Microelectromechanical structural element for displacing fluid volumes

Abstract

The microelectromechanical component (1) has a housing (2) with a carrier (3), a cover (5) and a displacement structure (8) arranged in the housing (2). The displacer structure (8) has a bottom wall (9), a top wall (10), a side wall (11) and a plurality of displacer walls (12) which extend between the bottom wall (9) and the top wall (10), are parallel to one another and run perpendicular to the side wall (11), are movable, and delimit a plurality of volume chambers (13) of the displacer structure (8). According to the invention, the displacement device structure (8) has at least one movable coupling element (14) which is mechanically and fixedly connected to the movable displacement device wall (12) and which is formed at least in sections by the bottom wall (9) and / or by the top wall (10) and / or by the side walls (11) and which can be moved in such a way that the displacement device structure (8) can be moved at least in sections by the bottom wall (9) and / or by the top wall (10) and / or by the side walls (11). The movable displacement device wall (12) can be moved in a direction parallel to the carrier (3) and perpendicular to the movable displacement device wall (12).

Description

TECHNICAL FIELD

[0001] The present invention relates to a microelectromechanical structural element. BACKGROUND

[0002] Microelectromechanical (MEMS) loudspeakers and pumps for microfluidics are nowadays mostly implemented as planar structures, wherein a vibrating diaphragm is so excitable that the expulsion and / or compression of fluid can take place perpendicularly with respect to the diaphragm plane. The excitation of such diaphragms is typically carried out by means of the piezoelectric effect or the electrostatic effect. Such systems have the disadvantage that the expulsion of a high fluid volume is accompanied by a large-area diaphragm and thus by a large total area of the MEMS structural element. SUMMARY

[0003] It is the task of the present invention to provide an improved microelectromechanical structural element. The stated task is solved by a microelectromechanical structural element having the features of the independent claim. Advantageous further extensions are given in the dependent claims.

[0004] The microelectromechanical structural element has a housing and an expeller structure. The housing has a carrier, a cover and a frame arranged between the carrier and the cover. The expeller structure is arranged in the housing. The expeller structure has a bottom wall, a top wall, a side wall extending between the bottom wall and the top wall and a plurality of movable expeller walls extending between the bottom wall and the top wall, parallel to one another and running perpendicularly to the side wall. The bottom wall, the top wall, the side wall and the movable expeller walls delimit a plurality of laterally arranged volume chambers of the expeller structure. The expeller structure has at least one movable coupling element which is mechanically fixedly connected to the movable expeller walls. The movable coupling element is formed at least sectionally by the bottom wall and / or by the top wall and / or by the side wall. The at least one movable coupling element is so movable that the movable expeller walls can be moved in a direction parallel to the carrier and perpendicular to the movable expeller walls, so that fluid can be transported into and expelled from the volume chambers.

[0005] The microelectromechanical structural element is also referred to below as MEMS structural element for short. By using a plurality of volume chambers and laterally or horizontally movable or vibrating elements, i.e. movable expeller walls, the MEMS structural element advantageously has a large effective area for interacting with fluid, wherein the MEMS structural element can advantageously at the same time have a small lateral dimension (area dimension).

[0006] In one embodiment, the extruder structure has fixed chamber walls extending between a bottom wall and a top wall, running parallel to each other and parallel to the movable extruder walls. The movable extruder walls and the fixed chamber walls are arranged alternately, so that one fixed chamber wall is arranged in each volumetric chamber. All movable extruder walls are mechanically fixedly connected to the at least one movable coupling element.

[0007] Advantageously, unidirectional movement of the movable extruder walls is thus possible because the movable extruder walls are coupled to each other via a common movable coupling element. The chamber walls are fixed to the bottom wall and / or the top wall. Fluid can be supplied to and discharged from the volumetric chamber in this manner by moving the movable extruder walls toward the chamber wall. The supply of fluid to the volumetric chamber and the discharge of fluid from the volumetric chamber occur sequentially, in that the movable extruder walls move in opposite directions.

[0008] In another embodiment, the extruder structure has at least two movable coupling elements that are mechanically fixedly connected to the movable extruder walls, respectively. The directly adjacent movable extruder walls are fixedly connected to individual movable coupling elements of the extruder structure.

[0009] Advantageously, this allows for bidirectional movement of the movable extruder walls. In this variant, fluid can be delivered into the volumetric chamber by the movement of directly adjacent movable extruder walls away from each other. If the directly adjacent movable extruder walls subsequently move towards each other, fluid can be expelled from the volumetric chamber. The stationary chamber walls arranged between the movable extruder walls are therefore unnecessary and can be omitted, thereby allowing the volume of the volumetric chamber to be increased without increasing the overall area of ​​the MEMS structural elements.

[0010] In one embodiment, the immovable section of the bottom wall is formed by a carrier and / or the immovable section of the top wall is formed by a cover and / or the immovable section of the side walls by a frame. In another embodiment, the immovable section of the extruder structure is not formed by a section of the housing, but is only mechanically fixedly connected to a section of the housing. It is also possible that the immovable section of the bottom wall is formed only partially by a carrier and / or the immovable section of the top wall is formed partially by a cover and / or the immovable section of the side walls by a frame, and is at least partially mechanically fixedly connected to the carrier and / or the cover and / or the frame. Advantageously, if the immovable section of the extruder structure is at least partially formed by a housing, material and cost savings can be achieved.

[0011] In one embodiment, the at least one movable coupling element is directly connected to the actuator or is a component of the actuator. An advantage of MEMS structural elements is the possibility of separating the extruder structure. The extruder structure and the actuator therefore do not need to be formed from the same element. This significantly reduces the structural requirements of the extruder structure, thereby ensuring technical feasibility and economic viability in industrial mass production.

[0012] In one embodiment, the overall area of ​​the movable coupling element has a proportion of more than 20%, particularly more than 40%, and particularly more than 60% relative to the base area of ​​the extruder structure. Advantageously, selectively choosing the area proportion of the movable coupling element relative to the base area of ​​the extruder structure enables coordination with the actuator, for example, in its design or its mounting position in or on the housing. Furthermore, the force transmission to the movable extruder wall can be altered via the area proportion of the movable sections of the bottom wall and / or top wall and / or side wall.

[0013] In one embodiment, the volume chamber is accessible via an inlet constructed in the bottom wall and an outlet constructed in the top wall, and / or via additional inlets constructed in the side walls and additional outlets constructed in opposing side walls. Fluid can flow into the volume chamber through the inlets when the movable extruder wall moves. Fluid can be expelled from the volume chamber via the outlets by the opposite movement of the movable extruder wall.

[0014] In one embodiment, the inlet and outlet, and / or additional inlets and outlets, are either constructed within a stationary extruder structure section or within a region of a movable coupling element. If the inlet and outlet, and / or additional inlets and outlets, are constructed within a region of the movable coupling element, they are arranged such that they remain within the region of their respective volumetric chambers as the movable coupling element moves. This ensures that fluid can be delivered into and expelled from the volumetric chamber. Furthermore, the inlets and outlets can be positioned due to the design freedom of the MEMS structural elements, allowing the actuator to be advantageously arranged outside the regions with the inlets and outlets. Advantageously, neither the inflow nor the outflow of fluid from the volumetric chamber is obstructed by the actuator.

[0015] Furthermore, the lateral separation of the actuator and the inlet and outlet allows for the arrangement of multiple volumetric chambers, which can be vertically stacked or laterally arranged side-by-side. In one embodiment, the MEMS structural element has another extruder structure disposed within a housing. This other extruder structure has another bottom wall, another top wall, additional side walls extending between the other bottom wall and the other top wall, and a plurality of additional movable extruder walls extending between the other bottom wall and the other top wall, parallel to each other and perpendicular to the additional side walls. The other bottom wall, the other top wall, the additional side walls, and the additional movable extruder walls define the plurality of laterally arranged additional volumetric chambers of the other extruder structure. The other extruder structure has at least one other movable coupling element mechanically fixedly connected to the additional movable extruder wall. The other movable coupling element is formed at least sectionally through the other bottom wall and / or through the other top wall and / or through the additional side walls. The at least one additional movable coupling element is movable such that the additional movable extruder wall is movable in a direction parallel to the carrier and perpendicular to the additional movable extruder wall, thereby allowing fluid to be delivered to and expelled from the additional volume chamber.

[0016] In another embodiment, the volumetric chambers are arranged in a stacked configuration. The volumetric chambers are either directly stacked or laterally offset from each other in the direction of movement of the extruder walls. In this case, it is advantageous that the volume of fluid extruded is not only proportional to the overall area of ​​the MEMS structural element, representing a major cost factor, but can also be influenced by the vertical dimensions.

[0017] Vertical stacking of volumetric chambers without (large) lateral offset can advantageously and significantly increase the effective area over the fluid when the movable extruder wall and the other extruder move or oscillate in phase. In this case, each volumetric chamber is connected in parallel with one other volumetric chamber. Series connection of volumetric chambers can be achieved by lateral offset between the volumetric chambers and the other volumetric chambers, and by phase deviation of the movement or oscillation of the extruder wall and the other extruder wall. Therefore, the fluid can be advantageously staged compressed. The phase deviation between the extruder wall and the other extruder wall can be achieved by a separate actuator. Attached Figure Description

[0018] The following diagram illustrates microelectromechanical system (MEMS) structural elements in detail. The attached diagram shows: Figure 1 The MEMS structural elements according to the first embodiment are shown in top view and side cross-sectional view. Figure 2 A top view shows a MEMS structural element according to the second embodiment; Figure 3 A top view shows a MEMS structural element according to the third embodiment; Figure 4 A MEMS structural element according to a third embodiment is shown in a side cross-sectional view. Figure 5 A MEMS structural element according to the fourth embodiment is shown in a side cross-sectional view. Figure 6 A MEMS structural element according to the fifth embodiment is shown in a side cross-sectional view. Figure 7 The structure of the ejector is shown in perspective view; Figure 8 An alternative extruder structure is shown in perspective view; Figure 9 A MEMS structural element according to the sixth embodiment is shown in a side cross-sectional view. Figure 10 : Figure 9 Different top views of MEMS structural components; Figure 11 A MEMS structural element according to the seventh embodiment is shown in a side cross-sectional view. Figure 12 : Figure 11 Different top views of MEMS structural components; Figures 13 to 16 Different configurations of the attachment area of ​​the extruder wall in the extruder structure; and Figure 17 : Figures 13 to 16 Overview of the configuration. Detailed Implementation

[0019] Figure 1 The MEMS structural element 1 according to the first embodiment is shown in top view and side cross-sectional view, the side cross-sectional view along the plane indicated by dashed lines in the top view. The MEMS structural element 1 can be configured, for example, as a loudspeaker. However, the MEMS structural element 1 can also be configured, for example, as a pump, for applications such as in microfluidics.

[0020] MEMS structural element 1 has a housing 2. Housing 2 has a carrier 3, a frame 4, and a cover 5. Carrier 3 has an upper side 6 and a lower side 7 opposite to the upper side 6. Frame 4 is arranged on the upper side 6 of carrier 3. Cover 5 is arranged on the side of frame 4 facing away from carrier 3. Frame 4 is thus arranged between carrier 3 and cover 5.

[0021] MEMS structural element 1 also has an extruder structure 8. The extruder structure 8 is arranged in housing 2. The extruder structure 8 has a bottom wall 9, a top wall 10, a side wall 11 extending between the bottom wall 9 and the top wall 10, and a plurality of movable extruder walls 12 extending between the bottom wall 9 and the top wall 10, parallel to each other and perpendicular to the side wall 11.

[0022] The extruder structure 8 has volume chambers 13, wherein the extruder structure 8 of the MEMS structural element 1 has at least two volume chambers 13. The volume chambers 13 are arranged laterally side-by-side relative to the upper side 6 of the carrier 3. A bottom wall 9, a top wall 10, a side wall 11, and a movable extruder wall 12 define the volume chambers 13 of the extruder structure 8. In particular, the movable extruder wall 12 divides the extruder structure 8 into individual volume chambers 13. In the lateral direction relative to the carrier 3, the movable extruder wall 12 defines volume unit cells or volume chambers 13. In the vertical direction relative to the carrier 3, the volume unit cells are defined or bounded by the bottom wall 9 and the top wall 10.

[0023] Furthermore, the extruder structure 8 has at least one movable coupling element 14 that is mechanically fixedly connected to the movable extruder wall 12. The movable coupling element 14 is formed at least sectionally through the bottom wall 9 and / or through the top wall 10 and / or through the side wall 11. Figure 1 An exemplary MEMS structural element 1 has a total of two movable coupling elements 14, each formed by a sidewall 11. This means that the bottom wall 9 and top wall 10 are fixedly constructed, while the sidewalls 11 of the extruder structure 8 are movable. All movable extruder walls 12 are mechanically fixedly connected to the two sidewalls 11 at their end faces. Because the sidewalls 11 are connected to the movable extruder walls 12, the sidewalls are movable. Figure 1 In some implementations, a sidewall 11 may be omitted.

[0024] exist Figure 1 In an exemplary embodiment, the bottom wall 9 is formed by the carrier 3. The top wall 10 is formed by the cover 5. Only the side walls 11 of the extruder structure 8 are not formed by the frame 4 of the housing. However, the side walls 9 and top wall 10 are not necessarily formed by the carrier 3 or the cover 5. They can instead be configured as separate elements mechanically fixed to the housing 2. However, it is also generally possible that the immovable section of the bottom wall 9 is formed by the carrier 3 and / or the immovable section of the top wall 10 is formed by the cover 5 and / or the immovable side wall 11 is formed by the frame 4. The immovable side wall 11 or side wall section can be either fixed to the bottom wall 9 and / or fixed to the top wall 10. However, the movable section of the extruder structure 8 may not be formed by sections of the housing 2.

[0025] existFigure 1 In this embodiment, the extruder structure 8 further comprises a plurality of stationary chamber walls 15 extending between the bottom wall 9 and the top wall 10, parallel to each other and oriented parallel to the movable extruder wall 12. The movable extruder wall 12 and the stationary chamber walls 15 are arranged alternately, thereby providing one stationary chamber wall 15 in each volume chamber 13. In other words, the comb structure (Kamm) of the stationary chamber walls 15 is arranged within the comb structure of the movable extruder wall 12. The chamber walls 9 are fixed to the bottom wall 9 and / or to the top wall 10; however, in this variant, the bottom and top walls are formed by a carrier 3 or a cover 5. Figure 1 As shown for example, the chamber wall 9 is fixed not only to the carrier 3 but also to the cover 9.

[0026] At least one movable coupling element 14 is movable such that the movable extruder wall 12 is movable in directions parallel to the carrier 3 and perpendicular to the movable extruder wall 12, thereby allowing fluid to be delivered into and expelled from the volume chamber 13. All movable extruder walls 12 are mechanically fixedly connected to the at least one movable coupling element 14, i.e., to at least one side wall 11. This enables unidirectional movement of the movable extruder walls 12. To enable free movement of at least one movable coupling element 14 of the extruder structure 8, a cavity 16 is constructed in the housing 2.

[0027] The movable extruder walls 12 are coupled to each other such that they are configured to move together parallel to the upper side surface 6 of the carrier 3. The direction of movement of the movable coupling elements 14 of the side walls 11 or the extruder structure 8 is... Figure 1 The extruder wall 12 is parallel to the x-direction. In the direction of movement, the extruder wall 12 has a smaller cross-sectional area compared to the volumetric chamber 13, thus allowing free movement within the container chamber 13. The volumetric chamber 13 may have a width of, for example, 200 μm along the direction of movement, i.e., along the x-direction. It is oriented perpendicular to the direction of movement relative to the extruder wall 12 and parallel to the upper side 6 of the carrier 3, or parallel to the stationary chamber wall 15 and the movable extruder wall 12, and in… Figure 1 The direction indicated in the diagram is the y-direction, and the volumetric chamber 13 may, for example, have a width of 1 mm. However, the dimensions described for the volumetric chamber 13 are for illustrative purposes only and should not be construed as limiting.

[0028] The carrier 3, frame 4, cover 5, bottom wall 9, top wall 10, side wall 11, fixed chamber wall 15, and movable extruder wall 12 may, for example, be made of monocrystalline silicon or polycrystalline silicon; however, this is not mandatory. The fixed chamber wall 15 and the movable extruder wall 12 may, for example, each have a wall thickness of 30 μm to 100 μm defined along the x-direction, wherein the wall thickness is not limited thereto. The side wall 11 or the movable coupling element 14 may, for example, each have a wall thickness of 30 μm to 150 μm defined along the y-direction, wherein the wall thickness is also not limited to the stated numerical range.

[0029] Each volume chamber 13 is accessible via an inlet 17 constructed in the carrier 3 and an outlet 18 constructed in the cover 5. Fluid can be introduced into the volume chamber 13 via the inlet 17. Fluid can be conveyed into the volume chamber 13 and compressed and modulatedly expelled from the volume chamber 13 via the outlet 18 by the movement of the movable extruder wall 12 relative to the stationary chamber wall 15. The inlet 17 and outlet 18 are... Figure 1 This can be seen in the side cross-sectional view. Figure 1 The top view shows the projection of inlet 17 and outlet 18 respectively.

[0030] Generally, the volume chamber 13 is accessible via an inlet 17 constructed in the bottom wall 9 and an outlet 18 constructed in the top wall 10, and / or via additional inlets constructed in the side walls 11 and additional outlets constructed in opposing side walls 11. The inlets 17 and outlets 18 and / or additional inlets and outlets can be constructed either within a stationary extruder structure section or within the region of the movable coupling element 14. If the inlets 17 and outlets 18 and / or additional inlets and outlets are constructed within the region of the movable coupling element 14, then the inlets 17 and outlets 18 and / or additional inlets and outlets are arranged such that they remain within the region of their respective volume chambers 13 during movement of the movable coupling element 14.

[0031] The total volume of fluid displaced corresponds to the sum of the volumes displaced from the individual volumetric chambers 13. Large fluid volumes can be displaced through the coupling of multiple volumetric chambers 13 and the movable displacer wall 12. The displaced volume can be determined by the vertical extension dimension of the movable displacer wall 12. Relative to the upper side 6 of the carrier 3, i.e., along the z-direction which is perpendicular to both the x-direction and y-direction, the movable displacer wall 12 can, for example, have a height 19 ranging from 50 μm to 700 μm. However, the height 19 of the movable displacer wall 12 is not limited to the numerical range stated herein.

[0032] The at least one movable coupling element 14, i.e. the current sidewall 11, is directly connected to the driver or is a component of the driver, and is thus drivable and movablely constructed.

[0033] exist Figure 1 In the implementation of the MEMS structural element, the movable sidewall 11 is fixed to the frame 4 of the housing 2 by means of a suspension device 20, such that movement of the sidewall 11 of the extruder structure 8 in the x-direction is permitted, but movement in the z-direction is prohibited. The actuator can be implemented via the suspension device 20 or separately via a mechanical coupling element. The actuator must be designed such that the movable coupling element 14, taking into account its mass, can be driven within the desired frequency range. The actuator can, for example, be arranged in a region of the frame 4 and mechanically connected to the frame 4. The actuator can also, for example, be integrated into the frame 4 of the housing 2. However, it can also be arranged externally on the housing 2.

[0034] The actuator has at least one driving element. The driving element can be configured, for example, as an electrostatic comb actuator or an electrostatic bending actuator. When at least one driving element deflects with an amplitude of, for example, 30 μm to 50 μm, the movable extruder wall 12 can move 150 μm to 300 μm in the x-direction. This deflection amplitude ultimately defines the effective width of the volumetric chamber 13 in the direction of movement (x-direction).

[0035] The movable extruder wall 12 is connected to the opposite end face of the side wall 11 in the y-direction. However, the side wall 11 is not connected to the stationary chamber wall 15. The stationary chamber wall 15 and the movable side wall 11 are spaced apart from each other in the y-direction. This space can also be referred to as a vertical clearance 21. Furthermore, the movable extruder wall 12 is spaced apart from the carrier 3 and / or the cover 5, or more generally from the bottom wall 9 and / or the top wall 10, in the z-direction. This space can also be referred to as a horizontal clearance 22. The vertical clearance 21 and the horizontal clearance 22 should be implemented as narrow as possible because they cause parasitic fluid flow when the movable coupling element 14 is driven. Here, the vertical clearance 21 is considered particularly challenging due to the significantly higher structural width and tolerances required for vertical structuring. The horizontal clearance 22, in contrast, can be relatively precisely adjusted, for example, via layer deposition and sacrificial layer etching.

[0036] For example, the MEMS structural element 1 according to the first embodiment has cavities 23 constructed in the cover 5. Cavities 22 can enter from each volume chamber 13 via an outlet 18 constructed in the cover 5. Cavities 23 are thus constructed via outlet 18 relative to the carrier 3. Fluid expelled from the volume chamber 13 due to the movement of the expeller wall 12 in the x-direction can flow into the cavities 23 in this way before being discharged into the surrounding environment of the MEMS structural element 1. The cover 5 has at least one opening 24 on its side facing away from the carrier 3 and the outlet 18. Access to the cavities 23 is possible via at least one opening 24. Through at least one opening 24, fluid expelled from the volume chamber 13 and collected in the cavities 23 is discharged into the surrounding environment. Therefore, the MEMS structural element 1 can discharge fluid at increased pressure. However, it is not necessary to construct cavities 23 in the cover 5. Cavities 23 and at least one opening 24 can also be omitted. In this case, fluid, such as air or hydraulic medium, is discharged into the surrounding environment only through outlet 18, wherein the fluid is discharged into the surrounding environment at a very low pressure.

[0037] Figure 2 The MEMS structural element 25 according to the second embodiment is schematically shown in a top view. The MEMS structural element 25 according to the second embodiment has a relative to the embodiment according to... Figure 1 The similarity between the MEMS component 1 of the first embodiment and the MEMS component 1 of the second embodiment is explained below. Similar or identical components are therefore marked with the same reference numerals. The differences between the MEMS structural component 25 of the second embodiment and the MEMS structural component 1 of the first embodiment will be explained below only.

[0038] according to Figure 2 The frame 4 of the housing 2 of the MEMS structural element 25 has a width 26 that is parallel to and perpendicular (y-direction) to the direction of movement of the movable extruder wall 12, and a width 27 that is perpendicular to the direction of movement of the movable extruder wall 12, i.e., in the direction of movement (x-direction). The width 26 that is defined in the y-direction is greater than the width 27 that is defined in the x-direction. In contrast, in the MEMS component 1 according to the first embodiment, the width 26 of the frame 4 that is defined in the y-direction is smaller than the width 27 that is defined in the x-direction. Therefore, the movable extruder wall 12 is wider than the movable sidewall 11 of the extruder structure 8 that is connected to the movable extruder wall. The sidewall may have a width defined in the y-direction, for example, 5 mm to 10 mm, but is not limited thereto. In contrast, in the MEMS component 1 according to the first embodiment, the width of the sidewall 11, which is defined in the y direction, is smaller than the width of the movable extruder wall 12, which is defined in the x direction.

[0039] The reversal of the geometric dimensions in the motion plane of the extruder structure 8, i.e., in the xy plane, in the MEMS structural element 25 according to the second embodiment offers the following advantages compared to the MEMS structural element 1 according to the first embodiment: A reduced number of volumetric chambers 13 in the MEMS component 25 can be adequately and necessarily constructed to extrude a predetermined volume. Therefore, the complexity of the MEMS structural element 25 according to the second embodiment is reduced compared to the MEMS structural element 1 of the first embodiment. Simultaneously, the reduced number of volumetric chambers 13 reduces the occurrence of parasitic fluid flow because the number of vertical and horizontal gaps 21, 22 is reduced.

[0040] Another difference between the MEMS structural element 25 according to the second embodiment and the MEMS structural element 1 according to the first embodiment is that the movable ejector wall 12 and the sidewall 11 configured as a movable coupling element 14 have, at least in sections, through holes 28 extending in a direction perpendicular to the upper side surface 6 of the carrier 3, i.e., in the z-direction. Therefore, the mass of the ejector structure 8 relative to the mass of the carrier structure 8 is... Figure 1 The variant descends. Instead of the through hole 28, blind holes extending in the z-direction and opening toward the cover 5 may also be provided in the sidewall 11 and / or the movable extruder wall 12. In summary, the sidewall 11 and the extruder wall 12 have openings extending at least partially perpendicular to the upper side surface 6 of the carrier 3. Figure 1 The sidewall 11 and the extruder wall 12 of the MEMS structural element 1 can also have such openings.

[0041] exist Figure 2 The diagram shows a drive 29 arranged in a region of the frame 4 of the housing 2. For example, the drive 29 has a drive element 30 or actuator 30. The extruder structure 8 is connected to the drive 29 via two mechanical coupling elements 31. The drive 29 and the mechanical coupling elements 31 are respectively arranged in regions of the frame 4 that run parallel to the movable extruder wall 12. Alternatively, the drive 29 and the mechanical coupling elements 31 may also be arranged in regions of the frame 4 that run perpendicular to the movable extruder wall 12. Alternatively, only one mechanical coupling element 31 may be provided for connecting the extruder structure 8 to the drive 29.

[0042] Figure 3 The MEMS structural element 32 according to the third embodiment is shown schematically in a top view. Figure 4 A schematic side cross-sectional view illustrates a MEMS structural element 32 according to a third embodiment. The MEMS structural element 32 according to the third embodiment has a relative to the embodiment according to... Figure 2The similarity between the MEMS structural element 25 of the second embodiment and the MEMS structural element 25 of the second embodiment is explained below. Similar or identical elements are therefore marked with the same reference numerals. The differences between the MEMS structural element 32 of the third embodiment and the MEMS structural element 25 of the second embodiment will be explained below only.

[0043] According to the third embodiment, the MEMS structural element 32 has, for example, one actuator 29 and four mechanical coupling elements 31, the actuator having two drive elements 30 or actuators 30. Each pair of mechanical coupling elements 32 connects the extruder structure 8 to one drive element 30. The drive elements 30 and each pair of mechanical coupling elements 28 are arranged in the x-direction on opposite sides of the frame 4 of the housing 2. Thus, the extruder structure 8 or the movable coupling element 14 can be driven on both sides. In this way, the extruder structure 8 is suspended on the frame 4 of the housing 2. The suspension device 20 can be omitted in this case because the mechanical coupling elements 31 already serve as the suspension device.

[0044] Figure 4 As shown, the carrier 3 and the frame 4 are interconnected by a bonding frame 33. The bonding frame 33 may, for example, be made of a eutectic alloy. The carrier 3 and the frame 4 may, in this case, be constructed as wafers, for example, as silicon wafers. The bonding frame 33 laterally surrounds the volume chamber 13 or cavity 16. However, when a different method than eutectic bonding is used for wafer bonding, the bonding frame 33 may be omitted. For example, a direct bonding process for connecting the carrier 3 and the frame 4 may be performed instead.

[0045] Figure 5 A schematic side cross-sectional view illustrates a MEMS structural element 34 according to a fourth embodiment. The MEMS structural element 34 according to the fourth embodiment has a relative to the... Figure 3 and 4 The similarity to the MEMS structural element 32 of the third embodiment is explained below. Similar or identical elements are therefore marked with the same reference numerals. The differences between the MEMS structural element 34 according to the fourth embodiment and the MEMS structural element 32 according to the third embodiment will be explained below only.

[0046] The MEMS structural element 34 according to the fourth embodiment is formed, for example, by two MEMS structural elements 32 arranged or stacked in the z-direction and constructed substantially according to the third embodiment. However, the MEMS structural element 34 according to the fourth embodiment can also be formed by two MEMS structural elements 25 arranged in the z-direction and constructed substantially according to the second embodiment, or two MEMS structural elements 1 arranged in the z-direction and constructed substantially according to the first embodiment. This stacking can also be achieved using microelectromechanical structural elements according to the sixth or seventh embodiment, which are combined... Figures 9 to 12 To explain.

[0047] In this configuration, the housing 2 has another frame 35 in addition to the carrier 3, frame 4, and cover 5. This other frame 35 is positioned above the frame 4 relative to the upper side 6 of the carrier 3 and is connected to the frame 4 via another bonding frame 36. The other bonding frame 36 can be constructed similarly to the bonding frame 33. In this embodiment, it is not the frame 4, but the other frame 35, that is connected to the cover 5, which is positioned on the side of the other frame 35 opposite to the frame 4 and connected to it. The stationary chamber wall 10 is connected to and fixed to the carrier 3.

[0048] The MEMS structural element 34 according to the fourth embodiment has another extruder structure 37 arranged in the housing. The other extruder structure 37 is constructed like the extruder structure 8 and includes, in particular, another volumetric chamber 38. The other fixed chamber wall 39 of the other volumetric chamber 38 is connected, for example, to the cover 5. The other extruder structure 37 also has another movable extruder wall 40. The volumetric chamber 13 and the movable extruder wall 12 are arranged in the region of the frame 4 and are laterally surrounded by the frame 4. The other volumetric chamber 38 and the other movable extruder wall 40 are arranged above the frame 4 and in the region of another frame 35 relative to the carrier 3, and are laterally surrounded by the other frame 35. The other extruder structure 37 can be driven such that the other movable extruder wall 40 can move in the x-direction, thereby allowing fluid to be extruded from and transported to the other volumetric chamber 38.

[0049] Volumetric chamber 13 and the other volumetric chamber 38 are arranged directly overlapping each other with respect to the carrier 3 in the MEMS structural element 34 according to the fourth embodiment, i.e., they are not horizontally offset from each other in the x-direction. Correspondingly, extruder structure 8 and another extruder structure 37, or movable extruder wall 12 and another movable extruder wall 40, are arranged directly overlapping each other. The other movable extruder wall 40 is constructed between the carrier 3 and the cover 5. Volumetric chamber 13 and the other volumetric chamber 38 are interconnected via connecting openings 41 to enable vertical fluid flow.

[0050] The MEMS structural element 34 according to the fourth embodiment further includes another actuator 42 arranged in the region of another frame 35 of the housing 2. This other actuator 42 is constructed, for example, as the actuator 29 of the MEMS structural element 32 according to the third embodiment; however, it can also be constructed as the actuator 29 of the MEMS structural elements 1, 25 according to the first or second embodiment. The other extruder structure 37 can be driven by the other actuator 42, and in particular, independently of the extruder structure 8. By using separate actuators 29, 42 for the extruder structures 8, 37 arranged in different planes and driving the movable coupling element 14 in phase, the area effective for the fluid can be doubled, thereby achieving, for example, an increase in sound pressure and, overall, an increase in fluid pressure. In addition to the synchronous movement of the movable coupling element 14, mutually coordinated asynchronous actuators are also conceivable to induce targeted frequency modulation.

[0051] In another variation, the MEMS structural element 34 according to the fourth embodiment is constituted by more than two MEMS structural elements 1, 25, 32 arranged or stacked in the z-direction. In another variation, the MEMS structural element 34 according to the fourth embodiment is constituted by at least two MEMS structural elements 1, 25, 32 arranged laterally side by side in the xy plane. In this case, not only the volume chamber 13 and the movable extruder wall 12, but also the additional volume chamber 38 and the additional movable extruder wall 42 are arranged in a common plane.

[0052] Figure 6 A schematic side cross-sectional view illustrates a MEMS structural element 43 according to a fifth embodiment. The MEMS structural element 43 according to the fifth embodiment has a relative to the embodiment according to... Figure 5 The similarity to the MEMS structural element 34 of the fourth embodiment is explained below. Similar or identical elements are therefore marked with the same reference numerals. The differences between the MEMS structural element 43 according to the fifth embodiment and the MEMS structural element 34 according to the fourth embodiment will be explained below only.

[0053] In this variant, the housing 2 has another frame 35 and another cover 44 in addition to the carrier 3, frame 4, and cover 5. The other frame 35 is arranged above the frame 4 and the cover 5 relative to the upper side 6 of the carrier 3 and is connected to the cover 35 by means of another bonding structure 36. The other cover 44 is arranged above the other frame 35 relative to the carrier 3. In this variant, an additional movable extruder wall 42 is constructed between the cover 5 and the other cover 44. The other cover 44 is arranged above the cover 5 relative to the carrier 3. A stationary chamber wall 15 is connected to the cover 5. An additional stationary chamber wall 39 is connected to the other cover 44. However, it is also possible that the stationary chamber wall 15 is connected to the carrier 3, and the additional stationary chamber wall 39 is connected to the cover 5.

[0054] Unlike the MEMS structural element 34 according to the fourth embodiment, the volume chamber 13 and the additional volume chamber 38, or the movable ejector wall 12 and the additional movable ejector wall 40, of the MEMS structural element 43 according to the fifth embodiment are laterally offset from each other in the x-direction. Each additional volume chamber 38 is accessible via an additional outlet 45 constructed in another cover 44. Each outlet 15 constructed in the cover 5 forms an additional inlet 46 for the additional volume chamber 38. The phase-displaced drive of the movable ejector wall 12 and the additional movable ejector wall 40 in different planes results in the staged compression of the fluid.

[0055] Figure 7 The extruder structures 8 and 37 of MEMS structural elements 1, 25, 32, 34, and 43 are schematically shown in perspective view. The reference numerals used previously remain unchanged below.

[0056] The housing 2 is not shown for clarity. Since the bottom wall 9 and top wall 10 are constructed by the carrier 3 or the cover 5 in the embodiments explained so far, they are also not shown for simplicity.

[0057] The movable extruder wall 12 is mechanically fixedly connected to the sidewall 11 of the movable coupling element 14, thereby enabling movement of the extruder wall 12. For example, the mechanical attachment region 47 between the movable extruder wall 12 and the movable coupling element 14 is constructed entirely along the end face side of the movable extruder wall 12. This is not mandatory, but it brings the advantage of maximizing the possible attachment of the movable extruder wall 12 to the movable coupling element 14.

[0058] Figure 8 The alternative extruder structure 48 is schematically shown in perspective view. The reference numerals used previously remain unchanged below.

[0059] The alternative extruder structure 48 does not include the sidewall 11. Alternatively, the sidewall 11 can be formed by the frame 4 of the housing 2. However, a separate sidewall 11 may also be provided. In any case, if a separate sidewall is provided, the sidewall is constructed immovably and therefore does not form a movable coupling element 14. In the alternative extruder structure 48, instead, the bottom wall 9 and the top wall 10 are constructed to be at least partially movable. It may also be sufficient if only the bottom wall 9 or only the top wall 10 is constructed to be at least partially movable. The bottom wall 9 and the top wall 10 may also be fully movable. Figure 8 Unlike the illustration, the immovable section of the bottom wall 9 can be constructed using a carrier. Similarly, the immovable section of the top wall 10 can be constructed using a cover 5. The movable sections of the bottom wall 9 and the top wall 10 constitute a movable coupling element 14.

[0060] For example, the bottom wall 9 has two movable sections 49 and one immovable section 50. Similarly, the top wall has two movable sections 51 and one immovable section 52. Sections 49, 50, 51, and 52 are separated from each other in a direction perpendicular to the stationary chamber wall 15 and the movable extruder wall 12. Any number of movable sections 49 and 51 and immovable sections 50 and 52 can be provided. Only the movable sections 49 and 51 constituting the movable coupling element 14 are mechanically fixed to the movable extruder wall 12 via attachment regions 47. In this case, the attachment is not on the end face side, but on the upper and lower edges of the movable extruder wall 12, wherein the upper edge of the movable extruder wall 12 faces the top wall 10 and the lower edge of the movable extruder wall 12 faces the bottom wall 9.

[0061] Reference Figure 7 The sidewall 11 of the movable coupling element 14 can also be vertically divided into movable and immovable segments. Regardless of whether the at least one movable coupling element 14 is constructed via the bottom wall 9 and / or the top wall 10 and / or the sidewall 11, the total area of ​​the movable coupling element 14 or the plurality of movable coupling elements 14 has an area ratio of more than 20%, particularly more than 40%, particularly more than 60%, relative to the base area of ​​the extruder structure 8. However, other values ​​may also be used for this area ratio.

[0062] Reference Figure 7 and Figure 8 All movable extruder walls 12 are mechanically fixedly connected to the at least one movable coupling element 14, thereby enabling unidirectional movement of the extruder walls. Some embodiments are explained in the following description, in which bidirectional movement of the movable extruder walls is possible.

[0063] Figure 9 The MEMS structural element 53 according to the sixth embodiment is schematically shown in a side cross-sectional view. The MEMS structural element 53 according to the sixth embodiment has similarity to the MEMS structural elements 1, 25, 32, 34, and 43 described previously according to the first to fifth embodiments. Similar or identical elements are therefore labeled with the same reference numerals. The differences between the MEMS structural element 53 according to the sixth embodiment and the MEMS structural elements 1, 25, 32, 34, and 43 according to the first to fifth embodiments will be explained below.

[0064] The extruder structure 8 has at least two movable coupling elements 14, each mechanically fixedly connected to a movable extruder wall 12. Each directly adjacent movable extruder wall 12 is mechanically fixedly connected to an independently movable coupling element 14 of the extruder structure 8. This enables independent movement of the directly adjacent movable extruder walls 12. In this embodiment, the stationary chamber wall 15 serves no purpose and can be omitted, where the newly generated volumetric unit chamber improves or enhances chip area utilization.

[0065] The extruder structure 8 has at least two movable coupling elements 14 constructed in the bottom wall 9 and / or the top wall 10. The movable coupling elements 14 extend in a direction perpendicular to the movable extruder wall 12 and are configured to be movable in the direction of extension. The movable extruder wall 12 is alternately connected to the movable coupling elements 14.

[0066] Figure 10 A schematic top view showing different planes parallel to the base wall 9. Figure 9 MEMS structural element 53. In Figure 10 The left side shows a top view of the extruder structure 8 running along a plane between the bottom wall 9 and the top wall 10. This view also shows the mechanical attachment regions 47 between the movable extruder wall 12 and the movable coupling element 14. Here, the attachment regions 47 are respectively arranged on opposite end face sides of the movable extruder wall 12.

[0067] exist Figure 10The top view of the movable coupling element 14, constructed in the plane of the top wall 10, is shown in the middle. The attachment region 47, already shown on the left, is actually arranged in the plane of the top wall 10 because the movable coupling element 14 is also constructed or arranged in the plane of the top wall 10. A actuator 29 or a drive element 30 is also exemplarily integrated in the frame 4 and connected to the movable coupling element 14. The actuator 29 is configured to bidirectionally drive the directly adjacent movable extruder walls 12. Thus, the exemplary MEMS structural element 53 according to the sixth embodiment has a total of four movable coupling elements 14. Two drive elements 30 are provided for each movable coupling element 14. Two movable coupling elements 14 are arranged on opposite end face sides of the movable extruder walls 12. The first extruder wall 54 is connected to the inner coupling element 55. The second extruder wall 56 is connected to the outer coupling element 57. Two drive elements 27 are arranged on opposite sides of the movable coupling element 14 in the extending direction, and they are connected to the movable coupling element 14. Figure 10 The top view of the top wall with outlet 15 is additionally shown on the right side.

[0068] Figure 11 A schematic side cross-sectional view is shown of a MEMS structural element 58 according to the seventh embodiment. The MEMS structural element 58 according to the seventh embodiment is similar to the MEMS structural element 53 according to the sixth embodiment. Similar or identical elements are therefore labeled with the same reference numerals. The differences between the MEMS structural element 58 according to the seventh embodiment and the MEMS structural element 53 according to the sixth embodiment will be explained below. Figure 12 The MEMS structural element 58 according to the seventh embodiment is shown in relation to... Figure 10 The top view corresponds to the three top views.

[0069] The extruder structure 8 has two sidewalls 11 that are movable parallel to the upper surface 6 of the bottom wall 9, forming movable coupling elements 14. The sidewalls 11 are arranged in a cavity 16, extending in a direction perpendicular to the movable extruder wall 12, positioned on opposite end faces of the movable extruder wall 12, and movable in the extending direction. The movable extruder wall 12 is alternately connected to the sidewalls 11. The movable extruder wall 12 can be mechanically connected to the bottom wall 9 and / or the top wall 10, respectively, on the side facing away from the sidewalls 11. For example, Figure 12 The intermediate view shows that the movable extruder wall 12 is connected to the top wall 10 because the attachment region 47 is constructed in the plane of the top wall 10.

[0070] The actuator 29 is configured to bidirectionally drive the directly adjacent movable extruder walls 12. Thus, the exemplary MEMS structural element 58 according to the seventh embodiment has a total of two sidewalls 11 arranged on opposite end faces of the movable extruder walls 12 and alternately connected to them. Two drive elements 30 are provided for each sidewall 11. Two drive elements 30 are arranged on opposite sides of the sidewall 11 in the extending direction and are connected to the sidewall 11. In this configuration, when the movable extruder walls 12 move via the sidewalls 11, these movable extruder walls deflect or bend because they are attached to only one side.

[0071] The advantage of this embodiment is that, on the one hand, the parasitic volume flow along the vertical gap 21 is halved because each movable extruder wall 12 in the MEMS structural element 53 according to the sixth embodiment has two free ends, and therefore has twice the vertical gap 21 compared to the MEMS structural element 58 according to the seventh embodiment.

[0072] Figures 13 to 2 6. This diagram schematically illustrates different exemplary attachment possibilities of the movable extruder wall 12 to the movable coupling element 14 or multiple movable coupling elements 14 of the MEMS structural element 53 according to the seventh embodiment. A side cross-sectional view and a top view of the MEMS structural element 53 are shown here. For simplicity, only the housing 2, the movable extruder wall 12, and the attachment region 47 are shown. Furthermore, only the movable extruder wall 11 and its attachment region 47 are shown. A coupling region 59 between the movable coupling element 14 and the drive element 30 is also shown; however, the movable coupling element 14 and the drive element 30 themselves are not shown for simplicity. Figure 17 The arrangement of attachment regions 60, 61, 62, and 63 is schematically shown in the overview diagram. In this case, the movable extruder wall 12 and attachment regions 60, 61, 62, and 63 are shown together only in a matrix.

[0073] Figure 13A configuration is shown in which a first extruder wall 54 and a second extruder wall 56 are connected to a movable coupling element 14 via vertical attachment regions 60 and 61, respectively. The first extruder wall 54 is connected to the movable coupling element 14 via an upper vertical attachment region 60. The second extruder wall 56 is connected to the movable coupling element 14 via a lower vertical attachment region 61. The upper vertical attachment region 60 is constructed in a region of the top wall 10. The lower vertical attachment regions 61 are constructed in regions of the bottom wall 9. Two attachment regions 60 and 61 are provided for each movable extruder wall 12, arranged on opposite planes of the movable extruder wall 12 and oriented vertically relative to the bottom wall 9; these planes are also referred to as end face sides.

[0074] Figure 14 A configuration is shown in which a first extruder wall 54 and a second extruder wall 56 are connected to a movable coupling element 14 via horizontal attachment regions 62 and 63, respectively. The first extruder wall 54 is connected to the movable coupling element 14 via upper and lower horizontal attachment regions 62 and 63. Similarly, the second extruder wall 56 is connected to the movable coupling element 14 via upper and lower horizontal attachment regions 62 and 63. The upper horizontal attachment region 62 is constructed in the region of the top wall 10. The lower horizontal attachment regions 63 are constructed in the region of the bottom wall 9. Two attachment regions 62 and 63 are provided for each movable extruder wall 12, arranged at opposite ends oriented horizontally relative to the bottom wall 9, and at opposite regions and at the ends oriented vertically relative to the bottom wall 9 (end face side). Here, the arrangement of the attachment regions 62 and 63 of the first extruder wall 65 is mirrored with respect to the central axis of the extruder wall 12 that runs parallel to the bottom wall 9, compared to the arrangement of the attachment regions 62 and 63 of the second extruder wall 56.

[0075] Figure 15A configuration is shown in which a first extruder wall 54 and a second extruder wall 56 are connected to a movable coupling element 14 via vertical attachment regions 60 and 61, respectively. The first extruder wall 54 is connected to the movable coupling element 14 via upper and lower vertical attachment regions 60 and 61. Similarly, the second extruder wall 56 is connected to the movable coupling element 14 via upper and lower vertical attachment regions 60 and 61. Two attachment regions 60 and 61 are provided for each extruder wall 12. The vertical attachment regions 60 and 61 of the extruder walls 54 and 56 are arranged on opposite end face sides. Here, the arrangement of the attachment regions 60 and 61 of the first extruder wall 54 is mirrored with respect to the central axis of the extruder wall 12, which runs parallel to the bottom wall 9, compared to the arrangement of the attachment regions 60 and 61 of the second extruder wall 56.

[0076] Figure 16 A configuration is shown in which a first extruder wall 54 and a second extruder wall 56 are connected to a movable coupling element 14 via vertical attachment regions and horizontal attachment regions 47 and 62, respectively. Each extruder wall 12 is provided with two attachment regions 47 and 62. The first extruder wall 54 is connected to the movable coupling element 14 via an upper horizontal attachment region 62 and a vertical attachment region 47. The second extruder wall 56 is similarly connected to the movable coupling element 14 via an upper horizontal attachment region 62 and a vertical attachment region 47. Here, the vertical attachment region 47 extends over the entire end face side of the extruder walls 54 and 56. The upper horizontal attachment regions 62 are respectively arranged in the regions of the end face sides of the extruder walls 54 and 56 opposite to the vertical attachment regions 47. Here, the arrangement of the attachment regions 47 and 62 of the first extruder wall 54 is mirrored with respect to the central axis of the extruder wall 12 perpendicular to the direction of the bottom wall 9, compared to the arrangement of the attachment regions 47 and 62 of the second extruder wall 56.

Claims

1. Microelectromechanical structural components (1, 25, 32, 34, 43, 53, 58) having a housing (2) and an extruder structure (8). in, The housing (2) has a carrier (3), a cover (5) and a frame (4) arranged between the carrier (3) and the cover (5). The extruder structure (8) is arranged in the housing (2), and the extruder structure (8) has a bottom wall (9), a top wall (10), a side wall (11) extending between the bottom wall (9) and the top wall (10), and a plurality of movable extruder walls (12) extending between the bottom wall (9) and the top wall (10) and running parallel to each other and perpendicular to the side wall (11). The bottom wall (9), the top wall (10), the side wall (11) and the movable ejector wall (12) define a plurality of transversely arranged volumetric chambers (13) of the ejector structure (8). The extruder structure (8) has at least one movable coupling element (14) that is mechanically fixedly connected to the movable extruder wall (12). The movable coupling element (14) is formed at least sectionally through the bottom wall (9) and / or through the top wall (10) and / or through the side wall (11). The at least one movable coupling element (14) is movable such that the movable extruder wall (12) can move in a direction parallel to the carrier (3) and perpendicular to the movable extruder wall (12), thereby allowing fluid to be delivered to and expelled from the volume chamber (13).

2. The microelectromechanical structural components (1, 25, 32, 34, 43, 53, 58) according to claim 1. in, The extruder structure (8) has a plurality of fixed chamber walls (15) that extend between the bottom wall (9) and the top wall (10) and are parallel to each other and run parallel to the movable extruder wall (12). The movable extruder wall (12) and the fixed chamber wall (15) are arranged alternately, so that a fixed chamber wall (15) is arranged in each volume chamber (13). All movable ejector walls (12) are mechanically fixedly connected to at least one movable coupling element (14).

3. The microelectromechanical structural components (53, 58) according to claim 1. in, The extruder structure (8) has at least two movable coupling elements (14) that are mechanically fixedly connected to the movable extruder wall (12). The movable ejector walls (12) that are directly adjacent to each other are mechanically fixedly connected to the individual movable coupling elements (14) of the ejector structure (8).

4. The microelectromechanical structure element (1, 25, 32, 34, 43, 53, 58) according to any one of the preceding claims. in, The immovable section (50) of the bottom wall (9) is formed by the carrier (3) and / or the immovable section (52) of the top wall (10) is formed by the cover (5) and / or the immovable section of the side wall (11) is formed by the frame (4).

5. The microelectromechanical structure element (1, 25, 32, 34, 43, 53, 58) according to any one of the preceding claims. in, The at least one movable coupling element (14) is directly connected to the driver (29) or is a component of the driver (29).

6. The microelectromechanical structure element (1, 25, 32, 34, 43, 53, 58) according to any one of the preceding claims. in, The total area of ​​the movable coupling element (14) has an area ratio of more than 20%, especially more than 40%, and especially more than 60% relative to the base area of ​​the extruder structure (8).

7. The microelectromechanical structure element (1, 25, 32, 34, 43, 53, 58) according to any one of the preceding claims. in, The volume chamber (13) is accessible via an inlet (17) constructed in the bottom wall (9) and an outlet (18) constructed in the top wall (10) and / or via an additional inlet constructed in a side wall (11) and an additional outlet constructed in the opposite side wall.

8. The microelectromechanical structure elements (1, 25, 32, 34, 43, 53, 58) according to claim 7. in, The inlet (17) and the outlet (18) and / or the additional inlet and the additional outlet are either constructed in a stationary extruder structure section or in the region of the movable coupling element (14). Wherein, if the inlet (17) and the outlet (18) and / or the additional inlet and the additional outlet are constructed in the region of the movable coupling element (14), then the inlet (17) and the outlet (18) and / or the additional inlet and the additional outlet are arranged such that they remain within the region of their respective volume chambers (13) when the movable coupling element (14) moves.

9. The microelectromechanical structure element (1, 25, 32, 34, 43, 53, 58) according to any one of the preceding claims. It has another extruder structure (37) arranged in the housing. in, The other extruder structure (37) has another bottom wall, another top wall, additional side walls extending between the other bottom wall and the other top wall, and a plurality of additional movable extruder walls (40) extending between the other bottom wall and the other top wall, parallel to each other and perpendicular to the additional side walls. The other bottom wall, the other top wall, the other side wall and the other movable ejector wall (40) define a plurality of other volume chambers (38) arranged laterally side by side in the other ejector structure (37). The other extruder structure (37) has at least one movable coupling element that is mechanically fixedly connected to the other movable extruder wall (40). The other movable coupling element is configured at least sectionally through the other bottom wall and / or through the other top wall and / or through the other side wall. The at least one additional movable coupling element is movable such that the additional movable extruder wall (40) is movable in a direction parallel to the carrier (3) and perpendicular to the additional movable extruder wall (40), thereby allowing fluid to be delivered to and expelled from the additional volume chamber (38).

10. The microelectromechanical structure element (1, 25, 32, 34, 43, 53, 58) according to claim 9. in, The volume chamber (13) and the other volume chamber (38) are arranged overlapping each other. The volume chamber (13) and the other volume chamber (38) are arranged to overlap directly or are laterally offset from each other in the direction of movement of the movable extruder walls (12, 40).

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