High-precision helium pressure leak detection device and method for vehicle gauge chip

Abstract

The invention relates to the technical field of semiconductor manufacturing and detection, and discloses a high-precision helium pressure leak detection device for a vehicle gauge chip, the high-precision helium pressure leak detection device comprises a device housing, a pressure tank used for helium pressure detection is fixed in the device housing, and a helium pressure process operation panel is fixedly arranged on the device housing. The parameter setting module is used for setting different helium pressure process parameters; a helium pressure sensor is fixedly arranged on the equipment shell and used for detecting the input helium pressure in the pressurizing tank, and a vacuum tank is further fixedly arranged in the equipment shell and used for conducting vacuumizing leakage detection on the automobile gauge chip. According to the high-precision helium pressure leakage detection device and method for the vehicle gauge chip, the device is simplified, helium pressure and leakage detection are arranged in one device, the occupied area is compressed, an existing leakage detection technology is not affected, meanwhile, the needed pressure can be automatically set, the automation characteristic is better, and the detection efficiency is improved. And the pressure required by the helium pressing process can be automatically set and adjusted, and the requirements of equipment required by semiconductor production are met.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of semiconductor manufacturing detection, and particularly relates to a high-precision helium press and leak detection device and method for automotive-grade chips. BACKGROUND

[0002] In the existing semiconductor production and manufacturing process, a detection process is used, and specifically, an automotive-grade chip air tightness detection technology is used. After the chip is cut and packaged, the chip needs to be subjected to a leakage test.

[0003] In the existing semi-automatic or manual device, the helium press and leak detection are usually two independent devices, which causes waste of the clean room space; or the press tank and the vacuum tank are the same container, and the helium press and leak detection are both in the same container. When the helium press process is performed, the required pressure adjustment is manually controlled, and residual helium gas is present in the container during the helium press, which causes misjudgment of the leak detection process.

[0004] Therefore, a high-precision helium press and leak detection device and method for automotive-grade chips need to be designed. SUMMARY

[0005] The application aims to provide a high-precision helium press and leak detection device and method for automotive-grade chips to solve the problems in the prior art.

[0006] The application can be achieved by the following technical scheme: A high-precision helium press and leak detection device for automotive-grade chips comprises a device shell, a press tank for helium press detection is fixed in the device shell, a helium press process operation panel is fixed on the device shell and is used for setting different helium press process parameters; A helium pressure sensor one is fixed on the device shell and is used for detecting the input helium pressure in the press tank, a vacuum tank is also fixed in the device shell and is used for vacuumizing and detecting the automotive-grade chip.

[0007] Further, a leak detection process operation panel is also fixed on the device shell and is located on one side of the vacuum tank and is used for setting different leak detection process parameters.

[0008] Further, a compressed air pressure reducing valve, a compressed air pressure sensor, a helium pressure reducing valve and a helium pressure sensor two are fixed on one side of the device shell.

[0009] Further, a pneumatic valve one and a pneumatic valve two are fixed on the pipeline connected with the press tank and are used for controlling the on-off of the gas.

[0010] Further, an air outlet and an air outlet pressure sensor are fixed on one side of the device shell, and the air outlet is used for pumping away the air in the high-precision helium press and leak detection device for automotive-grade chips.

[0011] Further, the compressed air pressure reducing valve, compressed air pressure sensor, helium pressure reducing valve, helium pressure sensor two, air outlet and air exhaust pressure sensor are integrated and fixed on the side of the equipment shell.

[0012] A high-precision pressure helium leak detection method for a car gauge chip, which is detected by using the high-precision pressure helium leak detection device for the car gauge chip, and the method comprises the following steps: S1, the chip is placed in the pressurizing tank, helium is filled into the pressurizing tank, and when the helium pressure in the pressurizing tank is greater than a set pressure value, the helium gas inlet is automatically cut off, the pneumatic valve two is opened, the helium gas in the pressurizing tank is discharged at a very small flow rate, the pressure of the helium gas is slowly reduced, and the pressure of the helium gas in the pressurizing tank becomes a required pressure value; S2, when the pressure helium process is completed, the pneumatic valve one is opened to realize rapid discharge of the helium gas in the interior and release of the internal space of the pressurizing tank for pressure helium; S3, the chip in the pressurizing tank is taken out, air or nitrogen is used to blow off the residual helium gas on the surface, and the surface is ensured to be clean; S4, the purified chip is placed in a vacuum tank connected with a helium mass spectrum leak detector, the vacuum tank is evacuated to a set value, the helium gas in the chip with a leak exists is leaked out, is detected by the leak detector and displays a leak rate value, and the detection is completed.

[0013] The present application has the following beneficial effects: 1, the high-precision pressure helium leak detection device and method for a car gauge chip, wherein the device is simplified, the pressure helium and the leak detection are arranged in one device, the floor area is compressed, the existing leak detection process is not affected, the required pressure can be automatically set, and the automatic characteristic is higher; 2, the high-precision pressure helium leak detection device and method for a car gauge chip, the required pressure of the pressure helium process can be automatically set and adjusted, the structure is simple, the operation is convenient, and the device requirement of semiconductor production is met. BRIEF DESCRIPTION OF DRAWINGS

[0014] The present application will be further described below in combination with the drawings.

[0015] Figure 1 is a structural schematic view of the high-precision pressure helium leak detection device of the present application; Figure 2 is a top view of the high-precision pressure helium leak detection device of the present application; Figure 3 is a side view of the high-precision pressure helium leak detection device of the present application; Figure 4 is a system schematic view of the high-precision pressure helium leak detection device of the present application.

[0016] The annotations in the attached figures are explained as follows: 1. Pressurization tank; 2. Helium compression process operation panel; 3. Helium pressure sensor one; 4. Vacuum tank; 5. Leak detection process operation panel; 6. Compressed air pressure sensor; 7. Helium pressure reducing valve; 8. Helium pressure sensor two; 9. Exhaust vent; 10. Exhaust pressure sensor; 11. Pneumatic valve one; 12. Pneumatic valve two; 13. Compressed air pressure reducing valve. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] A high-precision helium pressure leak detection device for automotive-grade chips, wherein the high-precision helium pressure leak detection device includes a pressurization tank 1 fixed on the device housing, and the interior of the pressurization tank 1 forms a space to pressurize the automotive-grade chip with helium to meet the testing environment of the automotive-grade chip.

[0019] The high-precision helium pressure leak detection equipment also includes a helium pressure process operation panel 2 installed on the equipment shell, on which different process parameters can be set to meet different helium pressure process requirements.

[0020] The high-precision helium pressure leak detection equipment also includes a helium pressure sensor 3, which is located on one side of the pressurization tank 1. The sensor's monitoring end is used to monitor the internal pressure change of the pressurization tank 1 during the helium pressure process.

[0021] A vacuum tank 4 is also fixed inside the equipment casing, which creates a vacuum space inside the tank for vacuuming and leak detection of automotive-grade chips.

[0022] A leak detection process operation panel 5 is also fixedly installed on the equipment casing. The leak detection process operation panel 5 is located on one side of the vacuum tank 4. Different process parameters can be set on the leak detection process operation panel 5 to meet different leak detection process requirements.

[0023] A compressed air pressure reducing valve 13, a compressed air pressure sensor 6, a helium pressure reducing valve 7, a second helium pressure sensor 8, an exhaust port 9, and an exhaust pressure sensor 10 are fixedly installed on one side of the equipment housing. The compressed air pressure reducing valve 13, the compressed air pressure sensor 6, the helium pressure reducing valve 7, the second helium pressure sensor 8, the exhaust port 9, and the exhaust pressure sensor 10 are integrated and fixedly installed on the side of the equipment housing. The compressed air pressure sensor 6 provides suitable compressed air for the automotive-grade high-precision helium pressure leak detection equipment. Pneumatic valve 11 and pneumatic valve 22 are fixedly installed on the pipeline connected to the pressurization tank 1 to control the gas flow.

[0024] Among them, helium pressure sensor 8 is used to monitor the pressure change of helium supplied in the pressurization tank 1 of the high-precision helium pressure leak detection equipment for automotive-grade chips, in order to complete the helium pressure process. Vent 9 is used to remove air from inside the high-precision helium pressure leak detection equipment for automotive-grade chips, to prevent personnel injury in the event of helium leakage inside the equipment.

[0025] The working principle is as follows: First, helium is filled into the pressurization tank 1. When the helium pressure sensor 28 detects that the helium pressure in the pressurization tank is greater than the set pressure value, it will automatically cut off the helium at the inlet and open the pneumatic valve 212 to control the discharge of helium from the pressurization tank at a very small flow rate, so that the helium pressure slowly decreases and the helium pressure in the pressurization tank becomes the required pressure value.

[0026] When the helium compression process is complete, open the pneumatic valve 11 to quickly discharge the internal helium gas and release the internal space of the pressurized helium tank 1.

[0027] In this embodiment, the footprint is reduced and the integration of the equipment is improved; it will not affect the existing leak detection process and improves the accuracy of detection; it can automatically set and adjust to the pressure required for the helium compression process, making it more automated.

[0028] A high-precision helium pressure leak detection method for automotive-grade chips, the method comprising the following steps: S1. Place the chip in the pressure tank 1, fill the pressure tank 1 with helium, and when the helium pressure sensor 8 detects that the helium pressure in the pressure tank is greater than the set pressure value, it will automatically cut off the helium at the inlet and open the pneumatic valve 12 to control the helium in the pressure tank to be discharged at a very small flow rate, so that the helium pressure slowly decreases and the helium pressure in the pressure tank becomes the required pressure value. S2. When the helium compression process is completed, open the pneumatic valve 11 to quickly discharge the internal helium gas and release the internal space of the pressurized helium tank 1.

[0029] S3. Remove the chip from the pressurized container 1 and use air or nitrogen to blow away any residual helium on the surface to ensure the surface is clean. S4. Place the purified chip into the vacuum tank 4 connected to the helium mass spectrometer leak detector and evacuate it. After the vacuum reaches the set value, the helium gas pressed into the chip with the leak will leak out and be detected by the leak detector, which will display the leak rate value, thus completing the detection.

[0030] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. A high-precision helium pressure leak detection device for automotive-grade chips, the high-precision helium pressure leak detection device comprising a device housing, characterized in that, The device housing is equipped with a pressurizing tank (1) for helium pressure detection, and a helium pressure process operation panel (2) is fixed on the device housing for setting different helium pressure process parameters. The device housing is fixedly equipped with a helium pressure sensor (3) for detecting the input helium pressure in the pressurization tank (1). The device housing is also fixedly equipped with a vacuum tank (4) for vacuuming and leak detection of automotive-grade chips.

2. The high-precision helium pressure leak detection device for automotive-grade chips according to claim 1, characterized in that, The device casing is also fixedly equipped with a leak detection process operation panel (5), which is located on one side of the vacuum tank (4) and is used to set different leak detection process parameters.

3. The high-precision helium pressure leak detection device for automotive-grade chips according to claim 1, characterized in that, The device housing is fixedly provided with a compressed air pressure reducing valve (13), a compressed air pressure sensor (6), a helium pressure reducing valve (7), and a second helium pressure sensor (8) on one side.

4. The high-precision helium pressure leak detection device for automotive-grade chips according to claim 3, characterized in that, The pressurized tank (1) is connected to a pipeline with a pneumatic valve one (11) and a pneumatic valve two (12) fixedly installed to control the gas flow.

5. The high-precision helium pressure leak detection device for automotive-grade chips according to claim 3, characterized in that, An exhaust vent (9) and an exhaust pressure sensor (10) are fixedly provided on one side of the device housing. The exhaust vent (9) is used to draw away the air inside the automotive-grade high-precision helium pressure leak detection device.

6. The high-precision helium pressure leak detection device for automotive-grade chips according to claim 5, characterized in that, The compressed air pressure reducing valve (13), compressed air pressure sensor (6), helium pressure reducing valve (7), helium pressure sensor II (8), exhaust port (9) and exhaust pressure sensor (10) are integrated and fixed on the side of the equipment housing.

7. A high-precision helium pressure leak detection method for automotive-grade chips, comprising using the high-precision helium pressure leak detection equipment for automotive-grade chips as described in any one of claims 1-6, characterized in that, The method includes the following steps: S1. Place the chip in the pressure tank (1), fill the pressure tank (1) with helium, and when the helium pressure sensor (8) detects that the helium pressure in the pressure tank is greater than the set pressure value, it will automatically cut off the helium at the inlet and open the pneumatic valve (12) at the same time to control the helium in the pressure tank to be discharged at a very small flow rate, so that the helium pressure slowly decreases and the helium pressure in the pressure tank becomes the required pressure value. S2. When the helium compression process is completed, open the pneumatic valve (11) to quickly discharge the internal helium gas and release the internal space of the pressurized helium tank (1). S3. Remove the chip from the pressurized container (1) and use air or nitrogen to blow away the residual helium on the surface to ensure the surface is clean. S4. Place the purified chip into a vacuum tank (4) connected to the helium mass spectrometer leak detector and evacuate it. After the vacuum reaches the set value, the helium gas pressed into the chip with the leak will leak out and be detected by the leak detector and the leak rate value will be displayed, thus completing the detection.

Images