Method and system for controlling film thickness uniformity of spray coating machine

Abstract

The invention discloses a method and system for controlling the film thickness uniformity of a spray coating machine, and belongs to the technical field of optical lens spray coating, the system comprises an initial track acquisition module, a growth rate acquisition module, a difference adjustment calculation module and a parameter adjustment correction module, and the system obtains a thermal characteristic distribution diagram of a substrate to be coated; obtaining an initial movement track speed operation scheme of the robot arm according to the thermal characteristic distribution diagram, collecting and recording film thickness growth rate data of each film thickness monitoring point, comparing the film thickness growth rate data of each film thickness monitoring point recorded in real time with a target growth rate of a substrate to be coated, and calculating to obtain difference data; according to the method, the thermal characteristics of the substrate and the real-time film thickness growth rate data are combined, dynamic adjustment of the spraying track speed is achieved, and the film thickness uniformity is effectively improved.

Description

Technical Field

[0001] This invention relates to the field of optical lens spray coating technology, and in particular to a method and system for controlling the uniformity of film thickness in a spray coating machine. Background Technology

[0002] Spray coating technology, as a key surface treatment process, occupies a central position in many high-tech fields, especially in the manufacturing of advanced optical components. The key challenge of this technology lies in how to form a highly uniform thin film on the surface of the substrate.

[0003] However, maintaining such stringent film thickness uniformity over a long period is extremely difficult in actual production environments. Specifically, during the spray coating process, there are various intrinsic factors that influence each other and evolve over time, resulting in a complex and cumulative non-uniformity in film thickness distribution.

[0004] First, the core component of the spraying equipment is the spray nozzle, which will wear out during long-term continuous operation. Second, the characteristics of the components to be coated also bring additional complexity to the control of film uniformity. Furthermore, the state of the coating material itself is not static; during long-term cyclic feeding, the physicochemical properties of the coating material will undergo slight shifts.

[0005] The aforementioned factors do not exist in isolation, but rather influence each other and work together to affect the final film uniformity.

[0006] More importantly, these factors leading to non-uniformity, such as the cumulative wear of the nozzle, the slow drift of material properties, and the continuous changes in the thermal state of components during the spraying process, all evolve over time. This means that even if the system is in an ideal state and achieves uniformity at the beginning of production, these continuously changing factors will cause the film uniformity to gradually deteriorate as production time progresses. Traditional spraying control methods based on fixed parameters or preset trajectories cannot perceive and adapt to this continuously changing internal state.

[0007] Therefore, solutions are urgently needed to address the aforementioned problems. Summary of the Invention

[0008] The purpose of this invention is to provide a method and system for controlling the film thickness uniformity of a spray coating machine. This system enables adaptive and precise control of the film thickness uniformity during the spray coating process, solving the problem of uneven film thickness caused by various dynamic factors such as nozzle wear, differences in substrate thermal properties, and changes in material properties, thereby improving the quality of optical lens coating.

[0009] To achieve the above objectives, the technical solutions of the present invention are as follows:

[0010] As one aspect of this application, a method for controlling the film thickness uniformity of a spray coating machine is provided, which is used for uniformly coating optical lenses, comprising the following steps:

[0011] S1. Collect and obtain the thermal characteristic distribution map of the substrate to be coated, and calculate and obtain the running scheme based on the initial motion trajectory speed of the robot arm set in the spray coating machine according to the thermal characteristic distribution map.

[0012] S2. Arrange multiple film thickness monitoring points on the outer periphery of the substrate to be coated, and collect and record the film thickness growth rate data of each film thickness monitoring point in real time.

[0013] S3. Continuously and in real time record the film thickness growth rate data at each film thickness monitoring point, and compare the recorded film thickness growth rate data at each film thickness monitoring point with the target growth rate of the substrate to be coated and calculate the difference data. Based on the analysis of the difference data, obtain the motion trajectory speed adjustment scheme.

[0014] S4. The initial motion trajectory speed operation plan is adjusted according to the motion trajectory speed adjustment plan to obtain the adjusted motion trajectory speed operation plan;

[0015] S5. Repeat the execution steps from S1 to S4.

[0016] Compared with existing technologies, the coating thickness uniformity control method of this application for a spray coating machine obtains a thermal characteristic distribution map of the substrate to be coated, and then obtains an initial motion trajectory speed operation plan for the robot arm based on the thermal characteristic distribution map. Multiple film thickness monitoring points are then arranged on the outer periphery of the substrate to be coated, and the film thickness growth rate data of each monitoring point is collected and recorded in real time. The difference data is calculated by comparing the recorded film thickness growth rate data of each monitoring point with the target growth rate of the substrate to be coated, and a motion trajectory speed adjustment plan is obtained based on this difference. This method, by combining the thermal characteristics of the substrate and real-time film thickness growth rate data, achieves dynamic adjustment of the spray trajectory speed, effectively improving film thickness uniformity.

[0017] Furthermore, the step of acquiring and obtaining the thermal characteristic distribution map of the substrate to be coated, and calculating and obtaining the running scheme based on the initial motion trajectory speed of the robot arm set in the spray coating machine according to the thermal characteristic distribution map, includes:

[0018] S11. Preset the spraying trajectory and spraying speed of the nozzle on the robot arm, control and drive the robot arm on the spray coating machine, and drive the nozzle on the robot arm to perform at least one spraying process on the element to be coated along the preset spraying trajectory. In this spraying process, the nozzle on the robot arm sprays out inert carrier gas at a set temperature.

[0019] S12. Multiple temperature monitoring points are arranged on the surface of the substrate to be coated. During the spraying process, the temperature rise rate of each area on the surface of the substrate to be coated is monitored and recorded frequently within a preset time window.

[0020] S13. Calculate the temperature distribution characteristic data of the substrate surface to be coated based on the temperature rise rate of each region on the substrate surface to be coated, and form a thermal characteristic distribution map of the substrate to be coated based on the temperature distribution characteristic data. The temperature distribution characteristic data includes hot spot regions that reflect slow heat dissipation and easy heating on the substrate surface to be coated, and cold spot regions that reflect fast heat dissipation and easy cooling on the substrate surface to be coated.

[0021] S14. Based on the thermal characteristic distribution diagram of the substrate to be coated, adjust the spraying trajectory and spraying speed of the nozzle on the preset robot arm, and obtain the initial motion trajectory speed operation scheme of the robot arm of the spray coating machine.

[0022] Furthermore, the step of calculating the temperature distribution characteristic data of the substrate surface based on the temperature rise rate of each region of the substrate surface to be coated, and forming a thermal characteristic distribution map of the substrate to be coated based on the temperature distribution characteristic data, includes:

[0023] S131. Calculate the first temperature distribution characteristic data of the substrate surface to be coated based on the temperature rise rate of each region on the substrate surface to be coated. The first temperature distribution characteristic data is used to reflect hot spots on the substrate surface to be coated that are slow to dissipate heat and easy to heat up, and cold spots on the substrate surface to be coated that are fast to dissipate heat and easy to cool down.

[0024] S132. A region comparison result is obtained by comparing the temperature rise rate of each region on the surface of the substrate to be coated in the current spraying process with the temperature rise rate of each region on the surface of the substrate to be coated in the previous spraying process. A second temperature distribution characteristic data is calculated based on the region comparison result. The second temperature distribution characteristic data is used to reflect the temperature change rate of hot spot areas on the surface of the substrate to be coated that have slow heat dissipation and are easy to heat up, and the temperature change rate of cold spot areas on the surface of the substrate to be coated that have fast heat dissipation and are easy to cool down.

[0025] S133. Based on the first temperature distribution characteristic data and the second temperature distribution characteristic data, a thermal characteristic distribution map of the substrate to be coated is formed.

[0026] Furthermore, after the step of adjusting the spraying trajectory and spraying speed of the nozzle on the pre-set robotic arm based on the thermal characteristic distribution map of the substrate to be coated, and obtaining the initial motion trajectory speed operation scheme of the robotic arm of the coating machine, the method further includes:

[0027] S15. Real-time determination of whether the currently deposited film and the next film are of the same material after each film layer is deposited and before the next film layer is deposited.

[0028] If not, return to step S11 to begin execution.

[0029] Furthermore, the steps of continuously and in real-time recording the film thickness growth rate data at each film thickness monitoring point, comparing the recorded film thickness growth rate data at each monitoring point with the target growth rate of the substrate to be coated, calculating the difference data, and obtaining a motion trajectory speed adjustment scheme based on the analysis of the difference data, specifically include:

[0030] S31. Continuously and in real time record the film thickness growth rate data at each film thickness monitoring point;

[0031] S32. To obtain the motion trajectory speed adjustment scheme, perform the following operations:

[0032] The target growth rate of the substrate to be coated is preset, and the coating parameters of the robotic arm of the coating machine are adjusted based on the film thickness growth rate data of each film thickness monitoring point and the deviation between the film thickness growth rate of each film thickness monitoring point and the target growth rate.

[0033] Based on the rate differences between the various film thickness monitoring points, the trajectory of the robotic arm of the spray coating machine is locally corrected.

[0034] Furthermore, the step of adjusting the spraying parameters of the robotic arm of the spray coating machine based on the target growth rate of the substrate to be coated, calculated from the film thickness growth rate data at each film thickness monitoring point and the deviation between the film thickness growth rate at each film thickness monitoring point and the target growth rate, includes:

[0035] A1. Preset the target growth rate and deviation from the baseline of the substrate to be coated;

[0036] A2. When the rate difference between the film thickness growth rates corresponding to each film thickness monitoring point meets the deviation from the benchmark, the average deviation comparison result is obtained by comparing the average growth rate of each film thickness monitoring point with the target growth rate based on the average growth rate of each film thickness monitoring point.

[0037] A3. Based on the average deviation comparison results, a global adjustment scheme is calculated and obtained. The global adjustment scheme indicates that the spraying parameters of the robot arm of the spray coating machine should be adjusted.

[0038] Furthermore, the step of locally correcting the trajectory of the nozzle on the robotic arm of the spray coating machine based on the rate difference between each of the film thickness monitoring points includes:

[0039] B1. Obtain the spatial location information of the multiple film thickness monitoring points within the spraying area;

[0040] B2. Based on the spatial location information and the film growth rate data at each film thickness monitoring point, identify the deposition distribution characteristics of the material to be coated on the substrate:

[0041] B3. Determine the correction parameters for the robotic arm of the spray coating machine based on the deposition distribution characteristics;

[0042] B4. Apply the correction parameters to the local path or local speed of the robot arm's spraying trajectory to achieve local correction of the spraying trajectory.

[0043] Furthermore, the step of identifying the deposition distribution characteristics of the material to be coated on the substrate based on the spatial location information and the film growth rate data at each of the film thickness monitoring points includes:

[0044] B21. Based on the spatial location information and the film growth rate data of each film thickness monitoring point, material deposition trend information is generated for the location area of ​​the film thickness monitoring point, wherein the material deposition trend information indicates the material deposition state of the surface area on the substrate to be coated and located outside the film thickness monitoring point.

[0045] B22. Based on the material deposition trend information, identify the deposition distribution characteristics of the sprayed material on the substrate to be coated, wherein the deposition distribution characteristics include local high-low pattern, gradient change pattern or asymmetric distribution pattern of the sprayed material deposition.

[0046] Further, based on the spatial location information and the film growth rate data at each of the film thickness monitoring points, material deposition trend information is generated for the location region of the film thickness monitoring points. The material deposition trend information, which indicates the material deposition state on the surface region of the substrate to be coated and located outside the film thickness monitoring points, includes the following steps:

[0047] B211. Based on the spatial location information and the film growth rate data of each film thickness monitoring point, a spatial estimation method is used to predict the film growth rate of the surface area on the substrate to be coated and located outside the film thickness monitoring point to obtain the prediction result.

[0048] B212. Based on the prediction results, generate material deposition trend information for the sprayed area, wherein the material deposition trend information indicates the material deposition state of the surface area on the substrate to be coated and located outside the film thickness monitoring point.

[0049] As a second aspect of this application, a film thickness uniformity control system for a spray coating machine is provided, the system comprising:

[0050] An initial trajectory acquisition module is used to collect and acquire the thermal characteristic distribution map of the substrate to be coated, and calculate and obtain the initial motion trajectory speed running scheme based on the thermal characteristic distribution map of the robot arm set in the spray coating machine.

[0051] The growth rate acquisition module is used to arrange multiple film thickness monitoring points on the outer periphery of the substrate to be coated, and to collect and record the film thickness growth rate data of each film thickness monitoring point in real time.

[0052] The difference adjustment calculation module is used to continuously and in real time record the film thickness growth rate data of each film thickness monitoring point, and calculate the difference data by comparing the recorded film thickness growth rate data of each film thickness monitoring point with the target growth rate of the substrate to be coated, and obtain the motion trajectory speed adjustment scheme by analyzing the difference data.

[0053] The parameter adjustment and correction module is used to adjust the initial motion trajectory speed operation scheme according to the motion trajectory speed adjustment scheme to obtain the adjusted motion trajectory speed operation scheme.

[0054] This application discloses a coating thickness uniformity control system for a spray coating machine. The system includes an initial trajectory acquisition module, a growth rate acquisition module, a difference adjustment calculation module, and a parameter adjustment and correction module. In this system, a thermal characteristic distribution map of the substrate to be coated is obtained. Based on this map, an initial motion trajectory speed operation plan for the robotic arm is derived. Multiple film thickness monitoring points are arranged along the outer periphery of the substrate to be coated. Film thickness growth rate data at each monitoring point is collected and recorded in real time. By comparing the recorded film thickness growth rate data with the target growth rate of the substrate, difference data is calculated, and a motion trajectory speed adjustment plan is derived. This adjusted motion trajectory speed operation plan is then obtained. This method, by combining the substrate's thermal characteristics with real-time film thickness growth rate data, achieves dynamic adjustment of the spray trajectory speed, effectively improving film thickness uniformity.

[0055] To better understand and implement this invention, the following detailed description is provided in conjunction with the accompanying drawings. Attached Figure Description

[0056] Figure 1 This is a flowchart illustrating a method for controlling the uniformity of film thickness in a spray coating machine according to this embodiment.

[0057] Figure 2 This is a flowchart illustrating step S1 in a method for controlling the uniformity of film thickness in a spray coating machine according to this embodiment.

[0058] Figure 3 This is a flowchart illustrating step S15 in a method for controlling the film thickness uniformity of a spray coating machine in this embodiment.

[0059] Figure 4 This is a flowchart illustrating step S3 in a method for controlling the uniformity of film thickness in a spray coating machine according to this embodiment.

[0060] Figure 5 This is a system structure block diagram of a coating thickness uniformity control system for a spray coating machine in this embodiment.

[0061] Figure reference numerals: 100, Film thickness uniformity control system for spray coating machine; 101, Initial trajectory acquisition module; 102, Growth rate acquisition module; 103, Difference adjustment calculation module; 104, Parameter adjustment and correction module. Detailed Implementation

[0062] To better illustrate the present invention, the invention will now be described in further detail with reference to the accompanying drawings.

[0063] It should be understood that, in order to make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. The components of the embodiments of this disclosure described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this disclosure provided in the accompanying drawings is not intended to limit the scope of the claimed disclosure, but merely represents selected embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without inventive effort are within the scope of protection of this disclosure.

[0064] The following is a specific embodiment for illustration. In this embodiment:

[0065] Firstly, such as Figure 1 As shown, a method for controlling the film thickness uniformity of a spray coating machine is provided, which is used for uniformly coating optical lenses, and includes the following steps:

[0066] S1. Collect and obtain the thermal characteristic distribution map of the substrate to be coated, and calculate and obtain the running scheme based on the initial motion trajectory speed of the robot arm set in the spray coating machine according to the thermal characteristic distribution map.

[0067] S2. Arrange multiple film thickness monitoring points on the outer periphery of the substrate to be coated, and collect and record the film thickness growth rate data of each film thickness monitoring point in real time.

[0068] S3. Continuously and in real time record the film thickness growth rate data at each film thickness monitoring point, and compare the recorded film thickness growth rate data at each film thickness monitoring point with the target growth rate of the substrate to be coated and calculate the difference data. Based on the analysis of the difference data, obtain the motion trajectory speed adjustment scheme.

[0069] S4. The initial motion trajectory speed operation plan is adjusted according to the motion trajectory speed adjustment plan to obtain the adjusted motion trajectory speed operation plan;

[0070] S5. Repeat the execution steps from S1 to S4.

[0071] The thermal characteristic distribution map of the substrate to be coated can be measured using equipment such as infrared thermal imagers, thermocouple arrays, or non-contact temperature sensor arrays. This is mainly to reflect the differences in the response of different areas of the substrate to heat, thereby providing a basis for subsequent adjustment of coating parameters.

[0072] Film thickness monitoring points refer to sensor locations set at specific positions on the outer periphery of the substrate to be coated, used to monitor the film thickness growth in real time. For example, multiple sensors can be evenly distributed along the edge of the substrate. The main purpose is to obtain film growth information in different areas for real-time feedback control.

[0073] By combining the acquisition of thermal characteristic distribution maps of the substrate to be coated with real-time acquisition and recording of film thickness growth rate data at each film thickness monitoring point in a dynamic feedback manner, and by repeatedly obtaining differential data by performing an initial motion trajectory speed operation plan for each coating layer, a personalized adjusted motion trajectory speed operation plan is available for each coating layer. This solves the problem of uneven film thickness caused by various factors such as nozzle wear, differences in substrate thermal characteristics, and changes in the state of the coating material itself, and achieves the effect of maintaining uniform film thickness throughout the entire production cycle.

[0074] During the actual coating process, the system arranges multiple film thickness monitoring points on the outer periphery of the substrate to be coated. These monitoring points collect and record the film thickness growth rate data at each monitoring point in real time. This real-time data serves as feedback information, reflecting the actual deposition rate of the film layer at different locations under the current coating state. The system continuously and in real-time records this film thickness growth rate data and compares it with the preset target growth rate of the substrate to be coated, calculating the difference data. This difference data quantifies the deviation between the actual growth rate and the target rate, revealing the specific patterns and extent of film thickness non-uniformity. Based on the analysis of these difference data, the system can obtain a motion trajectory speed adjustment scheme. This adjustment scheme is dynamically generated and is used to guide the robotic arm on how to correct its current motion trajectory or speed to correct film thickness deviations.

[0075] This solution considers the characteristics of multi-layer coating. During each coating process, a thermal characteristic distribution map of the substrate to be coated is acquired, and an initial motion trajectory and velocity plan is calculated based on this map. This layered adjustment strategy allows for adaptation to potential interactions between different film layers, such as the impact of changes in the thermal capacity of the previous layer on the deposition of the next layer, thus ensuring uniformity of each film layer and the final composite film throughout the multi-layer coating process. Through this strategy combining pre-compensation and real-time feedback, and layered optimization for multi-layer coating, this solution can cope with various dynamic factors during the spraying process and achieve control over film thickness uniformity.

[0076] Through the above technical solution, this application can solve the problem of difficulty in controlling film thickness uniformity during spray coating. By acquiring the thermal characteristic distribution map of the substrate before coating and generating an initial motion trajectory speed operation plan based on it, pre-compensation for the inherent thermal characteristic differences of the substrate is achieved, thus laying the foundation for uniform deposition in the early stage of coating. Simultaneously, by acquiring and analyzing multi-point film thickness growth rate data in real time during the coating process, the actual situation of film deposition can be dynamically perceived, and the difference data can be calculated in a timely manner, thereby generating a motion trajectory speed adjustment plan, realizing real-time feedback and adaptive correction of the spraying process. Furthermore, considering the characteristics of multi-layer coating, an adjustment strategy of repeatedly acquiring the initial motion trajectory speed operation plan is adopted, enabling the system to better adapt to the mutual influence between different film layers, ensuring the overall uniformity of the multi-layer film system. This solution overcomes the adverse effects of nozzle wear, substrate thermal characteristic differences, and changes in coating material properties on film thickness uniformity in traditional methods, achieving improvements in coating quality and production stability.

[0077] In this embodiment, as Figure 2 As shown, the step of acquiring and obtaining the thermal characteristic distribution map of the substrate to be coated, and calculating and obtaining the running scheme based on the initial motion trajectory and speed of the robot arm set in the spray coating machine according to the thermal characteristic distribution map, includes:

[0078] S11. Preset the spraying trajectory and spraying speed of the nozzle on the robot arm, control and drive the robot arm on the spray coating machine, and drive the nozzle on the robot arm to perform at least one spraying process on the element to be coated along the preset spraying trajectory. In this spraying process, the nozzle on the robot arm sprays out inert carrier gas at a set temperature.

[0079] S12. Multiple temperature monitoring points are arranged on the surface of the substrate to be coated. During the spraying process, the temperature rise rate of each area on the surface of the substrate to be coated is monitored and recorded frequently within a preset time window.

[0080] S13. Calculate the temperature distribution characteristic data of the substrate surface to be coated based on the temperature rise rate of each region on the substrate surface to be coated, and form a thermal characteristic distribution map of the substrate to be coated based on the temperature distribution characteristic data. The temperature distribution characteristic data includes hot spot regions that reflect slow heat dissipation and easy heating on the substrate surface to be coated, and cold spot regions that reflect fast heat dissipation and easy cooling on the substrate surface to be coated.

[0081] S14. Based on the thermal characteristic distribution diagram of the substrate to be coated, adjust the spraying trajectory and spraying speed of the nozzle on the preset robot arm, and obtain the initial motion trajectory speed operation scheme of the robot arm of the spray coating machine.

[0082] Among them, temperature distribution characteristic data refers to quantitative information describing the heat absorption, conduction and dissipation characteristics of the substrate surface under the action of inert carrier gas spraying. It can be obtained by mathematical modeling, statistical analysis or data fusion processing of the temperature rise rate. Its purpose is to quantify the thermal response differences of different regions of the substrate surface.

[0083] Hot spots refer to areas on the substrate surface where the temperature rises rapidly and the heat dissipation efficiency is low when heat is input; cold spots refer to areas on the substrate surface where the temperature rises slowly and the heat dissipation efficiency is high when heat is input.

[0084] The solution proposed in this application achieves rapid and accurate acquisition of the thermal characteristic distribution map of the substrate through an innovative approach, and generates an initial motion trajectory and speed operation plan based on this map.

[0085] In some preferred examples, firstly, on the spray coating machine, the spray trajectory of the nozzle on the robotic arm can be preset as a spiral scanning path, and the spraying speed can be set to 100 millimeters per second. Then, the robotic arm on the spray coating machine is controlled to drive the nozzle to perform a single spray coating process on the component to be coated along the preset spiral scanning trajectory. During this spray coating process, the nozzle can spray an inert carrier gas, such as high-purity nitrogen, with a temperature set to ambient temperature plus 50 degrees Celsius, to ensure that no chemical or physical deposition occurs on the substrate surface.

[0086] Next, multiple temperature monitoring points can be evenly arranged on the surface of the substrate to be coated, for example, using an array of infrared temperature sensors. During the spraying process, as the nozzle passes through each temperature monitoring point, the temperature rise rate of that area can be monitored and recorded at a high frequency of 100 times per second within a preset 5-second time window. This raw temperature data is transmitted to the data processing unit in real time.

[0087] Then, based on the temperature rise rate of each region on the substrate surface to be coated, the temperature distribution characteristics of the substrate surface can be calculated by applying a heat conduction model and statistical analysis methods. For example, the temperature rise slope of each region can be calculated and compared with the average slope to identify regions with a temperature rise slope significantly higher than the average as hot spots, and regions with a temperature rise slope significantly lower than the average as cold spots. This data can then be visualized as a thermal characteristic distribution map of the substrate to be coated.

[0088] Finally, based on the resulting thermal characteristic distribution map, the system can adjust the spraying trajectory and speed of the nozzles on the robotic arm according to the preset parameters. In this way, the initial motion trajectory and speed operation scheme of the robotic arm of the coating machine can be obtained, thereby pre-compensating for the thermal characteristic non-uniformity of the substrate before actual coating.

[0089] In this embodiment, the step of calculating the temperature distribution characteristic data of the substrate surface based on the temperature rise rate of each region of the substrate surface to be coated, and forming a thermal characteristic distribution map of the substrate to be coated based on the temperature distribution characteristic data, includes:

[0090] S131. Calculate the first temperature distribution characteristic data of the substrate surface to be coated based on the temperature rise rate of each region on the substrate surface to be coated. The first temperature distribution characteristic data is used to reflect hot spots on the substrate surface to be coated that are slow to dissipate heat and easy to heat up, and cold spots on the substrate surface to be coated that are fast to dissipate heat and easy to cool down.

[0091] S132. A region comparison result is obtained by comparing the temperature rise rate of each region on the surface of the substrate to be coated in the current spraying process with the temperature rise rate of each region on the surface of the substrate to be coated in the previous spraying process. A second temperature distribution characteristic data is calculated based on the region comparison result. The second temperature distribution characteristic data is used to reflect the temperature change rate of hot spot areas on the surface of the substrate to be coated that have slow heat dissipation and are easy to heat up, and the temperature change rate of cold spot areas on the surface of the substrate to be coated that have fast heat dissipation and are easy to cool down.

[0092] S133. Based on the first temperature distribution characteristic data and the second temperature distribution characteristic data, a thermal characteristic distribution map of the substrate to be coated is formed.

[0093] The first temperature distribution characteristic data refers to a dataset reflecting the thermal response characteristics of the substrate, which is quantified by analyzing the temperature rise rate of each region on the substrate surface under inert carrier gas spraying treatment. The second temperature distribution characteristic data refers to a dataset reflecting the temperature change rate of hot and cold areas on the substrate surface, which is calculated based on the regional comparison results. Specifically, it can be obtained by further statistical analysis or trend modeling of the regional comparison results.

[0094] This application improves the accuracy of thermal characteristic distribution maps by incorporating consideration of the dynamic changes in the thermal properties of the substrate surface. Specifically, firstly, based on the temperature rise rate of each region on the substrate surface to be coated, first temperature distribution characteristic data is calculated. This first temperature distribution characteristic data directly reflects the thermal response of the substrate surface under the current coating process, clearly distinguishing between hot spots that dissipate heat slowly and heat up easily, and cold spots that dissipate heat quickly and cool down easily. This provides a direct basis for understanding the fundamental thermal behavior of the substrate surface. Based on this, to capture the dynamic evolution of the substrate's thermal properties, the temperature rise rate of the current coating process is compared with that of the previous coating process, thus obtaining regional comparison results. This comparison process reveals the stability or trend of the thermal response of each region on the substrate surface. For example, if the temperature rise rate of a certain region increases in the current process compared to the previous process, it indicates that the heat accumulation effect in that region may be increasing; conversely, if the temperature rise rate decreases, it may mean that heat dissipation in that region is accelerating. Based on this regional comparison result, a second temperature distribution characteristic data is further calculated. This data quantifies the temperature change rate of hot and cold areas, thus providing a deep insight into the dynamic thermal behavior of the substrate. Finally, by comprehensively utilizing the first and second temperature distribution characteristic data, a thermal characteristic distribution map of the substrate to be coated is formed.

[0095] By comparing the temperature rise rate of the current coating process with that of the previous coating process, and calculating the second temperature distribution characteristic data based on this, the temperature change rate of hot and cold areas is obtained. This consideration of temperature change rate compensates for the insufficiency of using only a single temperature rise rate data, which may not fully reflect the thermal characteristics of the substrate, and avoids the problem of inaccurate thermal characteristic distribution maps due to ignoring the influence of multiple factors on the thermal characteristic distribution.

[0096] In this embodiment, as Figure 3 As shown, after the step of adjusting the spraying trajectory and spraying speed of the nozzle on the pre-set robot arm according to the thermal characteristic distribution map of the substrate to be coated, and obtaining the initial motion trajectory speed operation scheme of the robot arm of the coating machine, the method further includes:

[0097] S15. Real-time determination of whether the currently deposited film and the next film are of the same material after each film layer is deposited and before the next film layer is deposited.

[0098] If not, return to step S11 to begin execution.

[0099] A real-time judgment step S15 is added after each film layer is deposited and before the next layer is deposited to identify whether the currently deposited film and the next film are of the same material. If the judgment result is that they are not of the same material, the system will return to step S11 and start executing again. The thermal characteristic distribution map of the substrate to be coated will be collected and obtained again, and the initial motion trajectory and speed operation plan of the robotic arm of the spray coating machine will be recalculated based on the new thermal characteristic distribution map. This is because differences in film material can cause changes in the thermal characteristic distribution of the substrate. Different film materials have different heat absorption, conduction, and dissipation characteristics. When the substrate surface is covered with film layers of different materials, its overall thermal response characteristics will change accordingly. If the motion trajectory and speed operation plan obtained based on the old thermal characteristic distribution map is continued, the uniformity of the thickness of subsequent film layers may be affected. By forcing the system to re-evaluate thermal properties and recalculate the initial motion trajectory speed when the material changes, it can be ensured that each film deposition is based on the most accurate thermal properties of the current substrate. This effectively adapts to the dynamic changes in the thermal properties of the substrate during multilayer coating, ensuring the uniformity of each film layer and the overall coating.

[0100] In this embodiment, as Figure 4 As shown, the steps of continuously and in real-time recording the film thickness growth rate data at each film thickness monitoring point, comparing the recorded film thickness growth rate data at each monitoring point with the target growth rate of the substrate to be coated, calculating the difference data, and obtaining a motion trajectory speed adjustment scheme based on the analysis of the difference data specifically include:

[0101] S31. Continuously and in real time record the film thickness growth rate data at each film thickness monitoring point;

[0102] S32. To obtain the motion trajectory speed adjustment scheme, perform the following operations:

[0103] The target growth rate of the substrate to be coated is preset, and the coating parameters of the robotic arm of the coating machine are adjusted based on the film thickness growth rate data of each film thickness monitoring point and the deviation between the film thickness growth rate of each film thickness monitoring point and the target growth rate.

[0104] Based on the rate differences between the various film thickness monitoring points, the trajectory of the robotic arm of the spray coating machine is locally corrected.

[0105] By continuously and in real-time recording the film growth rate data at each film thickness monitoring point, dynamic and precise input is provided for subsequent film thickness uniformity control. Only with this real-time growth rate information can effective deviation analysis and adjustments be made.

[0106] First, by presetting the target growth rate of the substrate to be coated, and based on the deviation between the film thickness growth rate data at each film thickness monitoring point and the target growth rate, the spraying parameters of the robotic arm of the spray coating machine are adjusted. This adjustment is aimed at the overall spraying effect. For example, if the average growth rate of all monitoring points is generally lower than the target rate, the spraying flow rate can be increased or the spraying speed can be decreased to improve the overall film thickness; conversely, it can be decreased. This global parameter adjustment can effectively compensate for the overall film thickness deviation caused by factors such as nozzle wear and changes in material properties, ensuring the macroscopic uniformity of the coating process. Second, based on the rate differences between each film thickness monitoring point, the running trajectory of the robotic arm of the spray coating machine is locally corrected. In addition to adjusting the overall parameters, it can also identify the film thickness growth non-uniformity in different areas of the substrate surface and make targeted fine adjustments to the running trajectory of the robotic arm. For example, if the film thickness growth rate in a certain area is significantly higher than that in adjacent areas, the robotic arm can appropriately increase its speed or adjust the spraying angle when passing through that area to reduce the amount of material deposited; conversely, it can slow down its speed or adjust its angle. This local correction can effectively compensate for local film thickness deviations caused by factors such as differences in substrate thermal properties and nozzle flow deviation, thereby achieving film thickness uniformity at the microscopic level.

[0107] By combining global parameter adjustments with local trajectory corrections, precise control of film thickness uniformity can be achieved. This layered and collaborative adjustment mechanism can not only address overall film thickness deviations but also finely correct localized non-uniformities. Building upon the steps in previous schemes that calculated the initial motion trajectory speed based on the substrate's thermal characteristic distribution map, this scheme preliminarily optimizes the inherent thermal characteristic non-uniformity of the substrate before coating begins. Furthermore, this scheme, through real-time monitoring and feedback, dynamically adapts to various instantaneous and cumulative deviations occurring during the coating process, thus forming a more complete and adaptive film thickness uniformity control system. This ensures extremely high film thickness uniformity throughout the entire production cycle, effectively solving the complex and continuously evolving film thickness non-uniformity problem that traditional methods struggle to address.

[0108] By continuously monitoring the film thickness growth rate in real time and combining a dual strategy of global spraying parameter adjustment and local trajectory correction, overall film thickness deviations caused by factors such as nozzle wear and changes in material properties can be compensated for. Simultaneously, local film thickness inhomogeneities caused by factors such as differences in substrate thermal characteristics and nozzle flow deviation can be precisely corrected. This allows the coating process to dynamically adapt to various complex and continuously evolving process conditions, thereby significantly improving coating quality and ensuring a high degree of consistency in film thickness on the optical lens surface.

[0109] In this embodiment, the step of adjusting the spraying parameters of the robotic arm of the spray coating machine based on the target growth rate of the substrate to be coated, calculated according to the film thickness growth rate data at each film thickness monitoring point and the deviation between the film thickness growth rate at each film thickness monitoring point and the target growth rate, includes:

[0110] A1. Preset the target growth rate and deviation from the baseline of the substrate to be coated;

[0111] A2. When the rate difference between the film thickness growth rates corresponding to each film thickness monitoring point meets the deviation from the benchmark, the average deviation comparison result is obtained by comparing the average growth rate of each film thickness monitoring point with the target growth rate based on the average growth rate of each film thickness monitoring point.

[0112] A3. Based on the average deviation comparison results, a global adjustment scheme is calculated and obtained. The global adjustment scheme indicates that the spraying parameters of the robot arm of the spray coating machine should be adjusted.

[0113] Here, deviation from the baseline refers to a pre-set threshold or range used to measure the acceptable degree of difference in film thickness growth rate between various film thickness monitoring points. The average deviation comparison result refers to the quantitative result obtained by comparing the average film thickness growth rate of all film thickness monitoring points with the preset target growth rate.

[0114] By introducing a mechanism for judging the difference in film thickness growth rate, the adjustment strategy for the spraying parameters of the robotic arm of the spray coating machine was optimized.

[0115] First, an initial motion trajectory and speed plan is obtained based on the thermal characteristic distribution map of the substrate, and film thickness growth rate data at each film thickness monitoring point is collected in real time during the coating process. Based on this, the scheme further refines the adjustment process of the spraying parameters. Specifically, after presetting the target growth rate of the substrate to be coated and a deviation benchmark, the system continuously monitors the rate difference between the film thickness growth rates corresponding to each current film thickness monitoring point. Only when this rate difference is within the preset deviation benchmark is the current film thickness non-uniformity considered to be effectively improved through global spraying parameter adjustment. At this point, the average growth rate of all film thickness monitoring points is calculated and compared with the target growth rate to obtain the average deviation comparison result. Based on this average deviation comparison result, the system calculates and generates a global adjustment scheme, which instructs a comprehensive adjustment of the spraying parameters of the robotic arm of the coating machine.

[0116] In one specific embodiment, firstly, the target growth rate of the substrate to be coated can be preset to 10 nanometers per second (nm / s), while a deviation benchmark is set, for example, specifying that the maximum difference in film thickness growth rate between various film thickness monitoring points should not exceed 0.5 nm / s. During the coating process, the system continuously collects film thickness growth rate data in real time from multiple film thickness monitoring points on the substrate (e.g., four points distributed in the center, edge, and middle regions of the substrate). Assume that at a certain moment, the film thickness growth rates measured at these monitoring points are 9.8 nm / s, 10.1 nm / s, 9.9 nm / s, and 10.2 nm / s, respectively. At this time, the system calculates the rate difference between these monitoring points; for example, the maximum rate difference is 0.4 nm / s. Since 0.4 nm / s is less than the preset deviation benchmark of 0.5 nm / s, this indicates that the current film thickness non-uniformity is still within an acceptable range and can be optimized through global adjustments. Therefore, the system further calculates the average growth rate of these monitoring points, which is (9.8 + 10.1 + 9.9 + 10.2) / 4 = 10.0 nm / s. This average growth rate of 10.0 nm / s is then compared with the preset target growth rate of 10.0 nm / s to obtain the average deviation comparison result, which is 0 in this example. Based on this comparison result, the system can calculate and generate a global adjustment plan. If the comparison result shows that the average growth rate is slightly lower than the target value, the global adjustment plan can instruct an appropriate increase in the spraying flow rate or spraying pressure of the robotic arm of the coating machine; conversely, if the average growth rate is slightly higher than the target value, it can instruct an appropriate decrease in the spraying flow rate or spraying pressure.

[0117] This approach ensures the applicability and effectiveness of global adjustments, avoiding inappropriate overall adjustments when local differences are too large.

[0118] In this embodiment, the step of locally correcting the trajectory of the nozzle on the robotic arm of the spray coating machine based on the rate difference between each of the film thickness monitoring points includes:

[0119] B1. Obtain the spatial location information of the multiple film thickness monitoring points within the spraying area;

[0120] B2. Based on the spatial location information and the film growth rate data at each film thickness monitoring point, identify the deposition distribution characteristics of the material to be coated on the substrate:

[0121] B3. Determine the correction parameters for the robotic arm of the spray coating machine based on the deposition distribution characteristics;

[0122] B4. Apply the correction parameters to the local path or local speed of the robot arm's spraying trajectory to achieve local correction of the spraying trajectory.

[0123] Among them, deposition distribution characteristics refer to the spatial distribution pattern of the thickness or growth rate of the sprayed material in different regions when the film layer is formed on the surface of the substrate to be coated. Its purpose is to reveal the pattern and degree of film layer non-uniformity.

[0124] By acquiring the spatial location information of multiple film thickness monitoring points within the spraying area, a spatial reference is provided for subsequent film deposition analysis. Based on this, and using this spatial location information and film growth rate data from each film thickness monitoring point, the deposition distribution characteristics of the material being sprayed on the substrate are identified. Next, based on the identified deposition distribution characteristics, correction parameters for the robotic arm of the spray coating machine are determined. These correction parameters are instructions generated to address local non-uniformities, such as adjusting the movement path or speed of the nozzle in specific areas. Finally, these correction parameters are applied to the local path or speed of the robotic arm's spraying trajectory, achieving local correction of the spraying trajectory.

[0125] In some preferred embodiments, firstly, the spatial location information of multiple film thickness monitoring points within the spraying area is acquired, for example, by recording the X, Y, and Z coordinates of the film thickness monitoring points in the substrate coordinate system. This coordinate information is input into the control system before coating begins. Next, based on this spatial location information and the film growth rate data from each film thickness monitoring point, the deposition distribution characteristics of the material to be coated on the substrate are identified. For example, during the spraying process, the control system receives film growth rate data from each film thickness monitoring point in real time. If it is found that the film thickness growth rate in a certain area is consistently higher or lower than that of its adjacent areas, or that there is a local deviation from the target growth rate, the system can use these discrete film thickness growth rate data points, combined with their spatial location information, to construct a film thickness growth rate distribution map of the entire spraying area using a two-dimensional interpolation algorithm (e.g., bilinear interpolation) or surface fitting techniques (e.g., polynomial fitting). From this distribution map, local high points (overly thick areas), low points (overly thin areas), and gradient change patterns from high to low or from low to high in material deposition can be identified. Then, correction parameters for the robotic arm of the spray coating machine are determined based on the identified deposition distribution characteristics. Finally, these correction parameters are applied to the local path or local speed of the robotic arm's spray trajectory to achieve local correction of the spray trajectory.

[0126] Through the above technical solution, this application can locally correct the running trajectory of the nozzle on the robot arm of the spray coating machine according to the rate difference between film thickness monitoring points, thus solving the problem that the uneven film thickness in the spraying area cannot be effectively solved by simply adjusting the spraying parameters.

[0127] In this embodiment, the step of identifying the deposition distribution characteristics of the material to be coated on the substrate based on the spatial location information and the film growth rate data at each film thickness monitoring point includes:

[0128] B21. Based on the spatial location information and the film growth rate data of each film thickness monitoring point, material deposition trend information is generated for the location area of ​​the film thickness monitoring point, wherein the material deposition trend information indicates the material deposition state of the surface area on the substrate to be coated and located outside the film thickness monitoring point.

[0129] B22. Based on the material deposition trend information, identify the deposition distribution characteristics of the sprayed material on the substrate to be coated, wherein the deposition distribution characteristics include local high-low pattern, gradient change pattern or asymmetric distribution pattern of the sprayed material deposition.

[0130] Among them, material deposition trend information refers to the data used to describe the tendency of material deposition rate or thickness change on the substrate to be coated, especially in the area around the film thickness monitoring point. Its purpose is to make up for the blind spots that may be caused by relying solely on discrete monitoring point data, so as to gain a more comprehensive understanding of the material deposition state on the substrate surface.

[0131] The solution proposed in this application achieves a more accurate understanding of the material deposition distribution characteristics on the substrate surface by introducing the generation and identification of material deposition trend information.

[0132] In some preferred examples, when generating material deposition trend information for the regions located at each film thickness monitoring point based on spatial location information and film growth rate data, spatial estimation methods can be used. These methods can infer the film growth rate in unmonitored areas based on known monitoring point data and their spatial relationships, thus forming a continuous trend map reflecting the speed and direction of material deposition. When identifying the deposition distribution characteristics of the sprayed material on the substrate to be coated based on the generated material deposition trend information, image processing techniques or pattern recognition algorithms can be used. For example, the material deposition trend information can be visualized as a heat map, and then by analyzing the brightness, color gradient, and shape of the heat map, local high / low patterns, gradient change patterns, or asymmetric distribution patterns can be identified.

[0133] Based on the spatial location information and film growth rate data at each film thickness monitoring point, material deposition trend information is first generated for the region located at the monitoring point. This trend information reflects the material deposition state in areas outside the monitoring point, thus compensating for blind spots that may arise from relying solely on discrete monitoring point data. Building upon this, the deposition trend information is used to identify local high / low patterns, gradient variation patterns, or asymmetric distribution patterns of the sprayed material deposition. This step-by-step and refined identification process provides a more comprehensive and accurate understanding of the material deposition on the substrate surface, avoiding inaccurate correction parameters due to insufficient information. This improves the accuracy of local correction of the spraying trajectory by the robotic arm of the spray coating machine, ultimately contributing to the achievement of highly uniform film thickness.

[0134] In this embodiment, the step of generating material deposition trend information for the location region of the film thickness monitoring point based on the spatial location information and the film growth rate data of each film thickness monitoring point, wherein the material deposition trend information is used to reflect the material deposition state of the surface region on the substrate to be coated and located outside the film thickness monitoring point, includes:

[0135] B211. Based on the spatial location information and the film growth rate data of each film thickness monitoring point, a spatial estimation method is used to predict the film growth rate of the surface area on the substrate to be coated and located outside the film thickness monitoring point to obtain the prediction result.

[0136] B212. Based on the prediction results, generate material deposition trend information for the sprayed area, wherein the material deposition trend information indicates the material deposition state of the surface area on the substrate to be coated and located outside the film thickness monitoring point.

[0137] Among them, spatial estimation method refers to a statistical or mathematical method that predicts the value of unknown spatial points based on known spatial point data. Its purpose is to infer the film growth rate of areas not directly measured more accurately by considering spatial correlation.

[0138] The proposed solution first uses spatial estimation methods based on spatial location information and film growth rate data at each film thickness monitoring point to predict the film growth rate in the surface area on the substrate to be coated but outside the film thickness monitoring points, thereby overcoming the limitation that it is difficult to accurately infer the deposition situation in unmonitored areas by relying solely on limited monitoring point data.

[0139] The above approach overcomes the problem that relying solely on limited film thickness monitoring data makes it difficult to accurately predict the material deposition state in unmonitored areas of the substrate. By introducing spatial estimation methods to predict the film growth rate in unmonitored areas, more comprehensive and accurate film growth rate distribution data can be obtained. The material deposition trend information generated based on this predicted data can more accurately reflect the material deposition state across the entire substrate surface, including local variations, gradient changes, and asymmetric distributions. This provides a reliable basis for subsequent identification of deposition distribution characteristics and adjustment of spraying process parameters.

[0140] Secondly, such as Figure 5 As shown, a film thickness uniformity control system 100 for a spray coating machine is provided. The system includes:

[0141] The initial trajectory acquisition module 101 is used to collect and acquire the thermal characteristic distribution map of the substrate to be coated, and calculate and obtain the initial motion trajectory speed running scheme based on the thermal characteristic distribution map of the robot arm set in the spray coating machine.

[0142] The growth rate acquisition module 102 is used to arrange multiple film thickness monitoring points on the outer periphery of the substrate to be coated, and to collect and record the film thickness growth rate data of each film thickness monitoring point in real time.

[0143] The difference adjustment calculation module 103 is used to continuously and in real time record the film thickness growth rate data of each film thickness monitoring point, and calculate the difference data by comparing the recorded film thickness growth rate data of each film thickness monitoring point with the target growth rate of the substrate to be coated, and obtain the motion trajectory speed adjustment scheme by analyzing the difference data.

[0144] The parameter adjustment and correction module 104 is used to adjust the initial motion trajectory speed operation scheme according to the motion trajectory speed adjustment scheme to obtain the adjusted motion trajectory speed operation scheme.

[0145] This application discloses a film thickness uniformity control system for a spray coating machine. The system includes an initial trajectory acquisition module, a growth rate acquisition module, a difference adjustment calculation module, and a parameter adjustment and correction module. In this system, a thermal characteristic distribution map of the substrate to be coated is obtained. Based on this map, an initial motion trajectory speed operation plan for the robotic arm is derived. Multiple film thickness monitoring points are arranged along the outer periphery of the substrate to be coated. Film thickness growth rate data at each monitoring point is collected and recorded in real time. The difference data is calculated by comparing the recorded film thickness growth rate data with the target growth rate of the substrate to be coated, and a motion trajectory speed adjustment plan is derived accordingly. This adjusted motion trajectory speed operation plan is obtained by combining the substrate's thermal characteristics with real-time film thickness growth rate data. This method achieves dynamic adjustment of the spray trajectory speed, effectively improving film thickness uniformity.

[0146] Finally, it should be noted that the above-described embodiments are merely specific implementations of this disclosure, used to illustrate the technical solutions of this disclosure, and not to limit them. The protection scope of this disclosure is not limited thereto. Although this disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features within the scope of the technology disclosed in this disclosure. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this disclosure, and should all be covered within the protection scope of this disclosure.

Claims

1. A method for controlling the uniformity of film thickness in a spray coating machine, used for uniformly coating optical lenses, characterized in that, Includes the following steps: S1. Collect and obtain the thermal characteristic distribution map of the substrate to be coated, and calculate and obtain the running scheme based on the initial motion trajectory speed of the robot arm set in the spray coating machine according to the thermal characteristic distribution map. S2. Arrange multiple film thickness monitoring points on the outer periphery of the substrate to be coated, and collect and record the film thickness growth rate data of each film thickness monitoring point in real time. S3. Continuously and in real time record the film thickness growth rate data at each film thickness monitoring point, and compare the recorded film thickness growth rate data at each film thickness monitoring point with the target growth rate of the substrate to be coated and calculate the difference data. Based on the analysis of the difference data, obtain the motion trajectory speed adjustment scheme. S4. The initial motion trajectory speed operation plan is adjusted according to the motion trajectory speed adjustment plan to obtain the adjusted motion trajectory speed operation plan; S5. Repeat the execution steps from S1 to S4.

2. The method for controlling the film thickness uniformity of a spray coating machine according to claim 1, characterized in that, The steps of acquiring and obtaining the thermal characteristic distribution map of the substrate to be coated, and calculating and obtaining the initial motion trajectory and speed running scheme of the robot arm set in the spray coating machine based on the thermal characteristic distribution map, include: S11. Preset the spraying trajectory and spraying speed of the nozzle on the robot arm, control and drive the robot arm on the spray coating machine, and drive the nozzle on the robot arm to perform at least one spraying process on the element to be coated along the preset spraying trajectory. In this spraying process, the nozzle on the robot arm sprays out inert carrier gas at a set temperature. S12. Multiple temperature monitoring points are arranged on the surface of the substrate to be coated. During the spraying process, the temperature rise rate of each area on the surface of the substrate to be coated is monitored and recorded frequently within a preset time window. S13. Calculate the temperature distribution characteristic data of the substrate surface to be coated based on the temperature rise rate of each region on the substrate surface to be coated, and form a thermal characteristic distribution map of the substrate to be coated based on the temperature distribution characteristic data. The temperature distribution characteristic data includes hot spot regions that reflect slow heat dissipation and easy heating on the substrate surface to be coated, and cold spot regions that reflect fast heat dissipation and easy cooling on the substrate surface to be coated. S14. Based on the thermal characteristic distribution diagram of the substrate to be coated, adjust the spraying trajectory and spraying speed of the nozzle on the preset robot arm, and obtain the initial motion trajectory speed operation scheme of the robot arm of the spray coating machine.

3. The method for controlling the uniformity of film thickness in a spray coating machine according to claim 2, characterized in that, The step of calculating the temperature distribution characteristic data of the substrate surface based on the temperature rise rate of each region of the substrate surface to be coated, and forming a thermal characteristic distribution map of the substrate to be coated based on the temperature distribution characteristic data, includes: S131. Calculate the first temperature distribution characteristic data of the substrate surface to be coated based on the temperature rise rate of each region on the substrate surface to be coated. The first temperature distribution characteristic data is used to reflect hot spots on the substrate surface to be coated that are slow to dissipate heat and easy to heat up, and cold spots on the substrate surface to be coated that are fast to dissipate heat and easy to cool down. S132. A region comparison result is obtained by comparing the temperature rise rate of each region on the surface of the substrate to be coated in the current spraying process with the temperature rise rate of each region on the surface of the substrate to be coated in the previous spraying process. A second temperature distribution characteristic data is calculated based on the region comparison result. The second temperature distribution characteristic data is used to reflect the temperature change rate of hot spot areas on the surface of the substrate to be coated that have slow heat dissipation and are easy to heat up, and the temperature change rate of cold spot areas on the surface of the substrate to be coated that have fast heat dissipation and are easy to cool down. S133. Based on the first temperature distribution characteristic data and the second temperature distribution characteristic data, a thermal characteristic distribution map of the substrate to be coated is formed.

4. The method for controlling the film thickness uniformity of a spray coating machine according to claim 2, characterized in that, After the step of adjusting the spraying trajectory and spraying speed of the nozzle on the pre-set robot arm based on the thermal characteristic distribution map of the substrate to be coated, and obtaining the initial motion trajectory and speed operation plan of the robot arm of the coating machine, the method further includes: S15. Real-time determination of whether the currently deposited film and the next film are of the same material after each film layer is deposited and before the next film layer is deposited. If not, return to step S11 to begin execution.

5. The method for controlling the film thickness uniformity of a spray coating machine according to claim 1, characterized in that, The steps of continuously and in real-time recording the film thickness growth rate data at each film thickness monitoring point, comparing the recorded film thickness growth rate data at each monitoring point with the target growth rate of the substrate to be coated and calculating the difference data, and obtaining a motion trajectory speed adjustment scheme based on the analysis of the difference data, specifically include: S31. Continuously and in real time record the film thickness growth rate data at each film thickness monitoring point; S32. To obtain the motion trajectory speed adjustment scheme, perform the following operations: The target growth rate of the substrate to be coated is preset, and the coating parameters of the robotic arm of the coating machine are adjusted based on the film thickness growth rate data of each film thickness monitoring point and the deviation between the film thickness growth rate of each film thickness monitoring point and the target growth rate. Based on the rate differences between the various film thickness monitoring points, the trajectory of the robotic arm of the spray coating machine is locally corrected.

6. The method for controlling the film thickness uniformity of a spray coating machine according to claim 5, characterized in that, The step of adjusting the spraying parameters of the robotic arm of the spray coating machine based on the target growth rate of the substrate to be coated, calculated from the film thickness growth rate data at each film thickness monitoring point and the deviation between the film thickness growth rate at each film thickness monitoring point and the target growth rate, includes: A1. Preset the target growth rate and deviation from the baseline of the substrate to be coated; A2. When the rate difference between the film thickness growth rates corresponding to each film thickness monitoring point meets the deviation from the benchmark, the average deviation comparison result is obtained by comparing the average growth rate of each film thickness monitoring point with the target growth rate based on the average growth rate of each film thickness monitoring point. A3. Based on the average deviation comparison results, a global adjustment scheme is calculated and obtained. The global adjustment scheme indicates that the spraying parameters of the robot arm of the spray coating machine should be adjusted.

7. The method for controlling the film thickness uniformity of a spray coating machine according to claim 5, characterized in that, The step of locally correcting the trajectory of the nozzle on the robotic arm of the spray coating machine based on the rate difference between each of the film thickness monitoring points includes: B1. Obtain the spatial location information of the multiple film thickness monitoring points within the spraying area; B2. Based on the spatial location information and the film growth rate data at each film thickness monitoring point, identify the deposition distribution characteristics of the material to be coated on the substrate: B3. Determine the correction parameters for the robotic arm of the spray coating machine based on the deposition distribution characteristics; B4. Apply the correction parameters to the local path or local speed of the robot arm's spraying trajectory to achieve local correction of the spraying trajectory.

8. The method for controlling the uniformity of film thickness in a spray coating machine according to claim 7, characterized in that, The step of identifying the deposition distribution characteristics of the material to be coated on the substrate based on the spatial location information and the film growth rate data at each film thickness monitoring point includes: B21. Based on the spatial location information and the film growth rate data of each film thickness monitoring point, material deposition trend information is generated for the location area of ​​the film thickness monitoring point, wherein the material deposition trend information indicates the material deposition state of the surface area on the substrate to be coated and located outside the film thickness monitoring point. B22. Based on the material deposition trend information, identify the deposition distribution characteristics of the sprayed material on the substrate to be coated, wherein the deposition distribution characteristics include local high-low pattern, gradient change pattern or asymmetric distribution pattern of the sprayed material deposition.

9. The method for controlling the film thickness uniformity of a spray coating machine according to claim 8, characterized in that, Based on the spatial location information and the film growth rate data at each film thickness monitoring point, material deposition trend information is generated for the location region of the film thickness monitoring point. The material deposition trend information is a step used to reflect the material deposition state on the surface region of the substrate to be coated and located outside the film thickness monitoring point, including: B211. Based on the spatial location information and the film growth rate data of each film thickness monitoring point, a spatial estimation method is used to predict the film growth rate of the surface area on the substrate to be coated and located outside the film thickness monitoring point to obtain the prediction result. B212. Based on the prediction results, generate material deposition trend information for the sprayed area, wherein the material deposition trend information indicates the material deposition state of the surface area on the substrate to be coated and located outside the film thickness monitoring point.

10. A film thickness uniformity control system for a spray coating machine, characterized in that, The system includes: An initial trajectory acquisition module is used to collect and acquire the thermal characteristic distribution map of the substrate to be coated, and calculate and obtain the initial motion trajectory speed running scheme based on the thermal characteristic distribution map of the robot arm set in the spray coating machine. The growth rate acquisition module is used to arrange multiple film thickness monitoring points on the outer periphery of the substrate to be coated, and to collect and record the film thickness growth rate data of each film thickness monitoring point in real time. The difference adjustment calculation module is used to continuously and in real time record the film thickness growth rate data of each film thickness monitoring point, and calculate the difference data by comparing the recorded film thickness growth rate data of each film thickness monitoring point with the target growth rate of the substrate to be coated, and obtain the motion trajectory speed adjustment scheme by analyzing the difference data. The parameter adjustment and correction module is used to adjust the initial motion trajectory speed operation scheme according to the motion trajectory speed adjustment scheme to obtain the adjusted motion trajectory speed operation scheme.

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