Impeller, device and method for broken pump test of magnetic suspension molecular pump

Abstract

The invention discloses an impeller, a device and a method for a broken pump test of a magnetic suspension molecular pump. The impeller for the broken pump test of the magnetic suspension molecular pump comprises an impeller main body, a plurality of impeller blades, a plurality of impeller blades, a plurality of impeller blades and a plurality of impeller blades, and the temperature response deformation component is arranged in the cavity structure, and the shape of the temperature response deformation component is matched with that of the cavity structure. Wherein the temperature response deformation component is configured to generate mechanical displacement through expansion or phase change at a preset temperature so as to apply a surface load to the cavity structure. According to the impeller for the broken pump test of the magnetic suspension molecular pump, the triggering condition and the failure mechanism of the broken impeller can be more accurately reproduced, so that the safety design and the risk prevention and control capability of the magnetic suspension molecular pump are improved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the technical field of magnetic levitation molecular pump testing, and more specifically, to an impeller, device, and method for testing a magnetic levitation molecular pump. Background Art

[0002] As a key device for achieving ultra-high vacuum, magnetic levitation molecular pumps play an irreplaceable role in semiconductor manufacturing, scientific research, surface analysis, and other fields. Their core component, the impeller (typically made of aluminum alloy), must maintain stable operation at high speeds. However, in extreme cases such as material defects, abnormal vibration, foreign object impact, or bearing failure, the impeller can break (a "shattered pump"), causing catastrophic damage to the vacuum system and related equipment, and even leading to production interruptions, equipment damage, and safety hazards. Therefore, it is crucial to assess the hazard of breakage through broken pump testing and design protective measures and emergency response plans.

[0003] Existing methods for testing the fragmentation of magnetically levitated molecular pumps rely primarily on mechanical shock and thermal stress simulation to induce impeller failure. However, these methods suffer from significant drawbacks: they are difficult to precisely control the timing of fragmentation (especially near normal operating temperatures) and struggle to simulate spontaneous failure modes triggered by internal stresses. This limitation leads to deviations between test results and actual operating conditions, making it impossible to accurately reflect the dynamics of impeller fragmentation and the trajectory of fragments during actual operation. This, in turn, impacts the reliability assessment of protective structures and the effectiveness of emergency response plans. Summary of the Invention

[0004] In order to solve one or more of the technical problems mentioned above, the present invention provides an impeller, device and method for testing the crushing of a magnetic levitation molecular pump, so as to more accurately reproduce the triggering conditions and failure mechanism of the impeller crushing, thereby improving the safety design and risk prevention and control capabilities of the magnetic levitation molecular pump.

[0005] According to a first aspect of the present invention, an impeller for testing a magnetic levitation molecular pump is provided. The impeller comprises an impeller body having a blade assembly disposed thereon and a plurality of cavity structures formed therein; and a temperature-responsive deformation component disposed within the cavity structure, the shape of the temperature-responsive deformation component being adapted to the shape of the cavity structure. The temperature-responsive deformation component is configured to generate mechanical displacement through expansion or phase change at a preset temperature, thereby applying a surface load to the cavity structure.

[0006] In some embodiments, the cavity structure is configured as a groove or a cavity, and adjacent walls in the groove or the cavity form a plurality of angles, wherein the plurality of angles include at least one acute angle or a right angle.

[0007] In some embodiments, the temperature-responsive shape-changing component is configured as an expandable structure or a shape memory structure.

[0008] In some embodiments, the temperature-responsive deformation component is an expansion structure, and the thermal expansion coefficient of the material of the expansion structure is greater than the thermal expansion coefficient of the impeller body.

[0009] In some embodiments, the material of the impeller body is aluminum alloy, and the material of the expansion structure is one of manganese-copper alloy, iron-nickel-chromium based high expansion alloy and pure zinc.

[0010] In some embodiments, the temperature-responsive deformation component is a shape memory structure, which includes a metastable shape and a stable shape. The metastable shape is adapted to the shape of the cavity structure, and the stable shape is obtained by phase change of the metastable shape under temperature induction.

[0011] In some embodiments, the material of the shape memory structure is Nitinol alloy.

[0012] According to a second aspect of the present invention, a magnetic levitation molecular pump pump test device is provided. The magnetic levitation molecular pump pump test device comprises: a molecular pump body, which is disposed on a fixed base and has a drive shaft on the molecular pump body; the impeller, which is fixed to the drive shaft; and a heating device, which is disposed outside the molecular pump body and is used to heat the temperature of the test environment to a preset temperature.

[0013] According to a third aspect of the present invention, a method for testing a magnetic levitation molecular pump is provided. The method, used in the magnetic levitation molecular pump testing device, comprises: securing the molecular pump body to a fixed foundation; attaching an impeller to the drive shaft of the molecular pump body; activating the magnetic levitation molecular pump; and gradually raising the temperature of the impeller to a preset temperature during operation using a heating device.

[0014] In some embodiments, the method further includes: modeling and simulating the impeller body, cavity structure, and temperature-responsive deformable components through finite element analysis, including: calculating the relative expansion and stress generated by different material combinations under target temperature differences; optimizing the geometry, size, and position of the cavity structure; verifying that the material and size of the temperature-responsive deformable components can generate stress that causes the impeller body to fracture; and predicting the temperature window in which fracture occurs.

[0015] When the impeller provided above is used in a magnetic levitation molecular pump fragmentation test experiment, on the one hand, by selecting an expansion structure or a shape memory structure, it is ensured that sufficient internal force can be generated and the fracture force is strong, thereby ensuring that the impeller body is fractured. On the other hand, the internal stress is generated by the differential thermal expansion or controllable phase change of the temperature-responsive deformation component to cause fracture, and the mechanism is clear, which is convenient for analysis and repeated testing. Further, in some embodiments, by selecting an expansion structure or a shape memory structure, it is ensured that sufficient internal force can be generated and the fracture force is strong, thereby ensuring that the impeller body is fractured. On the other hand, the internal stress is generated by the differential thermal expansion or controllable phase change of the temperature-responsive deformation component to cause fracture, and the mechanism is clear, which is convenient for analysis and repeated testing. Furthermore, by adjusting the material, size, characteristics of the shape memory structure, and the geometric shape and position of the groove / cavity of the impeller body, the precise temperature at which the fracture occurs and the possible fracture mode can be adjusted, making the design more flexible. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and other objects, features and advantages of the exemplary embodiments of the present invention will become readily understood by reading the following detailed description with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present invention are shown in an illustrative and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0017] Figure 1 This is a schematic structural diagram of an impeller for testing a magnetic levitation molecular pump according to an embodiment of the present invention;

[0018] Figure 2 for Figure 1 The structure diagram of the impeller body of the impeller according to the embodiment of the present invention is shown;

[0019] Figure 3 for Figure 1 The schematic structural diagram of the temperature-responsive deformation component of the impeller according to the embodiment of the present invention is shown;

[0020] Figure 4 Schematic diagram of the flow of a magnetic levitation molecular pump crushing pump testing method according to an embodiment of the present invention. DETAILED DESCRIPTION

[0021] The following will be combined with the accompanying drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the embodiments described are part of the embodiments of the present disclosure, not all of them. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0022] According to a first aspect of the present invention, an impeller 100 for testing a magnetic levitation molecular pump is provided. Figures 1 to 3 FIG. 1 shows the structure of the impeller 100 according to an embodiment of the present invention. Figures 1 to 3 As shown, the impeller 100 includes an impeller body 1 having a blade assembly 11 disposed thereon and a plurality of cavity structures 12 formed therein; and a temperature-responsive deformable component 2 disposed within the cavity structure 12. The shape of the temperature-responsive deformable component 2 is adapted to the shape of the cavity structure 12. The temperature-responsive deformable component 2 is configured to generate mechanical displacement through expansion or phase change at a predetermined temperature, thereby applying a surface load to the cavity structure 12.

[0023] According to an embodiment of the present invention, an impeller 100 for testing a magnetic levitation molecular pump is provided. Several cavity structures 12 are formed on the impeller body 1. In the present application, the cavity structure 12 can be formed on the hub, reinforcement ribs, or other structures on the impeller body 1, such as some structurally weak areas. A temperature-responsive deformable component 2 is installed in the cavity structure 12. The shape of the temperature-responsive deformable component 2 in the present application is adapted to the shape of the cavity structure 12. When in use, the impeller 100 according to the embodiment of the present invention is installed on the molecular pump to be tested. During the test of the simulated operation of the magnetic levitation molecular pump, the operating temperature range of the impeller body 1 is approximately 250-300°C, which is consistent with the temperature range of the impeller 100 during actual operation of the magnetic levitation molecular pump. At this temperature (i.e., the preset temperature), the temperature-responsive deformable component 2 changes its structural shape due to the influence of temperature. The mechanical displacement generated by this deformation process makes it impossible for the temperature-responsive deformable component 2 to continue to adapt to the cavity structure 12, thereby exerting a certain force on the cavity structure 12. The enormous internal pressure or force generated above creates extremely high tensile or shear stresses in stress concentration areas (such as sharp corners, thin walls, and pre-existing crack tips) within the cavity structure 12 of the impeller body 1. When this stress exceeds the fracture strength of the material of the impeller body 1 at that temperature, cracks will begin to form in the impeller body 1 at that location and rapidly expand, eventually leading to structural damage and fragmentation of the impeller body 1, resulting in a broken pump.

[0024] Through the above-mentioned setting, when the impeller 100 according to the embodiment of the present invention is applied to the magnetic levitation molecular pump fragmentation test experiment, on the one hand, it can cause the impeller body 1 to fragment at a specific preset temperature point close to the actual operating temperature of the molecular pump, thereby being able to more realistically simulate a specific failure scenario with high controllability; on the other hand, it is helpful to conduct in-depth research on the fragmentation process, fragment morphology, scattering energy and path of the impeller body 1, and provide key experimental data and verification means for the safety protection design of the molecular pump and its system.

[0025] It should be supplemented that the impeller body 1 mentioned in this application can be understood to be consistent with the shape and structure of the impeller 100 actually used.

[0026] In some embodiments, the cavity structure 12 may be configured as a groove or a cavity, wherein adjacent walls in the groove or the cavity form a plurality of angles, wherein the plurality of angles include at least one acute angle or a right angle.

[0027] In this embodiment, the groove can be understood as being formed by connecting the side walls and the bottom wall. The cavity can be understood as being formed by connecting several side walls. The stress concentration of the groove or cavity mainly occurs in: 1) the edge of the groove or cavity: due to the sudden change in the geometric shape at the edge, the stress will be concentrated in these areas. 2) the bottom of the groove or cavity: the curvature of the bottom changes greatly, which will also cause stress concentration. 3) the corner of the groove or cavity: if the groove or cavity has corners, the stress concentration in these areas will also be more serious. In the present application, by forming at least one acute angle or right angle between the adjacent walls in the groove or cavity, the stress concentration at this location is made more obvious. In this way, after reaching the preset temperature, the right angle or acute angle in the cavity structure 12 becomes the starting point of the crack and the guide of the expansion path, and the force exerted by the temperature-responsive deformation component 2 on the wall of the cavity structure 12 makes it easier for the impeller body 1 to undergo plastic deformation or rupture.

[0028] In some preferred embodiments, the cross-sectional geometry of the cavity structure 12 may be, for example, V-shaped, U-shaped, a rectangle with sharp corners, a shape with a prefabricated microcrack tip, etc., so as to maximize the provision of stress concentration areas, promote the fragmentation of the impeller body 1 to the greatest extent, and improve the timeliness of the fragmentation of the impeller body 1.

[0029] In some embodiments, the temperature-responsive deformation component 2 is constructed as an expansion structure or a shape memory structure.

[0030] In this application, the expansion structure can be understood as a volume that can expand or contract due to temperature changes. During the test process of the operation or simulated operation of the magnetic levitation molecular pump, when the temperature of the impeller body 1 reaches the preset target temperature (such as 250°C), the strength of the impeller body 1 drops significantly, and the tensile strength can drop from 540MPa to below 300MPa. At this time, the expansion structure expands due to the increase in temperature, and the expanded expansion structure can generate a sufficiently large expansion force or phase change force to overcome the material strength of the impeller body 1 and induce stress concentration in the preset cavity structure 12, which can cause the impeller body 1 to undergo plastic deformation or rupture.

[0031] In this application, a shape memory structure can be understood as being able to recover to a preset shape due to a temperature-induced phase change. During the operation or simulated operation of the magnetic levitation molecular pump, when the temperature of the impeller body 1 approaches the target temperature (e.g., 250°C-300°C), that is, the temperature range is set as the phase change activation temperature of the shape memory structure, the shape memory structure undergoes a phase change, generating a huge restoring force acting on the preset cavity structure 12 of the impeller body 1, which can cause the impeller body 1 to undergo plastic deformation or rupture.

[0032] In other embodiments, the temperature-responsive deformation component 2 may also be other structural components that can undergo elastic deformation due to thermal stress.

[0033] With the above configuration, when used in a magnetic levitation molecular pump fragmentation test, the impeller 100 of the present embodiment, through the use of an expandable or shape memory structure, ensures sufficient internal force and a strong fracture-inducing force, thereby ensuring that the impeller body 1 fractures. Furthermore, the mechanism of fracture is clear, as the internal stress generated by the differential thermal expansion or controlled phase change of the temperature-responsive deformable component 2 leads to fracture, facilitating analysis and repeated testing.

[0034] In some embodiments, the temperature-responsive deformation component 2 is an expansion structure, and the thermal expansion coefficient of the material of the expansion structure is greater than the thermal expansion coefficient of the impeller body 1, so as to increase the expansion deformation speed of the expansion structure and at the same time provide a certain force on the impeller body 1.

[0035] In some embodiments, the impeller body 1 is made of aluminum alloy, and the expansion structure is made of one of manganese-copper alloy, iron-nickel-chromium-based high expansion alloy, and pure zinc.

[0036] In this embodiment, the aluminum alloy material of the impeller body 1 is consistent with or similar to the material of the actual molecular pump impeller 100, usually a high-strength 7075-T6, 6061-T6 series aluminum alloy, etc., and its linear thermal expansion coefficient α is about 23.2x10 -6 In this application, the material of the expansion structure can be selected from: high expansion alloys, such as certain manganese copper alloys, iron nickel chromium based high expansion alloys, etc., whose α can reach (30-60) x10 -6 / ℃ or even higher; or, for certain metals, such as pure zinc, its α is about (29-31)x10 -6 / °C. Furthermore, other materials that can generate sufficient expansion force and have other compatible properties can also be used as materials for the expansion structure. Preferably, the expansion structure is made of an alloy with a larger difference in expansion coefficient. Such metal expansion structures not only have a large expansion coefficient but also a high elastic modulus. This allows them to generate significant stress when thermally expanded, thereby exerting pressure on the impeller body 1.

[0037] In some embodiments, the temperature-responsive deformation component 2 is a shape memory structure, which includes a metastable shape and a stable shape. The metastable shape is adapted to the shape of the cavity structure 12, and the stable shape is obtained by phase change of the metastable shape under temperature induction.

[0038] In this embodiment, the shape memory structure is pre-treated and is in a metastable shape at room temperature. This metastable shape can be understood as the shape memory structure being compressed or deformed at room temperature. Its phase transition temperature (e.g., the austenite end transformation temperature) is designed to be near the impeller body 1's rupture temperature (e.g., 300°C). When the impeller body 1 reaches this temperature, the shape memory structure undergoes a martensite to austenite phase transition, attempting to restore its preset original steady-state shape (shape memory effect). During this process, the compressed shape memory structure becomes larger to generate very large recovery stress (up to hundreds of MPa to GPa level) and strain to act on the impeller body 1.

[0039] Preferably, the shape memory structure can be pre-processed to: apply thrust to the wall of the cavity structure 12 by compression to expansion; or apply tension to the wall of the cavity structure 12 by deformation; or directly break the impeller body 1 by compression to shape recovery.

[0040] In some embodiments, the material of the shape memory structure is Nitinol alloy.

[0041] In combination with the above, when the impeller 100 according to an embodiment of the present invention is used in a magnetic levitation molecular pump fragmentation test experiment, the precise temperature at which fragmentation occurs and the possible fragmentation mode can be adjusted by adjusting the material, size, characteristics of the shape memory structure, and the geometry and position of the groove / cavity of the impeller body 1, making the design more flexible.

[0042] According to a second aspect of the present invention, a magnetic levitation molecular pump pump test device is provided. The magnetic levitation molecular pump pump test device includes: a molecular pump body, which is disposed on a fixed foundation and has a drive shaft on the molecular pump body; the impeller 100, which is fixed to the drive shaft; and a heating device, which is disposed outside the molecular pump body and is used to heat the temperature of the test environment to a preset temperature.

[0043] In this application, by providing a heating device, the test environment of the magnetic levitation molecular pump test device can be quickly brought to a preset temperature, i.e., the operating temperature of the impeller. During the test of the simulated operation of the magnetic levitation molecular pump, the temperature range of the impeller body 1 is controlled to be approximately 250-300°C, which is consistent with the temperature range of the impeller 100 during the actual operation of the magnetic levitation molecular pump.

[0044] According to a third aspect of the present invention, a method 200 for testing a magnetic levitation molecular pump is provided. Figure 4 A flow chart of a magnetic levitation molecular pump broken pump testing method 200 according to an embodiment of the present invention is shown, which is used for the above-mentioned magnetic levitation molecular pump broken pump testing device, including: S1, fixing the molecular pump body on a fixed basis; S2, installing the impeller 100 to the driving shaft of the molecular pump body; S3, starting the magnetic levitation molecular pump; S4, gradually raising the temperature of the impeller 100 to a preset temperature during operation through a heating device.

[0045] In some embodiments, the method further includes: modeling and simulating the impeller body 1, the cavity structure 12, and the temperature-responsive deformable component 2 through finite element analysis, including: calculating the relative expansion amount and stress generated by different material combinations under the target temperature difference; optimizing the geometric shape, size, and position of the cavity structure 12; verifying that the material and size of the temperature-responsive deformable component 2 can generate stress that causes the impeller body 1 to fracture; and predicting the temperature window in which fracture occurs.

[0046] In combination with the above, we now provide specific implementation cases:

[0047] The first specific embodiment: please refer to Figures 1 to 3 The temperature-responsive deformation component 2 is made of a high-expansion metal alloy. Specifically, the impeller body 1 is made of 7075-T6 aluminum alloy, with a thermal expansion coefficient of α≈23.5x10 -6 / ℃. An annular groove 121 is machined on the inner side of the hub of the impeller body 1, and a radially extending V-shaped notch 122 is provided on the sidewall of the groove to enhance the stress concentration effect. The temperature-responsive deformation component 2 is an expansion structure, which uses a special manganese-copper high expansion alloy. Assuming its thermal expansion coefficient α = 30x10 -6 / °C, elastic modulus E_alloy = 100 GPa. The expansion structure is constructed as a circular ring 21 that mates with an annular groove 121. The outer wall of the ring 21 may be provided with a V-shaped protrusion 22 that mates with a V-shaped notch 122. During assembly at room temperature (25°C), the ring 21 is inserted by cold-fitting with liquid nitrogen, resulting in minimal clearance or a slight interference fit between the ring 21 and the annular groove 121.

[0048] The target (impeller body 1) fracture temperature is set to 300°C (ΔT = 275°C). The relative linear expansion difference between the temperature-responsive deformable component 2 and the impeller body 1 is Δα = (30-23.5) x 10 -6 / ℃=6.5x10 -6 / ℃. Thermal strain in the restrained state ε_th=Δα*ΔT=6.5x10 -6 *275=1.787x10 -3The nominal stress generated by the expansion alloy is: σ_alloy≈E_alloy*ε_th=100GPa*1.787x10 -3 =178.7 MPa. This stress acts on the inner wall of cavity structure 12 and, through the stress concentration effect of V-notch 122 (assuming a stress concentration factor K_t = 3-5), causes the actual stress at the tip of V-notch 122 to reach 178.7 MPa*K_t ≈ 536.1-893.5 MPa. The tensile strength of 7075-T6 aluminum alloy at 250°C is approximately 300 MPa (specific values ​​can be found in the material manual, taking into account the effects of temperature). Finite element analysis, through precise design of the cavity structure 12 geometry and the ring 21 dimensions, ensures that the fracture strength of the aluminum alloy is achieved and exceeded at this temperature.

[0049] In a second specific embodiment, the temperature-responsive deformable component 2 utilizes a shape-memory alloy. The structure of the impeller body 1 is the same as above. A cavity structure 12 is designed at a specific location within the impeller body 1, such as at the spoke root or in a weak area of ​​the disc. The temperature-responsive deformable component 2 is a shape-memory structure made of Nitinol alloy. This shape-memory structure undergoes pretreatment, such as memorizing a larger size at high temperature, then compressing it to a smaller size in a low-temperature martensitic state and inserting it into the cavity structure 12. Its austenite transformation temperature, Af, is designed to be 85°C. When the impeller 100 temperature reaches 85°C, the shape-memory structure undergoes a phase transformation, attempting to restore its memorized larger size, thereby generating a significant push-out force against the inner wall of the cavity structure 12. Finite element analysis is used to calculate and design the shape-memory structure's dimensions, pre-compression, and cavity structural strength to ensure that the restoring force generated by the shape-memory structure is sufficient to cause fracture of the impeller body 1 in the stress concentration area surrounding the cavity.

[0050] Before the above embodiments are put into actual pump crushing tests, they must all undergo rigorous finite element analysis and simulation verification, and may also require bench heating tests of prototype parts to calibrate the crushing temperature and verify the accuracy of the design parameters.

[0051] In the above description of this application, unless otherwise expressly specified or limited, terms such as "fixed," "mounted," "connected," or "connected" should be understood in a broad sense. For example, with respect to the term "connected," it can mean a fixed connection, a detachable connection, or an integral connection; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean internal communication between two elements or an interaction between two elements. Therefore, unless otherwise expressly specified in this application, those skilled in the art can understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0052] According to the above description of the present application, those skilled in the art may also understand that the terms used below, such as "up", "down", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise", etc., which indicate orientation or positional relationships, are based on the orientation or positional relationships shown in the drawings of the present application, and are only for the purpose of facilitating the explanation of the scheme of the present invention and simplifying the description, rather than explicitly or implicitly indicating that the devices or elements involved must have the specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of the present invention.

[0053] In addition, the terms "first" or "second" used in this application to refer to numbers or ordinal numbers are used for descriptive purposes only and should not be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0054] Although a number of embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may devise numerous modifications, variations, and alternatives without departing from the concept and spirit of the present invention. It should be understood that in practicing the present invention, various alternatives to the embodiments of the present invention described herein may be employed. The appended claims are intended to define the scope of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. An impeller for testing a magnetic levitation molecular pump, characterized in that: include: An impeller body, on which a blade assembly is provided, and a plurality of cavity structures are formed on the impeller body; a temperature-responsive deformation component disposed in the cavity structure, wherein the shape of the temperature-responsive deformation component is adapted to the shape of the cavity structure; The temperature-responsive deformation component is constructed to generate mechanical displacement through expansion or phase change at a preset temperature to apply a surface load to the cavity structure.

2. The impeller according to claim 1, characterized in that The cavity structure is constructed as a groove or a cavity, and adjacent walls in the groove or cavity form a plurality of angles, and the plurality of angles include at least one acute angle or a right angle.

3. The impeller according to claim 1, characterized in that The temperature-responsive deformation component is constructed as an expansion structure or a shape memory structure.

4. The impeller according to claim 3, characterized in that The temperature-responsive deformation component is the expansion structure, and the thermal expansion coefficient of the material of the expansion structure is greater than the thermal expansion coefficient of the impeller body.

5. The impeller according to claim 4, characterized in that The material of the impeller body is aluminum alloy, and the material of the expansion structure is one of manganese-copper alloy, iron-nickel-chromium based high expansion alloy and pure zinc.

6. The impeller according to claim 3, characterized in that The temperature-responsive deformation component is the shape memory structure, which includes a metastable shape and a stable shape. The metastable shape is adapted to the shape of the cavity structure, and the stable shape is obtained by phase change of the metastable shape under temperature induction.

7. The impeller according to claim 6, characterized in that The material of the shape memory structure is Nitinol alloy.

8. A magnetic levitation molecular pump crushing pump testing device, characterized in that: include: A molecular pump body is arranged on a fixed foundation, and a driving shaft is provided on the molecular pump body; The impeller according to any one of claims 1 to 7, wherein the impeller is fixed to the drive shaft; and A heating device is arranged on the outside of the molecular pump body, and is used to heat the temperature of the test environment to a preset temperature.

9. A magnetic levitation molecular pump crushing pump testing method, used for the magnetic levitation molecular pump crushing pump testing device according to claim 8, characterized in that: include: Fixing the molecular pump body on a fixed base; Install the impeller on the driving shaft of the molecular pump body; Start the magnetic levitation molecular pump; The heating device gradually raises the temperature of the impeller during operation to a preset temperature.

10. The magnetic levitation molecular pump crushing pump testing method according to claim 9, characterized in that: Also includes: The impeller body, the cavity structure, and the temperature-responsive deformation component are modeled and simulated through finite element analysis, including: Calculate the relative expansion and stress generated by different material combinations under target temperature differences; Optimizing the geometry, size, and position of the cavity structure; Verify that the material and size of the temperature-responsive deformation component can generate stress that causes the impeller body to break; The temperature window in which fragmentation occurs is predicted.

Images