On-line detection device and detection method for electron irradiation high dose

Abstract

The invention relates to an on-line detection device and a detection method for high dose of electron irradiation, a vacuum chamber is enclosed by a vacuum shell, the outer wall of the vacuum shell is provided with a mounting port, a titanium-based vacuum film window is mounted in the mounting port, a water cooling plate covers the mounting port, the water cooling plate is provided with a collimation hole, and the collimation hole is communicated with the titanium-based vacuum film window. The collimation hole penetrates through the water cooling plate and corresponds to the titanium-based vacuum film window, the detection assembly is arranged in the vacuum chamber, and the detection assembly corresponds to the collimation hole; the signal reading device is arranged outside the vacuum shell, and the signal reading device is connected with the detection assembly; the detection process comprises the following steps: a target detection electron enters the Faraday cup-signal reading device to read a current signal; the titanium-based vacuum film window allows efficient penetration of electrons while maintaining internal and external pressure difference in the vacuum chamber, so that gas ionization particles are effectively prevented from entering a detection range, and the technical problem that the intensity of a target detection electron beam cannot be detected in an atmospheric environment is solved; and meanwhile, the detection accuracy is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of quantum sensing material preparation, and particularly relates to an online detection device and a detection method for high-dose electron irradiation. BACKGROUND

[0002] At present, a diamond nitrogen vacancy (NV) color center is a quantum sensing material capable of realizing high-precision magnetic field measurement. High-energy electron irradiation on nitrogen-containing diamond is an important step in preparation of the diamond NV color center material. In this step, the C bond of the nitrogen-containing diamond (target material) is broken under electron beam bombardment to form a vacancy; then the vacancy combines with adjacent nitrogen atoms to form an NV color center. Detection of the irradiation intensity of the electron beam can determine the uniformity of the irradiation intensity distribution and calibrate the intensity value borne by the target material, so as to optimize the preparation process and improve the material performance.

[0003] The existing detection devices for electron beam irradiation intensity mainly include the following two types: 1) a Faraday cup, which is a cup-shaped collector for directly measuring the electron beam intensity by absorbing the electron beam charge. The cup mouth usually has a suppression electrode or a small negative bias voltage is applied to prevent secondary electrons generated by the incident electrons hitting the edge of the cup mouth from escaping, and to prevent secondary electrons generated in the cup from escaping; and 2) a beam current transformer, which includes a ceramic slit to allow the electron beam to pass through, and a high magnetic permeability magnetic ring is wound around the periphery to induce the change of the magnetic field generated by the beam current, and the electron beam intensity passing through is calculated by detecting the voltage signal generated on the secondary winding due to the change of the magnetic field. These two devices are typical devices for measuring the electron beam intensity, and both need to be operated in a vacuum environment. In the atmospheric working condition, the initial intensity of the electron beam cannot be detected due to the interference of ionized gas particles. SUMMARY

[0004] In view of the deficiencies in the prior art, the present application aims to provide an online detection device and a detection method for high-dose electron irradiation, which can solve the technical problem that the electron beam intensity cannot be detected in an atmospheric environment.

[0005] The above invention purpose of the present application is realized by the following technical solutions: on the one hand, the present application provides an online detection device for electron irradiation high dose, comprising a vacuum shell, a water-cooled plate, a titanium-based vacuum film window, a detection assembly and a signal reading device; the vacuum shell surrounds a vacuum chamber, an installation opening is formed on the outer wall of the vacuum shell, the installation opening is communicated with the vacuum chamber, the titanium-based vacuum film window is installed in the installation opening, the water-cooled plate is covered on the installation opening, a collimating hole is formed on the water-cooled plate, the collimating hole penetrates through the water-cooled plate and is correspondingly arranged with the titanium-based vacuum film window, the detection assembly is arranged in the vacuum chamber, and the detection assembly is correspondingly arranged with the collimating hole; the signal reading device is arranged outside the vacuum shell, and the signal reading device is connected with the detection assembly; the titanium-based vacuum film window is used for making the detected target detection electron beam pass from the atmospheric environment into the vacuum chamber, is collected in the detection assembly, and blocks the gas ionization particles; the detection assembly is used for absorbing the electron beam for target irradiation and converting the absorbed electron charge into an analog current signal; and the signal reading device is used for reading the current signal in the detection assembly.

[0006] Preferably, the online detection device for electron irradiation high dose provided by the present application, the detection assembly comprises a plurality of detection units, a plurality of the detection units are arranged in the first direction of the vacuum shell, and a plurality of the detection units are correspondingly arranged with the titanium-based vacuum film window; each of the detection units is connected with the signal reading device.

[0007] Preferably, the online detection device for electron irradiation high dose provided by the present application, the detection unit comprises a shielding fixed assembly, an insulating mounting assembly and at least two detection modules; the shielding fixed assembly surrounds a containing cavity, the bottom end of the insulating mounting assembly is inserted into the containing cavity, the top end of the insulating mounting assembly is located outside the containing cavity, and the top end of the insulating mounting assembly is connected with the top end of the shielding fixed assembly through an insulating fastening bolt; the insulating mounting assembly is provided with at least two mounting cavities, two of the mounting cavities are arranged in the second direction of the vacuum shell, the mounting cavities are correspondingly arranged with the detection modules, and two of the detection modules are arranged in the two mounting cavities respectively.

[0008] Preferably, the online detection device for electron irradiation high dose provided by the present application, the shielding fixed assembly comprises a shielding cylinder and a support seat, the shielding cylinder surrounds the containing cavity, and the bottom end of the shielding cylinder is inserted into the support seat, so that the bottom end of the shielding cylinder is in a closed state.

[0009] Preferably, the online detection device for high dose of electron irradiation provided by the present application, the insulating mounting assembly comprises an insulating fixed plate, an insulating sleeve, an insulating plate, an insulating barrel and an insulating bottom plate, the insulating fixed plate, the insulating sleeve, the insulating plate, the insulating barrel and the insulating bottom plate are sequentially connected from top to bottom, the insulating fixed plate is connected with the mounting flange at the top end of the shielding barrel through insulating fastening bolts; at least two first cavities are formed in the insulating fixed plate, the two first cavities penetrate through the insulating fixed plate, and the two first cavities are arranged in the second direction; the insulating sleeve is provided with at least two second cavities, the two second cavities are arranged in the second direction, and the first cavity and the second cavity are arranged one by one; at least two third cavities are formed in the insulating plate, the two third cavities are arranged in the second direction, and the third cavity and the second cavity are arranged one by one; the insulating barrel is provided with two fourth cavities, the two fourth cavities are arranged in the second direction, the fourth cavity and the third cavity are arranged one by one, and the first cavity, the second cavity, the third cavity and the fourth cavity are sequentially communicated to form the mounting cavity; the insulating bottom plate is sealed at the bottom end of the insulating barrel.

[0010] Preferably, the online detection device for high dose of electron irradiation provided by the present application, the detection module comprises a suppression electrode and a Faraday cup, the suppression electrode is inserted into the first cavity of the insulating sleeve, the bottom end of the suppression electrode abuts against the top surface of the insulating plate, and a channel is formed in the suppression electrode; the Faraday cup is inserted into the fourth cavity of the insulating barrel, the top end of the Faraday cup abuts against the bottom surface of the insulating plate, the bottom end of the Faraday cup abuts against the top surface of the insulating bottom plate, a blind hole is formed in the Faraday cup, the blind hole is communicated with the channel through the second cavity, a connector terminal is arranged on the Faraday cup, one end of the connector terminal away from the Faraday cup is sequentially inserted into the vacuum chamber through the side wall of the insulating barrel and the side wall of the shielding barrel, and the connector terminal is connected with the signal reading device.

[0011] Preferably, the online detection device for high dose of electron irradiation provided by the present application, the detection assembly further comprises a pressurizing plate, the pressurizing plate is arranged on a plurality of detection units, a plurality of through hole units are formed in the pressurizing plate, the plurality of through hole units are arranged in the first direction, and the through hole unit and the detection unit are arranged one by one.

[0012] Preferably, the online detection device for electron irradiation high dose provided by the present application, the vacuum shell comprises an outer shell and an interface flange, the outer shell surrounds the vacuum chamber, one end of the outer shell is provided with an opening, the opening is communicated with the vacuum chamber, the outer wall of the opening is provided with a connecting flange, the connecting flange extends outward, the interface flange is arranged on the opening and is bolted with the connecting flange; the interface flange is provided with a high-voltage connector and a plurality of signal interfaces, the inner end of the high-voltage connector is connected with the suppression electrode through a cable, an external power supply is connected with the outer end of the high-voltage connector, and the external power supply is used to supply power to the suppression electrode; the inner port of the plurality of signal interfaces is connected with the connector terminal on the plurality of Faraday cups through a wire, and the outer port of the plurality of signal interfaces is connected with the signal reading device; the signal reading device reads the current signal in the Faraday cup in time sequence.

[0013] Preferably, the online detection device for electron irradiation high dose provided by the present application further comprises a vacuum pump set, the interface flange is provided with a suction port, the suction port is communicated with the vacuum chamber through the opening, the vacuum pump set is arranged outside the vacuum shell, and the vacuum pump set is connected with the suction port through a vacuum pipe; the vacuum pump set is used to form a vacuum environment in the vacuum chamber.

[0014] In another aspect, the present application provides a detection method of the online detection device for electron irradiation high dose, comprising the following steps:

[0015] The suppression electrode in the detection assembly and the titanium-based vacuum film form a point potential well, and the low-energy stray electrons generated when the target detection electron beam passes through the titanium-based vacuum film cannot pass through the point potential well, and the target detection electron can pass through the point potential well and enter the Faraday cup in the detection assembly;

[0016] The target detection electron is absorbed by the Faraday cup, the absorbed charge is converted into current, and the current is transmitted to the signal reading device.

[0017] In summary, the beneficial technical effects of the present application are: the online detection device and detection method for high dose of electronic irradiation provided by the present application, the online detection device comprises a vacuum shell, a water-cooled plate, a titanium-based vacuum film window, a detection assembly and a signal reading device; the vacuum shell surrounds a vacuum chamber, an installation opening is formed on the outer wall of the vacuum shell, the installation opening is in communication with the vacuum chamber, the titanium-based vacuum film window is installed in the installation opening, the water-cooled plate is arranged on the installation opening, the water-cooled plate is provided with a collimating hole, the collimating hole penetrates through the water-cooled plate and is correspondingly arranged with the titanium-based vacuum film window, the detection assembly is arranged in the vacuum chamber, and the detection assembly is correspondingly arranged with the collimating hole; the signal reading device is arranged outside the vacuum shell, and the signal reading device is connected with the detection assembly; the detection process is: target detection electrons enter the Faraday cup, and the signal reading device reads the current signal; by arranging the titanium-based vacuum film window, the titanium-based vacuum film window maintains the pressure difference between the inside and outside of the vacuum chamber while allowing efficient penetration of electrons, effectively avoiding the entry of gas ion particles into the detection range, thereby solving the technical problem that the target detection electron beam intensity cannot be detected in an atmospheric environment; and the detection accuracy is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is the overall structure schematic of the online detection device for high dose of electronic irradiation provided by the first embodiment of the present application Figure One .

[0019] Figure 2 is the overall structure schematic of the online detection device for high dose of electronic irradiation provided by the first embodiment of the present application Figure Two .

[0020] Figure 3 is the cross-sectional view of the online detection device for high dose of electronic irradiation provided by the first embodiment of the present application Figure One .

[0021] Figure 4 is the cross-sectional view of the online detection device for high dose of electronic irradiation provided by the first embodiment of the present application Figure Two .

[0022] Figure 5 is the structure schematic of the detection assembly in the online detection device for high dose of electronic irradiation provided by the first embodiment of the present application.

[0023] Figure 6 is the structure schematic of the shielding and fixing assembly in the online detection device for high dose of electronic irradiation provided by the first embodiment of the present application.

[0024] Figure 7 is the structure schematic of the insulation installation assembly in the online detection device for high dose of electronic irradiation provided by the first embodiment of the present application.

[0025] Figure 8is the sectional view of the insulating mounting assembly of the online detection device for high dose of electron irradiation provided by the first embodiment of the application.

[0026] Figure 9 is the connection structure diagram of the vacuum shell and the titanium-based vacuum film window of the online detection device for high dose of electron irradiation provided by the first embodiment of the application.

[0027] Figure 10 is the flow chart of the detection method of the online detection device for high dose of electron irradiation provided by the second embodiment of the application.

[0028] Figure 11 is the movement of the electron beam in the detection method of the online detection device for high dose of electron irradiation provided by the second embodiment of the application.

[0029] In the figure, 1, online detection device; 10, vacuum shell; 11, vacuum chamber; 12, shell; 121, mounting port; 122, connecting flange; 123, opening; 13, interface flange; 131, high-voltage connector; 132, signal interface; 133, suction port; 20, water-cooled plate; 21, collimating hole; 30, titanium-based vacuum film window; 40, detection assembly; 41, detection unit; 411, shielding fixed assembly; 4111, shielding cylinder; 4112, accommodating cavity; 4113, mounting flange; 4114, support seat; 4115, horizontal support plate; 4116, vertical support plate; 4117, limiting block; 4118, connecting hole; 412, insulating mounting assembly; 4121, insulating fixed plate; 4122, insulating sleeve; 4123, insulating plate; 4124, insulating cylinder; 4125, insulating bottom plate; 4126, first cavity; 4127, second cavity; 4128, third cavity; 4129, fourth cavity; 4130, fixed hole; 413, detection module; 4131, suppression electrode; 4132, Faraday cup; 4133, channel; 4134, blind hole; 4134, connector terminal; 414, pressurizing plate; 4141, via hole; 50, signal reading device; 60, vacuum pump set; 70, first direction; 80, second direction; 90, third direction. DETAILED DESCRIPTION

[0030] The application will be further described in detail below with reference to the accompanying drawings.

[0031] First embodiment:

[0032] Reference Figures 1 to 4The online detection device 1 for high dose of electronic irradiation disclosed by the first embodiment of the application comprises a vacuum shell 10, a water-cooled plate 20, a titanium-based vacuum film window 30, a detection assembly 40 and a signal reading device 50; the vacuum shell 10 is surrounded to form a vacuum chamber 11, an installation opening 121 is formed on the outer wall of the vacuum shell 10, the installation opening 121 is communicated with the vacuum chamber 11, the titanium-based vacuum film window 30 is installed in the installation opening 121, the water-cooled plate 20 is covered on the installation opening 121, a collimating hole 21 is formed on the water-cooled plate 20, the collimating hole 21 penetrates through the water-cooled plate 20 and is correspondingly arranged with the titanium-based vacuum film window 30, the detection assembly 40 is arranged in the vacuum chamber 11 and correspondingly arranged with the collimating hole 21; the signal reading device 50 is arranged outside the vacuum shell 10 and connected with the detection assembly 40; the titanium-based vacuum film window 30 is used for allowing the target detection electron beam to be detected to pass from the atmospheric environment into the vacuum chamber 11, collected in the detection assembly 40 and blocking the gas ionization particles; the detection assembly 40 is used for absorbing the electron beam for target irradiation and converting the absorbed electron charge into an analog current signal; the signal reading device 50 is used for reading the current signal in the detection assembly 40; by arranging the titanium-based vacuum film window 30, the titanium-based vacuum film window 30 allows the efficient penetration of electrons while maintaining the internal and external pressure difference, effectively avoiding the gas ionization particles from entering the detection range, thereby solving the technical problem that the target detection electron beam intensity cannot be detected in the atmospheric environment; meanwhile, the accuracy of detection is improved.

[0033] The vacuum shell 10 is in the shape of a cuboid, the vacuum shell 10 is surrounded to form a cuboid-shaped vacuum chamber 11, so that Figure 1 For example, the installation opening 121 is formed on the top surface of the vacuum shell 10, the titanium-based vacuum film window 30 is installed in the installation opening 121, the outer wall of the titanium-based vacuum film window 30 is fixed on the inner wall of the installation opening 121, in the use process, the titanium-based vacuum film window 30 can allow the high-energy electron beam for diamond target irradiation to pass through and achieve the blocking of the gas ionization particles, while bearing the internal and external pressure difference of the vacuum shell 10.

[0034] Specifically, the water-cooled plate 20 is a copper plate with a strong water-cooled channel 4133, the water-cooled plate 20 is used for absorbing about 90% of the irradiation intensity of the electron beam, avoiding the thermal damage of the titanium-based vacuum film window 30 and the detection assembly 40.

[0035] It should be noted that the water-cooled plate 20 is a component known to those skilled in the art, and the structure of the water-cooled plate 20 will not be described here.

[0036] The detection process of the online detection device 1 for electron irradiation high dose provided by the embodiment is as follows: after the electron beam passes through the collimating hole 21 on the water-cooled plate 20, the target detection electron beam passes through the titanium-based vacuum film window 30 to enter the vacuum environment from the atmospheric environment. The ionization particles generated by the electron beam in the atmospheric environment have an energy of less than 100 eV, and the penetration ability is much smaller than that of the initial electron beam (i.e., the target detection electron beam), so the ionization particles cannot penetrate the titanium-based vacuum film window 30. Most of the electron beam is absorbed by the water-cooled plate 20, avoiding thermal damage to the detection assembly 40 and the titanium-based vacuum film window 30. A certain amount of low-energy stray electrons are generated in the process of the target detection electron beam penetrating the titanium-based vacuum film window 30, but the low-energy stray electrons cannot enter the detection assembly 40, while the target detection electron beam has a kinetic energy of 3 MeV and can enter the detection assembly 40. The target detection electron beam is completely absorbed by the detection assembly 40, and the absorbed charge is converted into an electric current, which is then transmitted to the signal reading device.

[0037] It should be noted that the target detection electron beam refers to the initial electron beam that has passed through the collimating hole 21.

[0038] Continuing to refer to Figures 2 to 5 In the embodiment, the detection assembly 40 includes a plurality of detection units 41, the plurality of detection units 41 are arranged at intervals along a first direction 70 of the vacuum shell 10, the plurality of detection units 41 are arranged in correspondence with the titanium-based vacuum film window 30, and each detection unit 41 is connected with the signal reading device 50.

[0039] It should be noted that the first direction 70 of the vacuum shell 10 is the length direction of the vacuum shell 10, the second direction 80 of the vacuum shell 10 is the width direction of the vacuum shell 10, and the third direction 90 of the vacuum shell 10 is the thickness direction of the vacuum shell 10. The first direction 70, the second direction 80, and the third direction 90 of the vacuum shell 10 are arranged perpendicular to each other.

[0040] Further, in the embodiment, the detection unit 41 includes a shielding and fixing assembly 411, an insulating mounting assembly 412, and at least two detection modules 413. The shielding and fixing assembly 411 is arranged to form a containing cavity 4112, the bottom end of the insulating mounting assembly 412 is inserted into the containing cavity 4112, the top end of the insulating mounting assembly 412 is located outside the containing cavity 4112, and the top end of the insulating mounting assembly 412 is connected with the top end of the shielding and fixing assembly 411 through an insulating fastening bolt. The insulating mounting assembly 412 is provided with at least two mounting cavities, the two mounting cavities are arranged at intervals along the second direction 80 of the vacuum shell 10, the mounting cavities are arranged in one-to-one correspondence with the detection modules 413, and the two detection modules 413 are arranged in the two mounting cavities, respectively. By arranging the insulating mounting assembly 412, the detection modules 413 are arranged in an insulating environment.

[0041] In the embodiment, the number of through cavities installed on each insulation mounting assembly 412 is 2. Of course, the number of through cavities installed on each insulation mounting assembly 412 can also be 3 or 4.

[0042] The horizontal plate is provided with a plurality of collimating holes 21, the plurality of collimating holes 21 are arranged in a rectangular array, the collimating holes 21 are arranged one by one corresponding to the detection modules 413, and the number of the collimating holes 21 is basically consistent with the number of the detection modules 413.

[0043] Specifically, the center line of the collimating hole 21 is arranged in parallel with the third direction 90 of the vacuum shell 10.

[0044] Continuing to refer to Figures 2 to 6 In the embodiment, the shielding fixing assembly 411 includes a shielding cylinder 4111 and a support seat 4114, the shielding cylinder 4111 surrounds a containing cavity 4112, and the bottom end of the shielding cylinder 4111 is inserted into the support seat 4114, so that the bottom end of the shielding cylinder 4111 is closed.

[0045] Specifically, the shielding cylinder 4111 surrounds the containing cavity 4112, the containing cavity 4112 penetrates through the shielding cylinder 4111, and the shielding cylinder 4111 is in the shape of a cuboid. Of course, the shielding cylinder 4111 can also be in the shape of a cylinder.

[0046] The outer peripheral wall of one end of the shielding cylinder 4111 away from the support seat 4114 is provided with a mounting flange 4113, and the mounting flange 4113 extends outward.

[0047] Further, in the embodiment, the support seat 4114 includes a horizontal support plate 4115 and two vertical support plates 4116, the two vertical support plates 4116 are spaced apart on the bottom surface of the horizontal support plate 4115 along the second direction 80, one end of each of the two vertical support plates 4116 away from the horizontal support plate 4115 abuts against the bottom surface of the vacuum chamber 11, the edge of the top surface of the horizontal support plate 4115 is provided with a plurality of limiting blocks 4117, the plurality of limiting blocks 4117 are spaced apart around the axis of the horizontal support plate 4115, and the plurality of limiting blocks 4117 and the horizontal support plate 4115 jointly form a mounting cavity. In the installation process, the bottom end of the shielding cylinder 4111 is inserted into the mounting cavity, the bottom end of the shielding cylinder 4111 abuts against the top surface of the horizontal support plate 4115, and the outer peripheral wall of the shielding cylinder 4111 is attached to the inner side wall of the limiting block 4117.

[0048] Continuing to refer to Figure 2 , Figure 3 , Figure 7 and Figure 8In the embodiment, the insulating mounting assembly 412 includes an insulating fixed plate 4121, an insulating sleeve 4122, an insulating plate 4123, an insulating cylinder 4124, and an insulating bottom plate 4125. The insulating fixed plate 4121, the insulating sleeve 4122, the insulating plate 4123, the insulating cylinder 4124, and the insulating bottom plate 4125 are sequentially connected from top to bottom. The insulating fixed plate 4121 is connected with the mounting flange 4113 at the top end of the shielding cylinder 4111 through insulating fastening bolts. At least two first cavities 4126 are formed in the insulating fixed plate 4121. The two first cavities 4126 both penetrate the insulating fixed plate 4121. The two first cavities 4126 are arranged at intervals along the second direction 80. The insulating sleeve 4122 is provided with at least two second cavities 4127. The two second cavities 4127 both penetrate the insulating sleeve 4122. The two second cavities 4127 are arranged at intervals along the second direction 80. The first cavities 4126 and the second cavities 4127 are arranged in one-to-one correspondence. The insulating plate 4123 is provided with at least two third cavities 4128. The two third cavities 4128 both penetrate the insulating plate 4123. The two third cavities 4128 are arranged at intervals along the second direction 80. The third cavities 4128 and the second cavities 4127 are arranged in one-to-one correspondence. The insulating cylinder 4124 is provided with two fourth cavities 4129. The two fourth cavities 4129 both penetrate the insulating cylinder 4124. The two fourth cavities 4129 are arranged at intervals along the second direction 80. The fourth cavities 4129 and the third cavities 4128 are arranged in one-to-one correspondence. The first cavities 4126, the second cavities 4127, the third cavities 4128, and the fourth cavities 4129 sequentially communicate to form mounting through cavities. The insulating bottom plate 4125 is sealed to the bottom end of the insulating cylinder 4124.

[0049] Specifically, in the embodiment, the first cavities 4126, the second cavities 4127, the third cavities 4128, and the fourth cavities 4129 sequentially communicate from top to bottom to form mounting through cavities. Each mounting through cavity is opposite to one collimating hole 21.

[0050] The insulating fixed plate 4121, the insulating plate 4123, and the insulating bottom plate 4125 can all be made of ceramic material, and of course, other insulating materials can also be used. The embodiment does not limit this.

[0051] During installation, the insulating sleeve 4122, the insulating plate 4123, the insulating cylinder 4124, and the insulating bottom plate 4125 are all accommodated in the accommodating cavity 4112. The insulating fixed plate 4121 is located on the top surface of the shielding cylinder 4111. The bottom surface of the insulating fixed plate 4121 abuts against the top surface of the mounting flange 4113 at the top end of the shielding cylinder 4111 and is fastened and connected through insulating fastening bolts.

[0052] Specifically, in the embodiment, the first cavities 4126, the second cavities 4127, the third cavities 4128, and the fourth cavities 4129 sequentially communicate from top to bottom to form mounting through cavities. Each mounting through cavity is opposite to one collimating hole 21. Figure 4The outer side walls on the left and right sides of the shielding cylinder 4111 are provided with two connecting holes 4118, the center lines of the connecting holes 4118 are parallel to the second direction 80, and the connecting holes 4118 are in communication with the accommodating cavity 4112.

[0053] wherein, with Figure 8 The outer side walls on the left and right sides of the insulation cylinder 4124 are provided with two fixing holes 4130, the center lines of the fixing holes 4130 are parallel to the second direction 80, the fixing holes 4130 are in communication with the fourth cavity 4129 on the same side, the fixing holes 4130 are one-to-one corresponding to the connecting holes 4118, and the fixing holes 4130 are in communication with the corresponding connecting holes 4118.

[0054] Specifically, the center lines of the fixing holes 4130 are parallel to the center lines of the connecting holes 4118, and in some implementable modes, the center lines of the fixing holes 4130 are collinear with the center lines of the corresponding connecting holes 4118.

[0055] Continuing to refer to Figures 2 to 4 In the embodiment, the detection module 413 includes a suppression electrode 4131 and a Faraday cup 4132. The suppression electrode 4131 is inserted into the first cavity 4126 of the insulation sleeve 4122, the bottom end of the suppression electrode 4131 abuts against the top surface of the insulation plate 4123, and the suppression electrode 4131 is provided with a channel 4133. The Faraday cup 4132 is inserted into the fourth cavity 4129 of the insulation cylinder 4124, the top end of the Faraday cup 4132 abuts against the bottom surface of the insulation plate 4123, and the bottom end of the Faraday cup 4132 abuts against the top surface of the insulation bottom plate 4125. The Faraday cup 4132 is provided with a blind hole 4134, the blind hole 4134 is in communication with the channel 4133 through the second cavity 4127. The Faraday cup 4132 is provided with a connector terminal 4134, one end of the connector terminal 4134, which is away from the Faraday cup 4132, is inserted into the vacuum chamber 11 through the side walls of the insulation cylinder 4124 and the side walls of the shielding cylinder 4111 in sequence and is connected with the signal reading device 50. By providing the suppression electrode 4131, the suppression electrode 4131 and the titanium-based vacuum membrane window 30 form a potential well, and a certain number of low-energy stray electrons are generated in the process of the target detection electron beam penetrating the titanium-based vacuum membrane window 30. The low-energy stray electrons cannot pass through the potential well, while the kinetic energy of the target detection electron is 3MeV, which is sufficient to pass through the potential well and enter the Faraday cup 4132. Therefore, the accuracy of detection is improved.

[0056] It should be noted that the connector terminal 4134 is a component known to those skilled in the art, and the structure of the connector terminal 4134 will not be described here.

[0057] In the embodiment, two terminals are arranged on each Faraday cup 4132, and the two terminals extend outward along the second direction 80 and are arranged at intervals along the third direction 90. The terminals are sequentially fixed to the holes 4130 and the connecting holes 4118 at one end of the Faraday cup 4132 and are inserted into the vacuum chamber 11.

[0058] Specifically, the Faraday cup 4132 is used to absorb the electron beam for target irradiation and convert the absorbed electron charge into an analog current signal. In the detection process of the Faraday cup 4132, the secondary electron escape in the Faraday cup 4132 and the entry of stray particles outside the Faraday cup 4132 are inhibited by the suppression electrode 4131, thereby improving the detection accuracy.

[0059] The center lines of the channels 4133 and the blind holes 4134 are arranged in parallel with the third direction 90. In the embodiment, the total number of the Faraday cups 4132 is 40, each Faraday cup 4132 has a separate terminal 4134, and the position of the Faraday cup 4132 corresponds to the position of the expected diamond target, so that the electron beam intensity detected by a single Faraday cup 4132 is consistent with the electron beam intensity irradiated on a single target.

[0060] The side wall and the bottom of the Faraday cup 4132 have a thickness of not less than 10 mm and are made of oxygen-free copper. The penetration depth of a 3 MeV target detection electron beam in oxygen-free copper is not more than 2 mm, so that the target detection electron is completely absorbed by the Faraday cup 4132, and the absorbed charge is converted into a current, and then the current is transmitted to a signal reading device.

[0061] The water-cooled plate 20 is used to absorb about 90% of the irradiation intensity of the electron beam to avoid thermal damage to the titanium-based vacuum film window 30 and the Faraday cup 4132. The collimating holes 21 formed in the water-cooled plate 20 are used to allow the target detection electron beam to be detected to pass through the water-cooled plate 20 and enter the vacuum chamber 11.

[0062] Specifically, the vacuum shell 10 is used to provide a vacuum environment for the Faraday cup 4132 to avoid gas ionization caused by the electron beam in the Faraday cup 4132.

[0063] Further, in the embodiment, the detection assembly 40 further comprises a pressurizing plate 414, which is arranged on the plurality of detection units 41. The pressurizing plate 414 is provided with a plurality of through holes 4141, which are arranged at intervals along the first direction 70 and correspond to the detection units 41 in a one-to-one manner. By arranging the pressurizing plate 414, all the suppression electrodes are in series and can be powered through only one high-voltage channel because the pressurizing plate 414 is in direct contact with all the suppression electrodes in the detection assembly 40.

[0064] Specifically, the number of via hole 4141 units is basically consistent with the number of detection units 41. The pressing plate 414 is arranged at the top end of all the suppression electrodes to make all the suppression electrodes in series.

[0065] The via hole 4141 unit includes at least two via holes 4141, both of which pass through the pressing plate 414, and the two via holes 4141 are arranged at intervals along the second direction 80. The first cavity 4126 is arranged one-to-one with the via hole 4141, and the via hole 4141 is in communication with the first cavity 4126.

[0066] Continuing to refer to Figure 1 and Figure 9 In this embodiment, the vacuum shell 10 includes an outer shell 12 and an interface flange 13. The outer shell 12 surrounds the vacuum chamber 11. One end of the outer shell 12 is provided with an opening 123, which is in communication with the vacuum chamber 11. The outer wall of the end where the opening 123 is provided is provided with a connecting flange 122, which extends outward. The interface flange 13 is arranged on the opening 123 and is bolted to the connecting flange 122. The interface flange 13 is provided with a high-voltage connector 131 and a plurality of signal interfaces 132. The inner end of the high-voltage connector 131 is connected to the suppression electrode 4131 through a cable. An external power supply is connected to the outer end of the high-voltage connector 131, which is used to supply power to the suppression electrode. The inner ports of the plurality of signal interfaces 132 are connected to the connector terminals 4134 on the plurality of Faraday cups 4132 through a wire. The outer ports of the plurality of signal interfaces 132 are connected to the signal reading device 50. The signal reading device 50 reads the current signal in the Faraday cup 4132 in time sequence.

[0067] As shown in Figure 3 , the top end of the outer shell 12 is provided with a mounting opening 121, and the left end of the outer shell 12 is provided with an opening 123. The interface flange 13 is arranged on the left end of the outer shell 12.

[0068] The signal reading device includes a signal shielding line and a signal receiving device. The signal receiving device is connected to the outer ports of the signal interfaces 132 through the signal shielding line.

[0069] It should be noted that the signal receiving device is a component known to those skilled in the art, and the structure of the signal receiving device will not be described here.

[0070] Specifically, the suppression electrode 4131 is used to suppress the escape of secondary electrons in the Faraday cup 4132 and the entry of stray particles outside the Faraday cup 4132 after being loaded with a negative potential.

[0071] Further, the online detection device 1 for electron irradiation high dose provided by the embodiment further comprises a vacuum pump set 60, the interface flange 13 is provided with a suction port 133, the suction port 133 is communicated with the vacuum chamber 11 through the opening 123, the vacuum pump set 60 is arranged outside the vacuum shell 10, and the vacuum pump set 60 is connected through the vacuum pipe suction port 133; the vacuum pump set 60 is used for forming a vacuum environment in the vacuum chamber 11.

[0072] It should be noted that the vacuum pump set 60 is a component known to those skilled in the art, and the structure of the vacuum pump will not be described here.

[0073] In the embodiment, the vacuum pump set 60 is a combination of a dry front-stage pump and a molecular pump, which can generate, maintain and control the required vacuum environment of the vacuum shell 10 in a wider vacuum pressure range.

[0074] The process of the online detection device 1 for electron irradiation high dose provided by the embodiment in detecting the electron irradiation intensity under atmospheric conditions in the process of preparing quantum material diamond NV color centers is as follows: taking the vacuum shell 10 with the titanium-based vacuum film window 30 welded as the basis, based on the vacuum pump set 60 of the dry front-stage pump and the molecular pump, the vacuum pump set 60 is responsible for maintaining the vacuum degree in the vacuum chamber 11, and an independent vacuum environment is constructed, and the electron beam intensity detection is relied on the Faraday cup 4132 in the vacuum environment.

[0075] Specifically, most of the energy of the high-energy electron beam is absorbed by the water-cooled plate 20 to avoid thermal damage of the titanium-based vacuum film window 30 and the Faraday cup 4132, and a certain number of low-energy stray electrons are generated in the process of the initial electron beam (i.e. the target detection electron beam) after the electron beam passes through the collimating hole 21 of the water-cooled plate 20 and penetrates the titanium-based vacuum film window 30, the voltage of about-500V is loaded on the suppression electrode 4131, the low-energy stray electrons cannot pass through the potential well formed by the suppression electrode 4131 and the titanium-based vacuum film window 30, and the kinetic energy of the target detection electron beam is 3MeV, which is enough to pass through the potential well and enter the Faraday cup 4132. It should be noted that the intensity of the high-energy electron beam entering the Faraday cup 4132 through the collimating hole 21 of the water-cooled plate 20 is consistent with the intensity of the electron beam irradiated by the target material, the target detection electron is completely absorbed by the Faraday cup 4132, and the charge amount absorbed by the Faraday cup 4132 is converted into an electric current, and then the electric current is transmitted to a signal reading device.

[0076] It should be noted that the online detection device 1 has no vacuum requirement for the detection condition in the detection process, and can cover the electron beam intensity detection in the intensity range of nA~mA.

[0077] Second embodiment:

[0078] Referring to Figure 10 and Figure 11The second embodiment of the present application provides a detection method of the online detection device 1 for electron irradiation high dose as described in the first embodiment, comprising the following steps:

[0079] In the detection assembly 40, the suppression electrode 4131 forms a potential well with the titanium-based vacuum film, and the low-energy stray electrons generated when the target detection electron beam passes through the titanium-based vacuum film cannot cross the potential well, and the target detection electron can cross the potential well into the Faraday cup 4132 in the detection assembly 40.

[0080] Specifically, the vacuum pump set 60 is responsible for maintaining the vacuum degree in the vacuum chamber 11, and the insulating cylinder 4124 keeps the Faraday cup 4132 and the suppression electrode 4131 insulated from the vacuum shell 10; wherein the initial electron beam (i.e. the target detection electron beam) after the electron beam passes through the collimating hole 21 on the water-cooled plate 20 passes through the titanium-based vacuum film window 30, that is, from the atmospheric environment to the vacuum environment, and the ionization particles generated by the electron beam in the atmospheric environment have an energy of more than 100 eV, and the penetration ability is much smaller than that of the initial electron beam, so they cannot penetrate the titanium-based vacuum film window 30.

[0081] Most of the electron beams are absorbed by the water-cooled plate 20, avoiding the thermal damage of the Faraday cup 4132 and the titanium-based vacuum film window 30; a certain amount of low-energy stray electrons will be generated in the process of the target detection electron beam penetrating the titanium-based vacuum film window 30, and the suppression electrode 4131 is loaded with a voltage of about -500 V, and the low-energy stray electrons cannot cross the potential well formed by the suppression electrode 4131 and the titanium-based vacuum film window 30, while the kinetic energy of the target detection electron is 3 MeV, which is enough to cross the potential well and enter the Faraday cup 4132.

[0082] Specifically, each Faraday cup 4132 has a separate signal output and corresponds to the position of the expected diamond target one by one, so that the electron beam intensity detected by a single Faraday cup 4132 is consistent with the electron beam intensity of a single target irradiated.

[0083] S102, the target detection electron is absorbed by the Faraday cup 4132, the absorbed charge is converted into an electric current, and the electric current is transmitted to the signal readout device.

[0084] Specifically, the side wall and the bottom of the Faraday cup 4132 are not less than 10 mm in thickness, and are made of oxygen-free copper, and the penetration depth of a 3 MeV electron beam in oxygen-free copper does not exceed 2 mm, therefore, the target detection electron beam will be completely absorbed by the Faraday cup 4132, and the absorbed charge will be converted into an electric current, and then the electric current will be transmitted to the signal readout device.

[0085] The online detection device 1 and the detection method for electron irradiation high dose provided by the application, the online detection device 1 comprises a vacuum shell 10, a water-cooled plate 20, a titanium-based vacuum film window 30, a detection assembly 40 and a signal reading device 50; the vacuum shell 10 is surrounded to form a vacuum chamber 11, an installation opening 121 is formed on the outer wall of the vacuum shell 10, the installation opening 121 is communicated with the vacuum chamber 11, the titanium-based vacuum film window 30 is installed in the installation opening 121, the water-cooled plate 20 is covered on the installation opening 121, a collimating hole 21 is formed on the water-cooled plate 20, the collimating hole 21 penetrates through the water-cooled plate 20 and is correspondingly arranged with the titanium-based vacuum film window 30, the detection assembly 40 is arranged in the vacuum chamber 11, and the detection assembly 40 is correspondingly arranged with the collimating hole 21; the signal reading device 50 is arranged outside the vacuum shell 10, and the signal reading device is connected with the detection assembly 40; the detection process is that: target detection electrons enter a Faraday cup 4132, and a signal reading device reads a current signal; by arranging the titanium-based vacuum film window 30, the titanium-based vacuum film window 30 keeps the internal and external pressure difference of the vacuum chamber 11 at the same time, allows efficient penetration of electrons, and effectively avoids gas ion particles from entering the detection range, thereby solving the technical problem that the target detection electron beam intensity cannot be detected in an atmospheric environment; and meanwhile, the accuracy of detection is improved.

[0086] It should be noted that, in this text, relational terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such a process, method, article or device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of additional identical elements in the process, method, article or device including the element.

[0087] Finally, it should be noted that: obviously, the above embodiments are only examples for clearly illustrating the application, and are not limitations on the embodiments. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the application.

Claims

1. An online detection device for high-dose electron irradiation, characterized in that: The vacuum shell, the water-cooled plate, the titanium-based vacuum film window, the detection assembly and the signal reading device are included. The vacuum shell surrounds a vacuum chamber, an installation opening is formed on the outer wall of the vacuum shell, the installation opening is communicated with the vacuum chamber, the titanium-based vacuum film window is installed in the installation opening, the water-cooled plate is installed on the installation opening, a collimating hole is formed on the water-cooled plate, the collimating hole penetrates through the water-cooled plate and is correspondingly arranged with the titanium-based vacuum film window, the detection assembly is arranged in the vacuum chamber, and the detection assembly is correspondingly arranged with the collimating hole. The signal reading device is arranged outside the vacuum shell, and the signal reading device is connected with the detection assembly. The titanium-based vacuum film window is used for allowing the detected target electron beam to pass from the atmospheric environment into the vacuum chamber, to be collected in the detection assembly and to block the gas ionization particles. The detection assembly is used for absorbing the electron beam for target irradiation and converting the absorbed electron charge into an analog current signal. The signal reading device is used for reading the current signal in the detection assembly.

2. The in-line probe device for electron irradiation high dose according to claim 1, characterized in that: The detection assembly includes a plurality of detection units, the plurality of detection units are arranged at intervals along a first direction of the vacuum shell, the plurality of detection units are correspondingly arranged with the titanium-based vacuum film window, and each detection unit is connected with the signal reading device.

3. The in-line probe device for electron irradiation high dose according to claim 2, characterized in that: The detection unit includes a shielding fixed assembly, an insulating installation assembly and at least two detection modules, the shielding fixed assembly surrounds a containing cavity, the bottom end of the insulating installation assembly is inserted into the containing cavity, the top end of the insulating installation assembly is located outside the containing cavity, and the top end of the insulating installation assembly is connected with the top end of the shielding fixed assembly through an insulating fastening bolt. At least two installation through cavities are arranged on the insulating installation assembly and are arranged at intervals along a second direction of the vacuum shell, the installation through cavities are correspondingly arranged with the detection modules, and the two detection modules are arranged in the two installation through cavities respectively.

4. The in-line probe device for electron irradiation high dose according to claim 3, characterized in that: The shielding fixed assembly includes a shielding cylinder and a support seat, the shielding cylinder surrounds the containing cavity, and the bottom end of the shielding cylinder is inserted into the support seat so that the bottom end of the shielding cylinder is closed.

5. The in-line probe device for electron irradiation high dose according to claim 4, characterized in that: The insulating installation assembly includes an insulating fixed plate, an insulating sleeve, an insulating plate, an insulating cylinder and an insulating bottom plate, the insulating fixed plate, the insulating sleeve, the insulating plate, the insulating cylinder and the insulating bottom plate are connected in sequence from top to bottom, and the insulating fixed plate is connected with the mounting flange at the top end of the shielding cylinder through an insulating fastening bolt. At least two first cavities are formed on the insulating fixed plate, the two first cavities penetrate through the insulating fixed plate, and the two first cavities are arranged at intervals along the second direction. The insulating sleeve is provided with at least two second cavities, the two second cavities are arranged at intervals along the second direction, and the first cavities and the second cavities are correspondingly arranged. The insulation plate is provided with at least two third cavities, and the two third cavities are arranged at intervals along the second direction, and the third cavities are arranged one by one corresponding to the second cavities; The insulation cylinder is provided with two fourth cavities, and the two fourth cavities are arranged at intervals along the second direction, and the fourth cavities are arranged one by one corresponding to the third cavities, and the first cavity, the second cavity, the third cavity and the fourth cavity are sequentially communicated to form the mounting through cavity; The insulation bottom plate is blocked at the bottom end of the insulation cylinder.

6. The in-line probe device for electron irradiation high dose according to claim 5, characterized in that: The detection module comprises a suppression electrode and a Faraday cup, the suppression electrode is inserted into the first cavity of the insulation sleeve, the bottom end of the suppression electrode abuts against the top surface of the insulation plate, and a channel is arranged on the suppression electrode; The Faraday cup is inserted into the fourth cavity of the insulation cylinder, the top end of the Faraday cup abuts against the bottom surface of the insulation plate, the bottom end of the Faraday cup abuts against the top surface of the insulation bottom plate, a blind hole is arranged on the Faraday cup, and the blind hole is communicated with the channel through the second cavity; A connector terminal is arranged on the Faraday cup, one end of the connector terminal away from the Faraday cup is sequentially inserted into the vacuum chamber through the side wall of the insulation cylinder and the side wall of the shielding cylinder, and is connected with the signal reading device.

7. The in-line probe for electron irradiation high dose according to claim 2, characterized in that: The detection assembly further comprises a pressurizing plate, the pressurizing plate covers a plurality of the detection units, a plurality of through hole units are arranged on the pressurizing plate, the plurality of through hole units are arranged at intervals along the first direction, and the through hole units are arranged one by one corresponding to the detection units.

8. The in-line probe for electron irradiation high dose according to claim 6, characterized in that: The vacuum shell comprises a shell and an interface flange, the shell surrounds the vacuum chamber, one end of the shell is provided with an opening, the opening is communicated with the vacuum chamber, a connecting flange is arranged on the outer wall of the end provided with the opening, the connecting flange extends outward, the interface flange covers the opening and is bolted with the connecting flange; The interface flange is provided with a high-voltage connector and a plurality of signal interfaces, the inner side end of the high-voltage connector is connected with the suppression electrode through a cable, an external power supply is connected with the outer side end of the high-voltage connector, and the external power supply is used for supplying power to the suppression electrode; The inner side ports of the plurality of signal interfaces are connected with the connector terminals on the plurality of Faraday cups through a wire, and the outer side ports of the plurality of signal interfaces are connected with the signal reading device; The signal reading device reads the current signal in the Faraday cup in time sequence.

9. The in-line probe device for electron irradiation high dose according to claim 8, characterized in that: Further comprising a vacuum pump set, an extraction opening is arranged on the interface flange, the extraction opening is communicated with the vacuum chamber through the opening, the vacuum pump set is arranged outside the vacuum shell, and the vacuum pump set is connected with the extraction opening through a vacuum pipe; The vacuum pump set is used for forming a vacuum environment in the vacuum chamber.

10. A method of detecting for an on-line detection device for electron irradiation high doses according to any one of claims 1 to 9, characterized in that: The method comprises the following steps: The suppression electrode in the detection assembly forms a potential well with the titanium-based vacuum film, low-energy stray electrons generated when the target detection electron beam passes through the titanium-based vacuum film cannot cross the potential well, and the target detection electron can cross the potential well into the Faraday cup in the detection assembly; The target detection electron is absorbed by the Faraday cup, the absorbed charge is converted into current, and the current is transmitted to the signal readout device.

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