Detection device based on optical lever principle, high-precision assembly error detection method and flatness detection method

Abstract

The invention provides a detection device based on the optical lever principle, a high-precision assembly error detection method and a flatness detection method, belongs to the field of precision measurement, and solves the problems of large error and dynamic response hysteresis in the existing detection technology. The reflecting mirror is located above the laser emitting device and can reflect laser emitted by the laser emitting device to the photosensitive position sensor, the reflecting mirror mounting plate is provided with a sliding groove, a sliding block is arranged in the sliding groove in a sliding mode, the upper end of the displacement rod is hinged to the sliding block, and the reflecting mirror and the displacement rod are located at the two ends of the rotating center of the reflecting mirror mounting plate respectively. The horizontal distance between the laser beam and the rotating center of the reflector mounting plate is larger than the horizontal distance between the displacement rod and the rotating center of the reflector mounting plate, and a probe is detachably arranged at the lower end of the displacement rod. The method has the advantages of strong dynamic response capability, strong environmental adaptability and high detection precision.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of precision measurement, in particular relates to a detection device based on optical lever principle, a high-precision assembly error detection method and a flatness detection method. BACKGROUND

[0002] The current assembly error detection technology has two levels of technical bottlenecks: in the contact measurement field, traditional mechanical probes such as micrometer, dial gauge, etc. are limited by the inherent characteristics of mechanical structure, and there are problems such as measurement drift caused by probe wear, micro-deformation error caused by contact stress, and dynamic response lag. In the non-contact measurement field, although the laser interferometer technology avoids the defects of contact measurement, its system complexity is too high, and it needs precise temperature control and vibration isolation environment support, which is difficult to work stably in ordinary industrial field. SUMMARY

[0003] Therefore, in order to solve the problems of the existing assembly error detection technology, the contact measurement field has the problems of micro-deformation error caused by probe wear and dynamic response lag, and in the non-contact measurement field, its system complexity is too high, and it needs precise temperature control and vibration isolation environment support, which is difficult to work stably in ordinary industrial field, the present application provides a detection device based on optical lever principle, a high-precision assembly error detection method and a flatness detection method.

[0004] To achieve the above purpose, the present application adopts the following technical scheme: A detection device based on optical lever principle, comprising: A reference seat; A laser emitting device fixedly arranged on the reference seat for emitting laser upward; A sensor support and a photosensitive position sensor, the sensor support is fixedly arranged on one end of the reference seat, and the photosensitive position sensor is fixedly arranged on the sensor support, and the photosensitive position sensor is arranged at intervals with the laser emitting device; A support fixedly arranged on the other end of the reference seat; A mirror mounting plate, a mirror and a displacement rod, the mirror mounting plate is rotatably arranged on the support, the mirror is fixedly arranged on the mirror mounting plate, the mirror is located above the laser emitting device, the mirror can reflect the laser emitted by the laser emitting device onto the photosensitive position sensor, the mirror mounting plate is provided with a sliding groove, a sliding block is slidably arranged in the sliding groove, the upper end of the displacement rod is hinged with the sliding block, the mirror and the displacement rod are respectively located at two ends of the rotation center of the mirror mounting plate, the horizontal distance between the laser emitted by the laser emitting device and the rotation center of the mirror mounting plate is greater than the horizontal distance between the displacement rod and the rotation center of the mirror mounting plate, the displacement rod is slidably arranged in the support, and the lower end of the displacement rod is detachably provided with a probe, and the probe is used for contacting with the surface to be measured.

[0005] As a preferred scheme of the detection device based on the optical lever principle, the displacement rod is a telescopic rod with a fixed locking function.

[0006] As a preferred scheme of the detection device based on the optical lever principle, the support comprises a first sub-support, a second sub-support and two limiting supports, the first sub-support and the second sub-support are arranged vertically, the lower end of the second sub-support is fixedly connected to the first sub-support, the mirror mounting plate is rotatably arranged at the upper end of the second sub-support, one end of the first sub-support is fixedly connected to the reference seat, the displacement rod is slidably arranged at the other end of the first sub-support, the two limiting supports are fixedly connected to the second sub-support, the two limiting supports are arranged in a spaced manner and are located above the first sub-support, and the displacement rod is slidably arranged in the two limiting supports.

[0007] As a preferred scheme of the detection device based on the optical lever principle, the detection device based on the optical lever principle further comprises a spring, the spring is sleeved on the displacement rod, and the two ends of the spring abut against one of the limiting supports and the first sub-support respectively.

[0008] As a preferred scheme of the detection device based on the optical lever principle, a first linear bearing is arranged between the first sub-support and the displacement rod, and a second linear bearing is arranged between each of the two limiting supports and the displacement rod.

[0009] As a preferred scheme of the detection device based on the optical lever principle, the mirror mounting plate is fixedly provided with a rotating shaft, the rotating shaft is rotatably arranged in the second sub-support, and a bearing is arranged between the rotating shaft and the second sub-support.

[0010] The application also provides a high-precision assembly error detection method, which adopts the detection device based on the optical lever principle, and comprises the following steps: S1: placing the reference seat on an assembly reference surface, and lightly touching a surface to be measured by a probe, at this time, the laser emitted by the laser emitting device is reflected to the photosensitive position sensor by the mirror to form a light spot; S2: moving the reference seat along the assembly reference surface, and moving the probe on the surface to be measured, if the assembly reference surface is not parallel to the surface to be measured, the probe will produce axial displacement along with the topography of the surface to be measured, the displacement rod drives the mirror mounting plate to rotate, the mirror mounting plate drives the mirror to move, and the position of the light spot on the photosensitive position sensor will change, and the photosensitive position sensor outputs the relative displacement data of the light spot in real time; S3: obtaining assembly error data according to the relative displacement data of the light spot; S4: repeatedly performing S1-S3 to obtain multiple assembly error data; S5: obtaining an assembly error value by averaging the multiple assembly error data.

[0011] As a preferred scheme of the high-precision assembly error detection method, in S3, obtaining the assembly error data according to the light spot relative displacement data comprises: S31: establishing a coordinate graph, taking the displacement data of the reference seat as the horizontal coordinate and taking the light spot displacement data as the vertical coordinate to obtain a light spot position line graph; S32: in the light spot position line graph, the vertical coordinate difference between the highest point and the lowest point of the line is the assembly error.

[0012] The application also provides a flatness detection method, which adopts the detection device based on the optical lever principle and comprises the following steps: S1: the reference plane is parallel to the surface to be detected, the reference seat is placed on the reference plane, the probe is lightly touched on the surface to be detected, at this time, the laser emitted by the laser emitting device is reflected to the photosensitive position sensor by the reflector to form a light spot; S2: the reference seat is moved along the reference plane, and the probe is also moved on the surface to be detected, the probe is axially displaced along the topography of the surface to be detected, the displacement rod drives the reflector mounting plate to rotate, and the position of the light spot on the photosensitive position sensor is changed, and the photosensitive position sensor outputs the light spot relative displacement data in real time; S3: obtaining the flatness data of the surface to be detected according to the light spot relative displacement data; S4: repeatedly performing S1-S3 to obtain the flatness data of the plurality of surfaces to be detected; S5: obtaining the flatness of the surface to be detected by averaging the flatness data of the plurality of surfaces to be detected.

[0013] As a preferred scheme of the flatness detection method, in S3, obtaining the flatness data of the surface to be detected according to the light spot relative displacement data comprises: S31: establishing a coordinate graph, taking the displacement data of the reference seat as the horizontal coordinate and taking the light spot displacement data as the vertical coordinate to obtain a light spot position line graph; S32: in the light spot position line graph, the vertical coordinate difference between the highest point and the lowest point of the line is the assembly error.

[0014] Compared with the prior art, the detection device based on the optical lever principle, the high-precision assembly error detection method and the flatness detection method have the following advantages: The application provides a detection device based on an optical lever principle, a high-precision assembly error detection method and a flatness detection method. In the detection device based on the optical lever principle, a laser emitter and an optical system of a laser emitting device emit a parallel laser beam with a very small spot diameter. The laser beam is reflected by a mirror and projected on a photosensitive position sensor to form a spot. The photosensitive position sensor (PSD) can detect the relative displacement change of the spot on its surface. Because the relative displacement change of the spot is used to obtain the assembly error data and the flatness data, there is no problem of detection result error caused by probe wear, and the probe and the displacement rod are detachably connected and can be replaced at any time. Moreover, the optical amplification and the high-speed PSD detection work cooperatively to support real-time continuous scanning and millisecond-level data updating, and the dynamic response capability can be improved.

[0015] The detection device based on the optical lever principle constructs a multi-stage amplification assembly error detection system of "mechanical sensing-optical amplification" and introduces an assembly error transmission mechanism. Through a precisely designed lever type displacement transmission structure, the surface topography change is converted into an optical signal offset with a controllable angle. First-stage mechanical amplification: the support is the fulcrum of the mirror mounting plate, the laser is reflected on the mirror, the mirror and the displacement rod are respectively located at two ends of the rotation center of the mirror mounting plate, the horizontal distance between the laser beam and the rotation center of the mirror is greater than the horizontal distance between the displacement rod and the rotation center of the mirror mounting plate, and the lever principle is used to realize preliminary amplification of the displacement amount. Second-stage optical amplification: a spatial light path is constructed through the mirror to convert the angle change of the mirror into a large offset of the light beam position.

[0016] The detection device based on the optical lever principle can not only detect the assembly error but also detect the flatness. Moreover, the relative displacement change of the spot is used to obtain the assembly error data and the flatness data, there is no problem of detection result error caused by probe wear, the dynamic response capability is strong, the structure is simple, the cost is low, the operation is simple, the environmental adaptability is strong, the detection precision is high, the high precision and the industrial practicability are combined, and the detection device can realize rapid capture and accurate evaluation of the micron-level assembly error in a conventional workshop environment. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which form a part of the present application, are used to provide further understanding of the present application, and the illustrative embodiments of the present application and their description serve the purpose of explaining the present application. In the drawings: Figure 1 FIG. 1 is a structural schematic diagram of the detection device based on the optical lever principle provided by the specific embodiment of the present application; Figure 2 FIG. 2 is a simplified diagram of the detection device based on the optical lever principle provided by the specific embodiment of the present application; Figure 3It is a mathematical formula calculation auxiliary drawing of the detection device based on the optical lever principle provided by the embodiment of the present application; Figure 4 It is a light spot position line drawing obtained by the detection device based on the optical lever principle provided by the embodiment of the present application when detecting assembly error, wherein the probe walks along the annular surface; Figure 5 It is a light spot position line drawing obtained by the detection device based on the optical lever principle provided by the embodiment of the present application when detecting assembly error, wherein the probe walks along the straight line; Figure 6 It is a bearing end surface light spot position waveform drawing obtained by the detection device based on the optical lever principle provided by the embodiment of the present application when detecting parallelism.

[0018] In the figure: 1, reference seat; 2, photosensitive position sensor; 3, laser emitting device; 41, second branch support; 42, first branch support; 43, limiting support; 5, reflecting mirror; 6, displacement rod; 7, probe; 8, spring; 9, sensor support; 10, reflecting mirror mounting plate. DETAILED DESCRIPTION The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other, and the described embodiments are only part of the embodiments of the present application, but not all the embodiments.

[0019] In the description of the present application, unless otherwise explicitly specified and limited, the terms “connected”, “connected”, “fixed” should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0020] In the present application, unless otherwise explicitly specified and limited, the first feature “on” or “below” the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature “on”, “above” and “on” the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature “below”, “below” and “below” the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0021] In the description of the present embodiment, the terms "upper", "lower", "right", and the like, orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in description, and have no special meaning.

[0022] Referring to Figures 1-6 To illustrate the present embodiment, the present application provides a detection device based on the principle of optical lever, a high-precision assembly error detection method and a flatness detection method. The detection device based on the principle of optical lever comprises a reference seat 1, a laser emitting device 3, a sensor support 9, a photosensitive position sensor 2, a support, a mirror mounting plate 10, a mirror 5 and a displacement rod 6. The laser emitting device 3 is fixedly arranged on the reference seat 1 and used for emitting laser upward. The sensor support 9 is fixedly arranged at one end of the reference seat 1, and the photosensitive position sensor 2 is fixedly arranged on the sensor support 9. The photosensitive position sensor 2 is arranged at intervals with the laser emitting device 3. The support is fixedly arranged at the other end of the reference seat 1, the mirror mounting plate 10 is rotatably arranged on the support, the mirror 5 is fixedly arranged on the mirror mounting plate 10, the mirror 5 is located above the laser emitting device 3, the mirror 5 can reflect the laser emitted by the laser emitting device 3 onto the photosensitive position sensor 2, the mirror mounting plate 10 is provided with a sliding groove, a sliding block is slidably arranged in the sliding groove, the upper end of the displacement rod 6 is hinged to the sliding block, the mirror 5 and the displacement rod 6 are respectively located at both ends of the rotation center of the mirror mounting plate 10, the horizontal distance between the laser emitted by the laser emitting device 3 and the rotation center of the mirror mounting plate 10 is greater than the horizontal distance between the displacement rod 6 and the rotation center of the mirror mounting plate 10, the displacement rod 6 is slidably arranged in the support, and the lower end of the displacement rod 6 is detachably provided with a probe 7. The probe 7 is used for contacting the surface to be detected.

[0023] The detection device based on the optical lever principle can detect assembly error and flatness. When detecting assembly error, the reference seat 1 moves along the assembly reference surface, and the probe 7 also moves on the surface to be detected. If the assembly reference surface is not parallel to the surface to be detected, the distance between the assembly reference surface and the surface to be detected will change, so that the probe 7 at the lower end of the displacement rod 6 will move axially along the surface to be detected, the displacement rod 6 will drive the mirror mounting plate 10 to rotate, the mirror 5 will move with the mirror mounting plate 10, and the position of the light spot on the photosensitive position sensor 2 will change. The photosensitive position sensor 2 outputs light spot displacement data in real time, and the assembly error data is obtained according to the light spot displacement data. The final assembly error value is obtained by averaging a plurality of assembly error data obtained by repeated operation. When detecting assembly error, the reference plane is parallel to the surface to be detected, the reference seat 1 moves along the reference plane, the probe 7 also moves on the surface to be detected, the probe 7 at the lower end of the displacement rod 6 moves axially along the surface to be detected, the displacement rod 6 drives the mirror mounting plate 10 to rotate, and the position of the light spot on the photosensitive position sensor 2 will change. The photosensitive position sensor 2 outputs light spot displacement data in real time, and the flatness data of the surface to be detected is obtained according to the light spot displacement data. The final flatness of the surface to be detected is obtained by averaging a plurality of flatness data obtained by repeated operation.

[0024] In the detection device based on the optical lever principle, the laser emitting device 3 emits a parallel laser beam with a small light spot diameter through the laser emitter and the optical system. The laser beam is reflected by the mirror 5 and projected on the photosensitive position sensor 2 to form a light spot. The photosensitive position sensor 2 (psd) can detect the relative displacement change of the light spot on its surface. Because the assembly error data and the flatness data are obtained by the relative displacement change of the light spot, there is no problem of detection error caused by probe wear, and the probe 7 and the displacement rod 6 are detachably connected and can be replaced at any time. Moreover, the optical amplification and the high-speed PSD detection work cooperatively to support real-time continuous scanning and millisecond-level data updating, and can improve the dynamic response capability.

[0025] The detection device based on the optical lever principle can detect assembly error and flatness. Moreover, the assembly error data and flatness data obtained through the relative displacement change of the light spot do not have the problem of detection result error caused by detection wear, have strong dynamic response capability, simple structure, low cost, simple operation, strong environmental adaptability and high detection precision, have high precision and industrial practicability, can realize rapid capture and accurate evaluation of micron-level assembly error in a conventional workshop environment. The technical scheme is particularly suitable for precision mechanical assembly, microelectronic device packaging, aerospace structure docking and other industrial scenes requiring high-precision error assembly, and can effectively solve the technical contradiction between dynamic response, environmental adaptability and measurement precision of traditional measurement methods.

[0026] The detection device based on the optical lever principle constructs a multi-stage amplification assembly error detection system of "mechanical sensing-optical amplification", and introduces an assembly error transmission mechanism. Through the precisely designed lever type displacement conduction structure, the surface topography change is converted into a controllable angle optical signal offset. First-stage mechanical amplification: the support is the fulcrum of the mirror mounting plate 10, the laser hits the mirror 5, the mirror 5 and the displacement rod 6 are two ends of the rotation center of the mirror mounting plate 10, the horizontal distance between the upward emitted laser beam and the rotation center of the mirror mounting plate 10 is greater than the horizontal distance between the displacement rod 6 and the rotation center of the mirror mounting plate 10, and the lever principle is used to realize preliminary amplification of the displacement amount; second-stage optical amplification: a spatial light path is constructed through the mirror 5 to convert the angle change of the mirror 5 into a large offset of the light beam position.

[0027] As shown in Figure 3 , the mirror 5 is rotated from the mirror position 1 to the mirror position 2, the laser emitted by the laser emitting device 3 is incident light, the light reflected by the mirror 5 after hitting the mirror 5 is reflected light, and the reflected light finally falls on the photosensitive position sensor 2. According to the geometric relationship caused by the rotation of the mirror 5 with the mirror mounting plate 10 and the displacement analysis of the light spot on the photosensitive position sensor 2, the displacement ab of the light spot on the photosensitive position sensor 2 can be deduced.

[0028] When the mirror 5 is at the mirror position 1, the incident angle is α, the laser hits the mirror 5 at the position Q1, the laser hits the photosensitive position sensor 2 at the position b, the mirror 5 is rotated from the mirror position 1 to the mirror position 2, the displacement rod 6 moves downward by a distance L, the mirror 5 rotates by an angle γ, when the mirror 5 is at the mirror position 2, the incident angle is β, the laser hits the mirror 5 at the position Q2, the laser hits the photosensitive position sensor 2 at the position a, the horizontal distance between the laser incident light and the photosensitive position sensor 2 is M, the distance between the rotation center of the mirror 5 and the laser incident light is K, the horizontal distance between the displacement rod 6 and the rotation center of the mirror 5 is S, and the vertical distance between the upper end of the displacement rod 6 and the rotation center of the mirror 5 is H when the mirror 5 is at the mirror position 1. According to the reflection law, α+γ=β.

[0029] In triangle Q1OQ, ∠QOQ1=90°-∠QQ1O=α, and QQ1=QO•tanα=K•tanα. In triangle Q1bO4, ; Then, .

[0030] Similarly, we can obtain , and α+γ=β, we obtain: . From ab=QQ5-QQ4, we obtain: , After rearrangement, we obtain: .

[0031] Since L is relatively small, we have ; . Thus, the relationship between L and ab can be obtained.

[0032] Optionally, the displacement rod 6 is a telescopic rod with a fixed locking function. Before measurement, the length of the displacement rod 6 is adjusted according to the distance between the assembly reference surface and the surface to be measured, so that the use range of the detection device based on the optical lever principle is wider. During measurement, the displacement rod 6 is fixed and locked, and the length remains unchanged, so as to ensure the accuracy of the measurement result.

[0033] Optionally, the support comprises a first sub-support 42, a second sub-support 41, and two limiting supports 43, the first sub-support 42 and the second sub-support 41 are vertically arranged, the lower end of the second sub-support 41 is fixedly connected to the first sub-support 42, the mirror mounting plate 10 is rotationally arranged at the upper end of the second sub-support 41, one end of the first sub-support 42 is fixedly connected to the reference seat 1, the displacement rod 6 is slidably arranged at the other end of the first sub-support 42, the two limiting supports 43 are both fixedly connected to the second sub-support 41, the two limiting supports 43 are arranged in a spaced manner and are both located above the first sub-support 42, and the displacement rod 6 is slidably arranged in the two limiting supports 43.

[0034] Optionally, the detection device based on the optical lever principle further comprises a spring 8, the spring 8 is sleeved on the displacement rod 6, and the two ends of the spring 8 abut against one of the limiting supports 43 and the first sub-support 42 respectively. The spring 8 is used for resetting the displacement rod 6.

[0035] Optionally, a first linear bearing is arranged between the first sub-support 42 and the displacement rod 6, and a second linear bearing is arranged between the two limiting supports 43 and the displacement rod 6. The first linear bearing and the second linear bearing can guide the movement of the displacement rod 6, and can ensure the detection accuracy.

[0036] Optionally, the mirror mounting plate 10 is fixedly provided with a rotating shaft, the rotating shaft is rotationally arranged in the second sub-support 41, and a bearing is arranged between the rotating shaft and the second sub-support 41.

[0037] The application also provides a high-precision assembly error detection method, which adopts the detection device based on the optical lever principle. S1: The reference seat 1 is placed on the assembly reference surface, the probe 7 is lightly touched on the surface to be detected, at this time, the laser emitted by the laser emitting device 3 is emitted to the photosensitive position sensor 2 by the mirror 5, and a light spot is formed.

[0038] S2: The reference seat 1 moves along the assembly reference surface, and the probe 7 also moves on the surface to be detected. If the assembly reference surface is not parallel to the surface to be detected, the probe 7 will produce axial displacement along with the topography of the surface to be detected, the displacement rod 6 drives the mirror mounting plate 10 to rotate, the mirror mounting plate 10 drives the mirror 5 to move, the position of the light spot on the photosensitive position sensor 2 will change, and the photosensitive position sensor 2 outputs the relative displacement data of the light spot in real time.

[0039] S3: According to the relative displacement data of the light spot, the assembly error data is obtained.

[0040] Specifically, in S3, according to the relative displacement data of the light spot, the assembly error data is obtained, which comprises: S31: A coordinate graph is established, the displacement data of the reference seat 1 is taken as the abscissa, and the displacement data of the light spot is taken as the ordinate, so as to obtain a line graph of the position of the light spot.

[0041] S32: In the spot position line graph, the difference between the highest point and the lowest point of the line is the assembly error.

[0042] S4: Repeat S1-S3 multiple times to obtain multiple assembly error data.

[0043] S5: Obtain the assembly error value by averaging the multiple assembly error data.

[0044] The high-precision assembly error detection method can detect both annular detection planes and ordinary planes. When detecting the assembly error of an annular plane, the probe 7 walks along the annular plane, for example, the assembly error of a bearing end face, the probe 7 walks along the annular area of the bearing end face, and the obtained spot position line graph of the bearing end face is as shown in Figure 4 The difference between the highest point and the lowest point of the line in the graph is the assembly error of the bearing.

[0045] When detecting the assembly error of an ordinary plane, the probe 7 walks from one end of the plane to the other end of the plane along a straight line, and the obtained spot position line graph of the plane is as shown in Figure 5 The difference between the highest point and the lowest point of the line in the graph is the assembly error of the plane.

[0046] The application also provides a flatness detection method using the above detection device based on the optical lever principle, comprising: S1: The reference plane is parallel to the surface to be detected, the reference seat 1 is placed on the reference plane, and the probe 7 lightly touches the surface to be detected. At this time, the laser emitted by the laser emitting device 3 is emitted to the photosensitive position sensor 2 by the reflector 5, forming a light spot. The reference plane is a smooth plane, i.e., a plane with infinite small roughness.

[0047] S2: The reference seat 1 moves along the reference plane, and the probe 7 also moves on the surface to be detected. The probe 7 produces axial displacement with the topography of the surface to be detected, the displacement rod 6 drives the reflector mounting plate 10 to rotate, the position of the light spot on the photosensitive position sensor 2 changes, and the photosensitive position sensor 2 outputs the relative displacement data of the light spot in real time.

[0048] S3: Obtain the flatness data of the surface to be detected according to the relative displacement data of the light spot.

[0049] Specifically, in S3, obtaining the flatness data of the surface to be detected according to the relative displacement data of the light spot comprises: S31: Establish a coordinate graph, take the displacement data of the reference seat 1 as the abscissa, and take the displacement data of the light spot as the ordinate to obtain a light spot position waveform graph.

[0050] S32: In the spot position waveform, the vertical coordinate difference between the highest point and the lowest point of the waveform is the flatness of the surface to be measured. Figure 6 As shown, the vertical coordinate difference between the highest point and the lowest point of the waveform is the flatness of the surface to be measured.

[0051] S4: Repeat S1-S3 multiple times to obtain flatness data of multiple surfaces to be measured.

[0052] S5: averaging the flatness data of multiple surfaces to be measured to obtain the final flatness of the surface to be measured.

[0053] Obviously, the embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The embodiments do not describe all details in detail, nor do they limit the invention to the specific embodiments described. Numerous modifications and variations are possible based on the contents of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. It is not necessary and impossible to list all embodiments here.

Claims

1. A detection device based on the optical lever principle, characterized in that: include: Reference seat (1); A laser emitting device (3) is fixedly mounted on the reference base (1) and is used for emitting laser light upward; A sensor bracket (9) and a photosensitive position sensor (2), wherein the sensor bracket (9) is fixedly arranged at one end of the reference base (1), the photosensitive position sensor (2) is fixedly arranged on the sensor bracket (9), and the photosensitive position sensor (2) and the laser emitting device (3) are spaced apart. A bracket is fixedly arranged at the other end of the reference seat (1); A reflector mounting plate (10), a reflector (5) and a displacement rod (6); the reflector mounting plate (10) is rotatably mounted on a bracket; the reflector (5) is fixedly mounted on the reflector mounting plate (10); the reflector (5) is located above the laser emitting device (3); the reflector (5) can reflect the laser emitted by the laser emitting device (3) to the photosensitive position sensor (2); the reflector mounting plate (10) is provided with a slide groove; a slider is slidably arranged in the slide groove; the upper end of the displacement rod (6) is hinged to the slider; the reflector (5) and the displacement rod (6) are respectively located at two ends of the rotation center of the reflector mounting plate (10); the horizontal distance between the laser emitted by the laser emitting device (3) and the rotation center of the reflector mounting plate (10) is greater than the horizontal distance between the displacement rod (6) and the rotation center of the reflector mounting plate (10); the displacement rod (6) is slidably penetrated in the bracket; the lower end of the displacement rod (6) is detachably provided with a probe (7); the probe (7) is used to contact the surface to be measured.

2. The detection device based on the optical lever principle according to claim 1, characterized in that: The displacement rod (6) is a telescopic rod with a fixing and locking function.

3. The detection device based on the optical lever principle according to claim 1, characterized in that: The bracket comprises a first sub-bracket (42), a second sub-bracket (41) and two limit brackets (43); the first sub-bracket (42) and the second sub-bracket (41) are arranged vertically; the lower end of the second sub-bracket (41) is fixedly connected to the first sub-bracket (42); the reflector mounting plate (10) is rotatably arranged on the upper end of the second sub-bracket (41); one end of the first sub-bracket (42) is fixedly connected to the reference seat (1); the displacement rod (6) is slidably arranged through the other end of the first sub-bracket (42); the two limit brackets (43) are both fixedly connected to the second sub-bracket (41); the two limit brackets (43) are arranged at intervals and are both located above the first sub-bracket (42); and the displacement rod (6) is slidably arranged through the two limit brackets (43).

4. The detection device based on the optical lever principle according to claim 3, characterized in that: It also includes a spring (8), which is sleeved on the displacement rod (6), and two ends of the spring (8) respectively abut against a limiting bracket (43) and a first sub-bracket (42).

5. The detection device based on the optical lever principle according to claim 3, characterized in that: A first linear bearing is provided between the first sub-bracket (42) and the displacement rod (6), and a second linear bearing is provided between each of the two limiting brackets (43) and the displacement rod (6).

6. The detection device based on the optical lever principle according to claim 3, characterized in that: The reflector mounting plate (10) is fixedly provided with a rotating shaft, the rotating shaft is rotatably arranged through the second sub-bracket (41), and a bearing is provided between the rotating shaft and the second sub-bracket (41).

7. A high-precision assembly error detection method, characterized in that: The detection device based on the optical lever principle according to any one of claims 1 to 6 comprises: S1: Place the reference base (1) on the assembly reference surface, and lightly touch the surface to be measured with the probe (7). At this time, the laser emitted by the laser emitting device (3) is reflected by the reflector (5) onto the photosensitive position sensor (2), forming a light spot; S2: The reference seat (1) moves along the assembly reference plane, and the probe (7) also moves on the surface to be measured. If the assembly reference plane is not parallel to the surface to be measured, the probe (7) will produce axial displacement along with the topography of the surface to be measured, and the displacement rod (6) drives the reflector mounting plate (10) to rotate, and the reflector mounting plate (10) drives the reflector (5) to move, and the position of the light spot on the photosensitive position sensor (2) will change. The photosensitive position sensor (2) outputs the relative displacement data of the light spot in real time; S3: Obtain assembly error data based on the relative displacement data of the light spot; S4: Repeat S1-S3 multiple times to obtain multiple assembly error data; S5: Calculate the average of multiple assembly error data to obtain the assembly error value.

8. The high-precision assembly error detection method according to claim 7, characterized in that: In S3, based on the relative displacement data of the light spot, the assembly error data is obtained, including: S31: Establish a coordinate diagram, use the displacement data of the reference base (1) as the horizontal coordinate, and the relative displacement data of the light spot as the vertical coordinate, to obtain a line diagram of the light spot position; S32: In the line graph of the light spot position, the vertical coordinate difference between the highest point and the lowest point of the line is the assembly error.

9. A flatness detection method, characterized in that: The detection device based on the optical lever principle according to any one of claims 1 to 6 comprises: S1: The reference plane is parallel to the surface to be measured. The reference base (1) is placed on the reference plane. The probe (7) lightly touches the surface to be measured. At this time, the laser emitted by the laser emitting device (3) is reflected by the reflector (5) to the photosensitive position sensor (2), forming a light spot. S2: The reference seat (1) moves along the reference plane, and the probe (7) also moves on the surface to be measured. The probe (7) generates axial displacement according to the topography of the surface to be measured. The displacement rod (6) drives the reflector mounting plate (10) to rotate, and the position of the light spot on the photosensitive position sensor (2) changes. The photosensitive position sensor (2) outputs the relative displacement data of the light spot in real time. S3: Obtain the flatness data of the surface to be measured based on the relative displacement data of the light spot; S4: Repeat S1-S3 multiple times to obtain flatness data of multiple surfaces to be measured; S5: averaging the flatness data of multiple surfaces to be measured to obtain the final flatness of the surface to be measured.

10. The flatness detection method according to claim 9, wherein: In S3, based on the relative displacement data of the light spot, the flatness data of the surface to be measured is obtained, including: S31: Establish a coordinate diagram, use the displacement data of the reference base (1) as the horizontal coordinate, and the relative displacement data of the light spot as the vertical coordinate, to obtain a light spot position waveform diagram; S32: In the spot position waveform, the vertical coordinate difference between the highest point and the lowest point of the waveform is the flatness of the surface to be measured.

Images