metasurface projection device according to claim 4 is characterized in that: After determining the central pixel coordinates of each speckle according to the image dot matrix information, the speckle position information and the speckle image contour, the method further includes: extracting a spot area image of each speckle from the array speckle centering image according to the central pixel coordinates of each speckle and the speckle image contour; Obtaining physical characteristic parameters corresponding to the spot area image of each speckle; The central pixel coordinates of each speckle and the physical characteristic parameters are combined into the speckle feature information.

6. The automatic performance detection method of the array light source metasurface projection device according to claim 1 is characterized in that: The performing contrast analysis on the array speckle centering image according to a preset speckle contrast algorithm and the speckle feature information to obtain corresponding speckle contrast information includes: Determining corresponding speckle middle row coordinates and speckle middle column coordinates according to the speckle characteristic information; Performing frequency domain transformation processing on corresponding pixels in the array speckle centering image according to the speckle middle row coordinate and the speckle middle column coordinate to obtain corresponding row frequency domain transformation data and column frequency domain transformation data; performing interpolation processing on the row frequency domain transformed data and the column frequency domain transformed data respectively according to the interpolation parameters in the speckle contrast algorithm to obtain corresponding row spectrum interpolation data and column spectrum interpolation data; Normalizing the row spectrum interpolation data and the column spectrum interpolation data according to a normalization function in the speckle contrast algorithm to obtain corresponding row normalized spectrum intensity data and column normalized spectrum intensity data; Counting the number of data points in the row-normalized spectrum intensity data and the column-normalized spectrum intensity data that are greater than an intensity threshold in the speckle contrast algorithm to obtain corresponding statistical information; The statistical information is calculated according to a contrast calculation formula in the speckle contrast algorithm to obtain corresponding speckle contrast information.

7. The automatic performance detection method of the array light source metasurface projection device according to claim 6 is characterized in that: The performing frequency domain transformation processing on corresponding pixels in the array speckle centering image according to the speckle middle row coordinate and the speckle middle column coordinate to obtain corresponding row frequency domain transformation data and the column frequency domain transformation data includes: Performing frequency domain transformation on corresponding middle row pixels and middle column pixels in the array speckle centering image according to the middle row coordinates of the speckle pattern and the middle column coordinates of the speckle pattern, respectively, to obtain corresponding row pixel frequency domain transformation information and column pixel frequency domain transformation information; Performing frequency domain data processing on the row pixel frequency domain transformation information and the column pixel frequency domain transformation information respectively to obtain corresponding row pixel spectrum intensity maps and column pixel spectrum intensity maps; The row pixel spectrum intensity map and the column pixel spectrum intensity map are symmetrically flipped with the central axis as a reference to obtain corresponding row frequency domain transformation data and column frequency domain transformation data.

8. An automatic performance detection device for an array light source metasurface projection device, characterized in that: The automatic performance detection device includes a detection terminal, an array light source, a three-axis wafer sample stage, an imaging light screen and a visual camera. The detection terminal establishes communication connections with the array light source, the three-axis wafer sample stage, the visual camera and the ranging sensor to realize data information transmission. The array light source, the three-axis wafer sample stage, the imaging light screen and the visual camera are arranged in sequence along the same optical axis. The array light source adjusts the light source power according to the adjustment instruction from the detection terminal; The metasurface projector to be tested is fixedly placed on the three-axis wafer sample stage, and the three-axis wafer sample stage drives the metasurface projector to be tested to move horizontally and vertically; the ranging sensor is provided on one side of the array light source; The detection terminal is used to execute the automatic performance detection method of the array light source metasurface projection device as described in any one of claims 1-7.

9. The automatic performance detection device for the array light source metasurface projection device according to claim 8, characterized in that: The device further includes a unit configured in the detection terminal: an axial offset acquisition unit, configured to receive an array speckle image obtained by the visual camera acquiring an image of the imaging light screen, and calculate an axial offset corresponding to the array speckle image according to a preset convex hull rectangle detection algorithm; a translation instruction sending unit, configured to send a corresponding translation instruction to the three-axis wafer sample stage according to the axial offset, so as to drive the three-axis wafer sample stage to translate and realize precise centering of the array speckle; an image segmentation unit, configured to obtain an array speckle centering image acquired by the visual camera after array speckle centering, and perform mask segmentation on the array speckle centering image according to a preset segmentation algorithm to obtain corresponding image dot matrix information; a speckle feature information acquisition unit, configured to extract speckle features from the array speckle centering image according to a preset extraction rule and the image dot matrix information, so as to obtain corresponding speckle feature information; a contrast analysis unit, configured to perform contrast analysis on the array speckle centering image according to a preset speckle contrast algorithm and the speckle feature information to obtain corresponding speckle contrast information; The performance comprehensive test result acquisition unit is configured to combine the speckle feature information with the speckle contrast information to obtain a corresponding performance comprehensive test result.

10. The automatic performance detection device for the array light source metasurface projection device according to claim 8 or 9, characterized in that: The three-axis wafer sample stage is provided with a detachable loading mold; The detachable carrier mold includes a wafer carrier and a square groove arranged in the wafer carrier; the detachable mold adapted to different wafer sizes is fixedly assembled in the square groove.

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