Device for detecting distribution uniformity of rollers based on planetary roller screw

The detection device, which integrates multiple sensors, solves the problems of limited detection of roller distribution in planetary roller screws and interference, and achieves high-precision and high-speed roller distribution evaluation, meeting the detection needs of aerospace and high-end machine tools.

CN120907828APending Publication Date: 2025-11-07JIANGSU ZHONGGONG RES INST OF ADVANCED EQUIP CO LTD
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Patent Information

Application Number
CN202511049002.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-29
Publication Date
2025-11-07

AI Technical Summary

Technical Problem

Existing testing devices cannot comprehensively assess the circumferential angular deviation, axial parallelism, and meshing stress distribution of the rollers in planetary roller screws. Furthermore, they are susceptible to mechanical friction and vibration interference during high-speed dynamic testing, leading to a decrease in testing accuracy and failing to meet the high-precision requirements of aerospace and high-end machine tool industries.

Method used

The detection device employs multi-sensor fusion, including a high-speed industrial camera, a laser interferometer, a thin-film pressure sensor, a strain gauge array, and a high-precision capacitive displacement sensor, combined with an air bearing and a shock-absorbing base, to achieve multi-dimensional and dynamic detection of the roller distribution.

Benefits of technology

It enables comprehensive evaluation of roller distribution under high-speed rotation conditions, improves detection accuracy and anti-interference ability, meets the detection requirements of high-speed scenarios, and enhances detection efficiency and practicality.

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Abstract

The invention belongs to the technical field of detection devices, particularly relates to a detection device based on distribution uniformity of rollers of a planetary roller screw, and provides the following scheme: the detection device comprises a base; a rotary driving module, an optical detection module, a contact stress detection module, a high-precision capacitive displacement sensor array mechanism and a mobile detection mechanism are sequentially arranged at the top of the base, the rotary driving module comprises a servo motor, an encoder and an air bearing, and the servo motor is fixedly connected with a coupler; and the coupler is in transmission connection with the planetary roller screw. The three-dimensional scanning assembly reconstructs the surface appearance of the roller through the line laser transmitter and the area-array camera, the thin film pressure sensor is embedded into a nut raceway to collect contact pressure, the strain gauge array is pasted to a lead screw shaft neck to monitor deformation, and the multiple sensors work cooperatively to comprehensively evaluate the distribution state of the roller from the dimensions of optical tracks, mechanical response and the like. And the one-sidedness problem of a traditional single detection means is solved.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of detection devices, and particularly relates to a detection device based on planetary roller screw roller distribution uniformity. BACKGROUND

[0002] In the manufacturing and assembly process of the planetary roller screw, the roller distribution uniformity directly affects the transmission accuracy, load balance and service life. Traditional detection methods mostly rely on single optical imaging or contact pressure measurement, which is difficult to comprehensively evaluate the circumferential angle deviation, axial parallelism and meshing stress distribution of the roller. For example, only by shooting the roller position through the optical camera, the actual contact load difference cannot be obtained; and simply relying on the pressure sensor is difficult to locate the specific distribution defects, resulting in one-sidedness of the detection result. In addition, the existing device is easily disturbed by mechanical friction, vibration and other factors in high-speed dynamic detection, and the detection accuracy significantly decreases with the increase of rotating speed, which cannot meet the detection needs of high-precision transmission components in the fields of aerospace and high-end machine tools.

[0003] With the development of the planetary roller screw towards high load and high speed, higher requirements for the detection of roller distribution uniformity are put forward in multiple dimensions and dynamics. Although some new detection devices introduce the concept of multi-sensor fusion, there are still problems such as single detection mode and insufficient anti-interference ability. For example, in the high-speed running scene of new energy automobile electric drive system, the traditional device often causes early wear failure of the roller to be missed, and further causes the failure of the transmission system because it cannot complete the optical trajectory capture and mechanical stress monitoring simultaneously. Therefore, it is urgent to design a new device that integrates multi-physical field detection and has dynamic anti-interference ability to solve the problems of insufficient comprehensive detection and poor high-speed adaptability in the prior art. SUMMARY

[0004] Based on the technical problem that the traditional device cannot complete the optical trajectory capture and mechanical stress monitoring simultaneously, often causes early wear failure of the roller to be missed, and further causes the failure of the transmission system, the present application provides a detection device based on planetary roller screw roller distribution uniformity.

[0005] The application provides a detection device based on planetary roller screw roller distribution uniformity, which comprises a base, a planetary roller screw is arranged on the top of the base, a plurality of rollers are engaged with the outer wall of the planetary roller screw, screw shaft necks are arranged at the two ends of the planetary roller screw, a nut raceway is arranged on the inner wall of the planetary roller screw, a rotary drive module, an optical detection module, a contact stress detection module, a high-precision capacitive displacement sensing array mechanism and a movement detection mechanism are sequentially arranged on the top of the base, the rotary drive module comprises a servo motor, an encoder and an air floating bearing, the servo motor is fixedly connected with a shaft coupling, the shaft coupling is in transmission connection with the planetary roller screw, the encoder is coaxially arranged with the output end of the servo motor, the air floating bearing is sleeved on the outer periphery of the planetary roller screw, and the air floating bearing is fixedly connected with the base at the bottom, a data processing terminal is fixedly connected to the outer wall of the top of the base, and the data processing terminal is fixedly connected with a wireless transmission module.

[0006] Preferably, the optical detection module comprises an annular support, a high-speed industrial camera, an annular backlight and a laser interferometer, the annular support is arranged on the top of the base and surrounds the outer wall of the planetary roller screw, the high-speed industrial camera and the inner wall of the annular support are fixedly connected and uniformly distributed in the circumferential direction, the annular backlight is arranged on the inner side of the high-speed industrial camera, the annular backlight and the annular support are fixedly connected, and the laser interferometer and the outer wall of one end of the annular support are fixedly connected, and the measurement light path of the laser interferometer is aligned with the roller engagement gap.

[0007] Preferably, the outer wall of the annular support is fixedly connected with a three-dimensional scanning assembly, the three-dimensional scanning assembly is sequentially fixedly connected with a line laser emitter and a face array camera at the bottom, the line laser emitter scans along the axial direction of the planetary roller screw, and the face array camera receives reflected light signals to reconstruct the surface topography of the roller.

[0008] Preferably, the contact stress detection module comprises a thin film pressure sensor, a wireless transmission module and a strain sheet array, the thin film pressure sensor patch is embedded in the inner wall of the nut raceway, the wireless transmission module is electrically connected with the thin film pressure sensor, and the strain sheet array is pasted on the surface of the screw shaft neck and electrically connected with the data processing terminal.

[0009] Preferably, the movement detection mechanism comprises a driving motor and a sliding block, sliding grooves are formed in the outer walls of the two ends of the top of the base, the sliding block is in sliding connection with the sliding grooves, the driving motor is fixedly connected with the outer wall on one side of one end of the base, the driving motor is fixedly connected with a threaded screw rod, the sliding block is in threaded connection with the threaded screw rod, a connecting frame is fixedly connected to the top of the sliding block, and the connecting frame is fixedly connected with the annular support.

[0010] Preferably, the high-precision capacitive displacement sensing array mechanism comprises a measuring plate, a micro-capacitance sensor and a temperature compensation element, the measuring plate and the annular support are fixedly connected and uniformly distributed in the circumference, the micro-capacitance sensor and the outer wall of the measuring plate are fixedly connected, and the temperature compensation element is arranged in parallel with the micro-capacitance sensor.

[0011] Preferably, the air floating bearing comprises a gas supply port, an annular air film cavity and a pressure feedback valve, the gas supply port is communicated with the annular air film cavity, the gas supply port is fixedly connected with a gas supply pipeline, and the pressure feedback valve and the outer wall of the gas supply pipeline are fixedly connected and adjust the air film pressure in real time.

[0012] Preferably, the bottom is fixedly connected with a shock-absorbing base at the top, the shock-absorbing base is fixedly connected with an equipment rack at the top, the servo motor and the equipment rack are fixedly connected, the outer wall of the equipment rack is fixedly connected with a rotating speed fluctuation suppressor, and the rotating speed fluctuation suppressor is connected in series with the encoder signal output end.

[0013] Preferably, the high-speed industrial camera is fixedly connected with a polarization filter and an image preprocessing chip, the polarization filter eliminates reflection interference, and the image preprocessing chip executes a denoising and edge enhancement algorithm in real time.

[0014] Preferably, the data processing terminal is internally provided with an AI algorithm module, and the AI algorithm module is used for fusion analysis of multi-source detection data to generate a roller distribution uniformity evaluation result.

[0015] Compared with the prior art, the present application provides a detection device based on the roller distribution uniformity of a planetary roller screw, which has the following beneficial effects: 1. The detection device based on the roller distribution uniformity of a planetary roller screw, a high-speed industrial camera annular array cooperates with an annular backlight to capture the motion trajectory of the roller, a laser interferometer monitors the meshing gap between the roller and the nut raceway, a three-dimensional scanning assembly reconstructs the surface topography of the roller through a line laser emitter and a face array camera, a thin film pressure sensor is embedded in the nut raceway to collect the contact pressure, a strain gauge array is pasted on the screw shaft neck to monitor the deformation, and multiple sensors work cooperatively to comprehensively evaluate the roller distribution state from the dimensions of optical trajectory and mechanical response, thereby solving the one-sidedness problem of the traditional single detection method.

[0016] 2. The detection device based on the roller distribution uniformity of a planetary roller screw, an air floating bearing forms a stable air film through a gas supply port and a pressure feedback valve, eliminates the interference of mechanical friction on the rotation of the planetary roller screw, a shock-absorbing base cooperates with a rotating speed fluctuation suppressor to stabilize the rotating speed of the servo motor, the polarization filter and the image preprocessing chip of the high-speed industrial camera suppress reflection and dynamic blur, so that the device can still maintain the accuracy of the detection data under high-speed rotating working conditions, and the detection needs of high rotating speed scenes are met.

[0017] 3. The detection device based on the uniformity of the planetary roller screw roller distribution, the drive motor of the moving detection mechanism drives the sliding block to move the annular support along the sliding groove, realizing the axial scanning of the detection module, the high-precision capacitive displacement sensing array completes the static detection of the roller position through the measuring plate and the micro-capacitance sensor, and the data processing terminal fuses multi-source data through an AI algorithm module and automatically generates an evaluation report, so that the whole process automation from detection to analysis greatly shortens the working cycle and improves the detection efficiency and practicability of the industrial field. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application; Figure 2 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application; Figure 1 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application; Figure 3 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application; Figure 4 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application; Figure 5 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application; Figure 6 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application; Figure 7 A schematic diagram of the main structure of a detection device based on the uniformity of the planetary roller screw roller distribution is provided for the present application.

[0019] In the figure: 1 base, 2 servo motor, 3 encoder, 4 air bearing, 5 coupling, 6 planetary roller screw, 7 annular support, 8 high-speed industrial camera, 9 annular backlight, 10 laser interferometer, 11 roller, 12 three-dimensional scanning assembly, 13 line laser emitter, 14 area array camera, 15 thin film pressure sensor, 16 wireless transmission module, 17 strain gauge array, 18 nut raceway, 19 screw shaft neck, 20 data processing terminal, 21 sliding block, 22 connecting frame, 23 sliding groove, 24 measuring plate, 25 micro-capacitance sensor, 26 temperature compensation element, 27 gas supply port, 28 annular gas film cavity, 29 pressure feedback valve, 30 gas supply pipeline, 31 shock absorbing base, 32 rotational speed fluctuation suppressor, 33 polarization filter, 34 image preprocessing chip, 35 threaded screw, 36 drive motor, 37 equipment rack. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.

[0021] Referring to Figures 1-7 A detection device based on uniformity of planetary roller screw roller distribution, comprising a base 1, a planetary roller screw 6 is arranged on the top of the base, a plurality of rollers 11 are engaged with the outer wall of the planetary roller screw 6, screw shaft necks are arranged at both ends of the planetary roller screw 6, a nut raceway 18 is arranged on the inner wall of the planetary roller screw 6, a rotating drive module, an optical detection module, a contact stress detection module, a high-precision capacitive displacement sensing array mechanism and a movement detection mechanism are sequentially arranged on the top of the base 1, the rotating drive module comprises a servo motor 2, an encoder 3 and an air floating bearing 4, the servo motor 2 is fixedly connected with a shaft coupling 5, the shaft coupling is in transmission connection with the planetary roller screw 6, the encoder 3 is coaxially arranged with the output end of the servo motor 2, the air floating bearing 4 is sleeved on the outer periphery of the planetary roller screw 6, the bottom of the air floating bearing 4 is fixedly connected with the base 1, a data processing terminal 20 is fixedly connected with the outer wall on the top of the base 1, the data processing terminal 20 is fixedly connected with a wireless transmission module 16, a high-speed industrial camera 8 annular array cooperates with a ring-shaped backlight 9 to capture the movement track of the roller 11, a laser interferometer 10 monitors the engagement gap between the roller 11 and the nut raceway 18, a three-dimensional scanning assembly 12 reconstructs the surface topography of the roller through a line laser emitter 13 and a plane array camera 14, a thin film pressure sensor 15 is embedded in the nut raceway 18 to collect the contact pressure, a strain gauge array 17 is pasted on the screw shaft neck 19 to monitor the deformation, and the multiple sensors work cooperatively to comprehensively evaluate the roller distribution state from the dimensions of optical track and mechanical response, thereby solving the one-sidedness problem of the traditional single detection means.

[0022] In the present application, the optical detection module comprises a ring-shaped support 7, a high-speed industrial camera 8, a ring-shaped backlight 9 and a laser interferometer 10, the ring-shaped support 7 is arranged on the top of the base 1 and surrounds the outer wall of the planetary roller screw 6, the high-speed industrial camera 8 and the inner wall of the ring-shaped support 7 are fixedly connected and evenly distributed in the circumferential direction, the ring-shaped backlight 9 is arranged on the inner side of the high-speed industrial camera 8, the ring-shaped backlight 9 and the ring-shaped support 7 are fixedly connected, the laser interferometer 10 and the outer wall of one end of the ring-shaped support 7 are fixedly connected, the measurement light path of the laser interferometer 10 is aligned with the engagement gap of the roller 11, the outer wall of the ring-shaped support 7 is fixedly connected with the three-dimensional scanning assembly 12, the bottom of the three-dimensional scanning assembly 12 is sequentially fixedly connected with the line laser emitter 13 and the plane array camera 14, the line laser emitter 13 scans along the axial direction of the planetary roller screw 6, the plane array camera 14 receives the reflected light signal to reconstruct the surface topography of the roller 11, the high-speed industrial camera 8 annular array cooperates with the ring-shaped backlight 9 to capture the movement track of the roller 11, the laser interferometer 10 monitors the engagement gap between the roller 11 and the nut raceway 18, and the three-dimensional scanning assembly 12 reconstructs the surface topography of the roller through the line laser emitter 13 and the plane array camera 14. The contact stress detection module comprises a thin film pressure sensor 15, a wireless transmission module 16 and a strain gauge array 17. The thin film pressure sensor 15 is embedded in the inner wall of the nut raceway 18. The wireless transmission module 16 is electrically connected with the thin film pressure sensor 15. The strain gauge array 17 is pasted on the surface of the screw shaft neck 19 and is electrically connected with the data processing terminal 20. The thin film pressure sensor 15 is embedded in the nut raceway 18 to collect the contact pressure. The strain gauge array 17 is pasted on the screw shaft neck 19 to monitor the deformation. The multiple sensors work together to comprehensively evaluate the roller distribution state from the dimensions of optical track and mechanical response, and solve the one-sidedness problem of the traditional single detection method. The moving detection mechanism comprises a driving motor 36 and a sliding block 21. The top outer wall of the base 1 is provided with a sliding groove 23 at both ends. The sliding block 21 is in sliding connection with the sliding groove 23. The driving motor 36 is fixedly connected with one end of the outer wall of the base 1. The driving motor 36 is fixedly connected with a threaded screw rod 35. The sliding block 21 is in threaded connection with the threaded screw rod 35. The sliding block 21 is fixedly connected with a connecting frame 22 on the top. The connecting frame 22 is fixedly connected with the annular support 7. The high-precision capacitive displacement sensing array mechanism comprises a measuring plate 24, a micro-capacitance sensor 25 and a temperature compensation element 26. The measuring plate 24 is fixedly connected with the annular support 7 and is uniformly distributed in a circle. The micro-capacitance sensor 25 is fixedly connected with the outer wall of the measuring plate 24. The temperature compensation element 26 is connected in parallel with the micro-capacitance sensor 25. The data processing terminal 20 is internally provided with an AI algorithm module. The AI algorithm module is used for fusion analysis of multi-source detection data to generate a roller 11 distribution uniformity evaluation result. The driving motor 36 of the moving detection mechanism drives the sliding block 21 to move the annular support 7 along the sliding groove 23, so as to realize axial scanning of the detection module. The high-precision capacitive displacement sensing array completes static detection of the position of the roller 11 through the measuring plate 24 and the micro-capacitance sensor 25. The data processing terminal 20 fuses multi-source data through the AI algorithm module and automatically generates an evaluation report. The whole process from detection to analysis is automatically shortened, which greatly improves the detection efficiency and practicability of the industrial site. The air floating bearing 4 comprises a gas inlet 27, an annular air film cavity 28 and a pressure feedback valve 29, the gas inlet 27 is in communication with the annular air film cavity 28, the gas inlet 27 is fixedly connected with the gas pipeline 10, the pressure feedback valve 29 and the gas pipeline 30 are fixedly connected with the outer wall, and the pressure of the air film is adjusted in real time, the top of the base is fixedly connected with a shock absorbing base 31, the top of the shock absorbing base 31 is fixedly connected with an equipment rack 37, the servo motor 2 and the equipment rack 37 are fixedly connected, the outer wall of the equipment rack 37 is fixedly connected with a rotating speed fluctuation suppressor 32, the rotating speed fluctuation suppressor 32 is connected in series with the signal output end of the encoder 3, the high-speed industrial camera 8 is fixedly connected with a polarizing filter 33 and an image preprocessing chip 34, the polarizing filter 33 eliminates the interference of reflected light, the image preprocessing chip 34 executes the denoising and edge enhancement algorithm in real time, the air floating bearing 4 forms a stable air film through the gas inlet 27 and the pressure feedback valve 29, and the interference of mechanical friction on the rotation of the planetary roller screw 6 is eliminated; the shock absorbing base 31 and the rotating speed fluctuation suppressor 32 cooperate to stabilize the rotating speed of the servo motor 2; the polarizing filter 33 and the image preprocessing chip 34 of the high-speed industrial camera 8 suppress reflected light and dynamic blur, so that the device can still maintain the accuracy of detection data under high-speed rotating conditions, and the detection requirements of high-speed scenes are met.

[0023] In use, the planetary roller screw 6 is installed on the air floating bearing 4, the servo motor 2 drives the rotation thereof through the shaft coupling 5, the air floating bearing 4 forms a frictionless air film support through the gas inlet 27 and the pressure feedback valve 29, the encoder 3 monitors the rotating speed in real time and stabilizes the signal through the rotating speed fluctuation suppressor 32, the high-speed industrial camera 8 annular array in the optical detection module cooperates with the annular backlight 9 to shoot the motion trail of the roller 11, the laser interferometer 10 monitors the meshing gap, the three-dimensional scanning assembly 12 reconstructs the surface topography through the line laser emitter 13 and the area array camera 14, the contact stress detection module collects the contact pressure by embedding the film pressure sensor 15 into the nut raceway 18, and monitors the deformation by pasting the strain gauge array 17 on the screw shaft neck 19, the movement detection mechanism drives the sliding block 21 to move along the sliding groove 23 by the driving motor 36, and drives the annular support 7 to realize axial scanning through the connecting frame 22, the high-precision capacitive displacement sensing array obtains the roller position deviation through the measurement plate 24 and the micro-capacitance sensor 25, the temperature compensation element 26 eliminates environmental interference, and the data processing terminal 20 generates the roller distribution uniformity evaluation result by fusing multi-source data through the AI algorithm module.

[0024] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A detection device based on the uniformity of roller distribution of a planetary roller screw, comprising a base (1), a planetary roller screw (6) disposed on the top of the base, a plurality of rollers (11) meshing on the outer wall of the planetary roller screw (6), screw journals disposed at both ends of the planetary roller screw (6), and a nut raceway (18) disposed on the inner wall of the planetary roller screw (6), characterized in that: The base (1) top is sequentially provided with a rotary drive module, an optical detection module, a contact stress detection module, a high-precision capacitive displacement sensing array mechanism and a movement detection mechanism, the rotary drive module comprises a servo motor (2), an encoder (3) and an air floating bearing (4), the servo motor (2) is fixedly connected with a shaft coupling (5), the shaft coupling is in transmission connection with a planetary roller screw (6), the encoder (3) is coaxially arranged with the output end of the servo motor (2), the air floating bearing (4) is sleeved on the outer periphery of the planetary roller screw (6), the bottom of the air floating bearing (4) is fixedly connected with the base (1), the top outer wall of the base (1) is fixedly connected with a data processing terminal (20), and the data processing terminal (20) is fixedly connected with a wireless transmission module (16).

2. The detection device for uniformity of planetary roller screw rollers according to claim 1, characterized in that, The optical detection module comprises a ring-shaped support (7), a high-speed industrial camera (8), a ring-shaped backlight (9) and a laser interferometer (10), the ring-shaped support (7) is arranged on the top of the base (1) and surrounds the outer wall of the planetary roller screw (6), the high-speed industrial camera (8) and the inner wall of the ring-shaped support (7) are fixedly connected and are evenly distributed in the circumferential direction, the ring-shaped backlight (9) is arranged on the inner side of the high-speed industrial camera (8), the ring-shaped backlight (9) and the ring-shaped support (7) are fixedly connected, and the laser interferometer (10) and one end of the outer wall of the ring-shaped support (7) are fixedly connected, and the measurement light path of the laser interferometer (10) is aligned with the meshing gap of the roller (11).

3. The device for detecting the uniformity of the distribution of the rollers of a planetary roller screw according to claim 2, characterized in that, The outer wall of the ring-shaped support (7) is fixedly connected with a three-dimensional scanning assembly (12), the bottom of the three-dimensional scanning assembly (12) is sequentially fixedly connected with a line laser emitter (13) and a face array camera (14), the line laser emitter (13) scans along the axial direction of the planetary roller screw (6), and the face array camera (14) receives reflected light signals to reconstruct the surface topography of the roller (11).

4. The device for detecting the uniformity of distribution of planetary roller screws according to claim 1, wherein The contact stress detection module comprises a thin film pressure sensor (15), a wireless transmission module (16) and a strain sheet array (17), the thin film pressure sensor (15) is embedded in the inner wall of a nut raceway (18), the wireless transmission module (16) is electrically connected with the thin film pressure sensor (15), and the strain sheet array (17) is pasted on the surface of a screw shaft neck (19) and is electrically connected with the data processing terminal (20).

5. The device for detecting the uniformity of the distribution of the rollers of a planetary roller screw according to claim 3, characterized in that, The movement detection mechanism comprises a driving motor (36) and a sliding block (21), the top outer wall of the base (1) is provided with a sliding groove (23) at both ends, the sliding block (21) and the sliding groove (23) are in sliding connection, the driving motor (36) and one end of the outer wall of the base (1) are fixedly connected on one side, the driving motor (36) is fixedly connected with a threaded screw rod (35), the sliding block (21) and the threaded screw rod (35) are in threaded connection, the top of the sliding block (21) is fixedly connected with a connecting frame (22), and the connecting frame (22) and the ring-shaped support (7) are fixedly connected.

6. The device for detecting the uniformity of the distribution of the rollers of a planetary roller screw according to claim 4, characterized in that, The high-precision capacitive displacement sensing array mechanism comprises a measuring plate (24), a micro-capacitive sensor (25) and a temperature compensation element (26), the measuring plate (24) is fixedly connected with the annular support (7) and is uniformly distributed in a circle, the micro-capacitive sensor (25) is fixedly connected with the outer wall of the measuring plate (24), and the temperature compensation element (26) is arranged in parallel with the micro-capacitive sensor (25).

7. The detection device for uniformity of planetary roller screw rollers according to claim 1, characterized in that, The air floating bearing (4) comprises a gas supply port (27), an annular air film cavity (28) and a pressure feedback valve (29), the gas supply port (27) is communicated with the annular air film cavity (28), the gas supply port (27) is fixedly connected with a gas supply pipeline (10), the pressure feedback valve (29) and the gas supply pipeline (30) are fixedly connected with the outer walls and are used for real-time adjustment of air film pressure.

8. The detection device for uniformity of planetary roller screw rollers according to claim 1, characterized in that, The base top is fixedly connected with a damping base (31), the damping base (31) top is fixedly connected with an equipment rack (37), the servo motor (2) and the equipment rack (37) are fixedly connected, the equipment rack (37) outer wall is fixedly connected with a rotating speed fluctuation suppressor (32), and the rotating speed fluctuation suppressor (32) is connected in series with the encoder (3) signal output end.

9. The device for detecting the uniformity of distribution of planetary roller screws according to claim 1, wherein The high-speed industrial camera (8) is fixedly connected with a polarization filter (33) and an image preprocessing chip (34), the polarization filter (33) eliminates reflection interference, and the image preprocessing chip (34) executes a denoising and edge enhancement algorithm in real time.

10. The device for detecting uniformity of planetary roller screw rollers according to claim 1, wherein The data processing terminal (20) is internally provided with an AI algorithm module, and multi-source detection data are fused and analyzed through the AI algorithm module to generate a roller (11) distribution uniformity evaluation result.

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