Equipment and method for testing in-situ spectral performance of laser film in variable vacuum humidity environment

Abstract

The invention discloses a device and a method for testing spectral performance of a laser film in a variable vacuum humidity environment, and belongs to the technical field of laser film spectral measurement. The equipment comprises an optical test cavity, a vacuum acquisition and regulation module, a humidity regulation module and a control system, the optical test cavity is butted with a test light path of the spectrophotometer and is used for placing a sample to be tested; the vacuum obtaining and regulating module regulates the vacuum degree in the cavity, the humidity regulating module regulates the humidity in the cavity, and the control system coordinates all the modules to work. According to the invention, by efficiently coupling the variable vacuum humidity test cavity and the spectrophotometer, the in-situ test of the multi-band transmittance of the laser film in different vacuum degrees and different humidity environments is realized, and the problem that the traditional atmospheric environment test cannot truly reflect the performance of the film in a variable vacuum and variable humidity composite environment is solved; and a key technical support is provided for design optimization and reliability evaluation of the laser film.

Description

Technical Field

[0001] This invention relates to the field of laser thin film spectral measurement technology, and in particular to a spectrophotometer-coupled in-situ spectral performance testing device and method for laser thin films in a variable vacuum humidity environment. Background Technology

[0002] Optical thin films are key components in optoelectronics, communications, biomedicine, and aerospace, and their performance directly affects the efficiency and reliability of related systems. Laser thin films, as a special type of optical thin film, have particularly stringent performance requirements. Traditional spectral performance tests are usually conducted under standard atmospheric conditions, which cannot fully reflect the true characteristics of thin films in real-world application scenarios (such as vacuum environments or specific humidity environments).

[0003] In a vacuum environment, water vapor adsorbed on optical thin films (especially porous films prepared by evaporation deposition) undergoes desorption, leading to increased film porosity and changes in optical properties such as decreased refractive index and blue shift in the spectrum. Simultaneously, changes in porosity alter the film's packing density, affecting phonon scattering behavior, resulting in decreased thermal conductivity, exacerbating the temperature rise effect under laser irradiation, and even lowering the laser damage threshold. Furthermore, humidity, as a critical environmental parameter, fluctuates, further interfering with the optical and thermal properties of the film through water vapor adsorption and desorption processes. Traditional testing equipment struggles to achieve precise control and in-situ monitoring under coupled vacuum and humidity conditions.

[0004] Currently, mainstream spectroscopic testing equipment, such as UV-Vis spectrophotometers, can achieve broad-spectrum, high-resolution transmission performance testing for laser thin films. However, due to limitations in their sample chamber design, they cannot simulate complex environments with varying vacuum and humidity, and it is difficult to avoid interference from environmental fluctuations during testing on in-situ measurements. Existing vacuum testing platforms mostly focus on controlling single environmental parameters, lacking effective coupling with high-precision spectroscopic testing equipment, and thus cannot achieve dynamic in-situ monitoring of thin film optical properties.

[0005] Therefore, it is necessary to develop a testing device that can be efficiently coupled with a spectrophotometer and can precisely control the vacuum and humidity, so as to realize in-situ transmission test of laser thin films in complex environments, and provide key technical support for thin film design optimization and reliability assessment. Summary of the Invention

[0006] In view of this, the purpose of the present invention is to overcome the shortcomings of the prior art and provide an in-situ spectral performance testing device and method for laser thin films in varying vacuum and humidity environments, so as to solve the technical problem that the prior art cannot perform in-situ accurate spectral performance testing of laser thin films in varying vacuum and humidity environments.

[0007] To address the above problems, this invention provides an in-situ spectral performance testing device for laser thin films in a variable vacuum humidity environment, comprising: an optical testing cavity, a vacuum acquisition and control module, a humidity control module, and a control system. The optical testing cavity is connected to the test optical path of the spectrophotometer, and is used to place the laser thin film to be tested and provide testing space; The vacuum acquisition and control module is connected to the optical test cavity and is used to adjust the vacuum level inside the optical test cavity; The humidity control module is connected to the optical test cavity and is used to adjust the humidity inside the optical test cavity; The control system is electrically connected to the optical test cavity, the vacuum acquisition and control module, the humidity control module, and the spectrophotometer, respectively, and is used to control the coordinated operation of each module to achieve in-situ spectral performance testing of the laser thin film under different vacuum and humidity conditions.

[0008] In one embodiment, the optical testing cavity integrates a translation and rotation adjustment platform, which is driven by a vacuum motor and is used to fix and adjust the angle and position of the laser thin film under test. The translation and rotation adjustment platform can realize translation within the two-dimensional plane and rotation within the range of 0° to 45° of the laser thin film under test.

[0009] In one embodiment, the optical testing cavity is designed according to the sample chamber size of the spectrophotometer and is rigidly connected to the optical platform; the optical testing cavity has a cavity optical path inlet and outlet on its side, and the test optical path of the spectrophotometer enters the interior of the optical testing cavity through the cavity optical path inlet and outlet; the cavity optical path inlet and outlet are equipped with observation windows, and the installation direction of the observation windows is not perpendicular to the optical path; a top observation window is provided at the top of the optical testing cavity.

[0010] In one embodiment, the optical testing cavity is further equipped with a temperature and humidity sensor and a vacuum gauge for monitoring the internal environment of the cavity, and a vacuum valve connected to an external pipeline.

[0011] In one embodiment, the vacuum acquisition and control module includes a vacuum acquisition unit and a control module; the vacuum acquisition unit includes a molecular pump and a mechanical pump, which work together to generate a vacuum; the control module is used to control the inlet and outlet flow rates of the vacuum acquisition unit.

[0012] In one embodiment, the humidity control module includes a pure nitrogen gas source, a drying ventilation pipeline, a humidifying ventilation pipeline, and a dual-channel gas mass flow controller; the pure nitrogen gas source is connected to the drying ventilation pipeline and the humidifying ventilation pipeline respectively; the dual-channel gas mass flow controller controls the flow rate of the dry gas in the drying ventilation pipeline and the humidifying gas in the humidifying ventilation pipeline respectively, and the dry gas and the humidifying gas are mixed by a mixing structure and then introduced into the optical testing cavity.

[0013] In one embodiment, the control system includes a centralized control unit and an interactive interface; the centralized control unit is electrically connected to the optical test cavity, the vacuum acquisition and control module, the humidity control module, and the spectrophotometer, and the interactive interface enables the setting of at least one of the following: vacuum level, humidity, position / angle of the laser thin film under test, and spectral test parameters.

[0014] In one embodiment, the spectrophotometer splits the light to form a reference optical path and a test optical path. The test optical path passes through the laser thin film under test in the optical test cavity and enters the optical path receiving module synchronously with the reference optical path. The in-situ spectral performance test information of the laser thin film under test is determined by the optical path receiving module.

[0015] This invention also provides an in-situ spectral performance testing method for laser thin films in a variable vacuum humidity environment. This method, applied to the aforementioned equipment, includes the following steps: Pre-treatment and installation of the laser thin film under test: Clean the laser thin film under test and fix it on the translation and rotation adjustment platform inside the optical test cavity; Target environment setup: Based on the testing requirements, set and establish the target vacuum environment or target humidity environment through the control system, and maintain it stable for a period of time; Baseline calibration: Move the laser film under test away from the test optical path and perform baseline calibration of the spectrophotometer in the target environment; Test of laser thin film under test: Move the laser thin film under test to a predetermined position and angle in the test optical path and perform transmission spectrum measurement; Data analysis: Processing data to obtain the transmission spectral performance data of the laser thin film under test in a specific environment.

[0016] In one embodiment, the method further includes an extended testing step: performing two-dimensional scanning and angular spectrum testing by changing the position or adjusting the angle of the laser thin film under test.

[0017] Compared with the prior art, the beneficial effects of this invention are: 1. This invention couples an optical testing cavity with a spectrophotometer and uses a vacuum acquisition and control module, a humidity control module, and a control system to achieve precise adjustment of the vacuum and humidity in the testing environment. This enables in-situ, real-time spectral performance testing under varying vacuum and humidity conditions, solving the problem that atmospheric spectral test results cannot characterize the vacuum performance of laser thin films, while avoiding environmental interference caused by transferring the laser thin film under test.

[0018] 2. This invention, through a vacuum acquisition and control module, a humidity control module, and a control system, can change the vacuum level and humidity in the test environment, providing an effective testing method for studying the influence of vacuum and humidity conditions on the optical performance of laser thin films. This helps to optimize the design of laser thin films and provides reliable testing basis for their practical application in related fields. Attached Figure Description

[0019] Figure 1 This is a three-dimensional front view of the testing equipment provided in an embodiment of the present invention; Figure 2 This is a three-dimensional structural rear view of the testing equipment provided in an embodiment of the present invention; Figure 3 This is a three-dimensional cross-sectional schematic diagram of the optical testing cavity provided in an embodiment of the present invention; Figure 4 This is a schematic diagram of the test principle of the reference-test dual-optical-path system provided in an embodiment of the present invention; The components are as follows: 1-Optical test chamber, 2-Dual-channel gas mass flow controller, 3-Vacuum acquisition unit, 4-Human-machine interface, 5-Mechanical pump, 6-Molecular pump, 7-Pure nitrogen, 8-Drying ventilation pipeline, 9-Humidifying ventilation pipeline, 10-Evacuation pipeline, 11-Centralized control unit, 12-Ultra-transparent quartz glass observation window, 13-Top observation window, 14-Vacuum motor, 15-Translation and rotation adjustment platform, 16-Laser film under test, 17-Temperature and humidity sensor, 18-Vacuum gauge, 19-Vacuum valve, 20-Reference optical path, 21-Test optical path, 22-Detection optical path and detector module. Detailed Implementation

[0020] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0021] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] In this embodiment of the invention, an in-situ spectral performance testing device for laser thin film under variable vacuum humidity environment is provided, comprising: an optical testing cavity 1, a vacuum acquisition and control module, a humidity control module, and a control system.

[0023] like Figures 1-3 As shown, the optical testing chamber 1 is equipped with a vacuum valve 19 and a pipeline interface. The optical testing chamber 1 is connected to the evacuation pipeline 10 through the vacuum valve 19, and is connected to the vacuum acquisition and control module through the evacuation pipeline 10. At the pipeline interface, it is connected to the humidity control module through a pipeline.

[0024] The optical testing chamber 1 is designed according to the sample chamber size of the spectrophotometer and is rigidly connected to the optical platform to avoid displacement and shaking. The optical testing chamber 1 is used to place the laser thin film 16 to be tested and provide testing space. The chamber integrates a translation and rotation adjustment platform 15, which can be driven by a vacuum motor 14 for translation and rotation. The translation and rotation adjustment platform 15 has a placement position for the laser thin film 15 to be tested. When performing laser thin film spectral performance testing, the translation and rotation adjustment platform 15 fixes the laser thin film 16 to be tested and adjusts its angle and position. The translation and rotation adjustment platform 15 can realize the translation of the laser thin film 16 to be tested in a two-dimensional plane and the rotation within the range of 0°~45°, which can realize in-situ spectral performance testing of the transmittance of the laser thin film in a wide angle spectrum.

[0025] The optical testing cavity 1 has cavity optical path inlets and outlets on both sides. The cavity optical path inlets and outlets are equipped with observation windows. In order to reduce the influence of the observation windows on the optical path, the observation windows are generally made of ultra-transparent material. In this embodiment, the observation window is an ultra-transparent quartz glass observation window 12. The test optical path of the spectrophotometer can enter the interior of the optical testing cavity 1 through the cavity optical path inlets and outlets. The installation angle of the observation window is designed to avoid being perpendicular to the optical path, thereby reducing reflection interference.

[0026] The top of the optical testing cavity 1 is also provided with a top observation window 13, through which the internal condition of the cavity can be observed.

[0027] The optical testing chamber 1 is also equipped with an external temperature and humidity sensor 17 and a vacuum gauge 18. The temperature and humidity sensor 17 and the vacuum gauge 18 can be installed on the surface of the chamber for real-time monitoring of the environmental parameters inside the chamber. The external temperature and humidity sensor 17 is used to monitor the humidity information inside the chamber, and the vacuum gauge 18 is used to detect the vacuum level inside the chamber.

[0028] In this embodiment of the invention, the vacuum acquisition and control module is connected to the optical testing cavity 1 via the evacuation pipeline 10. It is used to extract gas from the cavity and precisely control the vacuum level within the cavity. The vacuum acquisition and control module includes a vacuum acquisition unit 3 and a control module. The vacuum acquisition unit 3 includes a molecular pump 6 and a mechanical pump 5. The mechanical pump 5 performs pre-vacuuming. After the vacuum level stabilizes to a preset threshold, the molecular pump 6 is activated to continue evacuating. The two work together to generate the vacuum environment required by the optical testing cavity 1. The control module precisely controls the inlet and outlet flow rates of the vacuum acquisition unit 3 through a gas mass flow controller and combines a PID (proportional-integral-derivative) control algorithm to achieve automatic adjustment and stabilization of the vacuum level, enabling a vacuum of 10... -4 Achieving a base vacuum level in the Pa range, and reaching atmospheric pressures of 10. -4 Automatic, precise adjustment and stable maintenance of high vacuum at the Pa level.

[0029] In this embodiment of the invention, the humidity control module is connected to the optical testing cavity 1 via a pipeline and is used to introduce a specific ratio of dry gas and humid gas into the cavity to precisely control the humidity inside the cavity. The humidity control module includes pure nitrogen 7, a drying ventilation pipeline 8, a humidifying ventilation pipeline 9, and a dual-path gas mass flow controller 2. The pure nitrogen 7 serves as a nitrogen source and is connected to the drying ventilation pipeline 8 and the humidifying ventilation pipeline 9 via pipelines. The flow rates of the dry gas in the drying ventilation pipeline 8 and the humidifying gas in the humidifying ventilation pipeline 9 are controlled by the dual-path gas mass flow controller 2. For example, the humidifying gas in the humidifying ventilation pipeline 9 is controlled to be 90% RH saturated humidity gas. The dry gas and the humidifying gas are mixed by a mixing structure (such as a mixing tank) and then introduced into the optical testing cavity 1 through a vacuum pipeline 10. The dual-channel gas mass flow controller 2 can be used with a PID (proportional-integral-derivative) control algorithm to achieve precise humidity control, enabling humidity range regulation and stable maintenance from 10% to 95% RH, with a control accuracy of ±5% RH.

[0030] In this embodiment of the invention, the testing equipment also includes a control system. The control system is electrically connected to the optical testing cavity 1, the vacuum acquisition and control module, the humidity control module, and the spectrophotometer. It receives sensor signals, sends control commands, and enables automatic control of the testing environment, automatic execution of the testing process, and acquisition and analysis of test data. The control system controls the collaborative work of each module to achieve in-situ spectral performance testing of the laser thin film 16 under different vacuum and humidity conditions. The control system includes a centralized control unit 11 and an interactive interface, typically a human-machine interface 4. The control system can link with the spectrophotometer's data processing system. The control system is electrically connected to each module through the centralized control unit 11. Through the human-machine interface 4, the user can easily set the target vacuum level, humidity, position / angle of the laser thin film under test, and spectral test parameters, and initiate the automatic testing process. The control system can automatically adjust environmental parameters, link the spectrophotometer for baseline calibration and measurement of the laser thin film under test, and complete data acquisition, storage, and analysis. The human-machine interface 4 can be an industrial control computer touch screen. Users can manually input the target vacuum degree and humidity parameters required for the test on the touch screen. The centralized control unit 11 controls the vacuum acquisition and regulation module and the humidity regulation module according to the received parameter information. The vacuum acquisition and regulation module and the humidity regulation module generate the corresponding vacuum degree and humidity according to the parameters, and complete the setting of the target vacuum degree and humidity inside the cavity.

[0031] In embodiments of the present invention, such as Figure 4 As shown, the spectrophotometer emits light from the light source to form a reference-test dual optical path, namely the reference optical path 20 and the test optical path 21. The test wavelength range of the spectrophotometer is 190nm ~ 2600nm. The optical test cavity 1 is rigidly fixed to the optical platform to ensure stability. The optical test cavity 1 is aligned with the spectrophotometer on the optical platform. Since the optical test cavity 1 is designed according to the sample chamber size of the spectrophotometer, the optical test cavity 1 can be docked with the test optical path 21 of the spectrophotometer. That is, the test optical path 21 of the spectrophotometer can enter the cavity through the cavity optical path inlet and outlet of the optical test cavity 1 and pass through the laser film under test 16 to perform in-situ spectral performance testing of the laser film under test 16. During testing, the test optical path 21 passes through the laser thin film 16 under test in the optical test cavity 1 and enters the optical path receiving module synchronously with the reference optical path 20. The optical path receiving module determines the in-situ spectral performance test information of the laser thin film 16 under test. The optical path receiving module includes a detection optical path and a detector module 22, which is used to receive the reference optical path 20 and the test optical path 21 after passing through the laser thin film under test, and detect the received optical path information. Since the test wavelength range of the spectrophotometer is 190nm ~ 2600nm, the in-situ test of the transmittance of the laser thin film with a wide spectrum can be realized through this device.

[0032] This invention couples an adjustable vacuum and humidity optical test cavity with a spectrophotometer, and uses a control system to precisely adjust the vacuum and humidity in the test environment. This enables in-situ testing of the transmittance of laser thin films across a wide spectrum (190nm ~ 2600nm) and a wide angle spectrum (0-45°), solving the problem that atmospheric spectral test results cannot characterize the vacuum performance of laser thin films, while avoiding environmental interference caused by transferring the laser thin film under test.

[0033] Based on the above-mentioned equipment, this embodiment of the invention also provides a method for in-situ spectral performance testing of laser thin films in a variable vacuum humidity environment, which mainly includes the following steps: Pre-treatment and installation of the laser thin film under test: Clean the laser thin film under test and fix it on the translation and rotation adjustment platform inside the optical test cavity; Target environment setup: Based on the testing requirements, set and establish the target vacuum environment or target humidity environment through the control system, and maintain it stable for a period of time; Baseline calibration: Move the laser film under test away from the test optical path and perform baseline calibration of the spectrophotometer in the target environment; Test of laser thin film under test: Move the laser thin film under test to a predetermined position and angle in the test optical path and perform transmission spectrum measurement; Data analysis: Processing data to obtain the transmission spectral performance data of the laser thin film under test in a specific environment.

[0034] Extended testing: Two-dimensional scanning and angular spectrum testing are performed by changing the position or adjusting the angle of the laser thin film under test.

[0035] Specifically, the above test method will be illustrated below with two examples.

[0036] Example 1: Laser Thin Film Transmission Spectroscopy Test in Vacuum Environment A laser thin film with a diameter of 50 mm and a thickness of 5 mm was selected as the test substrate. A multi-periodic antireflection film (the film material is Ta2O5 and SiO2) was prepared on one side.

[0037] Step 1: Pretreatment of the laser thin film to be tested The surface of the laser thin film under test is cleaned by wiping with organic solvents and combining ultrasonic cleaning to ensure that there are no residual impurities on the surface, so as to avoid interfering with the test signal.

[0038] Step 2: Cavity Installation and Debugging The optical test cavity is rigidly fixed to the optical platform to ensure that it is not loose. The spatial position of the cavity is adjusted so that it does not block the reference light path and the test light path passes perpendicularly through the central area of ​​the ultra-transparent quartz glass observation windows on both sides of the cavity.

[0039] Step 3: Installation of the laser thin film to be tested The pre-treated laser film to be tested is mounted on a translation and rotation adjustment platform inside the optical test cavity and fixed with a clamp to ensure that the laser film to be tested does not shift during the test.

[0040] Step 4: Establishing a vacuum environment Start the mechanical pump to perform pre-vacuuming. After the vacuum level stabilizes to the preset threshold, turn on the molecular pump to continue evacuating until the vacuum level in the chamber reaches the target vacuum level, such as 1×10⁻³~2×10⁻³ Pa. Maintain this vacuum state for 30 minutes to eliminate the influence of environmental fluctuations.

[0041] Step 5: Start the spectrophotometer Turn on the spectrophotometer and preheat it for 20-30 minutes until it reaches a stable working state. Confirm that the optical path system of the equipment is normal.

[0042] Step Six: Baseline Calibration The human-computer interface is used to control the translation and rotation adjustment platform, so that the laser thin film under test is deviated from the test optical path (only allowing the optical path to pass through the ultra-transparent quartz glass on both sides of the cavity). The transmittance test parameters are set, such as the wavelength range of 400~800nm ​​and the wavelength interval of 1nm. 100% standard baseline calibration is performed to obtain the reference spectrum curve under this vacuum level.

[0043] Step 7: Transmission Spectroscopy Test of the Laser Thin Film Under Test Adjust the translation and rotation platform to ensure the test beam is perpendicularly incident on the central region of the laser thin film under test (maintaining a 0° incident angle). Start the measurement program, collect and analyze the data to obtain the transmission spectrum performance data of the laser thin film under test under this specific vacuum environment, such as the transmission spectrum curve in the 400~800nm ​​band. Of course, if the spectrophotometer band is selected to be other bands, the transmission spectrum performance data of the corresponding bands can be obtained.

[0044] Step 8: Extended Testing By setting the translation and rotation parameters of the adjustment platform through the human-computer interaction interface, the adjustment platform is controlled to drive the laser thin film under test to perform two-dimensional scanning or angle adjustment (0°~45°). The measurement process of step seven is repeated to realize the surface two-dimensional scanning test and angular spectrum test of the laser thin film under test in a vacuum environment, obtain its surface performance distribution and angular spectrum characteristics, and comprehensively evaluate its adaptability to the vacuum environment.

[0045] Example 2: Laser Thin Film Transmission Spectroscopy Test under Specific Humidity Environment The same laser thin film to be tested as in Example 1 was selected (50 mm in diameter, 5 mm in thickness, fused silica substrate, Ta2O5 and SiO2 antireflection film).

[0046] Step 1: Pre-processing of the laser thin film to be tested The same as step one in Example 1, and will not be repeated here, ensure that the sample surface is clean.

[0047] Step 2: Cavity Installation and Debugging The same as step two in Example 1, and will not be repeated here, to ensure that the cavity is fixed and the optical path is accurately aligned.

[0048] Step 3: Installation of the laser thin film to be tested The same as step three in Example 1 will not be repeated here, thus completing the fixation of the laser thin film to be tested.

[0049] Step 4: Establishing a Humidity Environment Turn on the pure nitrogen gas source and set the target humidity through the human-machine interface, such as setting the target humidity to 70%RH. The system automatically controls the dual-channel gas mass flow controller to adjust the mixing ratio of dry nitrogen and 90%RH saturated moisture. After the gas is fully mixed by the mixing structure to reach the target humidity, it is introduced into the optical test chamber. Wait for the temperature and humidity sensor to show that the humidity in the chamber is stable within the range of 70%RH±5%, and maintain this state for 30 minutes to eliminate the influence of environmental fluctuations.

[0050] Step 5: Start the spectrophotometer The same as step five in Example 1, and will not be repeated here, to ensure that the equipment is operating normally.

[0051] Step Six: Baseline Calibration Manipulate the translation and rotation adjustment platform to deviate the laser thin film under test from the test optical path, set the test parameters (wavelength 400~800nm, interval 1nm), perform 100% standard baseline calibration, and obtain the reference spectrum curve at 70% RH humidity.

[0052] Step 7: Transmission Spectroscopy Test of the Laser Thin Film Under Test Adjust the translation and rotation adjustment platform to make the test optical path perpendicular to the center of the laser thin film under test (0° incident angle), start the measurement program, collect and analyze the data to obtain the transmission spectrum performance data of the laser thin film under test under this specific humidity environment. For example, the transmission spectrum data of the 400~800nm ​​band can be obtained. Of course, if the band of the spectrophotometer is selected as other bands, the transmission spectrum data of the corresponding band can be obtained.

[0053] Step 8: Extended Testing By setting the translation and rotation parameters of the adjustment platform through the human-computer interaction interface, the adjustment platform is controlled to drive the laser thin film under test to perform two-dimensional scanning or angle adjustment (0°~45°). The measurement process of step seven is repeated to realize the surface two-dimensional scanning test and angular spectrum test of the laser thin film under test under specific humidity, obtain its surface performance distribution and angular spectrum characteristics, and analyze the influence of humidity on its optical performance.

[0054] This invention enables in-situ, real-time spectral performance testing of laser thin films under varying vacuum and humidity conditions through precise, independent, or coupled control of vacuum and humidity environments, and efficient coupling with a spectrophotometer. This avoids errors caused by transferring the laser thin film under test. Furthermore, the aforementioned equipment and method can perform two-dimensional scanning tests on the surface of the laser thin film under test over a wide spectral range (190-2600 nm) and at varying angles (0-45°). The high degree of automation reduces human error and improves testing efficiency and reliability. It provides a crucial experimental platform and data support for in-depth research into the influence mechanism of environmental factors on the performance of laser thin films, optimization of thin film preparation processes, and evaluation of their environmental adaptability.

[0055] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, various modifications and variations can be made to the embodiments of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A laser thin film in-situ spectral performance testing device under variable vacuum humidity environment, characterized in that, include: Optical testing cavity, vacuum acquisition and control module, humidity control module and control system; The optical testing cavity is connected to the test optical path of the spectrophotometer, and is used to place the laser thin film to be tested and provide testing space; The vacuum acquisition and control module is connected to the optical test cavity and is used to adjust the vacuum level inside the optical test cavity; The humidity control module is connected to the optical test cavity and is used to adjust the humidity inside the optical test cavity; The control system is electrically connected to the optical test cavity, the vacuum acquisition and control module, the humidity control module, and the spectrophotometer, respectively, and is used to control the coordinated operation of each module to achieve in-situ spectral performance testing of the laser thin film under different vacuum and humidity conditions.

2. The in-situ spectral performance testing equipment for laser thin films in a variable vacuum humidity environment according to claim 1, characterized in that, The optical testing cavity integrates a translation and rotation adjustment platform, which is driven by a vacuum motor and is used to fix and adjust the angle and position of the laser thin film under test. The translation and rotation adjustment platform can realize translation within the two-dimensional plane and rotation within the range of 0° to 45° of the laser thin film under test.

3. The in-situ spectral performance testing equipment for laser thin films in a variable vacuum humidity environment according to claim 2, characterized in that, The optical testing cavity is designed according to the sample chamber size of the spectrophotometer and is rigidly connected to the optical platform. The optical testing cavity has a cavity optical path inlet and outlet on its side. The test optical path of the spectrophotometer can enter the interior of the optical testing cavity through the cavity optical path inlet and outlet. The cavity optical path inlet and outlet are equipped with observation windows, and the installation direction of the observation windows is not perpendicular to the optical path. A top observation window is provided at the top of the optical testing cavity.

4. The in-situ spectral performance testing equipment for laser thin films in a variable vacuum humidity environment according to claim 1, characterized in that, The optical testing cavity is also equipped with a temperature and humidity sensor and a vacuum gauge for monitoring the internal environment of the cavity, and a vacuum valve connected to an external pipeline.

5. The in-situ spectral performance testing equipment for laser thin films in a variable vacuum humidity environment according to claim 1, characterized in that, The vacuum acquisition and control module includes a vacuum acquisition unit and a control module; the vacuum acquisition unit includes a molecular pump and a mechanical pump, which work together to generate a vacuum; the control module is used to control the inlet and outlet flow rates of the vacuum acquisition unit.

6. The in-situ spectral performance testing equipment for laser thin films in a variable vacuum humidity environment according to claim 1, characterized in that, The humidity control module includes a pure nitrogen gas source, a drying ventilation pipeline, a humidifying ventilation pipeline, and a dual-channel gas mass flow controller. The pure nitrogen gas source is connected to both the drying ventilation pipeline and the humidifying ventilation pipeline. The dual-channel gas mass flow controller controls the flow rates of the dry gas in the drying ventilation pipeline and the humidifying gas in the humidifying ventilation pipeline, respectively. The dry gas and the humidifying gas are mixed by a mixing structure and then introduced into the optical testing cavity.

7. The in-situ spectral performance testing equipment for laser thin films in a variable vacuum humidity environment according to claim 1, characterized in that, The control system includes a centralized control unit and an interactive interface. The centralized control unit is electrically connected to the optical test cavity, the vacuum acquisition and control module, the humidity control module, and the spectrophotometer. The interactive interface enables the setting of at least one of the following parameters: vacuum level, humidity, position / angle of the laser thin film under test, and spectral test parameters.

8. The in-situ spectral performance testing equipment for laser thin films in a variable vacuum humidity environment according to claim 1, Its features are, The spectrophotometer splits the light to form a reference optical path and a test optical path. The test optical path passes through the laser thin film under test in the optical test cavity and enters the optical path receiving module synchronously with the reference optical path. The in-situ spectral performance test information of the laser thin film under test is determined by the optical path receiving module.

9. A method for in-situ spectral performance testing of laser thin films in a variable vacuum humidity environment, characterized in that, Using the device according to any one of claims 1-8, the method includes the following steps: Pre-treatment and installation of the laser thin film under test: Clean the laser thin film under test and fix it on the translation and rotation adjustment platform inside the optical test cavity; Target environment setup: Based on the testing requirements, set and establish the target vacuum environment or target humidity environment through the control system, and maintain it stable for a period of time; Baseline calibration: Move the laser film under test away from the test optical path and perform baseline calibration of the spectrophotometer in the target environment; Test of laser thin film under test: Move the laser thin film under test to a predetermined position and angle in the test optical path and perform transmission spectrum measurement; Data analysis: Processing data to obtain the transmission spectral performance data of the laser thin film under test in a specific environment.

10. The method for in-situ spectral performance testing of laser thin films in a variable vacuum humidity environment according to claim 9, characterized in that, It also includes extended testing steps: performing two-dimensional scanning tests and angular spectrum tests by changing the position of the laser thin film under test or adjusting its angle.

Images