Flue gas separation and purification system applied to preparation of electronic grade sulfuric acid

Abstract

The invention relates to the technical field of sulfuric acid production, in particular to a flue gas separation and purification system applied to preparation of electronic-grade sulfuric acid. Comprising a primary treatment tank for removing flue gas impurities, a secondary treatment tank for absorbing sulfur trioxide gas in flue gas, an evaporation tower for evaporating the sulfur trioxide gas from nicotinic acid and a condensation tank for efficiently liquefying the sulfur trioxide gas, impurities and sulfur trioxide gas in flue gas are deeply removed and efficiently enriched through the multi-stage treatment tank in a dual mode of liquid film absorption and spraying absorption, nicotinic acid is subjected to multi-stage evaporation through the preheating cylinder and the evaporation pipe, and separation and purification of the sulfur trioxide gas are achieved in cooperation with the condensation tank and the condensation assembly. And multi-stage condensation treatment combining path extension type pre-condensation, small-strand distributed type secondary condensation and dynamic rotary type comprehensive condensation is carried out, so that an efficient and high-quality condensation purification effect is further achieved.

Description

Technical Field

[0001] This invention relates to the field of sulfuric acid production technology, and in particular to a flue gas separation and purification system for the preparation of electronic-grade sulfuric acid. Background Technology

[0002] Electronic-grade sulfuric acid, also known as high-purity sulfuric acid or ultra-pure sulfuric acid, is a key ultra-clean, high-purity reagent in semiconductor manufacturing and ultra-large-scale integrated circuit processing. It is mainly used in the cleaning and etching processes of silicon wafers. Its core function is to efficiently remove particulate impurities, inorganic residues, and carbon deposits from the wafer surface, ensuring the yield and performance of the chips. As integrated circuit technology develops towards ultra-large-scale integration and more advanced processes, the feature size of chips has approached the nanometer level, making the purity requirements for electronic-grade sulfuric acid increasingly stringent.

[0003] To reduce costs, sulfuric acid production systems can be used in non-ferrous metal smelting. Non-ferrous smelting flue gas, such as copper smelting flue gas, lead-zinc smelting flue gas, and pyrite smelting flue gas, contains SO3 gas. By introducing SO3-containing flue gas, separating, purifying, condensing, and heating to evaporate the flue gas, the resulting sulfur trioxide can be used to prepare electronic-grade sulfuric acid.

[0004] For example, in the flue gas separation and purification system for the production of electronic grade sulfuric acid disclosed in CN112850657A, the system achieves uniform distribution of cooling water intake through water distribution pipes, water distribution ring plates and heat exchange tubes in the condenser, and extends the flow path of sulfur trioxide gas in the condenser by combining multiple baffles. Although it can achieve the condensation effect of sulfur trioxide gas separated from flue gas, the cooling water adopts a top-down flow mode, which makes the cooling water flow velocity in the heat exchange tube too fast and unable to fill the tube. This results in a small amount of contact between the cooling water and the inner wall of the heat exchange tube, making it difficult to remove a large amount of heat from the heat exchange tube. Moreover, relying solely on this single-stage condensation method makes it difficult to achieve efficient condensation of sulfur trioxide gas, and it is very easy for the gas pressure inside the tank to become too high, which not only reduces the service life of the system, but also causes the inconvenience of having to release the gas pressure periodically. Summary of the Invention

[0005] The purpose of this invention is to provide a flue gas separation and purification system for the preparation of electronic-grade sulfuric acid, in order to solve the aforementioned technical defects.

[0006] The objective of this invention can be achieved through the following technical solution: a flue gas separation and purification system applied to the preparation of electronic-grade sulfuric acid, comprising a primary treatment tank for removing impurities from flue gas, a secondary treatment tank for absorbing sulfur trioxide gas in flue gas, an evaporation tower for evaporating sulfur trioxide gas from nicotinic acid, and a condensation tank for efficient liquefaction of sulfur trioxide gas, wherein a cooling cylinder is fixedly connected inside the condensation tank and a condensation component that cooperates with the cooling cylinder is provided. The condensation assembly includes a rotating disk that rotates in a sealed manner with the condensation tank and the cooling cylinder, and a plurality of cooling blocks that slide against the side walls of the condensation tank and the cooling cylinder are fixedly connected to the bottom of the rotating disk. Cooling protrusions are fixedly attached to the annular outer wall of the cooling cylinder. A cooling groove that matches the cooling protrusions is opened on one side of the cooling block. A water distribution pipe is fixedly connected to the bottom of the rotating disk and inside the cooling cylinder. Multiple connecting pipes with nozzles installed at both ends are fixedly connected to the water distribution pipe.

[0007] Preferably, the rotating disk has a water distribution chamber communicating with the water distribution pipe inside, the cooling block has a cooling water inlet chamber penetrating the top of the rotating disk, and a cooling water outlet chamber communicating with the water distribution chamber and the cooling water inlet chamber inside, and a water inlet pipe is installed on the top of the condenser.

[0008] Preferably, multiple water-blocking rings are equidistantly rotatably connected to the inner wall of the cooling cylinder along the vertical direction, and the water-blocking rings are fixedly connected to the corresponding connecting pipes. A motor for driving the rotating disk is installed on the top of the condenser.

[0009] Preferably, a spiral cavity is formed in the side wall of the condenser, an air inlet pipe is fixedly connected to the outer wall of the condenser and communicates with the top port of the spiral cavity, and the end of the air inlet pipe is fixedly connected to the air outlet of the evaporation tower, and the bottom port of the spiral cavity communicates with the interior of the condenser.

[0010] Preferably, a clearance slot is provided on the annular outer wall of the cooling block at the bottom port of the spiral cavity, and a plurality of inclined dispersion slots are provided on the top of the clearance slot. A guide strip is provided inside the clearance slot and on one side of the corresponding dispersion slot.

[0011] Preferably, the bottom of the cooling cylinder is fixedly connected to a drain pipe that extends to the outside of the condenser, and the height of the drain outlet of the drain pipe is higher than the bottom height of the cooling block. The bottom of the condenser is equipped with a water outlet pipe.

[0012] Preferably, a hook-shaped smoke inlet pipe is installed at the bottom of the primary treatment tank, and several smoke outlets are opened at the bottom of the smoke inlet pipe. A circulation pipe is fixedly connected to one side of the bottom of the primary treatment tank, and the free end of the circulation pipe extends into the interior of the primary treatment tank and is connected to a liquid distribution plate. Multiple atomizing heads are installed at the bottom of the liquid distribution plate, and a circulation pump is installed on the circulation pipe.

[0013] Preferably, multiple dispersed filters are installed inside the primary treatment tank and above the flue gas inlet pipe. A cooler is installed at the bottom of the primary treatment tank. The primary treatment tank and the secondary treatment tank have the same structure. A liquid delivery pipe connected to the liquid inlet of the evaporation tower is installed on the circulation pipe of the secondary treatment tank through a three-way valve. A second flue gas pipe is connected between the top outlet of the primary treatment tank and the flue gas inlet pipe of the secondary treatment tank.

[0014] Preferably, a preheating cylinder is installed on the infusion pipe, and a flue gas pipe is connected between the preheating cylinder and the flue gas inlet pipe of the primary treatment tank. Several fins are installed on the infusion pipe and inside the preheating cylinder. A spiral tube is provided inside the preheating cylinder and outside the fins, with the open end of the spiral tube located outside the preheating cylinder. Several flue gas outlets are opened on one side of the infusion pipe on the spiral tube.

[0015] The beneficial effects of the present invention are as follows: In the process of condensing sulfur trioxide gas, the condenser of the present invention uses the flow of cooling water in the cooling block and the water distribution pipe, combined with multiple water baffles, to achieve segmented spraying of cooling water onto the side wall of the cooling cylinder, thereby achieving rapid cooling of the cooling block and the cooling cylinder. In addition, the rotation of the cooling block promotes full contact between the sulfur trioxide gas and the cooling block and the cooling cylinder, thereby achieving a highly efficient dynamic rotational condensation effect. Furthermore, by combining the spiral cavity with the contact between cooling water and the condenser, sulfur trioxide gas is pre-condensed. Then, by utilizing the rotation of the cooling block and the inclined dispersion groove on the cooling block, secondary condensation is achieved, while assisting in the large-area dispersion treatment of sulfur trioxide gas in the condenser. This achieves a multi-stage condensation treatment that combines path-extended pre-condensation, small-stream dispersion secondary condensation, and dynamic rotational full condensation, further achieving efficient and high-quality condensation and purification effects. This invention achieves simultaneous gas condensation and liquid discharge by pre-adding sulfur trioxide liquid to the condenser and forming a liquid seal with a drain pipe. It also increases the liquid discharge to release pressure when the gas pressure in the condenser increases and reduces or stops the liquid discharge to prevent gas leakage when the gas pressure decreases, thus achieving autonomous pressure regulation and ensuring the safe and stable operation of the system.

[0016] This invention also involves directly injecting flue gas into a refined sulfuric acid solution in a treatment tank via a hook-shaped flue gas inlet pipe. Utilizing the principle of liquid film absorption, impurities and sulfur trioxide are rapidly removed. During this process, multiple dispersing filters break large bubbles into microbubbles to increase the gas-liquid contact area. Simultaneously, a circulating pump draws the solution to a distribution plate, where it is sprayed through an atomizing head to form droplets, further capturing the gas within the escaped microbubbles. This achieves a dual treatment of "liquid film absorption + spray absorption," thereby achieving deep removal of impurities from the flue gas and efficient enrichment of sulfur trioxide gas. Attached Figure Description

[0017] The invention will now be further described with reference to the accompanying drawings; Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram showing the cooperation between the primary treatment tank and the secondary treatment tank of the present invention; Figure 3 This is a schematic diagram of the structure of the primary treatment tank of the present invention; Figure 4 This is a schematic diagram of the preheating cylinder of the present invention; Figure 5 This is a schematic diagram of the internal structure of the condenser of the present invention; Figure 6 This is a schematic diagram of the structure of the condenser of the present invention; Figure 7 This is a schematic diagram of the condensation component of the present invention; Figure 8 This is a schematic diagram of the cooperation between the rotating disk and the cooling block of the present invention; Figure 9 This is a schematic diagram of the cooling block of the present invention; Figure 10 This is a schematic diagram of the water distribution pipe of the present invention.

[0018] Legend: 1. Primary treatment tank; 11. Flue gas inlet pipe; 12. Circulation pipe; 13. Separator; 14. Circulation pump; 15. Dispersion filter; 16. Refrigerator; 2. Secondary treatment tank; 21. Three-way valve; 22. Infusion pipe; 23. Flue gas pipe two; 24. Preheating cylinder; 25. Flue gas pipe one; 26. Fins; 27. Spiral tube; 3. Evaporation tower; 4. Condenser; 41. Cooling cylinder; 42. Water inlet pipe; 43. Spiral cavity; 44. Air inlet pipe; 45. Drain pipe; 5. Condensation assembly; 51. Rotating disc; 52. Cooling block; 53. Water distribution pipe; 54. Connecting pipe; 55. Water distribution chamber; 56. Cooling water inlet chamber; 57. Cooling water outlet chamber; 58. Water baffle ring; 59. Clearance slot; 510. Dispersion slot; 511. Guide bar. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0020] Example 1: Please refer to Figures 1-10 As shown, the problem that efficient heat exchange is difficult in existing technologies that rely solely on a single-stage top-to-bottom cooling water flow can be solved by the following solution; The flue gas separation and purification system applied to the preparation of electronic-grade sulfuric acid in this embodiment includes a primary treatment tank 1 for removing impurities from the flue gas, a secondary treatment tank 2 for absorbing sulfur trioxide gas in the flue gas, an evaporation tower 3 for evaporating sulfur trioxide gas from nicotinic acid, and a condensation tank 4 for efficiently liquefying sulfur trioxide gas. A cooling cylinder 41 is fixedly connected inside the condensation tank 4, and a condensation component 5 that cooperates with the cooling cylinder 41 is provided. The condensation assembly 5 includes a rotating disk 51 that is sealed and rotates with the condensation tank 4 and the cooling cylinder 41. The area between the condensation tank 4 and the cooling cylinder 41 is a condensation chamber for condensing sulfur dioxide gas obtained from nicotine evaporation. The top of the cooling cylinder 41 is rotatably connected to the rotating disk 51. The area between the top of the rotating disk 51 and the top of the condensation tank 4 is a cooling auxiliary chamber for the entry of cooling water to assist in the cooling of the side wall of the condensation tank 4. Furthermore, the bottom of the rotating disk 51 is fixedly connected with multiple cooling blocks 52 that slide against the side walls of the condenser tank 4 and the cooling cylinder 41. The cooling blocks 52 and the cooling cylinder 41 are cooled. In addition, the rotation of the cooling blocks 52 in the condensation chamber promotes the full contact between the sulfur trioxide gas and the cooling blocks 52 and the cooling cylinder 41, thereby achieving a highly efficient dynamic rotational condensation effect, condensing the sulfur trioxide gas in the condensation chamber into sulfur trioxide liquid. Cooling protrusions are fixedly attached to the annular outer wall of the cooling cylinder 41, and a cooling groove that matches the cooling protrusions is opened on one side of the cooling blocks 52. During the rotation of the cooling block 52, the cooling protrusions rotate relative to each other in the cooling tank. The rotating cooling block 52 forces the sulfur trioxide gas in the condensation chamber to pass between the cooling tank on the cooling block 52 and the cooling protrusions on the cooling cylinder 41 for rapid condensation. The increased contact surface between the cooling protrusions and the side wall of the cooling tank further improves the cooling efficiency. A water distribution pipe 53 is fixedly connected to the bottom of the rotating disk 51 and inside the cooling cylinder 41. Multiple connecting pipes 54 with nozzles installed at both ends are fixedly connected to the water distribution pipe 53. Cooling water is injected into the multiple connecting pipes 54 through the water distribution pipe 53 and then sprayed onto the cooling cylinder 41 through the nozzles to cool the cooling cylinder 41. The nozzles are rotary nozzles to further increase the spray range and thus assist in the cooling effect of the cooling cylinder 41.

[0021] The rotating disk 51 has a water distribution chamber 55 that communicates with the water distribution pipe 53. The cooling block 52 has a cooling water inlet chamber 56 that passes through the top of the rotating disk 51, and a cooling water outlet chamber 57 that communicates with the water distribution chamber 55 and the cooling water inlet chamber 56. The top of the condenser 4 is equipped with a water inlet pipe 42. Cooling water is injected into the condenser tank 4 above the rotating disk 51 through the inlet pipe 42, and the condenser tank 4 is simultaneously subjected to auxiliary cooling treatment. The water then enters the cooling inlet chamber 56, cooling outlet chamber 57, water distribution chamber 55, water distribution pipe 53 and multiple connecting pipes 54 in multiple cooling blocks 52 in sequence, and is then sprayed onto the cooling cylinder 41 through the nozzle, so that the multiple cooling blocks 52 and the cooling cylinder 41 are cooled together.

[0022] Multiple water-blocking rings 58 are equidistantly rotatably connected to the inner wall of the cooling cylinder 41 in the vertical direction, and the water-blocking rings 58 are fixedly connected to the corresponding connecting pipes 54. While spraying cooling water onto the inner wall of the cooling cylinder 41, the multiple water-blocking rings 58 work together to intercept the cooling water sprayed from the connecting pipes 54, thereby improving the contact effect between the cooling water and the cooling cylinder 41 and increasing the cooling effect of the cooling cylinder 41. Furthermore, by distributing multiple water-blocking rings 58 vertically in the cooling cylinder 41, segmented spraying is achieved, and the cooling water flowing down in the segmented spraying range is isolated from the cooling cylinder 41 below and falls to the bottom of the condenser tank 4. This prevents the cooling water above the cooling cylinder 41 from being passively heated due to heat exchange and flowing along the wall to the lower half of the cooling cylinder 41, which would make it difficult to efficiently cool the lower half of the cooling cylinder 41. This achieves uniform cooling of the entire cooling cylinder 41. A motor that drives the rotating disk 51 to rotate is installed on the top of the condenser tank 4.

[0023] A spiral cavity 43 is provided in the side wall of the condenser 4. An air inlet pipe 44 is fixedly connected to the outer wall of the condenser 4 and communicates with the top port of the spiral cavity 43. The end of the air inlet pipe 44 is fixedly connected to the air outlet of the evaporation tower 3. The bottom port of the spiral cavity 43 communicates with the inside of the condenser 4. The evaporation tower 3 evaporates the sulfur trioxide gas in nicotinic acid and injects it into the spiral cavity 43 in the condenser 4 through the air inlet pipe 44 for pre-condensation treatment. Then it enters the condensation cavity between the condenser 4 and the cooling cylinder 41.

[0024] A clearance slot 59 is provided on the annular outer wall of the cooling block 52 at the bottom port of the spiral cavity 43, and multiple inclined dispersion slots 510 are provided on the top of the clearance slot 59. A guide strip 511 is provided in the clearance slot 59 and on one side of the corresponding dispersion slot 510. The motor drives the rotating disk 51 to rotate. Sulfur trioxide gas enters the condensation cavity through the spiral cavity 43 and enters the clearance slot 59 on the cooling block 52 at the same time. Combined with the rotation of the cooling block 52 and the multiple guide strips 511 in the clearance slot 59, the continuously entering sulfur trioxide gas is prompted to enter the multiple inclined dispersion slots 510 in sequence, which helps the sulfur trioxide gas to be evenly distributed in the condensation cavity. Furthermore, the dispersed sulfur trioxide gas undergoes secondary condensation treatment for rapid condensation, achieving small-stream dispersed secondary condensation. This is combined with multi-stage condensation treatment, which integrates path-extended pre-condensation and dynamic rotational full-scale condensation, to further achieve efficient and high-quality condensation and purification.

[0025] The bottom of the cooling cylinder 41 is fixedly connected to a drain pipe 45 that extends through to the outside of the condenser tank 4, and the height of the outlet of the drain pipe 45 is higher than the bottom height of the cooling block 52. Sulfur trioxide liquid is pre-added into the condenser tank 4, and the liquid level is flush with the outlet end of the drain pipe 45, forming a liquid seal through the drain pipe 45. As sulfur trioxide gas in the condensation chamber continuously condenses into liquid sulfur trioxide, the liquid level of the liquid sulfur trioxide in the drain pipe 45 rises and is discharged. This enables the simultaneous condensation of gas and discharge of liquid. When the gas pressure in the condensation tank 4 increases, the liquid discharge rate is increased to release the pressure. When the gas pressure decreases, the liquid discharge rate is reduced or stopped to prevent gas leakage. This achieves autonomous pressure regulation and ensures the safe and stable operation of the system. A water outlet pipe is installed at the bottom of the condensation tank 4.

[0026] Example 2: Please refer to Figure 1-Figure 4 As shown, the following solutions can be used to address the problem of the inability to efficiently and fully absorb and treat impurities and sulfur dioxide in flue gas. In this embodiment, a hook-shaped smoke inlet pipe 11 is installed at the bottom of the primary treatment tank 1, and several smoke outlets are opened at the bottom of the smoke inlet pipe 11. A refined sulfuric acid solution is injected into the primary treatment tank 1, and the flue gas is directly injected into the refined sulfuric acid solution of the primary treatment tank 1 through the hook-shaped smoke inlet pipe 11. Impurities are quickly removed by utilizing the liquid film absorption principle, and the gas is evenly dispersed and discharged through multiple smoke outlets to improve absorption efficiency. A circulation pipe 12 is fixedly connected to one side of the bottom of the primary treatment tank 1, and the free end of the circulation pipe 12 extends into the interior of the primary treatment tank 1 and is connected to a liquid separator 13. Multiple atomizing heads are installed at the bottom of the liquid separator 13, and a circulation pump 14 is installed on the circulation pipe 12. The circulation pump 14 draws the solution to the liquid separator 13, and sprays it through the atomizing heads to form droplets, further capturing the gas in the escaped microbubbles, realizing the dual treatment of liquid film absorption and spray absorption, thereby achieving the deep removal of impurities in the flue gas and the efficient enrichment of sulfur trioxide gas.

[0027] Multiple dispersion filters 15 are installed inside the primary treatment tank 1 and above the flue gas inlet pipe 11. Flue gas is injected into the refined sulfuric acid solution in the primary treatment tank 1 through the hook-shaped flue gas inlet pipe 11. The multiple dispersion filters 15 cut large bubbles into small bubbles to increase the gas-liquid contact area. A cooler 16 is installed at the bottom of the primary treatment tank 1 to cool the refined sulfuric acid solution. The primary treatment tank 1 and the secondary treatment tank 2 have the same structure. The circulation pipe 12 of the secondary treatment tank 2 is connected to the liquid inlet of the evaporation tower 3 by a three-way valve 21. The top gas outlet of the primary treatment tank 1 and the flue gas inlet pipe 11 of the secondary treatment tank 2 are connected by a flue gas pipe 23. The flue gas absorbed by the primary treatment tank 1 enters the inlet pipe 11 of the secondary treatment tank 2 through the flue gas pipe 23. Combined with the dispersion filter 15, circulation pipe 12, circulation pump 14, liquid separator 13 and atomizing head, the sulfur trioxide gas in the flue gas is fully absorbed and treated by the refined sulfuric acid solution in the secondary treatment tank 2 to form nicotinic acid. After absorption, the nicotinic acid in the secondary treatment tank 2 is injected into the evaporation tower 3 through the circulation pipe 12, circulation pump 14, three-way valve 21 and liquid delivery pipe 22 to evaporate the purified sulfur trioxide gas.

[0028] A preheating cylinder 24 is installed on the infusion pipe 22, and a flue gas pipe 25 is connected between the preheating cylinder 24 and the flue gas inlet pipe 11 of the primary treatment tank 1. Several fins 26 are installed on the infusion pipe 22 and inside the preheating cylinder 24. A spiral tube 27 is provided inside the preheating cylinder 24 and around the fins 26, and the open end of the spiral tube 27 is located outside the preheating cylinder 24. Several flue gas outlets are opened on the spiral tube 27 on one side of the infusion pipe 22. High-temperature non-ferrous smelting flue gas is injected into spiral pipe 27 and sprayed onto liquid delivery pipe 22 and fins 26 through several flue gas outlet holes. Liquid delivery pipe 22 is preheated to improve the efficiency of heating and evaporating nicotinic acid in evaporation tower 3. Then, it is collected through preheating cylinder 24 and injected into refined sulfuric acid solution in primary treatment tank 1 through flue gas pipe 25 and flue gas inlet pipe 11.

[0029] Example 3: Please refer to Figures 1-10 As shown, the present invention also proposes a method for using a flue gas separation and purification system for the preparation of electronic-grade sulfuric acid, comprising the following steps: Step 1: High-temperature non-ferrous smelting flue gas is injected into spiral tube 27 and sprayed onto liquid delivery pipe 22 and fins 26 through several flue gas outlet holes. Liquid delivery pipe 22 is preheated and then collected through preheating cylinder 24 and injected into refined sulfuric acid solution in primary treatment tank 1 via flue gas pipe 25 and flue gas inlet pipe 11. The refined sulfuric acid solution absorbs and treats alkaline oxide impurities, reducing impurities, water-soluble impurities and metallic impurities in the flue gas. During the flue gas discharge process, multiple dispersion filters 15 are used to disperse the flue gas in the refined sulfuric acid solution. Combined with the circulation pipe 12, circulation pump 14, liquid separator 13 and atomizing head, refined sulfuric acid solution is sprayed onto the upper part of the primary treatment tank 1 to fully absorb impurities in the flue gas. Step 2: The flue gas that has absorbed impurities in the primary treatment tank 1 enters the inlet pipe 11 of the secondary treatment tank 2 through the flue gas pipe 23. Combined with the dispersion filter 15, circulation pipe 12, circulation pump 14, liquid separator 13 and atomizing head, the sulfur trioxide gas in the flue gas is fully absorbed and treated by the refined sulfuric acid solution in the secondary treatment tank 2 to form nicotinic acid. After absorption, the nicotinic acid in the secondary treatment tank 2 is injected into the evaporation tower 3 through the circulation pipe 12, circulation pump 14, three-way valve 21 and liquid delivery pipe 22, and is preheated during the transportation process. Step 3: The sulfur trioxide gas in nicotinic acid is evaporated through the evaporation tower 3 and injected into the spiral cavity 43 in the condenser tank 4 through the inlet pipe 44 for pre-condensation treatment. Then it enters the condensation cavity between the condenser tank 4 and the cooling cylinder 41. Cooling water is injected into the condenser tank 4 above the rotating disk 51 through the water inlet pipe 42. It then enters the cooling water inlet cavity 56, cooling water outlet cavity 57 in multiple cooling blocks 52, the water distribution cavity 55 in the rotating disk 51, the water distribution pipe 53, and multiple connecting pipes 54 in sequence. Finally, it is sprayed onto the cooling cylinder 41 through the nozzle to cool the multiple cooling blocks 52 and the cooling cylinder 41. Then it is discharged through the water outlet pipe of the condenser tank 4, thereby condensing the sulfur trioxide gas in the condensation cavity into sulfur trioxide liquid. Step 4: While spraying cooling water onto the inner wall of the cooling cylinder 41, multiple water baffles 58 are used to spray the cooling cylinder 41 in segments in the vertical direction to achieve uniform cooling of the entire cooling cylinder 41. Step 5: The motor drives the rotating disk 51 to rotate, and the rotating disk 51 drives multiple cooling blocks 52 to rotate in the condensation chamber. The rotating cooling blocks 52 force the sulfur trioxide gas in the condensation chamber to pass between the cooling grooves on the cooling blocks 52 and the cooling protrusions on the cooling cylinder 41 for rapid condensation. The sulfur trioxide gas enters the condensation chamber through the spiral cavity 43 and enters the relief slot 59 on the cooling blocks 52 at the same time. Combined with the rotation of the cooling blocks 52 and the multiple guide strips 511 in the relief slot 59, the continuously entering sulfur trioxide gas is prompted to enter multiple obliquely arranged dispersion slots 510 in sequence, which helps the sulfur trioxide gas to be evenly distributed in the condensation chamber and performs secondary condensation treatment on the dispersed sulfur trioxide gas for rapid condensation. Step Six: Before condensing sulfur trioxide gas in condenser 4, purified sulfur trioxide liquid is added to the condensation chamber, with the liquid level leveled with the outlet end of drain pipe 45. As sulfur trioxide gas in the condensation chamber continuously condenses into sulfur trioxide liquid, the liquid level of sulfur trioxide liquid in drain pipe 45 rises and is discharged. If the gas pressure of sulfur trioxide gas in the condensation chamber is too high, it will push the sulfur trioxide liquid in the condensation chamber to continuously discharge, eliminating the phenomenon of excessive internal pressure. If the gas pressure is too low, it will not be able to push the sulfur trioxide liquid in drain pipe 45 to discharge, thus simultaneously preventing the leakage of sulfur trioxide gas.

[0030] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A flue gas separation and purification system for the preparation of electronic-grade sulfuric acid, comprising a primary treatment tank (1) for removing impurities from the flue gas, a secondary treatment tank (2) for absorbing sulfur trioxide gas in the flue gas, an evaporation tower (3) for evaporating sulfur trioxide gas from nicotinic acid, and a condensation tank (4) for efficient liquefaction of sulfur trioxide gas, characterized in that, The condenser (4) is fixedly connected to a cooling cylinder (41) and a condensation assembly (5) that cooperates with the cooling cylinder (41). The condensation assembly (5) includes a rotating disk (51) that rotates in a sealed manner with the condensation tank (4) and the cooling cylinder (41), and a plurality of cooling blocks (52) that slide against the side walls of the condensation tank (4) and the cooling cylinder (41) are fixedly connected to the bottom of the rotating disk (51). Cooling protrusions are fixedly attached to the annular outer wall of the cooling cylinder (41). A cooling groove that matches the cooling protrusions is opened on one side of the cooling block (52). A water distribution pipe (53) is fixedly connected to the bottom of the rotating disk (51) and inside the cooling cylinder (41). Multiple connecting pipes (54) with nozzles installed at both ends are fixedly connected to the water distribution pipe (53).

2. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, The rotating disk (51) has a water distribution chamber (55) that communicates with the water distribution pipe (53) inside. The cooling block (52) has a cooling water inlet chamber (56) that runs through the top of the rotating disk (51) and a cooling water outlet chamber (57) that communicates with the water distribution chamber (55) and the cooling water inlet chamber (56). The condenser (4) has a water inlet pipe (42) installed on the top.

3. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, The inner wall of the cooling cylinder (41) is equidistantly connected with multiple water baffles (58) in the vertical direction, and the water baffles (58) are fixedly connected with the corresponding connecting pipes (54). The top of the condenser (4) is equipped with a motor that drives the rotating disk (51) to rotate.

4. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, A spiral cavity (43) is provided in the side wall of the condenser (4). An air inlet pipe (44) communicating with the top port of the spiral cavity (43) is fixedly connected to the outer wall of the condenser (4). The end of the air inlet pipe (44) is fixedly connected to the air outlet of the evaporation tower (3). The bottom port of the spiral cavity (43) is connected to the inside of the condenser (4).

5. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 4, characterized in that, The cooling block (52) has a relief slot (59) on its annular outer wall corresponding to the bottom port of the spiral cavity (43), and a plurality of inclined dispersion slots (510) are provided on the top of the relief slot (59). A guide strip (511) is provided in the relief slot (59) and on one side of the corresponding dispersion slot (510).

6. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, The bottom of the cooling cylinder (41) is fixedly connected to a drain pipe (45) that extends through to the outside of the condenser (4), and the height of the outlet of the drain pipe (45) is higher than the bottom height of the cooling block (52). The bottom of the condenser (4) is equipped with a water outlet pipe.

7. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 1, characterized in that, The bottom of the primary treatment tank (1) is equipped with a hook-shaped smoke inlet pipe (11), and the bottom of the smoke inlet pipe (11) is provided with several smoke outlets. A circulation pipe (12) is fixedly connected to one side of the bottom of the primary treatment tank (1), and the free end of the circulation pipe (12) extends into the interior of the primary treatment tank (1) and is connected to a liquid distribution plate (13). Multiple atomizing heads are installed at the bottom of the liquid distribution plate (13), and a circulation pump (14) is installed on the circulation pipe (12).

8. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 7, characterized in that, Multiple dispersed filters (15) are installed inside the primary treatment tank (1) and above the flue gas inlet pipe (11). A cooler (16) is installed at the bottom of the primary treatment tank (1). The primary treatment tank (1) and the secondary treatment tank (2) have the same structure. A liquid delivery pipe (22) connected to the liquid inlet of the evaporation tower (3) is installed on the circulation pipe (12) of the secondary treatment tank (2) through a three-way valve (21). A flue gas pipe (23) is connected between the top outlet of the primary treatment tank (1) and the flue gas inlet pipe (11) of the secondary treatment tank (2).

9. The flue gas separation and purification system for the preparation of electronic-grade sulfuric acid according to claim 8, characterized in that, A preheating cylinder (24) is installed on the infusion pipe (22), and a flue gas pipe (25) is connected between the preheating cylinder (24) and the flue gas inlet pipe (11) of the primary treatment tank (1). Several fins (26) are installed on the infusion pipe (22) and inside the preheating cylinder (24). A spiral tube (27) is provided inside the preheating cylinder (24) and outside the fins (26). The open end of the spiral tube (27) is located outside the preheating cylinder (24). Several flue gas outlets are opened on the spiral tube (27) on one side of the infusion pipe (22).

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