Fixing device for leak detection of metal bellows and helium mass spectrum leak detection system

Abstract

The invention relates to the field of metal corrugated pipe leakage detection, and discloses a fixing device for metal corrugated pipe leakage detection and a helium mass spectrum leakage detection system, and the fixing device comprises a first device body and a second device body which are opposite to each other in a first direction and are arranged in a spaced manner to form an assembly space, a first communication hole is formed in at least one of the first device body and the second device body; the adjusting mechanism is used for adjusting the spacing distance between the first device body and the second device body in the first direction so as to change the size of the assembly space in the first direction. Therefore, through cooperation of the first device body, the second device body and the adjusting mechanism, the size of the assembling space in the first direction can be changed, metal corrugated pipes of different length sizes can be assembled in the assembling space, and therefore the universality of the fixing device can be improved, and the fixing device is simple in structure and convenient to use. And the assembly efficiency of the fixing device is improved, so that the leak detection efficiency of the metal corrugated pipe is improved.

Description

Technical Field

[0001] The present invention relates to the field of metal bellows leak detection, in particular to a fixing device for metal bellows leak detection and a helium mass spectrometry leak detection system with the fixing device. Background Art

[0002] In related technologies, metal bellows in nuclear fusion devices serve as core components for vacuum sealing, pressure transmission, and displacement compensation. They are widely used in fields such as the nuclear industry, which require extremely high sealing properties. They are crucial flexible sealing components for maintaining system vacuum levels and isolating contamination and media leakage. During the manufacturing and service process, metal bellows require highly sensitive, reliable, nondestructive leak testing of their welds and bodies. The test results serve as the key basis for determining product quality.

[0003] During leak detection of metal bellows, a fixture is used to secure the metal bellows. However, existing fixtures can only secure metal bellows of one size, resulting in poor versatility. Furthermore, existing fixtures are complex in structure and inefficient in assembly, which affects leak detection efficiency. Furthermore, metal bellows are prone to twisting and stretching during transportation and leak detection, which affects leak detection accuracy. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to provide a fixing device for leak detection of metal bellows, which can improve the poor versatility of the fixing device and has a simple structure, which is conducive to improving the assembly efficiency of the fixing device, thereby improving the leak detection efficiency of the metal bellows.

[0005] The present invention further proposes a helium mass spectrometry leak detection system for a metal bellows.

[0006] A fixing device for leak detection of a metal bellows according to an embodiment of the present invention includes: A first device body and a second device body, the first device body and the second device body are arranged opposite to each other and spaced apart along a first direction to form an assembly space between the first device body and the first device body, the assembly space is used to assemble the metal bellows, and at least one of the first device body and the first device body is formed with a first connecting hole extending along the first direction, the first connecting hole is used to communicate with the metal bellows; an adjusting mechanism, the adjusting mechanism is assembled in cooperation with the first device body and the second device body, the adjusting mechanism is used to adjust the spacing distance between the first device body and the second device body along the first direction to change the size of the assembly space along the first direction.

[0007] According to the fixing device for leak detection of metal bellows according to the embodiment of the present invention, the size of the assembly space along the first direction can be changed through the cooperation of the first device body, the second device body and the adjustment mechanism, and metal bellows of different lengths can be assembled in the assembly space, thereby improving the versatility of the fixing device. In addition, the structure of the fixing device is simple, which is conducive to improving the assembly efficiency of the fixing device, thereby helping to improve the leak detection efficiency of the metal bellows.

[0008] In some examples of the present invention, the first device body includes: a first cover plate and a support structure. Along the first direction, the support structure is located between the first cover plate and the second device body and is fixed to the first cover plate. The support structure is located laterally of the assembly space. The adjustment mechanism is assembled in cooperation with the support structure, and the first cover plate is formed with a first connecting hole.

[0009] In some examples of the present invention, the support structure and the first cover plate are spaced apart in a first direction to form an installation space between the support structure and the first cover plate, and the installation space is used to assemble the first flange portion of the metal bellows.

[0010] In some examples of the present invention, a first sealing ring is fixedly provided on a surface of the first cover plate facing the assembly space, and the first sealing ring is used to seal a gap between the first cover plate and the first flange portion.

[0011] In some examples of the present invention, a first mounting protrusion is formed on an outer surface of the support structure facing away from the assembly space, and a fastener passes through the first cover plate and the first mounting protrusion to fix the support structure and the first cover plate.

[0012] In some examples of the present invention, an inner surface of the support structure facing the assembly space is configured to be spaced apart from the metal bellows.

[0013] In some examples of the present invention, the adjustment mechanism includes: a connecting rod, a first positioning sleeve and a second positioning sleeve, a second mounting protrusion is formed on the outer surface of the support structure facing away from the assembly space, an external thread is formed on the outer peripheral wall of the connecting rod, the connecting rod is passed through the second mounting protrusion and the second device body along a first direction, the first positioning sleeve is formed with a first threaded hole, the second positioning sleeve is formed with a second threaded hole, the first positioning sleeve is located on the side of the second mounting protrusion facing away from the second device body, the second positioning sleeve is located on the side of the second device body facing away from the first device body, and the connecting rod is assembled in the first threaded hole and the second threaded hole.

[0014] In some examples of the present invention, the second device body is used to be arranged opposite to the second flange portion of the metal bellows, and the connecting rod is used to pass through the second flange portion.

[0015] In some examples of the present invention, a second sealing ring is fixedly provided on the surface of the second device body facing the assembly space, and the second sealing ring is used to seal the gap between the second device body and the second flange portion of the metal bellows.

[0016] In some examples of the present invention, the fixing device also includes: a calibration valve and a calibration leak hole, at least one of the first device body and the second device body is formed with a second connecting hole extending along the first direction, the second connecting hole is used to connect with the metal bellows, and the calibration valve is connected between the calibration leak hole and the second connecting hole.

[0017] According to an embodiment of the present invention, a helium mass spectrometer leak detection system for a metal bellows includes: a fixing device, which is the above-mentioned fixing device; an injection device, which is used to inject helium into the metal bellows; and a helium mass spectrometer leak detector, which is connected to the first connecting hole.

[0018] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments with reference to the following drawings, in which: Figure 1 is a schematic diagram of a helium mass spectrometer leak detection system according to an embodiment of the present invention; Figure 2 is a cross-sectional view of a fixing device according to an embodiment of the present invention.

[0020] Reference numerals: Fixing device 100; First device body 10; first communication hole 11; first cover plate 12; support structure 13; installation space 14; first installation protrusion 15; second installation protrusion 16; Second device body 20; second communication hole 21; Assembly space 30; Connecting rod 41; first positioning sleeve 42; second positioning sleeve 43; a first sealing ring 50; Fastener 60; Second sealing ring 70; calibration valve 80; calibration leak 90; Helium mass spectrometer leak detection system 200; Spray device 201; spray gun 2011; helium cylinder 2012; Helium mass spectrometer leak detector 202; Metal bellows 300 ; first flange 301 ; second flange 302 ; tube body 303 . DETAILED DESCRIPTION

[0021] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0022] Reference below Figure 1 and Figure 2 A fixture 100 according to an embodiment of the present invention is described. Fixture 100 is used to securely install metal bellows 300 during leak detection. A helium mass spectrometer leak detection system 200 includes fixture 100, a spray device 201, and a helium mass spectrometer leak detector 202. Spray device 201 is used to spray helium into metal bellows 300.

[0023] like Figure 1 and Figure 2 As shown, a fixing device 100 for leak detection of a metal bellows 300 according to an embodiment of the present invention includes: a first device body 10 and a second device body 20, the first device body 10 and the second device body 20 are arranged opposite to and separated along a first direction to form an assembly space 30 between the first device body 10 and the first device body 10, the assembly space 30 is used to assemble the metal bellows 300, at least one of the first device body 10 and the first device body 10 is formed with a first connecting hole 11 extending along the first direction, the first connecting hole 11 is used to communicate with the metal bellows 300; an adjusting mechanism, the adjusting mechanism is assembled in cooperation with the first device body 10 and the first device body 10, the adjusting mechanism is used to adjust the spacing distance between the first device body 10 and the second device body 20 along the first direction to change the size of the assembly space 30 along the first direction.

[0024] Among them, such as Figure 2 As shown, the fixing device 100 includes: a first device body 10, a second device body 20 and an adjustment mechanism. The first device body 10 and the second device body 20 are arranged opposite to each other along a first direction, and the first device body 10 and the second device body 20 are arranged spaced apart along the first direction, so that the first device body 10 and the second device body 20 jointly define an assembly space 30. Along the first direction, the assembly space 30 is located between the first device body 10 and the second device body 10, as shown in FIG. Figure 2 As shown, the first direction is Figure 2 In the Z direction, the present invention is described by taking the first direction as the up and down direction as an example.

[0025] like Figure 2As shown, the metal bellows 300 includes a first flange portion 301, a tube body 303 and a second flange portion 302. The tube body 303 is connected between the first flange portion 301 and the second flange portion 302. During the leak detection process of the metal bellows 300, the metal bellows 300 is assembled in the assembly space 30, and the first flange portion 301 and the first device body 10 are limited in the first direction. The second flange portion 302 and the second device body 20 are limited in the first direction, which reduces the risk of the metal bellows 300 moving along the first direction, thereby reducing the risk of twisting and tensile deformation of the metal bellows 300 during transportation and leak detection, which is beneficial to improving the leak detection accuracy of the metal bellows 300.

[0026] At least one of the first device body 10 and the second device body 20 is formed with a first connecting hole 11 extending in a first direction. As an example, the first device body 10 is formed with a first connecting hole 11 extending in the first direction. As another example, the second device body 20 is formed with a first connecting hole 11 extending in the first direction. As another example, both the first device body 10 and the second device body 20 are formed with a first connecting hole 11 extending in the first direction. The present invention is described using the example of the first device body 10 being formed with the first connecting hole 11. During the process of leak testing the metal bellows 300 using the helium mass spectrometer leak detection system 200, the metal bellows 300 is assembled in the assembly space 30. The first connecting hole 11 is connected to the metal bellows 300 and is also connected to the helium mass spectrometer leak detector 202. The first connecting hole 11 connects the helium mass spectrometer leak detector 202 and the metal bellows 300, thereby allowing helium gas in the metal bellows 300 to flow into the helium mass spectrometer leak detector 202.

[0027] The adjustment mechanism is assembled with the first device body 10 and the second device body 20. The adjustment mechanism is used to adjust the spacing between the first device body 10 and the second device body 20 along the first direction. This can change the size of the assembly space 30 along the first direction, allowing metal bellows 300 of different lengths to be assembled in the assembly space 30, thereby improving the versatility of the fixture 100. As an example, the adjustment mechanism is an adjustment cylinder, which includes a cylinder body and a telescopic rod. The cylinder body is fixed to the second device body 20. The telescopic rod extends along the first direction and is fixed to the first device body 10. By retracting and retracting the telescopic rod, the spacing between the first device body 10 and the second device body 20 is adjusted along the first direction, thereby achieving the effect of adjusting the spacing between the first device body 10 and the second device body 20. As another example, the adjustment mechanism includes a driving motor, a rack and a gear. The rack extends along a first direction and is fixed to the first device body 10. The motor shaft of the driving motor is fixed with a gear. The motor shaft extends in a direction perpendicular to the first direction. The gear and the rack are engaged. The driving motor drives the gear to rotate to adjust the spacing distance between the first device body 10 and the second device body 20 along the first direction, thereby achieving the effect of adjusting the spacing distance between the first device body 10 and the second device body 20.

[0028] Specifically, the metal bellows 300 is used as the workpiece to be tested, and the detection principle of the helium mass spectrometer leak detection system 200 is as follows: the metal bellows 300 is assembled into the assembly space 30, the fixing device 100 on which the metal bellows 300 to be tested is assembled is connected to the helium mass spectrometer leak detection system 200, the helium mass spectrometer leak detector 202 is connected to the first connecting hole 11, the first connecting hole 11 connects the helium mass spectrometer leak detector 202 and the metal bellows 300, the interior of the bellows is evacuated to form a vacuum environment inside the metal bellows 300, the injection device 201 is located on the outside of the metal bellows 300, and the injection device 201 injects helium toward the outside of the metal bellows 300. If the metal bellows 300 has a leak, the helium enters the interior of the metal bellows 300 through the leak that may exist on the metal bellows 300, and the helium entering the interior of the metal bellows 300 is detected by the helium mass spectrometer leak detector 202, thereby determining whether the metal bellows 300 has a leak.

[0029] Therefore, through the cooperation of the first device body 10, the second device body 20 and the adjustment mechanism, the size of the assembly space 30 along the first direction can be changed, and the metal bellows 300 of different lengths can be assembled in the assembly space 30, thereby improving the versatility of the fixing device 100. In addition, the structure of the fixing device 100 is simple, which is conducive to improving the assembly efficiency of the fixing device 100, thereby helping to improve the leak detection efficiency of the metal bellows 300. At the same time, after the metal bellows 300 is assembled to the fixing device 100, the first device body 10 and the second device body 20 can limit the metal bellows 300 to reduce the risk of the metal bellows 300 moving along the first direction. When the injection device 201 injects helium to the outside of the metal bellows 300, the risk of the metal bellows 300 moving can also be reduced, thereby reducing the risk of twisting and tensile deformation of the metal bellows 300 during the leak detection process, which is conducive to improving the leak detection accuracy of the metal bellows 300.

[0030] In some examples of the present invention, Figure 2 As shown, the first device body 10 includes: a first cover plate 12 and a support structure 13. Along the first direction, the support structure 13 is located between the first cover plate 12 and the second device body 20 and is fixed to the first cover plate 12. The support structure 13 is located on the side of the assembly space 30. The adjustment mechanism is assembled with the support structure 13. The first cover plate 12 is formed with a first connecting hole 11.

[0031] The first device body 10 includes: a first cover plate 12 and a support structure 13. The first cover plate 12 can be a flat plate structure. The first cover plate 12 and the second device body 20 are arranged opposite and spaced apart along a first direction. Along the first direction, the support structure 13 is located between the first cover plate 12 and the second device body 20. The support structure 13 is fixed to the first cover plate 12. For example, the support structure 13 can be fixed to the first cover plate 12 by means of clamping, bonding, welding, etc. The support structure 13 can also be detachably fixed to the first cover plate 12 by bolts. Figure 2 As shown, the support structure 13 is located lateral to the assembly space 30 and is disposed near the circumferential edge of the first cover plate 12. After the metal bellows 300 is assembled to the fixture 100, the first flange portion 301 abuts against the first cover plate 12 to limit position, thereby reducing the risk of twisting and tensile deformation of the metal bellows 300 during leak detection. The first connecting hole 11 penetrates the first cover plate 12 along a first direction. After the metal bellows 300 is assembled to the fixture 100, the first connecting hole 11 and the metal bellows 300 are opposite and connected along the first direction. Therefore, the first connecting hole 11 is formed through the first cover plate 12, facilitating communication between the first connecting hole 11 and the metal bellows 300, thereby ensuring that the first connecting hole 11 is positioned appropriately.

[0032] The number of adjustment mechanisms is the same as the number of support structures 13. For example, both the support structure 13 and the adjustment mechanism can be multiple, and the multiple support structures 13 can be arranged in sequence along the circumference of the first cover plate 12. The present invention is described by taking the case where two support structures 13 are provided as an example. The two support structures 13 are arranged opposite to each other and spaced apart, and part of the assembly space 30 is located between the two support structures 13. There can be two adjustment mechanisms, and the two adjustment mechanisms and the two support structures 13 are assembled in a one-to-one correspondence. Since the support structure 13 is closer to the second device body 20 than the first cover plate 12, the adjustment mechanism is assembled with the support structure 13 to facilitate the connection between the adjustment mechanism and the first device body 10, which is conducive to reducing the difficulty of the fixing device 100, thereby improving the assembly efficiency of the fixing device 100.

[0033] In some examples of the present invention, Figure 2 As shown, the support structure 13 and the first cover plate 12 are spaced apart along a first direction to form an installation space 14 between the support structure 13 and the first cover plate 12 , and the installation space 14 is used to assemble the first flange portion 301 of the metal bellows 300 .

[0034] Among them, the support structure 13 and the first cover plate 12 are arranged to be spaced apart along the first direction, and an installation space 14 can be formed between the end of the support structure 13 facing the first cover plate 12 and the first cover plate 12. When the metal bellows 300 is assembled on the fixing device 100, at least part of the structure of the first flange portion 301 is assembled in the installation space 14, so that the first flange portion 301 is arranged between the support structure 13 and the first cover plate 12. Along the first direction, the support structure 13 and the first cover plate 12 both limit the first flange portion 301, so that the first flange portion 301 is reliably fixed to the fixing device 100, thereby reducing the risk of twisting, stretching and deformation of the metal bellows 300 in a vacuum, transportation state or pressurized state.

[0035] When there are multiple support structures 13, an installation space 14 is formed between each support structure 13 and the first cover plate 12. Multiple support structures 13 can simultaneously support the first flange part 301, so that the first flange part 301 can be more reliably fixed to the fixing device 100, thereby further reducing the risk of twisting, stretching and deformation of the metal bellows 300 in a vacuum, transportation state or pressurized state.

[0036] In some examples of the present invention, Figure 2 As shown, a first sealing ring 50 is fixedly provided on the surface of the first cover plate 12 facing the assembly space 30 . The first sealing ring 50 is used to seal the gap between the first cover plate 12 and the first flange portion 301 .

[0037] The first sealing ring 50 may be a rubber ring, a metal ring, a graphite ring, or a felt ring, but the present invention is not limited thereto. The first sealing ring 50 may also be made of other materials, as long as the first sealing ring 50 performs a sealing function. Along the first direction, the surface of the first cover plate 12 facing the assembly space 30 is fixed with the first sealing ring 50. The first sealing ring 50 may be secured to the first cover plate 12 by bonding, snapping, or other means. Furthermore, the surface of the first cover plate 12 facing the assembly space 30 may be formed with a first mounting groove open toward the first flange portion 301. The first mounting groove is annular and matches the shape of the first sealing ring 50. The first sealing ring 50 is assembled within the first mounting groove, with a portion of the structure extending out of the first mounting groove. After the metal bellows 300 is assembled on the fixing device 100, the first sealing ring 50 is clamped between the first cover plate 12 and the first flange portion 301, and the first sealing ring 50 is arranged around the tube body 303 along the circumference of the tube body 303, thereby sealing the gap between the first cover plate 12 and the first flange portion 301, and then forming a sealing interface between the first flange portion 301 and the first cover plate 12, reducing the risk of helium entering the metal bellows 300 from the gap between the first cover plate 12 and the first flange portion 301, which is conducive to improving the leak detection accuracy.

[0038] In some examples of the present invention, Figure 2 As shown, a first mounting protrusion 15 is formed on the outer surface of the support structure 13 facing away from the assembly space 30 , and a fastener 60 passes through the first cover plate 12 and the first mounting protrusion 15 to fix the support structure 13 and the first cover plate 12 .

[0039] In which, a first mounting protrusion 15 is formed on the outer surface of the support structure 13 facing away from the assembly space 30. Along the first direction, the first mounting protrusion 15 is arranged close to the end of the support structure 13 facing the first cover plate 12. Exemplarily, the first mounting protrusion 15 and the end of the support structure 13 facing the first cover plate 12 are arranged adjacent to each other.

[0040] For example, the first cover plate 12 is formed with a first mounting hole, and the first mounting protrusion 15 is formed with a second mounting hole. The first mounting hole and the second mounting hole are arranged opposite each other along a first direction. The first mounting hole and the second mounting hole are both threaded holes. The fastener 60 can be a bolt. The fastener 60 is simultaneously inserted into the corresponding first mounting hole and the second mounting hole, thereby enabling the support structure 13 and the first cover plate 12 to be removably fixedly connected. Furthermore, there are multiple first mounting holes, multiple second mounting holes, and multiple fasteners 60. The multiple first mounting holes, multiple second mounting holes, and multiple fasteners 60 are assembled in a one-to-one correspondence. The multiple fasteners 60 can ensure that the support structure 13 and the first cover plate 12 are reliably fixed and assembled, reducing the risk of separation between the support structure 13 and the first cover plate 12.

[0041] In some examples of the present invention, Figure 2As shown, the fastener 60 is passed through the first flange portion 301. After the fastener 60 is passed through the first flange portion 301, the fastener 60 can limit the first flange portion 301, reducing the risk of the first flange portion 301 moving in the assembly space 30, thereby making the position of the first flange portion 301 more reliable, thereby reducing the risk of deformation of the metal bellows 300.

[0042] In some examples of the present invention, Figure 2 As shown, after the metal bellows 300 is assembled on the fixing device 100, the inner surface of the support structure 13 facing the assembly space 30 is spaced apart from the metal bellows 300, thereby forming a gas flow gap between the support structure 13 and the metal bellows 300. When the injection device 201 injects helium toward the outside of the metal bellows 300, the helium can flow into the gas flow gap, which is conducive to the helium flowing to various parts of the outer surface of the metal bellows 300, thereby helping to improve the leak detection accuracy and make the leak detection results more accurate.

[0043] In some examples of the present invention, Figure 2 As shown, the adjustment mechanism includes: a connecting rod 41, a first positioning sleeve 42 and a second positioning sleeve 43, a second mounting protrusion 16 is formed on the outer surface of the support structure 13 away from the assembly space 30, an outer peripheral wall of the connecting rod 41 is formed with an external thread, the connecting rod 41 is passed through the second mounting protrusion 16 and the second device body 20 along a first direction, the first positioning sleeve 42 is formed with a first threaded hole, the second positioning sleeve 43 is formed with a second threaded hole, the first positioning sleeve 42 is located on the side of the second mounting protrusion 16 away from the second device body 20, the second positioning sleeve 43 is located on the side of the second device body 20 away from the first device body 10, and the connecting rod 41 is assembled in the first threaded hole and the second threaded hole.

[0044] The adjustment mechanism may include: a connecting rod 41, a first positioning sleeve 42, and a second positioning sleeve 43. A second mounting protrusion 16 is formed on the outer surface of the support structure 13 facing away from the assembly space 30. The second mounting protrusion 16 and the first mounting protrusion 15 are spaced apart along the first direction. Along the first direction, the second mounting protrusion 16 is arranged near the end of the support structure 13 facing away from the first cover plate 12. For example, the second mounting protrusion 16 and the end of the support structure 13 facing away from the first cover plate 12 are arranged adjacent to each other. Such an arrangement is conducive to increasing the spacing between the second mounting protrusion 16 and the first mounting protrusion 15, reducing the risk of interference between the connecting rod 41 and the first mounting protrusion 15 after passing through the second mounting protrusion 16, thereby facilitating the assembly of the fixing device 100.

[0045] The second mounting protrusion 16 is formed with a third mounting hole, and the second device body 20 is formed with a fourth mounting hole. The third mounting hole and the fourth mounting hole are arranged opposite to each other along the first direction. The outer peripheral wall of the connecting rod 41 is formed with an external thread. The connecting rod 41 is inserted into the third mounting hole and the fourth mounting hole, so that the connecting rod 41 is inserted into the second mounting protrusion 16 and the second device body 20 along the first direction. The first positioning sleeve 42 is formed with a first threaded hole. Along the first direction, the first positioning sleeve 42 is located on the side of the second mounting protrusion 16 away from the second device body 20. The second positioning sleeve 43 is formed with a second threaded hole. Along the first direction, the second positioning sleeve 43 is located on the side of the second device body 20 away from the first device body 10. By tightening or loosening the first positioning sleeve 42 and the second positioning sleeve 43, the spacing distance between the first device body 10 and the second device body 20 along the first direction can be adjusted, thereby adjusting the size of the assembly space 30 along the first direction, thereby enabling the fixing device 100 to adapt to and clamp and fix metal bellows 300 of different lengths. Moreover, the connecting rod 41 itself is detachable and replaceable. By selecting connecting rods 41 of different lengths, the length range of the metal bellows 300 that the fixture 100 can adapt to can be significantly expanded, making the fixture 100 suitable for helium mass spectrometry leak detection of the same type of metal bellows 300 with a larger span length.

[0046] In some examples of the present invention, Figure 2 As shown, the second device body 20 is used to be arranged opposite to the second flange portion 302 of the metal bellows 300 , and the connecting rod 41 is used to pass through the second flange portion 302 .

[0047] Among them, the second device body 20 can be a flat-plate structure, and the second device body 20 and the second flange part 302 of the metal bellows 300 are arranged relative to each other along the first direction. After the metal bellows 300 is assembled on the fixing device 100, the connecting rod 41 is passed through the second flange part 302. The connecting rod 41 can limit the second flange part 302, reducing the risk of the second flange part 302 moving in the assembly space 30, thereby making the position of the second flange part 302 more reliable, thereby reducing the risk of deformation of the metal bellows 300, which is conducive to further improving the detection accuracy.

[0048] In some examples of the present invention, Figure 2 As shown, a second sealing ring 70 is fixedly provided on the surface of the second device body 20 facing the assembly space 30 , and the second sealing ring 70 is used to seal the gap between the second device body 20 and the second flange portion 302 of the metal bellows 300 .

[0049] The second sealing ring 70 may be a rubber ring, a metal ring, a graphite ring, or a felt ring, but the present invention is not limited thereto. The second sealing ring 70 may also be made of other materials, as long as the second sealing ring 70 performs a sealing function. Along the first direction, the second sealing ring 70 is fixedly provided on the surface of the second device body 20 facing the assembly space 30. The second sealing ring 70 may be fixed to the second device body 20 by bonding, snapping, or the like. Furthermore, a second mounting groove open toward the second flange portion 302 may be formed on the surface of the second device body 20 facing the assembly space 30. The second mounting groove is annular and matches the shape of the second sealing ring 70. The second sealing ring 70 is assembled in the second mounting groove, and a portion of the structure extends out of the second mounting groove. After the metal bellows 300 is assembled on the fixing device 100, the second sealing ring 70 is located between the second device body 20 and the second flange portion 302, and the second sealing ring 70 is arranged around the tube body 303 along the circumference of the tube body 303, thereby sealing the gap between the second device body 20 and the second flange portion 302, and then forming a sealed interface between the second flange portion 302 and the second device body 20, reducing the risk of helium entering the metal bellows 300 from the gap between the second device body 20 and the second flange portion 302, which is conducive to further improving the leak detection accuracy.

[0050] In some examples of the present invention, Figure 1 and Figure 2 As shown, the fixing device 100 also includes: a calibration valve 80 and a calibration leak hole 90, at least one of the first device body 10 and the second device body 20 is formed with a second connecting hole 21 extending along the first direction, the second connecting hole 21 is used to connect with the metal bellows 300, and the calibration valve 80 is connected between the calibration leak hole 90 and the second connecting hole 21.

[0051] The fixing device 100 may further include a calibration valve 80 and a calibration leak 90. ​​At least one of the first device body 10 and the second device body 20 is formed with a second communication hole 21 extending along the first direction. As an example, the first device body 10 is formed with a second communication hole 21 extending along the first direction. As another example, the second device body 20 is formed with a second communication hole 21 extending along the first direction. As another example, both the first device body 10 and the second device body 20 are formed with a second communication hole 21 extending along the first direction. The present invention is described using the example of the second device body 20 being formed with the second communication hole 21, where the second communication hole 21 penetrates the second device body 20 along the first direction. During the process of leak testing the metal bellows 300 using the helium mass spectrometry leak detection system 200, the metal bellows 300 is assembled in the assembly space 30, with the second communication hole 21 and the metal bellows 300 facing each other in the first direction, so that the second communication hole 21 is in communication with the metal bellows 300. The calibration valve 80 is connected between the calibration leak hole 90 and the second connecting hole 21. The calibration valve 80 can be a solenoid valve. The valve inlet of the calibration valve 80 is connected to the calibration leak hole 90, and the valve outlet of the calibration valve 80 is connected to the second connecting hole 21. The second connecting hole 21 is connected to the valve outlet and the metal bellows 300. The calibration leak hole 90 and the second connecting hole 21 are connected or disconnected by the solenoid valve.

[0052] The calibration leak 90 can be connected to the first helium storage device. When the solenoid valve is open, the calibration leak 90 is connected to the second connecting hole 21, and the helium in the first helium storage device flows into the metal bellows 300 through the calibration leak 90, the calibration valve 80, and the second connecting hole 21. The helium flowing into the metal bellows 300 through the calibration leak 90 can be detected by the helium mass spectrometer leak detector 202. When the solenoid valve is closed, the calibration leak 90 and the second connecting hole 21 are not connected, and the helium in the first helium storage device cannot flow into the metal bellows 300.

[0053] like Figure 1 and Figure 2 As shown, the helium mass spectrometer leak detection system 200 for the metal bellows 300 according to an embodiment of the present invention includes: a fixing device 100, which is the fixing device 100 of the above embodiment, an injection device 201, which is used to inject helium into the metal bellows 300, and the injection device 201 is the injection device 201 of the above embodiment; a helium mass spectrometer leak detector 202, which is connected to the first connecting hole 11, and the helium mass spectrometer leak detector 202 is the helium mass spectrometer leak detector 202 of the above embodiment.

[0054] By setting the fixing device 100 on the helium mass spectrometer leak detection system 200, metal bellows 300 of different lengths can be assembled in the assembly space 30, thereby improving the versatility of the helium mass spectrometer leak detection system 200. In addition, the simple structure of the helium mass spectrometer leak detection system 200 is conducive to improving the assembly efficiency of the helium mass spectrometer leak detection system 200, thereby improving the leak detection efficiency of the helium mass spectrometer leak detection system 200 for the metal bellows 300.

[0055] Specifically, when the helium mass spectrometer leak detection system 200 is detecting leaks on the metal bellows 300, the metal bellows 300 is assembled into the assembly space 30, the fixing device 100 assembled with the metal bellows 300 to be tested is connected to the helium mass spectrometer leak detection system 200, the helium mass spectrometer leak detector 202 is connected to the first connecting hole 11, the first connecting hole 11 connects the helium mass spectrometer leak detector 202 and the metal bellows 300, the inside of the bellows is evacuated to form a vacuum environment in the metal bellows 300, and the injection device 201 is located on the outside of the metal bellows 300.

[0056] During the leak detection process, the calibration leak 90 is used for calibration. When the calibration valve 80 is closed, the background value I0 and the noise value I n The calibration valve 80 is then opened, allowing the helium in the first helium storage device to flow into the metal bellows 300 through the calibration leak 90. ​​When the output of the helium mass spectrometer leak detector 202 stabilizes, the reaction value I1 of the helium mass spectrometer leak detector 202 is measured. The calibration valve 80 is then closed, and the injection device 201 injects helium toward the outside of the metal bellows 300. If the metal bellows 300 has a leak, the helium will enter the interior of the metal bellows 300 through the leak. The helium that enters the metal bellows 300 is detected by the helium mass spectrometer leak detector 202. If the helium mass spectrometer leak detector 202 indicates a leak, it marks the leak location and records the reaction value I2.

[0057] It should be noted that the leakage rate detection formula of the metal bellows 300 is: , Q is the leakage rate of the metal bellows 300, the unit is I2 is the stable response value of the helium mass spectrometer leak detector 202 when testing the metal bellows 300, and the unit is γ is the helium concentration in %. Q S is the calibration value of the calibrated leak 90 in units of .

[0058] In some examples of the present invention, Figure 1 As shown, the spray device 201 may include: a spray gun 2011 and a helium cylinder 2012 , the spray gun 2011 and the helium cylinder 2012 are connected, the helium cylinder 2012 stores helium, and the helium is sprayed toward the metal bellows 300 through the spray gun 2011 .

[0059] Other structures and operations of the helium mass spectrometer leak detector 202 according to the embodiment of the present invention are well known to those skilled in the art and will not be described in detail here.

[0060] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative uses of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0061] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A fixing device for leak detection of metal bellows, characterized in that: include: a first device body and a second device body, the first device body and the second device body being arranged opposite to each other and spaced apart in a first direction to form an assembly space between the first device body and the second device body, the assembly space being used to assemble a metal bellows, and at least one of the first device body and the second device body being formed with a first communicating hole extending in the first direction, the first communicating hole being used to communicate with the metal bellows; An adjustment mechanism is assembled in cooperation with the first device body and the second device body, and is used to adjust the spacing distance between the first device body and the second device body along the first direction to change the size of the assembly space along the first direction.

2. The fixing device for leak detection of metal bellows according to claim 1, characterized in that: The first device body includes: a first cover plate and a support structure. Along the first direction, the support structure is located between the first cover plate and the second device body and is fixed to the first cover plate. The support structure is located on the side of the assembly space. The adjustment mechanism is assembled in cooperation with the support structure. The first cover plate is formed with the first connecting hole.

3. The fixing device for leak detection of metal bellows according to claim 2, characterized in that: The supporting structure and the first cover plate are spaced apart along the first direction to form an installation space therebetween, wherein the installation space is used for assembling the first flange portion of the metal bellows.

4. The fixing device for leak detection of metal bellows according to claim 3, characterized in that: A first sealing ring is fixedly provided on a surface of the first cover plate facing the assembly space, and the first sealing ring is used to seal a gap between the first cover plate and the first flange portion.

5. The fixing device for leak detection of metal bellows according to claim 2, characterized in that: A first mounting protrusion is formed on an outer surface of the support structure facing away from the assembly space, and a fastener passes through the first cover plate and the first mounting protrusion to fix the support structure and the first cover plate.

6. The fixing device for leak detection of metal bellows according to claim 2, characterized in that: An inner side surface of the support structure facing the assembly space is used to be spaced apart from the metal bellows.

7. The fixing device for leak detection of a metal bellows according to any one of claims 2 to 6, characterized in that: The adjustment mechanism includes: a connecting rod, a first positioning sleeve and a second positioning sleeve, a second mounting protrusion is formed on the outer surface of the support structure away from the assembly space, an external thread is formed on the outer peripheral wall of the connecting rod, the connecting rod is passed through the second mounting protrusion and the second device body along the first direction, the first positioning sleeve is formed with a first threaded hole, the second positioning sleeve is formed with a second threaded hole, the first positioning sleeve is located on the side of the second mounting protrusion away from the second device body, the second positioning sleeve is located on the side of the second device body away from the first device body, and the connecting rod is assembled in the first threaded hole and the second threaded hole.

8. The fixing device for leak detection of metal bellows according to claim 7, characterized in that: The second device body is used to be arranged opposite to the second flange portion of the metal bellows, and the connecting rod is used to pass through the second flange portion.

9. The fixing device for leak detection of metal bellows according to claim 7, characterized in that: A second sealing ring is fixedly provided on the surface of the second device body facing the assembly space, and the second sealing ring is used to seal the gap between the second device body and the second flange portion of the metal bellows.

10. The fixing device for leak detection of a metal bellows according to any one of claims 1 to 6, characterized in that: The fixing device also includes: a calibration valve and a calibration leak hole, at least one of the first device body and the second device body is formed with a second connecting hole extending along the first direction, the second connecting hole is used to connect with the metal bellows, and the calibration valve is connected between the calibration leak hole and the second connecting hole.

11. A helium mass spectrometer leak detection system for a metal bellows, characterized in that: include: A fixing device, wherein the fixing device is a fixing device according to any one of claims 1 to 10; an injection device, the injection device being used to inject helium toward the metal bellows; A helium mass spectrometer leak detector is connected to the first communicating hole.

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