Swing actuator

Abstract

The invention provides a swing actuator (1) which is small in rotor inertia, capable of obtaining high torque, capable of suppressing generation of backlash, and capable of suppressing reduction of rigidity. A swing actuator (1) includes a linear motion / rotation conversion mechanism that drivingly connects a rotating shaft (101) and a linear motion shaft (102) to convert linear motion into rotational motion or convert rotational motion into linear motion, the rotating shaft (101) having a torque generating device, or the linear motion shaft (102) having a thrust generating device (104), the linear motion / rotation conversion mechanism having a connecting piece (103), and the connecting piece (103) being connected to the connecting piece (103). A part of the connecting piece (103) is connected and fixed in a state of being wound along the rotating shaft (101), and the other part of the connecting piece (103) is connected and fixed in a state of being along the linear motion shaft (102).

Description

Technical Field

[0001] This disclosure relates to a oscillating actuator that oscillates the mirror of a galvano-scanner. Background Technology

[0002] Currently, laser processing machines are known to process workpieces by irradiating them with lasers. For example, laser processing machines may have an electrical scanner that emits laser light at the front end of the arm of a multi-axis robot.

[0003] The electrical scanner includes multiple galvanometer motors, one example of which are oscillating actuators, and multiple mirrors that can rotate about the rotation axis of the galvanometer motors. The electrical scanner performs scanning by rotating the galvanometer motors to drive the multiple mirrors, thereby reflecting the laser emitted from the laser source.

[0004] Unlike servo motors in machine tools, oscillating actuators such as galvanometer motors are characterized by not rotating a full circle, but only oscillating within a range of approximately ±20 degrees.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 8-152575 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] High responsiveness is required for galvanometer motors. Therefore, low rotor inertia, high torque, and high rigidity, i.e., a high resonance point, are necessary. However, in existing rotary motors, rotor inertia and torque are interdependent. To reduce rotor inertia, the rotor diameter needs to be reduced. As a result, there is a limit to the problem of obtaining high torque while reducing rotor inertia.

[0010] As a structure to solve the aforementioned problems of rotary motors, there is a structure that uses a direct-drive rotary conversion mechanism for the galvanometer shaft. However, in general direct-drive rotary conversion mechanisms, such as ball screws, there is the problem of backlash. In structures where the belt is wound between two or more pulleys, there is the problem of reduced rigidity and backlash due to the portion of the belt between the pulleys being in the air.

[0011] The purpose of this disclosure is to provide a oscillating actuator with a small rotor inertia, which can achieve high torque, suppress backlash, and suppress the decrease in rigidity.

[0012] Solution for solving the problem

[0013] One aspect of this disclosure is a oscillating actuator for oscillating a oscillating body, comprising: a rotating shaft; a linear shaft; and a linear-to-rotation conversion mechanism that drivesly connects the rotating shaft and the linear shaft to convert linear motion into rotational motion or vice versa. The rotating shaft has a torque generating device, or the linear shaft has a thrust generating device. The linear-to-rotation conversion mechanism has a connecting piece, a portion of which is connected and fixed in a wound state along the rotating shaft, and other portions of which are connected and fixed in a state along the linear shaft.

[0014] The effects of the invention are as follows.

[0015] According to this disclosure, a oscillating actuator can be provided, which has a small rotor inertia, can obtain high torque, can suppress backlash, and can suppress the decrease in rigidity. Attached Figure Description

[0016] Figure 1 This is a perspective view schematically showing an electrical scanner and a laser source equipped with the oscillating actuator of the first embodiment.

[0017] Figure 2 This is a perspective view showing the oscillating actuator and reflector of the first embodiment.

[0018] Figure 3 This is a perspective view illustrating the structure of the oscillating actuator according to the first embodiment.

[0019] Figure 4 This is a perspective view showing the situation after the direct drive shaft has been removed from the oscillating actuator of the first embodiment.

[0020] Figure 5 This is a diagram used to illustrate the oscillating actuator and reflector of the first embodiment, viewed from a direction orthogonal to the axis of rotation.

[0021] Figure 6 Is Figure 4 The diagram shows a section cut at the location of line A, viewed from the axial direction of the rotation axis.

[0022] Figure 7 Is Figure 4 The diagram shows a section cut at the location of line B, viewed from the axial direction of the rotation axis.

[0023] Figure 8 It is used for explanation Figure 6 A diagram showing the motion of the rotation axis rotating clockwise, as observed from the axis of rotation.

[0024] Figure 9 It is used for explanation Figure 6A diagram showing the action of the rotation axis rotating counterclockwise, viewed from the axis of rotation.

[0025] Figure 10 It is used for explanation Figure 7 A diagram showing the motion of the rotation axis rotating clockwise, as observed from the axis of rotation.

[0026] Figure 11 It is used for explanation Figure 7 The diagram shows the action of the rotation axis rotating counterclockwise, and the view observed from the axis of rotation.

[0027] Figure 12 This is a diagram used to illustrate the oscillating actuator of the second embodiment, viewed from a direction orthogonal to the axis of rotation. Detailed Implementation

[0028] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Furthermore, in the description of the second embodiment and thereafter, structures common to other embodiments will be labeled with the same symbols, and only structures, operations, and effects different from other embodiments will be described. In addition, in the embodiments of the present disclosure, the connecting piece 103 has six pieces, but the number of pieces is not limited. Furthermore, the structures of the rotating shaft, the linear shaft, the connecting piece, etc., are not limited to the structures of the rotating shaft 101, the linear shaft 102, the connecting piece 103, etc. Furthermore, the linear shaft 102 is composed of two linear shafts 102-1 and 102-2, but is not limited thereto. For example, the linear shaft 102 may also be composed of either the linear shaft 102-1 or the linear shaft 102-2.

[0029] [First Implementation Method]

[0030] The oscillating actuator disclosed herein is an oscillating actuator used in industrial machinery such as machine tools and robots, where the rotating shaft does not rotate one revolution. In this embodiment, as an example of the oscillating actuator of this disclosure, a galvanometer motor 1 is applied to a positioning action that requires rotating to a commanded rotation angle in the shortest possible time. The galvanometer motor 1 configured with the oscillating actuator of this embodiment is, for example, a single-phase drive type galvanometer motor for scanning lasers. Furthermore, the galvanometer motor 1 of this embodiment differs from conventional galvanometer motors with a typical radial clearance structure, and is composed of a rotating shaft 101, a linear shaft 102, a connecting plate 103, and a thrust generating device 104. Therefore, the galvanometer motor 1 of this embodiment, regardless of its size, can achieve high responsiveness, high torque, low rotor inertia, suppress backlash, and prevent a decrease in rigidity.

[0031] First, the electric scanner of the galvanometer motor 1 using this embodiment will be described. Figure 1 This is a perspective view that schematically shows the laser source 11 and the electrical scanner 10. Figure 2 This is a perspective view showing the galvanometer motor 1 and the reflector 12. (See diagram below.) Figure 1 As shown, during laser processing, the laser source 11 and the electric scanner 10 are positioned above the worktable T on which the workpiece W is placed.

[0032] The laser source 11 is composed of various laser oscillators including a laser medium, an optical resonator, and an excitation source, and emits laser light toward the electrical scanner 10. The electrical scanner 10 includes a plurality of reflectors 12, 12 that sequentially reflect the laser light emitted from the laser source 11, and galvanometer motors 1, 1 of this embodiment that drive each of the reflectors 12, 12 to rotate around rotation axes Ra, Rb. Furthermore, there are no particular limitations on the number and arrangement of the reflectors 12 and the galvanometer motors 1.

[0033] like Figure 1 As shown, the laser emitted from laser source 11 is reflected sequentially by two reflectors 12, 12 before reaching the workpiece W on the worktable T. When the two galvanometer motors 1, 1 rotate to drive the two reflectors 12, 12 respectively, the incident angle of the laser light incident on each reflector 12, 12 changes continuously. As a result, the laser light reaching the workpiece W can scan along a predetermined scanning path on the upper surface of the workpiece W.

[0034] Figure 3 This is a three-dimensional diagram illustrating the structure of the galvanometer motor 1. Figure 5 This is a diagram used to illustrate the galvanometer motor 1 and the reflector 12, viewed from a direction orthogonal to the axis of rotation 101. Figure 6 Is Figure 4 The diagram shows a section cut at the location of line A, viewed axially from the rotation axis 101. Figure 7 Is Figure 4 The diagram shows a section cut at the location of line B, viewed axially from the rotation axis 101. Figure 8 It is used for explanation Figure 6 The figure shows the movement of the rotating axis 101 in the clockwise direction, viewed from the axial direction of the rotating axis 101. Figure 9 It is used for explanation Figure 6 The figure shows the movement of the rotating axis 101 in the counterclockwise direction, viewed from the axial direction of the rotating axis 101. Figure 10 It is used for explanation Figure 7 The figure shows the movement of the rotating axis 101 in the clockwise direction, viewed from the axial direction of the rotating axis 101. Figure 11 It is used for explanation Figure 7 The figure shows the action of the rotation axis rotating counterclockwise, as observed from the axis of rotation 101.

[0035] like Figures 3-5As shown, the galvanometer motor 1 includes a rotary shaft 101, a linear shaft 102, a connecting piece 103, a thrust generating device 104, and an encoder (not shown) disposed on a part of the movable part and used to control the movement of the movable part, for example housed in a motor housing (not shown). The rotary shaft 101, the linear shaft 102, and the connecting piece 103 constitute a linear-to-rotation conversion mechanism that drives the rotary shaft 101 and the linear shaft 102 to convert linear motion into rotational motion. The encoder (not shown) can be a linear encoder mounted on the linear part that performs linear motion, or a rotary encoder mounted on the rotary shaft that performs rotational motion.

[0036] The rotating shaft 101 has a cylindrical shape, and its base end is rotatably guided and supported by a bearing (not shown) in a manner that allows it to rotate around its axis. A reflector 12 is fixed to the front end of the rotating shaft 101. The reflector 12 is positioned parallel to the rotating shaft 101. The reflector 12 is configured to rotate due to the rotation of the rotating shaft 101; more specifically, the reflector 12 is configured to swing approximately 20 degrees clockwise or counterclockwise around the axis of the rotating shaft 101. Furthermore, in this embodiment, since the galvanometer motor 1 is applied to the electronic scanner, the reflector 12 is configured to swing about 20 degrees clockwise or counterclockwise around the axis of the rotation shaft 101. However, since the galvanometer motor itself is for industrial use, it can rotate the rotation shaft 101 clockwise or counterclockwise within a range of less than 180 degrees around the axis of the rotation shaft 101. In this embodiment, it can rotate the rotation shaft 101 clockwise or counterclockwise within a range of less than 90 degrees around the axis of the rotation shaft 101.

[0037] The linear shaft 102 is composed of two sheets: linear shaft 102-1 and linear shaft 102-2. Figure 3 The upper left linear shaft 102-1 is flipped, and linear shaft 102-1 and linear shaft 102-2 are arranged opposite each other with a distance between them and the rotation shaft 101. The linear shaft 102 is constructed of a rigid, plate-like component that is not easily bent. On one side of the linear shaft 102 (e.g., ...), Figure 3 The upper surfaces of the linear shafts 102-1 and 102-2 shown abut against the rotating shaft 101 via a connecting piece 103. Furthermore, the linear shaft 102 is linearly guided by a linear guide or the like (not shown), and is configured to move back and forth in a direction orthogonal to the axis of the rotating shaft 101 and parallel to one surface and the other surface of the linear shaft 102.

[0038] The linear shaft 102 has a thrust generating device 104, which is connected to the linear shafts 102-1 and 102-2 respectively. The thrust generating device 104 is preferably a controllable force-generating device, configured as a high-speed response solid-state actuator such as a linear motor or piezoelectric element that can move the linear shaft 102 by moving it forward or backward while it is being linearly guided by a linear guide (not shown). When using a linear motor, copper wire is typically used for the motor coil, but aluminum wire can also be used to reduce inertia. Furthermore, examples of linear guidance include rolling guidance, sliding guidance, parallel spring guidance, and hydrostatic air guidance; air guidance is preferred when it is desirable to minimize inertia. A preload is applied to the linear shaft 102 by a preload-applying device (not shown). This maintains the linear shaft 102 in contact with the rotating shaft 101 via the connecting piece 103.

[0039] A portion of the connecting piece 103 is connected to the rotating shaft 101 in a manner that it is wound around the circumferential surface of the rotating shaft 101. For example... Figure 6 , Figure 8 , Figure 9 As shown, one end of each of the connecting pieces 103-1 and 103-4 is fixed to the side of the circumferential surface of the rotating shaft 101 by a threaded part 106 at a diameter position of the rotating shaft 101. The connecting piece 103-4 is wound from one end along the circumferential surface of the rotating shaft 101 to a position where the rotating shaft 101 and the linear shaft 102-2 are tightly fitted (the rotating shaft 101's...). Figure 6 The state of the lowest point in the middle) is connected and extended, and from that position along a face of the linear axis 102-2 (e.g., Figure 6 The upper surface of the linear shaft 102-2 shown is connected to and extends in a direction orthogonal to the axial direction of the rotating shaft 101. The other end of the connecting piece 103-4 is fixed to this surface of the linear shaft 102-2 by means of a threaded piece 106 parallel to the axial direction of the rotating shaft 101 at a predetermined interval.

[0040] The connecting piece 103-1 is wound from one end along the circumference of the rotating shaft 101 to a position where the rotating shaft 101 and the linear shaft 102-1 are in close contact (the rotating shaft 101's...). Figure 6 The state of the uppermost part of the middle) is connected and extended, and from that position along a face of the linear axis 102-1 (e.g., Figure 6 The lower side of the linear shaft 102-1 shown is connected to and extends in a direction orthogonal to the axial direction of the rotating shaft 101. The other end of the connecting piece 103-1 is fixed to this side of the linear shaft 102-1 by means of a threaded piece 106 parallel to the axial direction of the rotating shaft 101 at a predetermined interval.

[0041] The connecting piece 103 has a thickness of 50 μm or less and is made of a material that, as the rotating shaft 101 rotates, can be wound around the circumference of the rotating shaft 101 or can extend along one surface of the linear shaft 102. Furthermore, when the rotating shaft 101 and the reflector 12 rotate as a unit, the connecting piece 103 will not expand or contract within tolerance under tension. That is, in this embodiment, the connecting piece 103 is made of a metal such as SUS steel, but is not limited to SUS steel; however, a material with a high Young's modulus is preferred, such as a thin sheet of CFRP (carbon fiber reinforced plastic).

[0042] More specifically, multiple connecting pieces 103 are provided, and are connected and fixed to the rotating shaft 101 and the linear shaft 102 at multiple locations. Specifically, as shown... Figure 4 As shown, mainly on the upper side of the rotating shaft 101, three cuboid connecting pieces 103-1, 103-2, and 103-3 are arranged adjacent to each other in the axial direction of the rotating shaft 101, and are respectively fixed to the rotating shaft 101 and the linear shaft 102-1 (see reference). Figure 3 Furthermore, mainly on the lower side of the rotating shaft 101, three cuboid connecting pieces 103—connecting piece 103-4, connecting piece 103-5, and connecting piece 103-6—are arranged sequentially adjacent to each other in the axial direction of the rotating shaft 101, and are respectively fixed to the rotating shaft 101 and the linear shaft 102-2 (see reference). Figure 3 The width of connecting piece 103-2 in the axial direction of the rotating shaft 101 is approximately equal to the sum of the widths of connecting pieces 103-1 and 103-3 in the same direction. The width of connecting piece 103-5 in the axial direction of the rotating shaft 101 is approximately equal to the sum of the widths of connecting pieces 103-4 and 103-6 in the same direction.

[0043] When in Figure 6 The direction shown ( Figure 4 When viewed from the bottom left to the top right, connecting pieces 103-4 and 103-6 are wound counterclockwise around the rotating shaft 101 and along the circumference of the rotating shaft 101. Figure 4 , Figure 6 The right-hand side connection is shown. The portions of connecting pieces 103-4 and 103-6, excluding the parts wound around the circumference of the rotating shaft 101 and connected, are... Figure 4 , Figure 6 Central linear shaft 102 (reference) Figure 3 The upper surface of the axis extends to the left of the lowest point of the rotation axis 101.

[0044] When in Figure 6The direction shown ( Figure 4 When viewed from the bottom left to the top right, connecting pieces 103-1 and 103-3 are wound counterclockwise around the rotating shaft 101 and along the circumference of the rotating shaft 101. Figure 4 , Figure 6 The left-hand connection is shown. The portions of connecting pieces 103-1 and 103-3, excluding the portion wound around the circumference of the rotating shaft 101 and connected, are... Figure 4 , Figure 6 Central linear shaft 102 (reference) Figure 3 The lower surface of the axis extends to the right of the uppermost part of the rotation axis 101.

[0045] When in Figure 7 The direction shown ( Figure 4 When viewed from the bottom left to the top right, the connecting piece 103-2 is wound clockwise around the rotating shaft 101 and along the circumference of the rotating shaft 101. Figure 4 , Figure 7 The right-hand side connection is shown. The portion of connecting piece 103-2, excluding the part wound around the circumference of the rotating shaft 101 and connected, is... Figure 4 , Figure 7 Central linear shaft 102 (reference) Figure 3 The lower surface of the axis extends to the left of the uppermost part of the rotation axis 101.

[0046] When in Figure 7 The direction shown ( Figure 4 When viewed from the bottom left to the top right, the connecting piece 103-5 is wound clockwise around the rotating shaft 101 and along the circumference of the rotating shaft 101. Figure 4 , Figure 7 The left-hand connection is shown. The portion of connecting piece 103-5, excluding the part wound around the circumference of the rotating shaft 101 and connected, is... Figure 4 , Figure 7 Central linear shaft 102 (reference) Figure 3 The upper surface of the axis extends to the right of the lowest point of the rotation axis 101.

[0047] The connecting plates 103-1, 103-2, 103-3, 103-4, 103-5, and 103-6 are configured in this way, such that when the linear shaft 102 is moved by the thrust generating device 104 as described below, the tension of the connecting plates 103 counteracts the torque acting on the rotating shaft 101 in a direction parallel to the upper surface of the linear shaft 102. Furthermore, in Figure 4 In the section cut at line C shown, instead of in Figure 4 The section cut at line A shown Figure 6Connector 103-3 appears in place of connector 103-1, and connector 103-6 appears in place of connector 103-4.

[0048] The radius of rotation of the connecting portion of the connecting piece 103, which is wound around and connected to the rotating shaft 101, is preferably smaller. Specifically, when the radius of the rotating shaft 101 is set to r and the thrust of the thrust generating device 104 that moves the linear shaft 102 is set to F, the torque T is shown below.

[0049] T = F × r

[0050] Furthermore, when the mass of the rotating shaft 101, the direct-drive shaft 102, the connecting piece 103, and the movable part of the thrust generating device 104 is set as M, the moment of inertia J is shown below.

[0051] J = M × r 2

[0052] Therefore, to reduce the moment of inertia J, one can reduce either M or r. By reducing r, sufficient torque T can be ensured by setting the thrust F to a larger value.

[0053] Next, the operation of the mirror 12 being oscillated by the galvanometer motor 1 will be explained. The thrust generated by the thrust generating device 104 causes the linear shaft 102-2 to... Figure 8 , Figure 10 Move to the left in the middle, while simultaneously causing the linear shaft 102-1 to move towards Figure 8 , Figure 10 When the shaft moves to the right, the connecting pieces 103-4, 103-5, and 103-6 fixed to the direct drive shaft 102-2 move integrally with the direct drive shaft 102. Figure 8 , Figure 10 Move to the left in the middle. Therefore, Figure 8 The connecting pieces 103-4 and 103-6, which are wound around the circumferential surface on the right side of the rotation axis 101, are oriented towards Figure 8 The tensile force in the left direction is stretched.

[0054] At the same time, the connecting pieces 103-1, 103-2, and 103-3, which are fixed to the linear shaft 102-1, are integrally connected with the linear shaft 102-1. Figure 8 , Figure 10 Move to the right in the middle. Therefore, Figure 8 The connecting pieces 103-1 and 103-3, which are wound around the circumferential surface on the left side of the rotation axis 101, are oriented towards Figure 8 The tension is applied to the right.

[0055] The result, such as Figure 8 , Figure 10As shown by the middle arrow, the rotating shaft 101 and the reflector 12 can be rotated clockwise as a whole. Figure 8 The connecting pieces 103-4 and 103-6, which are wound around the circumferential surface of the right side of the rotating shaft 101, gradually move away from the circumferential surface of the rotating shaft 101 from their lower parts, gradually becoming a state along the upper surface of the linear shaft 102-2, and thus becoming connected to the upper surface of the linear shaft 102. Furthermore, Figure 10 The connecting piece 103-5, which is wound around the circumference of the left side of the rotating shaft 101, gradually winds around the circumference of the rotating shaft 101 from its lower part.

[0056] and, Figure 8 The connecting pieces 103-1 and 103-3, partially wound around the left circumferential surface of the rotation axis 101, gradually move away from the circumferential surface of the rotation axis 101 from their upper parts, gradually becoming a state along the lower surface of the linear shaft 102-1, and thus connected to the lower surface of the linear shaft 102. Furthermore, Figure 10 The connecting piece 103-2, which is wound around the circumference of the right side of the rotating shaft 101, gradually winds around the circumference of the rotating shaft 101 from its top.

[0057] The thrust generated by the thrust generating device 104 causes the linear shaft 102-2 to move in the direction of... Figure 9 , Figure 11 Move to the right in the middle, while simultaneously causing the direct drive shaft 102-1 to move towards Figure 9 , Figure 11 When the shaft moves to the left, the connecting pieces 103-4, 103-5 and 103-6 fixed to the linear shaft 102-2 move integrally with the linear shaft 102. Figure 9 , Figure 11 Move to the right in the middle. Therefore, Figure 11 The connecting piece 103-5, which is wound around the circumferential surface on the left side of the rotation axis 101, is oriented towards Figure 11 The tension is applied to the right.

[0058] At the same time, the connecting pieces 103-1, 103-2, and 103-3, which are fixed to the linear shaft 102-1, are integrally connected with the linear shaft 102-1. Figure 9 , Figure 11 Move to the left in the middle. Therefore, Figure 11 The connecting piece 103-2, which is wound around the circumferential surface on the right side of the central axis of rotation 101, is oriented towards... Figure 11 The tensile force in the left direction is stretched.

[0059] The result, such as Figure 9 , Figure 11 As shown by the middle arrow, the rotating shaft 101 and the reflector 12 can be rotated in a counterclockwise direction as a whole. Figure 11The portion of the connecting piece 103-5 wound around the left circumferential surface of the rotation axis 101 gradually moves away from the circumferential surface of the rotation axis 101 from its lower part, gradually becoming a state along the upper surface of the linear shaft 102-2, and thus connecting to the upper surface of the linear shaft 102-2. Furthermore, the portion of the connecting piece 103-2 wound around the right circumferential surface of the rotation axis 101 gradually moves away from the circumferential surface of the rotation axis 101 from its upper part, gradually becoming a state along the lower surface of the linear shaft 102-1, and thus connecting to the lower surface of the linear shaft 102-1. Figure 9 Connecting pieces 103-4 and 103-6, wound around the circumference of the right side of the rotation shaft 101, gradually wind around its lower part onto the circumference of the rotation shaft 101. Furthermore, Figure 9 Connecting pieces 103-1 and 103-3, which are wound around the circumference of the left side of the rotating shaft 101, gradually wind around the circumference of the rotating shaft 101 from the top.

[0060] The effects of the galvanometer motor 1 in this embodiment are summarized below.

[0061] In this embodiment, the galvanometer motor 1 includes a rotating shaft 101, a linear shaft 102, and a linear-to-rotation conversion mechanism that drives the rotating shaft 101 and the linear shaft 102 to convert linear motion into rotational motion. The linear shaft 102 has a thrust generating device, and the linear-to-rotation conversion mechanism has a connecting piece 103. A portion of the connecting piece 103 is connected and fixed in a state of being wound along the rotating shaft 101, and the other portion of the connecting piece 103 is connected and fixed in a state of being along the linear shaft 102.

[0062] Therefore, the thrust generating device 104, which serves as the thrust generating part, can be separated from the rotating shaft 101, enabling the reduction of the radius of the rotating shaft 101, and consequently, the reduction of inertia. Furthermore, by winding the connecting plates 103 around the left and right sides of the rotating shaft respectively, and tightly attaching and fixing them to the rotating shaft 101 and the direct-drive shaft 102, the rigidity of the direct-drive-rotation conversion mechanism can be improved. Moreover, in cases where it is necessary to increase the torque of a motor with a conventional radial clearance structure to achieve high torque and low inertia, the rotating shaft of the motor must be lengthened. However, in the oscillating actuator of this disclosure, since the thrust generating device 104 is separated from the rotating shaft 101, it is not necessary to lengthen the rotating shaft to increase torque, and the inertia will not increase.

[0063] Furthermore, in this embodiment, the connecting piece 103 is made of metal and has a thickness of 50 μm or less. This allows for a balance between the flexibility and strength of the connecting piece 103.

[0064] Furthermore, in this embodiment, the connecting piece 103 is connected and fixed to the rotating shaft 101 and the linear shaft 102 at multiple locations, and the connecting piece 103 is wound and connected to the rotating shaft 101 by winding to the right and to the left, respectively. Thus, for the connecting piece 103, the tension force of the connecting piece 103 can be applied to the moving linear shaft 102 in either the left or right direction.

[0065] Furthermore, in this embodiment, the connecting piece 103 is arranged such that the tension of the connecting piece 103 counteracts the torque acting on the rotating shaft 101. As a result, bending of the rotating shaft 101 can be prevented, and the radial load acting on the bearing that supports the rotating shaft 101 to be rotatable can be mitigated.

[0066] Furthermore, in this embodiment, the connecting piece 103 is fixed to the rotating shaft 101 and the direct-drive shaft 102 respectively by the threaded part 106. As a result, the deviation of the connecting piece 103 relative to the direct-drive shaft 102 can be prevented, and the natural vibration frequency of the direct-drive-rotation conversion mechanism can be improved.

[0067] Furthermore, in this embodiment, the rotary shaft 101 and the linear shaft 102 are subjected to a preload and are in close contact. This increases the natural vibration frequency of the linear-rotation conversion mechanism. Also, in this embodiment, the thrust generating device 104 has a high-speed response solid-state actuator such as a linear motor or a piezoelectric element. This increases the natural vibration frequency of the linear shaft 102, which is a movable member.

[0068] [Second Implementation]

[0069] The second embodiment of the galvanometer motor 1A differs from the first embodiment in that it does not have a thrust generating device 104 and it does have a torque generating device 104A. Otherwise, its structure is the same as that of the first embodiment.

[0070] Reference Figure 12 The galvanometer motor 1A of the second embodiment is described. Figure 12 This is a diagram used to illustrate the oscillating actuator 1A, viewed from a direction orthogonal to the axis of rotation 101A.

[0071] like Figure 12As shown, no thrust generating device 104 is provided on the direct-drive shafts 102 (102-1, 102-2). Instead, a torque generating device 104A, which is a conventional motor, is connected to the end of the rotating shaft 101A. Driving the torque generating device 104A causes the rotating shaft 101A to rotate, thus configuring the direct-drive shafts 102 (102-1, 102-2) to move forward and backward due to the tensile force of the connecting plates 103 (103-1, 103-2, 103-3) and connecting plates 103 (103-4, 103-5, 103-6, not shown). The rotating shaft 101A, the direct-drive shaft 102 (102-1, 102-2), the connecting piece 103 (103-1, 103-2, 103-3), and the connecting piece 103 (103-4, 103-5, 103-6, not shown) constitute a direct-drive rotation conversion mechanism that drives the rotating shaft 101A and the direct-drive shaft 102 (102-1, 102-2) to convert rotational motion into direct-drive motion.

[0072] This disclosure is not limited to the methods described above, but includes variations and improvements within the scope that can achieve the purpose of this disclosure.

[0073] In the above embodiment, six connecting plates 103 are provided, but the number is not limited to this. Furthermore, the structure of the rotating shaft, the direct-drive shaft, the connecting plates, etc., is not limited to the structure of the rotating shaft 101, the direct-drive shaft 102, the connecting plates 103, etc. Also, the direct-drive shaft 102 is composed of two direct-drive shafts 102-1 and 102-2, but this is not a limitation. For example, the direct-drive shaft 102 may also be composed of either direct-drive shaft 102-1 or 102-2.

[0074] Symbol Explanation

[0075] 1. 1A—Galvanometer motor; 101, 101A—Rotating shaft; 102—Direct drive shaft; 103—Connecting plate; 104—Thrust generating device; 104A—Torque generating device.

Claims

1. A oscillating actuator for oscillating a oscillating body, characterized in that, Include: Rotation axis; Direct-acting shaft; and A direct-to-rotation conversion mechanism that drives and connects the rotary shaft to the direct-drive shaft to convert direct motion into rotational motion or vice versa. The aforementioned rotating shaft has a torque generating device, or the aforementioned linear shaft has a thrust generating device. The aforementioned direct-to-rotation conversion mechanism has a connecting plate. A portion of the connecting piece is connected and fixed in a wound state along the rotation axis, and the other portions of the connecting piece are connected and fixed in a state along the linear axis.

2. The oscillating actuator according to claim 1, characterized in that, The connecting piece is made of metal and has a thickness of less than 50 μm.

3. The oscillating actuator according to claim 1, characterized in that, The aforementioned connecting piece is connected and fixed to the aforementioned rotating shaft and the aforementioned linear shaft at multiple locations. The connecting pieces are wound and connected relative to the rotating axis, respectively, to the right and to the left.

4. The oscillating actuator according to claim 1, characterized in that, The connecting piece is configured such that the tension of the connecting piece counteracts the torque acting on the rotating shaft.

5. The oscillating actuator according to claim 1, characterized in that, The connecting pieces are respectively fixed to the rotating shaft and the linear shaft using threaded parts.

6. The oscillating actuator according to claim 1, characterized in that, The aforementioned rotating shaft and the aforementioned linear shaft are subjected to a preload and are in close contact.

7. The oscillating actuator according to claim 1, characterized in that, The aforementioned thrust generating device has a high-speed response solid actuator such as a linear motor or a piezoelectric element.

8. The oscillating actuator according to claim 1, characterized in that, The reflector of the electric scanner is fixed on the aforementioned rotating axis.

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