Monochromator and assembling method of monochromator

Abstract

The monochromator comprises a base, a supporting seat, a grating assembly, a posture adjusting mechanism and a sine mechanism, the supporting seat is movably arranged on the base, the grating assembly comprises a grating, the grating is arranged on the supporting seat, the posture adjusting mechanism is arranged on the supporting seat and connected with the grating, and the sine mechanism is arranged on the supporting seat and connected with the grating. The posture adjusting mechanism is used for adjusting the posture of the grating, and the sine mechanism is arranged on the base, connected with the grating and used for controlling the grating assembly to rotate relative to the supporting base. According to the monochromator provided by the embodiment of the invention, the movable supporting seat, the posture adjusting mechanism and the sine mechanism are arranged, so that the grating posture and grating scanning can be accurately and quickly collimated, the efficiency and precision of the grating posture and grating scanning can be improved to a certain extent, and data collected by the monochromator in a subsequent test is more accurate.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of monochromator, in particular to a monochromator and an assembling method of the monochromator. BACKGROUND

[0002] Synchrotron radiation light source plays an important role in many scientific fields, and the monochromator is a core device inside the synchrotron radiation light source. The monochromator is used to separate the polychromatic light into monochromatic light required by experiments. The high spectral resolution of the monochromator is not only related to the optical design, but also closely related to the key technologies such as error control in engineering implementation. Among them, the collimation accuracy of the grating attitude and the grating scanning in the monochromator is the basis for ensuring the realization of the high spectral resolution index of the optical design.

[0003] However, in the prior art, the adjustment accuracy of the related adjustment mechanism for the collimation of the grating attitude and the grating scanning is low, which affects the working performance of the monochromator. SUMMARY

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application provides a monochromator which can accurately and quickly collimate the grating attitude and the grating scanning, thereby improving the efficiency and accuracy of the grating attitude and the grating scanning to some extent, making the data collected by the monochromator in subsequent tests more accurate, and solving the technical problem of low adjustment accuracy of the related adjustment mechanism for the collimation of the grating attitude and the grating scanning.

[0005] The present application also aims to provide an assembling method of the above-mentioned monochromator.

[0006] The monochromator according to the embodiments of the present application comprises a base, a support seat movably arranged on the base, a grating assembly comprising a grating arranged on the support seat, an attitude adjustment mechanism arranged on the support seat and connected to the grating, the attitude adjustment mechanism being used for adjusting the attitude of the grating, and a sinusoidal mechanism arranged on the base and connected to the grating, the sinusoidal mechanism being used for controlling the rotation of the grating assembly relative to the support seat.

[0007] The monochromator according to the embodiments of the present application, by movably arranging the support seat on the base, when the grating is arranged on the support seat, the action of the grating can be controlled by the support seat. At the same time, by arranging the attitude adjustment mechanism for adjusting the attitude of the grating and the sinusoidal mechanism for controlling the rotation of the grating assembly relative to the support seat, the grating can be adjusted by the cooperation of the support seat, the attitude adjustment mechanism and the sinusoidal mechanism, the collimation of the grating attitude and the grating scanning can be accurately and quickly performed, the efficiency and accuracy of the grating attitude and the grating scanning can be improved to some extent, the data collected by the monochromator in subsequent tests can be more accurate, and the working performance of the monochromator can be ensured to some extent.

[0008] In some embodiments, the monochromator further comprises a first adjusting mechanism disposed on the base and cooperating with the support seat, the first adjusting mechanism being configured to adjust the position of the support seat relative to the base.

[0009] In some embodiments, the first adjusting mechanism comprises a fixed member disposed on the base and a first moving member movably disposed on the fixed member and abuttingly cooperating with the peripheral wall of the support seat, the first moving member being configured to drive the support seat to move relative to the base.

[0010] In some embodiments, the first moving member is a first jackscrew.

[0011] In some embodiments, the first adjusting mechanism comprises a plurality of first adjusting mechanisms, the plurality of first adjusting mechanisms being disposed at intervals along the outer periphery of the support seat.

[0012] In some embodiments, the posture adjusting mechanism comprises an adjusting seat disposed on the support seat, a mounting seat movably disposed on the adjusting seat, the mounting seat being hollowed to form a mounting cavity inside, the grating being disposed in the mounting cavity, and a second adjusting mechanism connected to the mounting seat, the second adjusting mechanism being configured to adjust the position of the mounting seat relative to the support seat to adjust the posture of the grating.

[0013] In some embodiments, the second adjusting mechanism comprises a second moving member configured to adjust the pitch angle and the yaw angle of the mounting seat relative to the support seat, and a third moving member configured to adjust the height of the mounting seat relative to the support seat.

[0014] In some embodiments, the second moving member comprises a second jackscrew and a third jackscrew, the second jackscrew and the third jackscrew being disposed on one side of the mounting seat and between the mounting seat and the adjusting seat, the second jackscrew and the third jackscrew being disposed at intervals in the up-down direction of the adjusting seat, and the second jackscrew and the third jackscrew being configured to control the movement of the mounting seat relative to the adjusting seat, respectively.

[0015] In some embodiments, the second jackscrew and / or the third jackscrew have two second jackscrews and / or two third jackscrews, the two second jackscrews and / or the two third jackscrews being disposed at intervals in the left-right direction of the adjusting seat.

[0016] In some embodiments, the third moving member comprises a fourth jackscrew and two fifth jackscrews, the fourth jackscrew and the fifth jackscrews are respectively arranged on opposite sides of the adjusting seat in the up-down direction, the fourth jackscrew is arranged between the mounting seat and the adjusting seat, and the two fifth jackscrews are arranged in the left-right direction of the adjusting seat, and the two fifth jackscrews are respectively used for controlling the movement of the mounting seat relative to the adjusting seat.

[0017] In some embodiments, the monochromator further comprises a raster scanning seat rotatably arranged on the upper surface of the support seat through a rotating shaft, the raster assembly is arranged on the raster scanning seat, and the sinusoidal mechanism is connected to the raster scanning seat and used for controlling the rotation of the raster scanning seat relative to the support seat.

[0018] In some embodiments, the monochromator further comprises a driving member, the sinusoidal mechanism comprises an output shaft, one end of the output shaft is connected to the driving member, the driving member is used for driving the reciprocating movement of the output shaft, a transmission member, one end of the transmission member is fixedly connected to the raster scanning seat, and the other end of the transmission member is matched with the other end of the output shaft to form a rotating pair, and the movement of the output shaft is used for driving the rotation of the transmission member.

[0019] In some embodiments, the monochromator further comprises a third adjusting mechanism used for leveling the support seat.

[0020] In some embodiments, the support seat comprises a support platform, the raster is arranged on the support platform, at least part of the support platform is arranged opposite to the base, the third adjusting mechanism is arranged between the support platform and the base, and the third adjusting mechanism is used for controlling the swinging of the support platform relative to the base.

[0021] In some embodiments, the third adjusting mechanism comprises a plurality of fourth moving members, the plurality of fourth moving members are arranged in the circumferential direction of the support platform and arranged between the support platform and the base, and the plurality of fourth moving members are respectively used for controlling the movement of the support platform relative to the base.

[0022] In some embodiments, the monochromator further comprises a fourth adjusting mechanism used for leveling the base.

[0023] In some embodiments, the fourth adjusting mechanism comprises a plurality of adjustable bolts, the plurality of adjustable bolts are arranged at the bottom of the base, and the plurality of adjustable bolts are respectively used for controlling the movement of the base.

[0024] In some embodiments, the monochromator further comprises a laser pointer assembly disposed on the base, the laser pointer assembly being configured to determine an installation position of the monochromator.

[0025] In some embodiments, the laser pointer assembly comprises a laser pointer, a first reflector and a second reflector, the first reflector being disposed opposite to the second reflector with respect to the laser pointer, the first reflector being configured to reflect light emitted by the laser pointer to the second reflector.

[0026] According to the monochromator assembly method of the embodiments of the present application, the monochromator is the monochromator described above, and the monochromator assembly method comprises: setting up a level, leveling the base based on the level; setting up a first theodolite and a second theodolite, and installing a support base based on the simulated light paths of the first theodolite and the second theodolite; installing a grating assembly, a posture adjusting mechanism and a sinusoidal mechanism; adjusting the posture of the grating through the posture adjusting mechanism; and driving the grating assembly to rotate through the sinusoidal mechanism.

[0027] According to the monochromator assembly method of the embodiments of the present application, the accuracy of subsequent monochromator test data can be improved to a certain extent, and time and labor costs can be saved.

[0028] Additional aspects and advantages of the present application will become apparent from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0029] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description, taken in conjunction with the accompanying drawings, in which:

[0030] Figure 1 It is a front perspective view of the monochromator of some embodiments of the present application.

[0031] Figure 2 It is a top view of the monochromator of some embodiments of the present application.

[0032] Figure 3 It is a front view of the monochromator of some embodiments of the present application, with some structures omitted.

[0033] Figure 4 It is a top view of the monochromator of some embodiments of the present application, with some structures omitted.

[0034] Figure 5 It is a schematic view of the posture adjusting mechanism and the grating assembly of some embodiments of the present application.

[0035] Figure 6 It is a schematic view of the cavity bottom plate and the support base of some embodiments of the present application.

[0036] Figure 71 is a top view of a support base and a grating scanning base according to some embodiments of the present invention.

[0037] Figure 8 1. The figure shows a front view of a support base and a grating scanning base according to some embodiments of the present invention.

[0038] Figure 9 Schematic diagram of the posture adjustment mechanism of some embodiments of the present invention.

[0039] Figure 10 1 is a top view of a posture adjustment mechanism according to some embodiments of the present invention.

[0040] Figure 11 for Figure 4 The monochromator in the figure omits part of the top view of the structure.

[0041] Figure 12 for Figure 6 Top view of .

[0042] Figure 13 Flowchart of a method for assembling a monochromator according to some embodiments of the present invention.

[0043] Figure 14 Schematic diagram of the cooperation between the monochromator base and the optical platform according to some embodiments of the present invention.

[0044] Figure 15 This is a top view of the monochromator base and the optical platform in some embodiments of the present invention.

[0045] Figure 16 Schematic diagram of the monochromator assembly according to some embodiments of the present invention.

[0046] Reference numerals:

[0047] 1000, monochromator;

[0048] 100, base;

[0049] 200, support base; 210, support platform;

[0050] 300, grating assembly; 310, grating;

[0051] 400, posture adjustment mechanism;

[0052] 410, adjustment seat; 411, first adjustment seat; 412, second adjustment seat;

[0053] 420, mounting seat;

[0054] 430, second regulating mechanism;

[0055] 431, second moving member; 4311, second top screw; 4312, third top screw;

[0056] 432 third moving part; 4321 fourth set screw; 4322 fifth set screw;

[0057] 433 second fastener;

[0058] 500 sinusoidal mechanism; 510 output shaft; 520 transmission part; 530 elastic part;

[0059] 600 first adjusting mechanism; 610 fixed part; 620 first moving part; 630 first fastener;

[0060] 700 grating scanning seat; 710 rotating shaft;

[0061] 800 driving part;

[0062] 900 third adjusting mechanism;

[0063] 910 fourth moving part;

[0064] 911 sixth set screw; 912 seventh set screw; 916 eighth set screw;

[0065] 913 fifth fastener; 914 third fastener; 915 fourth fastener;

[0066] 920 fourth adjusting mechanism; 921 adjustable bolt;

[0067] 930 laser pen assembly; 931 laser pen; 932 first reflector; 933 second reflector;

[0068] 940 incident slit assembly; 941 first pipe;

[0069] 950 exit slit assembly; 951 second pipe;

[0070] 960 cavity; 961 cavity bottom plate;

[0071] 1100 level; 1200 first theodolite; 1300 second theodolite;

[0072] 970 optical platform; 980 ceramic gauge block; 990 tool slit. DETAILED DESCRIPTION

[0073] Embodiments of the present application are described in detail below with reference to the attached drawing figures, wherein the same or like reference numerals and characters throughout the figures denote the same or like components or elements having the same or similar functions. The embodiments described below are exemplary and are not intended to be limiting of the present application. Other embodiments can be readily devised without departing from the spirit of the present application.

[0074] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0075] One monochromator 1000 according to an embodiment of the present application is described below with reference to the accompanying drawings of the specification.

[0076] In combination Figures 1-5 As shown, one monochromator 1000 according to an embodiment of the present application includes a base 100, a support seat 200, a grating assembly 300, a posture adjusting mechanism 400 and a sinusoidal mechanism 500.

[0077] Among them, the support seat 200 is movably arranged on the base 100. Here it can be understood that the support seat 200 is arranged on the base 100 and can move relative to the base 100, so that the position of the support seat 200 relative to the base 100 can be adjusted, thereby facilitating the adjustment of the position of the support seat 200 relative to the base 100.

[0078] In some embodiments, the base 100 serves as the basic structure of the entire monochromator 1000, providing stable support for other components of the monochromator 1000 (such as the support seat 200), ensuring that they maintain the correct position and relative relationship during installation, thereby ensuring the normal operation of the monochromator 1000 and the accuracy of the optical path.

[0079] In combination Figure 4 And Figure 5 As shown, the grating assembly 300 includes a grating 310, which is arranged on the support seat 200. Since the support seat 200 is movably arranged on the base 100, by arranging the grating 310 on the support seat 200, the grating 310 can be arranged on the base 100 while its position relative to the base 100 can be adjusted, facilitating the adjustment of the position of the grating 310 and changing its diffraction angle for the measured light, thereby selecting different wavelengths of light output to meet the needs of various experiments for specific wavelengths.

[0080] In a specific example, the support seat 200 is arranged and movably arranged on the base 100 to facilitate the adjustment of the position of the grating 310, thereby selecting different wavelengths of light output to meet the needs of various experiments for specific wavelengths. In a specific example, the support seat 200 is arranged and movably arranged on the base 100 to facilitate the adjustment of the position of the grating 310, thereby selecting different wavelengths of light output to meet the needs of various experiments for specific wavelengths.

[0081] In combination Figure 3 And Figure 5 As shown in FIG. 4, the attitude adjusting mechanism 400 is arranged on the support base 200 and connected with the grating 310, and the attitude adjusting mechanism 400 is used to adjust the attitude of the grating 310. That is, the grating 310 and the attitude adjusting mechanism 400 are both arranged on the support base 200, and the attitude adjusting mechanism 400 is connected with the grating 310, so that the attitude of the grating 310 can be adjusted, and the grating 310 can be in a precise attitude, and the working performance of the grating 310 can be greatly improved.

[0082] At the same time, by arranging the attitude adjusting mechanism 400 on the support base 200, the attitude adjusting mechanism 400 can be arranged close to the grating 310 to connect the grating 310, and the support base 200 can also be used to support the attitude adjusting mechanism 400, so as to ensure the stability of the attitude adjusting mechanism 400, and the attitude adjusting mechanism 400 can maintain a certain stability when adjusting the attitude of the grating 310, so as to avoid the attitude adjusting mechanism 400 from shaking when adjusting the attitude of the grating 310, and further ensure the accuracy of the attitude adjusting mechanism 400 when adjusting the attitude of the grating 310, so that the grating 310 can be in a precise attitude, and the working performance of the grating 310 can be greatly improved.

[0083] In a specific example, when the grating 310 needs to be adjusted, the support base 200 can be first controlled to move relative to the base 100 to adjust the positions of the attitude adjusting mechanism 400 and the grating 310 at the same time, and then the attitude of the grating 310 is adjusted by the attitude adjusting mechanism 400 to achieve the purpose of adjusting the grating 310.

[0084] In combination Figure 4 And Figure 5 As shown in FIG. 5, the sine mechanism 500 is arranged on the base 100 and connected with the grating 310, and the sine mechanism 500 is used to control the rotation of the grating assembly 300 relative to the support base 200. By using the sine mechanism 500 to control the rotation of the grating 310 relative to the support base 200, the grating 310 can be further adjusted, and the working performance of the grating 310 can be greatly improved.

[0085] In a specific example, the sine mechanism 500 can be used to make the grating 310 rotate continuously, so that the grating 310 can continuously select and adjust the wavelength within a certain wavelength range. This continuous adjustability enables the monochromator 1000 to comprehensively scan and analyze light of different wavelengths. At the same time, since the sine mechanism 500 usually has good stability and reliability, it can provide stable power transmission for the rotation of the grating 310, which helps to ensure the smoothness of the rotation of the grating 310 relative to the support base 200, reduces vibration and shaking, and thus improves the measurement accuracy and repeatability of the monochromator 1000.

[0086] In addition, by arranging the sine mechanism 500 on the base 100, the sine mechanism 500 can be supported by the base 100, the difficulty of supporting the sine mechanism 500 is reduced, the position stability of the sine mechanism 500 is improved, and the working performance of the sine mechanism 500 is ensured to a certain extent.

[0087] From the above structure, the monochromator 1000 of the embodiment of the application can adjust the grating 310 by arranging the support seat 200 movably on the base 100 and arranging the grating 310 on the support seat 200.

[0088] Meanwhile, the application further arranges the attitude adjusting mechanism 400 for adjusting the attitude of the grating 310 and the sine mechanism 500 for controlling the rotation of the grating assembly 300 relative to the support seat 200, so as to adjust the attitude of the grating 310 and control the rotation of the grating 310, facilitate the collimation of the scanning of the grating 310, ensure the working performance of the grating 310 to a certain extent, and further improve the working performance of the monochromator 1000.

[0089] In summary, the monochromator 1000 of the application can precisely and quickly adjust the attitude and scanning collimation of the grating 310 by arranging the movable support seat 200, the attitude adjusting mechanism 400 and the sine mechanism 500, can improve the attitude and scanning efficiency and precision of the grating 310 to a certain extent, make the data collected by the monochromator 1000 in the subsequent test more accurate, and ensure the working performance of the monochromator 1000 to a certain extent.

[0090] It can be understood that, compared with the prior art, the application adjusts the grating 310 by arranging the movable support seat 200, the attitude adjusting mechanism 400 and the sine mechanism 500, precisely and quickly adjusts the attitude of the grating 310 and the collimation of the scanning of the grating 310, can improve the attitude and scanning efficiency and precision of the grating to a certain extent, can make the grating 310 quickly and accurately select and adjust the wavelength in a certain wavelength range, make the data collected by the monochromator 1000 in the test more accurate, and ensure the working performance of the monochromator 1000 to a certain extent.

[0091] In some embodiments, in combination with Figure 1 and Figure 2As shown, the monochromator 1000 further comprises a cavity 960, the cavity 960 is internally in a vacuum environment, the grating assembly 300, the attitude adjusting mechanism 400 and the support seat 200 are all arranged in the cavity 960. The cavity 960 can play a role in protecting the grating assembly 300, the attitude adjusting mechanism 400 and the support seat 200, to a certain extent, the substances outside the cavity 960 can be prevented from entering the cavity 960 to affect the grating assembly 300, the attitude adjusting mechanism 400 and the support seat 200, thereby avoiding the external substances from interfering with the normal work of the grating assembly 300, the attitude adjusting mechanism 400 and the support seat 200, to a certain extent, the working performance of the grating assembly 300, the attitude adjusting mechanism 400 and the support seat 200 is ensured, so that the working performance of the monochromator 1000 can be ensured.

[0092] In some embodiments, in combination with Figure 1 , Figure 4 and Figure 6 As shown, the bottom of the cavity 960 is provided with a cavity bottom plate 961, the cavity bottom plate 961 is arranged on the base 100, and the support seat 200 is movably arranged on the cavity bottom plate 961. The support seat 200 is movably arranged on the base 100, and the cooperation difficulty of the support seat 200 and the base 100 is reduced, and the support seat 200 is arranged in the cavity 960, which is convenient for protecting the support seat 200 by the cavity 960, and the working performance of the support seat 200 is ensured to a certain extent.

[0093] In some embodiments, as shown in Figure 1 and Figure 2 The monochromator 1000 further comprises an incident slit assembly 940 and an exit slit assembly 950, the incident slit assembly 940 is connected to the inside of the cavity 960 through a first pipe 941, and the exit slit assembly 950 is connected to the inside of the cavity 960 through a second pipe 951 respectively. The incident slit assembly 940 is used for receiving light emitted by a light source and transmitting into the cavity 960, so as to realize the transmission of light to the grating 310, and the exit slit assembly 950 is used for receiving and outputting the light diffracted by the grating 310 in the cavity 960, to a certain extent, the working performance of the monochromator 1000 is ensured.

[0094] In some embodiments, in combination with Figure 4 , Figure 6 and Figure 7As shown, the monochromator 1000 further comprises a first adjusting mechanism 600, which is arranged on the base 100 and cooperates with the support seat 200, and is used to adjust the position of the support seat 200 relative to the base 100. In this way, the position of the support seat 200 relative to the base 100 is adjustable, thereby facilitating the adjustment of the position of the grating 310 by the support seat 200, and further changing the diffraction angle of the grating 310 to the measured light, so as to select light output of different wavelengths, meet the needs of various experiments for specific wavelengths, ensure the working performance of the grating 310 to a certain extent, and reduce the difficulty of adjusting the position of the grating 310.

[0095] It should be noted that when the monochromator 1000 is provided with the cavity bottom plate 961 and the cavity bottom plate 961 is arranged on the base 100, the first adjusting mechanism 600 can be arranged on the cavity bottom plate 961 and cooperates with the support seat 200 (as shown in Figure 6 In this way, the position of the support seat 200 relative to the base 100 is adjustable, thereby facilitating the adjustment of the position of the grating 310 by the support seat 200, and further changing the diffraction angle of the grating 310 to the measured light, so as to select light output of different wavelengths, meet the needs of various experiments for specific wavelengths, ensure the working performance of the grating 310 to a certain extent, and reduce the difficulty of adjusting the position of the grating 310.

[0096] In some embodiments, in combination with Figure 6 and Figure 7 As shown, the first adjusting mechanism 600 comprises a fixed part 610 and a first moving part 620, the fixed part 610 is arranged on the base 100, the first moving part 620 is movably arranged on the fixed part 610 and cooperates with the circumferential wall of the support seat 200, and the first moving part 620 is used to drive the support seat 200 to move relative to the base 100. In this way, the first adjusting mechanism 600 drives the support seat 200 to move relative to the base 100, thereby achieving the purpose of adjusting the position of the support seat 200 relative to the base 100 by the first adjusting mechanism 600, so that the position of the support seat 200 relative to the base 100 is adjustable, reducing the difficulty of adjusting the position of the support seat 200, thereby facilitating the adjustment of the position of the grating 310 by the support seat 200, ensuring the working performance of the grating 310 to a certain extent, and reducing the difficulty of adjusting the position of the grating 310.

[0097] In some embodiments, the fixed part 610 can be fixedly connected to the base 100 by welding, bonding or bolt connection, so as to stably arrange the fixed part 610 on the base 100, improve the position stability of the fixed part 610, and ensure the working performance of the fixed part 610 to a certain extent.

[0098] In a specific example, the fixed part 610 is fixedly connected to the cavity bottom plate 961 by welding, bonding or bolt connection.

[0099] In some embodiments, the first moving part 620 is a first jackscrew. In this case, the jackscrew can be understood as the first moving part 620 being a first moving rod, and the surface of the first moving rod is provided with threads, so that the first moving part 620 is formed into a first jackscrew. By setting the first moving part 620 into a first jackscrew, the structure of the first moving part 620 can be simplified, and the use cost and arrangement difficulty of the first moving part 620 can be reduced while achieving the driving of the support base 200 relative to the base 100 by the first moving part 620.

[0100] It should be noted that when the first moving part 620 is formed into a first jackscrew, the fixing part 610 is provided with a matching thread matched with the first jackscrew. When it is necessary to drive the support base 200 to move relative to the base 100, the first moving part 620 can be manually rotated to achieve the control of the movement of the first moving part 620 relative to the fixing part 610. Since the first moving part 620 is in abutting engagement with the peripheral wall of the support base 200, when the first moving part 620 moves, the support base 200 can be driven to move relative to the base 100 by the first moving part 620, thereby reducing the difficulty of moving the support base 200.

[0101] In some embodiments, in combination with Figure 6 and Figure 7 As shown, the first adjusting mechanism 600 further comprises a first fastener 630 for fixing the first moving part 620. In this way, after the support base 200 is driven to move into position by the first moving part 620, the first moving part 620 can be fixed by the first fastener 630 to avoid displacement of the first moving part 620 relative to the fixing part 610, thereby avoiding displacement of the support base 200 after it has been moved into position, improving the position stability of the support base 200, and thereby improving the position stability of the grating 310, and to some extent, ensuring the working performance of the grating 310.

[0102] In some embodiments, as shown in Figure 7 The first fastener 630 is a nut that is rotatably connected to the first jackscrew to fix the first jackscrew.

[0103] In some embodiments, as shown in Figure 7 and Figure 8 The first adjusting mechanism 600 comprises a plurality of first adjusting mechanisms 600, and the plurality of first adjusting mechanisms 600 are arranged at intervals along the outer periphery of the support base 200. The cooperation of the plurality of first adjusting mechanisms 600 can not only achieve the adjustment of the position of the support base 200 relative to the base 100, but also can be used to fix the support base 200 after the adjustment of the support base 200 is completed, thereby improving the position accuracy of the support base 200, and thereby improving the position accuracy of the grating 310 in receiving and diffracting the measured light.

[0104] In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specified.

[0105] In some embodiments, as shown in Figure 3 , Figure 4 , Figure 5 and Figure 9 , the posture adjusting mechanism 400 comprises an adjusting seat 410, a mounting seat 420 and a second adjusting mechanism 430, and the adjusting seat 410 is arranged on the support seat 200. In order to arrange the posture adjusting mechanism 400 on the support seat 200, the matching difficulty of the posture adjusting mechanism 400 and the support seat 200 is reduced, so as to facilitate the support of the posture adjusting mechanism 400 by the support seat 200, improve the position stability of the posture adjusting mechanism 400, and ensure the working performance of the posture adjusting mechanism 400 to a certain extent.

[0106] It should be noted that the adjusting seat 410 arranged on the support seat 200 can be fixed by welding, bonding or bolt connection, etc., which is not limited here.

[0107] In some embodiments, the mounting seat 420 is movably arranged in the adjusting seat 410, the mounting seat 420 is hollow inside to form a mounting cavity, and the grating 310 is arranged in the mounting cavity. Among them, by arranging the grating 310 in the mounting cavity, the grating 310 is arranged in the posture adjusting mechanism 400, so as to realize the matching connection of the posture adjusting mechanism 400 and the grating 310, and facilitate the adjustment of the posture of the grating 310 by the posture adjusting mechanism 400.

[0108] At the same time, the mounting cavity in the mounting seat 420 also provides stable support for the grating 310, which to a certain extent avoids the shaking, displacement or deformation of the grating 310 during use, so as to ensure the optical performance and measurement accuracy of the grating 310.

[0109] In addition, by movably arranging the mounting seat 420 in the adjusting seat 410, the position of the mounting seat 420 relative to the adjusting seat 410 is adjustable, and since the grating 310 is arranged in the mounting seat 420 and the adjusting seat 410 is arranged on the support seat 200, the position of the grating 310 relative to the support seat 200 is adjustable, which facilitates the adjustment of the posture of the grating 310 and reduces the adjustment difficulty of the posture of the grating 310.

[0110] In some embodiments, as shown in Figure 9 and Figure 10As shown, the second adjusting mechanism 430 is connected to the mounting seat 420, and the second adjusting mechanism 430 is used to adjust the position of the mounting seat 420 relative to the support seat 200, so as to adjust the attitude of the grating 310. Thus, the purpose of adjusting the attitude of the grating 310 by the attitude adjusting mechanism 400 is achieved, the difficulty of adjusting the attitude of the grating 310 is reduced, and the grating 310 can be quickly and conveniently adjusted, so that the grating 310 can adapt to various load application requirements, and the versatility and flexibility of the grating 310 are improved to a certain extent.

[0111] In some embodiments, as shown in Figure 5 As shown, the adjusting seat 410 includes a first adjusting seat 411 and a second adjusting seat 412 connected to each other, and the first adjusting seat 411 and the second adjusting seat 412 have different extension directions. The first adjusting seat 411 is connected to the support seat 200, so as to place the adjusting seat 410 on the support seat 200, and then place the attitude adjusting mechanism 400 on the support seat 200, so as to support the attitude adjusting mechanism 400 by the support seat 200.

[0112] In some embodiments, as shown in Figure 9 and Figure 10 As shown, the second adjusting mechanism 430 includes a second moving part 431 and a third moving part 432. The second moving part 431 is used to adjust the pitch angle and the yaw angle of the mounting seat 420 relative to the support seat 200. Since the grating 310 is arranged on the mounting seat 420, the pitch attitude and the yaw attitude of the grating 310 can be adjusted by the attitude adjusting mechanism 400, and the flexibility of the grating 310 is improved to a certain extent.

[0113] In some embodiments, the third moving part 432 is used to adjust the height of the mounting seat 420 relative to the support seat 200. Thus, the height position of the grating 310 itself can be adjusted, and the flexibility of the grating 310 is improved to a certain extent.

[0114] In summary, the attitude adjusting mechanism 400 of the present application can be used to adjust the pitch attitude, the yaw attitude of the grating 310, and the height position of the grating 310 itself.

[0115] In some embodiments, as shown in Figure 9 As shown, the second moving part 431 includes a second jack 4311 and a third jack 4312. The second jack 4311 and the third jack 4312 are arranged on one side of the mounting seat 420 and located between the mounting seat 420 and the adjusting seat 410. The second jack 4311 and the third jack 4312 are arranged in the up-down direction of the adjusting seat 410, and are used to control the movement of the mounting seat 420 relative to the adjusting seat 410, respectively. Thus, the purpose of controlling the pitch attitude of the grating 310 by the second moving part 431 is achieved, and the difficulty of adjusting the pitch attitude of the grating 310 is reduced.

[0116] Among them, the above-mentioned up and down directions can be understood as Figure 9 The Z direction is shown in FIG.

[0117] In some embodiments, the second top screw 4311 and the third top screw 4312 can be rotatably provided on the adjustment seat 410 and engage with the mounting seat 420, so that the second top screw 4311 and the third top screw 4312 can be used to control the rotation of the mounting seat 420 relative to the adjustment seat 410.

[0118] In some embodiments, as Figure 9 As shown, the second top screw 4311 is arranged near the top of the adjustment seat 410, and the third top screw 4312 is arranged near the bottom of the adjustment seat 410. When the second top screw 4311 extends between the mounting seat 420 and the adjustment seat 410 and the third top screw 4312 shortens between the mounting seat 420 and the adjustment seat 410, the grating 310 rotates downward relative to the adjustment seat 410; when the second top screw 4311 shortens between the mounting seat 420 and the adjustment seat 410 and the third top screw 4312 extends between the mounting seat 420 and the adjustment seat 410, the grating 310 rotates upward relative to the adjustment seat 410, so as to achieve the purpose of adjusting the pitch attitude of the grating 310.

[0119] At the same time, by configuring the second movable member 431 to include the second top screw 4311 and the third top screw 4312 , it is also beneficial to simplify the structure of the second movable member 431 and reduce the difficulty of arranging the second movable member 431 .

[0120] In some embodiments, as Figure 9 As shown, there are two second top screws 4311 and / or two third top screws 4312, and the two second top screws 4311 and / or the two third top screws 4312 are spaced apart on the left and right sides of the adjustment seat 410. Figure 10 In the X direction shown in the figure, that is, in the present application, there are two second top screws 4311; or, there are two third top screws 4312; or, there are two second top screws 4311 and two third top screws 4312. When there are two second top screws 4311, the two second top screws 4311 are spaced apart on the left and right upper parts of the adjustment seat 410. When there are two third top screws 4312, the two third top screws 4312 are also spaced apart on the left and right upper parts of the adjustment seat 410. Because both the second top screw 4311 and the third top screw 4312 can control the movement of the mounting seat 420 relative to the adjustment seat 410, the two second top screws 4311 and / or the two third top screws 4312 can be used to adjust the yaw posture of the grating 310.

[0121] In some embodiments, as Figure 9As shown, the second top screw 4311 has one, the third top screw 4312 has two, and the two third top screws 4312 are arranged on the left and right of the adjusting seat 410. When the yaw attitude of the grating 310 needs to be adjusted, the extension length of the two third top screws 4312 between the mounting seat 420 and the adjusting seat 410 can be adjusted to achieve the yaw attitude of the grating 310.

[0122] Specifically, one of the third top screws 4312 can be shortened between the mounting seat 420 and the adjusting seat 410, and the other third top screw 4312 can be lengthened between the mounting seat 420 and the adjusting seat 410 to achieve the yaw attitude of the grating 310, thereby improving the accuracy of the attitude of the collimating grating 310 to a certain extent, and further improving the efficiency and accuracy of the attitude of the grating 310, so that the data collected by the monochromator 1000 in subsequent tests is more accurate.

[0123] In some embodiments, as shown in Figure 9 As shown, the second adjusting mechanism 430 includes a second fastener 433. When the pitch attitude and the yaw attitude of the grating 310 are adjusted, the mounting seat 420 can be fixed by using the second fastener 433, and the grating 310 is also fixed, thereby improving the position stability of the grating 310 and ensuring the working performance of the grating 310 to a certain extent.

[0124] In some embodiments, the second fastener 433 is a fastening bolt, which is arranged in the adjusting seat 410 and fixedly connected with the mounting seat 420 to achieve the fixation of the mounting seat 420.

[0125] In a specific example, as shown in Figure 9 As shown, the second fastener 433 includes three, and the three second fasteners 433, the first top screw 4311, and the two third top screws 4312 cooperate to form a "three-pull three-top" structure between the mounting seat 420 and the adjusting seat 410, and the "three-pull three-top" structure is used to adjust the pitch attitude and the yaw attitude of the grating 310, thereby reducing the difficulty of adjusting the grating 310.

[0126] In some embodiments, in combination with Figure 9 and Figure 10As shown, the third moving piece 432 includes a fourth jackscrew 4321 and two fifth jackscrews 4322, the fourth jackscrew 4321 and the fifth jackscrews 4322 are respectively arranged on opposite sides of the adjusting seat 410 in the up-down direction, the fourth jackscrew 4321 is arranged between the mounting seat 420 and the adjusting seat 410, and the two fifth jackscrews 4322 are arranged in the left-right direction of the adjusting seat 410 and are used to control the movement of the mounting seat 420 relative to the adjusting seat 410. Since the two fifth jackscrews 4322 are arranged on one side of the adjusting seat 410 in the up-down direction, and the two fifth jackscrews 4322 are arranged in the left-right direction of the adjusting seat 410, when the mounting seat 420 is controlled to move relative to the adjusting seat 410 by using the two fifth jackscrews 4322, it is beneficial to control the height of the mounting seat 420 relative to the adjusting seat 410, thereby adjusting the height of the grating 310, to a certain extent, improve the accuracy of the posture of the collimating grating 310, and further improve the efficiency and accuracy of the grating 310 posture, so that the data collected by the monochromator 1000 in the subsequent test is more accurate.

[0127] Through the above arrangement, in a specific example, the height of the grating 310 can be adjusted by adjusting the extension length of the two fifth jackscrews 4322 relative to the mounting seat 420, for example: one of the fifth jackscrews 4322 can be shortened in length and the other fifth jackscrew 4322 can be lengthened, thereby adjusting the height of the grating 310.

[0128] In addition, by arranging the third moving piece 432 to include the fourth jackscrew 4321 and the fifth jackscrew 4322, it is also beneficial to simplify the structure of the third moving piece 432 and reduce the difficulty of arranging the third moving piece 432.

[0129] In some embodiments, in combination with Figure 4 , Figure 5 and Figure 7 As shown, the monochromator 1000 further includes a grating scanning seat 700, the grating scanning seat 700 is rotatably arranged on the upper surface of the support seat 200 through a rotating shaft 710, the grating assembly 300 is arranged in the grating scanning seat 700, and the sine mechanism 500 is connected to the grating scanning seat 700. The sine mechanism 500 is used to control the rotation of the grating scanning seat 700 relative to the support seat 200. Thus, the purpose of controlling the rotation of the grating assembly 300 relative to the support seat 200 by using the sine mechanism 500 is achieved, and the control difficulty of the sine mechanism 500 is reduced.

[0130] In addition, by arranging the grating scanning seat 700, it is convenient to accurately move the grating 310 in the plane by using the grating scanning seat 700, so that the grating 310 scans point by point according to the preset path, which is beneficial to the monochromator 1000 to accurately construct an image or obtain optical information of an object, to a certain extent, ensure that the data collected by the monochromator 1000 in the subsequent test is more accurate.

[0131] In some embodiments, as shown in Figure 7 the raster scanning seat 700 is fixedly connected to the rotating shaft 710, and the rotating shaft 710 is rotatably arranged on the support seat 200 through a bearing, so that the raster scanning seat 700 can be rotatably arranged on the upper surface of the support seat 200 through the rotating shaft 710, thereby reducing the matching difficulty of the raster scanning seat 700 and the support seat 200.

[0132] Therefore, the support seat 200 of the present application can also be understood as a bearing seat.

[0133] In some embodiments, as shown in Figure 4 and Figure 5 the attitude adjusting mechanism 400 is arranged on the raster scanning seat 700, so as to realize the arrangement of the raster assembly 300 on the raster scanning seat 700, thereby reducing the matching difficulty of the raster assembly 300 and the raster scanning seat 700.

[0134] In some embodiments, as shown in Figure 4 and Figure 11 the monochromator 1000 further comprises a driving member 800, the sinusoidal mechanism 500 comprises an output shaft 510 and a transmission member 520, one end of the output shaft 510 is connected to the driving member 800, the driving member 800 is used to drive the reciprocating motion of the output shaft 510, one end of the transmission member 520 is fixedly connected to the raster scanning seat 700, and the other end of the transmission member 520 is matched with the other end of the output shaft 510 to form a rotating pair, and the movement of the output shaft 510 is used to drive the rotation of the transmission member 520. That is, the driving member 800 drives the reciprocating motion of the output shaft 510, and the movement of the output shaft 510 is used to drive the rotation of the transmission member 520, so as to realize the rotation of the transmission member 520 driven by the driving member 800, and one end of the transmission member 520 is fixedly connected to the raster scanning seat 700, thereby realizing the rotation of the raster scanning seat 700 driven by the driving member 800, achieving the purpose of controlling the rotation of the raster scanning seat 700 relative to the support seat 200 by the sinusoidal mechanism 500, thereby achieving the purpose of controlling the rotation of the raster assembly 300 relative to the support seat 200 by the sinusoidal mechanism 500, and reducing the control difficulty of the sinusoidal mechanism 500.

[0135] In a specific example, the driving member 800 serves as a power source to provide power for the sinusoidal mechanism 500. When the driving member 800 drives the output shaft 510, the output shaft 510 can realize reciprocating motion to facilitate power transmission to the transmission member 520. Since the other end of the transmission member 520 cooperates with the other end of the output shaft 510 to form a rotary pair, the linear motion of the driving member 800 can be converted into the rotary motion of the grating scanning seat 700. To some extent, the grating scanning seat 700 can be accurately driven to move the grating 310, thereby improving the collimation accuracy of the grating 310 scanning, and making the data collected by the monochromator 1000 in the subsequent test more accurate.

[0136] In some embodiments, as shown in Figure 11 The sinusoidal mechanism 500 further includes an elastic member 530. One end of the elastic member 530 is connected to the output shaft 510, and the other end is connected to the driving member 800. Since the sinusoidal mechanism 500 has an angle change between the driving grating scanning seat 700, the elastic member 530 is used to buffer the impact of the angle change on the sinusoidal mechanism 500 when driving the grating scanning seat 700. To some extent, the sinusoidal mechanism 500 can avoid shaking when driving the grating scanning seat 700 to rotate, and ensure that the grating scanning seat 700 can accurately rotate, thereby realizing the accuracy of the grating 310 scanning.

[0137] Here, the elastic member 530 can be understood as a spring.

[0138] In some embodiments, as shown in Figure 8 and Figure 12 The monochromator 1000 further includes a third adjusting mechanism 900. The third adjusting mechanism 900 is used to level the support seat 200. Thus, the position of the grating 310 can be further adjusted, and the working performance of the grating 310 can be ensured to some extent.

[0139] In some embodiments, as shown in Figure 8 and Figure 12 The support seat 200 includes a support platform 210. The grating 310 is arranged on the support platform 210. At least part of the support platform 210 is arranged opposite to the base 100. The third adjusting mechanism 900 is arranged between the support platform 210 and the base 100. The third adjusting mechanism 900 is used to control the support platform 210 to swing relative to the base 100. Thus, the support seat 200 can be leveled, and the position of the grating 310 can be adjusted. To some extent, the working performance of the grating 310 can be ensured, and the working performance of the monochromator 1000 can be improved.

[0140] In some embodiments, as shown in Figure 8 and Figure 12As shown, the third adjusting mechanism 900 comprises a plurality of fourth moving pieces 910, which are arranged at intervals along the circumference of the support platform 210 and are arranged between the support platform 210 and the base 100, and are used to control the movement of the support platform 210 relative to the base 100 respectively, so as to realize the control of the swing of the support platform 210 relative to the base 100 by the third adjusting mechanism 900, and to reduce the leveling difficulty of the support platform 210 to a certain extent.

[0141] In some embodiments, in combination with Figure 8 and Figure 12 As shown, the plurality of fourth moving pieces 910 comprises a sixth jack 911, a seventh jack 912 and an eighth jack 916, which are arranged at intervals along the circumference of the support platform 210 and are movably arranged on the support platform 210, and in the up-down direction, the sixth jack 911, the seventh jack 912 and the eighth jack 916 are respectively in abutting cooperation with the base 100, so as to facilitate the cooperation of the sixth jack 911, the seventh jack 912 and the eighth jack 916 to adjust the swing of the support platform 210 relative to the base 100, and to reduce the leveling difficulty of the support platform 210.

[0142] In a specific example, it can be achieved by adjusting the extension length of the sixth jack 911, the seventh jack 912 and the eighth jack 916 between the support platform 210 and the base 100, for example: the length of the sixth jack 911 can be shortened and the length of the seventh jack 912 and the eighth jack 916 can be lengthened.

[0143] At the same time, by arranging the plurality of fourth moving pieces 910 to comprise the sixth jack 911, the seventh jack 912 and the eighth jack 916, it is also beneficial to simplify the structure of the fourth moving piece 910 and reduce the layout difficulty of the fourth moving piece 910.

[0144] In some embodiments, in combination with Figure 8 and Figure 12 As shown, the plurality of fourth moving pieces 910 further comprises a third fastener 914, a fourth fastener 915 and a fifth fastener 913, which are arranged on the support platform 210 and can be fixedly connected with the base 100. When the sixth jack 911, the seventh jack 912 and the eighth jack 916 level the support platform 210, the third fastener 914, the fourth fastener 915 and the fifth fastener 913 can be used to cooperate to fix the support platform 210, so as to realize the limiting and fixing of the support platform 210, improve the position stability of the support platform 210, and enable the support platform 210 to stably support the grating scanning seat 700 and the grating assembly 300 and the like.

[0145] In the description of the present application, the features defined as "first", "second", "third", "fourth", "fifth", "sixth", "seventh" and "eighth" can explicitly or implicitly include one or more of the features for distinguishing the described features, without order and without difference in importance.

[0146] In some embodiments, the fifth fastener 913, the third fastener 914 and the fourth fastener 915 are all bolts.

[0147] In a specific example, as shown in Figure 12 The three fasteners (the third fastener 914, the fourth fastener 915 and the fifth fastener 913) and the three jacks (the sixth jack 911, the seventh jack 912 and the eighth jack 916) cooperate to form a "three-pull three-jack" structure between the support platform 210 and the base 100, and to level the support platform 210 using the "three-pull three-jack" structure, thereby reducing the adjustment difficulty of the support platform 210.

[0148] In some embodiments, when the monochromator 1000 is provided with the cavity bottom plate 961 and the cavity bottom plate 961 is arranged on the base 100, the "three-pull three-jack" structure between the support platform 210 and the base 100 can be understood as being arranged between the support platform 210 and the cavity bottom plate 961.

[0149] In some embodiments, as shown in Figure 3 The monochromator 1000 further includes a fourth adjustment mechanism 920 for leveling the base 100, so as to ensure the flatness of the base 100 and further ensure the flatness of the monochromator 1000, which is conducive to improving the structural stability of the monochromator 1000 and to ensuring the working performance of the monochromator 1000 to a certain extent.

[0150] In some embodiments, as shown in Figure 3 The fourth adjustment mechanism 920 includes a plurality of adjustable bolts 921, which are arranged at intervals on the bottom of the base 100 and are used to control the movement of the base 100 respectively, so as to level the base 100, reduce the adjustment difficulty of the base 100, keep the base 100 in a horizontal state and ensure the installation stability of other components of the monochromator 1000.

[0151] In some embodiments, as shown in Figure 3 The monochromator 1000 further includes a laser pen assembly 930 arranged on the base 100, which is used to determine the installation position of the monochromator 1000. In this way, the position between the monochromator 1000 and the light source can be accurately and quickly determined, which is conducive to the subsequent testing of the monochromator 1000 and reduces the installation difficulty of the monochromator 1000.

[0152] In some embodiments, as shown in Figure 3 The laser pen assembly 930 includes a laser pen 931, a first reflector 932 and a second reflector 933. The first reflector 932 is arranged opposite to the laser pen 931 and the second reflector 933, and is configured to reflect the light emitted by the laser pen 931 to the second reflector 933. In this way, the light emitted by the laser pen 931 can be reflected by the second reflector 933, so as to determine the position between the monochromator 1000 and the light source, and reduce the installation difficulty of the monochromator 1000.

[0153] During the installation of the monochromator 1000, the installation position of the monochromator 1000 can be continuously adjusted. When the light emitted by the laser pen 931 is coincided with the light emitted by the light source after being reflected by the second reflector 933, the installation position of the monochromator 1000 can be determined.

[0154] The assembly method of the monochromator 1000 according to the embodiments of the present application will be described below with reference to the accompanying drawings.

[0155] As shown in Figure 13 The assembly method of the monochromator 1000 according to the embodiments of the present application includes the following steps:

[0156] S1: erecting the level 1100, and leveling the base 100 based on the level 1100. This is advantageous to ensure the levelness of the base 100, and reduce the assembly difficulty of the monochromator 1000.

[0157] S2: erecting the first theodolite 1200 and the second theodolite 1300, and installing the support base 200 based on the simulated light path of the first theodolite 1200 and the second theodolite 1300. This is advantageous to reduce the installation difficulty of the support base 200, and improve the installation accuracy of the support base 200, so as to ensure the installation precision of the grating 310.

[0158] S3: installing the grating assembly 300, the attitude adjusting mechanism 400 and the sine mechanism 500.

[0159] S4: adjusting the attitude of the grating 310 through the attitude adjusting mechanism 400.

[0160] S5: driving the grating assembly 300 to rotate through the sine mechanism 500.

[0161] According to the above method, the assembly method of the monochromator 1000 according to the embodiments of the present application can accurately and quickly collimate and adjust the grating 310, and improve the efficiency and precision of the collimation of the grating 310, so as to make the subsequent test data of the monochromator 1000 more accurate.

[0162] In some embodiments, when it is necessary to level the base 100 based on the level 1100, the first theodolite 1200 and the second theodolite 1300 are combined Figure 14 and Figure 15As shown, first, the base 100 of the monochromator 1000 is firmly mounted on the optical platform 970, and a level 1100 is erected outside the optical platform 970; second, a plurality of ceramic gauges 980 of the same specification are placed on the cavity bottom plate 961 of the base 100, when the ceramic gauges 980 are three, the three ceramic gauges 980 can be arranged in a triangular shape, and when the ceramic gauges 980 are four, the four ceramic gauges 980 can be arranged in a quadrangular shape, then the base 100 is adjusted through the fourth adjusting mechanism 920, and whether the plurality of ceramic gauges 980 on the cavity bottom plate 961 are at a uniform height position is observed and recorded by using the level 1100, when the plurality of ceramic gauges 980 on the cavity bottom plate 961 are at the uniform height position, the leveling of the base 100 is realized.

[0163] In some embodiments, when the support seat 200 needs to be installed, as shown in Figure 16 first, tool slits 990 are respectively installed on both sides of the cavity bottom plate 961, then the first theodolite 1200 and the second theodolite 1300 are erected, the straight light emitted by the first theodolite 1200 forms incident simulation light through the center of one of the tool slits 990, and the light path route of the incident simulation light can be understood as L5 shown in Figure 16 L5 has a certain simulation height, and the simulation height of L5 is continuously adjusted to be the same as the height of the upper surface of the ceramic gauge 980 while ensuring that L5 emitted by the first theodolite 1200 can pass through the center of the tool slit 990, and the first theodolite 1200 is erected. Figure 13 Similarly, the straight light emitted by the second theodolite 1300 forms outgoing simulation light through the center of the other tool slit 990, and the light path route of the outgoing simulation light can be understood as L6 shown in L6 has a certain simulation height, and the simulation height of L6 is continuously adjusted to be the same as the height of the upper surface of the ceramic gauge 980 while ensuring that L6 emitted by the second theodolite 1300 can pass through the center of the tool slit 990, and the second theodolite 1300 is erected.

[0164] It should be noted that the tool slit 990 described above is an optical standard part, and in a specific example, the tool slit 990 is a workpiece, and the workpiece is provided with a slit with an opening of about 50 μm.

[0165] In some embodiments, the base 100 is provided with a mounting hole, and the tool slit 990 is mounted to the base 100 through the mounting hole.

[0166] It should be noted that the mounting hole can be understood as a pin hole.

[0167] In some embodiments, after the first theodolite 1200 and the second theodolite 1300 are set up, the support seat 200 and the rotating shaft 710 are installed on the cavity bottom plate 961 in sequence, and a tool slit 990 is installed at the center of the rotating shaft 710, then the support seat 200 is adjusted by the first adjusting mechanism 600, so that the light paths of L5 and L6 can pass through the center O of the tool slit 990 at the center of the rotating shaft 710, at this time the installation of the support seat 200 is completed, then the grating assembly 300, the attitude adjusting mechanism 400 and the sine mechanism 500 are installed, after installation, the attitude of the grating 310 can be first adjusted by the attitude adjusting mechanism 400, and the specific adjustment steps are not described here, so that the emergent light (0-order light) of L5 after passing through the grating 310 and the simulation light of the second theodolite 1300 are on the same light path and the height of the 1-order light is the same as the height of L5, and the attitude adjustment of the grating 310 is completed.

[0168] After the attitude adjustment of the grating 310 is completed, the grating assembly 300 is driven to rotate by the sine mechanism 500, and in the process of rotation, the height of the emergent light (0-order light) after passing through the grating 310 and the height of the 1-order light at different incident angles are observed and recorded by the level 1100, then the support platform 210 of the support seat 200 is adjusted by the third adjusting mechanism 900, so that the height of the emergent light (0-order light) and the height of the 1-order light are the same as the height of L5, and the grating 310 scanning mechanism adjustment is completed.

[0169] In some embodiments, the assembly method of the monochromator 1000 further comprises installing the cavity 960, the incident slit assembly 940 and the emergent slit assembly 950.

[0170] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection" and "connection" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0171] Figure 7 Three first adjusting mechanisms 600 are shown for the purpose of illustration, but those skilled in the art can obviously understand that the scheme can be applied to two, four, five or more first adjusting mechanisms 600 after reading the above technical solutions, which also falls within the protection scope of the present application.

[0172] Other configurations of the monochromator 1000 and the assembling method of the monochromator 1000 according to the embodiments of the present application, such as the specific structure and function of the entrance slit assembly 940 and the exit slit assembly 950, are known to those skilled in the art, and thus will not be described in detail herein.

[0173] In the description of the present specification, the description referring to the terms "embodiment", "example", and the like means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Also, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in an appropriate manner.

[0174] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, alternatives, and variations can be made thereto without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A monochromator, characterized in that: include: Base (100); A support seat (200), the support seat (200) being movably disposed on the base (100); A grating assembly (300), the grating assembly (300) comprising a grating (310), the grating (310) being arranged on the support seat (200); a posture adjustment mechanism (400), the posture adjustment mechanism (400) being arranged on the support seat (200) and connected to the grating (310), the posture adjustment mechanism (400) being used to adjust the posture of the grating (310); A sinusoidal mechanism (500) is provided on the base (100) and connected to the grating (310), and is used to control the rotation of the grating assembly (300) relative to the support seat (200).

2. The monochromator according to claim 1, wherein The invention also includes a first adjustment mechanism (600), which is provided on the base (100) and cooperates with the support seat (200), and the first adjustment mechanism (600) is used to adjust the position of the support seat (200) relative to the base (100).

3. The monochromator according to claim 2, characterized in that The first adjusting mechanism (600) comprises a fixed member (610) and a first movable member (620), wherein the fixed member (610) is provided on the base (100), and the first movable member (620) is movably provided on the fixed member (610) and is engaged with a peripheral wall of the support seat (200), and the first movable member (620) is used to drive the support seat (200) to move relative to the base (100).

4. The monochromator according to claim 3, characterized in that The first moving member (620) is a first top screw.

5. The monochromator according to claim 3, characterized in that The first adjustment mechanism (600) includes a plurality of first adjustment mechanisms (600), and the plurality of first adjustment mechanisms (600) are arranged at intervals along the outer periphery of the support seat (200).

6. The monochromator according to claim 1, characterized in that The posture adjustment mechanism (400) comprises: an adjustment seat (410), the adjustment seat (410) being arranged on the support seat (200); A mounting seat (420), the mounting seat (420) being movably disposed on the adjustment seat (410), the mounting seat (420) being hollow inside to form a mounting cavity, and the grating (310) being disposed in the mounting cavity; A second adjustment mechanism (430) is connected to the mounting seat (420), and the second adjustment mechanism (430) is used to adjust the position of the mounting seat (420) relative to the support seat (200) to adjust the posture of the grating (310).

7. The monochromator according to claim 6, characterized in that The second adjustment mechanism (430) comprises: a second movable member (431), the second movable member (431) being used to adjust the pitch angle and the yaw angle of the mounting seat (420) relative to the support seat (200); A third moving member (432), the third moving member (432) is used to adjust the height of the mounting seat (420) relative to the supporting seat (200).

8. The monochromator according to claim 7, characterized in that The second moving member (431) includes a second top screw (4311) and a third top screw (4312). The second top screw (4311) and the third top screw (4312) are both arranged on one side of the mounting seat (420) and located between the mounting seat (420) and the adjustment seat (410). The second top screw (4311) and the third top screw (4312) are spaced apart in the upper and lower directions of the adjustment seat (410). The second top screw (4311) and the third top screw (4312) are used to respectively control the movement of the mounting seat (420) relative to the adjustment seat (410).

9. The monochromator according to claim 8, characterized in that There are two second top screws (4311) and / or two third top screws (4312), and the two second top screws (4311) and / or the two third top screws (4312) are spaced apart in the left-right direction of the adjustment seat (410).

10. The monochromator according to claim 7, characterized in that The third moving member (432) includes a fourth top screw (4321) and two fifth top screws (4322). The fourth top screw (4321) and the fifth top screws (4322) are respectively arranged on opposite sides of the adjustment seat (410) in the up and down directions. The fourth top screw (4321) is arranged between the mounting seat (420) and the adjustment seat (410). The two fifth top screws (4322) are arranged at intervals in the left and right directions of the adjustment seat (410). The two fifth top screws (4322) are used to respectively control the movement of the mounting seat (420) relative to the adjustment seat (410).

11. The monochromator according to claim 1, wherein The invention also includes a grating scanning seat (700), wherein the grating scanning seat (700) is rotatably arranged on the upper surface of the support seat (200) via a rotating shaft (710), the grating assembly (300) is arranged on the grating scanning seat (700), and the sinusoidal mechanism (500) is connected to the grating scanning seat (700), and the sinusoidal mechanism (500) is used to control the rotation of the grating scanning seat (700) relative to the support seat (200).

12. The monochromator according to claim 11, characterized in that It also includes a driving member (800), and the sinusoidal mechanism (500) includes: an output shaft (510), one end of the output shaft (510) being connected to the driving member (800), and the driving member (800) being used to drive the output shaft (510) to reciprocate; A transmission member (520), one end of which is fixedly connected to the grating scanning seat (700), and the other end of which cooperates with the other end of the output shaft (510) to form a rotating pair, wherein the output shaft (510) moves to drive the transmission member (520) to rotate.

13. The monochromator according to claim 1, wherein It also includes a third adjustment mechanism (900), and the third adjustment mechanism (900) is used to level the support base (200).

14. The monochromator according to claim 13, characterized in that The support seat (200) includes a support platform (210), the grating (310) is arranged on the support platform (210), at least a portion of the support platform (210) is arranged relative to the base (100), and the third adjustment mechanism (900) is arranged between the support platform (210) and the base (100), and the third adjustment mechanism (900) is used to control the swing of the support platform (210) relative to the base (100).

15. The monochromator according to claim 14, characterized in that The third adjustment mechanism (900) includes a plurality of fourth moving members (910), which are arranged at intervals along the circumference of the support platform (210) and are arranged between the support platform (210) and the base (100). The plurality of fourth moving members (910) are used to respectively control the movement of the support platform (210) relative to the base (100).

16. The monochromator according to any one of claims 1 to 15, characterized in that It also includes a fourth adjustment mechanism (920), and the fourth adjustment mechanism (920) is used to level the base (100).

17. The monochromator according to claim 16, characterized in that The fourth adjustment mechanism (920) includes a plurality of adjustable bolts (921), and the plurality of adjustable bolts (921) are arranged at intervals on the bottom of the base (100). The plurality of adjustable bolts (921) are used to control the movement of the base (100) respectively.

18. The monochromator according to any one of claims 1 to 15, characterized in that It also includes a laser pen assembly (930), which is arranged on the base (100) and is used to determine the installation position of the monochromator.

19. The monochromator according to claim 18, characterized in that The laser pen assembly (930) comprises a laser pen (931), a first reflector (932) and a second reflector (933); the first reflector (932) is arranged opposite to the laser pen (931) and the second reflector (933), respectively; the first reflector (932) is used to reflect light emitted by the laser pen (931) to the second reflector (933).

20. A method for assembling a monochromator, characterized in that: The monochromator is a monochromator according to any one of claims 1 to 19, and the assembling method comprises: Setting up a level (1100), and leveling the base (100) based on the level (1100); Building a first theodolite (1200) and a second theodolite (1300), and installing a support base (200) based on the simulated optical paths of the first theodolite (1200) and the second theodolite (1300); Installing a grating assembly (300), a posture adjustment mechanism (400), and a sine mechanism (500); adjusting the posture of the grating (310) by the posture adjustment mechanism (400); The grating assembly (300) is driven to rotate by the sinusoidal mechanism (500).

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