Feeding and discharging mechanism for flaky base material ultrasonic scanning equipment

Abstract

The invention relates to the technical field of ultrasonic scanning, in particular to a feeding and discharging mechanism for sheet base material ultrasonic scanning equipment, which comprises a rack, a feeding belt and a conveying belt are arranged on the rack, a clamping and plugging frame for bearing a base material is conveyed on the feeding belt, an overturning table is arranged between the feeding belt and the conveying belt, an overturning block is rotatably connected to the overturning table, and the overturning block is provided with a clamping and plugging groove. The overturning block is fixedly connected with an overturning frame, the overturning frame comprises two long rods used for bearing the bottom plate and two short rods used for bearing the baffle, and the long rods are provided with a plurality of idler wheels. The base materials are inserted into the clamping plug frame in a stacked mode, the base materials are separated one by one through the base grooves, the horizontal projection area of the clamping plug frame is small, the whole clamping plug frame is of a cubic structure, the occupied space is small, and carrying is convenient.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of ultrasonic scanning, in particular to a feeding and discharging mechanism for a sheet-shaped substrate ultrasonic scanning device. BACKGROUND

[0002] SAT (ultrasonic scanning microscope) detection is a machine table that detects by transmitting ultrasonic signals through pure water as a medium and detecting the reflection rate and energy difference of high-frequency ultrasonic waves and materials with different densities.

[0003] The ultrasonic scanning microscope has a wide range of applications and can be used for scanning and analyzing various materials, such as chips, profiles, plates and the like. Usually, the sample to be detected is carried and transported by a jig, such as the Chinese patent with the publication number CN104655735A, which discloses an ultrasonic scanning tool, comprising a base, a hole is arranged on the base, and a drainage groove is arranged around the hole. And the Chinese patent with the publication number CN101988916A discloses a sample tray for ultrasonic scanning, comprising a disc body and a disc holder, the disc body and the disc holder are separated from each other, the disc body and the disc holder have structures for mutual fixation, and the disc body has a groove for placing a sample to be detected.

[0004] The jig tool mentioned above usually exposes and lays the surface of the sample to be detected on the jig for scanning by ultrasonic waves. However, for some sheet-shaped substrates with thin thickness and large surface area, feeding in this way will result in a large plane of the jig, a large space volume occupied, and inconvenience in transportation and transmission. SUMMARY

[0005] In order to facilitate the transmission of the sheet-shaped substrate, the application provides a feeding and discharging mechanism for a sheet-shaped substrate ultrasonic scanning device.

[0006] The feeding and discharging mechanism for a sheet-shaped substrate ultrasonic scanning device provided by the application adopts the following technical scheme: A feeding and discharging mechanism for a sheet-shaped substrate ultrasonic scanning device, comprising a rack, A feeding belt and a conveying belt are arranged on the rack and are horizontally arranged on the same straight line, the feeding belt is transmitted towards the conveying belt, and the conveying direction of the feeding belt and the conveying belt is the same, A clamping frame for carrying the substrate is transmitted on the feeding belt, the clamping frame comprises a bottom plate in contact with the feeding belt, two ends of the bottom plate are vertically fixed with baffle plates, a clearance is formed in the middle of the baffle plates, two side plates are vertically fixed on both sides of the bottom plate, the side plates are parallel to the conveying direction of the feeding belt, and a plurality of base grooves for clamping the substrate are formed in pairs on the two side plates, The turnover table is connected with the rack vertically and slidably, and the side of the turnover table facing the conveying belt is provided with a limiting frame for supporting the short rods. The turnover table is connected with the rack vertically and slidably, and the side of the turnover table facing the conveying belt is provided with a limiting frame for supporting the short rods.

[0007] Through the above technical scheme, the substrates are inserted into the cassette frame in a stacked manner, the substrate grooves separate the substrates one by one, the horizontal projection area of the cassette frame is small, the overall structure is nearly cubic, the space occupation volume is small, and the substrates are convenient to carry.

[0008] The cassette frame is placed on the feeding belt, the bottom plate abuts against the feeding belt, and the opening of the cassette frame faces upward. When the cassette frame is transported to the turnover table, the baffle abuts against the short rod, and the bottom plate rolls along the roller to the long rod. The turnover frame is turned by 90°, and the short rod abuts against the limiting frame. The cassette frame is erected, the bottom plate of the cassette frame is in a vertical state, the opening of the cassette frame faces the conveying belt, and the substrates are arranged in the cassette frame in a horizontal state from top to bottom. The end of the conveying belt is located in the avoiding opening.

[0009] The turnover table is gradually lowered, the substrates contact the conveying belt, the conveying belt sequentially outputs the substrates from the cassette frame, and thus the substrates are fed into the ultrasonic scanning device.

[0010] Preferably, the long rod is fixed with a limiting plate for limiting the cassette frame, the turnover frame is slidably connected with two clamping plates located on the two sides, the sliding direction of the two clamping plates is perpendicular to the conveying direction of the feeding belt, and the limiting plate is provided with a clamping opening opposite to the clamping plate.

[0011] Through the above technical scheme, when the cassette frame is conveyed to the turnover table, the cassette frame is located between the two limiting plates, the two limiting plates limit the cassette frame, and the position accuracy of the cassette frame is improved. Before the turnover block is turned over, the two clamping plates are pressed against the cassette frame, the clamping plate passes through the clamping opening to fix the cassette frame, and the stability of the cassette frame is improved.

[0012] Preferably, the end of the side plate away from the bottom plate is slidably connected with a protection plate parallel to the bottom plate, the sliding plane of the protection plate is parallel to the plane where the bottom plate is located, when the two protection plates are farthest away from each other, the protection plate does not block the substrate groove, and when the two protection plates are closest to each other, the end of the protection plate blocks the substrate groove.

[0013] By adopting the technical scheme, before the turnover block is turned over, the protection plates move towards each other, the protection plates shield the end of the base groove, thereby limiting the base material, preventing the base material from sliding out of the jamming frame during the turnover process, after the turnover block is turned over, the protection plates move away from each other, the base groove is opened, and the base material is conveniently removed from the jamming frame.

[0014] As a preferred, the side plates are slidingly connected with clamping plates parallel to the side plates on the sides away from each other, the clamping plates are fixedly connected with the protection plates, and a plurality of reset springs are arranged between the clamping plates and the side plates.

[0015] By adopting the technical scheme, before the turnover block is turned over, the clamping plates press towards the jamming frame, the clamping plates exert pressure on the clamping plates, the clamping plates are driven to slide synchronously with the protection plates under the pressure, thereby shielding the base groove. After the turnover block is turned over, the clamping plates are loosened from the jamming frame, and the clamping plates and the protection plates are reset under the action of the reset springs. The clamping plates can drive the protection plates to slide synchronously to shield the base groove while clamping and fixing the jamming frame, and the use is convenient.

[0016] As a preferred, the clamping plates are fixed with a plurality of clamping rods perpendicular to the side plates on the sides facing the side plates, and the clamping rods are separated from the side plates when the reset springs are in a natural state.

[0017] By adopting the technical scheme, when the clamping plates press towards the side plates, the clamping rods abut against the side plates, on the one hand, the clamping rods limit the movement distance of the side plates, and on the other hand, the clamping force of the clamping plates is transmitted to the side plates through the clamping rods to clamp the jamming frame, thereby improving the stability of clamping.

[0018] As a preferred, the short rods are vertically fixed with limiting rods parallel to the long rods on the sides facing the baffle plates, and the baffle plates are provided with limiting holes opposite to the limiting rods on the sides facing the short rods.

[0019] By adopting the technical scheme, when the baffle plates move to the turnover table, the limiting rods are inserted into the limiting holes, the limiting rods and the limiting holes cooperate with each other to limit the position of the jamming frame, thereby improving the position accuracy.

[0020] As a preferred, the limiting holes extend through the baffle plates into the side plates, the side plates are provided with locking holes perpendicular to and communicating with the limiting holes, locking rods are slidingly connected in the locking holes, limiting cylinders are rotationally connected in the limiting holes, helical grooves are formed in the inner walls of the limiting cylinders, threads are fixed on the outer walls of the limiting rods and matched with the helical grooves, worms are coaxially fixed in the limiting cylinders, worm wheels are rotationally connected in the locking holes and meshed with the worms, through holes are coaxially formed in the worm wheels, and threads are formed in the inner walls of the through holes and matched with the threads of the locking rods.

[0021] By adopting the technical scheme, before the cassette frame is conveyed to the turnover table, the end of the locking rod is in contact with the side wall of the clamping plate, the locking rod limits the clamping plate, at this time, the clamping plate cannot be pressed to the side plate, thereby ensuring that the base groove is always in an open state, so as to facilitate the installation of the base material. When the cassette frame is conveyed to the turnover table, the limiting rod is inserted into the limiting hole, the limiting rod cooperates with the limiting cylinder, the limiting rod drives the limiting cylinder and the worm to rotate, the worm drives the worm wheel to rotate, and the worm wheel drives the locking rod to slide into the locking hole through the threaded groove. At this time, the locking rod is separated from the clamping plate, the clamping plate is unlocked, and the clamping plate can exert pressure on the clamping plate to drive the clamping plate to slide.

[0022] Preferably, the worm is provided with a reset torsional spring, and the end of the locking rod is in contact with the clamping plate in a natural state of the reset torsional spring.

[0023] By adopting the technical scheme, the reset torsional spring provides a reset force for the worm, thereby ensuring the limiting effect of the locking rod on the clamping plate when the cassette frame is normally used, so as to ensure the opening of the base groove.

[0024] Preferably, the locking holes are arranged in pairs on the side plate, and the two locking holes are located at two ends of the side plate, and the worms in the two locking holes are coaxially fixed and connected.

[0025] By adopting the technical scheme, the locking holes are arranged in pairs on the side plate, and the locking rods arranged in pairs support the clamping plate at two ends of the side plate, thereby improving the supporting effect.

[0026] In summary, the present application has at least one of the following beneficial technical effects: 1. By arranging the cassette frame and the turnover table, the sheet-shaped base material can be conveyed in a stacked form, thereby reducing the space volume occupied when the base material is conveyed, and the conveying is also more convenient. The turnover table can convey the base material in the cassette frame in a form with the detection surface facing upward, so as to facilitate normal scanning of the base material. The two cooperate with each other, and are convenient to use. 2. By arranging the protective plate and the clamping plate, the protective plate and the clamping plate cooperate with each other to open and close the opening of the base groove. When the base material is normally loaded and unloaded, the protective plate does not block the base groove, so as to facilitate the base material to enter and exit the cassette frame. When the cassette frame is turned with the turnover block, the protective plate blocks the opening of the base groove, thereby shielding and protecting the base material, so as to prevent the base material from falling out of the cassette frame, and improve the stability of the base material during turnover. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 is a schematic diagram of the overall structure of the embodiment; Figure 2 is a schematic diagram of the structure of the cassette frame in the embodiment; Figure 3 is a schematic diagram of the internal structure of the cassette frame in the embodiment; Figure 4 is Figure 3 is an enlarged schematic view of part A in Figure 5 is a schematic view of the internal structure of the side plate in the embodiment; Figure 6 is a schematic view of the structure for embodying the turnover table in the embodiment; Figure 7 is Figure 6 is an enlarged schematic view of part B in Figure 8 is a schematic view of the structure of the jam frame in the embodiment when it is turned over to the vertical state.

[0028] BRIEF DESCRIPTION OF DRAWINGS 1, rack; 2, feeding belt; 3, conveying belt; 4, jam frame; 41, bottom plate; 42, baffle; 43, avoiding opening; 44, side plate; 441, base groove; 45, protective plate; 46, clamping plate; 461, clamping rod; 47, return spring; 48, limiting hole; 49, locking hole; 5, turnover table; 51, turnover block; 52, limiting frame; 53, clamping plate; 6, turnover frame; 61, long rod; 62, short rod; 63, roller; 64, limiting plate; 641, clamping opening; 71, limiting rod; 72, limiting cylinder; 721, helical groove; 73, worm; 74, worm wheel; 75, locking rod; 76, return torsional spring. DETAILED DESCRIPTION

[0029] The application will be further described in detail below with reference to all the drawings.

[0030] The embodiment discloses an up-and-down feeding mechanism for an ultrasonic scanning device for sheet-shaped substrates, which refers to Figure 1 , comprising a rack 1, a feeding belt 2 and a conveying belt 3 are horizontally arranged on the rack 1, the feeding belt 2 and the conveying belt 3 are located on the same straight line, the conveying directions of the feeding belt 2 and the conveying belt 3 are consistent and the feeding belt 2 conveys towards the conveying belt 3. A turnover table 5 is arranged between the feeding belt 2 and the conveying belt 3, and the feeding belt 2 conveys a jam frame 4 containing a substrate.

[0031] Referring to Figure 2 , the jam frame 4 is in the shape of a cube as a whole, the jam frame 4 comprises a rectangular bottom plate 41, baffles 42 are vertically fixed at both ends of the bottom plate 41, the baffles 42 are fixed on the wide edges of the bottom plate 41, and avoiding openings 43 are arranged at the centers of the baffles 42. Side plates 44 are vertically fixed at both sides of the bottom plate 41, the side plates 44 are fixed on the long edges of the bottom plate 41, and the side plates 44 are perpendicular to the baffles 42. One side of the jam frame 4 opposite to the bottom plate 41 is open, which is used for taking and placing the substrate. When the jam frame 4 is conveyed on the feeding belt 2, the bottom plate 41 is in contact with the feeding belt 2, and the opening of the jam frame 4 faces upwards.

[0032] Referring to Figure 2The opposite side of the two side plates 44 is provided with a plurality of base grooves 441 for clamping the base material along the length direction of the side plate 44. The operator inserts the base material into the cassette frame 4 in sequence, and the two sides of the base material are located in the base grooves 441, which limit the base material, and the base material is placed in the cassette frame 4 in a stacked manner.

[0033] With reference to Figure 2 and Figure 3 The cassette frame 4 is horizontally and slidingly connected with the clamping plate 46 parallel to the side plate 44 at both sides of the side plate 44, a plurality of reset springs 47 are arranged between the clamping plate 46 and the side plate 44, a plurality of clamping rods 461 perpendicular to the side plate 44 are fixed to the side of the clamping plate 46 facing the side plate 44, and the sliding direction of the clamping plate 46 is consistent with the axis direction of the clamping rod 461. When the reset spring 47 is in a natural state, the clamping rod 461 is separated from the side plate 44.

[0034] With reference to Figure 2 and Figure 3 The upper end of the clamping plate 46 is horizontally fixed with the protection plate 45 above the side plate 44 for opening and closing the opening of the base groove 441, and the protection plate 45 is parallel to the bottom plate 41. When the reset spring 47 is in a natural state, the protection plate 45 opens the opening of the base groove 441. When the base material is normally taken and placed, the clamping plate 46 and the protection plate 45 are away from the side plate 44 under the action of the reset spring 47, the protection plate 45 opens the opening of the base groove 441, and the operator can take and place the base material. When the cassette frame 4 is turned over, the protection plate 45 and the clamping plate 46 are pressed towards the side plate 44, the protection plate 45 shields the opening of the base groove 441, thereby blocking the base material in the cassette frame 4, preventing the base material from falling out, and improving the stability of the base material.

[0035] With reference to Figure 2 and Figure 5 The end of the side baffle 42 is provided with two limit holes 48 with different heights, and the limit holes 48 extend into the side plate 44. The side plate 44 is provided with two locking holes 49 perpendicular to and communicating with the limit holes 48, the two locking holes 49 are located at both ends of the side plate 44, and the opening of the locking hole 49 faces the clamping plate 46. The locking hole 49 is rotatably connected with a worm gear 74 coaxial with the locking hole 49, the center of the worm gear 74 is coaxially provided with a through hole, and the inner wall of the through hole is provided with a threaded groove. The locking hole 49 is slidingly connected with a locking rod 75, and the outer wall of the locking rod 75 is fixed with a thread matched with the threaded groove. The worm gear 74 rotates, and the locking rod 75 slides along the locking hole 49.

[0036] With reference to Figure 2 and Figure 5The limiting hole 48 is rotationally connected with two coaxial and fixedly connected worm gears 73. The two worm gears 73 are respectively engaged with two worm wheels 74. The rotation of the worm gear 73 drives the worm wheel 74 to rotate, thereby driving the locking rod 75 to slide. The worm gear 73 is provided with a reset torsion spring 76. When the reset torsion spring 76 is in a natural state, the end of the limiting rod 71 is in contact with the clamping plate 46.

[0037] With reference to Figure 2 and Figure 5 , the limiting hole 48 is rotationally connected with a limiting cylinder 72 coaxial and fixedly connected with the worm gear 73 near the port. The inner wall of the limiting cylinder 72 is provided with a spiral groove 721.

[0038] With reference to Figures 6 to 8 , the rack 1 is provided with a vertically arranged lifting cylinder. The output shaft of the lifting cylinder is fixedly connected with the turnover table 5, which is used to drive the turnover table 5 to move up and down. The turnover table 5 is provided with a turnover cylinder. The output shaft of the turnover cylinder is connected with a turnover block 51 rotationally connected with the turnover table 5. The turnover block 51 is fixedly connected with a turnover frame 6 used to carry the clogging frame 4.

[0039] With reference to Figures 6 to 8 , the clogging frame 4 is transported from the feeding belt 2 to the turnover frame 6 of the turnover table 5. The turnover cylinder drives the turnover block 51 to turn, thereby driving the clogging frame 4 to turn over.

[0040] With reference to Figures 6 to 8 , the turnover frame 6 includes two long rods 61 used to carry the bottom plate 41 and two short rods 62 used to carry the baffle plate 42. The long rod 61 is provided with a plurality of rollers 63. When the turnover table 5 is located at the uppermost position and the long rod 61 is in a horizontal state, the upper surface of the roller 63 is flush with the upper surface of the feeding belt 2, so as to facilitate the transmission of the clogging frame 4.

[0041] With reference to Figures 6 to 8 , when the clogging frame 4 is transported to the turnover frame 6, the bottom plate 41 is in contact with the long rod 61, and the baffle plate 42 is in contact with the short rod 62. At this time, the clogging frame 4 is in a horizontal state, and the opening of the clogging frame 4 is vertically upward. The turnover cylinder is started, and the turnover block 51 drives the clogging frame 4 to rotate 90°, so that the clogging frame 4 is in a vertical state. At this time, the opening of the clogging frame 4 is in a horizontal state and faces the transmission belt 3. At this time, the avoiding port 43 is located on the lower surface of the clogging frame 4, and the end of the transmission belt 3 is opposite to the avoiding port 43.

[0042] With reference to Figures 6 to 8 , the lifting cylinder drives the clogging frame 4 to gradually descend. When the clogging frame 4 descends, the part of the substrate exposed to the avoiding port 43 is in contact with the transmission belt 3. The transmission belt 3 transmits the substrate away, and the clogging frame 4 gradually descends, and the transmission belt 3 outputs the substrates one by one.

[0043] With reference to Figures 6 to 8The side of the turnover table 5 facing the conveying belt 3 is fixed with a limiting frame 52 for supporting a short rod 62, and the short rod 62 is in a horizontal state when it is in contact with the limiting frame 52. The limiting frame 52 limits the turning angle of the turnover frame 6 and supports the turnover frame 6, thereby improving the stability of the turnover frame 6.

[0044] With reference to Figures 6 to 8 The long rod 61 is fixed with a limiting plate 64 for limiting the jam frame 4, and the turnover frame 6 is slidingly connected with two clamping plates 53 located on both sides. The sliding direction of the two clamping plates 53 is perpendicular to the conveying direction of the conveying belt 2, and the limiting plate 64 is provided with a clamping opening 641 opposite to the clamping plate 46. Before the turnover block 51 is turned over, the two clamping plates 53 are pressed towards the jam frame 4, the clamping plate 53 passes through the clamping opening 641 to fix the jam frame 4, thereby improving the stability of the jam frame 4.

[0045] With reference to Figures 2 to 8 The opening of the limiting hole 48 faces the short rod 62, and the side of the short rod 62 facing the baffle 42 is vertically fixed with a limiting rod 71 parallel to the long rod 61. The limiting rod 71 is opposite to the limiting hole 48, and the outer wall of the limiting rod 71 is fixed with a screw thread matched with the spiral groove 721.

[0046] With reference to Figures 2 to 8 Before the jam frame 4 is turned over, the clamping plate 46 and the protection plate 45 cannot slide under the limitation of the locking rod 75, so that the base groove 441 is always in an open state, thereby facilitating the installation of the base material.

[0047] With reference to Figures 2 to 8 When the jam frame 4 moves to the turnover table 5, the jam frame 4 is in contact with the short rod 62, the limiting rod 71 is inserted into the limiting hole 48, the limiting rod 71 drives the limiting cylinder 72 to rotate, the limiting cylinder 72 drives the locking rod 75 to slide through the worm gear 74 and the worm 73, and the locking rod 75 is retracted into the locking hole 49, thereby unlocking the clamping plate 46.

[0048] At this time, the clamping plate 53 is pressed from both sides of the jam frame 4 to the clamping plate 46 to clamp the clamping plate 46, and the two clamping plates 46 and the protection plate 45 move towards each other. The clamping plate 46 clamps the side plate 44 through the clamping rod 461, and the protection plate 45 shields the opening of the base groove 441 to protect the base material.

[0049] At this time, the turnover block 51 is turned over to stand up the jam frame 4, the clamping plate 53 releases the clamping plate 46, the clamping plate 46 and the protection plate 45 are reset, and the base groove 441 is opened again. The conveying belt 3 can output the base material from the jam frame 4.

[0050] The implementation principle of the feeding and discharging mechanism of the sheet-shaped substrate ultrasonic scanning equipment is as follows: an operator places the clamping frame 4 provided with the substrate with the opening upward on the feeding belt 2, the feeding belt 2 conveys the clamping frame 4 to the turnover table 5, the clamping plate 53 clamps the clamping frame 4, the turnover block 51 turns over the clamping frame 4 to stand, the turnover table 5 gradually descends, and the material conveying belt 3 outputs the substrates one by one.

[0051] The above are preferred embodiments of the present application, and do not limit the protection scope of the present application, so: equivalent changes made according to the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. A loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment, comprising a frame (1), characterized in that: The frame (1) is provided with a feeding belt (2) and a conveying belt (3) which are horizontal and located on the same straight line. The feeding belt (2) is transmitted toward the conveying belt (3). The feeding belt (2) and the conveying belt (3) have the same conveying direction. A plug frame (4) for carrying a substrate is transported on the feed belt (2), and the plug frame (4) includes a bottom plate (41) in contact with the feed belt (2), baffles (42) are vertically fixed at both ends of the bottom plate (41), and a avoidance opening (43) is provided in the middle of the baffle (42), and side plates (44) are vertically fixed on both sides of the bottom plate (41), and the side plates (44) are parallel to the transport direction of the feed belt (2), and a plurality of base grooves (441) for clamping the substrate are provided in pairs on the two side plates (44). A turning platform (5) is provided between the feed belt (2) and the transfer belt (3), and a turning block (51) is rotatably connected to the turning platform (5), and a turning frame (6) is fixedly connected to the turning block (51), and the turning frame (6) includes two long rods (61) for supporting the bottom plate (41) and two short rods (62) for supporting the baffle (42), and a plurality of rollers (63) are provided on the long rods (61). When the long rods (61) are in a horizontal state, the upper surface of the rollers (63) is flush with the upper surface of the feed belt (2), and when the short rods (62) are in a horizontal state, the avoidance opening (43) is directly opposite to the end of the transfer belt (3). The turning platform (5) is connected to the frame (1) in a vertical sliding manner. A limiting frame (52) for supporting a short rod (62) is provided on the side of the turning platform (5) facing the material conveying belt (3). When the short rod (62) contacts the limiting frame (52), the short rod (62) is in a horizontal state.

2. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 1, characterized in that: A limiting plate (64) for limiting the jamming frame (4) is fixed on the long rod (61), and two clamping plates (53) located on both sides are slidably connected to the turning frame (6), and the sliding direction of the two clamping plates (53) is perpendicular to the transmission direction of the feed belt (2), and a clamping opening (641) facing the clamping plate (46) is opened on the limiting plate (64).

3. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 2, characterized in that: One end of the side plate (44) away from the bottom plate (41) is slidably connected to a protective plate (45) parallel to the bottom plate (41); the sliding plane of the protective plate (45) is parallel to the plane where the bottom plate (41) is located; when the two protective plates (45) are moved away from each other to the farthest end, the protective plates (45) do not block the base groove (441); when the two protective plates (45) are moved close to each other to the closest end, the ends of the protective plates (45) block the base groove (441).

4. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 3, characterized in that: A clamping plate (46) parallel to the side plate (44) is slidably connected to the side of the side plate (44) facing away from each other. The clamping plate (46) is fixedly connected to the protective plate (45). A plurality of return springs (47) are provided between the clamping plate (46) and the side plate (44).

5. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 4, characterized in that: A plurality of clamping rods (461) perpendicular to the side plate (44) are fixed to the side of the clamping plate (46) facing the side plate (44). When the return spring (47) is in a natural state, the clamping rods (461) are separated from the side plate (44).

6. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 4, characterized in that: A limiting rod (71) parallel to the long rod (61) is vertically fixed on one side of the short rod (62) facing the baffle (42), and a limiting hole (48) facing the limiting rod (71) is opened on one side of the baffle (42) facing the short rod (62).

7. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 6, characterized in that: The limiting hole (48) passes through the baffle (42) and extends into the side plate (44). A locking hole (49) is provided in the side plate (44) and is perpendicular to and communicates with the limiting hole (48). A locking rod (75) is slidably connected in the locking hole (49). A limiting cylinder (72) is rotatably connected in the limiting hole (48). A spiral groove (721) is provided on the inner wall of the limiting cylinder (72). A thread matching the spiral groove (721) is fixed on the outer wall of the limiting rod (71). A worm (73) is coaxially fixed to the limiting cylinder (72). A worm wheel (74) meshing with the worm wheel (73) is rotatably connected in the locking hole (49). A through hole is coaxially provided on the worm wheel (74) and a thread groove is provided on the inner wall of the through hole. The outer wall of the locking rod (75) is provided with a thread matching the thread groove.

8. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 7, characterized in that: The worm (73) is provided with a return torsion spring (76). When the return torsion spring (76) is in a natural state, the end of the locking rod (75) contacts the clamping plate (46).

9. The loading and unloading mechanism for sheet-like substrate ultrasonic scanning equipment according to claim 7, characterized in that: The locking holes (49) are opened in pairs on the side plate (44), the two locking holes (49) are respectively located at the two ends of the side plate (44), and the worms (73) in the two locking holes (49) are coaxially fixedly connected.

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