Gas cell for spectral parameter measurement and method of mounting and measuring thereof

Abstract

This invention relates to a gas absorption cell for spectral parameter measurement, its installation method, and measurement method, belonging to the field of spectral parameter measurement technology. The gas absorption cell includes a gas absorption chamber and light transmission chambers symmetrically arranged on both sides of the absorption chamber. The light transmission chamber includes a containment chamber and a vacuum chamber, with the vacuum chamber located close to the gas absorption chamber. The gas absorption chamber and the vacuum chamber are separated by a third or fourth window, and the vacuum chamber and the containment chamber are separated by a spacer. The containment chamber houses the transmitting or receiving unit of the absorption spectrometer. The gas absorption chamber is filled with the target gas for spectral parameter measurement. The invention employs a five-segment structure consisting of the gas absorption chamber and the containment and vacuum chambers distributed on both sides of it, eliminating the need for a light guide device, resulting in a simple structure and convenient operation.

Description

Technical Field

[0001] This invention belongs to the field of spectral parameter measurement technology, and specifically relates to a gas absorption cell for spectral parameter measurement and its installation and measurement methods. Background Technology

[0002] Tunable semiconductor laser absorption spectroscopy has become one of the main methods for measuring gas composition and concentration. The accuracy of spectral parameters is one of the main factors affecting measurement accuracy. Therefore, before measurement, the parameters need to be accurately measured, and the absorption spectrometer needs to be calibrated to improve measurement accuracy. A tube furnace structure is adopted to build a constant temperature standard environment platform. By measuring the spectral parameters of the target gas under different temperatures and pressures, the absorption spectrometer is calibrated. As the core device of the tube furnace, the gas absorption cell has been studied both domestically and internationally. Existing gas absorption cells that can be used for spectral measurement all adopt a structure with a built-in light guide device inside the furnace tube. However, (1) the structure of the gas absorption cell is complex and inconvenient to install. At the same time, the introduction of the light guide device has the problem of gas leakage; (2) the gas absorption interference problem at the transmitting and receiving ends is not considered.

[0003] Therefore, there is an urgent need to propose a gas absorption cell for measuring spectral parameters. Summary of the Invention

[0004] To address the aforementioned problems, this invention provides a gas absorption cell for spectral parameter measurement, along with its installation and measurement methods. The gas absorption cell for spectral parameter measurement lacks a light guide device, resulting in a simple structure that is easy to install and operate. Its five-segment structure, with an integrated transmitter and receiver unit, eliminates gas absorption interference at both ends, improving the accuracy of spectral parameter measurement. The multi-stage heat insulation and cooling structure, employing a vacuum chamber, water-cooling ring, and filters, ensures the normal operation of the transmitter and receiver units, unaffected by high temperatures.

[0005] The first objective of this invention is to provide a gas absorption cell for measuring spectral parameters, comprising a gas absorption chamber and light transmission chambers symmetrically arranged on both sides of the absorption chamber;

[0006] The light transmission chamber includes a receiving chamber and a vacuum chamber, and the vacuum chamber is located close to the gas absorption chamber;

[0007] The gas absorption chamber and the vacuum chamber are separated by a third or fourth window, and the vacuum chamber and the accommodating chamber are separated by a spacer.

[0008] The accommodating chamber is used to house the transmitting or receiving unit of the absorption spectrometer;

[0009] The gas absorption chamber is used to fill the target gas for spectral parameter measurement.

[0010] In a specific embodiment of the present invention, the spacer is a window and a filter fused together, and the filter side of the spacer is located in the vacuum chamber.

[0011] In a specific embodiment of the present invention, it is composed of three connected pipe sections and an outer sleeve over the three connected pipe sections.

[0012] The three pipe sections include a first pipe, an intermediate pipe, and a second pipe;

[0013] One end of the intermediate pipe passes through the third window panel, and the other end passes through the fourth window panel;

[0014] One end of the first pipe passes through the spacer and extends through the third window, with the position where the first pipe passes through the third window opposite to the position where the middle pipe passes through the third window;

[0015] One end of the second pipe passes through the spacer and extends through the fourth window, the position where the second pipe passes through the fourth window is opposite to the position where the middle pipe passes through the fourth window;

[0016] The first pipe, the intermediate pipe, and the second pipe are all glass pipes.

[0017] In a specific embodiment of the present invention, the intermediate pipe passes through the third window piece, the intermediate pipe passes through the fourth window piece, the first pipe passes through the third window piece, the second pipe passes through the fourth window piece, the first pipe passes through the spacer, and the second pipe passes through the spacer, all of which are fused together.

[0018] The first pipe is provided with an external connecting window at its end away from the intermediate pipe, and the second pipe is also provided with an external connecting window at its end away from the intermediate pipe;

[0019] The external connecting window is fused with conductive electrode posts.

[0020] In a specific embodiment of the present invention, an adjustment frame is provided in the accommodating cavity, and the adjustment frame is disposed at the bottom of the transmitting unit or the receiving unit;

[0021] The accommodating chamber has an air inlet and an air outlet on its tube wall.

[0022] In a specific embodiment of the present invention, a cold water ring is provided on the outer periphery of the tube wall of the accommodating chamber.

[0023] In a specific embodiment of the present invention, the tube wall of the vacuum chamber is provided with channels.

[0024] In a specific embodiment of the present invention, a resistance wire is arranged on the outer periphery of the gas absorption chamber.

[0025] A second objective of this invention is to provide an installation method for a gas absorption cell for measuring spectral parameters, comprising:

[0026] The window and the filter are fused together to form a spacer;

[0027] One end of the first pipe is passed sequentially through the spacer and the third window, and fused together at the penetration point;

[0028] One end of the second pipe is passed sequentially through the spacer and the fourth window, and fused together at the penetration point;

[0029] One end of the intermediate pipe passes through the third window and the other end passes through the fourth window, and they are fused together at the penetration point. The position where the first pipe passes through the third window is opposite to the position where the intermediate pipe passes through the third window, and the position where the second pipe passes through the fourth window is opposite to the position where the intermediate pipe passes through the fourth window.

[0030] The connected first pipe, intermediate pipe and second pipe are fitted into the outer sleeve, and the spacer, third window, fourth window and the position in contact with the outer sleeve are connected by external fusion connection.

[0031] The transmitting unit is installed inside the opening of the first or second pipe;

[0032] A receiving unit is installed inside the opening of the second pipe or the first pipe;

[0033] An external connecting window with a pole post is fused to the top of the first pipe opening, and an external connecting window with a pole post is fused to the top of the second pipe opening. At the position where the external connecting window contacts the outer sleeve, an external fusion connection is used to complete the installation of the gas absorption tank.

[0034] A third objective of this invention is to provide a method for measuring the spectral parameters of a gas absorption cell, comprising:

[0035] The accommodating chamber is evacuated, then purged with nitrogen, and then evacuated again.

[0036] The vacuum chamber is evacuated;

[0037] The gas absorption chamber is purged with nitrogen, then evacuated, and then filled with the target gas.

[0038] The gas absorption chamber is heated to a preset temperature;

[0039] Connect the transmitter and receiver to perform spectral parameter measurements of the target gas.

[0040] The beneficial effects of this invention are:

[0041] The gas absorption cell for spectral parameter measurement of the present invention, as well as its installation method and measurement method, adopts a five-segment structure consisting of a gas absorption chamber and accommodating chambers and vacuum chambers distributed on both sides of the gas absorption chamber. On the one hand, it eliminates the need for a light guide device, making the structure simple and easy to operate.

[0042] On the other hand, a vacuum chamber is provided between the gas absorption chamber and the accommodating chamber to prevent the high temperature of the gas absorption chamber from being transferred to the molten accommodating chamber via thermal convection. Furthermore, a spacer formed by a window and a filter fused together is provided between the accommodating chamber and the vacuum chamber. This spacer prevents the high temperature of the gas absorption chamber from being transferred to the molten accommodating chamber via radiation while the laser is being measured. Furthermore, a water-cooling ring is provided on the outer wall of the accommodating chamber to prevent the high temperature of the gas absorption chamber from being transferred to the molten accommodating chamber via thermal conduction. The water-cooling ring, the filter, and the vacuum chamber form a thermal insulation mechanism against thermal conduction, thermal radiation, and thermal convection, ensuring the normal operation of the transmitting and receiving units within the accommodating chamber, unaffected by high temperatures, and improving the accuracy of the spectral parameter measurement of the target gas.

[0043] The integrated structure of the transmitting and receiving units within the accommodating chamber eliminates the absorption interference of stray gases present in the transmitting and receiving units, which is beneficial to improving the accuracy of spectral parameter measurement. At the same time, the spacing between the accommodating chamber and the vacuum chamber significantly reduces nitrogen consumption compared to an open nitrogen purging device, saving operating costs.

[0044] The windows, pipes, and quartz tubes are all made of quartz glass, which facilitates connection by fusion bonding, making the installation process simple and the gas absorption pool has excellent airtightness.

[0045] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures pointed out in the description, claims and drawings. Attached Figure Description

[0046] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0047] Figure 1 A schematic diagram of one of the structures of a gas absorption cell for measuring spectral parameters according to an embodiment of the present invention is shown;

[0048] Figure 2 A schematic diagram of one of the structures of a gas absorption cell for measuring spectral parameters according to an embodiment of the present invention is shown;

[0049] Figure 3 A cross-sectional view of a gas absorption cell for measuring spectral parameters according to an embodiment of the present invention is shown;

[0050] In the diagram: 100, outer tube; 110, gas absorption chamber; 120, vacuum chamber; 130, accommodating chamber; 131, cold water ring; 10, second pipe; 11, first pipe; 12, first window; 13, first conductive electrode post; 14, transmitting unit; 15, first adjustment frame; 16, second window; 17, first filter; 18, intermediate pipe; 19, third window; 20, fourth window; 21, second filter; 22, fifth window; 23, second adjustment frame; 24, sixth window; 25, second conductive electrode post; 26, receiving unit. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0052] like Figure 1 As shown, a gas absorption cell for measuring spectral parameters according to certain embodiments of the present invention includes a gas absorption chamber 110 and light transmission chambers symmetrically arranged on both sides of the absorption chamber.

[0053] The light transmission chamber includes a receiving chamber 130 and a vacuum chamber 120, and the vacuum chamber 120 is close to the gas absorption chamber 110;

[0054] The gas absorption chamber 110 and the vacuum chamber 120 are separated by a third window 19 or a fourth window 20, and the vacuum chamber 120 and the accommodating chamber 130 are separated by a spacer.

[0055] The accommodating chamber 130 is used to house the transmitting unit 14 or the receiving unit 26 of the absorption spectrometer;

[0056] The gas absorption chamber 110 is used to fill the target gas for spectral parameter measurement;

[0057] The light emitted by the emitting unit 14 of the absorption spectrometer in the accommodating chamber 130 on one side passes through the vacuum chamber 120 and is transmitted to the gas absorption chamber 110, where it is absorbed by the target gas. The absorbed light is then transmitted to the vacuum chamber 120 on the other side and received by the receiving unit 26 in the accommodating chamber 130 on the other side.

[0058] In some embodiments of the present invention, the spacer is a window and a filter fused together, and the filter side of the spacer is located in the vacuum chamber 120. The spacer formed by the fused window and the filter serves two purposes: firstly, it facilitates light transmission, and secondly, it reduces the high-temperature thermal radiation of the gas absorption chamber 110. Furthermore, in the five-segment cavity structure of the gas absorption chamber 110 and the accommodating chambers 130 and the vacuum chamber 120 distributed on both sides of the gas absorption chamber 110, a multi-level heat insulation device for the filter and the vacuum chamber 120 is formed to ensure that the transmitting unit 14 and the receiving unit 26 operate normally and are not affected by high temperatures.

[0059] In some embodiments of the present invention, the gas absorption tank is composed of three connected pipe sections and an outer sleeve 100 fused together with the three pipe sections;

[0060] The three pipe sections include a first pipe 11, a middle pipe 18, and a second pipe 10. One end of the middle pipe 18 passes through the third window 19, and the other end passes through the fourth window 20.

[0061] One end of the first pipe 11 passes through the spacer and extends through the third window 19. The position where the first pipe 11 passes through the third window 19 is opposite to the position where the intermediate pipe 18 passes through the third window 19.

[0062] One end of the second pipe 10 passes through the spacer and extends through the fourth window 20. The position where the second pipe 10 passes through the fourth window 20 is opposite to the position where the middle pipe 18 passes through the fourth window 20.

[0063] Furthermore, the first pipe 11, the outer sleeve 100 and the spacer form a receiving chamber 130 with one end open, and the second pipe 10, the outer sleeve 100 and the spacer form another receiving chamber 130 with one end open.

[0064] The first pipe 11, the third window 19, the outer tube 100 and the spacer form a sealed vacuum chamber 120, and the second pipe 10, the fourth window 20, the outer tube 100 and the spacer form another sealed vacuum chamber 120.

[0065] The intermediate pipe 18, the third window 19, the fourth window 20, and the outer casing 100 constitute a sealed gas absorption chamber 110, as detailed in [link to details]. Figure 3 .

[0066] In some embodiments of the present invention, such as Figure 3 As shown, both the first pipe 11 and the second pipe 10 are bends, including a bend and a straight section, with the straight section located inside the outer casing 100.

[0067] In some embodiments of the present invention, both the first pipe 11 and the second pipe 10 are straight pipes.

[0068] In some embodiments of the present invention, the first pipe 11, the intermediate pipe 18 and the second pipe 10 are all glass pipes;

[0069] The intermediate pipe 18 passes through the third window 19, the intermediate pipe 18 passes through the fourth window 20, the first pipe 11 passes through the third window 19, the second pipe 10 passes through the fourth window 20, the first pipe 11 passes through the spacer, and the second pipe 10 passes through the spacer, all of which are fused together to seal the gas absorption chamber 110, the accommodating chamber 130, and the vacuum chamber 120;

[0070] It is understood that the design of the three-section pipe facilitates the formation of the above-mentioned gas absorption chamber 110, as well as the five-section cavity structure of the accommodating chamber 130 and the vacuum chamber 120 distributed on both sides of the gas absorption chamber 110. At the same time, the window and the pipe are both made of quartz glass. The window and the pipe are connected by glass melting. After completion, the window, the filter and the quartz tube are externally melted, which facilitates the processing of the gas absorption pool.

[0071] In some embodiments of the present invention, the end of the first pipe 11 away from the intermediate pipe 18 is provided with an external connecting window, and the end of the second pipe 10 away from the intermediate pipe 18 is also provided with an external connecting window. The provision of the above two external connecting windows facilitates the sealing of the accommodating chamber 130.

[0072] The external connecting window is fused with a conductive electrode post;

[0073] The placement of the conductive electrode posts facilitates the connection of the transmitting unit 14 or receiving unit 26, which is placed in the accommodating chamber 130, to an external power source.

[0074] In some embodiments of the present invention, the connection between the external connecting window and the first pipe 11 is as follows: the first pipe 11 passes through the external connecting window and is fused together at the penetration point;

[0075] The connection between the external connecting window and the second pipe 10 is as follows: the second pipe 10 passes through the external connecting window and is fused together at the point of penetration.

[0076] Meanwhile, the contact point between the outer sleeve 100 and the outer connecting window is also fused together to ensure the sealing of the accommodating chamber 130.

[0077] In some embodiments of the present invention, an adjustment frame is provided in the accommodating chamber 130. The adjustment frame is located at the bottom of the transmitting unit 14 or the receiving unit 26 and is used to adjust the optical alignment of the transmitting unit 14 or the receiving unit 26.

[0078] In some embodiments of the present invention, the adjustment frame is exemplified as an electrically operated adjustment frame.

[0079] In some embodiments of the present invention, the accommodating chamber 130 is provided with an air inlet and an air outlet on its tube wall;

[0080] The design of the air inlet and outlet facilitates connection to a vacuum pump, making it easier to evacuate the accommodating chamber 130 and further eliminate the absorption interference of stray gases present in the accommodating chamber 130.

[0081] Meanwhile, the design of the air inlet and outlet facilitates the connection of the accommodating chamber 130 to a high-purity nitrogen cylinder for nitrogen purging, thereby eliminating the absorption interference of stray gases present in the accommodating chamber 130.

[0082] In some embodiments of the present invention, a cold water ring 131 is provided on the outer periphery of the tube wall of the accommodating chamber 130, and the cold water ring 131 is close to the spacer.

[0083] The cold water ring 131 is provided with an inlet and an outlet for circulating water cooling and cooling the wall of the outer casing 100.

[0084] In some embodiments of the present invention, the wall of the vacuum chamber 120 is provided with a channel, which is used to connect a vacuum pump to facilitate the formation of a vacuum environment in the vacuum chamber 120 and to form a vacuum transmission path for light.

[0085] In some embodiments of the present invention, when the first pipe 11 or the second pipe 10 is connected to a vacuum pump, it is convenient to eliminate the absorption interference of stray gases present in the gas absorption chamber 110.

[0086] In some embodiments of the present invention, the first pipe 11 or the second pipe 10 is connected to a target gas generating device, so as to facilitate the filling of the target gas into the gas absorption chamber 110 and realize the measurement of the spectral parameters of the target gas.

[0087] In some embodiments of the present invention, a resistance wire is arranged on the outer periphery of the gas absorption chamber 110. The arrangement of the resistance wire facilitates heating of the gas absorption chamber 110, forming a uniform temperature zone within the gas absorption chamber 110. Combined with a standard gas generator, the target gas is injected, laying the foundation for accurate measurement of spectral parameters.

[0088] like Figure 1 As shown, in some embodiments of the present invention, the receiving chamber 130 includes a first receiving chamber and a second receiving chamber;

[0089] The first accommodating chamber is formed by a first conduit 11, a spacer formed by a second window 16 and a first filter 17 fused together, and a first window 12 (i.e., an external connecting window). The first window 12 is fused to one end of the first conduit 11, and the second window 16 and the first filter 17 are fused to the other end of the first conduit 11.

[0090] The second accommodating chamber is formed by the second conduit 10, a spacer formed by the fifth window 22 and the second filter 21 fused together, and a sixth window 24 (i.e., an external connecting window). The sixth window 24 is fused to one end of the second conduit 10, and the fifth window 22 and the second filter 21 are fused to the other end of the second conduit 10.

[0091] like Figure 1 As shown, in some embodiments of the present invention, the vacuum chamber 120 includes a first vacuum chamber and a second vacuum chamber;

[0092] The first vacuum chamber is formed by an outer tube 100, a spacer formed by a second window 16 and a first filter 17, and a third window 19.

[0093] The second vacuum chamber is formed by an outer tube 100, a spacer formed by a fifth window 22 and a second filter 21, and a fourth window 20.

[0094] In some embodiments of the present invention, the conductive electrode post includes a first conductive electrode post 13 and a second conductive electrode post 25;

[0095] The first conductive electrode post 13 is a conductive electrode post placed in the accommodating chamber 130 of the transmitting unit 14;

[0096] The second conductive electrode post 25 is a conductive electrode post placed in the accommodating chamber 130 of the receiving unit 26.

[0097] In some embodiments of the present invention, the adjustment frame includes a first adjustment frame 15 and a second adjustment frame 23;

[0098] The first adjustment frame 15 is an adjustment frame placed inside the accommodating chamber 130 of the transmitting unit 14;

[0099] The second adjustment frame 23 is an adjustment frame placed inside the receiving unit 26 accommodating chamber 130.

[0100] like Figure 2 As shown, in some embodiments of the present invention, the gas absorption chamber 110 is formed by being surrounded by an intermediate pipe 18, an outer sleeve 100, a third window 19, and a fourth window 20.

[0101] In some embodiments of the present invention, the first window 12, the second window 16, the third window 19, the fourth window 20, the fifth window 22, and the sixth window 24 are all wedge-shaped, which can avoid interference in the optical path.

[0102] An installation method for a gas absorption cell for measuring spectral parameters according to certain embodiments of the present invention includes:

[0103] The window and the filter are fused together to form a spacer;

[0104] One end of the first pipe 11 is passed sequentially through the spacer and the third window 19, and fused together at the penetration point;

[0105] One end of the second pipe 10 is passed sequentially through the spacer and the fourth window 20, and fused together at the penetration point;

[0106] One end of the intermediate pipe 18 passes through the third window 19, and the other end passes through the fourth window 20. They are fused together at the penetration point, ensuring that the position of the first pipe 11 passing through the third window 19 is opposite to the position of the intermediate pipe 18 passing through the third window 19, and the position of the second pipe 10 passing through the fourth window 20 is opposite to the position of the intermediate pipe 18 passing through the fourth window 20.

[0107] The first pipe 11, the intermediate pipe 18 and the second pipe 10 are fitted into the outer sleeve 100, and the spacer, the third window 19, the fourth window 20 and the position in contact with the outer sleeve 100 are connected by external fusion connection.

[0108] The transmitting unit 14 is installed inside the opening of the first pipe 11 or the second pipe 10;

[0109] A receiving unit 26 is installed inside the opening of the second pipe 10 or the first pipe 11;

[0110] An external connecting window with a conductive electrode post is fused to the top of the opening of the first pipe 11, and an external connecting window with a conductive electrode post is fused to the top of the opening of the second pipe 10. At the position where the external connecting window contacts the outer sleeve 100, an external fusion connection is used to complete the installation of the gas absorption pool.

[0111] In some embodiments of the present invention, before the window with the conductive electrode post is fused together, the transmitting unit 14 and the receiving unit 26 are respectively welded to the conductive electrode post in the external connecting window with the conductive electrode post via leads;

[0112] For example, the conductive electrode posts in the external connecting window with conductive electrode posts are the first conductive electrode post 13 and the second conductive electrode post 25, respectively.

[0113] In some embodiments of the present invention, the adjustment frame is an electric adjustment frame, and the adjustment frame is welded to the conductive electrode post via lead wires.

[0114] A method for measuring the spectral parameters of a gas absorption cell according to a spectral parameter measurement method includes:

[0115] The accommodating chamber 130 is evacuated and then purged with nitrogen. After purging with nitrogen, the accommodating chamber 130 is evacuated again.

[0116] The vacuum chamber 120 is evacuated;

[0117] The gas absorption chamber 110 is cleaned with nitrogen, then evacuated, and then filled with the target gas.

[0118] The gas absorption chamber 110 is heated to a preset temperature;

[0119] The electrical connection between the transmitting unit 14 and the receiving unit 26 is opened to measure the spectral parameters of the target gas.

[0120] In some embodiments of the present invention, the cooling water circulation in the cold water ring 131 is turned on before the spectral parameters of the target gas are measured.

[0121] In some embodiments of the present invention, the spectral parameter measurement method includes:

[0122] Close the vent of the accommodating chamber 130, and fill the accommodating chamber 130 with high-purity nitrogen through the vent of the first accommodating chamber. Close the vent of the accommodating chamber 130 again, and after stabilizing for a period of time, open the vent of the accommodating chamber 130 again to perform vacuuming. Use nitrogen to wash the gas twice to eliminate the adsorbed gas in the accommodating chamber 130 and the absorption interference of stray gas.

[0123] By utilizing the channels on the vacuum chamber 120, the vacuum chamber 120 is evacuated to create a vacuum environment, thereby eliminating the gas adsorbed in the vacuum chamber 120 and the absorption interference of stray gas.

[0124] High-purity nitrogen is introduced into the gas absorption chamber 110 through the first pipe 11 or the second pipe 10. The gas source connection of the first pipe 11 or the second pipe 10 is closed. After stabilizing for a period of time, the vacuum pump connected to the first pipe 11 or the second pipe 10 is turned on to perform vacuuming. The gas is washed twice with nitrogen to eliminate the absorption interference of adsorbed gas or stray gas in the gas absorption chamber 110.

[0125] Close the outlet of the gas absorption chamber 110, and fill the gas absorption chamber 110 with the inlet of the gas absorption chamber 110. Use the target gas to wash twice to stabilize the gas concentration of the target gas.

[0126] Turn on the water cooling ring, then turn on the heating resistance wire to heat the gas absorption chamber 110 to the target temperature;

[0127] Turn on the transmitting unit 14 and receiving unit 26 of the absorption spectrometer, align the optical path using the adjustment frame, and finally measure the spectral parameters of the target gas.

[0128] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A gas absorption cell for measuring spectral parameters, characterized in that, Includes a gas absorption chamber (110) and light transmission chambers symmetrically arranged on both sides of the absorption chamber; The light transmission chamber includes a receiving chamber (130) and a vacuum chamber (120), and the vacuum chamber (120) is close to the gas absorption chamber (110). The gas absorption chamber (110) and the vacuum chamber (120) are separated by a third window (19) or a fourth window (20), and the vacuum chamber (120) and the accommodating chamber (130) are separated by a spacer. The accommodating chamber (130) is used to house the transmitting unit (14) or receiving unit (26) of the absorption spectrometer. The gas absorption chamber (110) is used to fill the target gas for spectral parameter measurement.

2. The gas absorption cell for measuring spectral parameters according to claim 1, characterized in that, The spacer is a window and a filter fused together, and the filter side of the spacer is located in the vacuum chamber (120).

3. The gas absorption cell for measuring spectral parameters according to claim 1, characterized in that, It consists of three connected pipe sections and an outer sleeve (100) for the three connected pipe sections; The three pipe sections include a first pipe (11), an intermediate pipe (18), and a second pipe (10); One end of the intermediate pipe (18) passes through the third window (19), and the other end passes through the fourth window (20). One end of the first pipe (11) passes through the spacer and extends through the third window (19). The position where the first pipe (11) passes through the third window (19) is opposite to the position where the middle pipe (18) passes through the third window (19). One end of the second pipe (10) passes through the spacer and extends through the fourth window (20). The position where the second pipe (10) passes through the fourth window (20) is opposite to the position where the middle pipe (18) passes through the fourth window (20). The first pipe (11), the intermediate pipe (18), and the second pipe (10) are all glass pipes.

4. The gas absorption cell for measuring spectral parameters according to claim 3, characterized in that, The intermediate pipe (18) passes through the third window (19), the intermediate pipe (18) passes through the fourth window (20), the first pipe (11) passes through the third window (19), the second pipe (10) passes through the fourth window (20), the first pipe (11) passes through the spacer, and the second pipe (10) passes through the spacer, all of which are fused together. The first pipe (11) is provided with an external connecting window at the end away from the intermediate pipe (18), and the second pipe (10) is also provided with an external connecting window at the end away from the intermediate pipe (18); The external connecting window is fused with conductive electrode posts.

5. The gas absorption cell for measuring spectral parameters according to claim 1, characterized in that, An adjustment frame is provided inside the accommodating chamber (130), and the adjustment frame is located at the bottom of the transmitting unit (14) or the receiving unit (26); The accommodating chamber (130) has an air inlet and an air outlet on its tube wall.

6. The gas absorption cell for measuring spectral parameters according to claim 1, characterized in that, The outer periphery of the tube wall of the accommodating chamber (130) is provided with a cold water ring (131).

7. The gas absorption cell for measuring spectral parameters according to claim 1, characterized in that, The vacuum chamber (120) has a channel on its tube wall.

8. A gas absorption cell for measuring spectral parameters according to any one of claims 1-7, characterized in that, Resistance wires are arranged on the outer periphery of the gas absorption chamber (110).

9. The method for installing a gas absorption cell for measuring spectral parameters according to any one of claims 1-8, characterized in that, include: The window and the filter are fused together to form a spacer; One end of the first pipe (11) is passed through the spacer and the third window (19) in sequence and fused together at the penetration point; One end of the second pipe (10) is passed through the spacer and the fourth window (20) in sequence and fused together at the penetration point; One end of the intermediate pipe (18) passes through the third window (19), and the other end passes through the fourth window (20), and they are fused together at the penetration point. It is ensured that the position of the first pipe (11) passing through the third window (19) is opposite to the position of the intermediate pipe (18) passing through the third window (19), and the position of the second pipe (10) passing through the fourth window (20) is opposite to the position of the intermediate pipe (18) passing through the fourth window (20). The first pipe (11), the middle pipe (18) and the second pipe (10) are fitted into the outer sleeve (100), and the spacer, the third window (19), the fourth window (20) and the position in contact with the outer sleeve (100) are connected by external fusion connection. The transmitting unit (14) is installed inside the opening of the first pipe (11) or the second pipe (10). A receiving unit (26) is installed inside the opening of the second pipe (10) or the first pipe (11). An external connecting window with a pole is fused to the top of the opening of the first pipe (11), and an external connecting window with a pole is fused to the top of the opening of the second pipe (10). At the position where the external connecting window contacts the outer sleeve (100), the connection is made by external fusion connection to complete the installation of the gas absorption pool.

10. A method for measuring the spectral parameters of a gas absorption cell based on any one of claims 1-8, characterized in that, include: The accommodating chamber (130) is evacuated and then purged with nitrogen. After purging with nitrogen, the accommodating chamber (130) is evacuated again. The vacuum chamber (120) is evacuated; The gas absorption chamber (110) is cleaned with nitrogen, then evacuated, and then filled with the target gas. The gas absorption chamber (110) is heated to a preset temperature; Open the electrical connection between the transmitting unit (14) and the receiving unit (26) to measure the spectral parameters of the target gas.

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