Non-contact micro magnetic force measuring device

Abstract

The invention provides a non-contact micro magnetic force measuring device, and belongs to the field of non-contact micro force measurement. The problem that it is difficult to measure the curve of the micro force changing along with the distance by directly connecting the weight is solved. The magnetic force calibration device is suitable for magnetic force calibration between permanent magnets with the output magnitude of milliNewton, and the specific application range is that the minimum stepping distance capable of being tested by the device is 0.1 mm, and the applicable temperature is 0-35 DEG C. Micro magnetic force is generated through the two centering permanent magnet columns, the direction is vertically downward, different micro magnetic force is obtained by changing the distance between the two permanent magnets through the XYZ moving table, and the micro magnetic force is measured through the electronic balance. The device can realize the target that the axes of the two permanent magnets are positioned in the center of the electronic balance. The micro electromagnetic force measuring device can achieve the purpose of static calibration of a milliNewton-level magnetic force generation system at different temperatures.

Description

Technical Field

[0001] This invention belongs to the field of micro force measuring devices, and in particular relates to a non-contact micro magnetic force measuring device. Background Technology

[0002] To determine the relationship between instrument output values ​​and actual values, enabling instruments to perform data acquisition, calculation, and display more accurately, and to identify and compensate for potential errors during measurement, thereby improving the accuracy and reliability of measurement results, calibration of measuring instruments is necessary. Calibration typically involves using objects with constant physical quantities, such as unit mass blocks or rods of unit length, to form a method that expresses the physical quantity being measured by the calibrated instrument through specific connections. For example, connecting weights to a bearing to calibrate the bearing's frictional torque. However, the generation of non-contact, minute forces is highly dependent on distance, making it difficult to obtain the curve of this minute force changing with distance simply by directly connecting weights. Summary of the Invention

[0003] In view of this, in order to solve the problem mentioned in the background art that it is difficult to measure the curve of the small force changing with distance by directly connecting weights, the present invention proposes a non-contact micro-magnetic force measuring device, which is suitable for magnetic force calibration between permanent magnets with an output magnitude in the millinewton range. Specifically, its applicable scope is as follows: The device has a minimum testable step distance of 0.1 mm and is applicable to temperatures ranging from 0℃ to 35℃. It generates a minute magnetic force vertically downwards using two pairs of concentric permanent magnet columns. Different minute magnetic forces are obtained by changing the distance between the two permanent magnets using an XYZ moving stage, and these forces are measured using an electronic balance. The device can achieve the goal of aligning the axes of the two permanent magnets at the center of the electronic balance. This micro-electromagnetic force measuring device can perform static calibration of a millinewton-level magnetic force generation system at different temperatures.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a non-contact micro magnetic force measuring device, comprising an XYZ moving device, a permanent magnet positioning device, a vibration isolation table, an electronic balance, a permanent magnet fixture, a positioning sleeve, and two permanent magnets. The electronic balance is fixed with a permanent magnet fixture, a second permanent magnet is installed inside the permanent magnet fixture, and a positioning sleeve is installed on the permanent magnet fixture. The XYZ moving device is connected to the permanent magnet positioning device. The XYZ moving device includes an XY moving stage, a Z moving stage, and an L-shaped plate. The permanent magnet positioning device includes an irregularly shaped connecting plate, a laser displacement sensor, a linear guide shaft, and a laser ranging block. The Z moving stage is fixed on the XY moving stage and moves with it in the XY direction. One end of the L-shaped plate is fixed to the Z moving stage, and the other end is fixed to the irregularly shaped connecting plate. The laser displacement sensor is installed on the upper part of the irregularly shaped connecting plate. A linear guide shaft is installed in the middle of the irregularly shaped connecting plate. A permanent magnet is fixed below the linear guide shaft by a permanent magnet mounting sleeve. The laser ranging block can be replaced with the permanent magnet mounting sleeve.

[0005] Furthermore, a positioning pin bushing is installed in the middle of the irregular connecting plate, and the positioning pin is installed in the hole in the positioning pin bushing. The linear guide shaft has a connecting hole at the tail end, which is connected to the positioning pin.

[0006] Furthermore, the linear guide shaft has a threaded hole at its end, and the permanent magnet mounting sleeve is connected to the end of the linear guide shaft by a thread. The first permanent magnet is mounted on the permanent magnet mounting sleeve, and the end face of the first permanent magnet is aligned with the end face of the permanent magnet mounting sleeve.

[0007] Furthermore, the upper protrusion structure of the laser ranging block is the same as that of the permanent magnet mounting sleeve.

[0008] Furthermore, the lower part of the irregularly shaped connecting plate is equipped with a V-shaped block, a mounting hinge seat, and a fixing hinge seat.

[0009] Furthermore, slots are cut on both sides of the crossbar, and a through hole is provided on the left side, which is connected to the mounting hinge seat through the mounting hinge shaft and the first fixing ring.

[0010] Furthermore, the fixed hinge seat has a through hole at its center, and the hinge bolt is installed on the fixed hinge seat through the fixed hinge shaft and the second fixed ring. The crossbar has a threaded hole at its center, and the set spring pin is installed in the threaded hole. The crossbar is locked by the wing nut and the hinge bolt, and the set spring pin clamps the linear guide shaft.

[0011] Furthermore, the entire measuring device is placed in a temperature-controlled chamber for temperature control.

[0012] Furthermore, the XY moving stage and the electronic balance are fixed on the vibration isolation platform.

[0013] A method for using a non-contact micro-magnetic force measuring device includes the following steps: Step 1: Adjust the XY and Z stages to allow the linear guide shaft to enter the middle hole of the positioning sleeve, ensuring coaxiality between the first permanent magnet mounted on the linear guide shaft and the second permanent magnet mounted on the permanent magnet fixture. Adjust the Z stage to raise the linear guide shaft, remove the positioning sleeve from the permanent magnet fixture, and replace the permanent magnet mounting sleeve at the end of the linear guide shaft with a laser ranging block. Read the laser displacement sensor reading at this time. This reading is the distance between the laser displacement sensor and the end face of the first permanent magnet connected to the linear guide shaft. When measuring force, subtract this distance value from the laser displacement sensor reading to obtain the actual distance between the two permanent magnets. Adjust the height of the Z stage to the initial position and replace the laser ranging block with the permanent magnet mounting sleeve. Step 2: After the entire system reaches the set temperature, record the readings of the laser displacement sensor and the electronic balance. Adjust the Z-axis to move downwards and observe the laser displacement sensor reading. When the Z-axis moves a given distance, lock the knob on the Z-axis. After the electronic balance reading stabilizes, record the electronic balance reading. Compared with the prior art, the advantages of the non-contact micro magnetic force measuring device of the present invention are: 1. This invention uses an electronic balance as the measuring instrument, which has high measurement accuracy. It can transmit and record measurement results when connected to a computer, making it suitable for calibration of non-contact micro-load forces.

[0014] 2. This invention uses a laser displacement sensor, which can accurately record the displacement of the linear guide shaft in the Z direction.

[0015] 3. This invention ensures the perpendicularity of the linear guide shaft by designing a V-block and a locking spring pin. Attached Figure Description

[0016] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings: Figure 1 This is a schematic diagram of the structure of the non-contact micro magnetic force measuring device described in this invention; Figure 2 This is a perspective view of the non-contact micro magnetic force measuring device described in this invention; Figure 3 This is a schematic diagram of the structure of the XYZ mobile device described in this invention; Figure 4 This is a schematic diagram of the permanent magnet positioning device described in this invention; Figure 5 This is a schematic diagram of the non-contact micro magnetic force measuring device described in this invention placed in a constant temperature chamber. In the diagram: XYZ moving device 1, permanent magnet positioning device 2, vibration isolation table 3, electronic balance 4, permanent magnet fixture 5, positioning sleeve 6, No. 1 permanent magnet 7, XY moving stage 1-1, Z moving stage 1-2, first screw 1-3, L-shaped plate 1-4, second screw 1-5, irregular connecting plate 2-1, third screw 2-2, laser displacement sensor 2-3, positioning pin bushing 2-4, positioning pin 2-5, fourth screw 2-6, linear guide shaft 2-7, V-block 2-8, mounting hinge seat 2-12, mounting hinge shaft 2-9, first fixing ring 2-10, fixing hinge seat 2-16, fixing hinge shaft 2-15, second fixing ring 2-14, hinge bolt 2-18, wing nut 2-17, crossbar 2-11, set spring pin 2-13, permanent magnet mounting sleeve 2-19, laser ranging block 2-20. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of the present invention can be combined with each other, and the described embodiments are only some embodiments of the present invention, not all embodiments.

[0018] See Figure 1-5 This embodiment describes a non-contact micro magnetic force measuring device, comprising an XYZ moving device 1, a permanent magnet positioning device 2, a vibration isolation table 3, an electronic balance 4, a permanent magnet fixture 5, a positioning sleeve 6, and two permanent magnets. The permanent magnet fixture 5 is fixed on the electronic balance 4, and a second permanent magnet is installed inside the permanent magnet fixture 5. The positioning sleeve 6 is installed on the permanent magnet fixture 5.

[0019] The XYZ moving device 1 is connected to the permanent magnet positioning device 2. The XYZ moving device 1 includes an XY moving stage 1-1, a Z moving stage 1-2, and an L-shaped plate 1-4. The permanent magnet loading device 2 includes a shaped connecting plate 2-1, a laser displacement sensor 2-3, a linear guide shaft 2-7, and a laser ranging block 2-20. The Z moving stage 1-2 is fixed on the XY moving stage 1-1 and moves with it in the XY direction. One end of the L-shaped plate 1-4 is fixed to the Z moving stage 1-2, and the other end is fixed to the shaped connecting plate 2-1. The laser displacement sensor 2-3 is installed on the upper part of the shaped connecting plate 2-1. The linear guide shaft 2-7 is installed in the middle of the shaped connecting plate 2-1. A permanent magnet 7 is fixed below the linear guide shaft 2-7 through a permanent magnet mounting sleeve 2-19. The laser ranging block 2-20 can be replaced with the permanent magnet mounting sleeve 2-19.

[0020] The top and bottom plates of the XY moving stage 1-1 and the Z moving stage 1-2 are provided with a set of threaded holes spaced 25mm apart. The Z moving stage 1-2 is fixed to the XY moving stage 1-1 by the first screw 1-3 and moves with it in the XY direction. The L-shaped plate 1-4 has two rows of threaded holes on its bottom edge, each spaced 25mm apart, and is installed on the Z moving stage 1-2 by the first screw, moving with it. The Z moving stage 1-2 and the XY moving stage 1-1 are connected and positioned through their threaded holes, and the L-shaped plate 1-4 and the Z moving stage 1-2 are connected and positioned through threads, allowing the linear guide shaft 2-7 mounting part to move in the XYZ direction.

[0021] The vibration isolation table 3 and the XY moving table 1-1 are connected by threads and positioned through equidistant threaded holes on the vibration isolation table 3.

[0022] The upper rear end face of the irregular connecting plate 2-1 has 4 threaded holes, which are installed on the L-shaped plate 1-4 by the second screw 1-5. The front end face of the irregular connecting plate 2-1 has 2 threaded holes. The laser displacement sensor 2-3 is installed on the irregular connecting plate 2-1 by the third screw 2-2 to measure the distance to the end face of the second permanent magnet.

[0023] The irregular connecting plate 2-1 has a through hole in the middle. The positioning pin sleeve 2-4 is connected to the irregular connecting plate 2-1 through the through hole. The positioning pin 2-5 is installed in the hole in the positioning pin sleeve 2-4. The linear guide shaft 2-7 has a connecting hole at the tail end. It is connected to the positioning pin 2-5 through the connecting hole. It is vertically downward under the influence of gravity. The linear guide shaft 2-7 has a threaded hole at the end. The permanent magnet mounting sleeve 2-19 is connected to the end of the linear guide shaft 2-7 by thread.

[0024] The irregular connecting plate 2-1 has four through holes at its lower part, and the V-block 2-8 has four through holes on both sides. The mounting hinge seat 2-12 and the fixed hinge seat 2-16 each have two threaded holes. The fourth screw 2-6 passes through the irregular connecting plate 2-1 and the V-block 2-8 and connects to the mounting hinge seat 2-12 and the fixed hinge seat 2-16 respectively, thus mounting the V-block 2-8, mounting hinge seat 2-12, and fixed hinge seat 2-16 onto the irregular connecting plate 2-1. The crossbar 1-22 has slots on both sides, with a through hole on the left side, which connects to the mounting hinge seat 2-12 via the mounting hinge shaft 2-9 and the first fixing ring 2-10. The fixed hinge seat 1-17 has a through hole in the center. The hinge bolt 1-20 is installed on the fixed hinge seat 2-16 through the fixed hinge shaft 2-15 and the second fixing ring 2-14. The crossbar 2-11 has a threaded hole in the center. The set spring pin 2-13 is installed in the threaded hole. The crossbar 2-11 is locked by the wing nut 2-17 and the hinge bolt 2-18. The set spring pin 2-13 clamps the linear guide shaft 2-7. The connection and positioning of the laser displacement sensor 2-3 and the irregular connecting plate 2-1 are achieved by threads, so that the laser emitted by the laser displacement sensor 2-3 is perpendicular to the permanent magnet fixture 4, and the laser beam can pass through the gap between the set spring pin 2-13 and the hinge seat.

[0025] The axial positioning of the linear guide shaft 2-7 is achieved through a shaft-hole mating connection between the shaft end connecting hole and the positioning pin 2-5 mounted on the irregular connecting plate 2-1. The perpendicularity index of the linear guide shaft 2-7 is achieved through the V-block 2-8 and the locking spring pin 2-13 connected to the irregular connecting plate 2-1.

[0026] The linear guide shaft 2-7 and the permanent magnet mounting sleeve 2-19 are connected by threads to ensure their coaxiality.

[0027] The linear guide shaft 2-7 is connected to the laser rangefinder block 2-20 (which can be replaced by the permanent magnet mounting sleeve 2-19) by a thread to ensure the perpendicularity of the end face of the laser rangefinder block 2-20 to the laser beam.

[0028] The upper protrusion structure of the laser ranging block 2-20 is the same as that of the permanent magnet mounting sleeve 2-19, and the end face of the first permanent magnet is aligned with the end face of the permanent magnet mounting sleeve 2-19. After replacing the permanent magnet mounting sleeve 2-19 at the end of the linear guide shaft 2-7 with the laser ranging block 2-20, read the reading of the laser displacement sensor 2-3. The reading is the distance between the end face of the laser displacement sensor 2-3 and the end face of the first permanent magnet 6 connected to the linear guide shaft 2-7.

[0029] The entire measuring instrument is placed in a constant temperature chamber for temperature control.

[0030] Method of using the non-contact micro magnetic force measuring device of the present invention: (1) Rotate the knobs on the XY moving stage 1-1 and the Z moving stage 1-2 to allow the linear guide shaft 2-7 to enter the middle hole of the positioning sleeve 6, ensuring coaxiality between the first permanent magnet 7 on the linear guide shaft 2-7 and the second permanent magnet installed on the permanent magnet fixture 5. Rotate the knob on the Z moving stage to raise the linear guide shaft 2-7, remove the positioning sleeve 6 on the permanent magnet fixture 5, and replace the permanent magnet mounting sleeve 2-19 at the shaft end of the linear guide shaft 2-7 with the laser ranging block 2-20. Read the reading of the laser displacement sensor 2-3 at this time. This reading is the distance between the end face of the laser displacement sensor 2-3 and the first permanent magnet 7 connected to the linear guide shaft 2-7. When measuring the force, subtract this distance value from the reading of the laser displacement sensor 2-3 to get the actual distance between the two permanent magnets. Adjust the height of the Z moving stage 1-2 to the initial position and replace the laser ranging block 2-20 with the permanent magnet mounting sleeve 2-19. (2) After the entire system reaches the set temperature, record the readings of the laser displacement sensor and the electronic balance 4. Rotate the knob on the Z-moving stage to move the Z-moving stage 1-2 downwards in a step of 0.1 mm. Observe the readings of the laser displacement sensor. When the Z-moving stage 1-2 moves a given distance, lock the knob on the Z-moving stage. After the reading of the electronic balance 4 stabilizes, record the reading of the electronic balance 4.

[0031] This invention discloses a device for measuring minute forces using an electronic balance and permanent magnets. The device primarily uses an XY stage 1-1 to ensure the coaxiality of permanent magnet 7. Temperature is controlled by a constant temperature chamber, and the Z stage 1-2 adjusts the distance between the two permanent magnets. The electronic balance 4 and laser displacement sensor 2-3 record the distance and repulsive force between the two permanent magnets, respectively, allowing the generation of curves showing the relationship between the repulsive force and distance between the permanent magnets at different temperatures.

[0032] The embodiments of the present invention disclosed above are merely illustrative of the invention. These embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention.

Claims

1. A non-contact device for measuring minute magnetic forces, characterized in that: It includes an XYZ moving device (1), a permanent magnet positioning device (2), a vibration isolation table (3), an electronic balance (4), a permanent magnet fixture (5), a positioning sleeve (6), and two permanent magnets. The electronic balance (4) is fixed with the permanent magnet fixture (5), and a second permanent magnet is installed inside the permanent magnet fixture (5). The positioning sleeve (6) is installed on the permanent magnet fixture (5). The XYZ moving device (1) is connected to the permanent magnet positioning device (2). The XYZ moving device (1) includes an XY moving stage (1-1), a Z moving stage (1-2), and an L-shaped plate (1-4). The permanent magnet loading device (2) includes a shaped connecting plate (2-1), a laser displacement sensor (2-3), a linear guide shaft (2-7), and a laser ranging block (2-20). The Z moving stage (1-2) is fixed on the XY moving stage (1-1) and moves with it in the XY direction. One end of the L-shaped plate (1-4) is fixed to the Z-moving stage (1-2), and the other end is fixed to the irregular connecting plate (2-1). The laser displacement sensor (2-3) is installed on the upper part of the irregular connecting plate (2-1). A linear guide shaft (2-7) is installed in the middle of the irregular connecting plate (2-1). A permanent magnet (7) is fixed below the linear guide shaft (2-7) through a permanent magnet mounting sleeve (2-19). The laser ranging block (2-20) can be replaced with the permanent magnet mounting sleeve (2-19).

2. The non-contact micro-magnetic force measuring device according to claim 1, characterized in that: The irregular connecting plate (2-1) is equipped with a positioning pin sleeve (2-4) in the middle, and the positioning pin (2-5) is installed in the hole in the positioning pin sleeve (2-4). The linear guide shaft (2-7) is provided with a connecting hole at the tail end, and is connected to the positioning pin (2-5) through the connecting hole.

3. The non-contact micro-magnetic force measuring device according to claim 2, characterized in that: The linear guide shaft (2-7) has a threaded hole at its end. The permanent magnet mounting sleeve (2-19) is connected to the end of the linear guide shaft (2-7) by a thread. The first permanent magnet (7) is mounted on the permanent magnet mounting sleeve (2-19), and the end face of the first permanent magnet (7) is aligned with the end face of the permanent magnet mounting sleeve (2-19).

4. The non-contact micro-magnetic force measuring device according to claim 3, characterized in that: The upper protrusion structure of the laser ranging block (2-20) is the same as that of the permanent magnet mounting sleeve (2-19).

5. The non-contact micro-magnetic force measuring device according to claim 1, characterized in that: The irregular connecting plate (2-1) is equipped with a V-shaped block (2-8), a mounting hinge seat (2-12), and a fixing hinge seat (2-16) at its lower part.

6. The non-contact micro-magnetic force measuring device according to claim 5, characterized in that: The crossbar (2-11) has slots on both sides and a through hole on the left side, which is connected to the mounting hinge seat (2-12) through the mounting hinge shaft (2-9) and the first fixing ring (2-10).

7. The non-contact micro-magnetic force measuring device according to claim 6, characterized in that: The fixed hinge seat (2-16) has a through hole in the center. The hinge bolt (2-18) is installed on the fixed hinge seat (2-16) through the fixed hinge shaft (2-15) and the second fixed ring (2-14). The crossbar (2-11) has a threaded hole in the center. The set spring pin (2-13) is installed in the threaded hole. The crossbar (2-11) is locked by the wing nut (2-17) and the hinge bolt (2-18). The set spring pin (2-13) clamps the linear guide shaft (2-7).

8. The non-contact micro-magnetic force measuring device according to claim 1, characterized in that: The entire measuring device is placed in a constant temperature chamber for temperature control.

9. The non-contact micro-magnetic force measuring device according to claim 1, characterized in that: The XY moving stage (1-1) and the electronic balance (4) are fixed on the vibration isolation table (3).

10. A method of using a non-contact micro-magnetic force measuring device as described in any one of claims 1-9, characterized in that: The specific steps include: Step 1: Adjust the XY moving stage (1-1) and Z moving stage (1-2) to drive the linear guide shaft (2-7) into the middle hole of the positioning sleeve (6), ensuring the coaxiality between the first permanent magnet (7) installed on the linear guide shaft (2-7) and the second permanent magnet installed on the permanent magnet fixture (5). Adjust the Z moving stage (1-2) to raise the linear guide shaft (2-7), remove the positioning sleeve (6) on the permanent magnet fixture (5), and place the permanent magnet mounting sleeve (2-) at the shaft end of the linear guide shaft (2-7) into the middle hole of the positioning sleeve (6). 19) Replace with laser ranging block (2-20), read the reading of laser displacement sensor (2-3) at this time. This reading is the distance between the end face of laser displacement sensor (2-3) and permanent magnet (7) connected to linear guide shaft (2-7). When measuring force, subtract this distance value from the reading of laser displacement sensor (2-3) to get the actual distance between the two permanent magnets. Adjust the height of Z moving stage (1-2) to the initial position and replace laser ranging block (2-20) with permanent magnet mounting sleeve (2-19). Step 2: After the entire system reaches the set temperature, record the readings of the laser displacement sensor (2-3) and the electronic balance (4). Adjust the Z-moving stage (1-2) to move downwards and observe the readings of the laser displacement sensor (2-3). When the Z-moving stage (1-2) moves a given distance, lock the knob on the Z-moving stage (1-2). After the readings of the electronic balance (4) stabilize, record the readings of the electronic balance (4).

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