MEMS transducer structure

Abstract

The transducer structure has a flexible element which is fixed to a stationary holding element by means of a first region, a beam element which is movably fixed to the holding element by means of a first end via a flexible first connecting element, and a second connecting element which is movably fixed to the beam element by means of a second end via a second region. Wherein the beam element is movably fastened by means of the second end to the second region of the flexible element via a flexible second connecting element, and wherein the beam element is configured to be harder in terms of resistance to bending in the X-Y plane than the flexible element and the first and second connecting elements, wherein a first sensor element is arranged between the holding element and the first end face of the beam element and / or a second sensor element is arranged between the second region of the flexible element and the second end face of the beam element, wherein the first and / or the second sensor element is designed to vary the physical property depending on a change in mechanical stress of the first and / or the second sensor element, and wherein the first and / or the second sensor element experiences a change in mechanical stress when the flexible element is bent in the X-Y plane.

Description

Technical Field

[0001] The present invention relates to a MEMS transducer structure having a flexible element, a fixed retaining element, and a beam element movably arranged between the retaining element and the flexible element. Background Technology

[0002] Piezoresistive MEMS transducer structures are known from publicly available documents US11674859B, US11337016B, and US10257615B. Summary of the Invention

[0003] The objective of this invention is to provide an improved MEMS transducer structure.

[0004] A MEMS transducer structure with the following features is proposed: the MEMS transducer structure has a flexible element fixed to a fixed retaining element via a first region, and a beam element movably fixed to the retaining element via a first end through a flexible first connecting element and / or via a first sensor element, wherein the beam element is movably fixed to a second region of the flexible element via a second end through a flexible second connecting element and / or via a second sensor element, wherein the beam element is constructed to be more rigid than the flexible element and especially more rigid than the first and / or second connecting elements in resisting bending in the XY plane, wherein at least one or a second sensor element is provided, wherein the first and / or second sensor elements are configured to change physical properties according to changes in mechanical stress in the first and / or second sensor elements, wherein the first and / or second sensor elements experience changes in mechanical stress when the flexible element bends in the XY plane.

[0005] Depending on the selected implementation, the first and / or second sensor element may be a flexible connection element between the retaining element and the beam element or between the beam element and the flexible element.

[0006] The proposed MEMS transducer structure is particularly sensitive, preferably insensitive to particles, and possesses a good signal-to-noise ratio. Therefore, the proposed MEMS transducer structure can be constructed smaller or more efficiently within the same size while maintaining the same performance. In particular, the proposed MEMS transducer structure can be used not only for sensing fluid mass flow or fluid pressure, but also as a microphone for sound reception. Therefore, the proposed MEMS transducer structure can be configured as a sensor and / or as an actuator.

[0007] The connecting elements have minimal bending stiffness in the direction perpendicular to the main extension plane, while being rigid in the main extension plane. In this way, they allow the beam element to tilt and generate longitudinal stress in the sensor element.

[0008] In one embodiment, the flexible element is constructed as a lamellar sheet and / or as a membrane. Therefore, a simple structure can be achieved while maintaining good sensitivity.

[0009] In one embodiment, the first and / or second connecting elements are configured as a web and / or as a thin film. This allows for a simple structure while maintaining good sensitivity.

[0010] In one implementation, when the flexible element bends in the XY plane, the first sensor element experiences compression and the second sensor element experiences elongation, or vice versa. This allows for improved sensitivity, for example, by detecting the reverse signal of the sensor element via a Wheatstone bridge.

[0011] In one embodiment, a second flexible element is provided, which is fixed to the fixed retaining element via another first region, wherein the second flexible element is fixed to a second region of the flexible element via another second region, and wherein the beam element, the first and second connecting elements, and the first and second sensor elements are arranged between the first and second flexible elements. Therefore, the beam element is better protected from mechanical influence.

[0012] In one embodiment, a cavity is formed between the flexible element and the second flexible element, wherein the cavity is closed by additional lateral walls, and wherein the beam element, the first and second connecting elements, and the first and second sensor elements are arranged within the cavity. Therefore, the beam element is better protected from mechanical influence. Furthermore, the cavity may have a reference pressure lower than the external ambient pressure.

[0013] In one embodiment, a support element is provided between the first and second flexible elements, connecting the first and second elements to each other. This improves stability and further prevents the two elements from abutting against each other and / or against the beam element. This prevents collapse under external overpressure and ensures synchronous movement of the two flexible elements.

[0014] In one embodiment, the second flexible element is configured as a curved beam and / or as a sheet and / or as a diaphragm. This improves sensitivity.

[0015] In one embodiment, an additional flexible element is provided, which is fixed to an additional fixed retaining element via a first region. This additional flexible element has a rotatable beam element, which is movably fixed to the additional retaining element via a first end through a flexible additional first connecting element. The additional beam element is movably fixed to a second region of the additional flexible element via a flexible additional second connecting element via a second end. This additional beam element is constructed to be more rigid than the additional flexible element in resisting bending in the XY plane. An additional first sensor element is arranged between the additional retaining element and the first end of the additional beam element. An additional second sensor element is arranged between the second region of the additional flexible element and the second end of the additional beam element. The additional first and second sensor elements are configured to change physical properties according to changes in mechanical stress. When the additional flexible element bends in the XY plane, the additional first and second sensor elements experience different stress changes. In particular, the second end of the additional beam element is connected to the second end of the aforementioned beam element.

[0016] This approach provides a robust transducer structure, which also improves sensitivity.

[0017] In one embodiment, the retaining element and the other retaining element are interconnected, particularly in terms of being integrally constructed of material, and / or, the flexible element and the other flexible element are interconnected, particularly in terms of being integrally constructed of uniform material. This simplifies the construction and manufacturing of the transducer structure and improves its robustness.

[0018] In one embodiment, a second flexible element is provided, which is fixed to the fixed additional retaining element via another first region, wherein the second flexible element is fixed to a second region of the flexible element via another second region, and wherein the additional beam element, the additional first and second connecting elements, and the additional first and second sensor elements are arranged between the additional first and the additional second flexible elements. In this way, the additional beam element is protected from mechanical influence.

[0019] In one embodiment, the second flexible element and another second flexible element are interconnected, particularly in that they are constructed as a single, integral unit made of the same material. This improves the stability of the transducer structure.

[0020] In one embodiment, the second end of the additional beam element and the second end of the beam element are connected via a connecting element, particularly an annular one, wherein, in particular, the second end of the additional beam element and the second end of the beam element are connected to the connecting element on opposite sides. Therefore, the stability of the transducer structure can be further improved.

[0021] In one embodiment, the transducer structure is arranged on a substrate, wherein, in particular, a second region of the flexible element is arranged above a substrate void.

[0022] In one embodiment, a torsion spring is provided between the retaining element and the beam element, wherein the torsion spring ensures that the retaining element resists rotation about the X direction and / or movement in the Z direction. This improves the transducer structure, particularly its sensitivity in a predetermined direction. Attached Figure Description

[0023] The present invention will be explained in more detail with reference to the accompanying drawings.

[0024] The attached diagram shows:

[0025] Figure 1 : A schematic cross-sectional view of the first embodiment of the transducer structure.

[0026] Figure 2 : Figure 1 A schematic top view of the transducer structure.

[0027] Figure 3 : Figure 1 A schematic side view of the transducer structure, in an offset state.

[0028] Figure 4 : A schematic cross-sectional view of another embodiment of the transducer structure.

[0029] Figure 5 : Figure 4 A schematic top view of the transducer structure.

[0030] Figure 6 : A schematic cross-sectional view of another embodiment of the transducer structure.

[0031] Figure 7 : Figure 6 A schematic top view of the transducer structure.

[0032] Figure 8 : Figure 6 A schematic diagram of the transducer structure, in an offset state.

[0033] Figure 9 A schematic cross-sectional view of another embodiment of the transducer structure.

[0034] Figure 10 : Figure 9 The transducer structure is based on Figure 9 A schematic top view of the cross-section marked in the middle, viewed from below. Detailed Implementation

[0035] Figure 1 A schematic cross-sectional view of one embodiment of a transducer junction 1 is shown, the transducer structure having a retaining element 2 configured as a fixed element. For example, the retaining element 2 is connected to or is part of a substrate. A flexible element 3 is fixed to the retaining element 2 via a first region 4. In the illustrated embodiment, the flexible element 3 is fixed to the upper side of the retaining element 2 via a connecting layer 5 in the first region 4. The connecting layer 5 may be constructed, for example, in the form of silicon oxide. The retaining element 2 and / or the flexible element 3 are made, for example, of a semiconductor material such as polysilicon. The flexible element 3 extends from the first region 4 to a second region 6. The first region 4 is disposed at a first end of the flexible element. The second region 6 is disposed at a second end of the flexible element 3.

[0036] A first connecting element 7, a beam element 8, and a second connecting element 9 are arranged parallel to the flexible element 3. The first connecting element 7 is fixed to the retaining element 2 via a first end region. The second end region of the first connecting element 7 is fixed to the first end region of the beam element 8. The second end region of the beam element 8 is connected to the first end region of the second connecting element 9. The second end region of the second connecting element 9 is connected to the second region 6 of the flexible element 3. In the illustrated embodiment, the second end region 6 of the flexible element 3 is constructed to be thicker along the Y direction than the rest of the flexible element 3. Furthermore, a spacing 10 is constructed along the Y direction between the first connecting element 7 and the movable element 3, between the beam element 8 and the movable element 3, and between the second connecting element 9 and the movable element 3.

[0037] Furthermore, a first sensor element 11 is arranged between the holding element 2 and the first end of the beam element 8. A second sensor element 12 may also be arranged between the second end of the beam element 8 and the second region 6 of the flexible element 3. The first and second sensor elements 11 and 12 are configured, for example, to change physical properties according to changes in mechanical stress in the first and / or second sensor elements. For example, the first and / or second sensor elements may have piezoelectric or piezoresistive materials. In particular, the first and / or second sensor elements may be crystalline piezoresistive silicon. For example, the first and / or second sensor elements may be constructed in the form of nanowires, especially single-crystal piezoresistive nanowires. These sensor elements are in contact via electrical wires (not shown), and the analysis and evaluation unit can detect changes in the physical properties of the sensor elements, especially changes in resistance, via these wires.

[0038] According to the selected embodiment, the first and / or second sensor elements 11, 12 can be configured to establish a flexible connection between the retaining element 2 and the beam element 8, or between the beam element 8 and the second region 6 of the flexible element 3. Here, the first connecting element and / or the second connecting element can be omitted. Therefore, the beam element 8 can be connected to the retaining element 2 in the first region 4, either via the sensor elements 11, 12 and / or via the connecting elements 7, 9, and to the flexible element 3 in the second region 6.

[0039] The first and / or second connecting elements 7, 9 are configured as flexible connecting elements and are used to movably connect the beam element 8 to the retaining element 2 or to the second region 6 of the flexible element 3. The first and second connecting elements 7, 9 may be made of, for example, a semiconductor material such as polysilicon. The beam element 8 has at least 50% higher stiffness in resisting bending in the YX plane compared to the flexible element 3 and / or compared to the first and / or second connecting elements 7, 9. For example, the beam element 8 is also made of a semiconductor material such as polysilicon. Depending on the chosen embodiment, the flexible element 3, connecting elements 7, 9, and beam element 8 may also be made of other micromachinable materials such as silicon.

[0040] The movable element 3 can be constructed, for example, as a sheet, web, beam, or membrane. The first and / or second connecting elements 7, 9 can be constructed, for example, as a web and / or as a thin film. The layer thickness of the movable element 3 and the connecting elements 7, 9 can be, for example, in the Y direction, in the range of 0.5 μm to 5 μm, particularly between 1 μm and 3 μm. The beam element 8 has a preferably elongated, strip-like shape and has a thickness, for example, in the Y direction, in the range of 1 to 20 μm, particularly in the range of 2 to 6 μm.

[0041] Figure 2 As shown in the diagram Figure 1 A top view of transducer element 1. For example, the movable element 3 and / or connecting elements 7, 9 and / or beam element 8 may have the same width in the Z direction, wherein the width has, for example, a value equivalent to double or more times the thickness. Depending on the chosen embodiment, the flexible element 3, the first and / or second connecting elements 7, 9 and / or the beam element 8 may also have different widths along the Z direction. The length of the flexible element 3 may, for example, be in the range of 10 to 500 μm along the X direction. The beam element 8 may, for example, be half the length of the flexible element 3 along the X direction. The lengths of the sensor elements 11, 12 along the X direction are, for example, in the range of 5 to 30 μm. Corresponding piezoresistive nanowires are known, for example, from published document US11674859 B2.

[0042] Figure 3 The schematic diagram illustrates the movement of element 3 from its position. Figure 1 The offset along the Y direction begins from the starting position shown. Because beam element 8 is constructed to be significantly more rigid than the movable element in terms of bending along the XY direction, beam element 8 hardly or substantially does not bend. Since beam element 8 is elastically connected not only to the retainer 2 but also to the second region 6 of the flexible element 3, the first sensor element 11 experiences compression and the second sensor element 12 experiences elongation. Both compression and elongation can be detected by corresponding changes in the resistance, for example, due to the physical characteristics of the first and second sensor elements. The second region 6 of the flexible element 3 can be constructed in the form of a retaining block 13. The retaining block 13 is constructed to be more rigid than the movable element 3, especially thicker in the Y direction. The retaining block 13 can be constructed integrally with the flexible element 3 and in a consistent material.

[0043] Figure 4 Another embodiment of the transducer structure 1 is shown, in which the holding element 2 is arranged on a carrier 14, wherein the carrier 14 is constructed, for example, as a substrate, particularly a silicon substrate. Furthermore, the transducer structure 1 has a second flexible element 15, another holding element 16, another beam element 17, another first connecting element 18, another second connecting element 19, another first sensor element 20, and another second sensor element 21. Additionally, an additional holding block 22 is provided, which in the illustrated embodiment is integrally constructed with the holding block 13. Therefore, the construction is based on... Figure 1 The second sensor arrangement, wherein the second sensor arrangement and the first sensor arrangement are connected via holding blocks 13, 22. Figure 4 The transducer structure 1 is shown in an offset state. In this offset state, the first and second sensor elements 11, 12, as well as the additional first and additional second sensor elements 20, 21, undergo elongation or compression.

[0044] Figure 5 Shown from above Figure 4 The arrangement.

[0045] Figure 6 The diagram illustrates the following: Figure 1The transducer structure further includes a second flexible element 23, which is connected to the retaining element 2 and the retaining block 13 via corresponding ends. The second flexible element 23 can be constructed similarly to the flexible element 3. Connecting elements 7, 9 and / or sensor elements 11, 12 and beam element 8 are arranged between the flexible element 3 and the second flexible element 23. The second flexible element 23 is connected to the retaining element 2 and the retaining block 13, for example, via a connecting layer. A cavity 24 is constructed between the flexible element 3 and the second flexible element 23, which is preferably closed via a sidewall (not shown). In this way, the sensor elements 11, 12 and connecting elements 7, 9 can be protected from environmental influences or sealed. The side elements (not shown) that laterally close the cavity 24 can be constructed similarly flexibly, for example.

[0046] According to the selected embodiment, support elements 25 may be provided between the flexible element 3 and the second flexible element 23 and / or between the flexible element 3 and the beam element 8 and / or between the beam element 8 and the second flexible element 23. These support elements may also be constructed to a certain extent elastically. The support elements 25 are used to limit or prevent the flexible element 3 from abutting against the beam element and / or the second flexible element 23 from abutting against the beam element 8 or the sensor elements 11, 12.

[0047] Figure 7 Showing the view from above Figure 6 The diagram shows a top view of the flexible element 3.

[0048] Figure 8 Show Figure 6 A schematic cross-sectional view of the arrangement in an offset state, wherein the flexible element 3 is located relative to the second region 2. Figure 6 The rest position shown is offset along the Y-axis. In this embodiment of the transducer structure, the first and second sensor elements 11, 12 also undergo compression or elongation.

[0049] Figure 9 Another embodiment of transducer structure 1 is illustrated in a schematic cross-sectional view, which has a similar Figure 6 The second sensor arrangement. Therefore, this arrangement is basically corresponding. Figure 4 The transducer structure is constructed such that a second flexible element 23 and another second flexible element 26 are respectively provided. Furthermore, the flexible element 3 and the other flexible element 15 are also as described above. Figure 4 The membrane shown is preferably constructed as a single piece of material, especially as an annular disc. Similarly, the second flexible element 23 and the other second flexible element 26 are also constructed as a single piece of material, especially as an annular disc.

[0050] The retaining element 2 and the additional retaining element 16 are arranged on a common carrier 14. A pressure balancing opening 27 is provided in the common retaining blocks 13, 22, which connects the additional cavity 28 to the surrounding environment 29. The cavity 28 is constructed through a void in the substrate 14, most of which is spanned by the transducer structure.

[0051] Figure 10 A schematic diagram showing the view from below. Figure 9 The plan view shows that the retaining element 2 and the additional retaining element 16 are integrally and annularly constructed. Furthermore, the flexible element 3 is constructed in the form of a diaphragm, which covers most of the substrate void 28. Similarly, the additional flexible element 15 is also constructed as a diaphragm and covers the substrate void 28. In addition, a plurality of support elements 25 are arranged between the flexible element 3 and the second flexible element 23.

[0052] Torsion springs 30, 31, 32, and 33 can also be provided in all embodiments, such as... Figure 10 As shown in the diagram. Each pair of torsion springs 30, 31; 32, 33 are fixed to opposing sides between retaining elements 2, 16 and beam element 8 or another beam element 17. The torsion springs 30, 31, 32, 33 are used to hold beam element 8 and / or the other beam element 17 in a defined orientation about the Z direction. The torsion springs are, however, elastically constructed so that bending of flexible element 3 and the other flexible element 15 is unaffected or almost unaffected. For example, the torsion springs are made of semiconductor materials such as silicon or polycrystalline silicon.

[0053] The following explanation applies to all embodiments. Holding element 2, additional holding element 16, and carrier 14 are fixed elements of the transducer structure, relative to which the flexible element, beam element, sensor element, and connecting element are movable.

[0054] The beam elements 8 and 17 are constructed in the form of rigid, i.e., stiff elements, which can perform a rotational motion in the XY plane through their corresponding first and second ends.

[0055] Flexible elements 3 and 15 are movable elements configured to receive forces. Flexible elements 3 and 15 are fixedly anchored at their ends to a fixed element. Connecting elements 7, 9, 18, and 19 have less stiffness than beam elements and are configured to be flexible in the XY plane.

[0056] Single-crystal piezoresistive nanowires, which have a better signal-to-noise ratio than polycrystalline nanowires, are particularly suitable for use as sensor elements. Rotatable beam elements 8, 17 can be anchored in a defined direction to at least one fixed element via a torsion spring. This allows beam elements 8, 17 to preferably rotate in the XY plane, the rotation being defined, for example, by a torsion spring. Therefore, the torsion spring enables more precise determination of the beam element's position. Flexible elements 3, 15 can be, for example, boundary layers, such as diaphragms or flexible bending beams. The flexible elements can receive hydrostatic and / or hydrodynamic pressure changes or forces acting on them from the surrounding environment and convert them into motion in the XY plane.

[0057] Cavities 24 and 28 can have a defined gas atmosphere, which can also be under negative pressure if necessary. In this way, the transducer mechanism, especially the sensor element, can be protected from the corrosive surrounding environment and particles, which improves its robustness.

[0058] The power supply wires of the sensor elements can be laid through a boundary layer and connecting elements to ensure that the current paths of the individual sensor elements are electrically insulated from each other.

[0059] Both sensor elements can be configured such that when the movable element is offset in a direction perpendicular to the main extension plane, the sensor element experiences opposite changes in its stress state, which can be advantageously measured differentially via a Wheatstone bridge by detecting stress-related physical parameters (resistance changes).

[0060] The component may also have a reference sensor element 34, such as in Figure 10 As schematically illustrated. The reference sensor element 34 can be constructed like a sensor element, wherein the reference sensor element 34 does not experience stress changes during the movement of the flexible element. This is used, for example, to enable temperature compensation of the measurement signal of the sensor element.

[0061] The cavity structure can have pressure balancing holes, which allows for a defined pressure balance between the substrate voids and the surrounding environment. Therefore, the measurement signal is independent of pressure fluctuations in the surrounding environment.

[0062] The transducer structure can be advantageously used for capacitive relative pressure sensors and / or microphones.

Claims

1. A MEMS transducer structure (1), the MEMS transducer structure having flexible elements (3, 15), the flexible elements being fixed to a fixed holding element (2) via a first region (4), the MEMS transducer structure having a beam element (8), the beam element being movably fixed to the holding element (2) via a first end via a flexible first connecting element (7) and / or via a first sensor element (11), wherein, The beam element (8) is movably fixed to a second region of the flexible element (3, 15) via a second end via a flexible second connecting element (9) and / or via a second sensor element (12), wherein the beam element (8) is constructed to be more rigid than the flexible element (3, 15) in resisting bending in the XY plane, wherein at least one of the first or second sensor elements (11, 12) is provided, wherein the first and / or second sensor elements (11, 12) are configured to change physical properties according to changes in mechanical stress in the first and / or second sensor elements (11, 12), wherein the first and / or second sensor elements (11, 12) experience changes in mechanical stress when the flexible element (3, 15) bends in the XY plane.

2. The transducer structure according to claim 1, wherein, The flexible elements (3, 15) are constructed as sheets and / or curved beams and / or diaphragms.

3. The transducer structure according to any one of the preceding claims, wherein, The first and / or second connecting elements (7, 9) are configured as a web and / or a membrane.

4. The transducer structure according to any one of the preceding claims, wherein, When the flexible elements (3, 15) bend in the XY plane, the first sensor element (11) experiences compression and the second sensor element (12) experiences elongation, or vice versa, the first sensor element (11) experiences elongation and the second sensor element (12) experiences compression.

5. The transducer structure according to any one of the preceding claims, wherein, A second flexible element (23) is provided, which is fixed to the fixed retaining element (2) through another first region, wherein the second flexible element (23) is fixed to the second region of the flexible element (3) through another second region, and wherein the beam element (8), the first and / or the second connecting element (7, 9), and the first and / or the second sensor element (11, 12) are arranged between the first and the second flexible elements (3, 23).

6. The transducer structure according to claim 5, wherein, A cavity (24) is constructed between the flexible element (3) and the second flexible element (23), wherein the cavity (24) is closed by an additional side wall, and wherein the beam element (8) and the first and / or second sensor elements (11, 12) are arranged in the cavity (24).

7. The transducer structure according to claim 5 or 6, wherein, At least one support element (25) is provided between the first flexible element (3) and the second flexible element (23), the support element connecting the first and second flexible elements (3, 23) to each other.

8. The transducer structure according to any one of claims 5 to 7, wherein, The second flexible element (23) is constructed as a sheet and / or a curved beam and / or a diaphragm.

9. The transducer structure according to any one of the preceding claims, wherein the transducer structure has an additional flexible element (15) fixed to an additional fixed retaining element (16) via a first region, the transducer structure having an additional rotatable beam element (17) movably fixed to the additional retaining element (16) via a first end through an additional flexible first connecting element (18), wherein, The additional beam element (17) is movably fixed to the second region of the additional flexible element (15) via a second end via a flexible additional second connecting element (19), wherein the additional beam element (17) is constructed to be more rigid than the additional flexible element (15) in resisting bending in the XY plane, wherein an additional first sensor element (20) is arranged between the additional retaining element (16) and the first end of the additional beam element (17), wherein an additional second sensor element (20, 21) is arranged between the second region of the additional flexible element (15) and the second end of the additional beam element (17), wherein the additional first and additional second sensor elements are constructed to change physical properties according to changes in mechanical stress, wherein the additional first and additional second sensor elements (20, 21) experience different stress changes when the additional flexible element (15) bends in the XY plane, and wherein, in particular, the second end of the additional beam element (17) is connected to the second end of the beam element (8).

10. The transducer structure according to claim 9, wherein, The retaining element (2) and the other retaining element (16) are interconnected, especially integrally constructed in terms of material, and / or wherein the flexible element (3) and the other flexible element (15) are interconnected, especially integrally constructed in terms of material.

11. The transducer structure according to claim 9 or 10, wherein, An additional second flexible element (26) is provided, which is fixed to the additional fixed retaining element (16) via another first region, wherein the additional second flexible element (26) is fixed to the second region of the additional flexible element (15) via another second region, and wherein the additional beam element (17), the additional first and additional second connecting elements (18, 19), and the additional first and additional second sensor elements (20, 21) are arranged between the additional first and additional second flexible elements (15, 26).

12. The transducer structure according to claim 11, wherein, The second flexible element (23) and the other second flexible element (26) are interconnected, and are constructed integrally with consistent materials.

13. The transducer structure according to any one of claims 9 to 12, wherein, The second end of the additional beam element (17) and the second end of the beam element (8) are connected via, in particular, annular connecting elements (13, 22), wherein, in particular, the second end of the additional beam element (17) and the second end of the beam element (8) are connected to the connecting elements (13, 22) on opposite sides.

14. The transducer structure according to any one of the preceding claims, wherein, The transducer structure (1) is arranged on the substrate (14), wherein, in particular, the second region of the flexible element (3) is arranged above the substrate void (28).

15. The transducer structure according to any one of the preceding claims, wherein, A torsion spring (30, 31, 32, 33) is provided between the retaining element (2) and the beam element (8), wherein the torsion spring (30, 31, 32, 33) ensures that the beam element (8) elastically resists rotation about the X direction and / or movement in the Z direction.

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